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JP2004061111A - Measurement instrument - Google Patents

Measurement instrument Download PDF

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Publication number
JP2004061111A
JP2004061111A JP2002215348A JP2002215348A JP2004061111A JP 2004061111 A JP2004061111 A JP 2004061111A JP 2002215348 A JP2002215348 A JP 2002215348A JP 2002215348 A JP2002215348 A JP 2002215348A JP 2004061111 A JP2004061111 A JP 2004061111A
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JP
Japan
Prior art keywords
ball
hole
work
light
optical fiber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002215348A
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Japanese (ja)
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JP3849866B2 (en
Inventor
Hideki Machitori
待鳥 秀樹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
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Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Priority to JP2002215348A priority Critical patent/JP3849866B2/en
Priority to EP03765342A priority patent/EP1524493A4/en
Priority to US10/522,190 priority patent/US7187454B2/en
Priority to CNB03817216XA priority patent/CN1294404C/en
Priority to AU2003252230A priority patent/AU2003252230A1/en
Priority to PCT/JP2003/009240 priority patent/WO2004010077A1/en
Publication of JP2004061111A publication Critical patent/JP2004061111A/en
Application granted granted Critical
Publication of JP3849866B2 publication Critical patent/JP3849866B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Measuring Arrangements Characterized By The Use Of Fluids (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inexpensive non-contact measurement instrument which measures the inner diameter, the straightness, the cylindricity, and so forth of a hole formed in a work. <P>SOLUTION: An air/electricity transducer 30 detects a variation in the back pressure of a gas ejected into the hole WA, when a ball 14 is inserted in an automatic centripetal state into the hole WA of the work W is moved in the longitudinal direction of the hole WA. A light-receiving part 22 receives irradiation light from an optical fiber 18 provided to the ball 14. It is constituted so that the inner diameter, the straightness, and the cylindricity of the hole WA are obtained by obtaining the the variation of the peak position A in the amount of irradiation light. Thus, the inexpensive non-contact measurement instrument 10 which measures the inner diameter, the straightness, and the cylindricity of the hole WA is provided. <P>COPYRIGHT: (C)2004,JPO

Description

【0001】
【発明の属する技術分野】
本発明はワークに形成された孔を測定する測定装置に係り、特に孔の内径、真直度、及び円筒度等を非接触で測定する測定機に関する。
【0002】
【従来の技術】
従来、自動車部品や工作機械部品等として数多く使用されている円筒状部品の孔の内径、真直度、及び円筒度等を測定する場合、真円度測定機等を用い、被測定物(以下ワークと称する)を固定して、接触式の検出器を孔の内面に沿って回転させるとともに孔の長手方向に移動させながら測定する方法が主流であった。また、ワークが小物部品の場合は、ワーク回転型の真円度測定機が用いられていた。
【0003】
【発明が解決しようとする課題】
しかし、この真円度測定機は汎用測定機であり種々の機能が備えられており、装置自体が高価である。また、接触式であるため測定面に傷がついたり、触子を引きずった痕が残ったりする。そのため測定圧力を低くした場合、孔の内周部にバリや溝があったときには触子がこのバリや溝に引っ掛かり、測定値がバラツク要因となっていた。
【0004】
本発明は、このような事情に鑑みてなされたもので、ワークに形成された孔の内径、真直度、及び円筒度等を非接触で測定できる安価な測定機を提供することを目的とする。
【0005】
【課題を解決するための手段】
前記目的を達成するために、請求項1に記載の発明は、ワークに形成された孔を測定する測定装置において、前記ワークを保持するとともに該ワークに形成された孔に気体を噴射する噴射口を備えた保持台と、前記ワークに形成された孔に挿入されるボールと、該ボールを支持する弾性部材と、前記ボールに取付けられ、光源から投光される光を搬送して照射する光ファイバと、前記照射された光を受光する受光部と、前記弾性部材、ボール、及び光ファイバを上下に移動する昇降手段と、を有し、前記ワークに形成された孔に前記ボールを挿入し、前記孔に気体を噴射して前記ボールと孔とを自動求心させるとともに、前記ボールを上下移動させたときの、前記受光部で受けた照射光量のピーク位置の変化を求め、これにより前記孔の真直度を求める管制部が設けられていることを特徴としている。
【0006】
請求項1の発明によれば、孔に挿入されたボールが自動求心された状態で孔の長手方向に移動されたときの、ボールに設けられた光ファイバからの照射光を受光部で受け、照射光量のピーク位置の変化を求めることによって孔の真直度を求めているので、非接触で安価な孔の真直度測定機を提供することができる。
【0007】
また、請求項2に記載の発明は、ワークに形成された孔を測定する測定装置において、前記ワークを保持するとともに該ワークに形成された孔に気体を噴射する噴射口を備えた保持台と、前記ワークに形成された孔に挿入されるボールと、該ボールを支持する弾性部材と、前記噴射された気体の背圧の変化を電気信号に変換する空/電変換器と、前記ボールに取付けられ、光源から投光される光を搬送して照射する光ファイバと、前記照射された光を受光する受光部と、前記弾性部材、ボール、及び光ファイバを上下に移動する昇降手段と、を有し、前記ワークに形成された孔に前記ボールを挿入し、前記孔に気体を噴射して前記ボールと孔とを自動求心させるとともに、前記ボールを上下移動させたときの、前記空/電変換器からの信号と、前記受光部で受けた照射光量のピーク位置の変化データとから、前記孔の円筒度を求める管制部が設けられていることを特徴としている。
【0008】
請求項2の発明によれば、孔に挿入されたボールが自動求心された状態で孔の長手方向に移動されたときの、孔に噴射された気体の背圧の変化を空/電変換器で検出するとともに、ボールに設けられた光ファイバからの照射光を受光部で受け、照射光量のピーク位置の変化を求めることによって孔の円筒度を求めているので、非接触で安価な孔の円筒度測定機を提供することができる。
【0009】
請求項3に記載の発明は、請求項1又は請求項2において、前記弾性部材が少なくとも3本の線状の弾性体からなる平行バネであることを特徴としている。請求項3の発明によれば、ボールが少なくとも3本の線状の弾性体からなる平行バネで支持されているので、孔の軸心が曲がっていてもボールが傾くことがなく、照射光量のピーク位置の変化を正確に検出することができる。
【0010】
【発明の実施の形態】
以下添付図面に従って、本発明に係る測定装置の好ましい実施の形態について詳説する。尚各図において、同一の部材については同一の番号又は符号を付している。
【0011】
図1は、本発明に係るワークに形成された孔を測定する測定装置の概念を示す断面図である。測定装置10は、図1に示すように、ワークWを保持する保持台12、ワークWに形成された孔WAの内径よりも僅かに小径のボール14、先端部がボール14の芯を貫通してボール14に固着された光ファイバ18、ボール14の頂部に取付けられ光ファイバ18の先端と対峙するコリメートレンズ19、コリメートレンズ19の上方に配置された受光部22、光ファイバ18の他端部に接続された光源20、先端にボール14が固着された弾性部材16、弾性部材16の他端が接続され弾性部材16とボール14及び光ファイバ18を上下移動させる昇降手段26、空/電変換器30、及び管制部40等から構成されている。
【0012】
ボール14は真球度が良好な鋼球が用いられ、ボール14には芯を貫通する孔が形成されており、この孔に光ファイバ18の先端部が挿入され接着剤で固着されている。また、ボール14の頂部にはコリメートレンズ19が取付けられている。先端がボール14に固着されてボール14を支持する弾性部材16は、中空のストロー状弾性体で、光ファイバ18がその中空内に挿通されている。
【0013】
また、昇降手段26は、既知のリニアガイド、ボールネジ、ステッピングモータ等から構成され、管制部40によって制御されて弾性部材16、ボール14及び光ファイバ18を上下移動させる。
【0014】
保持台12にはワークWの測定すべき孔WAに向けてエアを噴射する噴射口12Aと、噴射口12Aに通ずるエアー供給口12Bが形成されている。このエアー供給口12Bには空/電変換器30を経由して圧縮エアが供給され、供給されたエアは噴射口12AからワークWの孔WAに向けて噴射される。
【0015】
空/電変換器30(以下A/E変換器30と称する)は、供給したエアの背圧の変化をベローズと差動変圧器を用いて電気信号に変換する機器で、変換された電気信号は管制部40に送られる。
【0016】
光源20から投射された光は、光ファイバ18中を搬送され、コリメートレンズ19で平行光線にされて受光部22に照射する。受光部22にはCCDが用いられ、照射光量のピーク位置が検出されるようになっている。あるいはCCDを用いずに4分割フォトセルを用い、管制部40で照射光量のピーク位置を演算する。光源としてはレーザやハロゲンランプが用いられ、絞り込まれた平行光を照射する。
【0017】
保持台12に形成されている噴射口12Aは、貫通孔になっており、ボール14を支持する弾性部材16が挿通されている。この噴射口12Aの下端部にはシール材29が取付けられ、弾性部材16と噴射口12Aとの隙間からエアの漏出を防止している。また、保持台12上面には同じくシール材28が取付けられており、図示しない押圧手段によってワークWを保持台12に押圧固定した時に、ワークWと保持台12上面との隙間をシールしている。
【0018】
管制部40は、測定装置10の各部の動作を制御するとともに、A/E変換器30からの信号及び受光部22からの信号を演算処理し、測定値を求める。
【0019】
次に、このように構成された測定装置10の作用について説明する。先ず測定すべきワークWが保持台12に載置される。このときワークWの下面と保持台12の上面との間はシール材28でシールされる。次にボール14が昇降手段26によって上昇されワークWの孔WAに挿入され、所定の位置に位置付けられる。 次に、圧縮エアがA/E変換器30を介して保持台12のエアー供給口12Bから供給され、噴出口12AからワークWの孔WAに噴射される。供給されたエアは、孔WAとボール14とで形成される隙間を通って上方に排出される。このとき弾性部材16で支持されたボール14は、弾性部材16で片持ち支持されているだけなので、隙間を流れるエアの作用で孔WAの中心に自動求心される。
【0020】
A/E変換器30では、孔WAとボール14とで形成される隙間の大小によって生じる背圧の変化を電気信号に変換し、管制部40に送る。管制部40では、A/E変換器30からの信号からワークWの孔WAの内径を算出する。尚、測定に先立って、正確な孔の内径が既知である2種類のマスタを用い、A/E変換器30の倍率校正がなされる。
【0021】
次いで、ボール14が昇降手段26によって移動され、複数位置における孔WAの内径が測定され、孔WAの簡易的な円筒度が求められる。また、光源20から投光された光は光ファイバ18内を進み、コリメートレンズ19で平行光にされて受光部22に照射され受光部22で受光される。
【0022】
受光部22はCCDあるいは4分割フォトセルで構成されているので、図2で示すような、照射光量のピーク位置Aが求められる。図3は、受光部22として4分割フォトセル22Aを用いた時の、照射光が照射された状態を表わしている。この場合4個の各フォトセルの出力分布から照射光量のピーク位置Aが算出される。即ち、各フォトセルの出力値の比率に対応する面積比率を有する円の中心が反射光量のピーク位置Aとして求められる。
【0023】
このように、ボール14のエアによる自動求心作用を利用するとともに、ボール14をワークWの孔WAの長手方向に移動して、照射光量のピーク位置Aの変位を求めることにより、孔WAの真直度が算出される。また、ボール14を孔WAの長手方向に移動したときの、この真直度データと孔WAの長手方向各位置におけるA/E変換器30による孔WAの内径データとから、孔WAの真直度成分を含めた円筒度が求められる。これらの測定値は、全て管制部40によって演算処理されて求められる。
【0024】
次に、本発明に係る実施形態の変形例について説明する。 ワークWの孔WAが曲がっている場合、ボール14は弾性部材16で片持ち支持された状態で自動求心されるので、僅かに傾く。ボール14が僅かに傾くことにより光ファイバ18からの光の照射方向が傾き、受光部22上の照射光量ピーク位置が若干ずれてしまい真直度測定において僅かな誤差が生じてしまう。このため真直度をより高精度に測定するものとして、図4に示すような変形例がある。
【0025】
図4は、弾性部材16として、光ファイバ18を中心とした円周上に等間隔に配置され、且つ互いに平行な3本のピアノ線で構成された平行バネが用いられた場合を表わしている。ボール14を保持している弾性部材16が3本のピアノ線で平行バネを構成しているので、図4に示すように、ワークWの孔WAが曲がっていても、ボール14が傾くことがなく、受光部22上での照射光量のピーク位置検出に誤差を生じさせることがない。尚、図4ではA/E変換器30、光源20、及び管制部40の記載は省略してある。
【0026】
以上説明した本発明に関わる実施の形態では、測定すべき孔WAの内径測定とボール14の自動求心作用のために圧縮エアを用いたが、これに限らず、N2 ガスやArガス等、適宜選択することができる。
【0027】
また、ボール14の頂天部にコリメートレンズ19を設け、光ファイバ18から照射される光を平行光にしているが、コリメートレンズ19を別部品として設けずに、ファイバ先端にレンズが形成されたレンズ付の光ファイバ18を用いてもよい。
【0028】
【発明の効果】
以上説明したように本発明の孔を測定する測定装置によれば、孔と孔に挿入されたボールとの隙間の大小による気体の背圧の変化を検出して孔の内径が測定されるとともに、ボールを孔に沿って移動したときの、気体の流れによる孔とボールとの自動求心作用を利用し、ボールに取付けられた光ファイバからの照射光量のピーク位置の変位から孔の真直度が測定され、それら両方の測定データから孔の円筒度が算出されるので、非接触で孔の内径、真直度、及び円筒度を測定することのできる安価な孔の測定装置が得られる。
【図面の簡単な説明】
【図1】本発明の実施の形態に係る孔の測定装置を表わす測断面図
【図2】受光部における照射光量を表わすグラフ
【図3】4分割フォトセル上の照射光を示す平面図
【図4】弾性部材に平行バネを用いた場合の測断面図
【符号の説明】
10…測定装置、12…保持台、12A…噴射口、14…ボール、16…弾性部材、16A…平行バネ、18…光ファイバ、19…コリメートレンズ、20…光源、22…受光部、26…昇降手段、28、29…シール材、30…A/E変換器(空/電変換器)、40…管制部、A…光量のピーク位置、W…ワーク、WA…孔
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a measuring device for measuring a hole formed in a work, and more particularly to a measuring device for measuring the inner diameter, straightness, and cylindricity of a hole in a non-contact manner.
[0002]
[Prior art]
Conventionally, when measuring the inner diameter, straightness, cylindricity, and the like of a hole in a cylindrical part that is widely used as an automobile part, a machine tool part, or the like, an object to be measured (hereinafter referred to as a workpiece ) Is fixed, and a contact-type detector is rotated along the inner surface of the hole and measured while moving the detector in the longitudinal direction of the hole. When the work is a small part, a work rotation type roundness measuring machine has been used.
[0003]
[Problems to be solved by the invention]
However, this roundness measuring device is a general-purpose measuring device, has various functions, and the device itself is expensive. In addition, since the contact type is used, the measurement surface is scratched, and traces of dragging the touch element remain. For this reason, when the measurement pressure is reduced, when there is a burr or a groove on the inner peripheral portion of the hole, the tentacle is caught by the burr or the groove, and the measured value is a factor of variation.
[0004]
The present invention has been made in view of such circumstances, and it is an object of the present invention to provide an inexpensive measuring device capable of measuring the inner diameter, straightness, and cylindricity of a hole formed in a work in a non-contact manner. .
[0005]
[Means for Solving the Problems]
In order to achieve the above object, an invention according to claim 1 is a measuring apparatus for measuring a hole formed in a work, wherein an injection port for holding the work and injecting gas into the hole formed in the work. , A ball inserted into a hole formed in the work, an elastic member for supporting the ball, and a light attached to the ball for conveying and emitting light emitted from a light source. A fiber, a light receiving unit that receives the irradiated light, and an elevating unit that moves the elastic member, the ball, and the optical fiber up and down, and inserts the ball into a hole formed in the work. Injecting gas into the hole to automatically center the ball and the hole, and calculating the change in the peak position of the amount of irradiation light received by the light receiving unit when the ball is moved up and down, thereby obtaining the hole. Straightforward Is characterized in that control unit is provided for determining the.
[0006]
According to the invention of claim 1, when the ball inserted into the hole is moved in the longitudinal direction of the hole in a state where the ball is automatically centered, the light receiving unit receives irradiation light from an optical fiber provided in the ball, Since the straightness of the hole is obtained by obtaining the change in the peak position of the irradiation light amount, it is possible to provide a non-contact and inexpensive hole straightness measuring device.
[0007]
According to a second aspect of the present invention, there is provided a measuring device for measuring a hole formed in a work, wherein the holding table has an injection port for holding the work and injecting gas into the hole formed in the work. A ball inserted into a hole formed in the work, an elastic member supporting the ball, a pneumatic / electrical converter for converting a change in back pressure of the injected gas into an electric signal, Attached, an optical fiber for conveying and irradiating light emitted from a light source, a light receiving unit for receiving the emitted light, the elastic member, a ball, and a lifting means for moving the optical fiber up and down, And inserting the ball into a hole formed in the workpiece, injecting gas into the hole to automatically center the ball and the hole, and moving the ball up and down, Signal from the electrical converter From the change data of the peak position of the irradiation light amount received by the light receiving portion, is characterized in that control unit is provided to determine the cylindricity of the hole.
[0008]
According to the invention of claim 2, when the ball inserted into the hole is moved in the longitudinal direction of the hole while being automatically centered, the change in the back pressure of the gas injected into the hole is measured by the pneumatic / electrical converter. In addition to detecting the irradiance from the optical fiber provided on the ball at the light receiving unit and determining the change in the peak position of the irradiating light amount, the cylindricity of the hole is determined, so that a non-contact and inexpensive hole A cylindricity measuring machine can be provided.
[0009]
According to a third aspect of the present invention, in the first or second aspect, the elastic member is a parallel spring composed of at least three linear elastic bodies. According to the third aspect of the present invention, since the ball is supported by the parallel spring made of at least three linear elastic members, the ball does not tilt even if the axis of the hole is bent, and the amount of irradiation light is reduced. A change in the peak position can be accurately detected.
[0010]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, preferred embodiments of a measuring apparatus according to the present invention will be described in detail with reference to the accompanying drawings. In the drawings, the same members are given the same numbers or reference numerals.
[0011]
FIG. 1 is a sectional view showing the concept of a measuring device for measuring holes formed in a work according to the present invention. As shown in FIG. 1, the measuring device 10 includes a holding table 12 for holding a work W, a ball 14 having a diameter slightly smaller than the inside diameter of a hole WA formed in the work W, and a tip portion penetrating the core of the ball 14. An optical fiber 18 fixed to the ball 14, a collimating lens 19 attached to the top of the ball 14 and facing the tip of the optical fiber 18, a light receiving unit 22 disposed above the collimating lens 19, and the other end of the optical fiber 18 , A resilient member 16 having a ball 14 fixed to the tip, an elevating means 26 connected to the other end of the resilient member 16 for vertically moving the resilient member 16, the ball 14 and the optical fiber 18, and a pneumatic / electrical conversion. It comprises a vessel 30, a control unit 40, and the like.
[0012]
As the ball 14, a steel ball having good sphericity is used, and a hole penetrating the core is formed in the ball 14, and the tip of the optical fiber 18 is inserted into this hole and fixed with an adhesive. A collimator lens 19 is attached to the top of the ball 14. The elastic member 16 whose tip is fixed to the ball 14 and supports the ball 14 is a hollow straw-like elastic body, and an optical fiber 18 is inserted into the hollow.
[0013]
The elevating means 26 includes a known linear guide, a ball screw, a stepping motor, and the like, and is controlled by the control unit 40 to move the elastic member 16, the ball 14, and the optical fiber 18 up and down.
[0014]
The holding table 12 is formed with an ejection port 12A for ejecting air toward the hole WA of the workpiece W to be measured, and an air supply port 12B communicating with the ejection port 12A. Compressed air is supplied to the air supply port 12B via the pneumatic / electrical converter 30, and the supplied air is injected from the injection port 12A toward the hole WA of the work W.
[0015]
An air / electric converter 30 (hereinafter, referred to as an A / E converter 30) is a device that converts a change in back pressure of supplied air into an electric signal using a bellows and a differential transformer, and converts the converted electric signal. Is sent to the control unit 40.
[0016]
The light projected from the light source 20 is conveyed through the optical fiber 18, converted into a parallel light by the collimating lens 19, and radiated to the light receiving unit 22. A CCD is used as the light receiving section 22 so that the peak position of the irradiation light amount is detected. Alternatively, the peak position of the irradiation light amount is calculated by the control unit 40 using a four-division photocell without using the CCD. A laser or a halogen lamp is used as a light source, and the collimated light is emitted.
[0017]
The injection port 12 </ b> A formed in the holding table 12 is a through hole, and the elastic member 16 supporting the ball 14 is inserted therethrough. A sealing material 29 is attached to the lower end of the injection port 12A to prevent air from leaking from a gap between the elastic member 16 and the injection port 12A. A seal member 28 is also attached to the upper surface of the holding table 12 to seal a gap between the work W and the upper surface of the holding table 12 when the work W is pressed and fixed to the holding table 12 by pressing means (not shown). .
[0018]
The control unit 40 controls the operation of each unit of the measuring device 10 and also performs arithmetic processing on the signal from the A / E converter 30 and the signal from the light receiving unit 22 to obtain a measured value.
[0019]
Next, the operation of the measuring device 10 thus configured will be described. First, a work W to be measured is placed on the holding table 12. At this time, the space between the lower surface of the work W and the upper surface of the holding table 12 is sealed with the sealant 28. Next, the ball 14 is raised by the lifting means 26 and inserted into the hole WA of the work W, and is positioned at a predetermined position. Next, compressed air is supplied from the air supply port 12B of the holding table 12 via the A / E converter 30, and is injected from the ejection port 12A into the hole WA of the work W. The supplied air is discharged upward through a gap formed by the hole WA and the ball 14. At this time, the ball 14 supported by the elastic member 16 is only cantilevered by the elastic member 16, and is automatically centered on the center of the hole WA by the action of the air flowing through the gap.
[0020]
In the A / E converter 30, a change in back pressure caused by the size of the gap formed between the hole WA and the ball 14 is converted into an electric signal and sent to the control unit 40. The control unit 40 calculates the inner diameter of the hole WA of the work W from the signal from the A / E converter 30. Prior to the measurement, the magnification of the A / E converter 30 is calibrated using two types of masters whose exact inside diameters of the holes are known.
[0021]
Next, the ball 14 is moved by the elevating means 26, the inner diameter of the hole WA at a plurality of positions is measured, and a simple cylindricity of the hole WA is obtained. The light emitted from the light source 20 travels through the optical fiber 18, is collimated by the collimating lens 19, is irradiated on the light receiving unit 22, and is received by the light receiving unit 22.
[0022]
Since the light receiving section 22 is constituted by a CCD or a four-divided photocell, a peak position A of the irradiation light amount as shown in FIG. 2 is obtained. FIG. 3 shows a state in which irradiation light is irradiated when the four-divided photocell 22 </ b> A is used as the light receiving unit 22. In this case, the peak position A of the irradiation light amount is calculated from the output distribution of each of the four photocells. That is, the center of the circle having the area ratio corresponding to the ratio of the output value of each photocell is obtained as the peak position A of the reflected light amount.
[0023]
As described above, by utilizing the automatic centripetal action of the air of the ball 14 and moving the ball 14 in the longitudinal direction of the hole WA of the workpiece W to obtain the displacement of the peak position A of the irradiation light amount, the straightness of the hole WA is obtained. The degree is calculated. The straightness component of the hole WA is calculated from the straightness data when the ball 14 is moved in the longitudinal direction of the hole WA and the inner diameter data of the hole WA by the A / E converter 30 at each position in the longitudinal direction of the hole WA. Is required. These measurement values are all calculated and obtained by the control unit 40.
[0024]
Next, a modified example of the embodiment according to the present invention will be described. When the hole WA of the work W is bent, the ball 14 is slightly inclined because the ball 14 is automatically centered while being supported by the elastic member 16 in a cantilever manner. When the ball 14 is slightly tilted, the direction of irradiation of the light from the optical fiber 18 is tilted, and the peak position of the irradiation light amount on the light receiving unit 22 is slightly shifted, so that a slight error occurs in the straightness measurement. For this reason, there is a modified example as shown in FIG. 4 for measuring straightness with higher accuracy.
[0025]
FIG. 4 shows a case where a parallel spring composed of three piano wires arranged at equal intervals on a circumference around the optical fiber 18 and parallel to each other is used as the elastic member 16. . Since the elastic member 16 holding the ball 14 forms a parallel spring with three piano wires, as shown in FIG. 4, even if the hole WA of the work W is bent, the ball 14 may be inclined. Therefore, no error occurs in the detection of the peak position of the irradiation light amount on the light receiving section 22. In FIG. 4, the illustration of the A / E converter 30, the light source 20, and the control unit 40 is omitted.
[0026]
In the above embodiment according to the present invention described, but using compressed air for automatic centripetal action of internal diameter measurement and the ball 14 to be measured hole WA, not limited thereto, N 2 gas or Ar gas or the like, It can be selected as appropriate.
[0027]
Also, a collimating lens 19 is provided at the top of the ball 14 to make the light emitted from the optical fiber 18 a parallel light, but a lens is formed at the fiber tip without providing the collimating lens 19 as a separate component. An optical fiber 18 with a lens may be used.
[0028]
【The invention's effect】
As described above, according to the measuring device for measuring the hole of the present invention, the inner diameter of the hole is measured by detecting the change in the back pressure of the gas due to the size of the gap between the hole and the ball inserted into the hole. When the ball moves along the hole, the straightness of the hole is determined from the displacement of the peak position of the amount of light emitted from the optical fiber attached to the ball by using the automatic centripetal action between the hole and the ball due to the gas flow. Since the measurement is made and the cylindricity of the hole is calculated from both the measurement data, an inexpensive hole measuring device capable of measuring the inside diameter, straightness, and cylindricity of the hole without contact is obtained.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view illustrating a hole measuring device according to an embodiment of the present invention. FIG. 2 is a graph illustrating an irradiation light amount in a light receiving unit. FIG. 3 is a plan view illustrating irradiation light on a four-divided photocell. FIG. 4 is a cross-sectional view of a measurement when a parallel spring is used as an elastic member.
DESCRIPTION OF SYMBOLS 10 ... Measuring device, 12 ... Holder, 12A ... Injection port, 14 ... Ball, 16 ... Elastic member, 16A ... Parallel spring, 18 ... Optical fiber, 19 ... Collimating lens, 20 ... Light source, 22 ... Light receiving part, 26 ... Elevating means, 28, 29 ... sealing material, 30 ... A / E converter (pneumatic / electrical converter), 40 ... control unit, A ... peak position of light quantity, W ... work, WA ... hole

Claims (3)

ワークに形成された孔を測定する測定装置において、
前記ワークを保持するとともに該ワークに形成された孔に気体を噴射する噴射口を備えた保持台と、
前記ワークに形成された孔に挿入されるボールと、
該ボールを支持する弾性部材と、
前記ボールに取付けられ、光源から投光される光を搬送して照射する光ファイバと、
前記照射された光を受光する受光部と、
前記弾性部材、ボール、及び光ファイバを上下に移動する昇降手段と、を有し、
前記ワークに形成された孔に前記ボールを挿入し、前記孔に気体を噴射して前記ボールと孔とを自動求心させるとともに、前記ボールを上下移動させたときの、前記受光部で受けた照射光量のピーク位置の変化を求め、これにより前記孔の真直度を求める管制部が設けられていることを特徴とする測定装置。
In a measuring device for measuring a hole formed in a work,
A holding table provided with an injection port for holding the work and injecting gas into holes formed in the work,
A ball inserted into a hole formed in the work,
An elastic member supporting the ball,
An optical fiber attached to the ball, for conveying and irradiating light emitted from a light source,
A light receiving unit that receives the irradiated light;
Lifting means for moving the elastic member, the ball, and the optical fiber up and down,
Inserting the ball into the hole formed in the work, injecting gas into the hole to automatically center the ball and the hole, and irradiating the light receiving portion when the ball is moved up and down. A measuring device, comprising: a control unit that obtains a change in a peak position of a light amount and thereby obtains the straightness of the hole.
ワークに形成された孔を測定する測定装置において、
前記ワークを保持するとともに該ワークに形成された孔に気体を噴射する噴射口を備えた保持台と、
前記ワークに形成された孔に挿入されるボールと、
該ボールを支持する弾性部材と、
前記噴射された気体の背圧の変化を電気信号に変換する空/電変換器と、
前記ボールに取付けられ、光源から投光される光を搬送して照射する光ファイバと、
前記照射された光を受光する受光部と、
前記弾性部材、ボール、及び光ファイバを上下に移動する昇降手段と、を有し、
前記ワークに形成された孔に前記ボールを挿入し、前記孔に気体を噴射して前記ボールと孔とを自動求心させるとともに、前記ボールを上下移動させたときの、前記空/電変換器からの信号と、前記受光部で受けた照射光量のピーク位置の変化データとから、前記孔の円筒度を求める管制部が設けられていることを特徴とする測定装置。
In a measuring device for measuring a hole formed in a work,
A holding table provided with an injection port for holding the work and injecting gas into holes formed in the work,
A ball inserted into a hole formed in the work,
An elastic member supporting the ball,
A pneumatic / electrical converter for converting a change in back pressure of the injected gas into an electric signal;
An optical fiber attached to the ball, for conveying and irradiating light emitted from a light source,
A light receiving unit that receives the irradiated light;
Lifting means for moving the elastic member, the ball, and the optical fiber up and down,
The ball is inserted into a hole formed in the work, and gas is injected into the hole to automatically center the ball and the hole, and when the ball is moved up and down, And a control unit for obtaining the cylindricity of the hole from the signal of the light receiving unit and the change data of the peak position of the irradiation light amount received by the light receiving unit.
前記弾性部材が少なくとも3本の線状の弾性体からなる平行バネであることを特徴とする請求項1又は請求項2に記載の測定装置。The measuring device according to claim 1, wherein the elastic member is a parallel spring including at least three linear elastic bodies.
JP2002215348A 2002-07-24 2002-07-24 measuring device Expired - Fee Related JP3849866B2 (en)

Priority Applications (6)

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JP2002215348A JP3849866B2 (en) 2002-07-24 2002-07-24 measuring device
EP03765342A EP1524493A4 (en) 2002-07-24 2003-07-22 Measuring device
US10/522,190 US7187454B2 (en) 2002-07-24 2003-07-22 Measuring device
CNB03817216XA CN1294404C (en) 2002-07-24 2003-07-22 Measuring device
AU2003252230A AU2003252230A1 (en) 2002-07-24 2003-07-22 Measuring device
PCT/JP2003/009240 WO2004010077A1 (en) 2002-07-24 2003-07-22 Measuring device

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008224443A (en) * 2007-03-13 2008-09-25 Tokyo Seimitsu Co Ltd Inner diameter measuring device and inner diameter measuring method
JP2008241450A (en) * 2007-03-27 2008-10-09 Showa Denko Kk Method and device for inspecting opening diameter of disk-like substrate having circular opening part in central part
JP2017137558A (en) * 2016-02-05 2017-08-10 住友化学株式会社 Manufacturing method of cylindrical target
JP2017179607A (en) * 2017-05-26 2017-10-05 住友化学株式会社 Cylindrical target

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008224443A (en) * 2007-03-13 2008-09-25 Tokyo Seimitsu Co Ltd Inner diameter measuring device and inner diameter measuring method
JP2008241450A (en) * 2007-03-27 2008-10-09 Showa Denko Kk Method and device for inspecting opening diameter of disk-like substrate having circular opening part in central part
JP2017137558A (en) * 2016-02-05 2017-08-10 住友化学株式会社 Manufacturing method of cylindrical target
US10670384B2 (en) 2016-02-05 2020-06-02 Sumitomo Chemical Company, Limited Cylindrical target production method and cylindrical target
JP2017179607A (en) * 2017-05-26 2017-10-05 住友化学株式会社 Cylindrical target

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