JP2002117765A - Method of manufacturing image display device and image display device manufactured using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an aging technique for shortening the aging period. SOLUTION: This technique is characterized by exposing a phosphor layer of a substrate having the phosphor layer formed to plasma and thereafter sticking it to a substrate facing to it.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a method for manufacturing an image display device using a phosphor represented by a plasma display panel (PDP) and an image display device manufactured using the same.

[0002]

2. Description of the Related Art Plasma display panels (PDPs)
Is a flat display panel (FDP) which is relatively easy to enlarge the screen, and a 50-inch class has already been commercialized. In this PDP, two thin glass plates (front panel glass and back panel glass) are opposed to each other via a partition (rib), a phosphor layer is formed between the partitions, and a discharge gas is sealed between the two glass plates. It has a hermetically sealed configuration. A display electrode for generating ultraviolet rays by discharging in a discharge gas is formed on the surface of the front panel glass.

FIG. 7 shows a schematic configuration diagram of a general PDP. The front panel 20 includes a front panel glass 21
Display electrodes 22 and 23 are formed on the display electrodes 22 and 23 so as to form a pair while maintaining a predetermined distance from each other, and a dielectric glass layer 24 and a protective layer 25 are formed thereon.

[0004] The back panel 26 is made of the back panel glass 2.
7, address electrode 28, dielectric glass film 29, partition 3
0, phosphor layers 31, 32, 33 are formed.

The front panel 20 and the back panel 26 are attached to each other, and a discharge gas is sealed therein.

[0006] Ultraviolet light generated at the display electrodes 22 and 23 in each cell is converted into visible light by the phosphor layer and used for light emission display. In a PDP, such cells are arranged in a matrix by a plurality of pairs of display electrodes 22 and 23 and partition walls 30.

[0007]

However, in order to obtain stable discharge characteristics and light emission characteristics in such a PDP, after a panel is formed, discharge is performed for a long time, and discharge characteristics,
An aging step to stabilize the light emission characteristics is necessary,
It is necessary to discharge for about 30 hours for that,
This hindered productivity.

An aging step is necessary because the discharge characteristics and light emission characteristics are not stable, but the phenomenon occurring during aging has not been elucidated. However, it is considered that the aging process is due to the formation of the altered gas by the impurity gas adsorbed on the surface in the PDP production and the heat treatment process.
This is considered to be the time required for the prolonged discharge to strike out the impurity gas and the altered layer from the discharge region and adhere to another region which does not affect the discharge.

It is conceivable to shorten the aging time by increasing the input power. However, the increase in the input power causes an increase in voltage and an abnormal discharge, thereby causing dielectric breakdown of the dielectric material and abnormalities in the phosphor. Discharge traces are generated, resulting in a defective panel.

[0010] Such a problem is considered to become more remarkable when the display has a fine cell structure like a high-vision system and the number of partitions increases, so that the adsorption area increases.

From the above, there are still problems to be solved in order to perform the aging step in a short time.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object of the present invention is to provide a method of manufacturing an image display device capable of shortening the aging time, and an image display device manufactured using the same. It is in.

[0013]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention relates to an image display device manufactured by using a substrate having a phosphor layer formed thereon, wherein the phosphor of the substrate having the phosphor layer formed thereon is provided. After the formation surface is exposed to plasma, the image display device is formed by bonding the substrate to an opposing substrate.

Further, a substrate on which an electrode or the like for generating plasma is formed is opposed to a substrate on which a phosphor layer is formed on the substrate, and plasma is generated by the substrate on which an electrode or the like for generating plasma is formed. The method is characterized in that after the phosphor layer is formed, the phosphor-formed surface of the substrate on which the phosphor layer is formed is exposed to plasma, and then the opposing substrate is bonded to the image display device.

Further, the present invention is characterized in that a laminated image display device is manufactured by using a substrate on which electrodes and the like for generating plasma are formed as a counter substrate.

Further, when exposing the phosphor layer of the substrate on which the phosphor layer is formed to plasma, a gas for generating plasma is supplied.
It is characterized by performing while exhausting.

Further, the method is characterized in that the substrate is exposed to plasma in a plasma generating gas atmosphere containing oxygen.

Further, when the phosphor layer of the substrate on which the phosphor layer is formed is exposed to plasma, a gas analyzer for measuring a component of an atmospheric gas or an exhausted gas is provided.

When exposing the phosphor layer of the substrate on which the phosphor layer is formed to plasma, a gas analyzer for measuring a component of an atmospheric gas or an exhausted gas is used to measure a component containing H ₂ O, OH or carbon. It is characterized in that the spectrum is evaluated and the processing time for exposing to plasma is determined.

Further, after exposing the phosphor-forming surface of the substrate on which the phosphor layer is formed to plasma, at least the phosphor-forming surface of the substrate on which the phosphor layer is formed is exposed to the atmosphere until the substrate is bonded to the opposing substrate. It is characterized by not being exposed.

Further, after exposing the phosphor-forming surface of the substrate on which the phosphor layer is formed to plasma, at least the phosphor-forming surface of the substrate on which the phosphor layer is formed is dry air until the substrate is laminated as an opposing substrate. It is characterized by being stored in an atmosphere or an inert gas atmosphere.

Further, in an image display device manufactured using a substrate on which a phosphor layer is formed, an ultraviolet ray is irradiated on the phosphor-formed surface of the substrate on which the phosphor layer is formed, and then the substrate is bonded to an opposing substrate. An image display device is formed.

[0023] Further, it is characterized in that the phosphor-formed surface of the substrate on which the phosphor layer is formed is irradiated with ultraviolet rays in a reduced pressure atmosphere.

Further, when the phosphor layer of the substrate on which the phosphor layer is formed is irradiated with ultraviolet rays, the irradiation is performed while supplying and exhausting an atmospheric gas.

[0025] Further, the present invention is characterized in that the phosphor-formed surface of the substrate on which the phosphor layer is formed is irradiated with ultraviolet rays in an atmosphere containing oxygen.

[0026] When irradiating the phosphor layer of the substrate on which the phosphor layer is formed with ultraviolet rays, a gas analyzer for measuring a component of an atmospheric gas or an exhausted gas is provided.

When irradiating the phosphor layer of the substrate on which the phosphor layer is formed with ultraviolet rays, a component containing H ₂ O, OH or carbon is measured by a gas analyzer for measuring the components of the atmospheric gas or the exhausted gas. Is characterized by evaluating the spectrum and determining the processing time of exposure to plasma.

In the method and apparatus for manufacturing an image display device according to the present invention, in particular, impurity gas adsorbed on the phosphor layer which is considered to have a large surface area and a large amount of adsorption, and insufficient heat treatment during the formation of the phosphor remain. Since the components such as carbon and the like can be removed before bonding to the opposing substrate, it is not necessary to perform a long-time treatment for knocking out during aging in a later step.

[0029]

DESCRIPTION OF THE PREFERRED EMBODIMENTS (1. First Embodiment) (1-1. Configuration of PDP) FIG. 7 shows an AC surface discharge type plasma display panel 10 according to a first embodiment of the present invention.
FIG. 2 is a partial cross-sectional perspective view showing a main configuration of a PDP (hereinafter simply referred to as “PDP10”). In the figure, the z direction is PDP10
Xy plane corresponds to a plane parallel to the panel surface of PDP 10. The PDP 10 is sized, for example, in accordance with the high-definition specification of the 42-inch class. However, the present invention may, of course, be applied to other sizes and standards.

As shown in FIG. 7, the structure of the PDP 10 is roughly divided into a front panel 20 and a back panel 26 arranged with their main surfaces facing each other.

On a front panel glass 21 of a transparent plate serving as a substrate of the front panel 20, a display electrode 22 (23) (X electrode 2) having a thickness of 4 μm and a width of 95 μm is formed on one surface.
3, a plurality of pairs of Y electrodes 22 are arranged in the x direction with the y direction as the longitudinal direction, and a surface discharge is performed in a gap (80 μm as an example) between each pair of display electrodes 22 and 23.

On the front panel glass 21 on which the display electrodes 22 and 23 are disposed, a dielectric glass layer 24 having a thickness of about 30 μm and a thickness of about 1.
A protective layer 25 of 0 μm is sequentially coated.

A back panel glass 27 serving as a substrate of the back panel 26 has a thickness of 5 μm and a width of 60 μm on one side thereof.
The plurality of address electrodes 28 have the x direction as a longitudinal direction and y
The dielectric glass film 29 having a thickness of 30 μm is coated on the entire surface of the back panel glass 27 so as to include the address electrodes 28 and to be arranged in stripes at regular intervals (about 140 μm) in the direction. A partition 30 having a height of about 150 μm and a width of about 40 μm is disposed on the dielectric glass film 29 in accordance with the gap between the adjacent address electrodes 28, and the side surfaces of the adjacent partition 30 and the dielectric glass film 2 therebetween.
On the surface of No. 9, phosphor layers 31 to 33 corresponding to any of red (R), green (G), and blue (B) are formed. These RGB phosphor layers 31 to 33 are sequentially arranged in the x direction.

The front panel 2 having such a configuration
0 and the back panel 26 are adhered and sealed at the outer peripheral edges of the panels 20 and 26 while the address electrodes 28 and the display electrodes 22 and 23 are opposed to each other so that their longitudinal directions are orthogonal to each other. He, Xe,
A discharge gas (filled gas) composed of a rare gas component such as Ne is applied to a predetermined pressure (conventionally, usually 500 to 760 Torr (6
6.5 to 101.08 kPa)).

A discharge space 34 is formed between the adjacent partition walls 30, and a region where a pair of adjacent display electrodes 22 and 23 and one address electrode 28 intersect with the discharge space 34 interposed therebetween is a cell 34 for image display (see FIG. 3). Here, as an example, the cell pitch in the x direction is 420 μm.
The cell pitch in the m and y directions is 140 μm.

When driving this PDP, one of the address (scanning) electrode 28 and the display electrodes 22 and 23 (this is the X electrode 23 in the present embodiment. In general, this is the X electrode 23.) A pulse is applied to the X electrode 23 as a scan electrode and the Y electrode 22 is referred to as a sustain electrode) to cause a write discharge (address discharge) in each cell.
By applying a pulse between the electrodes 23 and discharging them, ultraviolet rays having a short wavelength (resonance lines having a center wavelength of about 147 nm) are generated, and the phosphor layers 31 to 33 emit light to display an image.

(1-2. Method of Manufacturing PDP of the Present Embodiment) Next, an example of a method of manufacturing the above-described PDP will be described.

(1-2-1. Production of Front Panel) First, a front panel glass 21 made of soda lime glass having a thickness of about 2.6 mm is produced by a float method.
Then, display electrodes 22 and 23 are formed on the glass surface.

First, a metal film having a 3 μm-thickness Cr / Cu / Cr laminated structure is formed on the front panel glass 21 surface. Next, unnecessary portions of the metal film are removed by an etching process, and the photoresist is removed and washed, thereby forming the front panel glass 21 having the display electrodes 22 and 23.

Next, a powdery glass component (for example, a PbO-based glass component) and an organic binder solution (0.2 wt% of a dispersant homogenol and a plasticizer of dibutyl phthalate) were added to the display electrodes 22 and 23 from above. 5 wt%, and a mixture of ethylcellulose and 45 wt%) was added to 55:45
To obtain a paste, which is coated over the entire surface of the front panel glass 21 and baked (520).
C. for 10 minutes) to form a dielectric glass layer 24 having a thickness of about 30 μm.
To form

After the dielectric glass layer 24 has been formed, a protective layer 2 made of magnesium oxide (MgO) is formed on the surface thereof.
5 is formed with a thickness of about 1.0 μm.

Thus, the front panel 20 is manufactured.

(1-2-2. Manufacture of Back Panel) On a surface of a back panel glass 27 made of soda lime glass having a thickness of about 2.6 mm manufactured by a float method, Ag was used as a main component by a screen printing method. The conductive material to be applied is applied in stripes at regular intervals to form address electrodes 28 having a thickness of about 5 μm.

Subsequently, the same paste as that of the dielectric glass layer 24 is applied to a thickness of about 20 μm over the entire surface of the back panel glass 27 on which the address electrodes 28 are formed and baked to form a dielectric glass film 29. .

Next, using the same glass material as the dielectric glass film 29, a height of about 120 μm is provided for each gap (about 140 μm) between the adjacent address electrodes 28 on the dielectric glass film 29.
Is formed. This partition 30 is screen-printed repeatedly with a paste containing the glass material, for example,
After firing, it can be formed.

After the partition 30 is formed, the red (R) phosphor, the green (G) phosphor, and the blue (R) phosphor are applied to the wall surface of the partition 30 and the surface of the dielectric glass film 29 exposed between the adjacent partitions 30. B) A fluorescent ink containing any of the phosphors is applied, and dried and fired to form phosphor layers 31 to 33, respectively.

Here, an example of a general phosphor material is listed below.

Red phosphor; (Y_xGd_1-x) BO_Three: Eu³⁺ Green phosphor; Zn_TwoSiO_Four: Mn blue phosphor; BaMgAl_TenO₁₇: Eu³⁺(Or Ba
MgAl₁₄O_{twenty three}: Eu ³⁺Each phosphor material is, for example, a powder having an average particle size of about 3 μm.
Can be used. There are several methods for applying phosphor ink.
However, here, a very fine
Do not form meniscus (crosslinking due to surface tension) from
Then, a method of discharging phosphor ink is used. This method is
Convenient to apply phosphor ink evenly to target area
It is. Of course, the present invention is limited to this method.
Other methods such as screen printing can be used
Noh.

Thus, the back panel 26 is completed.

Although the front panel glass 21 and the back panel glass 27 are made of soda lime glass, they are described as an example of a material, and other materials may be used.

(1-3. Embodiment 1 and Panelization of PDP) Embodiment 1 of the present invention will be described with reference to FIG.
RF for generating plasma is provided in the vacuum chamber 35.
An electrode 36, an argon gas introduction system 37 for introducing a discharge gas, an oxygen gas introduction system 38, a discharge gas nozzle 39, and a vacuum exhaust system 40 are provided. An RF power supply 41 is connected to the RF electrode 36, and a gas analyzer 42 is connected in the middle of the piping between the vacuum chamber 35 and the vacuum exhaust system 40.

The following processing is performed by the present apparatus. The back panel 26 on which the phosphor layer is formed is placed on the RF electrode 36 which is also used as a substrate holder. After the inside of the vacuum chamber 35 is evacuated to a predetermined degree of vacuum by the evacuation system 40, several percent oxygen is supplied to the argon gas as a discharge gas using the argon gas introduction system 37 and the oxygen gas introduction system 38 in the vacuum chamber 35. The contained gas is supplied from a discharge gas nozzle 39, and at the same time, a vacuum exhaust system 40
Is adjusted to 200 to 600 Torr (26.
6 to 79.8 kPa). In this state, an RF power of 0.7 W / cm ² is applied to the RF electrode 36 from the RF power supply 41 to generate plasma on the back panel 26 and expose the phosphor layer surface to the plasma.

The moisture contained in the phosphor layer is sputtered by being exposed to the plasma, and is released by applying thermal energy. Carbon and the like react with oxygen to become CO and CO ₂ , and release is further promoted.

The gas analyzer 42 provided in the vacuum chamber 35 and the vacuum evacuation system 40 can detect the state of release of the impurities. Thus, in the formation process of the back panel 26, even if the formation conditions and the storage state and storage time after the formation are different, the processing can be performed in a clean state from which moisture, carbon, and the like have been removed.

After performing this process, the front panel 20 and the back panel 26 are bonded together using sealing glass. After that, the inside of the discharge space 34 is made high vacuum (8 × 10 ^−7).
Torr (1064 × 10 ⁻⁷ Pa)), and a predetermined pressure (500 to 760 Torr (66.5 to
101.08 kPa)) and Ne-Xe or He-Ne-
A discharge gas such as a Xe-based or He-Ne-Xe-Ar-based gas is sealed. Thus, the panelization based on the first embodiment is completed.

The result of performing an aging step for stabilizing discharge characteristics and light emission characteristics after gas filling is shown. The aging process is performed, and the change in the all-point lighting voltage (the voltage at which the entire surface of the PDP is lit) is shown in FIG.
Shown in At the same time, data in the case of the conventional manufacturing method is also described. Compared to this result, the conventional method required about 30 hours for stabilization of the discharge characteristics, but stabilized in about 20 hours. The effect of exposing the phosphor layer surface of the substrate on which the phosphor layer was formed to plasma was reduced. You can see that it is playing.

It is preferable that the bonding of the front panel 20 and the back panel 26 after exposure to the plasma of this embodiment is performed in a short time. Furthermore, it is preferable to carry out the treatment without opening to the atmosphere, and it is more desirable to carry out the treatment in dry air or in an inert atmosphere such as nitrogen. FIG. 2 shows the discharge voltage characteristics of the aging process of the substrate laminated with the opposing substrate after storage in dry air using the first embodiment. It can be seen that the discharge voltage characteristic was stabilized in about 16 hours. This makes it possible to produce a panel with a shorter aging time. This is presumed to be because if the treated substrate is left in the state of being released to the atmosphere, adsorption of moisture or the like occurs with time.

In this embodiment, the RF electrode 3
The plasma was generated by using the RF power source 43, the RF coil 44, and the insulating tube 45 as shown in FIG.
Plasma may be generated by the CP method, and the present invention is not limited to this embodiment.

At this time, the processing may be performed while transporting the back panel 26 to the plasma, and the present invention is not limited to this embodiment.

(2. Second Embodiment) Next, a second embodiment of the present invention will be described with reference to FIG. Embodiment 1
In FIG. 3, plasma was processed using a plasma using an RF electrode for generating plasma and a plasma using an ICP method.
As shown in the figure, when manufactured as a product, it has the same configuration as the front panel 20 attached to the back panel 26,
A plasma generating substrate 46 on which electrodes, dielectric layers, and protective layers are formed is used. This substrate may be made of the same process and the same material as the front panel 20.

The back panel 26 on which the phosphor layer is formed is put into a vacuum chamber 35, and is placed facing the plasma generating substrate 45. After the inside of the vacuum chamber 35 is evacuated to a predetermined degree of vacuum by the evacuation system 40, the argon gas introduction system 37 and the oxygen gas introduction system 3 enter the vacuum chamber 35.
8, a gas containing several percent oxygen in an argon gas as a discharge gas is continuously supplied from a discharge gas nozzle 39, and at the same time, the vacuum exhaust system 40 is adjusted to 200 to 600 Torr (26. 6-79.8 kP
a) Set to a predetermined pressure before and after. In this state, a voltage of 10 KHz and 360 V is applied from a plasma generation power supply 47 connected to the plasma generation substrate 46 to generate plasma between the plasma generation substrate 46 and the back panel 26.

The moisture contained in the phosphor layer is sputtered by being exposed to the plasma, and is released by applying thermal energy. Carbon and the like react with oxygen to become CO and CO ₂ , and release is further promoted.

After performing this processing, by bonding the front panel 20 to the opposing front panel 20 to form a panel, it is possible to reduce the processing time in the aging step performed for stabilizing the discharge characteristics and the light emission characteristics in the subsequent steps. .

Although the plasma generating substrate 46 having the same configuration as the front panel 20 is used in the present embodiment, it is more preferable that the front panel 20 for actually bonding the plasma generating substrate 46 to the back panel 26 be used. May be used. Thereby, the front panel 20
Therefore, the aging process can be further shortened when a panel is formed by removing moisture, carbon and the like at the same time.

Note that it is preferable to bond the front panel 20 and the back panel 26 in a short time after exposure to plasma in the same manner as described in the first embodiment.
Furthermore, it is preferable to carry out the treatment without opening to the atmosphere, and it is more desirable to carry out the treatment in dry air or in an inert atmosphere such as nitrogen.

(3. Third Embodiment) Next, a third embodiment of the present invention will be described with reference to FIG. FIG. 5 is a schematic sectional view of the processing step of the present invention.

The vacuum chamber 35 is provided with an argon gas introduction system 37 for introducing a gas, an oxygen gas introduction system 38, a gas nozzle 48, and a vacuum exhaust system 40. A gas analyzer 42 is connected in the middle of the piping between the vacuum chamber 35 and the vacuum exhaust system 40. Also, mainly from 190 to 210
An ultraviolet irradiation lamp 49 for irradiating ultraviolet light of nm is provided.

The following processing is performed by the present apparatus. The manufactured back panel 26 is set in the vacuum chamber 35. After the inside of the vacuum chamber 35 is evacuated to a predetermined degree of vacuum by the evacuation system 40, the vacuum chamber 35
A gas containing several percent oxygen in argon gas as a discharge gas is continuously supplied from a gas nozzle 48 using an argon gas introduction system 37 and an oxygen gas introduction system 38 therein, and at the same time, a vacuum exhaust system 40 is provided. By adjusting
The pressure is set to a predetermined pressure around 700 Torr (79.8 to 93.1 kPa). Turn on the ultraviolet irradiation lamp 49,
The back panel 26 on which the phosphor layer is formed is irradiated with ultraviolet rays. At this time, the back panel 26 is set at 100 ° C.
Heating as described above is preferable for promoting the reaction.

Although the detailed process of the phosphor layer by this treatment is unknown, oxygen molecules are converted into ozone by irradiation of ultraviolet rays, and the adsorbed substances such as carbon in the phosphor layer are removed by CO, CO
It is thought that it was removed as ₂ .

As in the first embodiment, the release state of the impurities can be detected by the gas analyzer 42 provided in the vacuum chamber 35 and the vacuum exhaust system 40. Thus, in the formation process of the back panel 26, even if the formation conditions, the storage state after the formation, and the storage time are different, the processing can be performed in a clean state.

After performing this process, the front panel 20 and the back panel 26 are bonded together using sealing glass. After that, the inside of the discharge space 34 is made high vacuum (8 × 10 ^−7).
Torr (1064 × 10 ⁻⁷ Pa)), and a predetermined pressure (500 to 760 Torr (66.5 to
101.08 kPa)) and Ne-Xe or He-Ne-
A discharge gas such as a Xe-based or He-Ne-Xe-Ar-based gas is sealed. With the above, panelization based on the third embodiment is completed.

By performing this treatment, the time required for stabilization in the aging step for stabilizing the discharge characteristics and the light emission characteristics has been reduced from about 30 hours in the past to about 2 hours.
Stabilized at 0 hours.

As in the first embodiment, it is preferable that the front panel 20 and the back panel 26 be bonded together in a short time after irradiation with ultraviolet rays. Furthermore, it is preferable to carry out the treatment without opening to the atmosphere, and it is more desirable to carry out the treatment in dry air or in an inert atmosphere such as nitrogen. This makes it possible to produce a panel with a shorter aging time. This is presumed to be because if the treated substrate is left in the state of being released to the atmosphere, adsorption of moisture or the like occurs with time.

Further, in this embodiment, 190 to 2
An ultraviolet lamp mainly irradiating a wavelength of 10 nm was used.
An ultraviolet lamp that mainly irradiates a wavelength of 190 to 210 nm is preferable, but an ultraviolet lamp that mainly irradiates a wavelength of 320 to 390 nm is not limited to the present embodiment.

As shown in FIG. 6, the third embodiment in which ultraviolet light is irradiated and the first embodiment in which the substrate is exposed to the plasma are used.
Alternatively, the second embodiment may be used in combination.

[0076]

As is apparent from the above, the aging process of the present invention can be completed in a shorter time than in the prior art.

By applying the above method of manufacturing an image display device, an image display device having excellent productivity can be obtained.

[Brief description of the drawings]

FIG. 1 is a diagram schematically illustrating a processing step according to a first embodiment;

FIG. 2 is a diagram showing a relationship between aging processing time and all-point lighting voltage in a case where a processing step according to the first embodiment is performed and in a conventional case.

FIG. 3 is a diagram schematically illustrating a processing step according to the first embodiment;

FIG. 4 is a view schematically showing a processing step according to a second embodiment.

FIG. 5 is a view schematically showing a processing step according to a third embodiment;

FIG. 6 is a view schematically showing a processing step according to a third embodiment;

FIG. 7 is a partial cross-sectional perspective view showing a main configuration of a PDP.

[Explanation of symbols]

 Reference Signs List 10 AC surface discharge type plasma display panel 20 Front panel 21 Front panel glass 22, 23 Display electrode 24 Dielectric glass layer 25 Protective layer 26 Back panel 27 Back panel glass 28 Address electrode 29 Dielectric glass film 30 Partition wall 31 Phosphor layer ( R) 32 phosphor layer (G) 33 phosphor layer (B) 34 discharge space 35 vacuum chamber 36 RF power supply 37 argon gas introduction system 38 oxygen gas introduction system 39 discharge gas nozzle 40 evacuation system 41 RF power supply 42 gas analysis Device 43 RF power supply 44 RF coil 45 Insulation tube 46 Plasma generation substrate 47 Plasma generation power supply system 48 Gas nozzle 49 Ultraviolet irradiation lamp

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H01J 11/02 H01J 11/02 B (72) Inventor Kazuyuki Hasegawa 1006 Kazuma Kadoma, Kadoma, Osaka Matsushita Electric F-term in Sangyo Co., Ltd. (reference) 5C012 AA09 BE01 5C040 FA01 GG09 MA22 MA26 MA30 5C094 AA43 AA44 BA31 BA32 CA19 DA13 EB02 GB01 GB10 JA01 JA08 5G435 BB06 EE09 KK02 KK05 KK10

Claims (16)

[Claims] In an image display device manufactured using a substrate on which a phosphor layer is formed, a phosphor-formed surface of the substrate on which the phosphor layer is formed is exposed to plasma and then bonded to an opposing substrate. A method for manufacturing an image display device, comprising manufacturing the image display device. 2. A substrate on which an electrode or the like for generating plasma is formed is opposed to a substrate on which a phosphor layer is formed on a substrate, and the substrate on which an electrode or the like for generating plasma is formed by a plasma. After exposing the phosphor-formed surface of the substrate on which the phosphor layer is formed to plasma,
2. The method for manufacturing an image display device according to claim 1, wherein the image display device is manufactured by laminating an opposing substrate. 3. The laminated image display device according to claim 1, wherein a substrate on which the electrodes and the like for generating plasma are formed is used as an opposite substrate.
A manufacturing method of the image display device described in the above. 4. When exposing the phosphor layer of the substrate on which the phosphor layer is formed to plasma, supplying a gas for plasma generation;
The method for manufacturing an image display device according to claim 1, wherein the method is performed while exhausting air. 5. The method for manufacturing an image display device according to claim 1, wherein the substrate is exposed to plasma in a gas atmosphere for generating plasma containing oxygen. 6. The apparatus according to claim 1, further comprising a gas analyzer for measuring a component of an atmospheric gas or an exhausted gas when exposing the phosphor layer of the substrate on which the phosphor layer is formed to plasma. 5. The method for manufacturing an image display device according to any one of 5. 7. When the phosphor layer of the substrate on which the phosphor layer is formed is exposed to plasma, a component containing H ₂ O, OH, or carbon is measured by a gas analyzer that measures a component of an atmospheric gas or an exhausted gas. 7. The method for manufacturing an image display device according to claim 6, wherein a spectrum of the image is evaluated and a processing time for exposing to plasma is determined. 8. After exposing the phosphor-forming surface of the substrate on which the phosphor layer is formed to plasma, at least the phosphor-forming surface of the substrate on which the phosphor layer is formed until the substrate is bonded as an opposing substrate. The method for manufacturing an image display device according to claim 1, wherein the image display device is not exposed to the atmosphere. 9. After exposing the phosphor-forming surface of the substrate on which the phosphor layer is formed to plasma, at least the phosphor-forming surface of the substrate on which the phosphor layer is formed until the substrate is bonded as an opposing substrate. The method according to claim 1, wherein the image display device is stored in a dry air atmosphere or an inert gas atmosphere. 10. An image display device manufactured using a substrate on which a phosphor layer is formed, wherein the phosphor-formed surface of the substrate on which the phosphor layer is formed is irradiated with ultraviolet light, and then the opposite substrate and A method for manufacturing an image display device, comprising forming a laminated image display device. 11. The method according to claim 10, wherein the phosphor-formed surface of the substrate on which the phosphor layer is formed is irradiated with ultraviolet rays in a reduced-pressure atmosphere. 12. The image display according to claim 10, wherein when irradiating the phosphor layer of the substrate on which the phosphor layer is formed, ultraviolet irradiation is performed while supplying and exhausting an atmospheric gas. Device manufacturing method. 13. The method according to claim 10, wherein the phosphor-formed surface of the substrate on which the phosphor layer is formed is irradiated with ultraviolet rays in an atmosphere containing oxygen. 14. A gas analyzer for measuring a component of an atmospheric gas or an exhausted gas when irradiating the phosphor layer of the substrate on which the phosphor layer is formed with ultraviolet rays. 13. The method for manufacturing an image display device according to any one of 10 to 12. 15. When irradiating the phosphor layer of the substrate on which the phosphor layer is formed with ultraviolet rays, the phosphor layer contains H ₂ O, OH, or carbon by a gas analyzer that measures a component of an atmospheric gas or an exhausted gas. The method for manufacturing an image display device according to claim 14, wherein a spectrum of the component is evaluated, and a processing time for exposing to plasma is determined. 16. An image display device manufactured by using the method or the apparatus for manufacturing an image display device according to claim 1. Description: