JP2003279088A - Fan filter unit and its remote control unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fan filter unit with structure with an easily added static eliminator, and also to provide a convenient remote control unit connected to the fan filter unit. <P>SOLUTION: In the fan filter unit 10 with structure purifying air taken in by an electric fan 16 from outside by passing through a filter 18 and sent to outside, a reserve space for mounting the static eliminator 15 for ionizing the air passing through the filter 18 has a power supply terminal 37a for supplying power to the static eliminator 15 and a connector 37 including a signal input terminal 37b for taking signals into the fan filter unit 10 from the static eliminator 15. The signal obtained from the static eliminator 15 is transmitted to the remote control unit 40 from an FFU control part 32 together with other signals and displayed at a display part 43. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a high-efficiency part of a HEPA filter.
TECHNICAL FIELD The present invention relates to a fan filter device that is cleaned by sending it out by filtering with an ice air filter, a high-performance fine particle removal filter) and its remote control unit (remote control device).

[0002]

2. Description of the Related Art A fan filter device of this type is used for cleaning air in an assembly place and a storage place of electronic devices, precision machines and the like. For example, a fan filter device is installed so as to send the cleaned air downward from above the assembly work table. Alternatively, a fan filter device is installed on the storage cabinet so that the purified air is sent into the storage cabinet through an opening provided in the ceiling of the storage cabinet.

FIG. 10 is a side view showing the structure of a conventional typical fan filter device. The fan filter device 100 includes an electric motor 102, a propeller fan 103 fixed to a vertical rotation shaft of the electric motor 102, and a HEPA filter 104 inside a case 101 having a rectangular parallelepiped shape or a cylindrical shape, and these are arranged in the vertical direction. Are arranged as follows.

A power source 10 provided outside the case 101
When the electric motor 102 is rotated by the electric power supplied from No. 5, the air taken in from the opening on the upper side of the case 101 is sent out downward by the propeller fan 103 as shown by the arrow line, and passes through the HEPA filter 104 for cleaning. After that, it is sent to the lower space.

The fan filter device as described above may be used in combination with a static eliminator. The static eliminator is sometimes called an ionizer and has a function of neutralizing charged dust by ionizing air. The charged dust adheres firmly to electronic equipment and precision machinery, and is difficult to remove. Therefore, the clean air sent out from the fan filter device is ionized by a static eliminator and applied to an object such as an electronic device or a precision machine to remove (neutralize) the dust adhering to the object and facilitate removal.

[0006]

Conventionally, the fan filter device and the static eliminator are separately supplied with power, and in some cases, separate power supplies are required. SUMMARY OF THE INVENTION It is an object of the present invention to eliminate such inconvenience and provide a fan filter device having a structure to which a static eliminator can be easily added. It is also an object of the present invention to provide a convenient remote control unit connected to the fan filter device.

[0007]

A fan filter device according to the present invention comprises a filter for filtering air and an electric fan, and the air taken in by the electric fan from the outside is passed through the filter to be cleaned and then discharged to the outside. A fan filter device configured to be sent out, comprising a spare space for mounting a static eliminator that ionizes air that has passed through the filter, and a connector including a power supply terminal for supplying power to the static eliminator It is characterized by

According to this structure, for example, a static eliminator prepared as an option can be mounted in the spare space of the fan filter device, and its power can be obtained from the fan filter device through the connector. Further, the cable connecting the fan filter device and the static eliminator can be short. Therefore, the static eliminator can be mounted easily and with good appearance.

Preferably, the connector includes not only a power supply terminal but also a signal input terminal for taking a signal from the static eliminator into the fan filter device. For example, when the static eliminator fails to function normally due to dirt or wear of the electrodes due to long-term use, the static eliminator can transmit an abnormal signal to the fan filter device.

The remote control unit of the present invention includes a communication circuit for communicating with the fan filter device, a display section for displaying the operating state of the fan filter device based on information received from the fan filter device, and a fan. It is equipped with an operation unit that performs settings for adjusting the rotation speed of the electric fan of the filter device, and the fan filter device receives the signal input from the static eliminator and transmitted, and the display unit displays the operating state of the fan filter device and eliminates static electricity. It is characterized in that the operating state of the device is displayed. For example, the abnormal signal transmitted from the static eliminator to the fan filter device as described above is further transmitted to the remote controller unit, and a predetermined display is performed on the display unit of the remote controller unit. This allows the operator to easily know not only the operating state of the fan filter device but also the abnormality of the static eliminator.

A remote control unit according to another structure of the present invention comprises a filter for filtering air and an electric fan, so that air taken in by the electric fan from the outside is passed through the filter to be cleaned and then sent to the outside. A remote control unit to which a plurality of fan filter devices configured as described above are connected, the communication circuit communicating with the plurality of fan filter devices, and the plurality of fan filter devices based on information received from the plurality of fan filter devices. A display unit for individually displaying the operating state of
It is characterized by comprising an operating section for making settings for adjusting the number of rotations of the electric fans of the plurality of fan filter devices.

With such a configuration, when a plurality of fan filter devices are used to supply clean air to a wide space to be cleaned, the operating states of the plurality of fan filter devices can be monitored and the air volume can be set. It is convenient because it can be performed with one remote control unit.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings.

1A and 1B are external views of a fan filter device according to an embodiment of the present invention. FIG. 1A is a top view, FIG. 1B is a side view, and FIG. 1C is a bottom view. The fan filter device 10 has an upper case 11 and a lower case 12 which are resin molded products. A pair of air intake ports 13 is provided on one side in the longitudinal direction of the upper surface of the upper case 11. A discharge port (discharge surface) 14 is provided on the bottom surface of the lower case 12. The outlet 14 is formed in a substantially square shape in a plan view from the side opposite to the one side in the longitudinal direction where the air intake 13 is provided to the center.

The air intake port 13 constitutes a first pre-filter by a structure in which a plurality of slit openings formed in the upper case 11 are lined up and a nylon mesh (not shown) attached inside thereof. There is. The first pre-filter 13 at the air intake port prevents large dust such as hair and cotton dust from entering the inside of the fan filter device, thereby preventing the fan from breaking down.

FIG. 2 is an internal structural view of the fan filter device according to the embodiment of the present invention, in which (a) is a plan view,
(B) has shown the outline of the internal structure of a side view. In a substantially rectangular parallelepiped internal space of the fan filter device 10, a sirocco fan 16, which is a type of centrifugal fan, and an electric motor 17 that rotationally drives the sirocco fan 16 are arranged on one side in the longitudinal direction, and a HEPA filter (high-performance A fine particle removing filter) 18 and a second pre-filter 19 are arranged.

3A and 3B show the structure of the HEPA filter 18, where FIG. 3A is a plan view and FIG. 3B is a sectional view as seen from the side. The HEPA filter 18 is a main filter for cleaning air, and has a structure in which a filter body 22 in which a large number of folds are formed by folding a glass fiber nonwoven fabric is attached to an aluminum frame 21. By forming a large number of folds, the surface area of the filter body 22 that exerts a filtering action is increased.

The second pre-filter 19 is made of non-woven fabric and is attached to the upper surface (upstream side) of the HEPA filter 18. The second pre-filter 19 can prevent the passage of dust of several microns such as mold spores and pollen. The second pre-filter 19 is a non-woven fabric cut into a predetermined size, and is much cheaper than the HEPA filter 18. If it becomes clogged, it can be replaced with a new one. Alternatively, the filtering action can be easily recovered by removing and washing with water or suction with a vacuum cleaner. As a result, the life of the expensive HEPA filter 18 can be extended.

As can be seen from FIGS. 1 and 2, a pair of air intakes (first pre-filter) 1 of the upper case 11
3 are formed so as to be located on both sides (up and down) of the sirocco fan 16 in a plan view. The air taken in from the outside through the air intake port (first pre-filter) 13 enters the sirocco fan 16 from both sides (both vertical directions) of the sirocco fan 16 and is attached to the housing outlet part thereof, as shown by the arrow in FIG. It is guided to the upper space 25 of the HEPA filter 18 through the connected duct 24.

FIG. 4 shows the sirocco fan 16 and the electric motor 1 viewed from the housing outlet side of the sirocco fan 16.
It is a figure which shows 7. The sirocco fan 16 comprises a substantially cylindrical housing 16a and an impeller 16b that rotates in the housing 16a. The impeller 16b has a rotation shaft connected to a rotation shaft of an electric motor 17. A rectangular housing outlet portion 16c is formed in the housing 16a. As shown by the arrow line, air is taken in from the air intake ports on both side surfaces of the housing 16a and is discharged from the housing outlet portion 16c (in the front direction perpendicular to the paper surface).

As shown in FIG. 2, the HEPA filter 1
The upper space 25 of 8 is separated by a partition wall 26 from a space 27 in which the sirocco fan 16 and the electric motor 17 are arranged. An opening 26a is formed in the center of the partition wall 26, and the opening 26a is connected to the connecting duct 24. HEPA through the connecting duct 24 and the opening 26a
The air guided to the upper space 25 of the filter 18 passes through the second pre-filter 19 and the HEPA filter 18 from the upper surface side to the lower surface side under the condition that a positive pressure is applied by the sirocco fan 16 and is cleaned. It is sent to the outside from the outlet 14 on the bottom surface of the case 12.

Further, as shown in FIG. 2 (b), HEPA
Exhaust port 14 on the bottom of filter 18 and lower case 12
A spare space 20 for mounting a static eliminator (ionizer) is secured between the two. The static eliminator is a device that ionizes the clean air that has passed through the HEPA filter 18, and by this function, it removes (neutralizes) and removes dust that is firmly attached to electronic devices and precision machines in a charged state. Make it easier to be.

FIG. 5 shows an example of the static eliminator 15.
(A) is a front view and (b) is a side view. This static eliminator 15 is composed of a plurality of electrode parts 15 from the bottom of a rod-shaped body.
It has a structure in which a protrudes, and has a high voltage generating circuit 15b inside.
Also, the controller unit 15c is built in. The high voltage generated by the high voltage generation circuit 15b is supplied to the plurality of electrode portions 15a.

The clean air passing through the HEPA filter 18 passes around the rod-shaped main body from the upper portion of the static eliminator 15 to the lower portion provided with the electrode portion 15a, as shown in FIG. 5 (b). Is ionized by the high voltage applied to the electrode portion 15a. HEPA filter 18
A plurality of static eliminators 15 can be mounted in the lower preliminary space 20 so as to be arranged at predetermined intervals.

A voltage of 24V DC is supplied to the static eliminator 15 and its current consumption is relatively small. As will be described later, the fan filter device 10 is provided with a neutralization device 15 with a DC
Since the connector including the power supply terminal for supplying 24V is provided, the static eliminator 15 can receive the necessary power supply only by connecting the harness of the short cable to the connector of the fan filter device 10. Therefore, it is not necessary to separately prepare a 24V DC power source for the static eliminator 15.

The HEPA filter 1 having the above-mentioned structure
No. 8 causes clogging due to dust when used for a long time.
Depending on the usage environment, HE will
It is necessary to replace the PA filter 18 with a new one. Until the HEPA filter 18 is replaced, clogging gradually progresses and the pressure loss of the HEPA filter 18 gradually increases. If the pressure loss increases, the air volume of the air delivered from the outlet 14 decreases. In order to compensate for the decrease in air volume with the lapse of the above-mentioned usage time, the electric power (current) supplied to the electric motor 17
Need to increase. The fan filter device 10 of the present embodiment includes a wind speed sensor for detecting the air volume, and performs feedback control of the electric power supplied to the electric motor 17 based on the detected output.

As shown in FIG. 2B, a wind speed sensor 28 is attached to the inner wall of the sirocco fan 16 at the housing outlet. The wind speed sensor 28 utilizes the fact that the base-emitter voltage of a transistor changes with temperature. That is, the faster the wind speed of the air to which the wind speed sensor 28 is exposed, the higher the cooling effect of the transistor. Therefore, if the base-emitter voltage is detected as the sensor output of the wind speed sensor 28, the wind speed can be known. Since such a wind speed sensor 28 is known,
Detailed explanation is omitted. It is also possible to use an electrothermal element instead of the transistor and use a wind speed sensor that uses a change in its resistance value as a sensor output.

Since the flow passage cross-sectional area of the fan outlet portion to which the wind speed sensor 28 is attached is known, the air volume can be known if the wind speed is known. Although it is difficult to accurately measure the wind speed with the fan filter device having the conventional structure shown in FIG. 10, the structure of the present embodiment uses the wind speed sensor 28 attached to the flow passage portion having a small flow passage cross-sectional area. Therefore, a relatively high wind speed can be detected, and the wind speed (air volume) can be accurately measured.

FIG. 6 is a block diagram showing a schematic configuration of electronic circuits of the fan filter device 10 and the remote controller unit 40 thereof according to the present embodiment. In the block diagram of FIG. 6, the static eliminator 15 connected to the fan filter device 10 is shown.
Is also included.

The fan filter device 10 is connected to a remote control unit 40, which will be described later, by a communication cable 29, and includes a communication circuit 30 for transmitting and receiving information to and from the remote control unit 40. In addition, the fan filter device 10 includes a wind speed detection circuit 31, an FFU controller 32, a motor driver 33, a current detection circuit 34, and a rotation speed detection circuit 3.
5, a DV 24V power supply circuit 36 and a connector 37 for connecting a static eliminator.

The output signal of the wind speed sensor 28 is input to the FFU controller 32 via the wind speed detection circuit 31. The FFU controller 32 compares the current wind speed level detected by the wind speed sensor 28 with a set value, and controls the electric motor 17 (power supplied to the motor) via the motor driver 33 so that the error becomes zero. . That is, if the current wind speed level is lower than the set value, the power supply to the electric motor 17 is increased, and conversely, if the wind speed level is high, the power supply is decreased to perform feedback control. As a result, it is possible to compensate for the decrease in the air volume due to clogging of the HEPA filter 18 and to secure a constant air volume.

The electric power (current) supplied to the electric motor 17 is monitored by the current detection circuit 34, and its output is input to the FFU controller 32. The FFU control unit 32 compares the output of the current detection circuit 34 with a reference value (upper limit setting value), and when the current supplied to the electric motor 17 exceeds the reference value, a filter replacement signal is sent via the communication circuit 30 to the remote control unit. Send to 40. That is, when the electric power supplied to the electric motor 17 exceeds the reference value, the clogging of the HEPA filter 18 can no longer be compensated by the control of the electric motor 17, and therefore the filter replacement signal for prompting the filter replacement is sent to the remote control unit 40. Send to.

The rotation speed of the electric motor 17 is detected by the rotation speed detection circuit 35, and its output signal is input to the FFU control section 32. The FFU control unit 32 transmits the detection information of the rotation speed detection circuit 35 and the detection information of the wind speed detection circuit 31 to the remote control unit 40 via the communication circuit 30.

The connector 37 for connecting the static eliminator is DC2
The 4V power supply circuit 36 includes a power supply terminal 37a for supplying power to the static eliminator 15 and a signal input terminal 37b for taking in a signal from the static eliminator 15 to the fan filter device 10. As a signal taken into the fan filter device 10 from the static eliminator 15, there is an abnormal signal indicating that the electrode portion 15a of the static eliminator 15 is not functioning normally due to dirt or wear. Similar to the filter exchange signal, such a signal is also input to the FFU control unit 32 and transmitted to the remote control unit 40.

The remote control unit 40 comprises a communication circuit 41 for transmitting and receiving information to and from the fan filter device 10, an RCU control section 42, a display section 43, an operating section 44, a particle counter 45 and a pressure detecting circuit 46. ing. The particle counter 45 detects the amount of dust (particle concentration) contained in the sample air in the cleaning target space introduced from the sample air introduction unit. The detected dust amount is displayed on the display unit 43. Alternatively, the RCU control unit 42 sends an appropriate set value of the air volume or the air speed to the fan filter device 10 based on the dust amount, thereby automatically adjusting the fan rotation speed of the fan filter device 10.

In addition to displaying the amount of dust (particle concentration) detected by the particle counter 45, the display unit also displays the current air volume (wind speed) of the fan filter device 10 and the operating state of the motor output. In addition, a display prompting the above-mentioned filter replacement and a display indicating an abnormality of the static eliminator 15 are displayed.

Further, when the space to be cleaned is a closed space such as the inside of a storage, a pressure sensor 47 for detecting the atmospheric pressure of the space to be cleaned is provided, and the pressure detection circuit 46 uses an electric signal from the pressure sensor 47. The atmospheric pressure of the cleaning target space is detected based on the signal. The RCU control unit 42 uses the pressure detection circuit 4
The output level of 6 is compared with the reference value, and the set value of the air volume (wind speed) is transmitted to the fan filter device 10 based on the error, thereby automatically adjusting the fan rotation speed of the fan filter device 10. As a result, the cleaning target space (inside the storage) is always maintained at a constant atmospheric pressure (a state slightly higher than the external atmospheric pressure), and external dust can be prevented from entering the cleaning target space.

For example, when the air pressure inside the storage falls below the reference value due to the opening of the door of the storage, the RCU control unit 42 increases the set value of the air volume or the wind speed to increase the fan rotation speed. Immediately raise the air pressure inside the storage. On the contrary, if the atmospheric pressure inside the storage cabinet becomes high in the steady state, the RCU control unit 42 lowers the set value of the air volume or the air speed. As a result, the power consumption of the electric motor 17 can be suppressed and the life of the HEPA filter 18 can be extended. For such automatic control, PID control that uses three pieces of information, that is, the error between the current pressure level and the reference value, the integral value of the error, and the differential value of the error is normally used.

FIG. 7 is a view showing the outer appearance of the remote control unit 40. (A) shows the front display and operation panel section, and (b) shows the side connector section. On the front surface 50 of the remote control unit 40, a display unit (43 in FIG. 6) including an air volume display 51, a dust amount (particle concentration) display 52, an FFU status display 53, a pressure sensor connection display 54, and an alarm display 55, and a power switch 57. , An operation unit including the air volume setting switch 58 and the turbo switch 59 (4 in FIG. 6).
4) and are provided.

Further, on the side surface 60 of the remote control unit 40, a connector 61 of a communication cable with the fan filter device 10, a connector 62 of a cable of the pressure sensor 47,
A tube connector 63, which is a sample air inlet, and an air outlet 64 are provided. Tube connector 6
The sample air in the cleaning target space introduced from 3 passes through the particle counter 45 and is then discharged from the air discharge port 64.

FIG. 8 is a diagram showing the operating principle of the particle counter 45. The laser light emitted from the laser diode 72 is applied to the sample air, which is introduced into the sampling tube 71 and moves at a constant speed, through the light projecting lens 73. Dust particles (particles) contained in the sample air cause Rayleigh scattering or Mie scattering of the laser light, and the scattered light passes through the light receiving lens 74 and is received by the light receiving element (PD) 75. The electric signal output from the light receiving element 75 is amplified by the amplifier 76 and then input to the comparator 77. The comparator 77 compares the reference level set (selected) according to the diameter of the dust particles with the input level, and gives the comparison result to the counter 78. With such a circuit configuration, the number of dust particles (particles) larger than the set diameter (reference level) is counted by the counter 78.

Remote control unit 40 shown in FIG. 7 (a)
On the front surface 50 of the, the dust amount display 52 displays the number of dust particles counted as described above in a bar graph. The amount of dust (the number of particles) is displayed individually for two types of dust particles having different diameters. Based on this display, the user can set an appropriate air volume (air velocity) using the air volume display 51 and the air volume setting switch 58. Further, when the automatic mode is selected, the RCU control unit 42 automatically sets an appropriate air volume (wind speed) based on the signal from the particle counter 45. The set air volume (wind speed) is transmitted to the fan filter device 10 via the communication circuit 41, and the FF of the fan filter device 10 is transmitted.
As described above, the U controller 32 automatically controls the electric motor 17 based on the output of the wind speed detection circuit 31 and the set air volume (wind speed).

As shown in FIG. 9, the remote control unit 40 of this embodiment can be connected to a plurality of fan filter devices 10. Two modular jacks (not shown) into which the plugs of the communication cables 29 are inserted are provided on the side surface of the fan filter device 10, one on the input side and the other on the output side. .

The input side modular jack of the first fan filter device 10 is connected to the remote control unit 40 by the communication cable 29, and the output side modular jack is connected by the other communication cable 29 to the second fan filter device 1.
0 is connected to the input side modular jack. The output side modular jack of the second fan filter device 10 is connected to the input side modular jack of the third fan filter device 10 by another communication cable 29. In the same manner, up to eight fan filter devices 10 can be connected to one remote control unit 40 in the same manner.
The remote controller unit 40 can individually communicate with each fan filter device 10 by a bus type communication line. In addition, the FFU status display 53 shown in FIG.
Can individually display the operating states of up to eight fan filter devices 10.

In this way, one remote control unit 40
Since a plurality of fan filter devices 10 can be connected to each to monitor the operating state of each fan filter device 10 individually, and the air flow rate of the plurality of fan filter devices 10 can be collectively set, the user (work Person) is convenient. It is suitable for supplying clean air to a wide space to be cleaned, for example, a large storage by using a plurality of fan filter devices. It is also easy to add the fan filter device 10 later, if necessary (up to 8 units). A fan filter device 10 that can be connected to one remote control unit 40
The number of is not limited to eight in this embodiment, but can be changed as appropriate.

Although the embodiment of the present invention has been described above together with the modified examples, the present invention is not limited to the above embodiment and can be implemented in various forms. The illustrated shape and structure and the description of the material of each member are merely examples, and may be changed as necessary.

Although detailed description of all the various display and operation switches arranged on the front surface 50 of the remote control unit 40 is omitted, the display section 43 and the operation section 4 are omitted.
The specific configuration and arrangement of 4 can be arbitrarily designed.

[0048]

As described above, since the fan filter device according to the present invention is provided with the spare space for mounting the static eliminator and the power supply connector of the static eliminator, the static eliminator can be easily and beautifully viewed. Can be installed. In addition, the abnormal signal from the static eliminator can be captured and sent to the remote control unit to display an alarm on the remote control unit, so that the operator can detect not only the operating status and abnormality of the fan filter device but also the abnormality of the static eliminator. It can be monitored by the remote control unit.

Further, since the plurality of fan filter devices can be easily connected to the remote control unit of the fan filter device according to the present invention, clean air is supplied to the space to be cleaned by using the plurality of fan filter devices. In this case, it is convenient because the fan filter device can be monitored and the air volume can be set by one remote controller unit.

[Brief description of drawings]

FIG. 1 is a diagram showing an external appearance of a fan filter device according to an embodiment of the present invention.

FIG. 2 is an internal structure diagram of a fan filter device according to an embodiment of the present invention.

FIG. 3 is a diagram showing a structure of a HEPA filter.

FIG. 4 is a view showing a sirocco fan and an electric motor as seen from the housing outlet side of the sirocco fan.

FIG. 5 is a diagram showing an example of a static eliminator.

FIG. 6 is a block diagram showing a schematic configuration of electronic circuits of a fan filter device and a remote control unit thereof according to the present embodiment.

FIG. 7 is a diagram showing an appearance of a remote control unit.

FIG. 8 is a diagram showing an operation principle of a particle counter.

FIG. 9 is a diagram showing how a plurality of fan filter devices and one remote control unit are connected.

FIG. 10 is a side view configuration diagram showing a structure of a conventional typical fan filter device.

[Explanation of symbols]

10 Fan filter device 15 Static eliminator 16 Electric fan (Sirocco fan) 18 Filter (HEPA filter) 20 spare space 37 Connector 37a Power supply terminal 37b Signal input terminal 40 Remote control unit 42 control unit (RCU control unit) 43 Display 44 Operation part

Claims (4)

[Claims] 1. A fan filter device comprising a filter for filtering air and an electric fan, wherein air taken in from the outside by the electric fan is passed through the filter to be cleaned and then sent out to the outside. A fan characterized by comprising a spare space for mounting a static eliminator for ionizing the air passing through the filter and a connector including a power supply terminal for supplying power to the static eliminator. Filter device. 2. The fan filter device according to claim 1, wherein the connector includes a signal input terminal for receiving a signal from the static eliminator into a fan filter device. 3. A remote control unit connected to the fan filter device according to claim 2, wherein the communication circuit communicates with the fan filter device.
A display unit for displaying an operating state of the fan filter device based on information received from the fan filter device; and an operation unit for making settings for adjusting the rotation speed of the electric fan of the fan filter device. The fan filter device receives a signal input and transmitted from the static eliminator and displays the operating state of the static eliminator together with the operating state of the fan filter device on the display unit. Remote control unit. 4. A plurality of fans comprising a filter for filtering air and an electric fan, wherein the air taken in by the electric fan from the outside is passed through the filter to be cleaned and then sent out to the outside. A remote control unit to which a filter device is connected, and a communication circuit that communicates with the plurality of fan filter devices,
A display unit for individually displaying the operating states of the plurality of fan filter devices based on information received from the plurality of fan filter devices, and for adjusting the rotation speed of the electric fan of the plurality of fan filter devices A remote control unit for a fan filter device, which is provided with an operating section for setting.