JP2003021772A - Processing apparatus and processing method for lens barrel - Google Patents

Abstract

(57) [Problem] To provide a lens barrel in which the center of the visual field does not shift even when the magnification is switched. SOLUTION: A mounting screw portion 24 screwed to a supporting screw portion of a revolver and a mounting surface 23 applied to an abutment surface of the revolver are machined into a lens barrel 1 having a built-in objective lens. A chuck 2 for holding the lens barrel 1, a spindle 5 for rotating the chuck 2, an optical system 9 for irradiating the objective lens in the lens barrel with measurement light, and the measurement light passing through the objective lens to form an image. Moving means 26 having image capturing means 14 arranged at a position and adjusting the relative distance between the image capturing means and the lens barrel along the direction of the rotation center axis of the spindle 5; and a spot formed on the image capturing means. Display means 15 for making it possible to judge the state of the image, a position adjusting mechanism 4 for adjusting the relative position between the chuck 2 and the spindle 5 so that the predetermined light receiving position of the image capturing means coincides with the image forming position, and Processing tools 16 and 18 are provided for processing the mounting surface of the lens barrel and processing the mounting screw portion while keeping the distance from the light receiving position of the capturing means constant.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing apparatus and a processing method for processing a lens used in an optical device such as a microscope, particularly a lens barrel having an objective lens built therein (hereinafter referred to as a lens barrel).

[0002]

2. Description of the Related Art In the production of minute electronic parts and the like, the inspection is performed by using an optical device such as a microscope. For example, when the optical device is a microscope, a plurality of lens barrels containing a low-magnification objective lens and a plurality of lens barrels containing a high-magnification objective lens are attached to the revolver via attachment screw portions. Each of the objective lenses incorporated in each of these lens barrels is adjusted so that the focal positions thereof match when the objective lenses are switched by the revolver. In the operation of such a microscope, the observer looks into the eyepiece lens, first uses the low-magnification objective lens to position the measurement point in the field of view for focusing, and then rotates the revolver to increase the magnification. Switch to the objective lens and measure.

In such an operation for switching the eyepieces, an optical axis shift or a tilt or a focus shift occurs between the low-magnification objective lens and the high-magnification objective lens. If there is such a difference, when switching from a low-magnification objective lens to a high-magnification objective lens, the center of the field of view may shift and the measurement point may be off or the focus may shift. In such a case, it is necessary to switch to the low-magnification objective lens again in order to adjust the center of the visual field, and perform positioning of the measurement point and focusing again.

In order to eliminate such a complicated operation and automatically inspect a portion to be inspected (also called a sample), an optical device such as a microscope is provided with an automatic positioning mechanism and an automatic focusing mechanism. Is being done. FIG. 9 shows a microscope having a schematic structure described in Japanese Patent Laid-Open No. 5-88091, which has such an automatic focusing mechanism. An optical system is shown on the left side and a control device is shown on the right side.

This microscope has a function of automatically moving (moving vertically in the figure) the sample stage 104 on which the sample 103 is placed so that the sample 103 is in focus. This function is realized. To do this, eyepiece 1
05, the objective lens 101, in addition to the image pickup element 106, a semi-circular transmission plane plate 107, and a control device 110. Although the eyepiece 105 and the objective lens 101 are simplified as a single lens, in reality, each lens 1
Most of 05 and 101 is a lens group composed of a plurality of lenses, each of which is used by being incorporated in a lens barrel.

The semi-circular transmission plane plate 107 is provided between the eyepiece lens 105 and the objective lens 101, and is rotated by the pulse motor 108 so that it is positioned in the optical path between these lenses 105 and 101. Insert and remove. The pulse motor 108 is controlled by the control device 110.

The sample stage 104 is connected to a pulse motor 120 controlled by a controller 110,
According to a command from the control device 110, it moves up and down in the optical path. The image pickup device 106 is fixed to the lens barrel of the microscope so as to be positioned above the eyepiece lens 105 at a position equivalent to the position of the retina when viewed, and after its output signal is amplified by the video amplifier 109, Control device 11
Sent to 0. The control device 110 includes an MPU (processing device) 111, a ROM 112, a RAM 113, a bus line 114, motor drivers 115 and 116, and an A / D converter 117.

In this microscope, the sample stage 10 is controlled by the pulse motor 120 controlled by the controller 110.
4 is moved from the lower side to the upper side, for example,
The image pickup device 106 measures the respective contrast values when the transparent flat plate 107 is inserted into the optical path and when it is removed, and the control device 110 compares the contrast values. The in-focus point is obtained from this comparison value, and the sample stage 104
By moving the, the sample is automatically focused.

[0009]

However, in a microscope having a mechanism for automatically focusing as shown in FIG. 9, there are problems that the number of constituent parts is large, the structure is complicated, and the cost is high. On the other hand, when the observer manually adjusts the center of the visual field, it requires skill, and it is necessary to finely adjust the movement of the sample stage when focusing, which is a burden on the observer. Not only that, but there is a problem that the working time becomes long.

The present invention has been made in consideration of such conventional problems, and does not use an automatic positioning mechanism or an automatic focusing mechanism when observing or measuring a sample to be inspected. Also, when the objective lens is switched from a low-magnification one to a high-magnification one, the objective lens can be observed and measured without the need for repositioning or focusing, specifically, the objective lens. An object of the present invention is to provide a processing apparatus and a processing method for processing a lens barrel in order to provide a lens barrel having a built-in lens.

[0011]

When the objective lens is switched from a low-magnification one to a high-magnification one by switching the lens barrel attached to the revolver of the optical device, the center of the field of view and the focus are shifted. The mounting position or mounting angle to the revolver of each lens barrel mounted via the mounting screw portion (male screw) to each supporting screw portion (female screw) of the lens barrel is different, or the objective built into this lens barrel This is because the distance from the focal position of the lens to the mounting surface of the lens barrel on the revolver is shifted depending on the objective lens.

According to the present invention, the mounting position of the lens barrel having the objective lens on the revolver or the mounting angle to the revolver, and the distance from the focus position of the built-in objective lens to the mounting surface of the lens barrel on the revolver. However, even if the objective lenses with different magnifications are always the same, there is no need for positioning and focusing, so the mounting surface and mounting screw part ( Male thread) is processed with high precision.

That is, in the lens barrel processing apparatus according to the first aspect of the invention, the objective lens is built in the mounting screw portion that is screwed into the support screw portion of the revolver and the mounting surface that is attached to the abutment surface of the revolver. A processing device for processing into a lens barrel, comprising a chuck for holding the lens barrel, a spindle for rotating the chuck, an optical system for irradiating an objective lens in the lens barrel with measurement light, and the measurement light as an objective. Moving means for adjusting the relative distance between the image capturing means and the lens barrel along the axis of rotation of the spindle; A display means that allows the state of the spot imaged on the capturing means to be determined, and the chuck and the spin so that the predetermined light receiving position of the image capturing means and the image forming position coincide with each other. Processed and the position adjusting mechanism for adjusting the relative position, the mounting surface of the lens barrel in a state where the distance was kept constant between the light receiving position of the image capture means and dollars,
And a processing tool for processing the mounting screw portion.

According to the present invention, the position adjustment along the direction of the rotation center axis of the spindle by the moving means and the predetermined light receiving position of the image capturing means and the position where the measuring light irradiated on the objective lens forms an image are aligned. The relative position between the chuck and the spindle is adjusted by the position adjusting mechanism, and in this state, the mounting surface is machined by the machining tool and the mounting screw is machined.

In such processing, since the processing is performed in a state where the distance between the predetermined light receiving position of the image capturing means and the mounting surface of the lens barrel is always constant, different lens barrels are processed. However, the distance between the focal position of the objective lens built in it and the mounting surface is always constant. Therefore, even if the processed lens barrel is attached to the revolver of an optical device such as a microscope, the direction (attachment position or attachment angle) with respect to the revolver is always in a predetermined direction. Therefore, the objective lens can be switched by rotating the revolver. However, the center of the field of view becomes constant and the focus does not shift.

In such an invention, an expensive automatic positioning mechanism or automatic focusing mechanism is not required, and repositioning or focusing is not required, and the tact time can be shortened.

According to a second aspect of the present invention, there is provided a lens barrel processing apparatus in which a lens barrel having a built-in objective lens is mounted on a mounting screw portion that is screwed into a support screw portion of the revolver and a mounting surface of the revolver. A processing device for processing into a cylinder, which comprises a chuck for holding the lens barrel, a spindle for rotating the chuck, an optical system for irradiating the objective lens in the lens barrel with the measurement light, and the measurement light for the objective lens. Moving means for adjusting the relative distance between the image capturing means and the lens barrel along the direction of the central axis of rotation of the spindle;
The relative position of the chuck and the spindle is adjusted so that the display unit that enables the state of the spot imaged on the image capturing unit to be determined and the predetermined light receiving position of the image capturing unit and the image forming position match. When the distance between the position adjusting mechanism, the position where the measurement light irradiated on the objective lens is focused and the mounting surface of the objective lens barrel is the same focal length,
The mounting surface of the lens barrel is mounted so as to have a parfocal distance with respect to the light receiving position of the image capturing means and moves integrally with the image capturing means in the direction of the rotation center axis of the spindle to maintain the parfocal distance. And a processing tool for processing the mounting screw portion.

According to the present invention, the adjustment by the moving means and the relative position adjustment by the position adjusting mechanism are performed so that the predetermined light receiving position of the image capturing means and the position where the measuring light irradiated on the objective lens forms an image. After that, the mounting surface of the lens barrel is processed by a processing tool, and the mounting screw portion is processed.

In this processing, since the processing is performed in a state where the distance between the predetermined light receiving position of the image capturing means and the mounting surface of the lens barrel is always a constant parfocal distance, different lens barrels are processed. However, the distance between the focal position of the objective lens built in the lens barrel and the mounting surface becomes the parfocal distance. Therefore, even if the processed lens barrel is attached to the revolver of an optical device such as a microscope, the direction (attachment position or attachment angle) with respect to the revolver is always in a predetermined direction. Therefore, the objective lens can be switched by rotating the revolver. However, the center of the field of view becomes constant and the focus does not shift.

A third aspect of the present invention is the invention according to the first or second aspect, wherein the processing tool is a mounting surface processing tool for processing a lens mounting surface and a mounting screw portion processing tool for processing a mounting screw portion. It is characterized by consisting of.

According to the present invention, since the mounting surface processing tool and the mounting screw portion processing tool are exclusively arranged, even if the cutting heat is generated in the processing tool in the preceding step, the cutting is performed in the subsequent step. Predetermined processing can be performed without being affected by heat, so that the distance between the image capturing means and the lens barrel does not change. Therefore, the lens barrel does not expand due to the influence of heat, and the shift of the focal position due to the expansion does not occur.

According to a fourth aspect of the present invention, there is provided a lens barrel in which a lens barrel having a built-in objective lens is mounted on a mounting screw portion which is screwed into a supporting screw portion of the revolver and a mounting surface of the revolver. A method of processing into a cylinder, wherein the lens barrel is attached to a chuck supported by a rotatable spindle, the objective lens in the lens barrel is irradiated with measuring light, and the irradiated measuring light is imaged at a position. The relative movement along the rotation center axis direction of the spindle is adjusted so as to match the light receiving position of the image capturing unit, and the predetermined light receiving position of the image capturing unit and the image forming position are aligned, and then the position is adjusted. A processing tool which is fixed at the same focal length with respect to the light receiving position of the image capturing means and is moved and adjusted integrally with the image capturing means in the direction of the central axis of rotation of the spindle. , And performs the step of processing the mounting threaded portion of the lens barrel by a different working tool and process and the machining tool or the machining tool to machine the mounting surface of the lens barrel.

According to the present invention, the light receiving position of the image capturing means and the position where the measurement light irradiated on the objective lens forms an image are made to coincide with each other, and the same focal distance is maintained with respect to the light receiving position of the image capturing means in the matched state. Since the mounting surface of the lens barrel is processed by the processing tool in the open state, the distance between the light receiving position of the image capturing means and the mounting surface of the lens barrel is always the same focal length and constant. Therefore, even if the lens barrel containing the objective lens is attached to the revolver of an optical device such as a microscope and the objective lens is switched by the rotation of the revolver, the center of the field of view becomes constant and the focus does not shift.

According to a fifth aspect of the present invention, there is provided a lens barrel having a built-in objective lens, wherein a mounting screw part screwed into a support screw part of the revolver and a mounting face to be fitted to the contact face of the revolver are incorporated. A method of processing into a cylinder, wherein an image is captured by setting a distance between a position where the measurement light irradiated on the objective lens is imaged and a mounting surface of the lens barrel to be a parfocal distance, and a position where the image is formed to be a light receiving position. Means for irradiating the objective lens with a machining tool, which is arranged at the same focal distance with respect to the image capturing means and the image capturing means, is provided separately from the moving means, and the moving means is movably arranged along the optical path of the measurement light. A step of moving and adjusting the moving means along the optical path of the measuring light so that the position where the light is imaged and the light receiving position of the image capturing means coincide, and then processing the mounting surface of the lens barrel by the processing tool; And performing the step of processing the mounting threaded portion of the lens barrel by a different working tool and Engineering tool or the machining tool.

According to the present invention, the light receiving position of the image capturing means and the position where the measurement light irradiated on the objective lens forms an image are made coincident with each other, and are kept at the same focal length with respect to the light receiving position of the image capturing means in the coincident state. Since the mounting surface of the lens barrel is processed with the processing tool in the open state, the distance between the light receiving position of the image capturing means and the mounting surface of the lens barrel with the built-in objective lens is always the same focal length and constant. Becomes
Therefore, even if the lens barrel containing the objective lens is attached to the revolver of an optical device such as a microscope and the objective lens is switched by the rotation of the revolver, the center of the field of view becomes constant and the focus does not shift.

[0026]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be specifically described below with reference to the embodiments shown in the drawings. In each embodiment, the same elements are designated by the same reference numerals and correspond to each other.

(Embodiment 1) FIG. 1 shows a processing apparatus according to Embodiment 1 of the present invention, and FIG. 2 shows a mounted state of a lens barrel having an objective lens built into a revolver.

The lens barrel 1 has a lens group (not shown) constituting the objective lens 1a therein. As shown in FIG. 2, on the upper part of the lens barrel 1, a mounting surface 23 that is a flat surface is provided.
A mounting screw portion 24 (male screw) is formed on the mounting surface 23 such that the central axis of the effective diameter of the male screw is vertical. The revolver 25 has a flat abutment surface 25a for attaching the lens barrel 1 and a support screw portion 25b.
A plurality of (female screws) are formed in the circumferential direction around the rotary shaft 25c of the revolver 25. The lens barrel 1 is attached to the revolver 25 by screwing a mounting screw portion 24 (male screw) into a support screw portion 25b (female screw) of the revolver 25 and attaching the attaching surface 23 to the flat attaching surface 25a of the revolver 25. To be done. Therefore, the revolver 25
The mounting position and mounting angle (mounting direction) of the lens barrel 1 with respect to are determined by the mounting surface 23 and the mounting screw portion 24. As a result, the distance L from the focus position P of the objective lens 1a built in the lens barrel 1 (the position of the image forming light beam indicated by the chain double-dashed line in FIG. 2) to the mounting surface 23 is also determined. If the distance L and the mounting direction are the same in all the lens barrels having the built-in objective lens, it is not necessary to perform repositioning or focusing when switching the objective lens.

As shown in the front view of FIG. 1, a processing apparatus for a lens barrel 1 having an objective lens 1a built therein holds a lathe spindle 5 and a chuck 2 attached to the spindle 5, which will be described later. A position adjusting mechanism 4 as position adjusting means for adjusting the position and orientation of the held chuck 2 with respect to the rotation center axis of the spindle 5, the chuck 2 attached to the position adjusting mechanism 4, and the chuck 2. An optical system 9 for irradiating the objective lens 1a in the lens barrel 1 held therein with a parallel light flux as a measurement light, and an image capturing means for receiving a spot (also referred to as a spot image) formed by passing through the objective lens 1a. CCD 14 as
And a mounting surface cutting tool 16 as a mounting surface processing tool that is controlled to advance and retract with respect to the lens barrel 1 so as to process the mounting surface 23 of the lens barrel 1, and a mounting screw portion 24 of the lens barrel 1. It is provided with a mounting screw part cutting tool 18 as a mounting screw part processing tool which is controlled to move forward and backward with respect to the lens barrel 1 so as to be processed and is also movable in a direction parallel to the rotation center axis of the spindle 5. .

The chuck 2 chucks and holds the outer peripheral surface of the lens barrel 1 to be processed, thereby positioning and holding the objective lens 1a incorporated in the lens barrel 1. The chuck 2 is provided with a slit 2a so that the inner diameter of the chuck portion is reduced. On the inner surface of the chuck portion of the chuck 2 that contacts the outer peripheral surface of the lens barrel 1, Bakelite, Delrin (trademark)
Since the cushioning material 3 made of a non-metal material such as the above is attached, the outer peripheral surface of the lens barrel 1 is not damaged during chucking. The lens barrel 1 held by the chuck 2 has a lens group (which may be a single lens) forming the objective lens 1a incorporated therein.
Some cutting margins 23a and 24a (the portions indicated by two-dot chain lines in FIG. 3A) before forming the mounting surface 23 and the mounting screw portion 24 are left on the outside. The outer diameter m1 of the portion having the cutting allowance 24a is larger than the screw outer diameter m2 of the mounting screw portion 24 after cutting shown in FIG. 3B, and the thickness t1 of the portion having the cutting allowance 23a is equal to It is thicker than the thickness t2 after the surface 24 is formed.

In FIG. 1, the spindle 5 is connected to a motor (not shown) serving as a well-known rotary drive source of a lathe, and rotates the chuck 2 together with the position adjusting mechanism section 4 attached to the spindle 5. The spindle 5 is adjusted so that the shake in the horizontal direction and the vertical direction on the paper surface is minimized. This is to improve the surface accuracy of the mounting surface 23 when processing the mounting surface 23 of the lens barrel 1 by the mounting surface cutting tool 16 which is a mounting surface processing tool described later. Further, the deviation of the parallelism of the rotation center axis line (also referred to as the rotation center axis) of the spindle 5 with respect to the optical path of the parallel light emitted from the optical system 9 to the objective lens 1a is also adjusted with the accuracy of the submicron order.

As described above, the spindle 5 is rotationally driven by a motor (not shown) serving as a rotational driving source, but in order to suppress thermal displacement of the entire processing apparatus due to heat generation of the motor, a mount (not shown) to which the motor is attached. ) Is the CCD support frame 3 to which the spindle 5 and the CCD 14 shown in FIG. 1 are attached.
The motor and the pedestal to which the motor is attached are cooled by air. As the form of the spindle 5, a combination of bearings, a type using an air spindle, and other types can be used.

The position adjusting mechanism 4 as a position adjusting means for adjusting the position and direction of the chuck 2 is composed of a spindle 5
The chuck 2 with respect to the center axis of rotation of the spindle 5, that is, the chuck 2
The relative position of the spindle 5 and the chuck 2 (objective lens 1a) is adjusted by shifting the lens barrel 1 held by the lens barrel 1 to the shift and tilt directions.

This adjustment is performed on the optical path of the parallel light emitted from the optical system 9, that is, the parallel light is converted into the objective lens 1a.
Is the adjustment of the positional relationship between the image forming position and the rotation center axis of the spindle 5, and the intersection point (predetermined position of the CCD 14) between the CCD 14 and the rotation center axis of the spindle 5 arranged at the image forming position described later. , The adjustment is performed so that the position where the parallel light forms an image by the objective lens (the position that can be substantially regarded as the focus position) is matched. Then, in this adjusted state, the chuck 2, that is, the lens barrel 1 having the objective lens 1a built therein is fixed to the spindle 5. As a structure for fine adjustment, a structure using a guide shaft and a micro head, a structure using a magnet, or the like can be selected.

FIG. 4 shows an example of a position adjusting mechanism for adjusting using a guide shaft and a micro head. In this position adjustment mechanism section 50, an X stage 51b and a Y stage 51c, which are controlled to move (shift control) in the X direction and the Y direction, respectively, are mounted on a pedestal 51a whose lower surface is attached to the upper surface of the spindle 5.
Y stage 51 is attached (each stage 51
Micro heads for pushing and pulling are attached to b and 51c in each direction, but they are not shown. ) Then, on the XY stage 51, it moves along a surface formed by the XZ axis, that is, the tilt adjustment stage 5 in the XZ direction.
3 is provided.

The tilt adjusting stage 53 in the XZ direction is set to the X
A pair of guide receivers 51d provided on the Y stage 51
It rotates around the guide shafts 52 supported respectively. In addition, the tilt adjustment stage 53
One side of the guide shaft 52 is urged in the F direction by a spring 54 disposed on the lower surface of the adjustment stage 53, and the other side of the micro head 55 is urged.
Is attached. With this structure, the tilt adjustment stage 53 is tilted in the XZ direction by rotating the adjustment knob of the micro head 55, so that tilt adjustment in the same direction can be performed.

Further, the tilt adjusting stage 5 in the XZ direction
A tilt adjusting stage 56 that moves along the surface formed by the YZ axes, that is, in the YZ direction is provided on the surface 3. The tilt adjusting stage 56 in the XZ direction is supported by a pair of guide receivers 53a provided in a direction orthogonal to the pair of guide receivers 51d. The tilt adjustment stage 53 in the XZ direction is provided with a guide shaft 57 in a direction orthogonal to the axial direction of the guide shaft 52, and is rotated about the guide shaft 57 along a surface formed by the YZ axes. To do. Tilt adjustment stage 5
By rotating the adjusting knob of the micro head 58 mounted on the head 6 in the YZ direction, the tilt adjustment in the same direction can be performed. The spring provided on the other side of the micro head 58 is not shown.
The chuck 2 is mounted on the tilt adjustment stage 56. The pedestal 51a, the X stage 51b, the Y
The central portion of each member of the stage 51c, the tilt adjusting stage 53, and the tilt adjusting stage 56 and the central portion of the spindle 5 are provided with holes (through holes) so that the objective lens barrel 1 held by the chuck 2 can be moved and adjusted. Hole)
Are formed.

The optical system 9 irradiates the objective lens 1a in the lens barrel 1 with parallel light as measuring light, and is arranged above the chuck 2. The optical system 9 includes a laser 6 as a light source, a lens system 7 for collimating the light from the light source, and a PBS (deflection beam splitter) 8 for deflecting the collimated light. The laser 6 has a wavelength of 6
It is preferable to use a 33 nm He-Ne laser. As the light source, a lamp of halogen, mercury, metal halide or the like can be used.

The CCD 14 as an image capturing means is
By being arranged below the spindle 5 while being fixed in the CCD receiver 13, the CCD 14
Faces the lower surface side of the objective lens 1 a in the lens barrel 1 held by the chuck 2. Specifically, the CCD receiver 13 is arranged so as to be orthogonal to the rotation center axis of the spindle 5.
Is erected on the CCD support frame 30 as a moving means,
As a result, the CCD 14 is arranged in the optical path of the parallel light with which the upper surface side of the objective lens 1a is irradiated. Also CCD1
A monitor 15 is connected to 4. In addition, CCD1
The surface of 4 may be laminated with a cover glass or a protective film for protection.

By being connected to the CCD 14, the monitor 15 serves as a display means, and the CCD 14 light receiving surface 14a on which the emitted parallel light is imaged by the objective lens 1a.
The spot (spot image) at the upper light receiving position is projected. A spot (spot image) formed by the objective lens 1a at a predetermined light receiving position of the CCD 4 (intersection point where the rotation center axis of the spindle 5 and the light receiving position on the light receiving surface of the CCD 14 intersect at right angles) is positioned at the center of the monitor 15. To CC
When the light receiving position of D14 is attached to the CCD support frame 30 via the CCD receiver 13, its positional relationship is adjusted. The display means is not limited to the one that allows the size of the spot to be visually recognized like the monitor 15, and the light intensity distribution of the spot received by the light receiving surface 14a of the CCD can be displayed as CC.
It is also possible to use a calculation output device capable of displaying by the data output as the spot position calculated in the area corresponding to the light receiving surface of D.

The CCD support frame 3 in which the CCD 14 is arranged
0 is guided by a pair of guide members 32 arranged parallel to the rotation center axis of the spindle 5 along the optical path of the parallel light (in the vertical direction in the figure) and the pulse motor 3
By being connected to 1, the movement is controlled and adjustable. In the movement adjustment of the CCD support frame 30, the size of the spot (spot image) displayed and displayed on the monitor 15 is minimized in the state where the focus position is adjusted when the spot becomes the minimum. (Alternatively, the light intensity can be maximized). A micro head may be used instead of the pulse motor 31 that operates the moving means, and the adjustment may be performed as an automatic or manual configuration.

In this embodiment, as will be described later, the first cutting tool table 33 to which the mounting surface cutting tool 16 is mounted.
And a CCD support frame 30 in which the CCD 14 is arranged are connected by an L-shaped connecting arm 26. As a result, when the pulse motor 31 is driven, the CCD 14 and the mounting surface cutting tool 16 are integrated into the optical path (spindle 5
It is movable along the rotation center axis line 9a.

In this way, the CCD is connected by the connecting arm 26.
Since the mounting surface cutting tool 16 and the mounting surface cutting tool 16 are integrated, the positional relationship between the light receiving surface 14a including the light receiving position of the CCD 14 and the mounting surface cutting tool 16 (that is, the cutting edge 16a of the cutting tool 16). The blade 16a is the spindle 5
Blade edge 16 when moved in the direction perpendicular to the rotation center axis of
a) and the light receiving surface 14a of the CCD 14 on the center axis of rotation are set in advance, the mounting surface cutting tool 16 is moved in the direction perpendicular to the center axis of rotation to mount the lens barrel 1. When cutting 23, the distance from the light receiving surface 14a of the CCD 14 to the mounting surface 23 of the lens barrel 1 can be made constant at all times. Therefore, the attachment surface cutting bite 16 attached to the first bite table 33 can be moved in the left-right direction of the paper surface (direction orthogonal to the rotation center axis of the spindle 5), and a pair of A guide 33a member is provided.

The mounting surface cutting tool 16 is integrated with the tool fixing pedestal 33b and is moved to the lens barrel 1 side by the motor 17 on the first tool table 33 along the axis orthogonal to the rotation center axis of the spindle 5. Driven. As a result, the cutting margin 23a portion (shown in FIG. 3A) of the mounting surface 23 of the lens barrel 1 is cut. In addition, as described above, the movement direction of the mounting surface cutting tool 16 is precisely perpendicular to the rotation center axis line of the spindle 5 by a measuring device (not shown) in advance. It is positioned when it is attached to the first tool holder 33 via the tool fixing base 33b.

As described above, the mounting surface cutting bit 16 is integrated with the CCD 14 by connecting the first bite table 33 and the CCD support frame 30 with the L-shaped connecting arm 26. In the present embodiment, the light receiving surface 14a of the CCD 14 and the mounting surface cutting tool 16 (that is, the tool 16).
Is always set as the parfocal distance on the rotation center axis of the spindle 5. As a result, when processing a plurality of lens barrels 1 having built-in objective lenses of different magnifications or a large number of lens barrels 1 having built-in objective lenses of the same magnification with the mounting surface cutting tool 16,
The distance from the light receiving surface 14a of the CCD 14 to the mounting surface 23 (cutting surface by the mounting surface cutting tool 16) is set so that the parfocal distance is always constant. As the material of the attachment surface cutting tool 16, single crystal diamond, cemented carbide, high speed steel or the like can be used. At the time of setup when attaching these various types of attachment surface cutting bites 16 to the first bite table 33, they are set after being positioned by a tool presetter or the like each time.

The mounting thread cutting tool 18 for cutting the mounting thread section 24 of the lens barrel 1 is provided separately from the mounting surface cutting tool 16 and is mounted on the second tool holder 34. This mounting screw part cutting tool 18
Is movable along one axis in the left-right direction of the paper (an axis orthogonal to the rotation center axis of the spindle 5) and an axis perpendicular to the axis (axis parallel to the rotation center axis of the spindle 5). Has become. The guide member for guiding the second bite table 34, the table for supporting the same, and the guide member for guiding the table are not shown.

The NC threaded cutting tool 18 is used to move the second cutting tool 34 to the lens barrel 1 side by the NC control motor 19 along the axis orthogonal to the rotation center axis of the spindle 5 or to the rotation center axis of the spindle 5. The mounting screw portion 24 of the lens barrel 1 is cut while being moved along an axis parallel to, or by a combination of both. For this reason, the control motor 19 controls the first motor 19a and the first motor 19a for controlling the movement in two directions which are orthogonal (up and down (direction parallel to the rotation center axis of the spindle 5) and left and right (direction perpendicular to the rotation center axis of the spindle 5). It has two motors 19b. Like the mounting surface cutting tool 16, the mounting screw section cutting tool 18 is also moved by the tool presetter at the time of setup to the second tool table 34 of the present processing device so as to be orthogonal to the rotation center axis line of the spindle 5 and left and right. The direction is also set so that it is positioned so as to be perpendicular to the rotation center axis of the spindle 5.

The machining with the mounting thread cutting tool 18 is
Performs outer diameter processing of threads and thread cutting to form complete threads. For this reason, in this embodiment, a cutting tool in which two blades for outer diameter processing and thread cutting are integrated is used. As shown in FIG. 5, the cutting tool 18 has a cutting edge 18a for outer diameter protruding, and a cutting edge 18b for thread cutting is formed at intervals n and r. The interval n is 18
When processing the outer diameter of the screw by a, the cutting edge 18b is set so as not to contact the objective lens barrel 1, and the interval r is
The length of the screw is set larger than the length of the screw so that the blade 18a does not come into contact with the lens barrel when forming the complete threaded portion by the blade 18b.

As described above, by using the two kinds of cutting tools of the mounting screw part cutting tool 18 and the mounting surface cutting tool 16, for example, in the case of adopting the machining process of performing the mounting surface cutting process after the mounting screw part cutting process, Mounting screw 2 performed in the previous stage
The heat (cutting heat) of the cutting tool 18 generated during the cutting of No. 4 is not transmitted from the cutting tool 18 when cutting the mounting surface 23. Therefore, the cutting tool 1 that has the cutting heat in the previous stage
By using 8, the total length direction of the lens barrel 1 is
The cutting heat extends the optical characteristics of the objective lens, and the CCD
It is possible to prevent the distance from the light receiving surface 14a of 14 to the mounting surface from changing.

Next, the processing method according to this embodiment will be described.

The lens barrel 1 incorporating the objective lens 1a is inserted into the chuck 2 and the chuck 2 is closed to hold the lens barrel 1 on the chuck 2. This lens barrel
Before processing the mounting thread and mounting surface in 1
As shown in (a), there are cutting margins 23a and 24a. Then
While irradiating the parallel light from the optical system 9, the image of the parallel light from the optical system 9 is projected on the monitor 15 through the objective lens 1a and the light receiving surface of the CCD 14, and the spindle 5
The chuck 2 and the lens barrel 1 are rotated via.

Then, as a first step, the objective lens 1a
The spot formed on the light receiving surface of the CCD 14 (spot image at the light receiving position) is minimized (minimum diameter), that is, the spot projected on the monitor 15 via the CCD 14 (spot image) is minimized. In addition, while observing (or visually recognizing the data made visible by the arithmetic means incorporated in the monitor, or directly observing by the observer), the CCD is supported along the optical path of the parallel light, that is, along the axis of rotation of the spindle 5. The movement of the frame 30 is controlled by the pulse motor 31. In this first stage, the spot on the monitor 15 is minimized.

After that, as a second step, while observing the monitor 15, the spindle 5 is rotated and the center of the rotation trajectory of the spot is located at the center of the monitor 15, and the position of the spot is the position of the monitor 15. Shift adjustment in the X and Y directions of the objective lens 1 held by the chuck 2 by the position adjusting mechanism 4 so as to match the center and the X adjustment
Tilt adjustment in the Z and YZ directions is performed. Then, the spot (spot image at the light receiving position) is positioned on the intersection (predetermined light receiving position) of the rotation center axis of the spindle 5 and the light receiving surface 14a of the CCD 14. When the second stage is finished, it is checked whether the spot projected on the monitor 15 is the smallest, and if the spot is the smallest, the position adjusting mechanism section 4 is fixed at that position.

If the spot is not minimized, the position adjustment mechanism section 4 is fixed after the adjustments of the first step and the second step are repeated to set the minimum. The adjustment operations of the first step and the second step may be performed in reverse. Further, when the spot is minimized in the first stage and is located at the center of the monitor 15, it is not necessary to perform the second stage adjustment.

In this way, the adjusting mechanism section 4 is adjusted so that the spot (image formation) is located at the center of the monitor 15 (that is, at the intersection of the rotation center axis of the spindle 5 and the light receiving surface 14a of the CCD 14). As a result, the position of image formation is constant in any objective lens.

In this state, by pressing a start switch (not shown) of the motor 17 in response to a control command from the control device, the mounting surface cutting bite 16 is moved along the axis orthogonal to the rotation center axis of the spindle 5 and the lens barrel. After moving to the 1st side, the end face of the mounting surface 23 of the lens barrel 1 is cut by the cutting edge 16a of the mounting surface cutting tool 16. By this end face cutting, an incomplete threaded portion of the lens barrel 1 is also formed.

After that, the mounting surface cutting tool 16 is retracted by the motor 17, and then the second NC control motor 19 is operated.
Motor 19b moves the mounting screw portion cutting tool 18 to the lens barrel 1 side, and then the first motor 19a of the NC control motor 19 moves it in a direction parallel to the rotation center axis of the spindle 5 to cut the mounting screw portion. The outer diameter of the mounting screw portion 24 is cut by the outer diameter machining edge 18a of the cutting tool 18. When the cutting of the screw outer diameter is completed, the second motor 1
After the mounting screw portion cutting tool 18 is once retracted with respect to the rotation center axis of the spindle 5 by 9b, the first motor 1
9a feeds in the opposite direction.

After that, the mounting screw portion cutting bite 18 is again moved toward the lens barrel 1 side by the second motor 19b, and then the spindle 5 is again rotated by the first motor 19a.
While moving in a direction parallel to the rotation center axis line, the remaining cutting allowance is removed by the thread cutting edge 18b of the mounting screw portion cutting tool 18 to cut the mounting screw portion 24 (complete screw portion). As a result, the mounting surface 23 and the mounting screw portion 2
The squareness with 4 is also extremely accurate.

When cutting the next lens barrel 1, the lens barrel 1 after processing is removed from the chuck 2 and then the same setup is performed. As a result, no matter which lens barrel 1 is processed, the distance from the focal position of the objective lens 1a built in the lens barrel 1 to the position of the mounting surface 23 of the lens barrel 1 on the rotation center axis of the spindle 5 can be reduced. The parfocal distance can always be kept constant. Therefore, the observer attaches the lens barrel 1 to the revolver 25 of the optical device such as a microscope.
Attached, and the revolver 25 is rotated to switch the objective lens from low magnification to high magnification without defocusing,
The center of the visual field can be made constant. This improves operability during observation and measurement, and eliminates the need for a complicated automatic focusing mechanism and moving positioning mechanism.

In this embodiment, the spindle 5
The intersection of the rotation center axis of the and the light receiving surface 14a of the CCD 14 is set as a predetermined light receiving position, and the shift adjustment and the tilt adjustment of the position adjusting mechanism unit 4 are performed so that the focus of the objective lens 1a may coincide with this position. Not limited to this, the focus may be matched with a predetermined light receiving position by only shift adjustment or tilt adjustment.

(Embodiment 2) FIG. 6 shows a lens barrel processing apparatus incorporating an objective lens according to Embodiment 2 of the present invention. In this embodiment, the adjusting motor 21 is connected to the position adjusting mechanism section 4 arranged between the chuck 2 and the spindle 5.

The adjusting motor 21 is composed of two motors, a first motor 21a and a second motor 21b, so that the X table and the Y table of the position adjusting mechanism section 4 are automatically controlled in the X and Y directions, respectively. Has become. The two motors 21 a and 21 b are connected to the control device 20, and the lens barrel 1 held by the chuck 2
The spot (the spot image at the light receiving position) formed by forming the parallel light emitted from the optical system 9 on the light receiving surface 14a of the CCD 14 through the objective lens 1a in the inside is observed on the monitor 15, and the spot on the monitor 15 Position control device 2
By performing feedback with 0, it is possible to perform shift control and positioning in the XY directions so that the spot is located at the center of the monitor 15.

In the tilt adjustment table for movement in the XZ direction and the YZ direction, the position where the parallel light is imaged by the objective lens 1a (the position which can be regarded as the focal position) and C
It is provided in the same manner as in the first embodiment in order to facilitate coincidence with the predetermined light receiving position of the CD 14, and a control motor is used instead of each micro head, and control is performed by the control device 20. Good.

In addition to the above, in this embodiment as well, CC
A connecting arm 26 that connects the CCD support frame 30 on which the D14 is placed and the first bite table 33 on which the attachment surface cutting bite 16 is attached is supported by the pulse motor 22 for vertical movement. The pulse motor 22 for vertical movement is a CCD support frame 30.
The CCD 14 and the mounting surface cutting tool 16 mounted on the are integrally controlled so that they can be vertically moved along the optical path of the parallel light, that is, in the direction of the central axis of rotation of the spindle 5.

By thus providing the pulse motor 22 for vertical movement, image processing is performed in the control device 20 so that the spot on the monitor 15 has the minimum diameter, and the mounting surface cutting tool 16 is positioned at the in-focus position. can do.
At this time, since the CCD 14 is connected by the connecting arm 26, the CCD 14 also moves together with the mounting surface cutting tool 16. Therefore, the light receiving surface 1 of the CCD 14
4a and the mounting surface cutting tool 16 for processing the mounting surface 23 of the lens barrel 1 are preset as the parfocal distance, so that the mounting surface 23 can be machined while maintaining the parfocal distance. it can.

In this embodiment, the objective lens 1a in the lens barrel 1 held by the position adjusting mechanism 4 is
The axis of rotation of the spindle 5 and the light-receiving surface 14 of the CCD 14
Since the positional shift and the focal shift with respect to the intersection (predetermined position) with a are corrected by automatic control, the working time for manufacturing the lens barrel 1 can be shortened.

(Third Embodiment) FIGS. 7 and 8 show an apparatus for processing a lens barrel incorporating an objective lens according to a third embodiment of the present invention. In the third embodiment, one processing tool is used to process the mounting surface of the lens barrel and the mounting screw portion.

As shown in the front view of FIG. 7, an L-shaped connecting arm 26 connects the CCD supporting frame 30 and the first bite table 33. On the upper side of the connecting arm 26, a convex guide 60 having a dovetail groove structure parallel to the rotation center axis of the spindle 5 and a long groove 61 formed at the center of the convex guide 60.
Are formed.

On the convex guide 60 on the upper side of the connecting arm 26, a first bite base 33 having a concave dovetail groove 62 fitted with the convex guide 60 is attached. A bolt hole passing through the center of the dovetail groove penetrates the first bite base 33, and is integrated with the connecting arm 26 by a bolt 64 penetrating the bolt hole and the long hole 61 and a nut 65 screwed to one end thereof. Fixed.

The dovetail groove 6 is formed on the upper surface of the first bite table 33.
A pair of guide members 66 parallel to 2 are fixed. On the pair of guide members 66, a bite support base 67 that is vertically movable along the guide members 66 is attached.
The tool holder support 67 is used for the motor 6 on the first tool holder 33.
By means of 8, it is controlled so as to be movable in the vertical direction (direction of the central axis of rotation of the spindle 5). The lower side stop position of the cutting tool support 67 is set by a reference position stop stopper 70 fixed to the first cutting tool 33.

The dovetail groove 6 is provided on the bite support 67.
A pair of guide members 71 are fixed in a direction orthogonal to 7 (direction orthogonal to the rotation center axis of the spindle 5). A tool holder pedestal 72 that is movable in the horizontal direction along the guide member 71 is mounted on the guide member 71, and a horizontal direction (direction orthogonal to the rotation center axis of the spindle 5 is set by a motor 73 on the tool support table 67. ) Is controlled to move.

In the third embodiment, a cutting tool 74 as a working tool for working the mounting surface 23 of the lens barrel 1 and working the mounting screw portion 24 is mounted on the tool fixing base 72. Then, when the tool holder 67 is stopped by the reference position stop stopper 70 of the first tool holder 33, the position of the tool 74 attached to the tool fixing base 72 is formed by the parallel light emitted to the objective lens 1a. So that the distance to the light receiving surface 14a of the CCD 14 that is moved to a position (substantially regarded as the focus position) and the cutting tool 74 (that is, the cutting edge 74a of the cutting tool 74) is the parfocal distance. It is set.

A processing method according to the third embodiment will be described.

As in the first embodiment, the lens barrel 1 incorporating the objective lens 1a is inserted into the chuck 2 and the chuck 2 is closed to hold the lens barrel 1 on the chuck 2. Before machining the mounting screw portion and the mounting surface of the lens barrel 1, as shown in FIG.
There is 4a. Next, while irradiating the parallel light from the optical system 9, the image of the parallel light from the optical system 9 is projected on the monitor 15 through the objective lens 1a and the light receiving surface 14a of the CCD 14, and the chuck is performed through the spindle 5 in the state. 2 and the lens barrel 1 are rotated.

Then, in the first step, the light receiving surface 14a of the CCD 14 is adjusted by the objective lens 1a in a state where the focus position is adjusted in advance when the spot becomes the minimum.
The observation (or the spot image) on the monitor 15 via the CCD 14 is minimized (or the spot image at the light receiving position) is minimized (that is, the spot image on the monitor 15 is minimized). The CCD support frame is arranged along the optical path of the parallel light, that is, in the direction parallel to the rotation center axis of the spindle 5 while visually recognizing the data made visible by the arithmetic means incorporated in the monitor or directly observing by the observer. The movement of 30 is controlled by a pulse motor 31. Then, in the first stage, the spot on the monitor 15 is minimized.

After that, in the second step, while observing the monitor 15, the spindle 5 is rotated and the center of the locus of rotation of the spot (imaging) is positioned at the center of the monitor 15. The position adjustment mechanism unit adjusts the shift of the lens barrel 1 held by the chuck 2 in the X and Y directions and the tilt adjustment in the XZ and YZ directions so as to match the center of the monitor 15. As a result, the spot (spot image at the light receiving position) is formed on the rotation center axis of the spindle 5 and the light receiving surface 14a of the CCD 14.
It is located at the intersection (predetermined light receiving position) with.

When the second stage is completed, it is checked whether or not the spot projected on the monitor 15 is minimized. If the spot is minimized, the position adjusting mechanism section 4 is set at the position of the lens barrel 1. To fix.

If the spot is not the minimum, the adjustments of the first and second steps are repeated to set the minimum, and then the position adjusting mechanism 4 is fixed. The first stage and the second
The step adjusting operation may be performed in reverse. Further, when the spot is the smallest in the first stage and the position of the spot is located at the center of the monitor 15, it is not necessary to perform the second stage adjustment.

In this way, by adjusting the position adjusting mechanism section 4 so that the spot (imaging) is located at the center of the monitor 15, the position P of the focal point of the parallel light beam by the objective lens 1a rotates the spindle 5. It is always at a predetermined light receiving position which is the intersection of the central axis and the light receiving surface 14a of the CCD 14, and the image forming position is constant for any objective lens.

In this state, by pressing a start switch (not shown) of the motor 73 in response to a control command from the control device, the mounting surface cutting tool 74 is moved along the axis orthogonal to the rotation center axis of the spindle 5 to the lens barrel. After moving to the 1 side, the end surface of the mounting surface 23 of the lens barrel 1 is cut by the cutting edge 74a of the mounting surface cutting tool 74. By this end face cutting, an incomplete threaded portion of the lens barrel 1 is also formed. After that, the mounting surface cutting tool 74 is retracted by the motor 73.

Next, the tool 68 is supported by the motor 68.
7 is lifted away from the reference position stop stopper 70 and the cutting tool 74 is moved to the outer diameter machining position of the mounting screw portion 24 by the motor 73, and then the cutting tool 7 is driven by the motor 68.
4 is raised in parallel with the central axis of rotation of the spindle 5 to cut the outer diameter of the screw. Next, the tool 73 is temporarily retracted by the motor 73, and the tool 68 is lowered by the motor 68 to the position of the reference position stop stopper 70.

Then, the motor 73 again feeds the tool holder pedestal 72 by a predetermined amount in the direction orthogonal to the rotation center axis of the spindle 5 for processing the mounting screw portion 24, and then the feed amount of the motor 68 and the motor 73 is changed. The position of the cutting edge 74a of the cutting tool 74 is controlled by controlling the mounting screw portion 24.
Perform the cutting process.

In the third embodiment, after the cutting process by the cutting tool 74 of the lens barrel 1 is completed by one process, the cutting heat of the cutting tool 74 is sufficiently radiated.
The machining of the mounting surface 23 and the mounting screw portion 24 of the lens barrel 1 with one machining tool is continuously performed without removing the lens barrel 1 from the chuck 2 and with the lens barrel 1 mounted on the chuck 2. You can A cooling gas such as nitrogen gas may be blown to accelerate heat dissipation.

When cutting the next lens barrel 1, the lens barrel 1 after processing is removed from the chuck 2, the same setup is performed, and then the next processing is performed. As a result, no matter which lens barrel 1 is processed, the distance from the focal position of the objective lens 1a built in the lens barrel 1 to the position of the mounting surface 23 of the objective lens barrel 1 on the rotation center axis of the spindle 5 Can always be made constant as the parfocal distance. Further, the perpendicularity of the mounting screw portion 24 with respect to the mounting surface 23 can also be made highly accurate.

Therefore, even if the observer attaches the lens barrel 1 to the revolver 25 of the optical device such as a microscope and rotates the revolver 25 to switch the objective lens from the low-magnification one to the high-magnification one, the focus is deviated. Therefore, the center of the visual field can be made constant. This improves operability during observation and measurement, and eliminates the need for a complicated automatic focusing mechanism and moving positioning mechanism. In addition, since the mounting surface 23 and the mounting screw portion 24 of the objective lens barrel 1 are processed by the single tool 74, the number of tools is reduced, and the space for installing the tools is also reduced, which results in downsizing. can do.

In the second and third embodiments, the spindle 5
The intersection between the rotation center axis of the and the light receiving surface of the CCD 14 is set as a predetermined light receiving position, and the shift adjustment and the tilt adjustment of the position adjusting mechanism unit 4 are performed so that the focus of the objective lens 1a coincides with the predetermined light receiving position. Alternatively, as in the first embodiment, the operation of making the focus of the objective lens 1a coincide with the predetermined position may be performed only by the shift adjustment or the tilt adjustment.

In each of the above embodiments, the focus position is adjusted when the spot is at its minimum (or the light intensity is maximum). Even if there is a deviation, the deviation amount may be set as the in-focus position in the calculation by the predetermined processing, and therefore, both can be treated as substantially equivalent.

As is clear from the above description, the present invention includes the inventions of the additional items shown below.

(Additional Item 1) A method of processing a mounting screw portion screwed into a support screw portion of a revolver and a mounting surface to be attached to an abutment surface of a revolver into a lens barrel having an objective lens built therein. The distance between the position where the measurement light irradiated on the objective lens is imaged and the mounting surface of the lens barrel is the same focal length, and the image forming position is the light receiving position. A processing tool arranged with a distance is provided separately from the moving means, and the moving means is movably arranged along the optical path of the measuring light, and the position where the measuring light irradiated on the objective lens forms an image and the image capturing. The moving means is moved and adjusted along the optical path of the measuring light so that the light receiving position of the means coincides with each other, and the predetermined light receiving position of the image capturing means coincides with the image forming position of the measuring light irradiated on the objective lens. Position adjustment, and then perform the step of processing the mounting surface of the lens barrel with the processing tool and the step of processing the mounting screw part of the lens barrel with the processing tool or a processing tool different from the processing tool. A method for processing a lens barrel characterized by the above.

According to the present invention, the light receiving position of the image capturing means and the position where the measurement light irradiated on the objective lens forms an image are made to coincide with each other, and then, the light receiving position of the image capturing means in the coincident state is set to the same focal distance. Since the mounting surface of the lens barrel is processed by the processing tool kept, the distance between the light receiving position of the image capturing means and the mounting surface of the lens barrel incorporating the objective lens is always the same focal length and constant. . For this reason,
Even with different lens barrels, the distance between the focal position and the mounting surface is always the same parfocal distance. Therefore, even if the lens barrel containing the objective lens is attached to the revolver of an optical device such as a microscope and the objective lens is switched by the rotation of the revolver, the center of the field of view becomes constant and the focus does not shift.

[0091]

According to the first aspect of the present invention, after the light receiving surface of the image capturing means and the focal position of the objective lens are adjusted to match each other, the light receiving surface of the image capturing means and the mounting surface of the lens barrel are connected to each other. It is possible to process the mounting surface of the lens barrel and the mounting screw portion by using the processing tool in which the interval of is kept constant. With this processing, the distance from the focal position to the mounting surface is constant for any lens barrel, and the perpendicularity between the mounting surface and the mounting screw portion can be made highly accurate. Therefore, after the lens barrel obtained by this processing was attached to an optical device such as a microscope, when the objective lens was changed from low magnification to high magnification by rotating the revolver, the center of the field of view did not shift and the measurement location was re-established. Not only is there no need to search, the operability is improved, and since no automatic positioning mechanism is required, the structure of an optical device such as a microscope to which the lens barrel is attached can be simple and inexpensive.

According to the second aspect of the present invention, the distance between the light receiving surface of the image capturing means and the mounting surface of the lens barrel is adjusted after the light receiving surface of the image capturing means and the focal position of the objective lens are adjusted to coincide with each other. With a processing tool that has been set to the parfocal distance,
Since the mounting surface of the lens barrel is machined and the mounting thread is machined, the distance from the focal position to the mounting surface is constant for any lens barrel, and the perpendicularity between the mounting surface and the mounting thread is also It can be highly accurate. Therefore, when the objective lens is changed from low magnification to high magnification by rotating the revolver after attaching the lens barrel obtained by processing to optical equipment such as a microscope, the center of the field of view does not shift and the measurement location is searched again. Not only is it unnecessary and the operability is improved, but since an automatic positioning mechanism is not required, the structure of an optical device such as a microscope to which the lens barrel is attached can be simple and inexpensive.

According to the invention of claim 3, claims 1 and 2
In addition to having the same effect as that of the invention described above, by using two kinds of tools, a mounting surface processing tool and a mounting screw part processing tool, the heat of the processing tool generated during the processing in the preceding stage can be used by the processing tool in the subsequent stage. Without affecting the processing of the lens barrel,
Therefore, it is possible to prevent the entire length of the lens barrel from being elongated due to heat and to prevent the focus position from shifting.

According to the fourth aspect of the present invention, the light receiving surface of the image capturing means and the focal position of the objective lens are made to coincide with each other, and the distance between the light receiving surface of the image capturing means and the mounting surface of the lens barrel is set to the parfocal distance. Since the mounting surface of the lens barrel is machined with the machining tool, and the mounting thread is machined, the distance from the focal point to the mounting surface is constant for any lens barrel, and the mounting surface and mounting thread The squareness with and can also be made highly accurate. As a result, even with different lens barrels, the distance between the focal position and the mounting surface is always constant, and even if the lens barrel is mounted on the revolver of the microscope and the objective lens is switched, the center of the field of view becomes constant and the focus shifts. Will disappear.

According to the fifth aspect of the present invention, the light receiving surface of the image capturing means and the focal position of the objective lens are made to coincide with each other, and the distance between the light receiving surface of the image capturing means and the mounting surface of the lens barrel is set at the same focal length. The mounting surface of the lens barrel is machined with the machining tool kept, and the mounting thread is machined, so the distance from the focal point to the mounting surface is constant for any lens barrel, and the mounting surface and mounting thread The squareness with and can also be made highly accurate. Therefore, even with different objective lenses, the distance between the focal position and the mounting surface is always the same focal length, and the lens barrel is attached to the revolver of the microscope.
Even if the objective lens is switched, the center of the field of view becomes constant and the focus does not shift.

[Brief description of drawings]

FIG. 1 is a front view showing a processing apparatus according to a first embodiment of the present invention.

FIG. 2 is a partially cutaway front view showing a state where a lens barrel is attached to a revolver.

3A and 3B are side views illustrating a lens barrel before and after processing.

FIG. 4 is a front view of a position adjusting mechanism section.

FIG. 5 is an explanatory diagram of a processing tool for cutting an objective lens barrel.

FIG. 6 is a front view showing a processing device according to a second embodiment of the present invention.

FIG. 7 is a front view showing a processing device according to a third embodiment of the present invention.

FIG. 8 is a cross-sectional view showing an AA cross section of the processing apparatus according to the third embodiment.

FIG. 9 is a block diagram of a conventional microscope having an automatic adjustment function.

[Explanation of symbols]

1 lens barrel 1a Objective lens 2 chuck 4 Position adjustment mechanism 5 spindles 9 Optical system 14 CCD 16 Mounting surface cutting tool (processing tool) 18 Mounting thread cutting tool (processing tool) 23 Mounting surface 24 Mounting thread 25 Revolver

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Kiyokazu Hosaka             2-43 Hatagaya, Shibuya-ku, Tokyo Ori             Inside Npus Optical Industry Co., Ltd. (72) Inventor Shigeru Furuyama             2-43 Hatagaya, Shibuya-ku, Tokyo Ori             Inside Npus Optical Industry Co., Ltd. (72) Inventor Shigeya Chimura             2-43 Hatagaya, Shibuya-ku, Tokyo Ori             Inside Npus Optical Industry Co., Ltd. (72) Inventor Masuo Nasu             2-43 Hatagaya, Shibuya-ku, Tokyo Ori             Inside Npus Optical Industry Co., Ltd. F-term (reference) 2H044 AC01 AJ06 AJ07 HC00

Claims (5)

[Claims] 1. A processing apparatus for processing a mounting screw portion screwed into a support screw portion of a revolver and a mounting surface to be attached to a contact surface of a revolver into a lens barrel having an objective lens built therein. A chuck that holds the lens barrel, a spindle that rotates the chuck, an optical system that irradiates the objective lens in the lens barrel with the measurement light, and an image that is arranged at a position where the measurement light passes through the objective lens and forms an image. A moving means having a capturing means for adjusting the relative distance between the image capturing means and the lens barrel along the direction of the rotation center axis of the spindle, and a state of the spot imaged on the image capturing means can be determined. A display unit and a position adjusting mechanism unit for adjusting the relative position of the chuck and the spindle so that the predetermined light receiving position of the image capturing unit and the image forming position coincide with each other; A lens barrel processing device, comprising: a processing tool for processing the mounting surface of the lens barrel while maintaining a constant distance from the light receiving position of the image capturing means, and processing the mounting screw portion. . 2. A processing device for processing a mounting screw part screwed into a support screw part of a revolver and a mounting face to be fitted to a contact face of the revolver into a lens barrel having an objective lens built therein. A chuck that holds the lens barrel, a spindle that rotates the chuck, an optical system that irradiates the objective lens in the lens barrel with the measurement light, and an image that is arranged at a position where the measurement light passes through the objective lens and forms an image. A moving means having a capturing means for adjusting the relative distance between the image capturing means and the lens barrel along the direction of the rotation center axis of the spindle, and a state of the spot imaged on the image capturing means can be determined. A pair of a display unit and a position adjusting mechanism unit that adjusts the relative position of the chuck and the spindle so that the predetermined light receiving position of the image capturing unit and the image forming position coincide with each other. When the distance between the position where the measurement light irradiated on the lens forms an image and the mounting surface of the objective lens barrel is the parfocal distance, the lens is mounted so as to have the parfocal distance with respect to the light receiving position of the image capturing means and the image. It is equipped with a processing tool for processing the mounting surface of the lens barrel while processing the mounting surface of the lens barrel while maintaining the parfocal distance while moving in the direction of the rotation center axis of the spindle integrally with the capturing means. A lens barrel processing device. 3. The lens mirror according to claim 1, wherein the processing tool comprises a mounting surface processing tool for processing a lens mounting surface and a mounting screw portion processing tool for processing a mounting screw portion. Tube processing equipment. 4. A method of processing a mounting screw portion screwed into a support screw portion of a revolver and a mounting surface to be attached to a contact surface of the revolver into a lens barrel having an objective lens built therein. Attach the tube to a chuck supported by a rotatable spindle, irradiate the objective lens in the lens barrel with measuring light, and match the position where the irradiated measuring light is imaged with the light receiving position of the image capturing means. The relative movement along the axis of rotation of the spindle is adjusted, and the position of the image capturing means is adjusted so that the predetermined light receiving position and the image forming position coincide with each other. And a step of processing the mounting surface of the lens barrel with a processing tool that is fixed at a distance and is moved and adjusted integrally with the image capturing means in the direction of the rotation center axis of the spindle. The machining tool or the machining tool machining method of the lens barrel, characterized in that a step of processing the mounting threaded portion of the lens barrel by a different working tool and. 5. A method of processing a mounting screw part screwed into a support screw part of a revolver and a mounting surface to be pressed against a contact surface of a revolver into a lens barrel having an objective lens built therein. The distance between the position where the measurement light radiated on the image is formed and the mounting surface of the lens barrel is the parfocal distance, and the parallax distance is maintained with respect to the image capturing means and the image capturing means that makes the image forming position the light receiving position. The processing tools are arranged separately from the moving means and the moving means is movably arranged along the optical path of the measuring light, and the position where the measuring light irradiated to the objective lens forms an image and the light receiving of the image capturing means. The moving means is moved and adjusted along the optical path of the measuring light so that the positions are matched, and then the mounting surface of the lens barrel is processed by the processing tool, and the processing tool or a processing different from the processing tool. Machining method of the lens barrel, characterized in that a step of processing the mounting threaded portion of the lens barrel by the tool.