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JP2005310884A - Solder joint inspection method - Google Patents

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JP2005310884A
JP2005310884A JP2004122781A JP2004122781A JP2005310884A JP 2005310884 A JP2005310884 A JP 2005310884A JP 2004122781 A JP2004122781 A JP 2004122781A JP 2004122781 A JP2004122781 A JP 2004122781A JP 2005310884 A JP2005310884 A JP 2005310884A
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junction
electronic component
solder joint
semiconductor electronic
forward voltage
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Yukito Ikeda
幸仁 池田
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Canon Inc
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Canon Inc
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Abstract

【課題】 プリント配線基板にはんだ付け実装したPN接合を有する半導体電子部品のはんだ接合部の検査を、該はんだ接合部を破壊することなく非破壊で実施する方法を提供することを目的とする。
【解決手段】 プリント配線基板上にはんだ付け実装されたPN接合を有する半導体電子部品について、そのPN接合部に微少電流下でのPN接合順電圧を予め測定し、次に同順方向に大きな電流を通電し該半導体電子部品を充分に発熱させるに充分な電力を予め設定した時間印加して、その印加終了時の前記微少電流におけるPN接合順電圧を測定して、電力印加前後の差を計測する。プリント配線基板と半導体電子部品とを接合する該はんだ接合部が信頼性試験などで生じるクラックによって接合部が劣化した場合に、前記順電圧の電力印加前後の差の変化を評価することによって非破壊ではんだ接合部の検査を行うものである。
【選択図】 図1
PROBLEM TO BE SOLVED: To provide a method for inspecting a solder joint portion of a semiconductor electronic component having a PN junction soldered and mounted on a printed wiring board without destroying the solder joint portion.
For a semiconductor electronic component having a PN junction soldered and mounted on a printed wiring board, a PN junction forward voltage under a minute current is measured in advance at the PN junction, and then a large current in the same forward direction. Is applied for a preset time to sufficiently heat the semiconductor electronic component, and the PN junction forward voltage at the minute current at the end of the application is measured to measure the difference before and after the power application. To do. Non-destructive evaluation by evaluating the change in the forward voltage before and after power application when the solder joint joining the printed wiring board and the semiconductor electronic component deteriorates due to a crack caused by a reliability test. The solder joints are inspected.
[Selection] Figure 1

Description

本発明はプリント配線基板にはんだ付け実装した半導体電子部品のはんだ接合部の検査方法に関するものである。   The present invention relates to a method for inspecting a solder joint portion of a semiconductor electronic component soldered and mounted on a printed wiring board.

通常、電子機器内のプリント配線基板にはんだ付け実装した電子部品のはんだ接合部は、電子部品で発熱する熱や基板周辺の環境温度などによる熱ストレスを受けている。このストレスは、はんだ接合部に応力を発生させ、この熱ストレスが繰返し加えられると当該接合部が疲労してクラックを生じ、最終的に断線に到るなど、好ましくない接合状態となる。このような繰返し熱ストレスを加えて、はんだ接合部の信頼性を評価する方法として熱衝撃試験や温度サイクル試験の信頼性試験が、よく知られている。図4はプリント配線基板とその上に実装された電子部品におけるはんだ接合部の断面図で、(a)は面実装タイプ、(b)はリード挿入タイプの電子部品の場合を示しており、熱衝撃試験や温度サイクル試験で加えられた熱ストレスではんだ接合部にクラックを生じた例である。すなわち、電子部品1のリード3とプリント基板7の上の配線パターン6とをはんだ5で接合されている状態を示しており、熱ストレスによる疲労によりはんだ内部にクラック11が生じていることを示している。   Usually, a solder joint portion of an electronic component soldered and mounted on a printed wiring board in an electronic device is subjected to heat stress due to heat generated by the electronic component, environmental temperature around the substrate, and the like. This stress generates a stress in the solder joint, and when this thermal stress is repeatedly applied, the joint becomes fatigued and cracks are formed, leading to an unsatisfactory joining state, such as a final disconnection. A thermal shock test and a reliability test of a temperature cycle test are well known as methods for evaluating the reliability of solder joints by applying such repeated thermal stress. 4A and 4B are cross-sectional views of a solder joint portion in a printed wiring board and an electronic component mounted thereon, where FIG. 4A shows a surface mount type and FIG. 4B shows a lead insertion type electronic component. This is an example in which a crack is generated in a solder joint due to thermal stress applied in an impact test or a temperature cycle test. That is, it shows a state in which the lead 3 of the electronic component 1 and the wiring pattern 6 on the printed circuit board 7 are joined by the solder 5, and it shows that the crack 11 is generated inside the solder due to fatigue due to thermal stress. ing.

従来、このクラックの検査は、はんだ接合部表面を顕微鏡などを用いた観察によって行っていた。しかしこの方法はクラックがはんだ表面に露出している場合は検査が可能であるが、はんだ内部のクラックを検出することは出来ないために、リードとプリント基板を含む、はんだ接合部の断面を研削などの方法で露出させて観察する方法を併用するのが一般的である。   Conventionally, the inspection of the crack has been performed by observing the surface of the solder joint portion using a microscope or the like. However, this method can be inspected when cracks are exposed on the solder surface, but since the cracks inside the solder cannot be detected, the cross section of the solder joint including the lead and the printed circuit board is ground. It is common to use a method of exposing and observing by such a method.

前記のクラックを直接観察する方法の他に、特開平10−58129号公報(特許文献1)には、はんだ接合部に含浸油を真空含浸させ、真空含浸前と真空含浸後のはんだ接合部の重量を測定してこの重量の変化量によってクラックを検査する方法が提案されている。その他に、電子部品のリードをプリント基板から機械的に引き離し、その引き離し強度値の信頼性試験前後の差からクラックを間接的に検査する方法がある。
特開平10−58129号公報
In addition to the method of directly observing the cracks, Japanese Patent Laid-Open No. 10-58129 (Patent Document 1) discloses that the solder joints are impregnated with an impregnating oil and the solder joints before and after vacuum impregnation. There has been proposed a method of measuring a weight and inspecting a crack by a change amount of the weight. In addition, there is a method in which the lead of the electronic component is mechanically separated from the printed circuit board and the crack is indirectly inspected based on the difference between the separation strength values before and after the reliability test.
JP-A-10-58129

前記の従来の検査方法は以下の欠点があった。従来の断面観察および機械的な引き離し強度の計測による検査方法は、いずれも検査対象の試料を破壊してしまうために、熱衝撃試験や温度サイクル試験などの信頼性試験に、継続的に同一の試料を供することが出来ない。すなわち、試験の経過とともに試料を破壊させるので数量が減るために、試験に供する試料を多数必要とすることを意味している。特開平10−58129号公報で提案の含浸油を含浸させてその変化量を測定することによってクラックを検査する方法も試料を一度含浸油に浸してしまうため、同様に同一試料を試験に供することは困難である。また、これらの方法で実施する必要のある研削作業、含浸油の真空含浸や強度の計測作業は、多くの作業プロセスと時間を必要とするため、コスト高となってしまう。更に、断面観察による方法では、内部クラックは表面観察からは特定できないために、断面を研削加工する部位によってはクラックが存在していないこともあり、検査精度に課題がある。また、はんだ内部のクラックの有無に関わらず断面の研削をすることにもなり作業の効率が悪いといった問題がある。   The conventional inspection method has the following drawbacks. Both conventional cross-sectional observation and mechanical pull-out strength measurement inspection methods destroy the sample to be inspected, and are therefore consistent with reliability tests such as thermal shock tests and temperature cycle tests. The sample cannot be provided. That is, since the sample is destroyed as the test progresses, it means that a large number of samples are required for the test in order to reduce the quantity. In the method of inspecting cracks by impregnating the impregnated oil proposed in JP-A-10-58129 and measuring the amount of change, the sample is once immersed in the impregnated oil. It is difficult. In addition, the grinding work, vacuum impregnation of impregnating oil, and measurement work of strength that are required to be performed by these methods require many work processes and time, and thus increase the cost. Furthermore, in the method based on the cross-sectional observation, since the internal crack cannot be specified from the surface observation, the crack may not exist depending on the portion where the cross-section is ground, and there is a problem in inspection accuracy. Further, there is a problem that the work efficiency is poor because the cross section is ground regardless of the presence or absence of cracks in the solder.

本発明の目的は、はんだ部に発生する内部クラックを、はんだ部を破壊することなく、また複雑な作業工程を経ることなく、安価で検査することにある。   An object of the present invention is to inspect an internal crack generated in a solder portion at a low cost without destroying the solder portion and without going through a complicated work process.

前記の課題を解決しするために、本発明のはんだ接合部の検査方法は、プリント配線基板上にはんだ付け実装されたPN接合を有する半導体電子部品に対してPN接合の順電圧を予め測定し、次に同順方向に大きな電流を通電し電子部品を発熱させるに充分な電力を予め設定した時間印加して、その印加終了時のPN接合の順電圧を測定して、電力印加前後の差を計測するものである。一般に半導体電子部品は電力が加わると自己発熱するが、その熱は部品のパッケージ表面からの周囲雰囲気への直接放散の他に、リードから本発明で対象とする、はんだ接合部を通じてプリント基板へ熱伝導により放熱される。ここで、リードとプリント基板の間のはんだ接合部にクラックが入ると、電子部品からプリント基板への熱伝導が損なわれ、放熱性が低下するために、電子部品に電力を加えて自己発熱させるとその温度はクラックのない状態に比べて上昇することになる。   In order to solve the above problems, the solder joint inspection method of the present invention measures the forward voltage of a PN junction in advance for a semiconductor electronic component having a PN junction soldered and mounted on a printed wiring board. Next, apply a large current in the forward direction and apply sufficient power to heat the electronic component for a preset time, measure the forward voltage of the PN junction at the end of the application, Is to measure. In general, a semiconductor electronic component generates heat when power is applied. In addition to the direct dissipation of the component from the package surface to the surrounding atmosphere, the heat is transferred from the lead to the printed circuit board through the solder joint, which is the subject of the present invention. Heat is dissipated by conduction. Here, if a crack occurs in the solder joint between the lead and the printed circuit board, heat conduction from the electronic component to the printed circuit board is impaired, and heat dissipation is reduced. And the temperature rises compared to the state without cracks.

本発明は半導体電子部品の自己発熱による温度上昇前後のPN接合順電圧の差が上述のように放熱性が低下する場合に変化することを利用することによって、非破壊でクラック発生有無などのはんだ接合部の検査を行うものである。   The present invention utilizes the fact that the difference in the PN junction forward voltage before and after the temperature rise due to self-heating of the semiconductor electronic component changes when the heat dissipation is reduced as described above, so that solder such as the presence or absence of cracks is generated nondestructively. The joint is inspected.

本発明の検査方法によれば、検査対象である試料を破壊させることなく、同一試料で信頼性試験を継続的にはんだ接合部の検査を実施することができる。また、特に内部クラックなどのはんだ表面に露出していない劣化を見出すこともできるため、検査精度においても良好な結果が期待できる。   According to the inspection method of the present invention, it is possible to continuously inspect the solder joints using the same sample without destroying the sample to be inspected. In addition, since it is possible to find deterioration that is not exposed to the solder surface, such as internal cracks, good results can be expected in inspection accuracy.

本発明は、上記の課題を鑑みてなされたもので、検査対象である試料を破壊させることなく、はんだ接合部の検査を非破壊で実施する方法を提供することを目的とするものである。以下に、本発明の実施形態について図面を参照して詳細に説明する。   The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a method for performing non-destructive inspection of a solder joint without destroying a sample to be inspected. Embodiments of the present invention will be described below in detail with reference to the drawings.

図1は、半導体電子部品をプリント基板上にはんだ付け実装した状態の断面図であり、半導体電子部品1のリード3とプリント基板7のパターン配線6とを接合するはんだ5を検査対象とし、本発明が提案する計測系を示している。ここで半導体電子部品1において、PN接合を形成するリード3とリード4の間に微少電流源8及び電力印加のための電流源10を接続し、更に微少電流通電時のPN接合順電圧VFを測定する電圧計9を設けた構成としている。   FIG. 1 is a cross-sectional view of a state in which a semiconductor electronic component is soldered and mounted on a printed circuit board. The solder 5 that joins the lead 3 of the semiconductor electronic component 1 and the pattern wiring 6 of the printed circuit board 7 is an inspection object. 1 shows a measurement system proposed by the invention. Here, in the semiconductor electronic component 1, a minute current source 8 and a current source 10 for applying electric power are connected between the lead 3 and the lead 4 forming the PN junction, and the PN junction forward voltage VF when the minute current is applied is further obtained. A voltmeter 9 for measurement is provided.

図2に本発明の測定プロセスを説明するタイミングチャートを示す。図2(a)は検査する、はんだ接合部された半導体電子部品のPN接合の順方向に通電する電流を示している。図2(b)は同電子部品のPN接合温度Tjを示している。図2(c)は同電子部品のPN接合部順電圧VFを示している。ここで、リード3−リード4間のPN接合の順方向に予め電流源8により微少電流IMを通電し、PN接合順電圧を測定し、これをVF1とする。次に電力印加用電流源10によって時間t0からt1まで大きな電流ITを流して電力を加えると時間t0からt1までの間に半導体チップ2のPN接合温度Tjは図2(b)の実線の通りTj1から上昇しTj2となる。半導体電子部品のPN接合の微少電流条件における順電圧は図3に示すような負の係数をもった温度依存性を示すことが良く知られており、このことから、図2(c)の実線で示すように順電圧は時間t0(温度はTj1)のVF1から時間t1には温度Tj2に相当する電圧値VF2に低下する。すなわち、ITの通電による自己温度上昇の前後でPN接合順電圧にVF1−VF2なる差ΔVFを生じる。この差ΔVFをδVF1とする。   FIG. 2 shows a timing chart for explaining the measurement process of the present invention. FIG. 2 (a) shows a current that is passed in the forward direction of a PN junction of a semiconductor electronic component having a solder joint to be inspected. FIG. 2B shows the PN junction temperature Tj of the electronic component. FIG. 2C shows the PN junction forward voltage VF of the electronic component. Here, a minute current IM is supplied in advance by the current source 8 in the forward direction of the PN junction between the lead 3 and the lead 4 to measure the PN junction forward voltage, which is defined as VF1. Next, when a large current IT is supplied from the power application current source 10 to the time t0 to t1, and the power is applied, the PN junction temperature Tj of the semiconductor chip 2 from the time t0 to t1 is as shown by the solid line in FIG. It rises from Tj1 and becomes Tj2. It is well known that the forward voltage of a PN junction of a semiconductor electronic component under a minute current condition exhibits temperature dependence having a negative coefficient as shown in FIG. 3, and as a result, the solid line in FIG. As shown, the forward voltage drops from VF1 at time t0 (temperature is Tj1) to voltage value VF2 corresponding to temperature Tj2 at time t1. That is, a difference ΔVF of VF1−VF2 is generated in the PN junction forward voltage before and after the self-temperature rise due to the energization of IT. This difference ΔVF is assumed to be δVF1.

信頼性試験によりリードとプリント基板のはんだ接合部がクラックなどの劣化を生じると、リードからプリント基板間において熱伝導が損なわれる。この場合、半導体チップ2で生じた熱の放熱が低下し半導体チップの温度ははんだ接合部の劣化のない場合に比べて高温となる。すなわち、上記と同様に時間t0からt1までの大きな電流ITを通電して電力を加えると半導体チップ2の温度Tjは図2(b)の点線で示すTj2´となり、Tj2に比べて高い温度値を示す。よって時間t1の順電圧VFはPN接合の温度依存性から図2(c)の点線で示すようにVF2´となり、前記のVF2に比べて小さい値を示す。この場合のITの通電による自己温度上昇の前後でのPN接合順電圧の差ΔVFはVF1−VF2´となり、これをδVF2とすると、前記のクラックのない場合のδVF1と比べるとδVF1<δVF2の関係を示す。   If the solder joint between the lead and the printed circuit board is deteriorated by a reliability test, the heat conduction is lost between the lead and the printed circuit board. In this case, heat radiation generated in the semiconductor chip 2 is reduced, and the temperature of the semiconductor chip becomes higher than that in the case where there is no deterioration of the solder joint. That is, when a large current IT from time t0 to t1 is applied and electric power is applied in the same manner as described above, the temperature Tj of the semiconductor chip 2 becomes Tj2 'indicated by the dotted line in FIG. 2B, which is a temperature value higher than Tj2. Indicates. Therefore, the forward voltage VF at time t1 becomes VF2 ′ as shown by the dotted line in FIG. 2C due to the temperature dependence of the PN junction, and shows a smaller value than VF2. In this case, the difference ΔVF of the PN junction forward voltage before and after the self-temperature rise due to the energization of IT is VF1−VF2 ′, and when this is δVF2, the relationship of δVF1 <δVF2 compared with δVF1 without the crack. Indicates.

すなわち、熱衝撃試験や温度サイクル試験などの信頼性試験において試験前のΔVFに対して試験後のΔVFが大きくなっている場合にははんだ接合部が劣化していると判断することが出来、クラック有無などの劣化具合を検査することができる。なお、ここで電力印加用電流源10で大きな電流を印加する時間t1−t0は半導体チップの温度が充分に上昇し半導体とその近傍が熱的に平衡状態に達する時間を選ぶことが望ましい。また、上述で時間t0におけるPN接合温度が信頼性試験の前後で同一である場合にはΔVFの比較でなく時間t1におけるPN順方向電圧の比較によって同様に検査することが可能である。   That is, in a reliability test such as a thermal shock test or a temperature cycle test, if the ΔVF after the test is larger than the ΔVF before the test, it can be determined that the solder joint has deteriorated, and cracks have occurred. Degradation such as presence or absence can be inspected. Here, it is desirable to select the time t1 to t0 during which a large current is applied from the power application current source 10 so that the temperature of the semiconductor chip sufficiently rises and the semiconductor and its vicinity reach a thermal equilibrium state. Further, when the PN junction temperature at the time t0 is the same before and after the reliability test as described above, it is possible to similarly inspect by not comparing the ΔVF but comparing the PN forward voltage at the time t1.

本発明は上記のように信頼性試験における検査方法の他に、正常なはんだ接合状態のΔVFを予め定めて、この値より高いか否かを比較することによってはんだ付け実装後におけるはんだ接合部の出来栄え検査に適用することも可能である。   In the present invention, in addition to the inspection method in the reliability test as described above, the ΔVF of the normal solder joint state is determined in advance, and the solder joint portion after the soldering mounting is compared by comparing whether or not it is higher than this value. It can also be applied to performance inspection.

なお、本発明は、その趣旨を逸脱しない範囲で実施形態を修正又は、変形したものに適用可能である。   Note that the present invention can be applied to a modified or modified embodiment without departing from the spirit of the present invention.

実施例1の検査対象であるプリント基板上にはんだ付け実装した半導体電子部品と本発明が提案する計測回路を示すものである。1 shows a semiconductor electronic component soldered and mounted on a printed circuit board to be inspected in Example 1 and a measurement circuit proposed by the present invention. 実施例1の検査方法を説明するタイミングチャートである。3 is a timing chart illustrating an inspection method according to the first embodiment. PN接合を有する半導体における、微小電流条件下でのPN接合順電圧VFの温度依存性を示すグラフである。It is a graph which shows the temperature dependence of the PN junction forward voltage VF on a microcurrent condition in the semiconductor which has a PN junction. はんだ接合部にクラックを生じたプリント配線基板を示した断面図である。It is sectional drawing which showed the printed wiring board which produced the crack in the solder joint part.

符号の説明Explanation of symbols

1 半導体電子部品
2 半導体チップ
3、4 リード
5 はんだ
6 配線パターン
7 プリント基板
8 微少電流源
9 電圧計
10 電力印加用電流源
11 クラック
DESCRIPTION OF SYMBOLS 1 Semiconductor electronic component 2 Semiconductor chip 3, 4 Lead 5 Solder 6 Wiring pattern 7 Printed circuit board 8 Microcurrent source 9 Voltmeter 10 Current source 11 for power application 11 Crack

Claims (1)

プリント配線基板上にはんだにより実装されたPN接合を有する半導体電子部品のはんだ接合部の検査方法において、該半導体電子部品のPN接合の順方向に大電流を印加し、該半導体電子部品の微少電流通電時のPN接合順電圧について前記大電流の印加前後の差を計測することを特徴とする、はんだ接合部の検査方法。   In a method for inspecting a solder joint part of a semiconductor electronic component having a PN junction mounted by soldering on a printed wiring board, a large current is applied in the forward direction of the PN junction of the semiconductor electronic component, A method for inspecting a solder joint, wherein a difference between before and after application of the large current is measured with respect to a PN junction forward voltage during energization.
JP2004122781A 2004-04-19 2004-04-19 Solder joint inspection method Withdrawn JP2005310884A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011203113A (en) * 2010-03-25 2011-10-13 Honda Motor Co Ltd Inspection apparatus of temperature sensor bonding section, and inspection method of the temperature sensor bonding section
JP2014219236A (en) * 2013-05-02 2014-11-20 新電元工業株式会社 Semiconductor inspection device and semiconductor inspection method
JP7621166B2 (en) 2021-04-15 2025-01-24 Koa株式会社 Joint evaluation method, evaluation resistor, and joint evaluation device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011203113A (en) * 2010-03-25 2011-10-13 Honda Motor Co Ltd Inspection apparatus of temperature sensor bonding section, and inspection method of the temperature sensor bonding section
JP2014219236A (en) * 2013-05-02 2014-11-20 新電元工業株式会社 Semiconductor inspection device and semiconductor inspection method
JP7621166B2 (en) 2021-04-15 2025-01-24 Koa株式会社 Joint evaluation method, evaluation resistor, and joint evaluation device

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