JP2003005835A - 2D positioning device - Google Patents

Abstract

(57) [Summary] (with correction) [PROBLEMS] To automatically remove dust accumulated at the leading end of a slider moving in a two-dimensional direction when an overtravel position is detected. SOLUTION: A slider capable of moving in a X-axis direction and a Y-axis direction on a square platen, a servo driver for controlling the movement of the slider, an X-axis and a Y-axis of the platen
X-axis / Y-axis OT for detecting over-travel of slider at X-axis / Y-axis stopper provided at each end in axial direction
A two-dimensional positioning device comprising: a position detection unit;
The X-axis / Y-axis stopper is provided with means for removing dust attached to the slider, and when the slider is detected by the X-axis / Y-axis OT position detecting unit, the dust is brought into contact with the removing means to remove the dust. And the dust is moved to the corner of the platen by moving the slider, and the origin return operation is performed based on the position detected by the X-axis / Y-axis OT position detection unit.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a two-dimensional positioning device with improved maintenance.

[0002]

2. Description of the Related Art As shown in FIG. 4, a conventional two-dimensional positioning apparatus includes a platen 11 forming a quadrangular plane, a platen 11 and a plane motor, and an X-axis and a platen on the platen 11. A slider 12 that can move in the Y-axis direction, a servo driver 13 that controls the movement of the slider 12, and a pair of X-axis first and second stoppers provided at both ends of the platen 11 in the X-axis direction and the Y-axis direction. 14, 15 and Y-axis first and second stoppers 16,
17, and the X-axis first and second stoppers 14 and 15
Also, the X-axis / Y-axis OT (over) forming the OTX / OTY lines 19 and 20 indicating the limits of the slider 12 moving on the platen 11 in the X-axis and Y-axis directions on the Y-axis first and second stoppers 16 and 17, respectively. Travel) Position detector 2
It is composed of 1 and 22.

The X-axis OT position detector 21 is one of a pair of Y-axis first and second stoppers 16 and 17 in the Y-axis direction.
An OTX that is provided near the one end of the Y-axis second stopper 17 on the left side to emit light and receive the reflected light
The sensor 23 and the Y-axis first stopper 16 on the opposite side are provided with an OTX sensor reflection plate 24 that reflects this light.

The Y-axis OT position detecting section 22 is one of a pair of X-axis first and second stoppers 14 and 15 in the X-axis direction.
In the figure, an OTY sensor 25 is provided near the one end of the X-axis second stopper 15 on the left side to emit light and receive the reflected light, and the X-axis first stopper 1 on the opposite side.
4 has a structure including an OTY sensor reflection plate 26 that reflects this light.

As described above, the slider 12 driven and controlled by the servo driver 13 is moved on the platen 11 in the left-right direction.

In the two-dimensional positioning device having the above structure, the slider 12 moves on the platen 11,
When the OTX line 19 on the line connecting the OTX sensor 23 and the OTX sensor reflection plate 24 is crossed, the OTX sensor reflection plate 2
Since the reflected light of No. 4 does not return to the OTX sensor 23,
The sensor signal of the TX sensor 23 changes. The servo driver 13 catches this changed signal and performs a home-return operation based on the motor position at this time. The above is the motor control in the X-axis direction, but in the Y-axis direction as well, the OT position (OTY line 20) is detected and performed.

[0007]

However, when the planar motor that constitutes the slider is operated for a long time after being left in a dusty environment, dust on the platen collects on the edge of the slider. As a result, there is a problem that the OT detection position shifts and the origin cannot be returned.

By the way, the required reproduction accuracy of the OT detection position is about 0.5 mm, but it does not actually occur unless the user is informed in a considerably bad environment for a long time. In addition, the gap between the slider and the platen during operation is 10 to 15 μm, and since air is ejected from there, dust does not enter.

Therefore, the user has to remove the dust on the platen before the operation. However, in the situation where the plane motor is incorporated in the apparatus, this cleaning work compels the user and takes a lot of time for maintenance. There's a problem.

Therefore, there is a problem to be solved in a structure capable of cleaning dust and the like accumulated on a slider which is a planar motor.

[0011]

In order to achieve the above object, a two-dimensional positioning device according to the present invention has the following structure.

(1) A platen formed in a square shape,
A plane motor is formed with the platen, and X is moved on the platen.
A slider that can move in the axial and Y-axis directions, a servo driver that controls the movement of the slider, and an X-axis / Y-axis stopper that is provided at each of the X-axis and Y-axis direction end portions of the platen. Which is an X-axis / Y-axis OT position detection unit that forms an OTX / OTY line for detecting the OTX / OTY line and a stopper on the OTX / OTY line side, and is farther than the origin return position where the OTX line and the OTY line intersect. A two-dimensional positioning device having a dust removing unit for removing dust adhering to the slider at a position, wherein the slider is detected by the X-axis / Y-axis OT position detecting unit, The dust adhering to the slider is removed by bringing it into contact with the dust removing portion, and the removed dust is pushed by the front end portion in the moving direction of the slider to push the corner of the platen. 2-dimensional positioning device is characterized in that to perform the operation of moving the. (2) The two-dimensional positioning device according to claim 1, wherein the dust removing portion is formed by a brush.

In this way, when it is detected that the slider is at the overtravel line position, the dust adhering to the slider is wiped off with a brush, and the wiped dust is moved to the corner of the platen. By doing so, it becomes possible to simplify or eliminate the work of cleaning the slider and platen, which are planar motors, from dust.

[0014]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a two-dimensional positioning device of the present invention will be described below with reference to the drawings. It should be noted that the same components as those described in the prior art will be described with the same reference numerals.

As shown in FIG. 1, the two-dimensional positioning device includes a platen 11 that forms a quadrangular plane, a platen motor that forms a platen motor, and moves on the platen 11 in the X-axis and Y-axis directions. And a servo driver 13 for controlling the movement of the slider 12,
A pair of X-axis first and second stoppers 14 and 15 and Y-axis first and second stoppers 16 and 17 provided at both ends of the platen 11 in the X-axis direction and the Y-axis direction, and the X-axis first and second stoppers 16 and 17, respectively.
Axis first and second stoppers 14, 15 and Y axis first
And the second stoppers 16 and 17 are O indicating the limits of the slider 12 moving on the platen 11 in the X-axis and Y-axis directions.
The X-axis and Y-axis OT (overtravel) position detection units 21 and 22 forming the TX / OTY lines 19 and 20, and O
The X / Y-axis first stoppers 14 and 16 on the TX / OTY lines 19 and 20 side, which are the OTX line 19 and the OT
X-axis / Y for removing dust adhering to the slider 12 at a position farther than the origin return position where the Y line 20 intersects.
The shaft dust removing portions 27 and 28 are provided.
As described above, the slider 12 driven and controlled by the servo driver 13 moves on the platen 11 in the left-right direction.

The X-axis OT position detector 21 is one of a pair of Y-axis first and second stoppers 16 and 17 in the Y-axis direction.
It is provided near the end of the Y-axis second stopper 17 on the left side in the figure to emit light and receive the reflected light.
The TX sensor 23 and the Y-axis first stopper 16 on the opposite side are provided with an OTX sensor reflection plate 24 that reflects this light.

The Y-axis OT position detecting section 22 is one of the pair of X-axis first and second stoppers 14 and 15 in the Y-axis direction.
It is provided in the vicinity of the end of the X-axis second stopper 15 on the right side in the figure, and emits light and receives the reflected light.
The structure is such that the TY sensor 25 and the OTY sensor reflection plate 26 that reflects this light are provided on the X-axis first stopper 14 on the opposite side.

The X-axis / Y-axis dust removing portions 27, 28 for removing dust adhering to the slider 12 are formed by brushes 29 attached to so-called X-axis / Y-axis first stoppers 14, 16. The size is X-axis / Y-axis first stopper 1
It is designed to fit in 4 to 16 to OTX / OTY lines 19 and 20.

In the two-dimensional positioning apparatus having such a structure, the slider 12 moving in the two-dimensional direction moves on the platen 11 to cause the OTX of the X-axis OT position detector 21.
On the line connecting the sensor 23 and the OTX sensor reflection plate 24, that is, when crossing the OTX line 19, the reflected light of the OTX sensor reflection plate 24 will not return to the OTX sensor 23.
The sensor signal of the OTX sensor 23 changes from off to on, for example.

The servo driver 13 captures the changed signal and controls so as to perform a dust removing operation and then an origin returning operation. This point will be described in detail below with reference to FIGS. 2 and 3.

First, as shown in FIG. 2A, when the slider 12 is detected by the OTX line 19 (this detection includes dust 30 attached to the slider 12),
After moving to the Y-axis second stopper 17 direction that is a direction away from the home-return position to pass the X-axis dust removing unit 27 and further moving to the Y-axis second stopper 17, the X-axis second stopper 17 is moved again. Positioning is performed by the OTX line 19 in the direction.

Next, as shown in FIG. 2B, the slider 12 is moved toward the X-axis first stopper 14 by a prescribed amount.
Bring closer. The specified amount at this time means the OTX sensor 23.
Distance between the position and the tip of the brush 29 of the X-axis dust removing unit 27+
It is positioned at a position of several millimeters (5 millimeters in the embodiment).

Next, as shown in FIG. 2C, the slider 12 is moved in the Y-axis direction to remove dust 3 adhering to the slider.
1 is wiped off with a brush 29.

Next, as shown in FIG. 3A, the slider 12 from which dust 31 adhering to the slider 12 has been wiped off
Moves in a direction away from the X-axis first stopper 14 and positions at the position of the OTX line 19 (positioning of the slider 12 at this time is accurate positioning when dust 30 adhering to the slider 12 is wiped off). Will be).

As shown in FIG. 3 (B), the slider 12 which is correctly positioned is again provided with the X-axis first stopper 1 again.
It moves in four directions, and moves to a position of a distance + a few millimeters between the position of the OTX sensor 23 and the tip of the brush 29 of the X-axis dust removing unit 27 (position P1). The slider 12 moved to this position moves in the direction of the Y-axis second stopper 17 (position P2), and pushes the dust 31 wiped off with the brush 29 at the front end in the moving direction to the corner (end) of the platen 11. The series of dust removal operations is completed. Although not shown, the origin returning operation is performed after the dust removing operation is completed.

The above is the dust removing operation in the X-axis direction, and the dust on the slider surface on the stopper side may be similarly removed in the Y-axis direction.

In this way, for the time being, OTX / OT
With respect to the slider 12 detected at the positions of the Y lines 19 and 20, dust 30 adhering to the slider 12 was removed by the brush 29 of the X-axis / Y-axis dust removing units 27 and 28, and the corners of the platen 11 were wiped off. By pushing the dust 31, the OTX / OTY lines 19 and 20
The slider 12 can be accurately detected, and the wiped dust 31 is pushed to the corner of the platen 11 to prevent the detection operation on the next OTX / OTY lines 19 and 20 from being disturbed. , Platen 11
The maintenance of cleaning the top can be simplified or the time can be shortened.

[0028]

As described above, according to the present invention,
Not only can the work of removing dust on the platen by the user not only be reduced by adopting a structure in which a brush for removing dust is attached to the position of the platen stopper and sliding the slider itself to the brush to remove dust ,
Since it is possible to reduce the need for the user to enter the movable range of the slider operation, it is possible to improve safety.

[Brief description of drawings]

FIG. 1 is an explanatory view schematically showing a two-dimensional positioning device of the present invention.

FIG. 2 is an operation explanatory diagram of the present invention.

FIG. 3 is an operation explanatory diagram of the present invention.

FIG. 4 is an explanatory view schematically showing a conventional two-dimensional positioning device.

[Explanation of symbols]

11 Platen 12 sliders 13 Servo driver 14 X-axis first stopper 15 X-axis second stopper 16 Y-axis first stopper 17 Y-axis second stopper 19 OTX line 20 OTY line 21 X-axis OT position detector 22 Y-axis OT position detector 23 OTX sensor 24 OTX sensor reflector 25 OTY sensor 26 OTY sensor reflector 27 X-axis dust remover 28 Y-axis dust remover 29 brushes 30 dust 31 dust

   ─────────────────────────────────────────────────── ─── Continued front page    F-term (reference) 5H303 AA01 AA04 BB02 BB07 BB12                       CC03 DD01 EE03 EE07 FF01                       GG02 GG11 HH01 KK08

Claims (2)

[Claims] 1. A platen formed in a quadrangular shape, a slider that forms a plane motor with the platen and can move on the platen in the X-axis and Y-axis directions, a servo driver that controls the movement of the slider, and Platen X-axis and Y
An OT for detecting overtravel of the slider on an X-axis / Y-axis stopper provided at each of the axial end portions.
An X-axis / Y-axis OT position detector forming an X / OTY line, and a stopper on the OTX / OTY line side,
A two-dimensional positioning device comprising: a dust removing unit that removes dust adhering to the slider, at a position farther than a home-returning position where a TX line and an OTY line intersect with each other, wherein the slider is the X-axis. When the axis / Y-axis OT position detecting section detects the dust, the dust adhering to the slider is removed by bringing the dust removing section into contact with the dust removing section, and the removed dust is pushed by the front end portion in the moving direction of the slider. A two-dimensional positioning device characterized by performing an operation of moving to a corner of the platen. 2. The two-dimensional positioning device according to claim 1, wherein the dust removing portion is formed by a brush.