JP2003031641A - Product storage method and product storage device - Google Patents

Abstract

(57) [Problem] To provide a product storage method capable of storing a product to be processed such as a semiconductor wafer in an environment of high cleanliness, and a product storage device using the storage method. SOLUTION: A circulating fan 2 takes in and circulates outside air in a stocker 1 for accommodating and storing a large number of products W to be processed such as semiconductor wafers. The fresh air immediately after being introduced into the stocker 1 is removed by the chemical removal filter 4 and the U.
After filtering through the LPA filter 3, the inside of the stocker 1 is set as a high-purity circulation air conditioning system.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for storing a product to be processed, which is required to be stored in a space of high cleanliness such as a semiconductor wafer, and a product storage device to which the storage method is applied.

[0002]

2. Description of the Related Art In a semiconductor device manufacturing process, a semiconductor wafer, which is a product to be processed, is transported and stored in a clean room environment area called a clean room so as to prevent defects due to particle contamination. FIG. 9 is a vertical cross-sectional view showing a conventional example of a stocker device used to transfer and store semiconductor wafers in such a clean room. In this stocker device, a circulation fan 2 and a ULPA filter 3 are provided in a stocker 1 that accommodates a large number of semiconductor wafers W as products to be processed.
The air introduced into the inside is circulated by the circulation fan 2, and the fine particles contained in the air are ULPA.
(Ultra Low Penetration Ai
r) The filter 3 is used for removal.

[0003]

In this case, the fine particles contained in the air in the clean room are the ULPA filter 3
However, substances other than fine particles, for example, P and B ionic substances, molecules such as organic substances, and mist-like impurities cannot be removed. Also, stocker 1
The cleanliness of the air introduced into the inside fluctuates due to fluctuations in the cleanliness of the outside air and various substances generated in the clean room. Therefore, in the worst case, the fluctuation of the outside air,
P and B ionic substances generated from inside the clean room,
There is a problem in that a semiconductor wafer, which is a product to be processed, is contaminated by molecules such as organic substances and mist-like impurities, and stable production cannot be secured.

Therefore, an object of the present invention is to provide a product storage method capable of storing products to be processed such as semiconductor wafers in an environment of high cleanliness, and a product storage device using the storage method.

[0005]

According to a first aspect of the present invention, there is provided a method for storing a product, wherein the circulating fan introduces the outside air into a stocker for containing and storing the product to be treated, and the outside air immediately after the introduction is introduced. Chemical removal filter and U
The inside of the stocker is filtered by an LPA filter to create a highly clean circulating air conditioning system.

According to a second aspect of the present invention, there is provided a product storage device, including a stocker for accommodating and storing a product to be processed, a circulation fan for taking in outside air into the stocker and circulating it, and taking the air into the stocker by the circulation fan. Chemical removal filter and ULP for filtering outside air immediately after being blown
It has an A filter.

The invention according to claim 3 is a method for storing a product, comprising:
The outside air is introduced by a circulation fan, and the organic matter contained in the outside air is decomposed by irradiating the outside air immediately after the introduction with ultraviolet rays, and it is filtered by a ULPA filter to make the inside of the stocker a highly clean circulation air conditioning system. Is.

According to a fourth aspect of the present invention, there is provided a product storage device, including a stocker for accommodating and storing a product to be processed, a circulation fan for taking in outside air into the stocker and circulating it, and a circulation fan for taking the air into the stocker. It is provided with an organic decomposition chamber for irradiating the outside air immediately after being irradiated with ultraviolet rays with an ultraviolet irradiator, and a ULPA filter for filtering the outside air immediately after being taken into the stocker by the circulation fan.

The invention according to claim 5 is a method for storing a product, comprising: a stocker for storing and storing a product to be processed,
It introduces the outside air with a circulation fan, removes the ionic components contained in the outside air immediately after the introduction from the outside with pure water, and filters it with ULPA filter to make the inside of the stocker a highly clean circulation air conditioning system. is there.

According to a sixth aspect of the present invention, there is provided a product storage device, which comprises a stocker for accommodating and storing a product to be processed, a circulation fan for taking in outside air into the stocker and circulating it, and taking it into the stocker by the circulation fan. The ionic component removing means removes the ionic component contained in the fresh air from the fresh air by using pure water, and the ULPA filter for filtering the fresh air taken into the stocker by the circulation fan.

The invention according to claim 7 is a method for storing a product, which comprises at least a chemical removal filter and ULP.
By supplying the outside air filtered by the air conditioner equipped with the A filter into the stocker that stores and stores the product to be processed, the inside of the stocker is made an air-conditioned space with high cleanliness.

The present invention according to claim 8 is a product storage device, comprising a stocker for storing and storing a product to be treated, at least a chemical removal filter and a ULPA filter, and filtering the external air introduced to the inside of the stocker. And an air conditioner that supplies

The invention according to claim 9 is a method for storing a product, which comprises at least a chemical removal filter and ULP.
The outside air filtered by the air conditioner equipped with the A filter is supplied into the stocker for storing and storing the product to be processed, and the outside air is taken into the stocker and circulated by the circulation fan arranged in the stocker, The inside of the stocker has a highly clean circulation air conditioning system.

According to a tenth aspect of the present invention, there is provided a product storage device, including a stocker for storing and storing the product to be processed.
An air conditioner that has at least a chemical removal filter and an ULPA filter, is arranged in the stocker, and an air conditioner that filters the introduced outside air and supplies it into the stocker.
A circulation fan is provided for taking in outside air into the stocker and circulating it.

The invention according to claim 11 is a method for storing a product, which comprises an OHS (Over He) for transporting a product to be processed.
The trolley or the traveling route of the ad shutdown is separated from the outside by at least a cover having an airtight structure, so that the transportation space of the product to be processed is a highly clean space.

According to a twelfth aspect of the present invention, there is provided a product storage device, which is an OHS (Over He) that conveys a product to be processed.
Ad Shuttle) and at least an airtight structure, and a cover that isolates the OHS trolley or traveling route from the outside.

A thirteenth aspect of the present invention is a product storage method for supplying highly purified air to a storage area for a product to be processed, each of which has at least a chemical removal filter and a ULPA filter, and the introduced outside air. The outlets of the two air conditioners that filter the air are shared, the two air conditioners are switched and used, and the cleanliness of the filtered air at the outlets is analyzed. When the analysis result falls below a predetermined level, the air conditioning The machine is switched as described above.

According to a fourteenth aspect of the present invention, there is provided a product storage device for supplying highly purified air to a storage area for a product to be processed, each of which has at least a chemical removal filter and a LUPA filter, and filters the introduced outside air. First and second air conditioners, switching means for switching one of the air conditioners to a use state and the other to an unused state, and cleanliness of filtered air at mutually connected outlets of the air conditioners. And the control means for reversing the switching state of the switching means when the analysis result by the analyzing means is below a predetermined level.

A fifteenth aspect of the present invention is a product storage method, wherein outside air is introduced by a circulation fan into a stocker for accommodating and storing the product to be treated, and ionic components contained in the outside air immediately after introduction are purified. Is removed from the outside air and filtered with a ULPA filter to create a highly clean circulating air conditioning system inside the stocker, and the cleanliness of the outside air after removing the ionic components is analyzed. At this time, the amount of the pure water is increased.

The invention according to claim 16 is a product storage device, comprising a stocker for accommodating and storing the product to be processed,
A circulation fan that takes in the outside air into the stocker and circulates it, an ion component removing unit that removes the ion component contained in the outside air immediately after being taken into the stocker by the circulation fan with pure water, and the stocker with the circulation fan A ULPA filter for filtering the outside air immediately after being taken into the inside, an analyzer for analyzing the cleanliness of the outside air treated by the ionic component removing means, and an analysis result by the analyzer, when the analysis result is below a predetermined level, And a control means for increasing the amount of pure water.

The invention according to claim 17 is a product storage method for supplying air filtered by an air conditioner having at least a chemical removal filter and a ULPA filter to an area for storing and storing a product to be treated, wherein the chemical removal is performed. It heats the filter and regenerates it.

The invention according to claim 18 is a product storage device for supplying highly purified air to an area for accommodating and storing a product to be processed, which has at least a chemical removal filter and a ULPA filter. An air conditioner for filtering the outside air and means for applying heat to the chemical removal filter are provided.

[0023]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be specifically described below with reference to the drawings showing the embodiments thereof. The same or equivalent members as those of the conventional example shown in FIG. 9 are designated by the same reference numerals.

Embodiment 1. 1 is a vertical sectional view of a product storage device according to a first embodiment of the present invention. This product storage device is a stocker device for accommodating, transporting and storing a semiconductor wafer W, which is a product to be processed, in a space of high cleanliness in a clean room in a semiconductor device manufacturing process. Circulation fan 2 and ULPA
A filter 3 and a chemical removal filter 4 are provided.

The stocker 1 is, for example, a cylindrical container whose upper end is closed, has an inner wall 1b arranged concentrically with the outer wall 1a inside, and a semiconductor wafer W which is a product to be processed inside the inner wall 1b. A plurality of shelves 5 for mounting the are provided. An opening 6 for introducing outside air is provided at the center of the lower end of the stocker 1.

In the lower part of the stocker 1, the circulation fan 2, the chemical removal filter 4, and the ULPA filter 3 are arranged side by side in this order from the vicinity of the opening 6 toward the outer diameter side. The circulation fan 2 takes in outside air into the stocker 1 through the opening 6 and circulates it. The ULPA filter 3 is a filter for removing fine particles contained in the introduced outside air. The chemical removal filter 4 contains P, which is contained in the introduced outside air.
It is a filter for removing the ionic substances of B, molecules such as organic substances, and mist-like impurities. There are three types of chemical removal filters 4, an acid removal filter, an alkaline removal filter, and an organic removal filter.
One of these may be selected and used, or a plurality of types may be used in combination.

A space between the outer wall 1a and the inner wall 1b of the stocker 1 forms a circulation path 7. The inner wall 1b is formed with a large number of ventilation holes 8 for introducing the outside air having passed through the circulation path 7 into the inner space of the inner wall 1b.

According to this stocker device, the air in the clean room introduced from the opening 6 of the stocker 1 by the circulation fan 2 is supplied to the chemical removal filter 4 and UL.
After passing through the PA filter 3, it enters the inside of the inner wall 1b through the circulation path 7 and the ventilation hole 8, is guided to the circulation fan 2, and circulates in the stocker 1 as shown by a chain line. P and B ionic substances contained in the introduced air,
Molecules such as organic substances and mist-like impurities are removed by the chemical removal filter 4. Further, the particles contained in the air are removed by the ULPA filter 3. As a result, the inside of the stocker 1 is provided with a high-cleanliness circulation air-conditioning system, and the semiconductor wafer W, which is the product to be processed, is not affected by the cleanliness fluctuation of the outside air or the fluctuation of the amount of impurities in the air in the clean room. , Can be stored in a high clean space.

Further, in this stocker device, since the outside air is introduced into the bag-shaped stocker 1 from the opening 6 provided at the lower end of the stocker 1, the inside of the stocker 1 is kept at a positive pressure. When the semiconductor wafer W is taken in and out of the stocker 1,
It is possible to prevent air in the clean room from entering the stocker 1 without passing through the circulation fan 2.

Embodiment 2. 2 is a vertical sectional view of a product storage device according to a second embodiment of the present invention. This product storage device is the same as the product storage device according to the first embodiment.
An organic decomposition chamber 9 is provided instead of the chemical removal filter 4. The organic decomposition chamber 9 has an ultraviolet irradiator 1
0 is installed, and the outside air immediately after being introduced into the organic decomposition chamber 9 by the circulation fan 2 is irradiated with ultraviolet rays from the ultraviolet ray irradiator 10. The other configurations are the same as those in the first embodiment, and the description thereof is omitted here.

According to this product storage device, the circulation fan 2
As a result, the air immediately after being introduced into the stocker 1 from the clean room is exposed to ultraviolet rays in the organic decomposition chamber 9, and the organic substances contained in the air are decomposed into carbon dioxide gas and water. Carbon dioxide gas and water generated here are released to the outside of the system. Also,
When the air from which organic substances have been removed in the organic decomposition chamber 9 passes through the ULPA filter 3, fine particles contained in the air are removed. As a result, the inside of the stocker 1 is made into a highly clean circulating air conditioning system, and the semiconductor wafer W, which is the product to be processed, is subject to fluctuations in the cleanliness of the outside air and fluctuations in the amount of impurities in the air in the clean room. Instead, it can be stored in a highly clean space.

Embodiment 3. 3 is a vertical sectional view of a product storage device according to a third embodiment of the present invention. This product storage device is the same as the product storage device according to the first embodiment.
An ionic component removing chamber 12 is provided in place of the chemical removing filter 4. A plurality of pure water pipes 13 are stretched around the ion component removing chamber 12, and the pure water circulating devices 14 to 15 to 20 are connected to the pure water pipes 13.
Pure water having a water temperature of about ℃ is circulated and supplied. The ion component removing chamber 12, the pure water pipe 13, and the pure water circulating device 14 constitute an ion component removing means 11 for removing the ion component contained in the outside air immediately after being introduced into the stocker 1. Other configurations are the same as those in the first embodiment,
The description is omitted here.

According to this product storage device, the circulation fan 2
As a result, the air immediately after being introduced into the stocker 1 from the clean room comes into contact with the surface of the pure water pipe 13 in the ion component removal chamber 12 to generate water droplets. At this time, water-soluble impurities contained in the air, that is, ionic components are taken into the water droplets. The water droplets are drained out of the system through a drain pipe 15 provided at the lower end of the stocker 1. As a result, the ionic components in the introduced air are removed. In addition, the air from which the ion components have been removed in the ion component removal chamber 12 is UL
When passing through the PA filter 3, fine particles contained in the air are removed. As a result, inside the stocker 1,
A high-cleanliness circulation air-conditioning system is used, and the semiconductor wafer W, which is the product to be processed, is stored in a high-cleanness space without being affected by the fluctuations in the cleanliness of the outside air and the fluctuations of the amount of impurities in the air in the clean room. It can be stored at.

As the ion component removing means 11,
Instead of the configuration of the ion component removing chamber 12, for example, a known pure water washer may be used to remove the ion component in the air.

Fourth Embodiment 4 is a vertical sectional view of a product storage device according to a fourth embodiment of the present invention. This product storage device includes a stocker 1 that accommodates and stores a semiconductor wafer W that is a product to be processed, and an air conditioner (external conditioner) 16 that is installed outside the stocker 1. A ULPA filter 3 is arranged in the upper part of the stocker 1, and a plurality of shelves 5 for mounting the semiconductor wafers W are provided below the ULPA filter 3.

The air conditioner 16 includes a pre-filter 17 and
The medium performance filter 18, the fan 19, the chemical removal filter 20, and the ULPA filter 21 are arranged in this order from the outside air introduction side to the outside air discharge side, and the outside air discharge side is provided with a duct 22. It communicates with the upper part of the stocker 1. The lower end of the stocker 1 serves as an outlet 23, and the air supplied from the air conditioner 16 can pass through the stocker 1.

According to this product storage device, the air introduced into the air conditioner 16 from the clean room by the fan 19 of the air conditioner 16 causes the pre-filter 17, the medium performance filter 18, the chemical removal filter 20, and the ULPA.
By being filtered by the filter 21, the ionic substances of P and B contained in the air, molecules such as organic substances and mist-like impurities, and fine particles are removed, and the cleanliness is improved.
The filtered air is supplied to the upper part of the stocker 1 via the duct 22. The air introduced into the stocker 1 is
Further, the particles are removed again by being filtered by the ULPA filter 3, and the cleanliness is further improved. The air thus highly cleaned passes through the stocker 1 and is discharged to the outside of the stocker 1 through the outlet port 23 at the lower end. As a result, the interior of the stocker 1 is kept in an air-conditioned space with high cleanliness, and the semiconductor wafer W, which is the product to be processed, is not affected by fluctuations in cleanliness of the outside air or fluctuations in the amount of impurities in the air in the clean room. , Can be stored in a high clean space.

The chemical removal filter 20 in the air conditioner 16 may be replaced with the organic decomposition chamber 9 in the second embodiment to remove the organic substances in the air. Further, instead of the chemical removal filter 20, the ion component removal chamber 12 and the pure water washer described in the third embodiment may be provided to remove the ion component in the air. Moreover,
The chemical removal filter 20, the organic decomposition chamber 9, the ionic component removal chamber 12 and the like may be provided in combination.

Embodiment 5. 5 is a vertical sectional view of a product storage device according to a fifth embodiment of the present invention. This product storage device includes a stocker 1 that accommodates and stores a semiconductor wafer W that is a product to be processed, and an air conditioner (external conditioner) 16 that is installed outside the stocker 1. The structure inside the stocker 1 is almost the same as that of the first embodiment.
That is, the inner wall 1b is concentric with the outer wall 1a of the stocker 1.
Is provided to form a circulation path 7, an inner wall 1b thereof is provided with a plurality of stages of shelves 5 on which semiconductor wafers W are mounted, and a lower portion of the stocker 1 is provided with a circulation fan 2 around an opening 6 at the center of the lower end. The chemical removal filter 4 and the ULPA filter 3 are arranged side by side in this order on the outer diameter side.

The internal structure of the air conditioner 16 is the same as that of the fourth embodiment, and its outside air outlet side is communicated with the upper part of the stocker 1 through the duct 22. In this air conditioner 16, it is configured such that the stocker 1 is supplied with air to the extent that it becomes a positive pressure circulation air conditioning system in combination with the air supply force of the circulation fan 2. Different from the case of 4.

According to this product storage device, the air filtered by the air conditioner 16 is supplied into the stocker 1 and then circulated in the stocker 1 by the circulation fan 2, and the air is removed by the chemical removal filter 4 and the ULPA filter 3. Impurities and particles inside are removed. As a result, the inside of the stocker 1 becomes a highly clean circulating air-conditioning system, and the semiconductor wafer W as a product is highly clean without being affected by the fluctuation of the cleanliness of the outside air and the fluctuation of the amount of impurities in the air in the clean room. It can be stored in the space.

Particularly, in this embodiment, the air conditioner 16
The amount of air supplied from the stocker 1 to the stocker 1 together with the air supply force of the circulation fan 2 is sufficient to form a positive pressure circulation air conditioning system in the stocker 1, and therefore, compared to the case of the fourth embodiment. The cost of the air conditioner 16 can be reduced.

Sixth Embodiment A product transfer apparatus according to Embodiment 6 of the present invention is an OHS (Over Head Shuttle) for transferring a product to be processed such as a semiconductor wafer.
e) and a cover that isolates the traveling route of the OHS from the clean room that is the outside world. The cover is made of a low degassing member such as metal or polymer and has at least an airtight structure, preferably an airtight structure and a watertight structure.

In the case where the product transfer device is configured in this way, the OHS traveling route can be isolated from the clean room, so that it is possible to prevent the air in the clean room from contacting the products to be processed such as semiconductor wafers transferred by the OHS. The product to be processed can be transported in an environment of high cleanliness.

A cover may be provided on the OHS traveling carriage instead of separating the OHS traveling route by the cover.

Embodiment 7. 6 is a vertical sectional view of an air conditioner according to a seventh embodiment of the present invention. This air conditioner is a device that supplies highly clean air to an area where high cleanliness is required, such as the air conditioner 16 of the fourth and fifth embodiments. Machine 16A, 1
6B is provided. The internal structures of both air conditioners 16A and 16B are the same as those of the air conditioner 1 according to the fourth and fifth embodiments (FIGS. 4 and 5).
Since the internal structure is the same as that of No. 6, its description is omitted here. Both air conditioners 16A and 16B are connected in parallel. That is, the outside air introduction pipes 24A and 24B of both air conditioners 16A and 16B are connected to a common introduction pipe 25, and the outside air discharge pipes 26A and 26B of both air conditioners 16A and 16B are also connected to a common discharge pipe 27.

Dampers 28A and 28B as switching means are provided on the outside air introduction pipes 24A and 24B of both the air conditioners 16A and 16B, respectively. These dampers 28
The opening and closing of A and 28B are controlled by a controller 29 which is a control means. The tip of a sample pipe 31 connected to the analyzer 30 is exposed in the common outlet pipe 27 that is the outlet of both air conditioners 16A and 16B. Analytical instrument 30
Is a means for sampling a portion of the filtered air flowing through the common outlet pipe 27 through the sample pipe 31 and analyzing the cleanliness of the air. The controller 29
Switches the open / closed state of the dampers 28A and 28B according to the analysis result of the analysis device 30. That is, the controller 29 sets one of the dampers 28A and 2B to the open state and the other to the closed state in the initial state, and when the analysis result of the cleanliness by the analysis device 30 is equal to or lower than the reference level, the dampers 28A and 2B. The open / closed state of 28B is switched in reverse.

The operation of this air conditioner will be described. At the start of the operation, the controller 29 sets the damper 28A in the open state and the damper 28B in the closed state, for example. As a result, the outside air introduced from the shared introduction pipe 25 is filtered by the one air conditioner 16A and then supplied from the common outlet pipe 27 to the area where high cleanliness is required. During this time, the analyzer 30 uses the air flowing through the common outlet pipe 27 as the sample pipe 3
1 is sampled and its cleanliness is analyzed. When the analyzed cleanliness falls below a predetermined reference value due to deterioration of the chemical removal filter 20 in the air conditioner 16A, for example, the analysis result is transmitted from the analysis device 30 to the controller 29. In response to this, the controller 29 switches the open / close state of both dampers 28A and 28B in reverse. That is, the damper 2 that has been open until then
8A is switched to the closed state, and the damper 28B which has been closed until then is switched to the open state. As a result, the outside air introduced from the common introduction pipe 25 is filtered by the other air conditioner 16B that has been in the rest state until then.

By such an operation, even if the chemical removal filter 20 deteriorates in the operating air conditioner or the supply is stopped due to the malfunction of the fan 19, another air conditioner can be switched to operate. Therefore, it is possible to prevent the air having a reduced cleanliness from being supplied to the target area, and it is possible to store or carry the product to be processed such as a semiconductor wafer in an environment of high cleanliness.
Further, it is also possible to perform maintenance of the malfunctioning air conditioner while supplying highly purified air to the target area.

Embodiment 8. 7 is a vertical sectional view of a product storage device according to an eighth embodiment of the present invention. This product storage device is the same as the product storage device according to the third embodiment.
An analysis device 32 for analyzing the cleanliness of the air after the ion component removal processing and a controller 33 as a control means for controlling the amount of pure water circulated by the pure water circulation device 14 according to the analysis result by the analysis device 32 are added. It is a thing. The internal structure of the stocker 1 is similar to that of the third embodiment, and the description thereof is omitted here. A tip end of a sample pipe 34 connected to the analytical instrument 32 is exposed in the vicinity of the outlet of the air passing through the ULPA filter 3 from the ion component removing chamber 12 in the stocker 1.

In this product storage device, the circulation fan 2 takes in the stocker 1 and the ion component removing chamber 12
The air from which the ionic components have been removed in step 1 and the particles have been removed by the ULPA filter 3 is sampled by the analyzer 32 through the sample pipe 34, and the cleanliness thereof is analyzed. When the analyzed cleanliness becomes equal to or lower than a predetermined reference value, the result is transmitted from the analysis device 32 to the controller 33. In response to this, the controller 33 causes the pure water pipe 1 to
The pure water circulation device 14 is controlled so that the amount of pure water circulating through 3 increases. As a result, when the ion component removal performance in the ion component removal chamber 12 deteriorates, the pure water pipe 13
The amount of pure water that circulates is increased, the ion component removal performance is improved, and a highly clean circulation air conditioning system is maintained in the stocker 1.

Ninth Embodiment 8 is a vertical sectional view of an air conditioner according to a ninth embodiment of the present invention. This air conditioner is a device that supplies highly clean air to an area where high cleanliness is required, such as the air conditioner 16 of the fourth and fifth embodiments. A hot air supply means 35 and an exhaust pipe 38 are provided. The internal structure of the air conditioner 16 is the same as the internal structure of the air conditioner 16 in Embodiments 4 and 5 (FIGS. 4 and 5), and includes a pre-filter 17 and
The medium performance filter 18, the fan 19, the chemical removal filter 20, and the ULPA filter 21 are arranged in this order from the outside air introduction side to the outside air discharge side. The warm air supply unit 35 includes a warm air supply device 36 and a warm air suction pipe 37 that connects the warm air supply device 36 to the chemical removal filter 20 of the air conditioner 16. Exhaust pipe 3
Reference numeral 8 connects the chemical removal filter 20 to the outside of the air conditioner 16.

In this air conditioner, when the chemical removal filter 20 of the air conditioner 16 deteriorates and the adsorption performance deteriorates, warm air is supplied from the warm air supply device 36 to the chemical removal filter 20 through the warm air suction pipe 37. Then, the organic substances adsorbed on the chemical removal filter 20 are desorbed and the chemical removal filter 20 can be regenerated.

Instead of supplying the warm air by the warm air supply means 35, the organic matter may be desorbed by heating the chemical removal filter 20. In short, the chemical removal filter 20 may be provided with a means for applying heat for desorbing organic substances.

[0055]

According to the product storage method of the invention of claim 1, outside air is introduced into the stocker for storing and storing the product to be treated by the circulation fan, and the outside air immediately after introduction is treated by the chemical removal filter and the ULPA filter. After filtering, the inside of the stocker is made into a circulating air conditioning system with high cleanliness.
The product can be stored in a highly clean space without being affected by fluctuations in the cleanliness of the outside air and fluctuations in the amount of impurities in the air in the clean room.

According to the second aspect of the present invention, there is provided a storage device for storing a product to be processed, a stocker for storing the product to be processed, a circulation fan for circulating the outside air into the stocker, and a circulation fan immediately after being taken into the stocker by the circulation fan. Since it is equipped with a chemical removal filter and ULPA filter for filtering the outside air, it is possible to create a circulating air conditioning system with a high degree of cleanliness inside the stocker, and to prevent changes in the degree of cleanliness of the outside air and fluctuations in the amount of impurities in the air in the clean room. The product can be stored in a highly clean space without being affected by it.

In the product storage method according to the third aspect of the invention, the outside air is introduced into the stocker for storing and storing the product to be processed by the circulation fan, and the outside air immediately after the introduction is irradiated with ultraviolet rays to be contained in the outside air. As well as decomposing the organic matter that is generated and filtering with a ULPA filter to create a highly clean circulation air conditioning system inside the stocker, fluctuations in the cleanliness of the outside air,
The product can be stored in a highly clean space without being affected by fluctuations in the amount of impurities in the air in the clean room.

According to a fourth aspect of the present invention, there is provided a storage device for storing a product to be processed, a stocker for storing the product, a circulation fan for collecting and circulating outside air in the stocker, and a circulation fan immediately after being taken into the stocker by the circulation fan. Since an organic decomposition chamber for irradiating the outside air of the unit with ultraviolet rays by an ultraviolet irradiator and a ULPA filter for filtering the outside air immediately after being taken into the stocker by the circulation fan, a circulation air conditioning system of high cleanliness inside the stocker is provided. Therefore, the product can be stored in a highly clean space without being affected by the fluctuation of the cleanliness of the outside air and the fluctuation of the amount of impurities in the air in the clean room.

In the product storage method of the fifth aspect of the present invention, the outside air is introduced into the stocker for containing and storing the product to be treated by a circulation fan, and the ionic component contained in the outside air is introduced by using pure water. Since it is removed from the outside air and is filtered by a ULPA filter to create a highly clean circulation air conditioning system inside the stocker, it does not depend on the changes in the cleanliness of the outside air and the changes in the amount of impurities in the air in the clean room. The product can be stored in a high clean space.

According to the sixth aspect of the present invention, in the product storage device, the stocker for accommodating and storing the product to be processed, the circulation fan for taking in the outside air into the stocker and circulating it, and immediately after being taken into the stocker by the circulation fan. Since the ionic component removing means for removing the ionic component contained in the outside air from the outside air using pure water and the ULPA filter for filtering the outside air immediately after being taken into the stocker by the circulation fan, the inside of the stocker is kept high. It can be used as a circulating air conditioning system with cleanliness, and the product can be stored in a highly clean space without being affected by fluctuations in the cleanliness of the outside air and fluctuations in the amount of impurities in the air in the clean room. .

In the product storage method of the invention of claim 7, the outside air filtered by an air conditioner equipped with at least a chemical removal filter and a ULPA filter is supplied into a stocker for storing and storing the product to be treated, thereby the stocker. Since the inside is a highly clean air-conditioned space, it is possible to store products in a highly clean space without being affected by fluctuations in the cleanliness of the outside air and fluctuations in the amount of impurities in the air in the clean room. .

The product storage device of the invention of claim 8 has a stocker for accommodating and storing the product to be treated, and at least a chemical removal filter and a ULPA filter,
Since it is equipped with an air conditioner that filters the introduced outside air and supplies it to the inside of the stocker, it is not affected by the change in the cleanliness of the outside air or the change in the amount of impurities in the air in the clean room, The product can be stored at.

In the product storage method of the invention of claim 9, the outside air filtered by an air conditioner equipped with at least a chemical removal filter and an ULPA filter is supplied to a stocker for containing and storing the product to be treated, and the stocker is also stored. A circulation fan placed inside takes in the outside air into the stocker and circulates it to create a highly clean circulation air conditioning system inside the stocker, thus reducing the cost of the air conditioner and changing the outside air cleanliness and clean room. The product can be stored in a highly clean space without being affected by fluctuations in the amount of impurities in the inside air.

The product storage apparatus according to the tenth aspect of the present invention has a stocker for accommodating and storing the product to be treated, and at least a chemical removal filter and a ULPA filter, and filters the introduced outside air to supply it into the stocker. An air conditioner and a circulation fan that is arranged in the stocker and that circulates the outside air taken into the stocker and circulates it can be a circulation air conditioning system with high cleanliness inside the stocker, and fluctuations in the cleanliness of the outside air, The product can be stored in a highly clean space without being affected by fluctuations in the amount of impurities in the air in the clean room. In particular, the amount of air supplied from the air conditioner to the stocker, together with the amount of air supplied from the circulation fan, is sufficient to provide a positive pressure circulation air conditioning system inside the stocker, so the cost of the air conditioner can be reduced. .

The product storage method according to the invention of claim 11 is an OHS (OverHead Shut) for transporting a product to be processed.
At least the trolley or the traveling route of tle) is isolated from the outside by a cover with an airtight structure, and the transport space for the product to be processed is a highly clean space. Can be prevented from coming into contact with each other, and the product to be processed can be transported in an environment of high cleanliness.

The product storage apparatus according to the twelfth aspect of the present invention is an OHS (OverHead Shut) that conveys a product to be processed.
and at least an airtight structure and a cover for isolating the OHS trolley or the traveling route from the outside, so that the air in the clean room is prevented from coming into contact with products to be processed such as semiconductor wafers transported by OHS. Therefore, the product to be processed can be transported in an environment of high cleanliness.

The product storage method according to the thirteenth aspect of the present invention is a product storage method for supplying highly purified air to a storage area of a product to be treated, each of which has at least a chemical removal filter and a ULPA filter. When the outlets of the two air conditioners that filter the introduced outside air are made common and both air conditioners are switched and used, the cleanliness of the filtered air at the outlets is analyzed, and if the analysis result falls below a predetermined level. Since the air conditioner is switched, it is possible to prevent the air with reduced cleanliness from being supplied to the storage area of the product to be processed, and to store the product to be processed in an environment of high cleanliness. You can Further, it is also possible to perform maintenance of a malfunctioning air conditioner while supplying highly purified air to the storage area of the product to be processed.

The product storage device of the fourteenth aspect of the present invention is a product storage device for supplying highly purified air to the storage area of the product to be treated, each of which has at least a chemical removal filter and a LUPA filter. First and second air conditioners for filtering outside air, switching means for switching one of the air conditioners to a use state and the other not used, and filtered air at mutually connected outlets of both air conditioners. Of the cleanliness, and the control means for reversing the switching state of the switching means when the analysis result by the analyzing means is below a predetermined level, so that the air whose cleanliness has decreased is treated. It is possible to prevent the product from being supplied to the storage area,
The product can be stored in a clean environment. Further, it is also possible to perform maintenance of a malfunctioning air conditioner while supplying highly purified air to the storage area of the product to be processed.

In the product storage method according to the fifteenth aspect of the invention, the outside air is introduced into the stocker for containing and storing the product to be treated by a circulation fan, and the ionic component contained in the outside air is introduced by using pure water. ULPA removed from outside air
After filtering with a filter, make the inside of the stocker a highly clean circulating air conditioning system, analyze the cleanliness of the outside air after removing ionic components, and increase the amount of pure water when the analysis result is below a predetermined level. Even if the ion component removal performance deteriorates, the ion component removal performance can be restored by the increase in the amount of pure water, and the circulation air conditioning system of high cleanliness can be maintained in the stocker.

According to a sixteenth aspect of the present invention, in the product storage device, a stocker for accommodating and storing a product to be processed, a circulation fan for taking in outside air into the stocker and circulating it, and immediately after being taken into the stocker by the circulation fan. Ion component removal means for removing the ionic components contained in the outside air using pure water, a ULPA filter for filtering the outside air immediately after being taken into the stocker by the circulation fan, and the ionic component removal means. Since the analysis device for analyzing the cleanliness of the outside air and the control means for increasing the amount of the pure water when the analysis result by the analysis device is below a predetermined level are provided, the ion component removal performance by the ion component removal means When is decreased, the amount of pure water is increased and the ion component removal performance is restored, and the circulation air conditioning system with high cleanliness is maintained in the stocker.

A product storage method according to a seventeenth aspect of the present invention is a product storage method for supplying air filtered by an air conditioner having at least a chemical removal filter and a ULPA filter to an area for storing and storing a product to be treated, Since heat is applied to the chemical removal filter to regenerate it,
Even if the chemical removal filter deteriorates and the adsorption performance deteriorates, the chemical removal filter can be regenerated by heating.

The product storage apparatus according to the eighteenth aspect of the present invention is a product storage apparatus for supplying highly purified air to an area for storing and storing a product to be processed, which has at least a chemical removal filter and a ULPA filter. However, since it is equipped with an air conditioner that filters the introduced outside air and a means that applies heat to the chemical removal filter, even if the chemical removal filter of the air conditioner deteriorates and the adsorption performance drops,
By supplying heat to the chemical removal filter by means of applying heat, the chemical removal filter can be regenerated.

[Brief description of drawings]

FIG. 1 is a vertical sectional view of a product storage device according to a first embodiment of the present invention.

FIG. 2 is a vertical sectional view of a product storage device according to a second embodiment of the present invention.

FIG. 3 is a vertical sectional view of a product storage device according to a third embodiment of the present invention.

FIG. 4 is a vertical sectional view of a product storage device according to a fourth embodiment of the present invention.

FIG. 5 is a vertical sectional view of a product storage device according to a fifth embodiment of the present invention.

FIG. 6 is a vertical sectional view of a product storage device according to a seventh embodiment of the present invention.

FIG. 7 is a vertical sectional view of a product storage device according to an eighth embodiment of the present invention.

FIG. 8 is a vertical sectional view of a product storage device according to a ninth embodiment of the present invention.

FIG. 9 is a vertical cross-sectional view of a conventional product storage device.

[Explanation of symbols]

1 stocker, 2 circulation fan, 3 ULPA filter, 4 chemical removal filter, 9 organic decomposition chamber,
10 UV Irradiator, 11 Ion Component Removing Means, 12
Ion component removal chamber, 13 Pure water piping, 16, 16A,
16B air conditioner, 20 chemical removal filter, 28
A, 28B damper, 29 controller, 30 analytical instrument, 32 analytical instrument, 33 controller, 35
Hot air supply means, 36 hot air supply device, 37 hot air suction pipe, 38 exhaust pipe, W semiconductor wafer.

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) B01D 46/46 B01D 46/46 F term (reference) 3L058 BD00 BE02 BF08 BG03 4D020 AA10 BA23 CB03 CB25 CD10 4D058 JA13 NA01 NA07 NA08 QA01 QA03 QA13 QA19 SA20 TA02 UA25 5F031 DA17 GA58 JA01 JA31 NA02 NA03 NA11 NA13 NA18 NA20 PA26

Claims (18)

[Claims] 1. A fresh air is introduced into a stocker for storing and storing the product to be treated by a circulation fan, and the fresh air immediately after the introduction is filtered by a chemical removal filter and a ULPA filter to ensure a high cleanliness inside the stocker. A product storage method characterized by a circulating air-conditioning system. 2. A stocker for accommodating and storing a product to be treated, a circulation fan for taking in outside air into the stocker and circulating it, a chemical removal filter for filtering outside air immediately after being taken into the stocker by the circulation fan, and A product storage device comprising a ULPA filter. 3. An outside air is introduced by a circulation fan into a stocker for accommodating and storing the product to be treated, and ultraviolet rays are radiated to the outside air immediately after the introduction to decompose organic substances contained in the outside air and a ULPA filter. The product storage method is characterized in that the inside of the stocker is circulated and air-conditioned with a high degree of cleanliness. 4. A stocker for accommodating and storing a product to be processed, a circulation fan for taking in and circulating outside air in the stocker, and an ultraviolet irradiator for the outside air immediately after being taken in the stocker by the circulation fan. A product storage device comprising: an organic decomposition chamber for irradiating ultraviolet rays; and a ULPA filter for filtering outside air immediately after being taken into the stocker by the circulation fan. 5. An outside air is introduced by a circulation fan into a stocker for accommodating and storing the product to be treated, and ionic components contained in the outside air immediately after the introduction are removed from the outside air by using pure water, and a ULPA filter is used. A product storage method characterized by filtering and forming a highly clean circulating air conditioning system inside the stocker. 6. A stocker for accommodating and storing a product to be treated, a circulation fan for taking in and circulating the outside air into the stocker, and a ionic component contained in the outside air immediately after being taken into the stocker by the circulation fan. A product storage device comprising: an ionic component removing unit that removes from the outside air using water; and a ULPA filter that filters the outside air immediately after being taken into the stocker by the circulation fan. 7. A highly clean air-conditioned space is provided inside the stocker by supplying the outside air filtered by an air conditioner equipped with at least a chemical removal filter and an ULPA filter into the stocker for storing and storing the product to be treated. A method of storing a product characterized by: 8. A stocker for accommodating and storing a product to be treated, and an air conditioner having at least a chemical removal filter and a ULPA filter and filtering the introduced outside air to supply it into the stocker. Product storage device. 9. The outside air filtered by an air conditioner equipped with at least a chemical removal filter and a ULPA filter is supplied into a stocker for storing and storing the product to be treated, and the outside air is provided by a circulation fan arranged in the stocker. The method of storing products is characterized in that the inside of the stocker is circulated and circulated to form a highly clean circulating air conditioning system. 10. A stocker for accommodating and storing a product to be treated, an air conditioner having at least a chemical removal filter and a ULPA filter, filtering the introduced outside air and supplying the air into the stocker, and arranged in the stocker. And a circulation fan for taking in outside air into the stocker and circulating it. 11. An OHS (Ove) that conveys a product to be processed.
A method of storing a product, characterized in that a carriage or a traveling route of the r Head Shuttle) is separated from the outside by a cover having at least an airtight structure, and a transportation space for a product to be processed is a highly clean space. 12. An OHS (Ove) that conveys a product to be processed.
r Head Shuttle) and at least an airtight structure, and a cover for isolating the OHS trolley or traveling route from the outside world. 13. A product storage method for supplying highly purified air to a storage area for a product to be treated, each of which includes at least a chemical removal filter and U.
With an LPA filter, the outlets of the two air conditioners that filter the introduced outside air are made common, both air conditioners are switched and used, and the cleanliness of the filtered air at the outlets is analyzed.
A product storage method, wherein the air conditioner is switched when the analysis result falls below a predetermined level. 14. A product storage device for supplying highly purified air to a storage area for a product to be processed, each of which comprises at least a chemical removal filter and L
It has a UPA filter and filters the introduced outside air.
And a second air conditioner, switching means for switching one of the air conditioners to a use state and the other to an unused state, and analyzing cleanliness of filtered air at outlets connected to each other of the air conditioners. A product storage device comprising: an analyzing unit; and a control unit for reversing the switching state of the switching unit when the analysis result by the analyzing unit falls below a predetermined level. 15. An outside air is introduced by a circulation fan into a stocker for accommodating and storing the product to be treated, and the ionic components contained in the outside air immediately after the introduction are removed from the outside air by using pure water, and the ULPA filter is used. The inside of the stocker is filtered to form a highly clean circulation air conditioning system, and the cleanliness of the outside air after removing ionic components is analyzed. When the analysis result is below a predetermined level, the amount of pure water is increased. How to store the product. 16. A stocker for accommodating and storing a product to be processed, a circulation fan for taking in and circulating the outside air in the stocker, and a pure ionic component contained in the outside air immediately after being taken into the stocker by the circulation fan. Ion component removing means for removing using water, ULPA filter for filtering the outside air immediately after being taken into the stocker by the circulation fan, and analyzer for analyzing cleanliness of the outside air treated by the ionic component removing means And a control means for increasing the amount of the pure water when the analysis result by the analyzer is below a predetermined level. 17. A method of storing a product, wherein air filtered by an air conditioner having at least a chemical removal filter and an ULPA filter is supplied to an area for containing and storing a product to be treated, the heat being applied to the chemical removal filter. Product storage method characterized by recycling. 18. A product storage device for supplying highly purified air to an area for accommodating and storing a product to be treated, the air conditioner having at least a chemical removal filter and a ULPA filter and filtering the introduced outside air. A product storage device comprising a machine and means for applying heat to the chemical removal filter.