JP2002309194A - Method of manufacturing label sheet with cleaning function - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method of manufacturing a label sheet with a cleaning function of a substrate processing apparatus which does not like foreign substances, such as a manufacturing apparatus for semiconductors, flat panel displays, printed circuit boards, etc., and an inspection apparatus. . SOLUTION: The cleaning layer is a curable pressure-sensitive adhesive which polymerizes and cures by receiving active energy, and a sheet punching step for forming a label shape is performed after the polymerization-curing reaction of the pressure-sensitive adhesive of the cleaning layer. .

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a label sheet for cleaning various devices, and for example, for cleaning a substrate processing apparatus which does not like foreign substances such as a manufacturing apparatus for semiconductors, flat panel displays, printed circuit boards, and an inspection apparatus. The present invention relates to a method for manufacturing a label sheet with a function.

[0002]

2. Description of the Related Art Various substrate processing apparatuses transport substrates while physically contacting each transport system with a substrate. At that time, if foreign matter is attached to the substrate or the transport system, the subsequent substrate is contaminated one after another, and it is necessary to periodically stop the apparatus and perform a cleaning process. For this reason, there has been a problem that the operation rate is reduced and a large amount of labor is required. In order to solve these problems, a method of cleaning and removing adhered foreign matter in a substrate processing apparatus by transporting a substrate to which an adhesive substance is fixed (for example, Japanese Patent Application Laid-Open No. H10-154686).
Has been proposed.

A method of cleaning and removing adhered foreign matter in a substrate processing apparatus by transporting a substrate to which an adhesive substance is adhered is an effective method for overcoming the above-mentioned problems. However, in this method, the sticky substance and the device contact portion may be so strongly adhered that they cannot be peeled off, and the substrate may not be transported reliably. This problem is particularly remarkable when a vacuum suction mechanism is used for the chuck table of the apparatus.

[Problems to be solved by the invention]

Further, with respect to the above-described method of manufacturing a transport member having a cleaning function, for example, when a cleaning sheet is bonded to a transport member such as a substrate, a cleaning sheet larger than the transport member is used. A method of cutting a cleaning sheet along the member shape after pasting (hereinafter, referred to as a direct cut method) is known, but in such a method, there is a possibility that cutting debris is generated from a cleaning layer or the like when cutting the sheet. May adhere to the cleaning member or the device. In a method of manufacturing a cleaning transport member by bonding a cleaning label sheet that has been punched in advance to the shape of the transport member to the transport member (hereinafter, referred to as a pre-cut method), cutting waste generated during sheet punching is used. Although the generation of the ink is suppressed as compared with the direct cut method, the adhesive of the cleaning layer may protrude from the punched surface at the time of sheet punching, and the adhesive may adhere to the end of the label. May cause trouble. Furthermore, when using a polymerization-curable adhesive as the adhesive, if the sheet is punched and then cured, the adhesive at the end of the label causes poor curing due to polymerization inhibition due to oxygen inhibition. There is a risk of adhesive contamination. In view of such circumstances, the present invention can reliably transport a substrate into a substrate processing apparatus, can easily and reliably remove foreign matter adhering in the apparatus, and furthermore, in a pre-cut method, has poor punching or adhesion when punching a sheet. It is an object of the present invention to provide a method for producing a label sheet with a cleaning function that does not cause curing failure of the agent.

[0005]

Means for Solving the Problems The inventors of the present invention have conducted intensive studies to achieve the above object, and as a result, in a method of manufacturing a label sheet with a cleaning function by a precut method, the cleaning layer receives active energy. A curable pressure-sensitive adhesive that polymerizes and cures, and by performing a sheet punching step after the polymerization-curing reaction of the pressure-sensitive adhesive of the cleaning layer to form a label shape, the above-mentioned problem does not occur, and furthermore, foreign matter is easily and reliably removed. The present inventors have found that a label sheet with a cleaning function that can be easily removed can be manufactured, and the present invention has been completed.

That is, according to the present invention, a cleaning layer made of an adhesive is provided on one side of a support with its surface protected by a release film, and the other side can be peeled off on a separator via a normal adhesive layer. In the method for producing a label sheet with a cleaning function provided in an appropriate state, the cleaning layer is a curable pressure-sensitive adhesive that is polymerized and cured by receiving active energy, and a sheet punching step for forming a label shape is performed on the cleaning layer. A method for producing a label sheet with a cleaning function, which is carried out after the polymerization and curing reaction of the pressure-sensitive adhesive (Claim 1), and the tensile modulus of the cleaning layer at the time of punching the sheet into a label shape (Test method J
2. The method for producing a label sheet with a cleaning function according to claim 1, wherein the cleaning layer comprises a pressure-sensitive adhesive polymer and an unsaturated unsaturated compound in the molecule. 1 heavy bond
2. The method for producing a label sheet with a cleaning function according to claim 1, wherein the adhesive sheet is a curable pressure-sensitive adhesive containing at least one polymerizable unsaturated compound and a polymerization initiator. The method for producing a label sheet with a cleaning function according to claim 3, wherein the hydrophilic polymer is an acrylic polymer containing (meth) acrylic acid and / or an alkyl (meth) acrylate as a main monomer. 4) The method for producing a label sheet with a cleaning function according to claim 3, wherein the polymerization initiator is a photopolymerization initiator, and the cleaning layer is a photocurable pressure-sensitive adhesive layer. Etc.

[0007]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In the method for producing a label sheet with a cleaning function of the present invention, a sheet punching step for forming a label into a curable pressure-sensitive adhesive which polymerizes and cures the cleaning layer by receiving active energy is performed. It is necessary to carry out after the polymerization curing reaction of the pressure-sensitive adhesive of the cleaning layer. If the adhesive constituting the cleaning layer is not polymerized and cured at the time of punching the sheet, the adhesive layer constituting the cleaning layer may protrude from the end of the label or adhere to the punched surface. In addition, the punching depth becomes uneven, or the punching surface becomes rough, and in the worst case, the punching is defective. Further, if the polymerization and curing reaction is performed after the punching of the sheet, the pressure-sensitive adhesive facing the punched portion is inhibited from being polymerized due to oxygen inhibition, thereby causing contamination of the pressure-sensitive adhesive to the substrate processing apparatus.

In the present invention, the tensile elasticity of the cleaning layer (according to the test method JIS K7127) is preferably set to 10 so as not to cause the above-mentioned problem in punching the sheet.
It is desirable that the pressure be not less than MPa, preferably 10 to 2000 MPa. By setting the tensile elastic modulus to be equal to or more than the specific value, it is possible to further suppress sticking out of the adhesive from the cleaning layer at the time of sheet punching and defective punching, and to produce a label sheet with a cleaning function free of adhesive contamination in the precut method. . If the tensile elastic modulus is smaller than 10 MPa, the above problem at the time of punching a sheet and the adhesion to a portion to be cleaned in the apparatus at the time of conveyance may cause a conveyance trouble. On the other hand, if the tensile elastic modulus is too large, there is a possibility that the performance of removing adhering foreign substances on the transport system may be reduced.

In the present invention, the cleaning layer is
A curable pressure-sensitive adhesive that is polymerized and cured by receiving active energy is used. As a result, the cleaning layer has substantially no tackiness, and the cleaning member can be reliably transported without being strongly adhered to the device contact portion when the cleaning member is transported. Examples of such an active energy source include ultraviolet rays and heat, but ultraviolet rays are preferred. The material and the like of the cleaning layer are not particularly limited as long as it has a property of being cured by an active energy source so that the molecular structure becomes a three-dimensional network. For example, an unsaturated double bond is formed between the pressure-sensitive adhesive polymer and the molecule. Curable pressure-sensitive adhesives comprising at least one polymerizable unsaturated compound and a polymerization initiator are preferred.

The pressure-sensitive adhesive polymer is, for example, an acrylic resin having a main monomer of (meth) acrylic acid and / or (meth) acrylic ester selected from acrylic acid, acrylic acid ester, methacrylic acid, and methacrylic acid ester. Polymers. In synthesizing this acrylic polymer, a compound having two or more unsaturated double bonds in the molecule is used as a copolymerization monomer, or a compound having an unsaturated double bond in the molecule is synthesized from the synthesized acrylic polymer. By introducing an unsaturated double bond into the molecule of the acrylic polymer, for example, by chemically bonding through a reaction between functional groups, the polymer itself can be involved in the polymerization curing reaction by active energy. Can also.

The polymerizable unsaturated compound having one or more unsaturated double bonds in the molecule (hereinafter referred to as polymerizable unsaturated compound) is a non-volatile, low-molecular weight compound having a weight average molecular weight of 10,000 or less. It is preferable that it has a molecular weight of 5000 or less so that the three-dimensional network of the pressure-sensitive adhesive layer at the time of curing can be efficiently formed.
Here, the polymerizable unsaturated compound is preferably a non-volatile, low-molecular weight substance having a weight average molecular weight of 10,000 or less, and particularly preferably 5,000 so as to efficiently form a three-dimensional network of the cleaning layer during curing. It preferably has the following molecular weight: Examples of such a polymerizable unsaturated compound include phenoxy polyethylene glycol (meth) acrylate, ε-caprolactone (meth) acrylate, polyethylene glycol di (meth) acrylate, polypropylene glycol di (meth) acrylate, and trimethylolpropane. Tri (meth) acrylate, dipentaerythritol hexa (meth) acrylate, urethane (meth) acrylate, epoxy (meth)
Acrylates, oligoester (meth) acrylates and the like can be mentioned, and one or more of these are used.

The polymerization initiator to be added to the pressure-sensitive adhesive layer is not particularly limited, and any known initiator can be used. For example, when heat is used as an active energy source, benzoyl peroxide, azobisisobutyronitrile, etc. Benzoyl, benzoin ethyl ether, cibenzyl, isopropyl benzoin ether, benzophenone, Michler's ketone chlorothioxanthone, dodecylthioxanthone, dimethylthioxanthone, acetophenone diethyl ketal, benzyl dimethyl ketal, α- Examples thereof include photopolymerization initiators such as droxycyclohexylphenyl ketone, 2-hydroxydimethylphenylpropane, and 2,2-dimethoxy-2-phenylacetophenone.

The cleaning layer is cured by an active energy source and has a reduced adhesive strength, and has a 180 ° peel adhesive strength (measured according to JIS Z0237) to a silicon wafer (mirror surface) of 0.20.
N / 10 mm or less, preferably 0.010 to 0.10 N
It is about / 10 mm. This adhesive strength is 0.20 N /
If it exceeds mm, it may adhere to the part to be cleaned in the apparatus at the time of transport, and may cause transport trouble. The thickness of the cleaning layer is not particularly limited, but is usually 5 to 10
It is about 0 μm.

In the method for producing a label sheet with a cleaning function according to the present invention, a cleaning layer made of the above-mentioned specific adhesive is provided on one side of the support in a state where the surface is protected by a release film, and the other side is usually provided. After the curable pressure-sensitive adhesive serving as the cleaning layer is cured, the cleaning sheet provided in a releasable state on the separator via the pressure-sensitive adhesive layer is punched out of a sheet other than the separator in order to obtain a label shape. At this time, the punching method and processing form are not particularly limited, but after punching according to the shape of the conveying member described later, an unnecessary sheet is peeled and removed to form a label, or a label is formed around the label or at the sheet edge. The label can be formed by peeling and removing unnecessary sheets other than the label portion and the reinforcing portion in a state where the sheet is left as a reinforcing portion at an interval.

In the method for producing a label sheet with a cleaning function according to the present invention, the above-mentioned specific cleaning layer is provided on one side of the support, and the other side can be peeled off on the separator via a normal adhesive layer. A cleaning sheet provided in a state is used. The material of the pressure-sensitive adhesive layer on the other side is not particularly limited as long as it satisfies the pressure-sensitive adhesive function, and a normal pressure-sensitive adhesive (for example, acrylic or rubber-based) can be used. With such a configuration, the label with the cleaning function is peeled from the separator described below, attached to a transport member such as various substrates with a normal pressure-sensitive adhesive layer, transported into the apparatus as a transport member with the cleaning function, and And can be cleaned. Also, in order to reuse the transport member such as the substrate, when peeling the substrate from the pressure-sensitive adhesive layer after cleaning, the adhesive force of the normal pressure-sensitive adhesive layer,
180 ° peel adhesion to a silicon wafer (mirror surface) is 0.20 to 0.98 N / 10 mm, especially 0.1 to 0.98 N / 10 mm.
A thickness of about 40 to 0.98 N / 10 mm is particularly preferable because it can be easily peeled off after cleaning without peeling during transport.

The support for supporting the cleaning layer is not particularly restricted but includes, for example, plastic films such as polyethylene, polyethylene terephthalate, acetylcellulose, polycarbonate, polypropylene, polyimide, polyamide and polycarbodiimide. Its thickness is usually about 10 to 100 μm.

The separator in the present invention is not particularly limited as long as the cleaning label can be peeled off.
For example, polyester, polypropylene, polybutene, polybutadiene, polymethylpentene, and other polyolefins, polyvinyl chloride, and vinyl chloride copolymers that have been release-treated with silicone-based, long-chain alkyl-based, fluorine-based, fatty acid amide-based, silica-based release agents, etc. Coalesce, polyethylene terephthalate, polybutylene terephthalate, polyurethane, ethylene vinyl acetate copolymer, ionomer resin,
Ethylene / (meth) acrylic acid copolymer, ethylene /
(Meth) acrylate copolymer, polystyrene,
Examples include a plastic film made of polycarbonate or the like. The thickness is not particularly limited, but is usually about 10 to 100 μm.

The transport member to which the cleaning label is attached is not particularly limited, but examples include a semiconductor wafer, a flat panel display substrate such as an LCD and a PDP, and a substrate such as a compact disk and an MR head.

Hereinafter, the present invention will be described more specifically with reference to the drawings. FIG. 1 is a plan view showing an example of a label sheet with a cleaning function obtained by the present invention, in which a plurality of cleaning labels A are continuously provided on a long separator 1 at intervals. Such a label A
As shown in FIG. 2 (cross-sectional view taken along the line aa in FIG. 1), a cleaning layer 3 is provided on one surface of the support 2 and a release film 4 is provided on the surface thereof.
A normal pressure-sensitive adhesive layer 5 is provided on the other surface, and is provided in a state where the pressure-sensitive adhesive layer 5 can be peeled off like a separator 1 through the pressure-sensitive adhesive layer 5. Affixed to transfer members such as wafers,
Further, the portion to be cleaned can be cleaned by transporting the release film 4 into the apparatus after peeling.

The shape of the label A is not limited at all, and may be, for example, a circular shape, a wafer shape, a frame shape, or a shape having a protrusion for a chuck portion or the like, depending on the shape of a transfer member such as a substrate to be stuck. And so on.

[0021]

EXAMPLES The present invention will be described below with reference to examples, but the present invention is not limited to these examples. Hereinafter, “parts” means “parts by weight”. Example An acrylic polymer (weight average molecular weight 70) obtained from a monomer mixture consisting of 75 parts of 2-ethylhexyl acrylate, 20 parts of methyl acrylate, and 5 parts of acrylic acid
100,000 parts per 100 parts polyethylene glycol 200
50 parts of dimethacrylate (trade name: Nk ester 4G, manufactured by Shin-Nakamura Chemical Co., Ltd.), 50 parts of urethane acrylate (trade name: UN-01, manufactured by Shin-Nakamura Chemical Co., Ltd.), polyisocyanate compound (Nippon Polyurethane) 3 parts of industrial: trade name: Coronate L) and 3 parts of benzyl dimethyl ketal (manufactured by Ciba Specialty Chemicals: trade name: Irgacure 651) as a photopolymerization initiator are uniformly mixed, and the ultraviolet-curable adhesive solution is mixed. It was adjusted. On the other hand, a normal pressure-sensitive adhesive solution was obtained in the same manner as above except that benzyldimethyl ketal was removed from the pressure-sensitive adhesive.

A long polyester film (thickness: 38 μm, width: 250 m) having one surface treated with a silicone release agent
m), the normal pressure-sensitive adhesive solution is applied so that the thickness after drying becomes 10 μm, and a long polyester film (thickness 25 μm, width 250 mm) is applied on the pressure-sensitive adhesive layer. Laminate, and then, after drying the UV-curable pressure-sensitive adhesive solution on the film, the thickness after drying is 40
μm to provide a pressure-sensitive adhesive layer as a cleaning layer, on one surface of which is treated with a silicone-based release agent, a long polyester film (thickness 38 μm,
The release-treated surface of the release film having a width of 250 mm) was bonded to obtain a sheet.

The sheet was irradiated with an ultraviolet light having a central wavelength of 365 nm and an integrated amount of 1000 mJ / cm ² to obtain a cleaning sheet having an ultraviolet-cured cleaning layer. This adhesive sheet, which is a laminate other than the separator of the cleaning sheet, is cut into sheets by punching out a circular shape having a diameter of 200 mm, and unnecessary adhesive films are continuously peeled and removed. A label sheet for cleaning was produced. The punching of the cleaning sheet could be carried out without any problem, as no stringing of the adhesive or cutting chips was generated. When the label sheet was observed after the production, no sticking-out of the pressure-sensitive adhesive at the end of the label and no contamination of the pressure-sensitive adhesive on the label were observed. After the curing of the cleaning layer of the cleaning sheet by the irradiation of ultraviolet rays, that is, the tensile elastic modulus at the time of punching the sheet was 49 MPa. Here, the tensile modulus was measured according to the test method JIS K7127.

The cleaning label was peeled off from the separator of the obtained label sheet with a cleaning function.
The silicon wafer of the inch was pasted on the back surface (mirror surface) of the silicon wafer with a hand roller to produce a transfer cleaning wafer having a cleaning function. In addition, the 180 degree peeling adhesive force of the normal adhesive layer to the silicon wafer (mirror surface) was 0.25 N / 10 mm.

Using the label sheet with a cleaning function, a label tape sticking machine (trade name: manufactured by Nitto Seiki Co., Ltd.)
(NEL-GR3000) to attach a label to the back surface (mirror surface) of the 8-inch silicon wafer. When this operation was continuously performed for 25 sheets, the sheet could be stuck to the wafer without any problem, and a transfer cleaning wafer with a cleaning function could be manufactured. In addition, a cleaning layer having a width of 10
mm, and the 180 ° peel adhesion to the silicon wafer was measured in accordance with JIS Z0237. The result was 0.078 N / 10 mm.

On the other hand, using a laser type foreign matter measuring device, foreign matter of 0.2 μm or more was measured on the mirror surface of two new 8-inch silicon wafers.
Was individual. After transporting these wafers to a substrate processing apparatus having separate electrostatic suction mechanisms with the mirror surface facing down,
When a foreign substance having a size of 0.2 μm or more was measured by a laser type foreign substance measurement apparatus, the first was 33456 pieces and the second was 36091 pieces in an 8-inch wafer size area.

Next, the release film on the cleaning layer side of the cleaning wafer for transfer obtained above was peeled off, and was transferred into a substrate processing apparatus having a wafer stage to which the above-mentioned 33456 foreign substances had adhered. Was. Thereafter, a new 8-inch silicon wafer was transported with the mirror surface facing downward, and a foreign substance having a size of 0.2 μm or more was measured by a laser type foreign substance measuring apparatus. This operation was performed five times, and the foreign matter removal rate is shown in Table 1.

[0028]

[Table 1]

Comparative Example In the example, the center wavelength of 365 was applied to the cleaning sheet.
A cleaning sheet was prepared in the same manner as in the example, except that the integrated light amount of 1000 mJ / cm ² was not irradiated with ultraviolet light of nm, and a 200 mm diameter circular shape was punched out using the cleaning sheet in the same manner as in the example. The sheet was cut to produce a label sheet with a cleaning function. At this time, since the cleaning layer was not cured, the cleaning layer acted as a cushion material, the punching depth was not uniform, and many label punching defects occurred.
When the prepared label was observed, the pressure-sensitive adhesive protruded from the end of the label, and many contaminations of the pressure-sensitive adhesive were observed on the label due to stringing of the pressure-sensitive adhesive at the time of punching.
In addition, the pressure-sensitive adhesive wrapped around and adhered to the release film particularly on the cleaning layer side at the end of the label. After producing the label, an ultraviolet ray having a central wavelength of 365 nm is irradiated with an integrated light amount of 100 nm.
Irradiation was performed at 0 mJ / cm ² , but the pressure-sensitive adhesive at the edge of the label was not cured due to oxygen inhibition and had adhesiveness. Therefore, the production of the transport cleaning wafer using this label sheet was stopped.

[0030]

As described above, according to the method of manufacturing a label sheet with a cleaning function of the present invention, it is possible to manufacture a label sheet for cleaning free from punching defects and free from adhesive contamination when punching a sheet for forming a label shape. At the same time, there is an effect that a label sheet with a cleaning function can be manufactured which can reliably transport the inside of the substrate processing apparatus and can easily and surely remove foreign matters adhering to the apparatus.

[Brief description of the drawings]

FIG. 1 is a partial plan view showing an example of a label sheet with a cleaning function obtained by the present invention.

FIG. 2 is a sectional view taken along line aa of FIG.

[Explanation of symbols]

1: Separator, A: Label with cleaning function,
2: support, 3: cleaning layer, 4: release film,
5: Normal pressure-sensitive adhesive layer

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) C09J 201/00 C09J 201/00 F term (Reference) 3C060 AA20 BF01 4J004 AA01 AA05 AA10 AA17 AB05 AB07 CA04 CA06 CC02 CC08 DB02 EA05 FA10 GA01 4J040 CA001 DF001 DF011 DF021 HB18 JA09 JB08 JB09 KA13 LA11 NA20 PA23 PA42

Claims (6)

[Claims] 1. A cleaning layer made of an adhesive is provided on one side of a support with its surface protected by a release film, and the other side is peelable on a separator via a normal adhesive layer. In the method for manufacturing a label sheet with a cleaning function provided, the cleaning layer is a curable adhesive that polymerizes and cures by receiving active energy, and a sheet punching step for forming a label is performed on the adhesive of the cleaning layer. A method for producing a label sheet with a cleaning function, which is performed after the polymerization and curing reaction. 2. The tensile elasticity of a cleaning layer when a sheet is punched into a label shape (test method JIS K7127).
2. The method according to claim 1, wherein (a) is 10 MPa or more. 3. The cleaning layer is a curable pressure-sensitive adhesive comprising a pressure-sensitive adhesive polymer, a polymerizable unsaturated compound having at least one unsaturated double bond in a molecule, and a polymerization initiator. The method for producing a label sheet with a cleaning function according to claim 1. 4. The cleaning function according to claim 3, wherein the pressure-sensitive adhesive polymer is an acrylic polymer containing (meth) acrylic acid and / or alkyl (meth) acrylate as a main monomer. Label sheet manufacturing method. 5. The method for producing a label sheet with a cleaning function according to claim 3, wherein the polymerization initiator is a photopolymerization initiator, and the cleaning layer is a photocurable pressure-sensitive adhesive layer. 6. The method for producing a label sheet with a cleaning function according to claim 1, wherein a plurality of cleaning labels are continuously provided on the long separator at intervals. .