JP2006032850A - Thermoelectric conversion module - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To enhance a reliability of a thermoelectric conversion performance and an electric insulation with keeping features of a skeleton type thermoelectric conversion module. <P>SOLUTION: A p-type and an n-type thermoelectric conversion element 2 (2P, 2N) are respectively fitted to separate through-holes formed in an insulating intermediate supporting board 3 and fixed to the board 3 with respectively protruding on both sides of the board 3. Electrodes 4 for electrically serially connecting the element 2P and the element 2N are respectively arranged on each end face of the both sides of the element 2P and the element 2N. Insulating layers 10 are stacked on the outside faces 4b of the electrodes 4 opposite side of the inner side face 4a with the elements 2 connected. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention is used in, for example, optical communication parts, physics and chemistry equipment, portable coolers, etc., is used for temperature management during semiconductor manufacturing processes, etc., and uses a Seebeck effect for cooling and heating The present invention relates to a thermoelectric conversion module that generates electricity.

  FIG. 6 is a schematic side view showing a structural example of a thermoelectric conversion module. The thermoelectric conversion module 1 is called a skeleton type in contrast to a so-called ceramic electrode type general module structure in which electrodes are patterned on a ceramic plate and a thermoelectric element is sandwiched therebetween. In this skeleton type thermoelectric conversion module 1, a P-type thermoelectric conversion element 2 (2P) and an N-type thermoelectric conversion element 2 (2N) are respectively formed on an insulating intermediate support base 3. The intermediate support substrate 3 is fixed to the intermediate support substrate 3 with, for example, an adhesive or the like in such a manner that it is fitted into the through-holes and protrudes on both the front and back sides of the intermediate support substrate 3. The P-type thermoelectric conversion elements 2P and the N-type thermoelectric conversion elements 2N are alternately arranged, and the front and back surfaces of the P-type thermoelectric conversion elements 2P and the N-type thermoelectric conversion elements 2N, respectively. An electrode 4 is joined to each end face on both sides by, for example, solder, and a plurality of P-type and N-type thermoelectric conversion elements 2 (2P, 2N) are electrically connected in series by the electrode 4.

  As the thermoelectric conversion element 2 (2P, 2N), for example, a Peltier element is known. The P-type thermoelectric conversion element 2 (2P) is formed of a P-type (p-type) semiconductor, and the N-type thermoelectric conversion element 2 is used. (2N) is formed of an N-type (n-type) semiconductor, and these thermoelectric conversion elements 2 are manufactured, for example, by adding an element such as antimony or selenium to an intermetallic compound such as bismuth or tellurium.

  In a general thermoelectric conversion module (Peltier module), for example, the intermediate support substrate 3 is made of, for example, a glass epoxy plate having a plate thickness of about 0.3 mm to 0.6 mm. Further, the thermoelectric conversion element 2 is formed in a columnar shape such as a columnar shape or a prismatic shape, and the length of one thermoelectric conversion element 2 is about 1.5 mm to 2 mm, and the thermoelectric conversion element 2 is connected to the intermediate support substrate 3. It is fixed to the intermediate support substrate 3 so that a length of about 0.5 mm to 0.8 mm protrudes downward.

  In such a thermoelectric conversion module 1, when a current is passed through a series connection circuit of the P-type thermoelectric conversion element 2P, the N-type thermoelectric conversion element 2N, and the electrode 4, the thermoelectric conversion element 2 (2P, 2N) and the electrode 4 has a cooling / heating effect (that is, a Peltier effect). That is, by this Peltier effect, for example, when the upper end (front side) of FIG. 6 of the thermoelectric conversion element 2 (2P, 2N) is heated, the lower side of the thermoelectric conversion element 2 (2P, 2N) in FIG. The end of the (back side) is cooled. Further, when the direction of the current is reversed, the upper end of the thermoelectric conversion element 2 (2P, 2N) in FIG. 6 is cooled, and the lower end of the thermoelectric conversion element 2 (2P, 2N) in FIG. The part is heated. In this way, the junction between the thermoelectric conversion element 2 (2P, 2N) and the electrode 4 is cooled or heated by current application, and whether the junction is cooled or heated is determined by the direction of the current.

  The skeleton type thermoelectric conversion module 1 is configured as described above. In the skeleton type thermoelectric conversion module 1, since the electrode 4 is exposed, for example, an object to be cooled while ensuring insulation through an insulating sheet 6 made of, for example, a polymer as shown by a dotted line in FIG. Or it will be arrange | positioned adjacent to a heating target object.

JP-A-10-144970 JP-A-11-168245 JP 2002-9351 A JP 2004-63656 A

  By the way, in order to implement | achieve favorable heat exchange with the thermoelectric conversion module 1 and a cooling target object or a heating target object, it is interposed between the electrode 4 of the thermoelectric conversion module 1 and a cooling target object or a heating target object. It is desirable that the insulating sheet 6 to be used has not only insulating properties but also good thermal conductivity. However, in practice, it is extremely difficult to obtain the insulating sheet 6 that can achieve both good thermal conductivity and insulating properties. Further, it is difficult to handle and place (paste) the thin insulating sheet 6 at the set position, and the workability is poor, and the thermoelectric conversion module 1 and the object to be cooled or heated are precisely set according to the setting of the insulating sheet 6. Since the insulating sheet 6 is difficult to arrange between the thermoelectric conversion module 1 and the object to be cooled or the object to be heated or the The problem is that the performance varies.

  The present invention has been made to solve the above-mentioned problems, and its purpose is to provide a skeleton-type thermoelectric conversion that has the features of a skeleton-type thermoelectric conversion module and has high reliability for heat exchange performance and electrical insulation. To provide a module.

  In order to achieve the above object, the present invention has the following configuration as means for solving the above problems. That is, in the present invention, each of the P-type and N-type thermoelectric conversion elements is fitted into separate through holes formed in the insulating intermediate support substrate, and protrudes from both front and back sides of the intermediate support substrate. Therefore, the P-type thermoelectric conversion element and the N-type thermoelectric conversion element are respectively attached to the end faces on both sides of the P-type thermoelectric conversion element and the N-type thermoelectric conversion element. In a thermoelectric conversion module having a configuration in which an electrode for electrical connection in series is provided, the electrode has an outer surface that is opposite to the inner surface, which is the connection surface with the thermoelectric conversion element, on the opposite side. It is characterized in that an insulating layer is laminated and formed on the back surface. Further, according to the present invention, a mesh member is provided instead of the intermediate support substrate, and each of the P-type and N-type thermoelectric conversion elements is fitted into separate mesh holes of the mesh member and fixed to the mesh member. It is also characterized by.

  According to the present invention, the insulating layer is laminated on the outer side of the electrode. Appropriately set the material constituting the insulating layer on the outer side of the electrode and the thickness of the insulating layer so that the electrode of the thermoelectric conversion module can be insulated from the object to be cooled or the object to be heated. Without interposing an insulating part for ensuring insulation, such as an insulating sheet made of a resin material, between the electrode of the thermoelectric conversion module and the object to be cooled or the object to be heated. This electrode can be brought into contact with the object to be cooled or the object to be heated, either directly or through a thermal conductive grease.

  Thus, for example, it is not necessary to interpose an insulating sheet between the thermoelectric conversion module and the object to be cooled or the object to be heated. It is possible to dramatically improve the work efficiency of disposing the object. In addition, since the thermoelectric conversion module can be brought into contact with the object to be cooled or the object to be heated directly or only through heat conductive grease, the heat exchange efficiency can be greatly improved. Furthermore, the heat exchange performance and electrical performance between the thermoelectric conversion module and the object to be cooled or the object to be heated can be stabilized, and the reliability of the thermoelectric conversion module can be improved.

  Furthermore, the thermoelectric conversion module of the present invention is a skeleton type thermoelectric conversion module in which electrodes are exposed, and an insulating substrate having a large area for supporting and fixing all the electrodes is fixed to the end surfaces on both sides of the thermoelectric conversion element. It is a configuration that is not. While driving the thermoelectric conversion module, one side of the front and back of the thermoelectric conversion element is heated and the other side is cooled, so a large insulating substrate that supports and fixes all the electrodes on the end face sides of both sides of the thermoelectric conversion element, respectively Is fixed, the insulating substrate on one side of the front and back surfaces is thermally expanded by heating, and the insulating substrate on the other side is contracted by cooling, which causes a problem that distortion occurs in the thermoelectric conversion module. On the other hand, in the present invention, there is no such insulating substrate on both sides, and the end portions on both sides of the thermoelectric conversion element are in a state like a free end, so that the thermoelectric conversion module is hardly distorted. Thus, a thermoelectric conversion module with high long-term reliability can be provided. In addition, since an insulating substrate having a large area is unnecessary, the cost of the thermoelectric conversion module can be reduced.

  In the case where the mesh member is provided in place of the intermediate support substrate, since the mesh member has flexibility, the entire thermoelectric conversion module has flexibility. . Thereby, it becomes possible to attach the thermoelectric conversion module of this invention to the thing whose surface is a curved surface, the thing whose surface shape changes, etc., and to cool or heat. In particular, in the present invention, since an insulating layer is laminated on the outer side of the electrode, for example, an insulating sheet or the like does not have to be disposed between the thermoelectric conversion module and the object to be cooled or the object to be heated. By omitting the insulating sheet or the like, for example, it is possible to improve the efficiency of attaching the thermoelectric conversion module to an object whose surface is a curved surface or an object whose surface shape changes.

  Further, the electrode is made of a conductive material of any one of copper, aluminum, an alloy containing copper, and an alloy containing aluminum, and ceramic insulation is provided on the outer side of the electrode. A structure in which layers are formed and a structure in which an electrode is formed of aluminum and an insulating layer of anodized aluminum is formed on the outer side of the electrode. In this case, since it is easy to laminate a ceramic or alumite insulating layer on the outer surface of the electrode, it is possible to prevent complication of manufacturing. In addition, the insulating layer of ceramics and the insulating layer of anodized are much more excellent in heat conduction than, for example, insulating sheets made of resin material, so that the heat exchange performance of the thermoelectric conversion module is further improved. Can do.

  Furthermore, when the edge portion of the insulating layer laminated on the outer surface of the electrode is rounded, the strain of the insulating layer can be reduced or, for example, pressed from the upper side of the insulating layer. When pressure is applied, it is possible to prevent a large force from being applied intensively to the edge portion of the insulating layer, and to prevent the edge portion of the insulating layer from being chipped or cracking from occurring. it can.

  Embodiments according to the present invention will be described below with reference to the drawings. In the description of this embodiment, the same components as those of the thermoelectric conversion module 1 shown in FIG. 6 are denoted by the same reference numerals, and redundant description of the common portions is omitted.

  FIG. 1A shows a schematic plan view of the thermoelectric conversion module of the first embodiment viewed from the surface side, and FIG. 1B shows the thermoelectric conversion module shown in FIG. A schematic plan view seen from the back side is shown, FIG. 1 (c) shows a schematic cross-sectional view of the AA portion of FIG. 1 (a), and FIG. 1 (d) shows FIG. A schematic cross-sectional view of the BB portion of (a) is shown.

  The thermoelectric conversion module 1 of the first embodiment is a skeleton type thermoelectric conversion module, and has P-type and N-type thermoelectric conversion elements 2 (2P, 2N), an intermediate support substrate 3, and an electrode 4. Configured. That is, in the first embodiment, the intermediate support substrate 3 is configured by an insulating substrate such as a glass epoxy plate, and the intermediate support substrate 3 has a plurality of through holes 7 penetrating from the front surface side to the back surface side. Are arranged in a matrix with intervals.

  The P-type thermoelectric conversion elements 2P and the N-type thermoelectric conversion elements 2N are respectively fitted in separate through holes 7 of the intermediate support substrate 3 so as to be arranged alternately, and both sides of the intermediate support substrate 3 are front and back. Are fixed to the intermediate support substrate 3 by, for example, an adhesive. The P-type thermoelectric conversion element 2P and the N-type thermoelectric conversion element 2N are electrically connected in series by electrodes 4 joined to the end surfaces on both the front and back sides by, for example, solder. One end side α (see FIG. 1 (a)) and the other end side β of the series connection circuit composed of the P-type thermoelectric conversion element 2P, the N-type thermoelectric conversion element 2N, and the electrode 4, respectively, The external connection portion is connected to an external current supply source. By supplying current to the series connection circuit from an external current supply source, the thermoelectric conversion module 1 can cool the object to be cooled (for example, a laser diode) or heat the object to be heated by the Peltier effect. it can.

  In the most characteristic electrode 4 in the first embodiment, the insulating layer 10 is laminated on the outer side 4b opposite to the opposite side 4a, which is the connection surface with the thermoelectric conversion element 2, on the opposite side. Is formed. The insulating layer 10 is formed of an insulating material or a thickness of the insulating layer 10 so as to insulate the electrode 4 from a cooling object or a heating object adjacent to the electrode 4 via the insulating layer 10. However, it is appropriately set in consideration of the thermal conductivity between the electrode 4 and the object to be cooled or the object to be heated, the bonding strength with the electrode 4, the ease of manufacture, and the like.

For example, when the electrode 4 is made of any one of copper, aluminum, an alloy containing copper, and an alloy containing aluminum, the insulating layer 10 is, for example, It consists of ceramics. There are various types of ceramics. In this case, the insulating layer 10 may be made of any ceramic as long as it has both thermal conductivity and insulating properties. Examples thereof include alumina (Al ₂ O ₃ ) which is inexpensive and easily available, and aluminum nitride (AlN) which is excellent in thermal conductivity. Further, when it is assumed to be used in an environment where there is a large temperature difference in which thermal distortion is a concern, it may be possible to use, for example, zirconia, which has a small difference in coefficient of thermal expansion from the metal. In addition, silicon carbide, silicon nitride, or the like can be used. As a method for laminating and forming the ceramic insulating layer 10 on the electrode 4 as described above, for example, a bonding method by thermocompression bonding or vacuum adsorption, or a film formation technique by thermal spraying, sputtering, printing (painting) or the like is used. There are various methods such as a coating method, and any method may be adopted.

  For example, when the electrode 4 is composed of a copper or copper alloy conductor plate having a square shape of about 1 mm × 2 mm, and the thickness of the electrode 4 is about 0.2 mm to 0.5 mm. When the thickness of the insulating layer 10 is made thinner than 0.02 mm, it becomes difficult to ensure insulation between the electrode 4 and the object to be cooled or heated, and the thickness of the insulating layer 10 is made thicker than 0.2 mm. Then, since the thermal conductivity between the electrode 4 and the object to be cooled or the object to be heated is deteriorated, in this case, the thickness d of the insulating layer 10 is, for example, 0.02 mm ≦ d ≦ 0.2 mm. The thickness is within the range.

  As another specific example, for example, when the electrode 4 is made of aluminum, the outer surface of the electrode 4 is alumite-treated, and the insulating layer 10 of the alumite is formed on the outer surface of the electrode 4. The layers may be laminated. The alumite insulating layer 10 has a thickness of, for example, about 50 μm, so that necessary and sufficient insulation between the electrode 4 and the object to be cooled or the object to be heated can be ensured.

  In the first embodiment, as shown in the drawing of the insulating layer upper surface 10a, the drawing of the insulating layer side surface 10b, and the drawing of the insulating layer end surface 10c shown in FIG. Is rounded. Thereby, the distortion inside the insulating layer 10 can be relieved, and the situation where the edge E of the insulating layer 10 is damaged due to the application of external force can be avoided. For example, the thermoelectric conversion module 1 may be accommodated in the package 12 as shown in FIG. The package 12 includes a pair of plate-like covers 13 (13A, 13B) and a seal member 14 such as silicon rubber interposed between the covers 13A, 13B. The thermoelectric conversion module 1 is sandwiched between covers 13A and 13B, and the periphery thereof is surrounded by a seal member 14. The thermoelectric conversion module 1 is placed in an airtight sealing space constituted by the covers 13A and 13B and the seal member 14. Contained. When the thermoelectric conversion module 1 is accommodated in the package 12, a pressing force is applied to the insulating layer 10 of the thermoelectric conversion module 1 from the cover 13 </ b> A, 13 </ b> B side of the package 12. By rounding the edge portion E of the insulating layer 10, damage such as chipping of the edge portion E of the insulating layer 10 due to the pressing force from the covers 13A and 13B can be avoided.

  The second embodiment will be described below. In the description of the second embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and duplicate descriptions of common portions are omitted.

  In the second embodiment, a mesh member 15 as shown in FIG. 4B is provided instead of the intermediate support substrate 3. That is, as shown in the model diagram of FIG. 4A, the P-type thermoelectric conversion elements 2P and the N-type thermoelectric conversion elements 2N are arranged on separate mesh members 15 so as to be alternately arranged. It fits into the hole 16 and is fixed to the mesh member 15 with, for example, an adhesive. The mesh member 15 is made of a material having heat resistance and insulating properties. Examples of the material constituting the mesh member 15 include insulating materials such as glass fibers and fiber reinforced plastics, and materials obtained by coating the surface of a wire net with heat-resistant plastics or ceramics. If the material constituting the mesh member 15 is a material that has heat resistance that does not deteriorate due to heat when soldering the electrode 4 to the thermoelectric conversion element 2, for example, is flame retardant and has weather resistance, preferable.

  Further, as shown in the cross-sectional views of the mesh members 15 in FIGS. 5A, 5B, and 5C, there are various weaving methods for the warp yarns 17 and the weft yarns 18 of the mesh member 15. Here, there is no particular limitation.

  Furthermore, a frame 20 made of an insulating material (for example, plastic) may be provided on the outer peripheral portion of the mesh member 15 as shown in FIG. 4C, for example, and such a frame 20 is omitted. The presence or absence of the frame 20 may be set as appropriate.

  In the second embodiment, the configuration other than the above is the same as that of the first embodiment. Also in the second embodiment, a P-type thermoelectric conversion element 2P and an N-type thermoelectric conversion element 2N are provided. An electrode 4 that is electrically connected in series is provided, and an insulating layer 10 similar to that of the first embodiment is laminated on the outer side of the electrode 4, and effects similar to those of the first embodiment are obtained. Can be obtained.

  In addition, this invention is not limited to the form of each 1st or 2nd embodiment, Various embodiments can be taken. For example, the thermoelectric conversion module 1 of each of the first and second embodiments has a quadrangular shape, but the thermoelectric conversion module 1 is not limited to a quadrangular shape, for example, a circular shape, a trapezoidal shape, Various forms such as a polygonal shape of five or more corners and a donut shape having a hole at the center can be adopted. In addition, when the thermoelectric conversion module 1 is a form by which the hole is provided in the center part like a donut shape, it is good also as a structure which arrange | positions a cooling target object or a heating target object in the hole part. Further, when the thermoelectric conversion module 1 has a trapezoidal shape, a large circular thermoelectric conversion module can be formed by arranging the oblique sides of the plurality of trapezoidal thermoelectric conversion modules 1 adjacent to each other.

  Further, in each of the first and second embodiments, the embodiment of the thermoelectric conversion module according to the present invention has been described by taking the Peltier module as an example. However, the thermoelectric conversion module of the present invention uses the Seebeck effect. The present invention can also be applied to a thermoelectric conversion module that generates power.

It is a figure for demonstrating the thermoelectric conversion module of the example of 1st Embodiment. It is a figure for demonstrating the form of the insulating layer laminated | stacked on the outer surface of the characteristic electrode in the example of 1st Embodiment. It is a model figure which shows the example of 1 form of the package which accommodates a thermoelectric conversion module. It is a figure for demonstrating the thermoelectric conversion module of the example of 2nd Embodiment. It is a model figure for demonstrating the example of the weave of the mesh member which comprises the thermoelectric conversion module of the example of 2nd Embodiment. It is a model figure for demonstrating the example of 1 form of a skeleton type thermoelectric conversion module. It is a model figure for demonstrating the problem of the thermoelectric conversion module shown by FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Thermoelectric conversion module 2PP P-type thermoelectric conversion element 2N N-type thermoelectric conversion element 3 Intermediate support substrate 4 Electrode 7 Through hole 10 Insulating layer 15 Mesh member 16 Net hole

Claims (5)

  The P-type and N-type thermoelectric conversion elements are fitted into separate through-holes formed in the insulating intermediate support substrate, respectively, and protruded on both the front and back sides of the intermediate support substrate. The P-type thermoelectric conversion element and the N-type thermoelectric conversion element are electrically connected in series to the end faces on both sides of the P-type thermoelectric conversion element and the N-type thermoelectric conversion element, respectively. In the thermoelectric conversion module having a configuration in which an electrode is disposed, the electrode includes an insulating layer on the outer side opposite to the inner side which is the connection surface with the thermoelectric conversion element and on the opposite side A thermoelectric conversion module characterized in that is laminated.   In place of the intermediate support substrate, a mesh member is provided, and each of the P-type and N-type thermoelectric conversion elements is fitted into separate mesh holes of the mesh member and fixed to the mesh member. The thermoelectric conversion module according to claim 1.   The electrode is made of a conductive material of any one of copper, aluminum, an alloy containing copper, and an alloy containing aluminum. A ceramic insulating layer is formed on the outer side of the electrode. The thermoelectric conversion module according to claim 1, wherein the thermoelectric conversion module is laminated.   3. The thermoelectric conversion module according to claim 1, wherein the electrode is made of aluminum, and an anodized insulating layer is laminated on the outer side of the electrode.   The thermoelectric conversion module according to any one of claims 1 to 4, wherein the edge portion of the insulating layer laminated on the outer surface of the electrode is rounded.

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