JP2004301721A - Judging device, judging method, judging program for realizing the judging method, and computer-readable recording medium recording the program - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To accurately decide on an object with a possibility of having externally discharged. <P>SOLUTION: A decision system 2000 comprises communication interface 206 which inputs the value of surface potential of an object, CPU202 which decides the possibility of external discharge of the object by comparing the value of surface potential input by the communication interface 206 with the threshold, and the network interface 210 which outputs the decision information showing the result of the decision of CPU202. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a determination device, a determination method, a determination program for realizing the determination method, and a computer-readable recording medium on which the program is recorded, and more particularly, to a determination device for determining a possibility that an external discharge has occurred in an object. The present invention relates to a determination device for determining deterioration of an object based on a surface potential of the object, a determination method, a determination program for realizing the determination method, and a computer-readable recording medium storing the program.
[0002]
[Prior art]
Improving efficiency is an important issue in product production. To achieve the task, it is necessary to eliminate unnecessary work. In order to avoid unnecessary work, it is necessary to prevent processing into a damaged product. When manufacturing a semiconductor device such as an LCD (Liquid Crystal Display) panel, an external discharge is one of the main causes of damage. External discharge refers to a phenomenon in which a product charged with static electricity rapidly releases charges. This phenomenon occurs when the conductive substance comes into contact with the product, or when the conductive substance comes very close to the charged product, causing air breakdown, and the like. The reason that the product is damaged by the external discharge is that, when the electric charge is released, an element such as a TFT (Thin-Film Transistor) is damaged or broken.
[0003]
Patent Document 1 discloses a transport device that compares a charge amount of an object to be measured with an allowable amount. This device performs the following processing when an object to be measured that is likely to cause an external discharge is found. The first process is a process for issuing a warning. The second process is control of its own operation. Patent Document 2 discloses a transfer device that controls the balance of the polarities of the ionizer. Patent Literature 3 discloses an exposure apparatus that controls a transfer speed of a substrate. Patent Literature 4 discloses a neutralization method in which the supply of ions is started immediately before the substrate is separated. Patent Literature 5 discloses a static eliminator that controls the amount of ions to be released.
[0004]
[Patent Document 1]
JP-A-3-195624 [0005]
[Patent Document 2]
JP-A-6-222563
[Patent Document 3]
JP-A-8-137112
[Patent Document 4]
JP-A-11-329783
[Patent Document 5]
JP-A-11-135293
[Problems to be solved by the invention]
However, as disclosed in Patent Literature 1, when comparing the charge amount of an object to be measured with an allowable amount, only the possibility of external discharge in the future is determined. An object to be measured in which an external discharge has already occurred (there is a possibility that an internal element has been destroyed as a result) cannot be detected. As a result, the post-process is sequentially performed also on the device under test whose internal elements have been destroyed. The post-process is performed until a defect is found in the operation of the element in the inspection. This means that unnecessary manufacturing steps are performed on defective products. As a result, there is a problem that productivity is reduced.
[0010]
As disclosed in Patent Document 2, when the polarity balance of the ionizer is controlled, the danger of external discharge can be eliminated. This is because the charge on the substrate, which is the cause, is accurately removed. When the charge is removed, no external discharge occurs. However, there is a problem that a substrate on which an external discharge has already occurred cannot be detected. No technique for that purpose is disclosed.
[0011]
As disclosed in Patent Literature 3, there is a problem similar to that of Patent Literature 2 in controlling the substrate transfer speed. As disclosed in Patent Literature 4, when the ion supply is started immediately before the substrate is separated, there is a similar problem as in Patent Literature 2 or 3. As disclosed in Patent Literature 5, there is a problem similar to Patent Literatures 2 to 4 in controlling the amount of emitted ions while measuring the charged voltage of an object.
[0012]
The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a determination apparatus, a determination method, and a determination method capable of accurately determining the possibility that an object has already caused an external discharge. An object of the present invention is to provide a determination program for realizing the program, and a computer-readable recording medium on which the program is recorded.
[0013]
[Means for Solving the Problems]
According to one aspect of the present invention, the determination device compares the surface potential value input from the input unit with the input means for inputting the surface potential value of the object with a threshold value, The apparatus includes a determination unit for determining the possibility that an object has caused an external discharge, and an output unit for outputting determination information indicating a result of the determination.
[0014]
That is, the input means inputs the value of the surface potential. The determining means compares the value of the surface potential input from the input means with a threshold value to determine whether the object has caused an external discharge. Thereby, the output means outputs the judgment information. As a result, it is possible to provide a determination device that can accurately determine the possibility that the target has caused an external discharge.
[0015]
Further, it is desirable that the value of the surface potential to be compared with the above-described threshold value is a potential value determined using the sum of a plurality of values representing the surface potential at a predetermined time.
[0016]
That is, the determination means makes a determination using the potential value. Thereby, it is possible to more accurately determine the possibility that an external discharge has occurred. As a result, it is possible to provide a determination device that can more accurately determine the possibility that the object has caused an external discharge.
[0017]
Alternatively, it is desirable that the above-mentioned potential value is an absolute value of the average value of the surface potential at the above-mentioned time.
[0018]
That is, the determination means makes a determination using the absolute value of the average value. Thereby, it is possible to particularly accurately determine that the external discharge has occurred. As a result, it is possible to provide a determination device that can particularly accurately determine the possibility that the object has caused an external discharge.
[0019]
Further, it is desirable that the value of the surface potential to be compared with the above-mentioned threshold value is one of the maximum value and the minimum value of the absolute value of the surface potential at a predetermined time.
[0020]
That is, the determination means makes a determination using either the maximum value or the minimum value of the absolute value of the surface potential. Thereby, the determination means can more accurately determine the possibility that the external discharge has occurred. As a result, it is possible to provide a determination device that can more accurately determine the possibility that the object has caused an external discharge.
[0021]
Further, it is desirable that the time at which the value of the surface potential to be compared with the above-described threshold value is measured includes a specific time specified based on the operation on the object.
[0022]
That is, the specifying unit specifies a specific value indicating the magnitude of the surface potential at a time including a time specified based on the operation on the object. Thereby, the determination means can make a more accurate determination. As a result, it is possible to provide a determination device that can more accurately determine whether an external discharge has occurred in the target object.
[0023]
Alternatively, it is desirable that the above-mentioned specific time is a time including a time when the content of the above-mentioned operation changes.
[0024]
That is, the specifying unit specifies a specific value indicating the magnitude of the surface potential at a time including a time when the content of the operation changes. Thereby, the determination means can make a more accurate determination. As a result, it is possible to provide a determination device that can more accurately determine the possibility that an external discharge has occurred in the target object.
[0025]
Alternatively, the above-described operation is desirably an operation in which an object is separated.
That is, the specifying means specifies a specific value indicating the magnitude of the surface potential at a time including a time specified based on the operation of separating the object. Thereby, the determination means can make a more accurate determination. As a result, it is possible to provide a determination device that can more accurately determine the possibility that an external discharge has occurred in the target object.
[0026]
In addition, there are a plurality of surface potential values to be compared with the above-described threshold values, and there are also a plurality of threshold values corresponding to the plurality of surface potential values. It is desirable to include a means for judging the possibility that the object has caused an external discharge as compared with a threshold value.
[0027]
That is, the judging means compares the values of the plurality of surface potentials with the plurality of thresholds to judge the possibility that the object has caused an external discharge. Thereby, the determination means can make a more accurate determination. As a result, it is possible to provide a determination device that can more accurately determine whether an external discharge has occurred in the target object.
[0028]
According to another aspect of the present invention, a determination method includes the steps of: inputting a surface potential value of an object; comparing the surface potential value input in the input step with a threshold value; Includes a determining step of determining the possibility that an external discharge has occurred, and an outputting step of outputting determination information indicating a result of the determination.
[0029]
That is, in the input step, the value of the surface potential is input. In the determining step, the value of the surface potential input in the input step is compared with a threshold value to determine the possibility that the object has caused an external discharge. Thereby, the output step outputs the judgment information. As a result, it is possible to provide a judgment method capable of accurately judging the possibility that the object has caused an external discharge.
[0030]
According to another aspect of the present invention, a determination program compares an input step of inputting a surface potential value of an object with a threshold value of the surface potential input in the input step, and Causes the computer to perform a determining step of determining the possibility that an external discharge has occurred and an output step of outputting determination information indicating the result of the determination.
[0031]
That is, it is possible to provide a program for realizing a determination method capable of accurately determining the possibility that an external discharge has occurred in an object.
[0032]
According to another aspect of the present invention, the recording medium is a recording medium on which a determination program is recorded, the input step of inputting a surface potential value of the object, and the surface potential value input in the input step. Is compared with a threshold value to determine a possibility that an external discharge has occurred in the object, and a determination program for causing the computer to realize an output step of outputting determination information indicating a result of the determination is recorded. Computer-readable recording medium.
[0033]
That is, it is possible to provide a computer-readable recording medium on which a program for realizing a determination method capable of accurately determining the possibility that an external discharge has occurred in an object is recorded.
[0034]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, the same components are denoted by the same reference numerals. Their names and functions are also the same. Therefore, detailed description thereof will not be repeated.
[0035]
Referring to FIG. 1, a static elimination system 1000 according to the present embodiment includes a surface voltmeter 100, an ionizer 110, a transfer device 120, a stage 130 for fixing a substrate, a determination device 2000, a factory CIM (Computer-Integrated Manufacturing-Turning) 3000 and a control device 4000. This static elimination system 1000 is a system for removing electric charges from a liquid crystal display substrate 140 (made of glass). After the removal, the substrate 140 is transferred by the transfer device 120 to the next step.
[0036]
Surface potential meter 100 detects the surface potential of substrate 140. The surface potential meter 100 outputs the surface potential to the determination device 2000. The ionizer 110 sprays positive and negative ions on the substrate 140. Positive and negative ions are generated using air molecules. The transfer device 120 unloads the substrate 140. The stage 130 pushes the substrate 140 below the ionizer 110. The substrate 140 continues to be attracted to the stage 130 until pushed up. A suction device (not shown) is used for the suction. The determination device 2000 determines whether there is a possibility that the substrate 140 has been externally discharged. Control device 4000 controls ionizer 110, transfer device 120, and stage 130 based on the result determined by determination device 2000. Control device 4000 outputs information related to production of substrate 140 to factory CIM 3000. The factory CIM 3000 performs the following processing based on the information. The first of the processes is a plan for a production schedule. The second of the processing is an instruction to the production equipment such as the control device 4000. The third of the processing is collection of data representing the production status and performance.
[0037]
The surface electrometer 100 includes a sensor 102 and a main body 104. The sensor 102 outputs a signal corresponding to the surface potential of the substrate 140. The main body 104 creates data representing the surface potential. This data is created based on the signal output by the sensor 102. The main body 104 outputs the created data to the determination device 2000.
[0038]
With reference to FIG. 2, the flow of information in static elimination system 1000 according to the present embodiment will be described. The surface potential meter 100 measures the surface potential of the substrate 140. Surface voltmeter 100 outputs data representing the surface potential. The data output from the surface electrometer 100 is input to the comparison unit of the determination device 2000. The comparison unit specifies measurement data from the input data. Examples of the measurement data include the maximum value and the minimum value of the absolute value of the surface potential in a certain period, and the absolute value of the average value. The comparing unit compares the measured data with a threshold. The comparing unit sends the result data to the determining unit of the determining device 2000. The result data is data representing a result of comparison between the measurement data and the threshold. The determination unit determines the quality of the substrate 140 based on the result data. A signal representing the judgment by the judging unit is sent to control device 4000. The substrate 140 is transported to the next step according to the quality judgment by the judgment unit.
[0039]
With reference to FIG. 3, the function of determination device 2000 according to the present embodiment will be described. FIG. 3 is a functional block diagram of the determination device 2000. The determination device 2000 includes a computer 200, a monitor 208, a mouse 212, and a keyboard 214. The computer 200 determines pass / fail of the substrate 140 based on the charging of the substrate 140. In the present embodiment, the determination of the quality of the substrate 140 is a determination of whether there is a possibility that the substrate 140 has already generated an external discharge. The monitor 208 displays information on a screen. The mouse 212 and the keyboard 214 each receive an input from a user. The computer 200 includes a CPU (Central Processing Unit) 202, a fixed disk 204, a communication interface 206, a network interface 210, a memory 216, an FD (Flexible Disk) driving device 218, and a CPU (Central Processing Unit) 202 connected to each other by a bus. , A CD-ROM (Compact-Disc-Read Only Memory) driving device 220. The CPU 202 controls the above-described circuits, the devices of the determination device 2000, and the like. The CPU 202 also functions as the comparison unit and the determination unit described above. The quality of the substrate 140 is determined by the CPU 202. This determination is made based on whether the measured data exceeds a threshold. The fixed disk 204 stores software (hereinafter, “software” is the same). This software implements the determination device according to the present embodiment. The communication interface 206 inputs and outputs information to and from the surface voltmeter 100. The network interface 210 inputs and outputs information to and from the control device 4000. The memory 216 temporarily stores software and other data stored in the fixed disk 204. They are stored when the CPU 202 executes the software. The FD 222 is mounted on the FD driving device 218. A CD-ROM 224 is mounted on the CD-ROM drive 220.
[0040]
As described above, this device is realized by computer hardware and software executed by the CPU 202. Generally, such software is stored and distributed on a recording medium such as the FD 222 or the CD-ROM 224, and is read from the recording medium by the FD driving device 218 or the CD-ROM driving device 220. The read software is temporarily stored on the fixed disk 204. This software is read from the fixed disk 204 to the memory 216. This software is executed by the CPU 202. The hardware itself of the computer 200 shown here is a general one. Therefore, the most essential part of the present invention is software recorded on a recording medium such as the FD 222, the CD-ROM 224, and the fixed disk 204.
[0041]
Since the operation of computer 200 itself shown in these figures is well known, detailed description thereof will not be repeated here.
[0042]
Referring to FIG. 4, stage 130 according to the present embodiment includes plate 132, suction holes 134, elevating pins 136, and a suction device (not shown). The substrate 140 is placed on the plate 132. The suction hole 134 communicates with the suction hole of the suction device. The suction device sucks the air in the suction hole 134. The substrate 140 is attracted to the plate 132. Under the ionizer 110, the suction of the substrate 140 is released. The lifting pins 136 push up the substrate 140 from below. The substrate 140 is separated from the stage 130 by being pushed up. When the substrate 140 is peeled, the transfer device 120 inserts its own hand 122 into the gap between the substrate 140 and the plate 132. The transfer device 120 lifts the hand 122 and removes the substrate 140.
[0043]
Needless to say, the form of the static elimination system 1000 is not limited to the specific examples shown in FIGS. 1 to 4. Other functions not described in any of FIG. 1 to FIG. 4 may be included, and all of the functions described in any of FIG. 1 to FIG. 4 may not necessarily be included. For example, the network interface 210 may directly input and output information to and from the factory CIM 3000. In that case, the determination device 2000 can output the result directly to the factory CIM 3000. The result is a determination as to whether there is a possibility that the substrate 140 has already been externally discharged. Alternatively, the determination device 2000 may be a part of the factory CIM 3000.
[0044]
Referring to FIG. 5, a program executed in static elimination system 1000 according to the present embodiment has the following control structure regarding determination of external discharge of substrate 140.
[0045]
In step (hereinafter, step is abbreviated as S) 100, the suction device of stage 130 sucks substrate 140.
[0046]
In S102, the suction device of stage 130 releases the suction of substrate 140 under ionizer 110. The CPU 202 uses the communication interface 206 to prepare the surface voltmeter 100 for measurement. Note that between S100 and S102, suction of dust on the substrate 140, cleaning of the substrate 140, inspection of the substrate 140, irradiation of light to the substrate 140, and the like can be performed.
[0047]
In S104, lifting pins 136 of stage 130 start pushing up substrate 140. At the same time as the start, the CPU 202 starts taking in the surface potential of the substrate 140 using the surface voltmeter 100.
[0048]
In step S106, the elevating pins 136 stand by when the substrate 140 is pushed up to a predetermined height. The ionizer 110 blows ionized air onto the substrate 140 while the lift pins 136 are on standby. The ionized air neutralizes the charge on the surface of the substrate 140. The substrate 140 is gradually discharged. CPU 202 continuously captures the surface potential of substrate 140. The value of the captured surface potential is stored in the memory 216.
[0049]
In S108, CPU 202 terminates the acquisition of the surface potential when the time set on the software has elapsed. In the present embodiment, this time is a time corresponding to a certain time. The certain time is a time from when the lifting pin 136 starts pushing up to when the hand 122 of the transfer device 120 is to be inserted below the substrate 140. At S 110, CPU 202 specifies measurement data based on data representing the surface potential of substrate 140 stored in memory 216. In the present embodiment, the measurement data refers to the maximum value and the minimum value of the absolute value of the surface potential, and the absolute value of the average value. The absolute value of the average value is a value at two points from time A to time B (first area) and from time C to time D (second area). In the present embodiment, these times are predetermined times based on the time when the lifting pins 136 start pushing up the substrate 140. In the present embodiment, these time lengths are assumed to be equal. The transport device 120 inserts its own hand 122 between the stage 130 and the substrate 140.
[0050]
At S112, CPU 202 compares the calculated values for each of the two regions and determines whether the condition is satisfied. The determination condition in the first area is that the maximum value of the absolute value of the surface potential is equal to or larger than the upper limit threshold. The determination condition in the second area is that the absolute value of the average value of the surface potential is equal to or larger than the lower threshold. However, if the minimum value of the absolute value of the surface potential is equal to or larger than the lower threshold, the absolute value of the average may be lower than the lower threshold. The CPU 202 determines whether there is a possibility that the substrate 140 has been externally discharged, based on the results of those determinations. In the present embodiment, it is determined that the substrate 140 may have been externally discharged in the following cases. The case is a case where the condition is not satisfied in any of the first region and the second region. Network interface 210 outputs information representing the result of the determination to control device 4000. In S114, transfer device 120 takes out substrate 140.
[0051]
In S116, control device 4000 determines whether or not substrate 140 may be damaged by external discharge based on the information output from CPU 202. If it is determined that there is a possibility that substrate 140 has been damaged (YES in S116), the process proceeds to S118. If not (NO in S116), the process proceeds to S120.
[0052]
In S118, transport device 120 transports substrate 140 to the inspection step. In the inspection process, a final determination is made as to whether the substrate 140 is damaged. Substrate 140 may be considered damaged. In that case, the manufacturing process is not performed on the substrate 140. In S120, transfer device 120 transfers substrate 140 to a normal next process.
[0053]
The operation of the static elimination system 1000 based on the above structure and flowchart will be described.
[0054]
[When there is no external discharge]
With reference to FIGS. 6 and 7, a description will be given of the determination of whether there is a possibility that the substrate 140 has been externally discharged and the operation of the charge removal system 1000 when the charge is removed normally.
[0055]
FIG. 6 is a diagram illustrating the relationship between the operation of the static elimination system 1000 according to the present embodiment and the passage of time. FIG. 7 is a diagram illustrating an example of a change in surface potential when the substrate 140 is pushed up from the plate 132 by the lifting pins 136. In this case, the surface potential of the substrate 140 changes substantially along the broken line in FIG.
[0056]
While the substrate 140 is being held by the stage 130 (S100), no external discharge occurs. This is because charges are neutralized between the substrate 140 and the plate 132 of the stage 130. When the suction device of the stage 130 releases the suction of the substrate 140 (S102), the substrate 140 is pushed up by the lifting pins 136 (S104). The substrate 140 is charged. As one moves away from the plate 132, the potential of the charge increases. This situation is shown up to “reaching the ascending position” in FIG. 6 and immediately after the origin in FIG. The CPU 202 starts taking in the surface potential of the substrate 140 using the surface voltmeter 100 at the same time as the start of pushing up by the lifting pin 136.
[0057]
The lifting pin 136 stands by at a predetermined height (pin rising point). This state is shown in the vicinity of the "reaching position" in FIG. 6 and in the vicinity of time B in FIG. The CPU 202 takes in the surface potential of the substrate 140 and stores it in the memory 216. The ionizer 110 removes electricity from the substrate 140 (S106). The surface potential of the substrate 140 gradually decreases after reaching the peak. In FIG. 7, the broken line curve after the surface potential has reached the peak represents this situation.
[0058]
When the time reaches the time F in FIGS. 6 and 7, the CPU 202 ends the acquisition of the surface potential (S108). When the acquisition of the surface potential is completed, the CPU 202 specifies the measurement data in the first area and the second area. The transport device 120 inserts its own hand 122 between the stage 130 and the substrate 140 at the same time as capturing the surface potential (S110).
[0059]
When the transfer device 120 inserts the hand 122, the CPU 202 compares the values for each of the two areas and determines whether the condition is satisfied. Both the first area and the second area satisfy the determination condition. The CPU 202 determines that there is no possibility that the substrate 140 is externally discharged. Network interface 210 outputs information indicating that to control device 4000 (S112). The transport device 120 takes out the substrate 140 (S114).
[0060]
When network interface 210 outputs the information, control device 4000 determines that substrate 140 is not damaged (NO in S116), and transport device 120 transports substrate 140 to the normal next process (S120). .
[0061]
[When external discharge occurs during static elimination]
With reference to FIGS. 6 and 7, a description will be given of a determination when an external discharge occurs during static elimination and an operation of the static elimination system 1000.
[0062]
It is assumed that the substrate 140 has been externally discharged while the ionizer 110 is discharging electricity from the substrate 140 (S106). Generally, an external discharge is generated by contact of a conductor or the like. The solid line in FIG. 7 represents this situation.
[0063]
When the operation up to the insertion of the hand 122 is completed (S108 to S110), the CPU 202 compares the values for each of the two regions and determines whether the condition is satisfied. The second area does not satisfy the determination condition. The CPU 202 determines that the substrate 140 may have been externally discharged. Network interface 210 outputs information indicating that to control device 4000 (S112).
[0064]
When the network interface 210 outputs the information, the control device 4000 determines that the board 140 may be damaged (S114 to S116). Since the substrate 140 may be damaged (YES in S116), the transport device 120 transports the substrate 140 to an inspection process (S118).
[0065]
[When external discharge occurs during pushing up]
With reference to FIG. 8, a description will be given of a determination when an external discharge occurs during the push-up and an operation of the charge removal system 1000.
[0066]
It is assumed that the substrate 140 is externally discharged while the substrate 140 is being pushed up by the lifting pins 136 (S104). The solid line in FIG. 8 represents this situation.
[0067]
When the operation up to the insertion of the hand 122 is completed (S106 to S110), the CPU 202 compares the values for each of the two regions and determines whether the condition is satisfied. Neither the first area nor the second area satisfies the determination condition. The CPU 202 determines that the substrate 140 may have been externally discharged. Network interface 210 outputs information indicating that to control device 4000 (S112).
[0068]
As described above, determination apparatus 2000 according to the present embodiment determines the magnitude of the absolute value of the surface potential of substrate 140. Accordingly, the determination device 2000 can reliably determine the possibility that the substrate 140 has been discharged to the outside. The reason why it can be determined is that if the substrate 140 is not discharged to the outside, its surface potential is higher than in the case of discharging. The damage of the substrate 140 is one of the causes of the external discharge. If an external discharge occurs, the possibility of damage is higher than if no external discharge occurs. When the possibility of discharging to the outside is reliably determined, it is possible to accurately determine the possibility that the substrate 140 has been damaged. As a result, it is possible to provide a determination device that can accurately determine at least the possibility that the substrate 140 has been externally discharged. With this apparatus, a user can inspect whether or not the element has been destroyed only on the substrate that may have been damaged. Unnecessary inspection steps are omitted for substrates that do not require such inspection. As a result, productivity is improved.
[0069]
In the above description, the areas to be determined are not limited to two. The average value of the potential of one region may be determined. FIG. 9 shows an example of the measurement area in that case. However, as described with reference to FIGS. 7 and 8, if the determination is made at a plurality of times, it is possible to determine at which time the external discharge may have occurred. It is effective when making a judgment.
[0070]
Further, the value to be determined is not limited to the average value, the maximum value, and the minimum value, and is not particularly limited as long as the magnitude of the absolute value of the surface potential can be specified. The values to be determined are not necessarily three types of values. The value to be determined may be a value in a region to be determined. The value to be determined may be a value at a certain moment different from the maximum value and the minimum value. The value to be determined may be another value instead of the average value. The value may be a value determined using the sum of a plurality of measured values of the surface potential of the substrate 140. An example of such a value is the absolute value of the integral value of the surface potential. Average values are also examples of such values.
[0071]
In addition, in the above description, the static elimination system 1000 may be a part of a suction cleaner that adsorbs dust on the substrate 140. The charge removal system 1000 may be a part of a cleaning device that cleans the substrate 140. The charge removal system 1000 may be a part of an inspection device that inspects the substrate 140. The charge removal system 1000 may be a part of an exposure apparatus that irradiates the substrate 140 with light.
[0072]
The embodiments disclosed this time are to be considered in all respects as illustrative and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.
[0073]
【The invention's effect】
A determination device, a determination method, a determination program for realizing the determination method, and a computer-readable recording medium storing the program according to the present invention can accurately determine the possibility that an external discharge has occurred in an object. .
[Brief description of the drawings]
FIG. 1 is an overall configuration diagram of a static elimination system according to an embodiment of the present invention.
FIG. 2 is a diagram illustrating a flow of information of the static elimination system according to the embodiment of the present invention.
FIG. 3 is a functional block diagram of the determination device according to the embodiment of the present invention.
FIG. 4 is a configuration diagram illustrating a structure of a hand portion and a stage of the transfer device according to the embodiment of the present invention.
FIG. 5 is a flowchart showing a control procedure of the static elimination system according to the embodiment of the present invention.
FIG. 6 is a diagram illustrating a relationship between an operation of the static elimination system according to the embodiment of the present invention and a lapse of time.
FIG. 7 is a diagram illustrating an example of a change in surface potential when normal charge is removed and an external discharge occurs during charge removal according to the embodiment of the present invention.
FIG. 8 is a diagram illustrating an example of a change in surface potential when an external discharge occurs during lifting of a lifting pin according to the embodiment of the present invention.
FIG. 9 is a diagram illustrating an example of a situation in which a substrate is determined to be damaged based on an average value of one measurement area according to a modification of the embodiment of the present invention.
[Explanation of symbols]
Reference Signs List 100 surface electrometer, 102 sensor, 104 main body, 110 ionizer, 120 transfer device, 122 hand, 130 stage, 132 plate, 134 suction hole, 136 lifting pin, 140 substrate, 200 computer, 202 CPU, 204 fixed disk, 206 communication Interface, 208 monitor, 210 network interface, 212 mouse, 214 keyboard, 216 memory, 218 FD drive, 220 CD-ROM drive, 1000 static elimination system, 2000 judgment device, 3000 factory CIM, 4000 control device.

Claims (11)

Input means for inputting the value of the surface potential of the object,
Comparing the value of the surface potential input from the input means with a threshold value, determining means for determining the possibility that the object has caused an external discharge,
Output means for outputting determination information indicating a result of the determination. The determination device according to claim 1, wherein the value of the surface potential to be compared with the threshold value is a potential value determined using a sum of a plurality of values representing the surface potential at a predetermined time. The determination device according to claim 2, wherein the potential value is an absolute value of an average value of the surface potential at the time. The determination device according to claim 1, wherein the value of the surface potential to be compared with the threshold value is one of a maximum value and a minimum value of the absolute value of the surface potential at a predetermined time. The determination device according to any one of claims 1 to 4, wherein the timing at which the value of the surface potential to be compared with the threshold value includes a specific timing specified based on an operation on the object. The determination device according to claim 5, wherein the specific time is a time including a time when the content of the operation changes. The determination device according to claim 5, wherein the operation is an operation in which the object is separated. There are a plurality of surface potential values to be compared with the threshold value, and there are a plurality of threshold values corresponding to the plurality of surface potential values, and the determining means determines the plurality of surface potential values by the plurality of threshold values. The determination device according to claim 1, further comprising a unit configured to determine a possibility that the object has caused an external discharge by comparing the threshold value with a threshold value. An input step of inputting a value of a surface potential of the object;
A determination step of comparing the value of the surface potential input in the input step with a threshold value to determine the possibility that the object has caused an external discharge;
An output step of outputting determination information indicating a result of the determination. An input step of inputting a value of a surface potential of the object;
A determination step of comparing the value of the surface potential input in the input step with a threshold value to determine the possibility that the object has caused an external discharge;
An output step of outputting determination information representing a result of the determination. A recording medium on which a judgment program is recorded,
An input step of inputting a value of a surface potential of the object;
A determination step of comparing the value of the surface potential input in the input step with a threshold value to determine the possibility that the object has caused an external discharge;
A computer-readable recording medium recording a determination program for causing a computer to perform an output step of outputting determination information indicating a result of the determination.

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