JP2006035139A - Ultrasonic cleaner - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a low cost ultrasonic cleaner which can perform uniform cleaning with a simple structure. <P>SOLUTION: This ultrasonic cleaner comprises at least one cleaning tank storing at least a cleaning liquid, a plurality of ultrasonic vibrators installed in the cleaning tank, an oscillator for driving the vibrators, and a holding fixture for holding a material to be cleaned in the cleaning tank, and the oscillator can periodically change an oscillation frequency, and at least two ultrasonic vibrators among the plurality of the ultrasonic vibrators installed in the cleaning tank have natural frequencies different from each other. The ultrasonic cleaner comprises at least the one cleaning tank storing at least the cleaning liquid, the plurality of ultrasonic vibrators installed in the cleaning tank, the oscillator for driving the vibrators, and the holding fixture for holding the material to be cleaned in the cleaning tank, and comprises an oscillation mechanism for circularly oscillating the holding fixture. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an ultrasonic cleaning apparatus, and more particularly to a low-cost ultrasonic cleaning apparatus that can perform uniform cleaning with a simple configuration.

  Conventionally, an ultrasonic cleaning apparatus is used for cleaning optical parts and semiconductor parts. The ultrasonic cleaning apparatus includes, for example, a cleaning tank for storing a cleaning liquid, an ultrasonic vibrator made of, for example, a ceramic piezoelectric element provided on an outer wall surface of the cleaning tank, and an oscillator for driving the ultrasonic vibrator. It is. When a modulation voltage having a frequency corresponding to the natural frequency of the ultrasonic vibrator is applied by the oscillator, the ultrasonic vibrator vibrates at the natural frequency, and the ultrasonic waves are irradiated into the cleaning liquid stored in the cleaning tank by the vibration. Then, a standing wave is formed with the cleaning liquid surface and the tank wall as a boundary. And the washing | cleaning liquid which hits the antinode of a standing wave vibrates greatly, and the washing | cleaning material hold | maintained in the washing tank by the holding jig etc. is wash | cleaned with the sound pressure by this vibration.

  However, the waveform of the standing wave in the cleaning liquid is determined by the shape of the cleaning tank, the position and frequency of the ultrasonic vibrator, the type of cleaning liquid, the liquid temperature, the liquid depth, etc. Then the position of the standing wave belly and node does not change. Since the cleaning liquid hardly oscillates at the position of the standing wave node, the cleaning object which is held at the position of the standing wave node is not sufficiently cleaned. For this reason, there has been a problem that sufficient cleaning cannot be performed, or cleaning cannot be performed uniformly and uneven cleaning occurs.

  Therefore, change the position of the antinode of the standing wave so that the washed wave is uniformly applied to the object to be cleaned. An ultrasonic cleaning device is disclosed that includes a plurality of ultrasonic transducers that vary in frequency with respect to time or have different frequencies (see, for example, Patent Documents 1 to 3).

  In addition, the position of the cleaning object is changed over time, the uneven part of the standing wave and the lack of cleaning are eliminated so that the antinode part of the standing wave touches the cleaning object uniformly, and the cleaning object is washed in the cleaning solution in order to perform uniform cleaning. A method of changing the position of the cleaning object by moving up and down is also performed.

  On the other hand, in recent years, with the increasing demand for digital cameras, camera-equipped mobile phone lenses, medical lenses, electronic parts and metal parts used in combination with these lenses, they are suitable for cleaning these small precision parts. The demand for cleaning equipment has increased.

JP 7-171526 A Japanese Patent Laid-Open No. 8-131978 JP 2001-198421 A

  An object of the present invention is to provide a low-cost ultrasonic cleaning apparatus that can perform uniform cleaning with a simple configuration.

  To achieve the above object, the present invention provides at least one cleaning tank for storing a cleaning liquid, a plurality of ultrasonic vibrators provided in the one cleaning tank, and an oscillator for driving the ultrasonic vibrators. An ultrasonic cleaning apparatus comprising a holding jig for holding a cleaning object in the cleaning tank, wherein the oscillator is capable of periodically changing an oscillation frequency, and at least the one cleaning tank The ultrasonic cleaning apparatus is characterized in that at least two of the plurality of ultrasonic vibrators provided in the above have different natural frequencies.

  As described above, at least one cleaning tank, a plurality of ultrasonic vibrators provided in the one cleaning tank, an oscillator that drives the vibrator, and a holding jig that holds a cleaning object in the cleaning tank, And the oscillator is capable of periodically changing the oscillation frequency, and at least two of the plurality of ultrasonic vibrators provided in the at least one cleaning tank have different natural frequencies. It is possible to drive the ultrasonic vibrators having different natural frequencies depending on the oscillation frequency periodically changed by one oscillator. In this way, the wavelength and amplitude of the standing wave generated in the cleaning liquid can be changed with time, and the position of the antinode of the standing wave can be moved, so that the ultrasonic vibration mode of the cleaning liquid becomes uniform and uniform and effective. Cleaning is possible. In addition, since a plurality of ultrasonic transducers are driven by one oscillator, the number of components such as an oscillator can be reduced, and the cost can be reduced by simplifying the control circuit configuration. It is also suitable for downsizing the cleaning device.

In this case, the ultrasonic cleaning apparatus includes a plurality of cleaning tanks, and a plurality of ultrasonic vibrators provided in at least two cleaning tanks among the plurality of cleaning tanks are driven by the one oscillator. (Claim 2).
Thus, since a plurality of ultrasonic vibrators provided in two or more cleaning tanks among a plurality of cleaning tanks can be driven by a single oscillator, the number of components such as oscillators can be reduced, and the circuit configuration can be simplified. The effect of conversion becomes more prominent. In particular, a small cleaning tank requires a small amount of electric power, so that the merit of such a configuration is great.

The plurality of cleaning tanks may store cleaning liquids having at least one of a liquid type, a liquid temperature, and a liquid depth that are different from each other.
In this way, in the case of containing cleaning liquids in which at least one of the cleaning conditions such as the liquid type, liquid temperature, and liquid depth (liquid volume) is different from each other, an ultrasonic vibrator corresponding to the difference in the cleaning conditions is provided in each cleaning tank It is necessary to prepare. Conventionally, it was necessary to prepare different oscillators for each cleaning tank accordingly, but in the present invention, the frequency of the oscillator is periodically changed to vibrate ultrasonic vibrators having different natural frequencies. The washing tank can also be driven by the same oscillator.

The natural frequency of the ultrasonic transducer is preferably in the range of 25 to 70 kHz.
Thus, if the natural frequency of the ultrasonic vibrator is different from each other within the range of 25 to 70 kHz, such a natural frequency vibrator is used for a conventional ultrasonic cleaning apparatus, and is inexpensive. A highly reliable one can be used. An oscillator that can be changed periodically in such a frequency range is also preferable because it can be easily prepared.

Moreover, it is preferable that the frequency interval of the natural frequency of the ultrasonic transducer is 0.5 to 5 kHz.
As described above, if the frequency interval of the different natural frequencies of the ultrasonic transducers is any of 0.5 to 5 kHz, even if the number of ultrasonic transducers is large, within the limited variable frequency region of the oscillator. Different frequencies can be assigned to them, and a sufficient frequency interval can be obtained to move the position of the standing wave to clean the washing object uniformly. The frequency intervals may be equal intervals or unequal intervals.

The oscillator preferably has a repetition period of 4 to 12 times / min.
As described above, when the repetition period of the oscillator is 4 to 12 times / min, the repetition period is sufficient to move the position of the standing wave and uniformly clean the cleaning object. It is a repetition cycle that is also suitable when combined with.

Moreover, it is preferable that the ultrasonic cleaning apparatus includes a swing mechanism that swings the holding jig in a circular arc.
As described above, if the holding jig is provided with a rocking mechanism for rocking the arc, the cleaning object held in the cleaning liquid can be arc-oscillated by the holding jig, and the washing object can be in various states. Therefore, more uniform cleaning is possible. Moreover, since the effect which stirs a washing | cleaning liquid is also acquired, the higher cleaning effect is acquired.

Further, it is preferable that the swing mechanism swings the holding jig in an arc in synchronization with a repetition cycle of the oscillator.
In this way, if the swing mechanism swings the holding jig in an arc in synchronization with the repetition cycle of the oscillator, the cleaning object can always be moved to a position where the amplitude of the standing wave is particularly large. A high cleaning effect can be obtained.

The oscillation width of the arc oscillation is determined according to any one or more of the natural frequency of the ultrasonic transducer, the type of cleaning liquid stored in the cleaning tank, the liquid temperature, and the liquid depth. It is preferable that it is a thing (Claim 9).
As described above, the oscillation width of the arc oscillation is determined according to any one or more of the natural frequency of the ultrasonic transducer, the type of the cleaning liquid stored in the cleaning tank, the liquid temperature, and the liquid depth. If so, the oscillation width can be such that the antinodes of the standing waves determined by these conditions more uniformly hit the object to be cleaned, so that uniform cleaning can be performed more effectively.

The swing mechanism includes a motor, at least one pair of eccentric cams that rotate by the motor, and a support mechanism that is supported by the eccentric cam and supports the holding jig, and is rotated by the motor. Preferably, the moving eccentric cam swings the holding mechanism in an arc by swinging the support mechanism in an arc.
In this way, if the eccentric cam that rotates by the motor swings the holding jig in a circular arc by swinging the support mechanism pivotally supported by the eccentric cam, the eccentric cam is created by the rotational movement of the eccentric cam. Since the arc swinging motion transmitted to the holding jig is effectively transmitted to the holding jig via the support mechanism, the cleaning object held by the holding jig can be easily and effectively arc-swinged.

Further, it is preferable that the swing mechanism can adjust a swing width by changing a position where the support mechanism is pivotally supported by the eccentric cam.
Thus, if the swinging mechanism can adjust the swinging width by changing the position where the support mechanism is pivotally supported by the eccentric cam, the swinging mechanism can be adjusted only by changing the pivoting position according to the cleaning conditions. The moving width can be easily adjusted, and the swing width can be set so that the cleaning object can be cleaned uniformly even under different cleaning conditions.

In addition, it is preferable that the position to support the shaft is variable by a plurality of shaft holes that are spirally formed in the eccentric cam.
As described above, if the position where the shaft is supported can be changed by a plurality of shaft holes spirally formed in the eccentric cam, the position where the shaft is supported can be easily changed. It can be adjusted easily, and the swinging width can be set so that the cleaning object can be cleaned uniformly.

  The present invention also includes at least one cleaning tank that contains a cleaning liquid, at least one ultrasonic vibrator provided in the one cleaning tank, an oscillator that drives the ultrasonic vibrator, and a cleaning object An ultrasonic cleaning apparatus comprising: a holding jig for holding the holding jig in the cleaning tank, wherein the ultrasonic cleaning apparatus includes a swinging mechanism for swinging the holding jig in an arc. (Claim 13).

  As described above, at least one cleaning tank for storing the cleaning liquid, at least one ultrasonic vibrator provided in the one cleaning tank, an oscillator for driving the ultrasonic vibrator, and the cleaning object in the cleaning tank. If the ultrasonic cleaning apparatus has a holding mechanism that holds the holding jig in a circular arc and swings the holding jig in an arc, the cleaning object held in the cleaning liquid by the holding jig is arc-oscillated. Since the cleaning object reliably hits standing waves in various states generated in the cleaning liquid, more uniform cleaning can be performed. Further, since the effect of stirring the cleaning liquid can be obtained, a higher cleaning effect can be obtained.

In this case, the oscillation width of the arc oscillation is determined according to any one or more of the natural frequency of the ultrasonic transducer, the type of the cleaning liquid stored in the cleaning tank, the liquid temperature, and the liquid depth. It is preferable that it is a thing (Claim 14).
As described above, the oscillation width of the arc oscillation is determined according to any one or more of the natural frequency of the ultrasonic transducer, the type of the cleaning liquid stored in the cleaning tank, the liquid temperature, and the liquid depth. If so, the oscillation width can be such that the antinodes of the standing waves determined by these conditions more uniformly hit the object to be cleaned, so that uniform cleaning can be performed more effectively.

The swing mechanism includes a motor, at least one pair of eccentric cams that rotate by the motor, and a support mechanism that is supported by the eccentric cam and supports the holding jig, and is rotated by the motor. Preferably, the moving eccentric cam swings the holding mechanism in an arc by swinging the support mechanism in an arc.
In this way, if the eccentric cam that rotates by the motor swings the holding jig in a circular arc by swinging the support mechanism pivotally supported by the eccentric cam, the eccentric cam is created by the rotational movement of the eccentric cam. Since the arc swinging motion transmitted to the holding jig is effectively transmitted to the holding jig via the support mechanism, the cleaning object held by the holding jig can be easily and effectively arc-swinged.

Preferably, the swing mechanism is capable of adjusting a swing width by changing a position where the support mechanism is pivotally supported by the eccentric cam.
Thus, if the swinging mechanism can adjust the swinging width by changing the position where the support mechanism is pivotally supported by the eccentric cam, the swinging mechanism can be adjusted only by changing the pivoting position according to the cleaning conditions. The moving width can be easily adjusted, and the swing width can be set so that the cleaning object can be cleaned uniformly even under different cleaning conditions.

In addition, it is preferable that the position where the shaft is supported is made variable by a plurality of shaft holes formed in a spiral shape in the eccentric cam.
As described above, if the position where the shaft is supported can be changed by a plurality of shaft holes spirally formed in the eccentric cam, the position where the shaft is supported can be easily changed. It can be adjusted easily, and the swinging width can be set so that the cleaning object can be cleaned uniformly.

  According to the present invention, a low-cost ultrasonic cleaning apparatus that can perform uniform cleaning with a simple configuration is provided. In particular, the apparatus having a small washing tank is suitable for washing small precision parts and the like uniformly and at low cost.

Hereinafter, the present invention will be described in detail.
As described above, various techniques have been disclosed in order to solve problems such as uneven cleaning and insufficient cleaning of the ultrasonic cleaning apparatus. However, these techniques include an oscillation device for each ultrasonic vibrator. It requires a complicated control method. Moreover, the method of moving the cleaning object up and down did not provide a sufficient effect on the above problem.
In recent years, there has been an increasing demand for a small ultrasonic cleaning apparatus, and in order to reduce the introduction cost of the apparatus, there has been a demand for a low-cost apparatus capable of uniform cleaning.

  In order to meet such demands, the present inventors have conventionally used a plurality of ultrasonic vibrators provided in one cleaning tank having the same natural frequency, and the frequency of an oscillator for driving the same is variable. In contrast, at least two of the ultrasonic transducers having different natural frequencies are driven by a periodically changing oscillator. In this way, among the plurality of ultrasonic vibrators, the ultrasonic vibrator having a natural frequency that matches the oscillation frequency mainly vibrates. As a result, since the ultrasonic transducer whose frequency is matched changes with time due to the periodic change of the oscillation frequency, the ultrasonic transducers that vibrate at different frequencies vibrate at different timings. In this way, the wavelength and amplitude of the standing wave generated in the cleaning liquid fluctuate with time, and the position of the antinode of the standing wave also moves, so the ultrasonic vibration mode of the cleaning liquid becomes uniform and uniform and effective cleaning is possible. It becomes. In addition, since a plurality of vibrators can be driven by one oscillator, the number of parts such as an oscillator can be reduced and the circuit configuration can be simplified. In addition, in the method of moving the cleaning object up and down that has been adopted in the conventional ultrasonic cleaning apparatus, the cleaning object only moves linearly within a narrow limited range, and the effect of sufficient uniform cleaning is obtained. It was not obtained. On the other hand, the inventors of the present invention can oscillate the cleaning object in a circular arc, so that the cleaning object reliably hits standing waves in various states, which enables more uniform cleaning, and the cleaning liquid is stirred. Therefore, it was conceived that a higher cleaning effect can be obtained. Then, the best apparatus configuration for realizing the above method was examined and the present invention was completed.

  Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings. However, the present invention is not limited to these embodiments.

FIG. 1 is a schematic view showing an example of an ultrasonic cleaning apparatus according to an embodiment of the present invention.
The ultrasonic cleaning apparatus 10 contains, for example, a cleaning tank 2 having a polygonal cross section and a plurality of ultrasonic vibrators 3 a, 3 b, 3 c, 3 d provided on each surface of the polygonal cleaning tank 2. And one oscillator 4 for driving the ultrasonic transducers 3a to 3d, and a holding jig 6 such as a cleaning basket for holding the cleaning object 5 in the cleaning tank. The oscillator 4 can periodically change the oscillation frequency, and the ultrasonic transducers 3a to 3d have different natural frequencies.
With such a configuration, the ultrasonic cleaning apparatus 10 can perform uniform and effective cleaning, and the cost can be reduced by reducing the number of components such as an oscillator and simplifying the control circuit configuration. In addition, the cleaning apparatus is suitable for downsizing. Specific operations will be described later.

A cleaning liquid receptacle 7 is provided at the peripheral edge of the opening of the polygonal cleaning tank 2, and the cleaning liquid overflowing from the cleaning tank 2 is received by the cleaning liquid receiver 7 and can be recovered, reused, etc. thereafter. FIG. 1 exemplarily shows a case where four ultrasonic transducers are provided, but there is no particular limitation as long as there are a plurality of ultrasonic transducers, and it can be determined according to the shape, volume, type of cleaning object, etc. of the cleaning tank. If the cleaning tank is a small one having a volume of about 2 to 3 liters, for example, it can be provided with about 3 to 10 ultrasonic transducers. If the volume is about 20 to 30 liters, it can be provided with about 18 to 80 ultrasonic transducers. The cleaning liquid 1 is, for example, pure water or an organic solvent, and the liquid temperature can be set to, for example, 5 to 90 ° C.
In this case, when the number of ultrasonic vibrators provided in one cleaning tank is large, it is not always necessary that the natural frequencies of all the ultrasonic vibrators are different from each other. For example, when 50 ultrasonic transducers are provided, they can be divided into 5 groups and those having 5 kinds of natural frequencies can be used and arranged in one washing tank.

The ultrasonic cleaning apparatus 10 includes a plurality of cleaning tanks (not shown) in addition to the cleaning tank 2, and drives a plurality of ultrasonic vibrators provided in at least two cleaning tanks among the plurality of cleaning tanks by a single oscillator. You can also For example, when there are eight cleaning tanks, the ultrasonic vibrators of all cleaning tanks may be driven by one oscillator, or the ultrasonic vibrators of four cleaning tanks are driven by two oscillators. May be. In this way, the effects of reducing the number of components such as an oscillator and simplifying the circuit configuration become more prominent.
In addition, although the ultrasonic vibrators provided in one cleaning tank have different natural frequencies, there may be ultrasonic vibrators having the same natural frequency as long as the cleaning tanks are different.

  The plurality of cleaning tanks can store cleaning liquids having at least one of a liquid type, a liquid temperature, and a liquid depth (liquid amount) different from each other. When the cleaning conditions such as the liquid type, liquid temperature, and liquid depth of the cleaning liquid are different, each cleaning tank needs to be equipped with an ultrasonic vibrator corresponding to the difference in the cleaning conditions in order to generate an appropriate standing wave. Therefore, conventionally, it was necessary to prepare different oscillators for each cleaning tank accordingly, but in the present invention, since the frequency of the oscillator is periodically changed and an ultrasonic vibrator having different natural frequencies is provided, Both cleaning tanks can be driven by the same oscillator.

  FIG. 2 is an explanatory view for explaining the operation of the ultrasonic cleaning apparatus of FIG. 1, and (a) to (f) are explanatory views showing the state of ultrasonic waves irradiated by the respective ultrasonic vibrators with respect to the oscillation frequency of the oscillator. (G) is a graph schematically showing the amplitude intensity of each ultrasonic transducer with respect to the frequency of the oscillator.

First, it is assumed that the natural frequencies of the ultrasonic transducers 3a to 3d are f1 to f4, respectively.
First, when the oscillation frequency is fs, since the oscillation frequency does not match any of the natural frequencies of the ultrasonic transducers 3a to 3d, each ultrasonic transducer has a small amplitude when driven at the oscillation frequency fs. And is irradiated with ultrasonic waves having a small amplitude as schematically shown by the hatched portion (FIG. 2A). Thus, each ultrasonic transducer vibrates with a small amplitude when driven at a frequency that does not perfectly match the natural frequency.

Next, when the oscillation frequency changes to f1, it matches with the natural frequency of the ultrasonic transducer 3a. Therefore, the ultrasonic transducer 3a vibrates with a large amplitude, and the amplitude increases as schematically shown by the hatched portion. Large and strong ultrasonic waves are emitted, and the other ultrasonic transducers emit ultrasonic waves with a small amplitude (FIG. 2B).
Thereafter, when the oscillation frequency changes to f2, f3, and f4, the ultrasonic transducers 3b, 3c, and 3d respectively radiate ultrasonic waves with large amplitude, and the other ultrasonic transducers radiate ultrasonic waves with small amplitude. (FIGS. 2C to 2E).
When the oscillation frequency changes to fe, the oscillation frequency does not match any of the natural frequencies of the respective ultrasonic transducers, so that each ultrasonic transducer irradiates ultrasonic waves having a small amplitude (FIG. 2 (f)). .
Thus, each ultrasonic transducer | vibrator 3a-3d amplitudes with the amplitude intensity according to the oscillation frequency (FIG.2 (g)).

  Then, by changing the oscillation frequency in this way, the ultrasonic transducers whose natural frequencies are matched with each other change sequentially, so that each ultrasonic transducer has a different frequency (ie, different wavelength) at different positions at different timings. A standing wave is formed in the cleaning liquid. Since such a change in the oscillation frequency is repeated periodically, the position of the standing wave is periodically and effectively changed by such an action, and uniform and effective cleaning of the cleaning object is achieved. This is possible with two oscillators.

  For example, an ultrasonic vibrator using a ceramic piezoelectric element or the like can be used. The natural frequency is not particularly limited as long as it can effectively generate a standing wave in the cleaning liquid, but if it is within the range of 25 to 70 kHz, such natural frequency, for example, ultrasonic waves such as 28 kHz and 40 kHz. The vibrator is used in a conventional ultrasonic cleaning apparatus, and can be used with a high cleaning effect, low cost and high reliability. In addition, an oscillator that can be periodically changed in such a frequency range has been used in the related art and is preferable because it can be easily prepared.

  Further, if the frequency interval of the natural frequency of the ultrasonic transducer is any of 0.5 to 5 kHz, for example, 2.5 kHz, even if the number of ultrasonic transducers is large, the frequency range within the limited variable frequency range of the oscillator is limited. Thus, different frequencies can be assigned to them, and the position of the standing wave can be moved so that the frequency interval is sufficient to clean the washing object uniformly. The frequency intervals may be equal intervals or unequal intervals, but for example, an equal interval arrangement of 2.5 kHz can be adopted.

  Further, if the repetition period of the oscillator at this time is 4 to 12 times / min, the repetition period is sufficient to move the position of the standing wave and perform uniform cleaning, and is combined with an oscillation mechanism described later. The repetition cycle is also suitable in some cases. The oscillation frequency characteristic is not particularly limited as long as it periodically changes, and may be a sine wave, sawtooth wave, triangular wave, or the like, or may be discontinuously changed. Good.

  The ultrasonic cleaning device 10 preferably includes a swing mechanism 20 that swings the holding jig 6 in an arc. FIG. 3 is a schematic perspective perspective view showing an example of such a swing mechanism. The swing mechanism 20 includes, for example, a motor 21, a pair of eccentric cams 24 a and 24 b that are connected to the motor 21 to rotate, and a support mechanism 25 that is supported by the eccentric cams 24 a and 24 b and supports the holding jig 6. Can be provided. The motor 21 and the eccentric cams 24a and 24b can be connected by a pulley 22, a timing belt 23, and the like. The support mechanism 25 includes a support member 25a that supports the holding jig 6, a support member 25b that is pivotally supported by the eccentric cams 24a and 24b, and a support member 25c that connects them. The support mechanism 25 may further include a support member 25d, and the support members 25d may support the plurality of holding jigs 6 and 6 '' provided in the plurality of cleaning tanks 2 and 2 ''.

  It is preferable that the swinging mechanism 20 can adjust the swinging width by changing the position where the support mechanism 25 is pivotally supported by the eccentric cams 24a and 24b. For example, the position for pivotally supporting the support mechanism 25 can be made variable by a plurality of shaft holes 26 that are spirally drilled at the same position of the eccentric cams 24a and 24b. In this way, if the plurality of shaft holes 26 are formed in a spiral shape, each shaft hole has a different distance from the rotation shaft of the eccentric cam, that is, the amount of eccentricity. The amount can be changed, whereby the swinging width can be easily adjusted. In this case, in order to obtain a desired swinging width, it is only necessary to support the shaft with a shaft hole having a half of the eccentric amount. For example, in FIG. 3, the amount of eccentricity from the rotation axis of the shaft hole 26 on which the support member 25b is pivotally supported is X, so the swinging width is 2X.

  The swing width of the arc swing is preferably determined according to any one or more of the natural frequency of the ultrasonic transducers 3a to 3d, the liquid type of the cleaning liquid 1, the liquid temperature, and the liquid depth. . Since the position of the standing wave in the cleaning liquid is determined by these conditions, if the oscillation width is determined accordingly, the oscillation width can be such that the antinode of the standing wave hits the washing object more uniformly. , More effective uniform cleaning.

  Further, it is preferable that the rocking mechanism 20 rocks the holding jig 6 in an arc in synchronization with the repetition period of the oscillator 4. In such a case, for example, a position where an ultrasonic wave with a large amplitude formed by an ultrasonic vibrator that vibrates with a large amplitude in alignment with the oscillation frequency of the oscillator 4 or a position where the amplitude of a standing wave is particularly large is used. Therefore, it is possible to always move the object to be cleaned and to obtain a higher cleaning effect.

FIG. 4 is a schematic view showing a state of the circular swing of the cleaning object 5 by the swing mechanism of FIG.
In this way, if the cleaning object 5 is swung in a circular arc with a swing width set under a predetermined condition, and preferably is swung in a circular arc in synchronization with the repetition cycle of the oscillator, the cleaning object has an antinode of a standing wave. It hits effectively and a uniform and high cleaning effect is obtained. The synchronization at this time does not necessarily have to be the same as the cycle of the oscillator and the cycle of the circular arc swing. For example, three cycles of arc swing may be performed during one cycle of the oscillator, or two cycles of arc swing may be performed during three cycles of the oscillator.

  Note that the swing mechanism exemplified by such a swing mechanism 20 drives a plurality of ultrasonic transducers having different natural frequencies from each other by an oscillator that periodically changes the oscillation frequency as shown in FIG. By providing the ultrasonic cleaning apparatus, the effect of uniform cleaning can be exhibited particularly. However, even if the ultrasonic cleaning apparatus is used in other ultrasonic cleaning apparatuses, it can only shake linearly such as up and down movement. Compared to the moving mechanism, it is possible to obtain an effect of washing uniformly.

FIG. 5 is a schematic view showing an example of an ultrasonic cleaning apparatus according to another embodiment of the present invention.
The ultrasonic cleaning apparatus 10 ′ includes, for example, a cleaning tank 2 ′ having a polygonal cross section for containing the cleaning liquid 1 ′, and a plurality of ultrasonic vibrators 3′a provided on each surface of the polygonal cleaning tank 2 ′. 3'b, 3'c, 3'd, and oscillators 4'a, 4'b, 4'c, 4'd for driving each of the ultrasonic transducers 3'a to 3'd, and a cleaning object A holding jig 6 ′ for holding 5 ′ in the cleaning tank and a swinging mechanism 20 ′ for swinging the holding jig 6 ′ in an arc are provided. In this case, the number of ultrasonic transducers is not limited to a plurality, and it is sufficient that at least one ultrasonic transducer is provided, and the ultrasonic transducers may or may not have different natural frequencies. The oscillators 4′a to 4′d may have a variable frequency or a fixed frequency. Moreover, it is good also as what drives each vibrator | oscillator by using one oscillator.

  The swing mechanism 20 ′ can be configured as the swing mechanism 20 described above, for example. That is, the motor includes a motor, a pair of eccentric cams that rotate by the motor, and a support mechanism that is supported by the eccentric cam and supports the holding jig, and the eccentric cam that rotates by the motor has the support mechanism. By holding the circular arc, the holding jig 6 'can be circularly rocked. In this case, it is preferable that the swinging mechanism 20 ′ can adjust the swinging width by changing the position where the support mechanism is pivotally supported by the eccentric cam. The pivotal support position is formed in the eccentric cam in a spiral shape. What is made variable by the plurality of shaft holes formed is preferable. Further, the oscillation width is one or more of the natural frequency of the ultrasonic transducers 3′a to 3′d, the type of the cleaning liquid 1 ′ stored in the polygonal cleaning tank 2 ′, the liquid temperature, and the liquid depth. It is preferable to be determined according to the above. Each of the above-described constituent requirements of the swing mechanism 20 ′ can be the same as the constituent requirements of the swing mechanism 20.

  The present invention is not limited to the above embodiment. The above embodiment is merely an example, and the present invention has any configuration that has substantially the same configuration as the technical idea described in the claims of the present invention and that exhibits the same operational effects. It is included in the technical idea of the invention.

It is the schematic which shows an example of the ultrasonic cleaning apparatus according to one embodiment of this invention. It is explanatory drawing explaining the effect | action of the ultrasonic cleaning apparatus of this invention, (a)-(f) is explanatory drawing which shows the mode of the ultrasonic wave which each ultrasonic transducer | vibrator irradiates with respect to the oscillation frequency of an oscillator, g) is a graph schematically showing the amplitude intensity of each ultrasonic transducer with respect to the frequency of the oscillator. It is a schematic perspective perspective view which shows an example of a rocking | fluctuation mechanism. It is the schematic which shows the mode of circular arc swing of the washing | cleaning material by a rocking | fluctuation mechanism. It is the schematic which shows an example of the ultrasonic cleaning apparatus according to another embodiment of this invention.

Explanation of symbols

1, 1 '... cleaning solution, 2, 2', 2 "... polygonal cleaning tank,
3a, 3b, 3c, 3d, 3'a, 3'b, 3'c, 3'd ... ultrasonic transducer,
4, 4'a, 4'b, 4'c, 4'd ... oscillator, 5,5 '... washed material,
6, 6 ', 6 "... holding jig, 7, 7' ... receiving cleaning liquid,
10, 10 '... ultrasonic cleaning device, 20, 20' ... swing mechanism,
21 ... motor, 22 ... pulley, 23 ... timing belt,
24a, 24b ... eccentric cam, 25 ... support mechanism,
25a, 25b, 25c, 25d ... support members, 26 ... shaft holes.

Claims (17)

  At least one cleaning tank containing cleaning liquid, a plurality of ultrasonic vibrators provided in the single cleaning tank, an oscillator for driving the ultrasonic vibrator, and a cleaning object are held in the cleaning tank. An ultrasonic cleaning apparatus comprising a holding jig for performing a plurality of ultrasonic transducers provided in at least one cleaning tank, wherein the oscillator is capable of periodically changing an oscillation frequency. An ultrasonic cleaning apparatus, wherein at least two of them have different natural frequencies.   The ultrasonic cleaning apparatus includes a plurality of cleaning tanks, and a plurality of ultrasonic vibrators provided in at least two cleaning tanks among the plurality of cleaning tanks are driven by the one oscillator. The ultrasonic cleaning apparatus according to claim 1.   The ultrasonic cleaning apparatus according to claim 2, wherein the plurality of cleaning tanks contain cleaning liquids in which at least one of a liquid type, a liquid temperature, and a liquid depth is different from each other.   The ultrasonic cleaning apparatus according to any one of claims 1 to 3, wherein a natural frequency of the ultrasonic transducer is in a range of 25 to 70 kHz.   The ultrasonic cleaning apparatus according to any one of claims 1 to 4, wherein the frequency interval of the natural frequency of the ultrasonic transducer is any one of 0.5 to 5 kHz.   The ultrasonic cleaning apparatus according to any one of claims 1 to 5, wherein the oscillator has a repetition cycle of 4 to 12 times / min.   The ultrasonic cleaning apparatus according to any one of claims 1 to 6, wherein the ultrasonic cleaning apparatus includes a swing mechanism that swings the holding jig in an arc.   The ultrasonic cleaning apparatus according to claim 7, wherein the swing mechanism swings the holding jig in an arc in synchronization with a repetition cycle of the oscillator.   The oscillation width of the arc oscillation is determined according to any one or more of the natural frequency of the ultrasonic transducer, the type of cleaning liquid stored in the cleaning tank, the liquid temperature, and the liquid depth. The ultrasonic cleaning apparatus according to claim 7, wherein the ultrasonic cleaning apparatus is provided.   The swing mechanism includes a motor, at least one pair of eccentric cams that rotate by the motor, and a support mechanism that is supported by the eccentric cam and supports the holding jig, and that rotates by the motor. The ultrasonic cleaning according to any one of claims 7 to 9, wherein the eccentric cam causes the holding mechanism to perform an arc swing by swinging the support mechanism in an arc. apparatus.   The ultrasonic cleaning apparatus according to claim 10, wherein the swing mechanism is capable of adjusting a swing width by changing a position where the support mechanism is pivotally supported by the eccentric cam.   The ultrasonic cleaning apparatus according to claim 11, wherein the position to support the shaft is variable by a plurality of shaft holes formed in a spiral shape in the eccentric cam.   At least one cleaning tank containing cleaning liquid, at least one ultrasonic vibrator provided in the one cleaning tank, an oscillator for driving the ultrasonic vibrator, and a cleaning object in the cleaning tank An ultrasonic cleaning apparatus comprising a holding jig for holding, wherein the ultrasonic cleaning apparatus includes a swinging mechanism for swinging the holding jig in an arc.   The oscillation width of the arc oscillation is determined according to any one or more of the natural frequency of the ultrasonic transducer, the type of cleaning liquid stored in the cleaning tank, the liquid temperature, and the liquid depth. The ultrasonic cleaning apparatus according to claim 13, wherein the ultrasonic cleaning apparatus is provided.   The swing mechanism includes a motor, at least one pair of eccentric cams that rotate by the motor, and a support mechanism that is supported by the eccentric cam and supports the holding jig, and that rotates by the motor. The ultrasonic cleaning apparatus according to claim 13 or 14, wherein the eccentric cam swings the holding jig in an arc by swinging the support mechanism in an arc.   The ultrasonic cleaning apparatus according to claim 15, wherein the swing mechanism is capable of adjusting a swing width by changing a position where the support mechanism is pivotally supported by the eccentric cam.   The ultrasonic cleaning apparatus according to claim 16, wherein the position to support the shaft is variable by a plurality of shaft holes formed in a spiral shape in the eccentric cam.

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