JP2002075054A - Dielectric porcelain composition - Google Patents
Dielectric porcelain compositionInfo
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Abstract
(57)【要約】
【課題】 特性ばらつき等の小さい積層磁器コンデンサ
を確実に量産することができる誘電体磁器組成物を提供
する。
【解決手段】一般式(CaO)x(Zr1-y・Tiy)O2
(但し、0.95≦x≦1.05、0.01≦y≦0.
10の範囲の数値)で表される基本成分100重量部に
対して、MnCO3を1〜5重量部と、一般式aSiO2
−bLi2O−cY2O3(但し、0.35≦a≦0.4
5、0.35≦b≦0.45、0.1≦c≦0.3の範
囲の数値)、あるいは一般式dSiO2−eB2O3−fY
2O3(但し、0.4≦d≦0.7、0.15≦e≦0.
35、0.1≦f≦0.3の範囲の数値)で表されるガ
ラス成分を0.5〜5重量部含有する。
(57) [Problem] To provide a dielectric ceramic composition capable of reliably mass-producing a laminated ceramic capacitor having small characteristic variations and the like. SOLUTION: The general formula (CaO) x (Zr 1-y .Ti y ) O 2
(However, 0.95 ≦ x ≦ 1.05, 0.01 ≦ y ≦ 0.
The fundamental component 100 parts by weight represented by the 10 value in the range of), and the MnCO 3 1 to 5 parts by weight, the formula a SiO 2
-BLi 2 O-cY 2 O 3 (however, 0.35 ≦ a ≦ 0.4
5, 0.35 ≦ b ≦ 0.45, 0.1 ≦ c ≦ 0.3) or the general formula dSiO 2 -eB 2 O 3 -fY
2 O 3 (provided that 0.4 ≦ d ≦ 0.7, 0.15 ≦ e ≦ 0.
35, a numerical value in the range of 0.1 ≦ f ≦ 0.3) in an amount of 0.5 to 5 parts by weight.
Description
【0001】[0001]
【発明の属する技術分野】本発明は、ニッケル等の卑金
属を内部電極とする積層磁器コンデンサの誘電体として
好適な誘電体磁器組成物に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dielectric ceramic composition suitable as a dielectric for a laminated ceramic capacitor having a base metal such as nickel as an internal electrode.
【0002】[0002]
【従来の技術】従来、積層磁器コンデンサを製造する際
には、誘電体磁器原料粉末から成るグリーンシート(未
焼結磁器シート)に白金又はパラジウム等の貴金属の導
電性ペーストを所望パターンに印刷し、これを複数枚積
み重ねて圧着し、1300℃〜1600℃の酸化性雰囲
気中で焼結させていた。これにより、誘電体磁器と内部
電極とが同時に得られる。上述の如く、貴金属を使用す
れば、酸化性雰囲気中で高温で焼結させても目的とする
内部電極を得ることが出来る。しかし、白金、パラジウ
ム等の貴金属は高価であるため、必然的に積層磁器コン
デンサがコスト高になった。2. Description of the Related Art Conventionally, when manufacturing a laminated ceramic capacitor, a conductive paste of a noble metal such as platinum or palladium is printed in a desired pattern on a green sheet (unsintered ceramic sheet) made of dielectric ceramic raw material powder. A plurality of these were stacked, pressed and sintered in an oxidizing atmosphere at 1300 ° C. to 1600 ° C. Thereby, a dielectric ceramic and an internal electrode are obtained at the same time. As described above, if a noble metal is used, a target internal electrode can be obtained even when sintering at a high temperature in an oxidizing atmosphere. However, since noble metals such as platinum and palladium are expensive, the cost of the multilayer ceramic capacitor is inevitably increased.
【0003】この種の問題を解決するために、CaZr
O3とMnO2とから成る磁器組成物をコンデンサの誘電
体として使用することが、例えば特開昭53−9809
9号公報に開示されている。ここに開示されている誘電
体磁器組成物は還元性雰囲気中で焼成可能であるので、
ニッケル等の卑金属の酸化が生じない。In order to solve this kind of problem, CaZr
The use of a porcelain composition comprising O 3 and MnO 2 as a dielectric for a capacitor is disclosed in, for example, Japanese Patent Application Laid-Open No. 53-9809.
No. 9 discloses this. Since the dielectric ceramic composition disclosed herein can be fired in a reducing atmosphere,
Oxidation of base metals such as nickel does not occur.
【0004】ところで、上記のCaZrO3とMnO2と
から成る誘電体磁器組成物は高温(1350℃〜138
0℃)で焼成しなければならない。このため、グリーン
シートにニッケルを主成分とする導電性ペーストを印刷
して焼成すると、たとえ非酸化性雰囲気中での焼成であ
っても、ニッケル粒子の溶融凝集が生じ、ニッケルが玉
状に分布する。また、高温焼成のためにニッケルが誘電
体磁器中に拡散し、誘電体磁器の絶縁劣化が生じる。こ
の結果、所望の静電容量、及び絶縁抵抗を有する磁器コ
ンデンサを得ることが困難であった。Meanwhile, the above-mentioned dielectric porcelain composition comprising CaZrO 3 and MnO 2 has a high temperature (1350 ° C. to 138 ° C.).
(0 ° C.). For this reason, when a conductive paste containing nickel as a main component is printed on a green sheet and fired, even when firing in a non-oxidizing atmosphere, melting and aggregation of nickel particles occur, and nickel is distributed in a ball shape. I do. In addition, nickel is diffused into the dielectric porcelain due to the high temperature firing, and the dielectric porcelain is deteriorated in insulation. As a result, it has been difficult to obtain a porcelain capacitor having desired capacitance and insulation resistance.
【0005】そこで、CaZrO3とCaTiO3とから
成る基本成分に、Si−Li−アルカリ土類金属で構成
されるガラス成分(焼結助剤)を添加した非還元性温度
補償用誘電体磁器組成物が特公平5−52604に、S
i−B−アルカリ土類金属で構成されるガラス成分(焼
結助剤)を添加した非還元性温度補償用誘電体磁器組成
物が特公平5−52603に開示されている。[0005] Therefore, a non-reducing temperature-compensating dielectric porcelain composition in which a glass component (sintering aid) composed of Si-Li-alkaline earth metal is added to a basic component composed of CaZrO 3 and CaTiO 3. The thing is S-5-52604, S
Japanese Patent Publication No. 5-52603 discloses a non-reducing temperature-compensating dielectric ceramic composition to which a glass component (sintering aid) composed of i-B-alkaline earth metal is added.
【0006】上記発明の誘電体磁器組成物は、非酸化性
雰囲気、且つ1100〜1300℃の焼成で得られるの
で、ニッケル等の卑金属を内部電極とする温度補償用積
層磁器コンデンサの誘電体として好適なものである。Since the dielectric ceramic composition of the present invention can be obtained by firing at 1100 to 1300 ° C. in a non-oxidizing atmosphere, it is suitable as a dielectric for a temperature-compensating laminated ceramic capacitor having a base metal such as nickel as an internal electrode. It is something.
【0007】[0007]
【発明が解決しようとする課題】しかし、上記誘電体磁
器組成物によれば、低融点元素であるLi、Bの蒸発が
著しく、更に詳しく説明すると、中性雰囲気状況下での
800℃以上の温度域になるとLi、Bが蒸発し始め、
遂には磁器の焼結開始温度である1000℃〜1100
℃近傍の温度域になると、Li、B元素が大幅に減少し
たガラス組成となることにより、結果的に磁器の焼結不
足を引き起こし、特性ばらつきが大きくなるという問題
点があった。この問題は、特にEIA規格における32
16型以下の小型の積層磁器コンデンサにおいて顕著で
あった。However, according to the above-mentioned dielectric porcelain composition, Li and B, which are low-melting elements, are remarkably evaporated. In the temperature range, Li and B begin to evaporate,
Finally, the sintering start temperature of porcelain is 1000 ° C. to 1100
When the temperature is in the vicinity of ° C., there is a problem that the glass composition has a greatly reduced amount of Li and B elements, resulting in insufficient sintering of the porcelain and large variations in characteristics. This problem is especially noticeable in the EIA standard.
This was remarkable in small-sized laminated ceramic capacitors of type 16 or less.
【0008】本発明は上記の事情に鑑みてなされたもの
であり、その目的は、1100℃〜1300℃の還元性
雰囲気中でも安定な焼成が可能で、特性ばらつきが小さ
い誘電体磁器組成物を提供することである。The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a dielectric ceramic composition which can be stably fired even in a reducing atmosphere at 1100 ° C. to 1300 ° C. and has small characteristic variations. It is to be.
【0009】[0009]
【課題を解決するための手段】本発明の誘電体磁器組成
物は、一般式(CaO)x(Zr1-y・Tiy)O2(但
し、0.95≦x≦1.05、0.01≦y≦0.10
の範囲の数値)で表される基本成分100重量部に対し
て、MnCO3を1〜5重量部と、ガラス成分を0.5
〜5重量部含有する。The dielectric ceramic composition of the present invention has the general formula (CaO) x (Zr 1 -y · Ti y ) O 2 (where 0.95 ≦ x ≦ 1.05, 0 .01 ≦ y ≦ 0.10
And MnCO 3 in an amount of 1 to 5 parts by weight and a glass component in an amount of 0.5 to 100 parts by weight of the basic component represented by
-5 parts by weight.
【0010】即ち、基本成分のxが0.95未満ではQ
値が著しく低下し、1.05を越える場合は、1100
〜1300℃で十分に焼結しない。また、yが0.01
未満では誘電率が25以下となり目標を満足しなくな
る。更に、yが0.10を越える場合でも誘電率の温度
特性の絶対値が30ppmより大きくなる。That is, if x of the basic component is less than 0.95, Q
If the value is significantly reduced and exceeds 1.05, 1100
Not sufficiently sintered at 11300 ° C. Also, if y is 0.01
If it is less than 25, the dielectric constant becomes 25 or less, and the target is not satisfied. Further, even when y exceeds 0.10, the absolute value of the temperature characteristic of the dielectric constant becomes larger than 30 ppm.
【0011】そして、本発明のガラス成分は、その組成
を一般式(1) aSiO2−bLi2O−cY2O3 (式中、a+b+c=1) (1) で表した時、a,b,c値が図1の三角ダイヤグラムに
おいて、座標A,B,C,D(但し、線上も含む)で結
ばれる領域の内部に位置する組成から構成される。When the composition of the glass component of the present invention is represented by the general formula (1) aSiO 2 -bLi 2 O-cY 2 O 3 (where a + b + c = 1) (1) , C values in the triangular diagram of FIG. 1 are composed of compositions located inside a region connected by coordinates A, B, C, and D (including a line).
【0012】即ち、ガラスのaが0.35未満では十分
に焼結しない。更に、0.45を超えると、Q値が著し
く低下する。また、bが0.35未満となると十分に焼
結しない。更に0.45を超えるとQ値が著しく低下す
る。更に、cが0.1未満では容量値バラツキ(CV
値)が大きくなり、0.3を超えると、1100〜13
00℃で十分に焼結しない。That is, if the value of a of the glass is less than 0.35, the glass cannot be sufficiently sintered. Further, when it exceeds 0.45, the Q value is significantly reduced. On the other hand, if b is less than 0.35, sintering will not be sufficient. Further, when it exceeds 0.45, the Q value is significantly reduced. Further, when c is less than 0.1, the capacitance value variation (CV
Value) is greater than 0.3 and 1100 to 13
Does not sinter sufficiently at 00 ° C.
【0013】あるいは、本発明のガラス成分は、その組
成を一般式(2) dSiO2−eB2O3−fY2O3 (式中、d+e+f=1) (2) で表した時、d,e,f値が図2の三角ダイヤグラムに
おいて、座標E,F,G,H,I,J(但し、線上も含
む)で結ばれる領域の内部に位置する組成から構成され
る。Alternatively, when the composition of the glass component of the present invention is represented by the general formula (2) dSiO 2 -eB 2 O 3 -fY 2 O 3 (where d + e + f = 1), In the triangular diagram of FIG. 2, the e and f values are composed of compositions located inside a region connected by coordinates E, F, G, H, I, and J (including a line).
【0014】即ち、ガラスのdが0.4未満では十分に
焼結しない。更に、0.70を超えると、Q値が著しく
低下する。また、eが0.15未満となると十分に焼結
しない。更に0.35を超えるとQ値が著しく低下す
る。更に、fが0.1未満では容量値バラツキ(CV
値)が大きくなり、0.3を超えると、1100〜13
00℃で十分に焼結しない。That is, if d of the glass is less than 0.4, the glass is not sufficiently sintered. Further, when it exceeds 0.70, the Q value is significantly reduced. On the other hand, if e is less than 0.15, sintering is not sufficient. Further, when it exceeds 0.35, the Q value is remarkably reduced. Further, when f is less than 0.1, the capacitance value variation (CV
Value) is greater than 0.3 and 1100 to 13
Does not sinter sufficiently at 00 ° C.
【0015】また、最も望ましい範囲は 0.98≦X≦1.00 0.02≦y≦0.03 2.0≦z≦4.0 0.38≦a≦0.42 0.38≦b≦0.42 0.18≦c≦0.22 0.50≦d≦0.60 0.20≦e≦0.30 0.15≦f≦0.25 の範囲である。The most desirable range is 0.98 ≦ X ≦ 1.00 0.02 ≦ y ≦ 0.03 2.0 ≦ z ≦ 4.0 0.38 ≦ a ≦ 0.42 0.38 ≦ b ≦ 0.42 0.18 ≦ c ≦ 0.22 0.50 ≦ d ≦ 0.60 0.20 ≦ e ≦ 0.30 0.15 ≦ f ≦ 0.25
【作用】本発明による誘電体磁器組成物では、CaZr
O3とCaTiO3とから成る基本成分に、Si−Li−
YあるいはSi−B−Yで構成されるガラス成分(焼結
助剤)を添加することにより、LiあるいはBの減少が
抑えられ、焼成が十分に行われるため、中性又は還元性
雰囲気中での焼成時に、容量バラツキの低減を図ること
が可能であり、更には、静電容量Cap、温度特性T
C、Q値、比抵抗ρなどについても十分に満足なものと
なる。In the dielectric porcelain composition according to the present invention, CaZr
The basic components consisting of O 3 and CaTiO 3 include Si—Li—
By adding a glass component (sintering aid) composed of Y or Si-BY, the reduction of Li or B is suppressed, and sintering is sufficiently performed. Therefore, in a neutral or reducing atmosphere, During firing, it is possible to reduce the variation in capacitance, and further, the capacitance Cap and the temperature characteristic T
The C value, the Q value, the specific resistance ρ, etc. are also sufficiently satisfied.
【0016】従って、本発明における誘電体磁器組成物
を応用することにより、品質的に極めて安定で、且つ静
電容量Cap、温度特性TC、Q値、比抵抗ρなどにつ
いても十分満足させる温度補償用積層磁器コンデンサを
提供することが可能になる。Therefore, by applying the dielectric porcelain composition of the present invention, the temperature compensation which is extremely stable in quality and sufficiently satisfies the capacitance Cap, the temperature characteristic TC, the Q value, the specific resistance ρ, etc. It is possible to provide a laminated ceramic capacitor for use.
【0017】[0017]
【実施例】次に、本発明の実施例(比較例も含む)につ
いて説明する。Next, examples (including comparative examples) of the present invention will be described.
【0018】炭酸カルシウム(CaCO3)、二酸化チ
タン(TiO2)、酸化ジルコニウム(ZrO2)、炭酸
マンガン(MnCO3)を出発原料として用意し、表
1、2に示すような比率になるようにそれぞれ秤量し
た。なお、この秤量において、不純物は目方に入れない
で秤量した。次に、これらの秤量された原料をポットミ
ルに入れ、更にアルミナボールと水2.5リットルとを
入れ、15時間湿式撹拌した後、撹拌物をステンレスバ
ットに入れて熱風式乾燥機で150℃×4時間乾燥し
た。次にこの乾燥物を粗粉砕し、この粗粉砕物をトンネ
ル炉にて大気中で1300℃×2時間の焼成を行い、表
1、2に示す組成式の平均粒径1μm程度の基本成分を
得た。Calcium carbonate (CaCO 3 ), titanium dioxide (TiO 2 ), zirconium oxide (ZrO 2 ), and manganese carbonate (MnCO 3 ) are prepared as starting materials so that the ratios are as shown in Tables 1 and 2. Each was weighed. In addition, in this weighing, impurities were weighed without putting them in the eye. Next, these weighed raw materials were put into a pot mill, and further, alumina balls and 2.5 liters of water were put therein. After wet stirring for 15 hours, the stirred product was put in a stainless steel vat and heated at 150 ° C. with a hot-air dryer. Dried for 4 hours. Next, the dried product is coarsely pulverized, and the coarsely pulverized product is baked in a tunnel furnace at 1300 ° C. for 2 hours in the air. Obtained.
【0019】一方、ガラス成分を得るために、二酸化珪
素(SiO2)、炭酸リチウム(Li2CO3)又は酸化
硼素(B2O3)、酸化イットリウム(Y2O3)を適宜秤
量し、これに水を300cc加え、ポリエチレンポット
にてアルミナボールを用いて10時間撹拌した後、大気
中1300℃で2時間仮焼成し、これを300ccの水
と共にアルミナポットに入れ、アルミナボールで15時
間粉砕し、しかる後、150℃で4時間乾燥させて、表
1、2に示す平均粒径1μm程度のガラス成分の粉末を
得た。表1は炭酸リチウム、表2は酸化硼素で実験を行
った。On the other hand, in order to obtain a glass component, silicon dioxide (SiO 2 ), lithium carbonate (Li 2 CO 3 ) or boron oxide (B 2 O 3 ), and yttrium oxide (Y 2 O 3 ) are appropriately weighed. 300 cc of water was added thereto, and the mixture was stirred for 10 hours using an alumina ball in a polyethylene pot, and then temporarily calcined at 1300 ° C. in the atmosphere for 2 hours. This was put into an alumina pot together with 300 cc of water, and ground for 15 hours with an alumina ball. Thereafter, the glass component was dried at 150 ° C. for 4 hours to obtain a glass component powder having an average particle diameter of about 1 μm shown in Tables 1 and 2. Table 1 shows an experiment with lithium carbonate, and Table 2 shows an experiment with boron oxide.
【0020】次に、上記基本成分の粉末にガラス成分の
粉末を加え、更に、アクリル酸エステルポリマー、グリ
セリン、縮合リン酸塩の水溶液から成る有機バインダを
基本成分と添加成分との合計重量に対して15重量%添
加し、更に50重量%の水を加え、これらをボールミル
に入れて約20時間粉砕及び混合して磁器原料のスラリ
ーを作製した。Next, a glass component powder is added to the above basic component powder, and an organic binder composed of an aqueous solution of an acrylate polymer, glycerin and a condensed phosphate is added to the total weight of the basic component and the additional component. 15% by weight, and 50% by weight of water were further added. These were put in a ball mill and ground and mixed for about 20 hours to prepare a slurry of porcelain raw material.
【0021】次に、上記スラリーを真空脱泡機に入れて
脱泡し、このスラリーをリバースロールコーターに入
れ、これを使用してポリエステルフイルム上にスラリー
に基づく薄膜を形成し、この薄膜をフイルム上で100
℃に加熱して乾燥させ、厚さ約25μmのグリーンシー
トを得た。このシートは、長尺なものであるが、これを
10cm角の正方形に打ち抜いて使用した。Next, the slurry is placed in a vacuum defoaming machine to remove bubbles. The slurry is placed in a reverse roll coater, and a thin film based on the slurry is formed on a polyester film using the slurry. Above 100
It was dried by heating to ℃ to obtain a green sheet having a thickness of about 25 μm. This sheet is a long sheet, and was used by punching it into a 10 cm square.
【0022】一方、内部電極用の導電ペーストは、粒径
平均1.5μmのニッケル粉末10gと、エチルセルロ
ーズ0.9gをブチルカルビトール9.1gに溶解させ
たものとを撹拌機に入れ、10時間撹拌することにより
得た。この導電ペーストを長さ14mm、幅7mmのパ
ターンを50個有するスクリーンを介して上記グリーン
シートの片面に印刷した後、これを乾燥させた。On the other hand, as the conductive paste for the internal electrode, 10 g of nickel powder having an average particle size of 1.5 μm and 0.9 g of ethyl cellulose dissolved in 9.1 g of butyl carbitol were put into a stirrer. Obtained by stirring for hours. This conductive paste was printed on one surface of the green sheet through a screen having 50 patterns having a length of 14 mm and a width of 7 mm, and then dried.
【0023】次に、上記印刷面を上にしてグリーンシー
トを2枚積層した。この際、隣接する上下のシートにお
いて、その印刷面がパターンの長手方向に約半分程ずれ
るように配置した。更に、この積層物の上下両面にそれ
ぞれ4枚ずつ厚さ60μmのグリーンシートを積層し
た。次いで、この積層物を約50℃の温度で厚さ方向に
約40トンの圧力を加えて圧着させた。しかる後、この
積層物を格子状に裁断し、約100個の積層チップを得
た。Next, two green sheets were laminated with the printing surface facing upward. At this time, the printing surfaces of the adjacent upper and lower sheets were arranged such that their printing surfaces were shifted by about half in the longitudinal direction of the pattern. Further, four green sheets each having a thickness of 60 μm were laminated on each of the upper and lower surfaces of the laminate. Next, the laminate was pressed at a temperature of about 50 ° C. by applying a pressure of about 40 tons in the thickness direction. Thereafter, this laminate was cut into a lattice to obtain about 100 laminated chips.
【0024】次に、この積層体チップを雰囲気焼成が可
能な炉に入れ、大気雰囲気中で100℃/hの速度で3
00℃まで昇温して、有機バインダを燃焼させた。しか
る後、炉の雰囲気を大気からH22体積%+N298体積
%の雰囲気に変えた。そして、炉を上述の如き還元性雰
囲気とした状態を保って、積層体チップの加熱温度を6
00℃から焼結温度まで100℃/hの速度で昇温して
1100〜1300℃(最高温度)×3時間保持した
後、100℃/hの速度で600℃まで降温し、雰囲気
を大気雰囲気(酸化性雰囲気)におきかえて、600℃
を30分間保持して酸化処理を行い、その後、室温まで
冷却して焼結体チップを作製した。Next, the laminated chip is placed in a furnace capable of firing in an atmosphere, and is heated at a rate of 100 ° C./h in an air atmosphere.
The temperature was raised to 00 ° C. to burn the organic binder. Thereafter, the atmosphere of the furnace was changed from the atmosphere to an atmosphere of 2 % by volume of H 2 + 98% by volume of N 2 . Then, while maintaining the furnace in the reducing atmosphere as described above, the heating temperature of the laminated chip was set at 6 ° C.
After the temperature was raised from 00 ° C to the sintering temperature at a rate of 100 ° C / h and held at 1100 to 1300 ° C (maximum temperature) x 3 hours, the temperature was lowered to 600 ° C at a rate of 100 ° C / h, and the atmosphere was air atmosphere. 600 ° C in place of (oxidizing atmosphere)
For 30 minutes to perform an oxidation treatment, and then cooled to room temperature to produce a sintered body chip.
【0025】次に、電極が露出する焼結体チップの側面
にCuとガラスフリットとビヒクルとから成る導電性ペ
ーストを塗布して乾燥し、これを大気中で800〜90
0℃の温度で15分間焼付け、Cu電極層を形成し、更
にこの上に銅を無電解メッキで被着させて、更にこの上
に電気メッキ法でSn半田層を設けて、一対の外部電極
を形成した。Next, a conductive paste composed of Cu, glass frit and vehicle is applied to the side surface of the sintered body chip where the electrodes are exposed, and dried, and this is dried in air at 800 to 90 mm.
Baking at a temperature of 0 ° C. for 15 minutes to form a Cu electrode layer, further depositing copper thereon by electroless plating, and further providing an Sn solder layer thereon by electroplating to form a pair of external electrodes. Was formed.
【0026】これにより、誘電体磁器層、内部電極と、
外部電極から成る積層磁器コンデンサが得られた。な
お、このコンデンサの寸法は2.0mm×1.25mm
であり、積層仕様は15μm×40層である。また、焼
結後の磁器層の組成は、焼結前の基本成分と添加成分と
の混合組成と実質的に同じである。Thus, the dielectric ceramic layer, the internal electrode,
A multilayer ceramic capacitor composed of external electrodes was obtained. The dimensions of this capacitor are 2.0 mm × 1.25 mm
And the lamination specification is 15 μm × 40 layers. The composition of the porcelain layer after sintering is substantially the same as the mixed composition of the basic component and the additive component before sintering.
【0027】次に、完成した積層磁器コンデンサの静電
容量Cap、容量ばらつきCV、比誘電率εs、温度係
数TC、Q値、比抵抗ρを測定した。Next, the capacitance Cap, the capacitance variation CV, the relative permittivity εs, the temperature coefficient TC, the Q value, and the specific resistance ρ of the completed laminated ceramic capacitor were measured.
【0028】なお、上記電気的特性は次の要領で測定し
た。 (1)比誘電率εsは、温度25℃、周波数1MHz、
交流電圧〔実効値〕0.5Vの条件で静電容量を測定
し、この測定値と一対の内部電極の対向面積25mm2
と磁器層の厚さ0.05mmから計算で求めた。静電容
量Capも同様の方法で求めた。 (2)静電容量の容量値バラツキCV(%)は次の計算
式で算出した。The above electric characteristics were measured in the following manner. (1) The relative dielectric constant εs is as follows: temperature 25 ° C., frequency 1 MHz,
The capacitance was measured under the condition of an AC voltage (effective value) of 0.5 V, and the measured value and the facing area of the pair of internal electrodes were 25 mm 2.
From the thickness of the porcelain layer and 0.05 mm. The capacitance Cap was determined in the same manner. (2) The capacitance value variation CV (%) of the capacitance was calculated by the following formula.
【0029】[0029]
【数1】 (Equation 1)
【0030】(3)温度係数(TC)は、85℃の静電
容量(C85)と25℃の静電容量(C 25)とを測定し、
下記計算式で算出した。(3) Temperature coefficient (TC) is 85 ° C.
Capacity (C85) And 25 ° C. capacitance (C twenty five) And measure
It was calculated by the following formula.
【0031】[0031]
【数2】 (Equation 2)
【0032】(3)Q値は温度25℃において、周波数
1MHz、電圧〔実効値]0.5Vの交流でQメータに
より測定した。 (4)抵抗率ρ(MΩ・cm)は、温度25℃において
DC50Vを1分間印加した後に一対の外部電極間の抵
抗値を測定し、この測定値と寸法とに基づいて計算で求
めた。(3) The Q value was measured by a Q meter at a temperature of 25 ° C. and an alternating current of 1 MHz and a voltage [effective value] of 0.5 V. (4) The resistivity ρ (MΩ · cm) was obtained by measuring the resistance value between a pair of external electrodes after applying DC 50 V for 1 minute at a temperature of 25 ° C. and calculating the resistance value based on the measured value and the dimensions.
【0033】まず、SiO2−Li2O−Y2O3系ガラス
についての結果を表1に示す。First, the results of the SiO 2 —Li 2 O—Y 2 O 3 system glass are shown in Table 1.
【0034】[0034]
【表1】 [Table 1]
【0035】表1から明らかな如く、本発明に従う試料
(試料No.2〜5、8〜11、14〜17、20〜2
1、24〜25、28〜29)では、静電容量Capが
950〜1050pF、容量ばらつきCV値が2.0%
以下、比誘電率εsが30〜66、誘電率の温度係数T
Cが±30ppm以内、Q値が5000以上、比抵抗ρ
が1×109MΩ・cm以上となり、所望の特性の温度
補償用コンデンサを得ることができた。これに対し、x
が0.90の場合(試料No.1)は、Q値が1100
と著しく低下した。また、xが1.10の場合(試料N
o.6)は、Q値が2300、比抵抗ρが5.21×1
07MΩ・cmとなり、焼結不十分だった。As is clear from Table 1, the samples according to the present invention (Sample Nos. 2 to 5, 8 to 11, 14 to 17, 20 to 2)
1, 24-25, 28-29), the capacitance Cap is 950-1050 pF, and the capacitance variation CV value is 2.0%.
Hereinafter, the relative permittivity εs is 30 to 66, and the temperature coefficient T of the permittivity is
C is within ± 30 ppm, Q value is 5,000 or more, resistivity ρ
Was 1 × 10 9 MΩ · cm or more, and a capacitor for temperature compensation having desired characteristics could be obtained. In contrast, x
Is 0.90 (Sample No. 1), the Q value is 1100
And decreased significantly. When x is 1.10 (sample N
o. 6) has a Q value of 2300 and a specific resistance ρ of 5.21 × 1
It became 0 7 MΩ · cm, and sintering was insufficient.
【0036】また、yが0の場合(試料No.7)は、
静電容量Capが885、比誘電率εsが25となっ
た。更にyが0.15の場合(試料No.12)は、静
電容量Capが1320、誘電率の温度特性の絶対値が
60ppmとなった。When y is 0 (sample No. 7),
The capacitance Cap was 885 and the relative dielectric constant εs was 25. Further, when y was 0.15 (Sample No. 12), the capacitance Cap was 1320, and the absolute value of the temperature characteristic of the dielectric constant was 60 ppm.
【0037】zが0.99の場合(試料No.13)
は、Q値が1100と著しく低下した。更に5.5重量
部の場合(試料No.18)においても、Q値が139
0と著しく低下した。When z is 0.99 (Sample No. 13)
The Q value was remarkably reduced to 1100. Further, even in the case of 5.5 parts by weight (Sample No. 18), the Q value is 139.
It decreased significantly to 0.
【0038】また、aが0.3の場合(試料No.1
9)は、Q値が4200、比抵抗ρが3.53×107
MΩ・cmとなり、焼結不十分だった。更に、aが0.
5の場合(試料No.22)は、Q値が1600と著し
く低下した。When a is 0.3 (sample No. 1)
9) has a Q value of 4200 and a specific resistance ρ of 3.53 × 10 7
MΩ · cm, and sintering was insufficient. Furthermore, when a is 0.
In the case of Sample No. 5 (Sample No. 22), the Q value was remarkably reduced to 1600.
【0039】また、bが0.3の場合(試料No.2
3)は、Q値が4600、比抵抗ρが2.53×107
MΩ・cmとなり、焼結不十分だった。更に、bが0.
5の場合(試料No.25)は、Q値が1950と著し
く低下した。When b is 0.3 (sample No. 2)
3) has a Q value of 4600 and a specific resistance ρ of 2.53 × 10 7
MΩ · cm, and sintering was insufficient. Further, when b is 0.
In the case of Sample No. 5 (Sample No. 25), the Q value was remarkably reduced to 1950.
【0040】また、cが0.05の場合(試料No.2
6)は、容量値バラツキCV値が4.21と大きくなっ
た。更に、0.35の場合(試料No.30)は、Q値
が4500、比抵抗ρが2.53×107MΩ・cmと
なり、焼結不十分だった。When c is 0.05 (sample No. 2)
In 6), the capacitance value variation CV value was as large as 4.21. Further, in the case of 0.35 (sample No. 30), the Q value was 4500, the specific resistance ρ was 2.53 × 10 7 MΩ · cm, and the sintering was insufficient.
【0041】また、ICP定量分析により、本発明の誘
電体磁器組成物は、従来に比べて、Liの割合の変動が
小さいことが確認できた。Further, it was confirmed by ICP quantitative analysis that the dielectric ceramic composition of the present invention had a smaller variation in Li ratio than the conventional one.
【0042】次に、SiO2−B2O3−Y2O3系ガラス
についての結果を表2に示す。Next, the results of the SiO 2 —B 2 O 3 —Y 2 O 3 glass are shown in Table 2.
【0043】[0043]
【表2】 [Table 2]
【0044】表2から明らかな如く、本発明に従う試料
(試料No.32〜33、36〜37、40〜41)で
は、静電容量Capが950〜1050pF、容量ばら
つきCV値が2.0%以下、比誘電率εsが30〜6
6、誘電率の温度係数TCが±30ppm以内、Q値が
5000以上、比抵抗ρが1×109MΩ・cm以上と
なり、所望の特性の温度補償用コンデンサを得ることが
できた。As is clear from Table 2, in the samples according to the present invention (Sample Nos. 32-33, 36-37, 40-41), the capacitance Cap is 950-1050 pF, and the capacitance variation CV value is 2.0%. Hereinafter, the relative dielectric constant εs is 30 to 6
6. The temperature coefficient TC of the dielectric constant was within ± 30 ppm, the Q value was 5,000 or more, and the specific resistance ρ was 1 × 10 9 MΩ · cm or more, and a capacitor for temperature compensation having desired characteristics could be obtained.
【0045】これに対し、dが0.35の場合(試料N
o.31)は、Q値が4000、比抵抗ρが3.66×
107MΩ・cmとなり、焼結不十分だった。更に、d
が0.75の場合(試料No.34)は、Q値が160
0と著しく低下した。On the other hand, when d is 0.35 (sample N
o. 31) has a Q value of 4000 and a specific resistance ρ of 3.66 ×
It was 10 7 MΩ · cm, and sintering was insufficient. Furthermore, d
Is 0.75 (Sample No. 34), the Q value is 160
It decreased significantly to 0.
【0046】また、eが0.1の場合(試料No.3
5)は、Q値が4200、比抵抗ρが2.61×107
MΩ・cmとなり、焼結不十分だった。更に、eが0.
4の場合(試料No.38)は、Q値が2010と著し
く低下した。When e is 0.1 (Sample No. 3)
5) has a Q value of 4200 and a specific resistance ρ of 2.61 × 10 7
MΩ · cm, and sintering was insufficient. Further, if e is 0.
In the case of Sample No. 4 (Sample No. 38), the Q value was significantly reduced to 2010.
【0047】また、fが0.05の場合(試料No.3
9)は、容量値バラツキCV値が5.21と大きくなっ
た。更に、0.35の場合(試料No.42)は、Q値
が4000、比抵抗ρが2.11×107MΩ・cmと
なり、焼結不十分だった。When f is 0.05 (sample No. 3)
In 9), the capacitance value variation CV value was as large as 5.21. Further, in the case of 0.35 (sample No. 42), the Q value was 4000 and the specific resistance ρ was 2.11 × 10 7 MΩ · cm, and the sintering was insufficient.
【0048】また、ICP定量分析により、本発明の誘
電体磁器組成物は、従来に比べて、Bの割合の変動が小
さいことが確認できた。Further, it was confirmed by ICP quantitative analysis that the dielectric ceramic composition of the present invention had a smaller variation in the ratio of B as compared with the conventional one.
【0049】以上、本発明の実施例について述べたが、
本発明はこれに限定されるものではなく、例えば次の変
形例が可能なものである。 (1)基本成分の中に、本発明の目的を阻害しない範囲
で微量(好ましくは0.05〜0.1重量%)の鉱化剤
を添加し、焼結性を向上させてもよい。 (2)基本成分を得るための出発原料を、実施例で示し
たもの以外の例えば、CaO等の酸化物又は水酸化物又
はその他の化合物してもよい。また、添加成分の出発原
料を酸化物、水酸化物等の他の化合物としてもよい。 (3)酸化温度を600℃以外の焼結温度よりも低い温
度(好ましくは500℃〜1000℃の範囲)としても
よい。即ち、ニッケル等の電極と磁器の酸化とを考慮し
て種々変更するることが可能である。 (4)非酸化性雰囲気中の焼成温度を、電極材料を考慮
して種々変えることができる。ニッケルを内部電極とす
る場合には、1050℃〜1200℃の範囲で溶融凝集
がほとんど生じない。 (5)焼結を中性雰囲気で行ってもよい。 (6)積層磁器コンデンサ以外の一般的な磁器コンデン
サにも適用可能である。 (7)ガラス成分中にLiとBの両方を含んでもよい。
また、他の融点が低いガラス成分にも適用可能である。The embodiments of the present invention have been described above.
The present invention is not limited to this, and for example, the following modifications are possible. (1) A trace amount (preferably 0.05 to 0.1% by weight) of a mineralizer may be added to the basic components within a range that does not impair the purpose of the present invention to improve sinterability. (2) The starting material for obtaining the basic component may be, for example, an oxide or hydroxide such as CaO or another compound other than those shown in the examples. Further, the starting material of the additional component may be another compound such as an oxide or a hydroxide. (3) The oxidation temperature may be lower than the sintering temperature other than 600 ° C (preferably in the range of 500 ° C to 1000 ° C). That is, various changes can be made in consideration of the electrode of nickel or the like and the oxidation of the porcelain. (4) The firing temperature in the non-oxidizing atmosphere can be variously changed in consideration of the electrode material. When nickel is used as the internal electrode, almost no melt aggregation occurs in the range of 1050 ° C to 1200 ° C. (5) Sintering may be performed in a neutral atmosphere. (6) It is applicable to general ceramic capacitors other than the laminated ceramic capacitor. (7) Both Li and B may be contained in the glass component.
Further, the present invention is applicable to other glass components having a low melting point.
【0050】[0050]
【発明の効果】以上のように、本発明の誘電体磁器は、
CaZrO3とCaTiO3とから成る基本成分に、Si
−Li−Y、あるいはSi−B−Yで構成されるガラス
成分(焼結助剤)を添加することにより、中性又は還元
性雰囲気中での焼成時に、容量バラツキの低減を図るこ
とが可能であり、更には、比誘電率εs、温度特性T
C、Q値、比抵抗ρなどについても十分に満足なものと
なる。As described above, the dielectric porcelain of the present invention is
The basic components consisting of CaZrO 3 and CaTiO 3 are Si
By adding a glass component (sintering aid) composed of -Li-Y or Si-BY, capacity variation can be reduced during firing in a neutral or reducing atmosphere. And the relative dielectric constant εs and the temperature characteristic T
The C value, the Q value, the specific resistance ρ, etc. are also sufficiently satisfied.
【0051】従って、本発明における非還元性誘電体磁
器組成物を応用することにより、品質的に極めて安定
で、且つ静電容量Cap、温度特性TC、Q値、比抵抗
ρなどについても十分満足させる温度補償用積層磁器コ
ンデンサを提供することが可能になる。Therefore, by applying the non-reducing dielectric ceramic composition of the present invention, the quality is extremely stable and the capacitance Cap, the temperature characteristic TC, the Q value, the specific resistance ρ and the like are sufficiently satisfied. Thus, it is possible to provide a laminated ceramic capacitor for temperature compensation.
【図1】本発明の誘電体磁器組成物のSiO2、Li
2O、及びY2O3の三角ダイヤグラムである。FIG. 1 shows SiO 2 and Li of the dielectric ceramic composition of the present invention.
2 O, and is a triangular diagram of Y 2 O 3.
【図2】本発明の誘電体磁器組成物のSiO2、B
2O3、及びY2O3の三角ダイヤグラムである。FIG. 2 shows SiO 2 and B of the dielectric ceramic composition of the present invention.
2 O 3, and is a triangular diagram of Y 2 O 3.
───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 4G031 AA01 AA04 AA08 AA11 AA12 AA19 AA28 AA30 BA09 5E001 AB03 AC09 AE03 AJ02 5E082 AB03 BC15 EE04 EE11 EE23 EE35 FF05 FG06 FG26 FG54 PP03 5G303 AA01 AB06 AB08 AB11 AB20 BA12 CA01 CB02 CB06 CB16 CB18 CB30 CB35 CB39 CB40 ──────────────────────────────────────────────────続 き Continued on the front page F-term (reference) 4G031 AA01 AA04 AA08 AA11 AA12 AA19 AA28 AA30 BA09 5E001 AB03 AC09 AE03 AJ02 5E082 AB03 BC15 EE04 EE11 EE23 EE35 FF05 FG06 FG26 FG54 PP03 5G303 AB11AB02CB CB18 CB30 CB35 CB39 CB40
Claims (2)
O2(但し、0.95≦x≦1.05、0.01≦y≦
0.10の範囲の数値)で表される基本成分100重量
部に対して、 MnCO3を1〜5重量部と、 一般式aSiO2−bLi2O−cY2O3(但し、0.3
5≦a≦0.45、0.35≦b≦0.45、0.1≦
c≦0.3の範囲の数値)で表されるガラス成分を0.
5〜5重量部とを含有することを特徴とする誘電体磁器
組成物。1. The formula (CaO) x (Zr 1-y .Ti y )
O 2 (however, 0.95 ≦ x ≦ 1.05, 0.01 ≦ y ≦
With respect to 100 parts by weight of the basic component represented by the numerical value in the range of 0.10), 1 to 5 parts by weight of MnCO 3 and the general formula aSiO 2 -bLi 2 O-cY 2 O 3 (however, 0.3
5 ≦ a ≦ 0.45, 0.35 ≦ b ≦ 0.45, 0.1 ≦
The glass component represented by (a numerical value in the range of c ≦ 0.3) is set to 0.
5 to 5 parts by weight of the dielectric ceramic composition.
O2(但し、0.95≦x≦1.05、0.01≦y≦
0.10の範囲の数値)で表される基本成分100重量
部に対して、 MnCO3を1〜5重量部と、 一般式一般式dSiO2−eB2O3−fY2O3(但し、
0.4≦d≦0.7、0.15≦e≦0.35、0.1
≦f≦0.3の範囲の数値)で表されるガラス成分を
0.5〜5重量部とを含有することを特徴とする誘電体
磁器組成物。2. Formula (CaO) x (Zr 1 -y · Ti y )
O 2 (however, 0.95 ≦ x ≦ 1.05, 0.01 ≦ y ≦
With respect to 100 parts by weight of a basic component represented by a numerical value in the range of 0.10), 1 to 5 parts by weight of MnCO 3 and a general formula dSiO 2 -eB 2 O 3 -fY 2 O 3 (however,
0.4 ≦ d ≦ 0.7, 0.15 ≦ e ≦ 0.35, 0.1
A dielectric ceramic composition characterized by containing 0.5 to 5 parts by weight of a glass component represented by the following formula: ≦ f ≦ 0.3).
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|---|---|---|---|
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| JPS62131415A (en) * | 1985-11-30 | 1987-06-13 | 太陽誘電株式会社 | Dielectric porcelain compound |
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