JP2003092530A - Tuning fork vibrating reed, tuning fork vibrator, tuning fork oscillator and electronic equipment - Google Patents

Abstract

[PROBLEMS] To provide a tuning fork vibrating piece, a tuning fork vibrator, a tuning fork oscillator, and an electronic device whose frequency absolute value falls within a predetermined range and which is excellent in shock resistance. . SOLUTION: A tuning-fork type vibrating reed comprising a base portion 110 and a plurality of vibrating arm portions 121 and 122 formed so as to protrude from the base portion and formed of quartz having a frequency characteristic of oscillating at approximately 32.768 kHz. A groove 121a or a through hole is formed in a front surface portion and / or a rear surface portion of each of the plurality of vibrating arm portions, and a cut portion 112 is formed in the base portion. The length L in the protruding direction is approximately 1162 μm to approximately 2013 μm, the length W of the vibrating arm portion in the width direction orthogonal to the protruding direction is approximately 50 μm to approximately 150 μm, and The tuning-fork type vibrating piece 100 is formed by forming the length in the thickness direction orthogonal to the protruding direction to be approximately 80 μm to approximately 130 μm.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD OF THE INVENTION

The present invention relates to a tuning fork type resonator element made of crystal, a tuning fork type resonator having the tuning fork type resonator element, a tuning fork type oscillator and an electronic device having the tuning fork type resonator.

[0003]

2. Description of the Related Art Conventionally, for example, a tuning-fork type crystal vibrating piece is constructed as shown in FIG. That is, the tuning-fork type crystal vibrating piece 10 has a base portion 11 and two arm portions 12 and 13 formed so as to project from the base portion 11. Then, an electrode portion (not shown) is formed on the two arm portions 12 and 13 and the base portion 11, and thereafter, they are electrically connected and fixed by a conductive adhesive in a predetermined package, and a tuning fork type vibration is formed. A child is formed.

[0004]

By the way, when such a tuning fork type vibrator 10 is actually arranged and used in an electronic device or the like, the electronic device or the like falls due to the carelessness of the user,
Due to this drop or the like, the tuning fork type vibrator 10 is also impacted. If the frequency at which the tuning fork type vibrating piece 10 or the like oscillates greatly changes due to the impact received at this time, the tuning fork type vibrating piece 10 and the tuning fork type vibrating piece become defective. Therefore, the impact resistance due to dropping etc. should be within a certain range, that is,
It is extremely important that the absolute value of the frequency deviation, which is the difference between the frequency of the tuning fork type vibrating piece 10 before falling and the frequency after falling, falls within a certain range.

In view of the above problems, it is an object of the present invention to provide a tuning fork type resonator element, a tuning fork type oscillator, a tuning fork type oscillator, and an electronic device which have an absolute frequency value within a predetermined range and are excellent in impact resistance. And

[0006]

According to the invention of claim 1, the above object is provided with a base portion and a plurality of vibrating arm portions formed so as to project from the base portion, and substantially 32.768 kHz.
A tuning-fork type resonator element formed of quartz having a frequency characteristic of oscillating at, wherein a groove portion or a through hole is formed in the front surface portion and / or the rear surface portion of each of the plurality of vibrating arm portions, and the base portion is formed. Has a notch, and the length of the vibrating arm in the protruding direction is approximately 1162 μm to approximately 2
The length of the vibrating arm portion in the width direction orthogonal to the projecting direction is approximately 50 μm to approximately 150 μm, and the length of the vibrating arm portion in the thickness direction orthogonal to the projecting direction is approximately 50 μm to approximately 150 μm. This is achieved by a tuning fork type resonator element having a thickness of about 80 μm to about 130 μm.

By the way, the impact such as the fall of the tuning fork type vibrating piece is a moment force from the base portion to the vibrating arm portion in the structure of claim 1. That is, this moment force is a value obtained by multiplying the length of the vibrating arm portion in the protruding direction from the base portion by the weight. Therefore, in order to reduce the moment force, the shorter the length of the vibrating arm, which is the protruding direction, is better. That is, the higher the frequency, the better the impact resistance. The length of the vibrating arm portion is what value the frequency at which the tuning fork type vibrating piece oscillates, and the length of the vibrating arm portion in the width direction orthogonal to the protruding direction of the vibrating arm portion. Will be determined by the value of

In the present invention, the frequency at which the tuning fork type resonator element oscillates is about 32.768 kHz, and the length of the vibrating arm portion in the width direction is about 50 μm to about 150 μm.
Further, the vibrating arm portion is formed with the groove portion or the through hole as in claim 1, and is configured to efficiently generate an electric field in the vibrating arm portion. Therefore, claim 1
In the tuning fork type vibrating piece of No. 3, the length of the vibrating arm portion in the width direction is shorter than that of the conventional 32.768 kHz tuning fork type vibrating piece. In this way, the frequency of the tuning fork type resonator element is set to 3
When the length of the vibrating arm portion in the width direction is approximately 50 μm to approximately 150 μm, the length of the vibrating arm portion is approximately 1162 μm to approximately 2013 μm. Under such conditions, the smaller the moment force, the better the shorter the length of the vibrating arm in the thickness direction orthogonal to the protruding direction.

However, the manufacturing limit, about 80 μm, is set as the lower limit. Further, as the impact resistance,
There is an absolute value of frequency deviation as an allowable value (the deviation between the frequency after the fall and the frequency before the fall is expressed as an absolute value in ppm unit based on the frequency before the fall), and the absolute value of the frequency deviation is set to 5 ppm. In this case, the upper limit of the length of the vibrating arm in the thickness direction is approximately 130 μm or less, and thus 5 ppm.
The following could be achieved: As described above, according to the configuration of claim 1, the absolute frequency value falls within a predetermined range,
A tuning-fork type vibrating piece with excellent impact resistance.

According to a second aspect of the present invention, there is provided a quartz crystal having a base portion and a plurality of vibrating arm portions protruding from the base portion and having a frequency characteristic of oscillating at about 32.768 kHz. A tuning fork type resonator in which a formed tuning fork type resonator element is housed in a package, wherein a groove portion or a through hole is formed in a front surface portion and / or a rear surface portion of each of the plurality of vibrating arm portions of the tuning fork type resonator element. And a cut portion is formed in the base portion, and the length of the vibrating arm portion in the protruding direction is approximately 1162 μm to approximately 2013.
μm, the length of the vibrating arm portion in the width direction orthogonal to the protruding direction is approximately 50 μm to approximately 150 μm, and the length of the vibrating arm portion in the thickness direction orthogonal to the protruding direction is This is achieved by a tuning fork type vibrator having a thickness of approximately 80 μm to approximately 130 μm.

According to the structure of claim 2, since the tuning fork type vibrator has the same tuning fork type resonator element as in claim 1,
This tuning-fork type vibrating piece is a tuning-fork type vibrating piece having a frequency absolute value within a predetermined range and excellent impact resistance, as in the first aspect. Further, according to the structure of claim 2, the tuning fork type vibrator having the tuning fork type vibrating piece excellent in impact resistance is provided.

Preferably, according to the invention of claim 3, in the structure of claim 2, the tuning fork type vibrator is characterized in that the package is formed in a box shape. According to the structure of claim 3, even when the package is formed in the shape of a box, the tuning fork type vibrator has the tuning fork type vibrating piece excellent in impact resistance.

Preferably, according to the invention of claim 4, in the structure of claim 2 or 3, the tuning fork type vibrator is characterized in that the package is formed in a so-called cylinder type. According to the structure of claim 4, even when the package is formed in a so-called cylinder type, the tuning fork type vibrator has the tuning fork type vibrating piece excellent in impact resistance.

According to a fifth aspect of the present invention, there is provided a quartz crystal having a base portion and a plurality of vibrating arm portions formed so as to project from the base portion and having a frequency characteristic of oscillating at about 32.768 kHz. A tuning fork type oscillator in which a formed tuning fork type resonator element and an integrated circuit are housed in a package, wherein a groove portion or a groove is formed on a front surface portion and / or a back surface portion of each of the plurality of vibrating arm portions of the tuning fork type resonator element. A through hole is formed, a cut portion is formed in the base portion, and further, a length in a width direction orthogonal to the protruding direction of the vibrating arm portion is formed to be approximately 50 μm to approximately 150 μm, and The tuning fork type oscillator is characterized in that the length of the vibrating arm portion in the thickness direction orthogonal to the protruding direction is formed to be approximately 80 μm to approximately 130 μm.

According to the structure of claim 5, since the tuning fork type oscillator has the tuning fork type resonator element similar to that of claim 1,
This tuning-fork type vibrating piece is a tuning-fork type vibrating piece having a frequency absolute value within a predetermined range and excellent impact resistance, as in the first aspect. In addition, according to the structure of claim 5, a tuning fork type oscillator having the tuning fork type vibrating element excellent in impact resistance is provided.

According to a sixth aspect of the present invention, there is provided a quartz crystal having a base portion and a plurality of vibrating arm portions protruding from the base portion and having a frequency characteristic of oscillating at about 32.768 kHz. A tuning fork type resonator element formed is a tuning fork type resonator housed in a package, which is an electronic device connecting the tuning fork type resonator to a control unit,
Grooves or through holes are formed in the front surface portion and / or back surface portion of each of the plurality of vibrating arm portions of the tuning fork type vibrating piece, and a cut portion is formed in the base portion, and further, the vibrating arm portion of the vibrating arm portion is formed. The length in the width direction orthogonal to the protruding direction is formed to be approximately 50 μm to approximately 150 μm, and the length in the thickness direction orthogonal to the protruding direction of the vibrating arm portion is formed to be approximately 80 μm to approximately 130 μm. It is achieved by an electronic device characterized in that

According to the structure of claim 6, since the tuning fork type oscillator has the tuning fork type resonator element similar to that of claim 1,
This tuning-fork type vibrating piece is a tuning-fork type vibrating piece having a frequency absolute value within a predetermined range and excellent impact resistance, as in the first aspect. The electronic device having the tuning fork type vibrating piece excellent in impact resistance as described above is provided.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The embodiment described below is a preferred specific example of the present invention,
Although various technically preferable limitations are given, the scope of the present invention is not limited to these forms unless otherwise specified in the description below.

(First Embodiment) FIG. 1 is a diagram showing a tuning-fork type crystal vibrating piece 100 according to a first embodiment of the present invention. The tuning fork type crystal vibrating piece 100 is, for example, a so-called crystal Z.
It is formed by cutting out a single crystal of quartz to form a plate. Further, the tuning-fork type crystal vibrating piece 100 shown in FIG. 1 is an extremely small tuning-fork type crystal vibrating piece because it is a vibrating piece that emits at 32.768 KHz, for example. Such a tuning fork type crystal vibrating piece 100 has a base 11 as shown in FIG.
Has 0. Then, the tuning fork arm 12 which is a vibrating arm portion so as to project upward from the base portion 110 in the drawing.
Two 1,122 are arranged.

Grooves 121a and 122a are formed on the front and back surfaces of the tuning fork arms 121 and 122 as shown in FIG. The grooves 121a and 122a are shown in FIG.
Since it is also formed on the back side of the tuning fork arms 121 and 122 not shown in FIG.
In the F ′ sectional view, it is formed in a substantially H shape.

Further, in the groove portions 121a and 122a,
As shown in FIGS. 1 and 2, the groove electrodes 123 and 124 are arranged, and so as to face the groove electrodes 123 and 124,
Side electrodes 125 and 126 are arranged as shown in FIG. Therefore, the voltage is applied to the groove electrodes 123 and 124 and the side surface electrodes 125 and 1 through the base electrode 127 shown in FIG.
When applied to No. 26, an electric field is effectively generated inside the tuning fork arms 121 and 122, and the tuning fork type quartz vibrating piece 100 has a low vibration loss and a low CI value. In the present embodiment, the groove portions 121a and 122a are formed in the tuning fork arms 121 and 122 as described above, but the present invention is not limited to this, and through-holes are formed in the tuning fork arms 121 and 122 to arrange electrodes. It doesn't matter.

By the way, the tuning fork arms 121 and 12 shown in FIG.
In FIG. 2, the tuning fork arm length L, which is the length in the vertical direction, is formed to be 1644 μm, for example. Also, the base 110
Has a substantially plate-like shape as a whole, and has notches 112 formed at two places, for example, as shown in FIG. The notches 112 and 112 are the tuning fork arm 12
1, 122 are formed in a direction (width direction of the base portion 110) orthogonal to a protruding direction (vertical direction in the drawing) of the base portion 110. In this way, the notches 112, 11
2 is formed, leakage of vibration of the tuning fork arms 121 and 122 to the mount portion 113 of the base portion 110 can be reduced. That is, it is possible to effectively suppress the vibration leakage of the vertical component of the tuning fork arm portions 121 and 122 and reduce the variation between the tuning fork type quartz vibrating pieces of the CI value. Here, the mount portion 113 refers to a portion for fixing the tuning fork type crystal vibrating piece 100 to a package or the like with a conductive adhesive and electrically connecting the same.

The length W of the tuning fork arms 121 and 122 in the width direction is, for example, 100 μm. Further, the thickness D of the tuning fork arms 121 and 122 in the thickness direction is, for example, 1
It is formed to have a thickness of 00 μm.

The tuning fork type crystal vibrating piece 100 configured as described above becomes a tuning fork type crystal resonator when packaged in, for example, a cylinder package or a ceramic package, and this tuning fork type crystal resonator is mounted in various electronic devices. Will be used. When the electronic device or the like on which the tuning fork type crystal vibrating piece 100 is mounted is accidentally dropped, the impact causes the tuning fork type crystal vibrating piece 10 to fall.
It is generally known that a change occurs in the frequency of 0.
If such a frequency change is large, the quality of the tuning-fork type crystal vibrating piece 100 is deteriorated. Therefore, it is necessary to keep the frequency change within a certain range.

By the way, the impact on the tuning-fork type crystal vibrating piece 100 due to dropping or the like causes the tuning fork arm 121,
122 is the moment force to the 122, and this moment force is
The tuning fork arm length L is multiplied by the weight. Here, in order to reduce the moment force and improve the impact resistance, it is first necessary to make the length L of the tuning fork arms 121 and 122 as short as possible. However, in the present embodiment, the frequency of the tuning fork type crystal vibrating piece 100 needs to be 32.768 kHz, and therefore it is necessary to secure the minimum length L of the tuning fork arms 121 and 122 for maintaining this frequency. There is.

In this embodiment, the frequency is set to 32.768.
Since the frequency is set to kHz, the length L of the tuning fork arms 121 and 122 is set to 1
Although it is set to 644 μm, it is not limited to this and 1162 μm or 2
It may be 013 μm.

On the other hand, in order to reduce the moment force, it is effective to reduce the weight. In particular,
The width W and the thickness D of the tuning fork arms 121 and 122 of FIG.
The smaller the weight, the smaller the weight. First, the width W of the tuning fork arm
Needs to have a frequency of 32.768 kHz, so its value differs depending on the length L of the tuning fork arm. In the present embodiment, since the length L of the tuning fork arm is 1644 μm, the width W of the tuning fork arm is 100 μm. The length L of the tuning fork arm is 1162 μm or 2013 as described above.
If it is set to μm, the width W of the tuning fork arm is 50μ, respectively.
m, 150 μm.

When the length L of the tuning fork arm is determined and the width W of the tuning fork arm is determined in this manner, the rest is the thickness D of the tuning fork arm. If the thickness D of the tuning fork arm is made as thin as possible, the above-mentioned “weight” should be small, the moment force should be small, and the impact resistance should be good. But,
Tuning fork arms 121, 1 beyond the manufacturing limit of 80 μm
22 cannot be thinly formed. In the tuning fork crystal vibrating piece 100 of the present embodiment, the thickness D of the tuning fork arm is 100 μm, which is easy to manufacture and is thin.

The tuning fork type quartz vibrating piece 1 defined in this way
The impact resistance of 00 is specifically verified by experiments as follows, since the change in frequency appears as a degree. That is, such a change in frequency due to a shock such as a drop of the tuning fork type crystal vibrating piece 100 having a frequency of 32.768 kHz is a permissible value of a frequency deviation absolute value (pp) within a certain range.
Judge whether it fits within m). This frequency deviation is
Specifically, in a predetermined drop test, when the frequency of the tuning fork type crystal vibrating piece 100 before dropping is f1 and the frequency of the tuning fork type crystal vibrating piece 100 after dropping is f2, the frequency deviation is (f2-f1). ) / F1 (ppm). Then, the absolute value of this frequency deviation value is defined as the frequency deviation absolute value.

FIG. 3 is a graph showing the relationship between the absolute value of the frequency deviation and the thickness D of the tuning fork arm. In the graph of FIG. 3, the vertical axis represents the absolute value (ppm) of the frequency deviation, and the horizontal axis represents the thickness D of the tuning fork arm, which is the manufacturing limit of 80 μm.
It is thickened from m to 140 μm.

Further, the object of the drop experiment is the tuning fork type quartz vibrating piece 100 (tuning fork arm length W: 1644) of the present embodiment.
μm, tuning fork arm width W: 100 μm), other tuning fork type crystal vibrating piece A (tuning fork arm length W: 1162 μm, tuning fork arm width W: 50 μm), other tuning fork type crystal vibrating piece B ( Tuning fork arm length W: 2013 μm, tuning fork arm width W: 150 μ
m) was also performed. In the drop test, the tuning fork-type crystal vibrating piece to be tested is packaged in a cylinder or a ceramic package, and fixed to a jig of 100 g, for example, and then, as shown in FIG.
It was dropped in the X, Y and Z directions shown in. Then, the absolute value of the frequency deviation of the tuning fork type quartz vibrating piece dropped 10 times in each of the X, Y and Z directions is an allowable value of 5p.
It was confirmed whether or not it was within pm.

The absolute value of the frequency deviation (ppm) is set to 5 ppm which is the usual allowable limit. The tuning fork crystal vibrating piece 100 of the present embodiment has a tuning fork arm thickness D of 100 μm, and therefore is 2.5 ppm from the graph of FIG. 3, which is well within the allowable range. It was found that even if the thickness of the piece 100 was increased to 130 μm, it was within the above-mentioned allowable range at 4 ppm. Further, the other tuning fork type quartz vibrating piece A that was also tested in the above is within 2.5 ppm even if the thickness D of the tuning fork arm is 130 μm, and is included in the above allowable range. Furthermore, in the case of the other tuning-fork type quartz vibrating piece B, it was within 5 ppm even when the thickness D of the tuning-fork arm was set to 130 μm.

As described above, in the tuning fork type crystal vibrating piece 100 according to the present embodiment, the absolute value of the frequency deviation (pp) is obtained even if the thickness D of the tuning fork arm is increased to not only 80 μm but also 130 μm.
m) is within the permissible value of 5 ppm, and the vibrating reed is excellent in impact resistance against dropping or the like. Further, the other tuning fork type quartz vibrating pieces A and B also have a tuning fork arm thickness D of 100 μm to 130 μm.
Even in μm, the absolute value of frequency deviation (ppm) is an allowable value of 5
It has been found that the vibrating piece is contained in the range of ppm and has excellent impact resistance due to dropping or the like.

By the way, the notch 11 shown in FIG.
Reference numeral 2 is for suppressing vibration leakage in order to suppress variations in the CI value among the tuning fork type crystal vibrating pieces 100. Hereinafter, this vibration leakage will be described in detail. Since the tuning fork crystal vibrating piece 100 shown in FIG. 1 is miniaturized as described above, the width W of the tuning fork arms 121 and 122 shown in FIG.
Is extremely narrow at 100 μm. Also, the thickness D of the tuning fork arm is as thin as 100 μm.

5 (a) and 5 (b) are schematic explanatory views for explaining the vibrating state of the tuning fork type quartz vibrating piece.
FIG. 5A is an explanatory diagram illustrating a conventional vibrating state of a tuning fork type quartz vibrating piece, and FIG. 5B is an explanatory diagram illustrating a vibrating state including a vertical component of the tuning fork type quartz vibrating piece. is there.

As shown in FIG. 5, the tuning fork arms 121 and 122 of the tuning-fork type crystal vibrating piece as shown in FIG. 5 (a) have a long width W and a short thickness D, as shown by an arrow B in the figure. Normal horizontal vibration will be performed. However, when the width W becomes short as described above, as shown in FIG.
The vertical component (direction of arrow C in the figure) is included, and the tuning fork arms 121 and 122 vibrate in the direction indicated by arrow E.

FIG. 6 is a graph showing the relationship between the vertical vibration component displacement amount (nm) and the width W / thickness D of the tuning fork arms 121 and 122. As is apparent from the graph shown in FIG. 6, the vertical vibration component displacement amount (nm) is the width W / of the tuning fork arms 121 and 122.
It can be seen that when the thickness D is smaller than 1.2, the amount of displacement rapidly increases. In this way, with the vertical component of the vibration of the tuning fork arms 121, 122 increased, the tuning fork arms 121, 122
When the oscillates, the vibration of this vertical component is
The energy is transmitted to the mounts 113, 113 of the and the energy escapes. When vibration leakage, which is the escape of energy, occurs, the vibration of the tuning fork arms 121 and 122 becomes unstable, and the CI value varies greatly among the tuning fork crystal vibrating pieces 100.

Therefore, in order to suppress the variation in the CI value for each tuning fork type quartz vibrating piece 100, it is necessary to suppress this vibration leakage.
It is configured to be suppressed by 12. Therefore, the vibration leaked from the tuning fork arms 121 and 122 is not affected by the cut portion 11
With 2, 112, vibration leakage can be suppressed in the narrowed portion, and the influence on the mount portions 113, 113 can be reduced.

As described above, in this embodiment, since the notches 112, 112 are formed, the leakage vibration affects the mount portion 113 and the like of the base portion 110, energy leaks from the mount portion 113, and the vibrating piece. CI by each
It is possible to effectively suppress the decrease that the variation of the value becomes large. As a result of an experiment using the tuning-fork type quartz vibrating piece 100 of the present embodiment, excellent results were obtained with an average CI value of 40 kΩ and a standard deviation of 4.0 kΩ.

(Second Embodiment) FIG. 7 is a view showing a ceramic package tuning fork type vibrator 200 which is a vibrator according to a second embodiment of the present invention. This ceramic package tuning fork type resonator 200 uses the tuning fork type crystal vibrating piece 100 of the above-described first embodiment. Therefore, the same reference numerals are used for the configuration, operation and the like of the tuning fork type crystal vibrating piece 100, and the description thereof is omitted. Figure 7
3 is a schematic cross-sectional view showing the configuration of a ceramic package tuning fork type vibrator 200. FIG. As shown in FIG. 7, the ceramic package tuning fork type vibrator 200 has a box-shaped package 210 having a space inside.

The package 210 has a base portion 211 at the bottom thereof. The base portion 211 is made of, for example, ceramics such as alumina. A sealing portion 212 is provided on the base portion 211,
The sealing portion 212 is made of the same material as the base portion 211. A lid 213 is placed on the upper end of the sealing portion 212, and the base portion 211, the sealing portion 212, and the lid 213 form a hollow box body. Package 210 formed in this way
A package-side electrode 214 is provided on the base portion 211. The base 11 of the tuning fork type crystal vibrating piece 100 is provided on the package side electrode 214 with a conductive adhesive or the like interposed therebetween.
The mount part 113 of 0 is fixed.

Since this tuning fork type quartz vibrating piece 100 is constructed as shown in FIG. 1, the absolute value of the frequency deviation (pp
m) is within a permissible value of 5 ppm, and is a high-performance tuning-fork type quartz vibrating piece that is excellent in impact resistance against falling or the like. Therefore, the ceramic package tuning fork type vibrator 200 equipped with this resonator element is also a small size and high performance vibrator.

(Third Embodiment) FIG. 8 is a schematic diagram showing a digital mobile phone 300 which is an example of an electronic apparatus according to a third embodiment of the present invention. This digital mobile phone 300 uses the ceramic package tuning fork type resonator 200 and the tuning fork type crystal vibrating piece 100 of the second embodiment. Therefore, the same reference numerals will be used for the configurations and operations of the ceramic package tuning fork type resonator 200 and the tuning fork type crystal vibrating piece 100, and the description thereof will be omitted.

FIG. 8 shows a circuit block of the digital mobile phone 300. As shown in FIG. 8, when transmitting with the digital mobile phone 300, when the user inputs his own voice into the microphone, the signal is transmitted. Will be transmitted from the antenna via the transmitter and antenna switch via the pulse width modulation / encoding block and the modulator / demodulator block.

On the other hand, the signal transmitted from another person's telephone is
The signal is received by the antenna, passes through the antenna switch and the receiving filter, and is input from the receiver to the modulator / demodulator block. Then, the modulated or demodulated signal is output as a voice to the speaker through the pulse width modulation / encoding block. Among these, a controller for controlling an antenna switch, a modulator / demodulator block and the like is provided. In addition to the above, this controller is provided with an LCD that is a display unit, a key that is an input unit for numbers, and the like.
Further, since the RAM and the ROM are also controlled, high precision is required. There is also a demand for miniaturization of the digital mobile phone 300. The ceramic package tuning fork vibrator 200 described above is used to meet such requirements.

This ceramic package tuning fork type vibrator 2
Since 00 has the tuning fork type quartz vibrating piece 100 shown in FIG. 1, the frequency deviation absolute value (ppm) is within the allowable value of 5 ppm, and is a high performance tuning fork type quartz vibrating piece. is there. Therefore, a digital mobile phone 3 equipped with this ceramic package tuning fork type vibrator 200
00 is also a compact and high-performance digital mobile phone.

(Fourth Embodiment) FIG. 9 shows a tuning fork crystal oscillator 40 which is an oscillator according to a fourth embodiment of the present invention.
It is a figure which shows 0. This digital tuning fork crystal oscillator 400
Has a common configuration in many parts with the ceramic package tuning-fork vibrator 200 of the third embodiment. Therefore, the configurations and functions of the ceramic package tuning fork type resonator 200 and the tuning fork type crystal vibrating piece 100 are designated by the same reference numerals, and the description thereof will be omitted.

The tuning fork type crystal oscillator 400 shown in FIG. 9 is provided below the tuning fork type crystal vibrating piece 100 of the ceramic package tuning fork vibrator 200 shown in FIG.
An integrated circuit 410 is arranged as shown in FIG. That is, in the tuning fork crystal oscillator 400, when the tuning fork type crystal vibrating piece 100 arranged therein vibrates, the vibration is input to the integrated circuit 410, and thereafter, a predetermined frequency signal is extracted to function as an oscillator. It will be. That is, since the tuning fork type crystal vibrating piece 100 housed in the tuning fork crystal oscillator 400 is configured as shown in FIG. 1, the absolute value of the frequency deviation (ppm) is within the allowable value 5 ppm, and the resistance against a drop or the like. A high-performance tuning-fork type crystal vibrating piece with excellent impact resistance. Therefore, the digital tuning fork crystal oscillator 400 equipped with this vibrating piece is also a small-sized and high-performance oscillator.

(Fifth Embodiment) FIG. 10 is a view showing a cylinder type tuning fork vibrator 500 which is a vibrator according to a fifth embodiment of the present invention. This cylinder type tuning fork vibrator 500 uses the tuning fork type crystal vibrating piece 100 of the above-described first embodiment. Therefore, the same reference numerals and the like are used for the structure and operation of the tuning fork type crystal vibrating piece 100, and the description thereof is omitted. FIG. 10 is a schematic diagram showing the configuration of the cylinder type tuning fork vibrator 500. As shown in FIG. 10, a cylinder type tuning fork vibrator 500
Has a metal cap 530 for housing the tuning-fork type crystal vibrating piece 100 therein. The cap 530 is press-fitted into the stem 520, and the inside thereof is kept in a vacuum state.

Further, the lead 51 for holding the tuning-fork type crystal vibrating piece 100 of the approximately H shape housed in the cap 530.
Two 0s are arranged. When an electric current or the like is externally applied to the cylinder type tuning fork vibrator 500, the tuning fork arms 121 and 122 of the tuning fork type crystal vibrating piece 100 vibrate and function as a vibrator. At this time, since the tuning-fork type quartz vibrating piece 100 is configured as shown in FIG. 1, the absolute value of the frequency deviation (ppm) is within the allowable value of 5 ppm, and the performance is excellent in impact resistance due to a drop or the like. It is a tuning-fork type crystal vibrating piece. Therefore, the cylinder type tuning fork vibrator 500 equipped with this resonator element is also a small-sized and high-performance vibrator.

Further, the tuning-fork type crystal vibrating piece 100 according to the above-mentioned embodiment is not limited to the above-mentioned example, and other electronic equipment,
It is obvious that the present invention can be applied to a portable information terminal, a television, a video device, a so-called radio-cassette player, a device with a built-in clock such as a personal computer, and a clock. further,
The present invention is not limited to the above embodiment, and various modifications can be made without departing from the scope of the claims.
The configuration of the above embodiment can be partially omitted or changed to any other combination not described above.

[0052]

As described above, according to the present invention,
It is possible to provide a tuning fork type resonator element, a tuning fork type resonator, a tuning fork type oscillator, and an electronic device that have an absolute frequency value within a predetermined range and are excellent in impact resistance.

[Brief description of drawings]

FIG. 1 is a schematic diagram showing a tuning-fork type crystal vibrating piece according to a first embodiment of the present invention.

FIG. 2 is a schematic cross-sectional view taken along line F-F ′ of FIG.

FIG. 3 is a graph showing the relationship between the absolute value of frequency deviation and the thickness D of the tuning fork arm.

FIG. 4 is a schematic explanatory diagram showing a falling direction of a tuning-fork type crystal vibrating piece which is an experiment target.

FIG. 5A is an explanatory diagram for explaining a normal vibration state of the tuning fork type crystal vibrating piece. (B) It is explanatory drawing explaining the vibration state containing the vertical component of a tuning fork type crystal vibrating piece.

FIG. 6 is a vertical vibration component displacement amount (nm) and the tuning fork arm 121,
12 is a graph showing a relationship between width W / thickness D of 122.

FIG. 7 is a schematic cross-sectional view showing a configuration of a ceramic package tuning fork type vibrator according to a second embodiment of the present invention.

FIG. 8 is a schematic diagram showing a circuit block of a digital mobile phone according to a third embodiment of the present invention.

FIG. 9 is a schematic sectional view showing the structure of a tuning fork crystal oscillator according to a fourth embodiment of the present invention.

FIG. 10 is a schematic sectional view showing the structure of a cylinder type tuning fork vibrator according to a fifth embodiment of the present invention.

FIG. 11 is a schematic view showing a conventional tuning-fork type crystal vibrating piece.

[Explanation of symbols]

100 ... Tuning fork type crystal vibrating piece 110 ... Base 112 ... Notch 113 ... Mount section 121, 122 ... Tuning fork arm 121a, 122a ... Groove 123, 124 ... Groove electrode 125, 126 ... Side electrode 127 ... Base electrode L: tuning fork arm length W: width of tuning fork arm D: Thickness of tuning fork arm 200 ... Ceramic package tuning fork vibrator 210 ... Package 211 ... Base part 212 ... Sealing part 213 ... Lid 214 ... Package side electrode 300: Digital mobile phone 400 ... Tuning fork crystal oscillator 410 ... Integrated circuit 500 ... Cylinder type tuning fork vibrator 510 ... Lead 520 ... Stem 530 ... Cap

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Junichiro Sakata             Seiko, 3-3-3 Yamato, Suwa City, Nagano Prefecture             -In Epson Corporation F term (reference) 5J108 BB02 BB03 CC06 CC12 DD05                       EE02 EE07 EE11 FF04 GG03                       GG04 GG06 KK01 KK02 KK03

Claims (6)

[Claims] 1. A tuning-fork type vibrating reed formed of quartz having a frequency characteristic of oscillating at approximately 32.768 kHz, the vibrating arm including a base portion and a plurality of vibrating arm portions protruding from the base portion. A groove portion or a through hole is formed in the front surface portion and / or the back surface portion of each of the plurality of vibrating arm portions, and a cut portion is formed in the base portion, and the length of the vibrating arm portion in the protruding direction is further increased. Is approximately 1162μ
m to approximately 2013 μm, and the length of the vibrating arm portion in the width direction orthogonal to the projecting direction is approximately 50 μm to approximately 150 μm, and in the thickness direction orthogonal to the projecting direction of the vibrating arm portion. A tuning-fork vibrating piece having a length of about 80 μm to about 130 μm. 2. A tuning fork type resonator element, which comprises a base portion and a plurality of vibrating arm portions formed so as to project from the base portion, and is made of crystal having a frequency characteristic that oscillates at approximately 32.768 kHz. A tuning fork type vibrator housed in, wherein a groove portion or a through hole is formed in a front surface portion and / or a back surface portion of each of the plurality of vibrating arm portions of the tuning fork type resonator element, and the base portion, A notch is formed, and the length of the vibrating arm in the protruding direction is approximately 1162μ.
m to approximately 2013 μm, the length of the vibrating arm portion in the width direction orthogonal to the projecting direction is approximately 50 μm to 150 μm, and the thickness direction of the vibrating arm portion orthogonal to the projecting direction. Length is about 8
A tuning fork type vibrator having a thickness of 0 μm to approximately 130 μm. 3. The tuning fork type vibrator according to claim 2, wherein the package is formed in a box shape. 4. The tuning fork type vibrator according to claim 2, wherein the package is formed in a so-called cylinder type. 5. A tuning fork type resonator element and an integrated circuit, each of which includes a base portion and a plurality of vibrating arm portions formed so as to project from the base portion, the tuning fork type vibrating piece formed of quartz having a frequency characteristic of oscillating at approximately 32.768 kHz. Is a tuning fork type oscillator housed in a package, wherein a groove portion or a through hole is formed in a front surface portion and / or a back surface portion of each of the plurality of vibrating arm portions of the tuning fork type vibrating piece, and at the same time, in the base portion. Is formed with a notch, and the length of the vibrating arm portion in the width direction orthogonal to the projecting direction is approximately 50 μm to approximately 150 μm, and is orthogonal to the projecting direction of the vibrating arm portion. A tuning fork type oscillator having a length in the thickness direction of approximately 80 μm to approximately 130 μm. 6. A tuning fork type resonator element, which comprises a base portion and a plurality of vibrating arm portions formed so as to project from the base portion, and is made of crystal having a frequency characteristic that oscillates at approximately 32.768 kHz. Is a tuning fork type vibrator housed in the electronic device, wherein the tuning fork type vibrator is connected to a control unit, wherein the tuning fork type vibrator has a surface portion and / or a surface portion of each of the plurality of vibrating arm portions. A groove or a through hole is formed on the back surface, a notch is formed on the base, and the length of the vibrating arm in the width direction orthogonal to the protruding direction is approximately 50 μm to approximately 150 μm. In addition, the electronic device is characterized in that the length of the vibrating arm portion in the thickness direction orthogonal to the protruding direction is approximately 80 μm to approximately 130 μm.