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JP2004061110A - Measurement instrument - Google Patents

Measurement instrument Download PDF

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Publication number
JP2004061110A
JP2004061110A JP2002215347A JP2002215347A JP2004061110A JP 2004061110 A JP2004061110 A JP 2004061110A JP 2002215347 A JP2002215347 A JP 2002215347A JP 2002215347 A JP2002215347 A JP 2002215347A JP 2004061110 A JP2004061110 A JP 2004061110A
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JP
Japan
Prior art keywords
ball
hole
work
light
measuring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002215347A
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Japanese (ja)
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JP3897248B2 (en
Inventor
Hideki Machitori
待鳥 秀樹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
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Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Priority to JP2002215347A priority Critical patent/JP3897248B2/en
Priority to EP03765342A priority patent/EP1524493A4/en
Priority to US10/522,190 priority patent/US7187454B2/en
Priority to CNB03817216XA priority patent/CN1294404C/en
Priority to AU2003252230A priority patent/AU2003252230A1/en
Priority to PCT/JP2003/009240 priority patent/WO2004010077A1/en
Publication of JP2004061110A publication Critical patent/JP2004061110A/en
Application granted granted Critical
Publication of JP3897248B2 publication Critical patent/JP3897248B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

<P>PROBLEM TO BE SOLVED: To provide an inexpensive non-contact measurement instrument which measures the inner diameter, the straightness, the cylindricity, and so forth of a hole formed in a work. <P>SOLUTION: An air/electricity transducer 30 detects a variation in the back pressure of a gas ejected into the hole WA, when a ball 14 is inserted in an automatic centripetal state into the hole WA of the work W is moved in the longitudinal direction of the hole WA. A light-receiving part 22 receives reflected light from a reflection member 18 provided to the ball 14. It is constituted so that the inner diameter, the straightness, and the cylindricity of the hole WA are obtained by obtaining the the variation in the peak position A in the amount of reflected light. Thus, the inexpensive non-contact measurement instrument 10 which measures the inner diameter, the straightness, and the cylindricity of the hole WA is provided. <P>COPYRIGHT: (C)2004,JPO

Description

【0001】
【発明の属する技術分野】
本発明はワークに形成された孔を測定する測定装置に係り、特に孔の内径、真直度、及び円筒度等を非接触で測定する測定機に関する。
【0002】
【従来の技術】
従来、自動車部品や工作機械部品等として数多く使用されている円筒状部品の孔の内径、真直度、及び円筒度等を測定する場合、真円度測定機等を用い、被測定物(以下ワークと称する)を固定して、接触式の検出器を孔の内面に沿って回転させるとともに孔の長手方向に移動させながら測定する方法が主流であった。また、ワークが小物部品の場合は、ワーク回転型の真円度測定機が用いられていた。
【0003】
【発明が解決しようとする課題】
しかし、この真円度測定機は汎用測定機であり種々の機能が備えられており、装置自体が高価である。また、接触式であるため測定面に傷がついたり、触子を引きずった痕が残ったりする。そのため測定圧力を低くした場合、孔の内周部にバリや溝があったときには触子がこのバリや溝に引っ掛かり、測定値がバラツク要因となっていた。
【0004】
本発明は、このような事情に鑑みてなされたもので、ワークに形成された孔の内径、真直度、及び円筒度等を非接触で測定できる安価な測定機を提供することを目的とする。
【0005】
【課題を解決するための手段】
前記目的を達成するために、請求項1に記載の発明は、ワークに形成された孔を測定する測定装置において、前記ワークを保持するとともに該ワークに形成された孔に気体を噴射する噴射口を備えた保持台と、前記ワークに形成された孔に挿入されるボールと、該ボールを支持する弾性部材と、前記噴射された気体の背圧の変化を電気信号に変換する空/電変換器と、を有し、前記ワークに形成された孔に前記ボールを挿入するとともに前記孔に気体を噴射したときの、前記空/電変換器からの信号によって前記孔の内径を求める管制部が設けられていることを特徴としている。
【0006】
請求項1の発明によれば、孔の内周面とボールとで形成される隙間に気体を噴射し、噴射された気体の背圧の変化を空/電変換器で検出し孔の内径を求めているので、非接触で安価な内径測定機を提供することができる。
【0007】
また、請求項2に記載の発明は、ワークに形成された孔を測定する測定装置において、前記ワークを保持するとともに該ワークに形成された孔に気体を噴射する噴射口を備えた保持台と、前記ワークに形成された孔に挿入されるボールと、該ボールを支持する弾性部材と、前記ボールに取付けられ光源から供給される光を反射する反射部材と、前記反射された光を受光する受光部と、前記弾性部材と前記ボールとを上下に移動する昇降手段と、を有し、前記ワークに形成された孔に前記ボールを挿入し、前記孔に気体を噴射して前記ボールと孔とを自動求心させるとともに、前記ボールを上下移動させたときの、前記反射部材によって反射された光源からの光を前記受光部で受けて反射光量のピーク位置の変化を求め、これにより前記孔の真直度を求める管制部が設けられていることを特徴としている。
【0008】
請求項2の発明によれば、孔に挿入されたボールが自動求心された状態で孔の長手方向に移動されたときの、ボールに設けられた反射部材からの反射光を受光部で受け、反射光量のピーク位置の変化を求めることによって孔の真直度を求めているので、非接触で安価な孔の真直度測定機を提供することができる。
【0009】
更に、請求項3に記載の発明は、ワークに形成された孔を測定する測定装置において、前記ワークを保持するとともに該ワークに形成された孔に気体を噴射する噴射口を備えた保持台と、前記ワークに形成された孔に挿入されるボールと、該ボールを支持する弾性部材と、前記噴射された気体の背圧の変化を電気信号に変換する空/電変換器と、前記ボールに取付けられ光源から供給される光を反射する反射部材と、前記反射された光を受光する受光部と、前記弾性部材と前記ボールとを上下に移動する昇降手段と、を有し、前記ワークに形成された孔に前記ボールを挿入し、前記孔に気体を噴射して前記ボールと孔とを自動求心させるとともに、前記ボールを上下移動させたときの、前記空/電変換器からの信号と、前記反射部材によって反射された光源からの光を受けた前記受光部での反射光量のピーク位置の変化データとから、前記孔の円筒度を求める管制部が設けられていることを特徴としている。
【0010】
請求項3の発明によれば、孔に挿入されたボールが自動求心された状態で孔の長手方向に移動されたときの、孔に噴射された気体の背圧の変化を空/電変換器で検出するとともに、ボールに設けられた反射部材からの反射光を受光部で受け、反射光量のピーク位置の変化を求めることによって孔の円筒度を求めているので、非接触で安価な孔の円筒度測定機を提供することができる。
【0011】
請求項4に記載の発明は、請求項2又は請求項3において、前記反射部材がコーナーキューブであることを特徴としている。請求項4の発明によれば、コーナーキューブを反射部材としているので、光源から照射された光は入射角度と出射角度が常に同一となり、ボールを上下移動させたときにボールが傾いても反射光量のピーク位置の変化を正確に検出することができる。
【0012】
請求項5に記載の発明は、請求項2又は請求項3において、前記弾性部材が少なくとも3本の線状の弾性体からなる平行バネであることを特徴としている。請求項5の発明によれば、ボールが少なくとも3本の線状の弾性体からなる平行バネで支持されているので、孔の軸心が曲がっていてもボールが傾くことがなく、反射光量のピーク位置の変化を正確に検出することができる。
【0013】
【発明の実施の形態】
以下添付図面に従って、本発明に係る測定装置の好ましい実施の形態について詳説する。尚各図において、同一の部材については同一の番号又は符号を付している。
【0014】
図1は、本発明に係るワークに形成された孔を測定する測定装置の概念を示す断面図である。測定装置10は、図1に示すように、ワークWを保持する保持台12、ワークWに形成された孔WAの内径よりも僅かに小径のボール14、先端にボール14が固着された弾性部材16、弾性部材16の他端が接続され弾性部材16及びボール14を上下移動させる昇降手段26、空/電変換器30、ボール14の上部に取付けられた反射部材18、光源20、受光部22、ハーフミラー24、及び管制部40等から構成されている。
【0015】
ボール14は真球度が良好な鋼球が用いられ、先端がボール14に固着されてボール14を支持する弾性部材16にはピアノ線が用いられている。また、昇降手段26は、既知のリニアガイド、ボールネジ、ステッピングモータ等から構成され、管制部40によって制御されて弾性部材16及びボール14を上下移動させる。
【0016】
保持台12にはワークWの測定すべき孔WAに向けてエアを噴射する噴射口12Aと、噴射口12Aに通ずるエアー供給口12Bが形成されている。このエアー供給口12Bには空/電変換器30を経由して圧縮エアが供給され、供給されたエアは噴射口12AからワークWの孔WAに向けて噴射される。
【0017】
空/電変換器30(以下A/E変換器30と称する)は、供給したエアの背圧の変化をベローズと差動変圧器を用いて電気信号に変換する機器で、変換された電気信号は管制部40に送られる。
【0018】
ハーフミラー24は、光源20から投射された光の略半分を反射して反射部材18に照射するとともに、反射部材18からの反射光の略半分を透過して受光部22に照射する。受光部22にはCCDが用いられ、反射光量のピーク位置が検出されるようになっている。あるいはCCDを用いずに4分割フォトセルを用い、管制部40で反射光量のピーク位置を演算する。光源としてはレーザやハロゲンランプが用いられ、絞り込まれた平行光を照射する。
【0019】
保持台12に形成されている噴射口12Aは、貫通孔になっており、ボール14を支持する弾性部材16が挿通されている。この噴射口12Aの下端部にはシール材29が取付けられ、弾性部材16と噴射口12Aとの隙間からエアの漏出を防止している。また、また、保持台12上面には同じくシール材28が取付けられており、図示しない押圧手段によってワークWを保持台12に押圧固定した時に、ワークWと保持台12上面との隙間をシールしている。
【0020】
管制部40は、測定装置10の各部の動作を制御するとともに、A/E変換器30からの信号及び受光部22からの信号を演算処理し、測定値を求める。
【0021】
次に、このように構成された測定装置10の作用について説明する。先ず測定すべきワークWが保持台12に載置される。このときワークWの下面と保持台12の上面との間はシール材28でシールされる。次にボール14が昇降手段26によって上昇されワークWの孔WAに挿入され、所定の位置に位置付けられる 次に、圧縮エアがA/E変換器30を介して保持台12のエアー供給口12Bから供給され、噴出口12AからワークWの孔WAに噴射される。供給されたエアは、孔WAとボール14とで形成される隙間を通って上方に排出される。このとき弾性部材16で支持されたボール14は、弾性部材16で片持ち支持されているだけなので、隙間を流れるエアの作用で孔WAの中心に自動求心される。
【0022】
A/E変換器30では、孔WAとボール14とで形成される隙間の大小によって生じる背圧の変化を電気信号に変換し、管制部40に送る。管制部40では、A/E変換器30からの信号からワークWの孔WAの内径を算出する。尚、測定に先立って、正確な孔の内径が既知である2種類のマスタを用い、A/E変換器30の倍率校正がなされる。
【0023】
次いで、ボール14が昇降手段26によって移動され、複数位置における孔WAの内径が測定され、孔WAの簡易的な円筒度が求められる。
【0024】
ボール14の頂部に取付けられた反射部材18は円形であり、反射部材18には、ハーフミラー24を介して光源20から平行光線が照射される。照射された光は反射されて受光部22で受光される。受光部22はCCDあるいは4分割フォトセルで構成されているので、図2で示すような、反射部材18で反射された光の光量のピーク位置Aが求められる。
【0025】
図3は、受光部22として4分割フォトセル22Aを用いた時の、反射光が照射された状態を表わしている。4個の各フォトセルの出力分布から反射光量のピーク位置Aが算出される。即ち、各フォトセルの出力値の比率に対応する面積比率を有する円の中心が反射光量のピーク位置Aとして求められる。
【0026】
ボール14のエアによる自動求心作用を利用して、ボール14をワークWの孔WAの長手方向に移動して、反射光量のピーク位置Aの変位を求めることにより、孔WAの真直度が算出される。また、ボール14を孔WAの長手方向に移動したときの、この真直度データと孔WAの長手方向各位置におけるA/E変換器30による内径データとから、孔WAの真直度成分を含めた円筒度が求められる。これらの測定値は、全て管制部40によって演算処理されて求められる。
【0027】
図4は、反射部材18としてコーナーキューブ18Aを用いた場合を表わしている。図4に示すように、ワークWの孔WAが曲がっている場合、ボール14は弾性部材16で片持ち支持された状態で自動求心されるので、僅かに傾く。反射部材18が平面鏡の場合は、ボールが僅かに傾くことにより平面鏡も僅かに傾き、受光部22上の照射光量ピーク位置が若干ずれてしまい真直度測定において僅かな誤差が生じてしまう。
【0028】
しかし、反射部材18が図4に示すようにコーナーキューブ18Aであれば、光のコーナーキューブ18Aへの入射角と反射角が常に同じなので、コーナーキューブ18Aが傾いても受光部22上の反射光量ピーク位置がずれることがなく、より高精度に孔WAの真直度を求めることができる。尚、図4ではA/E変換器30、光源20、及び管制部40の記載は省略してある。(以下図5においてもA/E変換器30、光源20、及び管制部40の記載が省略されている。)
図5は、弾性部材16として円周上等間隔に配置され、且つ互いに平行な3本のピアノ線で構成された平行バネが用いられた場合を表わしている。図5(a)はワークWの孔WAがまっすぐな状態を示し、図5(b)はワークWの孔WAが曲がっている状態を示している。ボール14を保持している弾性部材16が3本のピアノ線で平行バネを構成しているので、図5(b)に示すように、ワークWの孔WAが曲がっていても、反射部材18が傾くことがなく、反射部材18が平面鏡であっても受光部22上での反射光量のピーク位置検出に誤差が生じることがなく、図4の場合と同じく、より高精度に孔WAの真直度を求めることができる。
【0029】
以上説明した本発明に関わる実施の形態では、測定すべき孔WAの内径測定とボール14の自動求心作用のために圧縮エアを用いたが、これに限らず、N2 ガスやArガス等、適宜選択することができる。
【0030】
【発明の効果】
以上説明したように本発明の孔を測定する測定装置によれば、孔と孔に挿入されたボールとの隙間の大小による気体の背圧の変化を検出して孔の内径が測定され、ボールを孔に沿って移動したときの、気体の流れによる孔とボールとの自動求心作用とボールに取付けられた反射部材からの反射光量のピーク位置の変位とから孔の真直度が測定され、それら両方の測定データから孔の円筒度が算出されるので、非接触で孔の内径、真直度、及び円筒度を測定することのできる安価な孔の測定装置が得られる。
【図面の簡単な説明】
【図1】本発明の実施の形態に係る孔の測定装置を表わす測断面図
【図2】受光部における反射光量を表わすグラフ
【図3】4分割フォトセル上の反射光を示す平面図
【図4】反射部材にコーナーキューブを用いた場合の測断面図
【図5】弾性部材に平行バネを用いた場合の測断面図
【符号の説明】
10…測定装置、12…保持台、12A…噴射口、14…ボール、16…弾性部材、16A…平行バネ、18…反射部材、18A…コーナーキューブ、18B…ミラー、20…光源、22…受光部、24…ハーフミラー、26…昇降手段、28、29…シール材、30…A/E変換器(空/電変換器)、40…管制部、A…光量のピーク位置、W…ワーク、WA…孔
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a measuring device for measuring a hole formed in a work, and more particularly to a measuring device for measuring the inner diameter, straightness, and cylindricity of a hole in a non-contact manner.
[0002]
[Prior art]
Conventionally, when measuring the inner diameter, straightness, cylindricity, and the like of a hole in a cylindrical part that is widely used as an automobile part, a machine tool part, or the like, an object to be measured (hereinafter referred to as a workpiece ) Is fixed, and a contact-type detector is rotated along the inner surface of the hole and measured while moving the detector in the longitudinal direction of the hole. When the work is a small part, a work rotation type roundness measuring machine has been used.
[0003]
[Problems to be solved by the invention]
However, this roundness measuring device is a general-purpose measuring device, has various functions, and the device itself is expensive. In addition, since the contact type is used, the measurement surface is scratched, and traces of dragging the touch element remain. For this reason, when the measurement pressure is reduced, when there is a burr or a groove on the inner peripheral portion of the hole, the tentacle is caught by the burr or the groove, and the measured value is a factor of variation.
[0004]
The present invention has been made in view of such circumstances, and it is an object of the present invention to provide an inexpensive measuring device capable of measuring the inner diameter, straightness, and cylindricity of a hole formed in a work in a non-contact manner. .
[0005]
[Means for Solving the Problems]
In order to achieve the above object, an invention according to claim 1 is a measuring apparatus for measuring a hole formed in a work, wherein an injection port for holding the work and injecting gas into the hole formed in the work. , A ball inserted into a hole formed in the work, an elastic member supporting the ball, and a pneumatic / electrical converter for converting a change in back pressure of the injected gas into an electric signal. A control unit for determining an inner diameter of the hole by a signal from the pneumatic / electrical converter when the ball is inserted into the hole formed in the work and gas is injected into the hole when the ball is inserted into the hole. It is characterized by being provided.
[0006]
According to the first aspect of the present invention, a gas is injected into a gap formed between the inner peripheral surface of the hole and the ball, a change in back pressure of the injected gas is detected by the pneumatic / electrical converter, and the inner diameter of the hole is determined. Since it is required, a non-contact and inexpensive inner diameter measuring machine can be provided.
[0007]
According to a second aspect of the present invention, there is provided a measuring device for measuring a hole formed in a work, wherein the holding table has an injection port for holding the work and injecting gas into the hole formed in the work. A ball inserted into a hole formed in the workpiece, an elastic member supporting the ball, a reflecting member attached to the ball and reflecting light supplied from a light source, and receiving the reflected light A light-receiving unit, elevating means for moving the elastic member and the ball up and down, inserting the ball into a hole formed in the work, and injecting gas into the hole to form the ball and the hole. And when the ball is moved up and down, the light from the light source reflected by the reflecting member is received by the light receiving section to determine a change in the peak position of the amount of reflected light. true It is characterized in that control unit for determining a degree is provided.
[0008]
According to the invention of claim 2, when the ball inserted into the hole is moved in the longitudinal direction of the hole in a state where the ball is automatically centered, the light receiving portion receives reflected light from a reflecting member provided on the ball, Since the straightness of the hole is obtained by obtaining the change in the peak position of the reflected light amount, it is possible to provide a non-contact and inexpensive hole straightness measuring device.
[0009]
Further, the invention according to claim 3 is a measuring apparatus for measuring a hole formed in a work, wherein the holding table has an injection port for holding the work and injecting gas into the hole formed in the work. A ball inserted into a hole formed in the work, an elastic member supporting the ball, a pneumatic / electrical converter for converting a change in back pressure of the injected gas into an electric signal, A reflecting member that is attached and reflects light supplied from the light source, a light receiving unit that receives the reflected light, and an elevating unit that moves the elastic member and the ball up and down; and The ball is inserted into the formed hole, gas is injected into the hole to automatically center the ball and the hole, and a signal from the pneumatic / electrical converter when the ball is moved up and down. , By the reflecting member From the change data of the peak position of the reflected light at the light receiving section receives light from Isa light source, is characterized in that control unit is provided to determine the cylindricity of the hole.
[0010]
According to the third aspect of the present invention, when the ball inserted into the hole is moved in the longitudinal direction of the hole while being automatically centered, the change in the back pressure of the gas injected into the hole is measured by the pneumatic / electrical converter. And the reflected light from the reflecting member provided on the ball is received by the light receiving unit, and the change in the peak position of the reflected light amount is determined to determine the cylindricity of the hole. A cylindricity measuring machine can be provided.
[0011]
According to a fourth aspect of the present invention, in the second or third aspect, the reflecting member is a corner cube. According to the fourth aspect of the present invention, since the corner cube is used as the reflecting member, the light emitted from the light source always has the same incident angle and the same outgoing angle, and the amount of reflected light even when the ball is tilted when the ball is moved up and down. The change of the peak position can be accurately detected.
[0012]
According to a fifth aspect of the present invention, in the second or third aspect, the elastic member is a parallel spring composed of at least three linear elastic bodies. According to the fifth aspect of the present invention, since the ball is supported by the parallel spring made of at least three linear elastic members, the ball does not tilt even if the axis of the hole is bent, and the reflected light amount is reduced. A change in the peak position can be accurately detected.
[0013]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, preferred embodiments of a measuring apparatus according to the present invention will be described in detail with reference to the accompanying drawings. In the drawings, the same members are given the same numbers or reference numerals.
[0014]
FIG. 1 is a sectional view showing the concept of a measuring device for measuring holes formed in a work according to the present invention. As shown in FIG. 1, the measuring device 10 includes a holding table 12 for holding a work W, a ball 14 having a diameter slightly smaller than the inside diameter of a hole WA formed in the work W, and an elastic member having the ball 14 fixed to the tip. 16, lifting / lowering means 26 connected to the other end of the elastic member 16 to move the elastic member 16 and the ball 14 up and down, a pneumatic / electrical converter 30, a reflecting member 18 attached to the upper part of the ball 14, a light source 20, a light receiving section 22 , A half mirror 24, a control unit 40, and the like.
[0015]
As the ball 14, a steel ball having good sphericity is used, and a piano wire is used as the elastic member 16 whose tip is fixed to the ball 14 and supports the ball 14. The elevating means 26 includes a known linear guide, a ball screw, a stepping motor, and the like, and is controlled by the control unit 40 to move the elastic member 16 and the ball 14 up and down.
[0016]
The holding table 12 is formed with an ejection port 12A for ejecting air toward the hole WA of the workpiece W to be measured, and an air supply port 12B communicating with the ejection port 12A. Compressed air is supplied to the air supply port 12B via the pneumatic / electrical converter 30, and the supplied air is injected from the injection port 12A toward the hole WA of the work W.
[0017]
An air / electric converter 30 (hereinafter, referred to as an A / E converter 30) is a device that converts a change in back pressure of supplied air into an electric signal using a bellows and a differential transformer, and converts the converted electric signal. Is sent to the control unit 40.
[0018]
The half mirror 24 reflects substantially half of the light projected from the light source 20 to irradiate the reflecting member 18, and transmits substantially half of the reflected light from the reflecting member 18 to irradiate the light receiving unit 22. A CCD is used as the light receiving unit 22 so that the peak position of the reflected light amount is detected. Alternatively, the peak position of the amount of reflected light is calculated by the control unit 40 using a four-divided photocell without using a CCD. A laser or a halogen lamp is used as a light source, and the collimated light is emitted.
[0019]
The injection port 12 </ b> A formed in the holding table 12 is a through hole, and the elastic member 16 supporting the ball 14 is inserted therethrough. A sealing material 29 is attached to the lower end of the injection port 12A to prevent air from leaking from a gap between the elastic member 16 and the injection port 12A. Further, a seal member 28 is similarly attached to the upper surface of the holding table 12 to seal a gap between the work W and the upper surface of the holding table 12 when the work W is pressed and fixed to the holding table 12 by pressing means (not shown). ing.
[0020]
The control unit 40 controls the operation of each unit of the measuring device 10 and also performs arithmetic processing on the signal from the A / E converter 30 and the signal from the light receiving unit 22 to obtain a measured value.
[0021]
Next, the operation of the measuring device 10 thus configured will be described. First, a work W to be measured is placed on the holding table 12. At this time, the space between the lower surface of the work W and the upper surface of the holding table 12 is sealed with the sealant 28. Then the ball 14 is inserted into the hole WA of elevated work W by the lifting means 26, 0 is positioned at a predetermined position then the air supply port 12B of the holding compressed air via the A / E converter 30 base 12 From the jet port 12A, and is jetted into the hole WA of the workpiece W. The supplied air is discharged upward through a gap formed by the hole WA and the ball 14. At this time, the ball 14 supported by the elastic member 16 is only cantilevered by the elastic member 16, and is automatically centered on the center of the hole WA by the action of the air flowing through the gap.
[0022]
In the A / E converter 30, a change in back pressure caused by the size of the gap formed between the hole WA and the ball 14 is converted into an electric signal and sent to the control unit 40. The control unit 40 calculates the inner diameter of the hole WA of the work W from the signal from the A / E converter 30. Prior to the measurement, the magnification of the A / E converter 30 is calibrated using two types of masters whose exact inside diameters of the holes are known.
[0023]
Next, the ball 14 is moved by the elevating means 26, the inner diameter of the hole WA at a plurality of positions is measured, and a simple cylindricity of the hole WA is obtained.
[0024]
The reflecting member 18 attached to the top of the ball 14 has a circular shape, and the reflecting member 18 is irradiated with parallel rays from a light source 20 via a half mirror 24. The irradiated light is reflected and received by the light receiving section 22. Since the light receiving section 22 is constituted by a CCD or a four-segment photocell, a peak position A of the amount of light reflected by the reflecting member 18 as shown in FIG. 2 is obtained.
[0025]
FIG. 3 shows a state where reflected light is applied when the four-divided photocell 22A is used as the light receiving unit 22. The peak position A of the reflected light amount is calculated from the output distribution of each of the four photocells. That is, the center of the circle having the area ratio corresponding to the ratio of the output value of each photocell is obtained as the peak position A of the reflected light amount.
[0026]
The straightness of the hole WA is calculated by moving the ball 14 in the longitudinal direction of the hole WA of the workpiece W using the automatic centripetal action of the ball 14 by air and calculating the displacement of the peak position A of the reflected light amount. You. Further, from the straightness data when the ball 14 is moved in the longitudinal direction of the hole WA and the inner diameter data by the A / E converter 30 at each position in the longitudinal direction of the hole WA, a straightness component of the hole WA is included. Cylindricity is required. These measurement values are all calculated and obtained by the control unit 40.
[0027]
FIG. 4 shows a case where a corner cube 18 </ b> A is used as the reflection member 18. As shown in FIG. 4, when the hole WA of the work W is bent, the ball 14 is automatically centered while being supported by the elastic member 16 in a cantilever manner, and thus slightly tilts. When the reflecting member 18 is a plane mirror, the plane mirror is also slightly tilted when the ball is slightly tilted, and the irradiation light amount peak position on the light receiving unit 22 is slightly shifted, which causes a slight error in straightness measurement.
[0028]
However, if the reflecting member 18 is a corner cube 18A as shown in FIG. 4, the angle of incidence of light on the corner cube 18A and the angle of reflection are always the same. The straightness of the hole WA can be obtained with higher accuracy without shifting the peak position. In FIG. 4, the illustration of the A / E converter 30, the light source 20, and the control unit 40 is omitted. (Hereinafter, also in FIG. 5, the description of the A / E converter 30, the light source 20, and the control unit 40 is omitted.)
FIG. 5 shows a case where a parallel spring composed of three piano wires arranged at equal circumferential intervals and parallel to each other is used as the elastic member 16. FIG. 5A shows a state where the hole WA of the work W is straight, and FIG. 5B shows a state where the hole WA of the work W is bent. Since the elastic member 16 holding the ball 14 forms a parallel spring with three piano wires, as shown in FIG. 5B, even if the hole WA of the work W is bent, the reflecting member 18 4 does not incline, and even if the reflecting member 18 is a plane mirror, no error occurs in the detection of the peak position of the amount of reflected light on the light receiving section 22, and the straightness of the hole WA is more precisely straightened as in the case of FIG. Degree can be determined.
[0029]
In the above embodiment according to the present invention described, but using compressed air for automatic centripetal action of internal diameter measurement and the ball 14 to be measured hole WA, not limited thereto, N 2 gas or Ar gas or the like, It can be selected as appropriate.
[0030]
【The invention's effect】
As described above, according to the measuring device for measuring the hole of the present invention, the inner diameter of the hole is measured by detecting the change in the back pressure of the gas due to the size of the gap between the hole and the ball inserted into the hole, When the hole is moved along the hole, the straightness of the hole is measured from the automatic centripetal action between the hole and the ball due to the flow of gas and the displacement of the peak position of the amount of reflected light from the reflecting member attached to the ball. Since the cylindricity of the hole is calculated from both the measurement data, an inexpensive hole measuring device capable of measuring the inner diameter, straightness, and cylindricity of the hole without contact is obtained.
[Brief description of the drawings]
FIG. 1 is a sectional view showing a hole measuring device according to an embodiment of the present invention. FIG. 2 is a graph showing the amount of reflected light at a light receiving section. FIG. 3 is a plan view showing reflected light on a four-divided photocell. FIG. 4 is a sectional view of a case where a corner cube is used as a reflecting member. FIG. 5 is a sectional view of a case where a parallel spring is used as an elastic member.
DESCRIPTION OF SYMBOLS 10 ... Measuring device, 12 ... Holder, 12A ... Injection port, 14 ... Ball, 16 ... Elastic member, 16A ... Parallel spring, 18 ... Reflection member, 18A ... Corner cube, 18B ... Mirror, 20 ... Light source, 22 ... Light reception Part, 24: half mirror, 26: elevating means, 28, 29: sealing material, 30: A / E converter (pneumatic / electrical converter), 40: control unit, A: peak position of light quantity, W: work, WA ... hole

Claims (5)

ワークに形成された孔を測定する測定装置において、
前記ワークを保持するとともに該ワークに形成された孔に気体を噴射する噴射口を備えた保持台と、
前記ワークに形成された孔に挿入されるボールと、
該ボールを支持する弾性部材と、
前記噴射された気体の背圧の変化を電気信号に変換する空/電変換器と、を有し、
前記ワークに形成された孔に前記ボールを挿入するとともに前記孔に気体を噴射したときの、前記空/電変換器からの信号によって前記孔の内径を求める管制部が設けられていることを特徴とする測定装置。
In a measuring device for measuring a hole formed in a work,
A holding table provided with an injection port for holding the work and injecting gas into holes formed in the work,
A ball inserted into a hole formed in the work,
An elastic member supporting the ball,
A pneumatic / electrical converter for converting a change in back pressure of the injected gas into an electric signal,
A control unit for determining the inner diameter of the hole by a signal from the pneumatic / electrical converter when the ball is inserted into the hole formed in the work and gas is injected into the hole is provided. Measuring device.
ワークに形成された孔を測定する測定装置において、
前記ワークを保持するとともに該ワークに形成された孔に気体を噴射する噴射口を備えた保持台と、
前記ワークに形成された孔に挿入されるボールと、
該ボールを支持する弾性部材と、
前記ボールに取付けられ光源から供給される光を反射する反射部材と、
前記反射された光を受光する受光部と、
前記弾性部材と前記ボールとを上下に移動する昇降手段と、を有し、
前記ワークに形成された孔に前記ボールを挿入し、前記孔に気体を噴射して前記ボールと孔とを自動求心させるとともに、前記ボールを上下移動させたときの、前記反射部材によって反射された光源からの光を前記受光部で受けて反射光量のピーク位置の変化を求め、これにより前記孔の真直度を求める管制部が設けられていることを特徴とする測定装置。
In a measuring device for measuring a hole formed in a work,
A holding table provided with an injection port for holding the work and injecting gas into holes formed in the work,
A ball inserted into a hole formed in the work,
An elastic member supporting the ball,
A reflecting member that is attached to the ball and reflects light supplied from a light source,
A light receiving unit that receives the reflected light,
Lifting means for moving the elastic member and the ball up and down,
The ball was inserted into the hole formed in the work, and the ball and the hole were automatically centered by injecting gas into the hole, and the ball was reflected by the reflecting member when the ball was moved up and down. A measuring device, comprising: a control unit for receiving a light from a light source at the light receiving unit to obtain a change in a peak position of a reflected light amount, thereby obtaining a straightness of the hole.
ワークに形成された孔を測定する測定装置において、
前記ワークを保持するとともに該ワークに形成された孔に気体を噴射する噴射口を備えた保持台と、
前記ワークに形成された孔に挿入されるボールと、
該ボールを支持する弾性部材と、
前記噴射された気体の背圧の変化を電気信号に変換する空/電変換器と、
前記ボールに取付けられ光源から供給される光を反射する反射部材と、
前記反射された光を受光する受光部と、
前記弾性部材と前記ボールとを上下に移動する昇降手段と、を有し、
前記ワークに形成された孔に前記ボールを挿入し、前記孔に気体を噴射して前記ボールと孔とを自動求心させるとともに、前記ボールを上下移動させたときの、前記空/電変換器からの信号と、前記反射部材によって反射された光源からの光を受けた前記受光部での反射光量のピーク位置の変化データとから、前記孔の円筒度を求める管制部が設けられていることを特徴とする測定装置。
In a measuring device for measuring a hole formed in a work,
A holding table provided with an injection port for holding the work and injecting gas into holes formed in the work,
A ball inserted into a hole formed in the work,
An elastic member supporting the ball,
A pneumatic / electrical converter for converting a change in back pressure of the injected gas into an electric signal;
A reflecting member that is attached to the ball and reflects light supplied from a light source,
A light receiving unit that receives the reflected light,
Lifting means for moving the elastic member and the ball up and down,
The ball is inserted into a hole formed in the work, and gas is injected into the hole to automatically center the ball and the hole, and when the ball is moved up and down, And a control unit for obtaining the cylindricity of the hole from the data of the peak position of the amount of light reflected by the light receiving unit that has received light from the light source reflected by the reflecting member. Characteristic measuring device.
前記反射部材がコーナーキューブであることを特徴とする請求項2又は請求項3に記載の測定装置。The measuring device according to claim 2, wherein the reflecting member is a corner cube. 前記弾性部材が少なくとも3本の線状の弾性体からなる平行バネであることを特徴とする請求項2又は請求項3に記載の測定装置。The measuring device according to claim 2, wherein the elastic member is a parallel spring including at least three linear elastic bodies.
JP2002215347A 2002-07-24 2002-07-24 measuring device Expired - Fee Related JP3897248B2 (en)

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JP2002215347A JP3897248B2 (en) 2002-07-24 2002-07-24 measuring device
EP03765342A EP1524493A4 (en) 2002-07-24 2003-07-22 Measuring device
US10/522,190 US7187454B2 (en) 2002-07-24 2003-07-22 Measuring device
CNB03817216XA CN1294404C (en) 2002-07-24 2003-07-22 Measuring device
AU2003252230A AU2003252230A1 (en) 2002-07-24 2003-07-22 Measuring device
PCT/JP2003/009240 WO2004010077A1 (en) 2002-07-24 2003-07-22 Measuring device

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008224443A (en) * 2007-03-13 2008-09-25 Tokyo Seimitsu Co Ltd Inner diameter measuring device and inner diameter measuring method
CN103196396A (en) * 2013-03-25 2013-07-10 中北大学 Deep hole straightness laser detection method based on mathematic means
CN103196397A (en) * 2013-03-25 2013-07-10 中北大学 Straightness laser detection device for vertical longhole
CN113854277A (en) * 2021-10-27 2021-12-31 国网河南省电力公司濮阳供电公司 Spherical reflective bird repellent device
CN116147464A (en) * 2023-04-14 2023-05-23 青岛迈朗格智能制造有限公司 Quality detection equipment for automobile part production and delivery

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008224443A (en) * 2007-03-13 2008-09-25 Tokyo Seimitsu Co Ltd Inner diameter measuring device and inner diameter measuring method
CN103196396A (en) * 2013-03-25 2013-07-10 中北大学 Deep hole straightness laser detection method based on mathematic means
CN103196397A (en) * 2013-03-25 2013-07-10 中北大学 Straightness laser detection device for vertical longhole
CN113854277A (en) * 2021-10-27 2021-12-31 国网河南省电力公司濮阳供电公司 Spherical reflective bird repellent device
CN116147464A (en) * 2023-04-14 2023-05-23 青岛迈朗格智能制造有限公司 Quality detection equipment for automobile part production and delivery

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