JP2004020364A - Burn-in test equipment - Google Patents

Abstract

An object of the present invention is to urgently stop a burn-in test device when the burn-in test device is in an abnormal state so as not to damage the burn-in test device.
A burn-in tank for performing a burn-in test on the electronic component; a power supply current measuring unit for measuring a power supply current for the burn-in test flowing at a constant number of the electronic components in the burn-in bath; The power supply current measurement unit 11 includes a determination unit 13a that determines an abnormal current, and a power supply interruption unit 14 that interrupts the power supply current. The determination unit 13a determines the power supply current based on the abnormal current of the power supply current measurement unit 11. Cut off.
[Selection diagram] Fig. 1

Description

[0001]
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a burn-in test for an electronic component such as an IC (integrated circuit), which cuts off a power supply voltage when a power supply current or driver waveform is abnormal to prevent damage (destruction) on a burn-in test apparatus side. And a highly reliable burn-in test apparatus.
[0002]
The burn-in test is performed to enhance the reliability of electronic components such as ICs, and therefore, a burn-in test apparatus is required to have higher reliability.
[0003]
2. Description of the Related Art Failures of ICs are classified into failures due to initial deterioration failure which decreases with time, random failures whose failure rate is constant, and degradable failures whose failure rate increases with time. In order to minimize the shipment of ICs that cause malfunctions, semiconductor manufacturers need to eliminate as much as possible the initial deterioration failures in which relatively many failures occur. For this reason, conventionally, a semiconductor maker has performed a burn-in test prior to shipment of an IC to eliminate defective initial deterioration.
[0004]
In the burn-in test, for example, an IC is placed in a burn-in bath at an ambient temperature of 100 ° C., and a power supply voltage (for example, 3.6 V higher than normal (3.3 V)) is applied to the IC and the driver is driven to a signal input terminal of the IC. A signal was applied, and this state was continued for 24 hours. Then, an IC that does not operate normally at a normal use temperature is excluded.
[0005]
SUMMARY OF THE INVENTION The above-mentioned prior art has the following problems.
[0006]
Due to the trouble of the burn-in test equipment, the power supply current supplied to the IC increases, which has an adverse effect on the burn-in test equipment, or the drive waveform of the driver of the burn-in test equipment deteriorates, causing a command error to set the burn-in test equipment. There was a danger that the internal circuit would run away (suicide destruction).
[0007]
An object of the present invention is to solve such a conventional problem and to stop the burn-in test device urgently when the burn-in test device becomes abnormal so as not to damage the burn-in test device.
[0008]
FIG. 1 is a diagram illustrating the principle of the present invention. In FIG. 1, 3 is an abnormal shutoff unit, 4 is a burn-in tank, 11 is a power supply current measuring unit, 13a is a determining unit, 14 is a power shutoff unit, 21 is a driver waveform measuring unit, 41 is a test board, and 43a is an electronic component. is there.
[0009]
The present invention has the following means to solve the above-mentioned conventional problems.
[0010]
(1): a burn-in tank 4 for performing a burn-in test of the electronic component 43a, a power supply current measuring unit 11 for measuring a power supply current of the burn-in test flowing for each fixed number of the electronic components 43a in the burn-in bath 4, The power supply current measurement unit 11 includes a determination unit 13a that determines an abnormal current, and a power supply interruption unit 14 that interrupts the power supply current. The determination unit 13a determines the power supply current based on the abnormal current of the power supply current measurement unit 11. Cut off. For this reason, the abnormal current of the electronic component 43a of a certain number on the test board 41 or the like is determined and cut off, so that damage to the burn-in test apparatus can be reliably prevented, and a highly reliable burn-in test can be performed. It can be carried out.
[0011]
(2): a burn-in tank 4 for performing a burn-in test on the electronic component 43a, a driver waveform measuring unit 21 for measuring a driver waveform for the burn-in test input for each predetermined number of the electronic components 43a in the burn-in tank 4, A determining unit 13a for determining an abnormal waveform of the driver waveform measuring unit 21; and a power supply shutoff unit 14 for interrupting a power supply current of the burn-in test. And interrupt the power supply current. For this reason, abnormal driver waveforms of the electronic components 43a at predetermined intervals on the test board or the like are determined and cut off, so that damage to the burn-in test apparatus can be reliably prevented, and a highly reliable burn-in test can be performed. It can be carried out.
[0012]
(3): In the burn-in test apparatus according to (1) or (2), the power supply current is cut off in units of the fixed number of electronic components 43a in which the abnormal current or the abnormal waveform is measured. For this reason, the burn-in test of an electronic component on another test substrate or the like on which no abnormality has occurred can be continued.
[0013]
DESCRIPTION OF THE PREFERRED EMBODIMENTS (1) Description of Burn-in Test Apparatus FIG. 2 is an explanatory view of a burn-in test apparatus. In FIG. 2, the burn-in test apparatus includes a power supply section 1, a driver generation section 2, an abnormal cutoff section 3, a burn-in tank 4, a temperature control section 5, a timer section 6, a heater section 7, a cooling section 8, a blowing section 9, An / O section 10 is provided.
[0014]
The power supply unit 1 supplies electric power (for example, 3.6 V) to an IC for performing a burn-in test in the burn-in tank 4, and may supply a different voltage for each slot (a connector into which a test board is inserted). It is possible. The driver generation unit 2 generates a signal for driving the IC, and can generate a plurality of types of drive signals (for example, different drive signals for each slot) at the same time by setting.
[0015]
The abnormal shutoff section 3 is for interrupting the power supply voltage when the power supply current or the driver waveform is abnormal, and a plurality of abnormal shutoff sections can be provided for each slot. The burn-in tank 4 is a tank for storing an IC for performing a burn-in test. The temperature controller 5 controls the temperature in the burn-in tank 4. The timer section 6 sets the time of the burn-in test.
[0016]
The heater unit 7 heats the burn-in tank (for example, up to 150 ° C.). The cooling unit 8 cools the burn-in tank (for example, to 0 ° C.). The blower 9 blows air in the burn-in tank. The I / O unit 10 is an interface for inputting and outputting information in order to connect to an external personal computer or the like and externally perform setting, control, and the like of the burn-in test apparatus.
[0017]
In the burn-in test, the temperature control unit 5 controls the inside of the burn-in bath 4 using, for example, the heater unit 7, the cooling unit 8, and the blowing unit 9 so that the temperature in the burn-in bath 4 becomes 100.degree. A power supply voltage from the unit 1 (for example, 3.6 V higher than normal (3.3 V)) and a drive signal from the driver generation unit 2 are applied. This state is maintained by the timer unit 6 for 24 hours. Then, an IC that does not operate normally at a normal use temperature is excluded.
[0018]
(2): Description of installation of abnormal shutoff unit FIG. 3 is an explanatory diagram of installation of the abnormal shutoff unit. In FIG. 3, a plurality of (for example, 20) test boards (cards) 41 are inserted into and fixed to respective connectors (= slots: not shown) in the burn-in tank 4. A plurality of (for example, 50) ICs 43 are mounted on each test board 41 via a connector 42. Further, on the back board side of the burn-in tank 4, the abnormal cutoff section 3 is attached to the test board 41 via the connector 20 (in units of slots). For example, 3.6V power is supplied from the power supply unit 1 to each test board 41. The driver generator 2 supplies a driver waveform corresponding to the IC 43 of each test board 41.
[0019]
(3): Description of abnormal current measurement method FIG. 4 is an explanatory diagram of an abnormal cutoff unit based on abnormal current measurement. In FIG. 4, the power supply current measurement unit 11, the voltage / current display unit 12, the power supply current determination unit 13, the power supply cutoff unit 14, the alarm display unit 15, the test frequency switching unit 16 , A waveform observation terminal section 17 is provided.
[0020]
The power supply current measurement unit 11 measures a current flowing from the power supply unit 1 to one test board 41. The voltage / current display unit 12 displays a power supply voltage and a current. The power supply current judging unit 13 is set in advance (set for each test board 41) based on the type, the number, the driving frequency, and the like of the ICs 43 of the test board 41, and judges a current equal to or larger than the set value as an abnormal current. The power cutoff unit 14 cuts off the current from the power supply unit 1 to the test board 41 based on the determination of the abnormal current by the power supply current determination unit 13. The alarm display section 15 displays an abnormal current or the like determined by the power supply current determination section 13 and gives an alarm. The test frequency switching unit 16 switches the driving frequency of the IC 43. For example, the power supply current is measured by switching the driving frequency of the IC 43 from 100M to 10M. The waveform observation terminal section 17 is connected to an external oscilloscope or the like for performing detailed waveform observation.
[0021]
(Explanation of abnormal current measurement method)
{Circle around (1)} The current from the power supply unit 1 to one test substrate 41 in the burn-in tank 4 is measured by the power supply current measurement unit 11.
[0022]
{Circle around (2)} The measured current is displayed on the voltage / current display unit 12 and the power supply current judging unit 13 judges a preset abnormal current.
[0023]
{Circle around (3)} When the power supply current determination section 13 determines that the current is abnormal, the abnormal current is displayed on the alarm display section 15 and the power supply cutoff section 14 cuts off the current from the power supply section 1 to the test board 41.
[0024]
{Circle around (4)} Further, the test frequency switching section 16 switches the driving (clock) frequency of the IC 43 and measures the power supply current again.
[0025]
In the above description, the power supply current of the test board 41 in which the abnormality has occurred is cut off, but the power supply currents of all the test boards 41 may be cut off.
[0026]
(4): Description of abnormal waveform measurement method FIG. 5 is an explanatory diagram of an abnormal cutoff unit based on abnormal waveform measurement. In FIG. 5, the abnormal shutoff unit 3 inserted into the connector 20 includes a power shutoff unit 14, an alarm display unit 15, a test frequency switching unit 16, a waveform observation terminal unit 17, a driver waveform measurement unit 21, and a driver waveform display unit. 22, a driver waveform determination unit 23 is provided.
[0027]
The power cutoff unit 14 cuts off the current from the power supply unit 1 to the test board 41 based on the determination of the abnormal waveform by the driver waveform determination unit 23. The alarm display unit 15 displays an abnormal waveform (for example, a high-level waveform abnormality) determined by the driver waveform determination unit 23 and gives an alarm. The test frequency switching unit 16 switches the driving frequency of the IC 43. The waveform observation terminal section 17 is connected to an external oscilloscope or the like for performing detailed waveform observation. The driver waveform measuring section 21 measures a waveform for driving the IC 43 of one test board 41 from the driver generating section 2. The driver waveform display unit 22 displays a driver waveform for driving the IC 43. The driver waveform determination unit 23 determines that a waveform (high level, low level, high level or low level width, etc.) that is preset (set for each test board 41, for each clock, etc.) deviates from a specified value as an abnormal waveform. Is determined.
[0028]
(Explanation of abnormal waveform measurement method)
{Circle around (1)} The driver waveform measuring section 21 measures the waveform from the driver generating section 2 to one test board 41 in the burn-in tank 4.
[0029]
{Circle around (2)}: The measured waveform is displayed on the driver waveform display section 22 and an abnormal waveform is determined by the driver waveform determination section 23.
[0030]
{Circle around (3)} When the driver waveform determination section 23 determines that the waveform is abnormal, the abnormal waveform is displayed on the alarm display section 15 and the power cutoff section 14 cuts off the current from the power supply section 1 to the test board 41.
[0031]
{Circle around (4)} Further, the test frequency switching unit 16 switches the driving (clock) frequency of the IC 43 and measures the driver waveform again.
[0032]
In the above description, the power supply current of the test board 41 determined to be abnormal in the driver waveform is cut off, but the power supply current of all the test boards 41 may be cut off. The voltage / current display unit 12, the alarm display unit 15, and the driver waveform display unit 22 can be displayed on the same screen.
[0033]
As described above, according to the present invention, the following effects can be obtained.
[0034]
(1): The power supply current measurement unit measures the power supply current of the burn-in test that flows for each fixed number of electronic components in the burn-in tank, and the determination unit shuts off the power supply current due to the abnormal current of the power supply current measurement unit. In addition, since abnormal currents of electronic components of a predetermined number on a test board or the like are determined and cut off, damage to a burn-in test device can be reliably prevented, and a highly reliable burn-in test can be performed. .
[0035]
(2): The driver waveform measurement unit measures the driver waveform of the burn-in test input every fixed number of electronic components in the burn-in tank, and the determination unit shuts off the power supply current based on the abnormal waveform of the driver waveform measurement unit. In order to perform a reliable burn-in test, it is possible to reliably prevent damage to the burn-in test equipment by determining and interrupting abnormal waveforms of electronic components on a test board or the like at regular intervals. Can be.
[0036]
(3): Since the interruption of the power supply current is performed in units of a fixed number of electronic components whose abnormal current or abnormal waveform is measured, the burn-in test of an electronic component in which no abnormality has occurred can be continued.
[Brief description of the drawings]
FIG. 1 is a diagram illustrating the principle of the present invention.
FIG. 2 is an explanatory diagram of a burn-in test apparatus according to an embodiment.
FIG. 3 is an explanatory diagram of attachment of an abnormal cutoff unit in the embodiment.
FIG. 4 is an explanatory diagram of an abnormal cutoff unit based on abnormal current measurement in the embodiment.
FIG. 5 is an explanatory diagram of an abnormal cutoff unit based on abnormal waveform measurement in the embodiment.
[Explanation of symbols]
3 Abnormal cutoff unit 4 Burn-in tank 11 Power supply current measurement unit 13a Judgment unit 14 Power supply cutoff unit 21 Driver waveform measurement unit 41 Test board 43a Electronic component (IC)

Claims (3)

A burn-in tank for performing a burn-in test for electronic components,
A power supply current measuring unit that measures a power supply current of a burn-in test that flows for each predetermined number of the electronic components in the burn-in tank;
A determining unit that determines an abnormal current of the power supply current measuring unit,
A power cutoff unit that cuts off power supply current,
The burn-in test apparatus, wherein the determination unit cuts off the power supply current based on an abnormal current of the power supply current measurement unit. A burn-in tank for performing a burn-in test for electronic components,
A driver waveform measurement unit that measures a driver waveform of a burn-in test input every fixed number of the electronic components in the burn-in tank;
A determination unit that determines an abnormal waveform of the driver waveform measurement unit,
A power cutoff unit that cuts off the power supply current of the burn-in test,
The burn-in test apparatus, wherein the determination unit cuts off the power supply current based on an abnormal waveform of the driver waveform measurement unit. The burn-in test apparatus according to claim 1, wherein the interruption of the power supply current is performed in units of the predetermined number of electronic components for which the abnormal current or the abnormal waveform is measured.

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