JP2002071739A - Inspection method of electrode pattern - Google Patents

Abstract

(57) [Summary] [PROBLEMS] To reduce the number of inspection steps of an electrode pattern on a multi-chip substrate for a passive matrix liquid crystal panel. In the inspection of the electrode pattern of the multi-cavity board, an arrangement of the connection terminals is arranged in a region of the substrate provided with the connection terminals on one side and the display electrodes substantially orthogonal to the connection terminals. A substrate provided with a conductive material terminal connected to the connection terminal via a conductive material by contacting a pair of probes 72 separated in the arrangement direction by an interval substantially equal to the pitch. In the region 30, a pair of probes 7 separated in the arrangement direction by an interval substantially the same as the arrangement pitch of the display electrodes 32 or the conductive material terminals 34 in the same direction as the connection terminals 24.
2 is brought into contact with the region of the display electrode 32 or the conductive material terminal 34, and a plurality of pairs of probes 7 are
This is performed by measuring the conduction state between each pair of probes while relatively moving 2 in a direction substantially orthogonal to the connection terminal 24.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for inspecting an electrode pattern on a multi-chip substrate used for manufacturing a passive matrix liquid crystal panel.

[0002]

2. Description of the Related Art In the manufacture of a small passive matrix liquid crystal panel, two identically formed multi-piece substrates are bonded together in a predetermined positional relationship, and cut out and cut out. The efficient manufacture of a plurality of passive matrix liquid crystal panels has been performed. In a multi-chip substrate used in such manufacturing, a large number of patterns of a pair of substrates constituting a liquid crystal panel are formed on a single substrate. The patterns of the pair of substrates are formed in a positional relationship where the patterns of the display electrodes are substantially orthogonal. This is, as described above, the multi-chip substrate includes a plurality of patterns of a pair of substrates forming a passive matrix liquid crystal panel,
Moreover, it is possible to form a liquid crystal panel by bonding two multi-piece substrates formed identically.

Incidentally, as a method of inspecting a substrate used for a passive matrix liquid crystal panel, for example, Japanese Patent Laid-Open No.
A method disclosed in Japanese Patent Application Publication No. 2-66152 is known. In this method, as shown in FIG.
(Display electrode) or a pair of probes 5 maintained at the pitch a of the terminal portion 3 is brought into contact with the transparent electrode 2 or the region of the terminal portion 3 and is moved in the arrangement direction to form a pair of probes. The inspection of the substrate 1 is performed by detecting conduction between the probes 5 by a detection circuit 6 and thereby detecting a short circuit between the transparent electrodes 2.

In order to inspect the above-mentioned multi-piece substrate using such a method, a plurality of pairs of probes, which are maintained at intervals substantially equal to the pitch of the display electrodes or the terminal portions thereof, are brought into contact with the multi-piece substrate. In this case, the movement is performed in the direction perpendicular to the arrangement direction of the display electrodes, that is, the length direction of the display electrodes. However, the above-described multi-cavity substrate has two regions in which the length directions of the display electrodes are substantially orthogonal so that two types of single substrates can be formed. Therefore, in order to detect and inspect the presence / absence of a short circuit between all display electrodes, a plurality of pairs of probes are moved in a direction along one side of the multi-chip substrate, and the inspection is performed. The inspection has to be performed by moving along the other side substantially orthogonal to the one side. Therefore, there is a problem that the number of steps for inspection is large.

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and has as its object to form a plurality of passive matrix liquid crystal panels by cutting out two identically formed sheets and then cutting them out. An object of the present invention is to provide an electrode pattern inspection method capable of reducing the number of steps in an electrode pattern inspection method for a multi-piece substrate.

[0006]

(1) A method for inspecting an electrode pattern according to the present invention includes a connection terminal formed on a substrate and a display electrode extending from the connection terminal. An inspection method of an electrode pattern, wherein the electrode pattern has a first electrode pattern in which the length direction of the connection terminal and the display electrode is substantially the same, and a length direction of the connection terminal and the display electrode. Are almost orthogonal to each other
An electrode pattern, wherein the substrate has a first region in which the first electrode patterns are arranged adjacent to each other;
A second region in which electrode patterns are arranged adjacent to each other, and the probe is relatively moved only once in one direction in a state where the probe is in contact with the first electrode pattern and the second electrode pattern. It is characterized in that all the conduction states of the electrode patterns in one area and the second area are measured.

(2) A method for inspecting an electrode pattern according to the present invention is characterized in that the substrate has a plurality of the first regions and a plurality of the second regions, respectively.

(3) The electrode pattern inspection method according to the present invention is characterized in that the probe is brought into contact with a display electrode in the first region and with a connection terminal in the second region.

(4) The method for inspecting an electrode pattern according to the present invention is characterized in that the probe is brought into contact with a connection terminal of each of the first region and the second region.

(5) In the method for inspecting an electrode pattern according to the present invention, in (3), the display electrodes of the plurality of electrode patterns in the first area and the connection terminals of the plurality of electrode patterns in the second area are different. It is characterized in that they are arranged at equal intervals.

(6) In the method for inspecting an electrode pattern according to the present invention, in (4), the first region and the second
It is characterized in that the connection terminals in each region are arranged at equal intervals.

(7) The method for inspecting an electrode pattern according to the present invention is characterized in that the probe relatively moves in a direction perpendicular to a length direction of the connection terminal.

(8) The method for inspecting an electrode pattern according to the present invention is characterized in that a conduction state of an adjacent electrode pattern is measured in each of the first region and the second region.

(9) An inspection method of an electrode pattern according to the present invention is an inspection method of an electrode pattern on a multi-substrate for forming a plurality of passive matrix liquid crystal panels, wherein the multi-substrate has connection terminals. A region of the first substrate provided on one side and a region of the second substrate which is provided with a conductive material terminal connected to the connection terminal via a conductive material and bonded to the first substrate region. It is configured so that a plurality of passive matrix liquid crystal panels can be formed by cutting and bonding two identically formed substrates, and the area of the first substrate is substantially the same as the length direction of the connection terminals. A display electrode extending in a direction orthogonal to the first substrate; and a region of the second substrate including a display electrode extending in substantially the same direction as a length direction of the connection terminal. A pair of probes separated in the arrangement direction by a first predetermined interval corresponding to the arrangement pitch of the connection terminals in contact with the region of the connection terminal, and in the region of the second substrate, the display electrode Or a step of contacting a pair of probes separated in the arrangement direction by a second predetermined interval corresponding to the arrangement pitch of the conductive material terminals with the display electrode or the conductive material terminal area,
While maintaining the state in which the plurality of pairs of probes are in contact with the plurality of substrates, while relatively moving the plurality of pairs of probes relative to the plurality of substrates in a direction substantially orthogonal to the length direction of the connection terminal, Measuring a conduction state between each pair of probes.

In the present invention, the multi-substrate to be inspected has an area of the first substrate and an area of the second substrate bonded to the area of the first substrate. The multi-piece substrate is configured such that a plurality of passive matrix liquid crystal panels can be formed by laminating two identically formed substrates and then cutting them out.
In each region of the first substrate, a connection terminal is formed on one side, and in a region of the second substrate, a conductive material terminal connected to the connection terminal via a conductive material is formed. I have. A display electrode extending in a direction substantially perpendicular to the length direction of the connection terminal is provided in a region of the first substrate, and a display electrode extending substantially in the same direction as the length direction of the connection terminal in a region of the second substrate. An extending display electrode is provided.

In the inspection method of the present invention for inspecting the electrode pattern of the multi-piece substrate, a pair of probes are brought into contact with the connection terminal area in each area of the first substrate, and each area of the second substrate is inspected. In this method, a pair of probes are brought into contact with the conductive material terminal area, and the plurality of probes are moved relative to the multi-piece substrate in a direction substantially perpendicular to the length direction of the connection terminals. By measuring the continuity of the substrate, the inspection of the multi-piece substrate can be performed. Therefore, the inspection is completed only by moving a plurality of pairs of probes in one direction, and the number of inspection steps on such a multi-substrate can be reduced.

(10) An inspection method of an electrode pattern according to the present invention is an inspection method of an electrode pattern on a multi-substrate for forming a plurality of passive matrix liquid crystal panels, wherein the multi-substrate has connection terminals. A region of the first substrate provided on one side and a region of the second substrate which is provided with a conductive material terminal connected to the connection terminal via a conductive material and bonded to the first substrate region. It is configured so that a plurality of passive matrix liquid crystal panels can be formed by cutting and bonding two identically formed substrates, and the area of the first substrate is substantially the same as the length direction of the connection terminals. A display electrode extending in the same direction; a region of the second substrate including a display electrode extending in a direction substantially perpendicular to a length direction of the connection terminal; That is, a pair of probes separated in the arrangement direction by a first predetermined interval corresponding to the arrangement pitch of the display electrodes or the arrangement pitch of the connection terminals is brought into contact with the display electrode or the area of the connection terminals. Contacting a pair of probes separated in the arrangement direction by a second predetermined interval corresponding to the arrangement pitch of the conductive material terminals in the conductive material terminal area in the second substrate area; While maintaining a state in which a plurality of pairs of probes are in contact with the plurality of substrates, the plurality of pairs of probes are relatively moved with respect to the plurality of substrates in a direction substantially orthogonal to a length direction of the connection terminal. Measuring a conduction state between the pair of probes.

The multi-substrate to be inspected in the present invention has a region of the first substrate and a region of the second substrate bonded to the region of the first substrate. The multi-piece substrate is configured such that a plurality of passive matrix liquid crystal panels can be formed by laminating two identically formed substrates and then cutting them out.
In each region of the first substrate, a connection terminal is formed on one side, and in a region of the second substrate, a conductive material terminal connected to the connection terminal via a conductive material is formed. I have. Further, a display electrode extending in a direction substantially the same as the length direction of the connection terminal is provided in a region of the first substrate, and a display electrode extending in a direction substantially orthogonal to the length direction of the connection terminal in a region of the second substrate. An extending display electrode is provided.

In the inspection method of the present invention for inspecting the electrode pattern of the multi-chip substrate, in each area of the first substrate, a pair of probes is brought into contact with the area of the display electrode or the connection terminal, and In each area of the board, a pair of probes are brought into contact with the area of the conductive material terminal, and each of the plurality of probes is moved relative to the multi-piece board in a direction substantially orthogonal to the length direction of the connection terminal. By measuring the conduction state between the pair of probes, the inspection of the multi-piece substrate can be performed. Therefore, the inspection is completed only by moving a plurality of pairs of probes in one direction, and the number of inspection steps on such a multi-substrate can be reduced.

[0020]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below more specifically with reference to the drawings.

1. First Embodiment FIG. 1 is a schematic plan view of a pair of substrates formed from a multi-chip substrate according to the present embodiment, and shows a state viewed from a surface on which a display electrode is formed. ing. The connection terminal 24 is formed along one side of the substrate 20 as the first substrate, and the display electrode 22 extending in a direction substantially orthogonal to the length direction of the connection terminal 24 is provided. The substrate 30 as a second substrate includes a conductive material terminal 34 connected via a conductive material to a conductive material terminal 26 provided continuously to a part of the connection terminal 24 of the substrate 20; Display electrode 3 extending in substantially the same direction as the length direction of connection terminal 24
2 is provided continuously to the conductive material terminal 34.

The substrate 20 and the substrate 30 are connected to the respective display electrodes 22,
When the liquid crystal panel is formed by bonding together the surfaces on which the connection terminals 32 are formed, the substrate 20 is connected to the connection terminals 2.
Except for the portion 4 (the portion below the dashed line in FIG. 1), it is covered with the substrate 30. The conductive material terminal 34 of the substrate 30 is connected to the conductive material terminal 26 that is continuous with the corresponding connection terminal 24 of the substrate 20 via a conductive material (not shown). As a result, both the display electrode 22 of the substrate 20 and the display electrode 32 of the substrate 30 can be connected to the outside via the connection terminals 24 provided along one side of the substrate 20.

FIG. 2 is a schematic plan view of the multiple substrate 10 of the present embodiment. As shown in this figure, the multi-cavity substrate 10 includes a plurality of regions of the substrate 20 and a plurality of regions of the substrate 30 to be bonded to the region of the substrate 20 as described above. The multiple substrate 10 is configured such that two identically formed substrates are bonded together and then cut out to form a plurality of passive matrix liquid crystal panels.

FIG. 3 is a schematic plan view showing an inspection of such a multi-piece substrate in this embodiment.
FIG. 4 is a schematic plan view showing a part thereof in an enlarged manner. In this inspection, first, a pair of probes 72 is brought into contact with a region of the connection terminal 24 in each region to be the substrate 20, and a pair of probes 72 is brought into contact with the region of the display electrode 32 in each region of the substrate 30. State.

More specifically, a plurality of pairs of probes 72
Is held on the multi-piece board 10 so that each pair of probes 72 comes into contact with the multi-piece board 10 at the above-described positions. In the region of the substrate 20, each pair of probes 72 extends in a direction substantially orthogonal to the connection terminals 24 (the connection terminals 2.
4 (that is, the direction in which the holding member moves), the holding member 7 is maintained at a distance (D1 shown in FIG. 4, ie, a first predetermined interval) substantially equal to the arrangement pitch of the connection terminals.
4 and in the area of the substrate 30, in a direction substantially orthogonal to the connection terminals 24, a distance (D 2 shown in FIG. 4, ie, a second predetermined interval) substantially equal to the arrangement pitch of the display electrodes 32 is held. It is held by a member 74. Strictly speaking, the interval D (D1 or D2) between each pair of probes in a direction substantially orthogonal to the connection terminal 24 is P, the arrangement pitch of the electrodes to be inspected (connection terminal 24 or display electrode 32) is P, Is defined as G and the width of the electrode is defined as W, it suffices that it is within a range satisfying the following two equations.

G <D <P + NW <D <P + N That is, the distance D between each pair of probes 72 in the direction in which the holding member 74 moves is larger than both the gap G between the electrodes and the width W of the electrodes, and , May be within a range smaller than the sum of the electrode arrangement pitch P and the electrode width W.

In such a state, the holding member 74 holding each pair of probes 72 is moved relatively to the multi-piece substrate 10, whereby the multi-piece board 1 is moved.
0 to the connection terminals 2
4 while moving relative to each other in a direction substantially orthogonal to the length direction (the direction of arrow A shown in FIGS. 3 and 4), the conduction state between each pair of probes 72 is measured by a conduction state measuring device such as a resistance meter (not shown). Z). By performing such a measurement while relatively moving the holding member 74 from one end to the other end of the multi-piece substrate 10, a defect such as a short circuit between adjacent electrodes is found, and the inspection of the multi-piece substrate 10 is performed. It can be carried out.

In this inspection method, the connection terminals 24
In a region having the display electrode 22 in a direction substantially perpendicular to the region, that is, a region serving as the substrate 20, a pair of probes 72 are brought into contact with the connection terminal 24, and a region having the display electrode 32 substantially parallel to the connection terminal 24, In a region to be the substrate 30, a pair of probes 72 is brought into contact with the display electrode 32 or the conductive material terminal 34, and
By moving the holding member 74 to which is attached once from one end to the other end of the multi-piece substrate 10 only once in one direction, it is possible to inspect all regions of the multi-piece substrate 10. Therefore, it is possible to reduce the number of inspection steps for such a multi-substrate 10.

2. Second Embodiment The second embodiment is different from the first embodiment in the directions of the display electrodes 22 of the substrate 20 and the display electrodes 32 of the substrate 30, and the portions related thereto. In the following, only portions different from the first embodiment will be described. Otherwise, the configuration is the same as that of the first embodiment. Note that the same reference numerals as those in the first embodiment are used for corresponding parts in the drawings.

FIG. 5 is a schematic plan view of a pair of substrates 20 and 30 formed from the multi-substrate 10 of the present embodiment, as viewed from the side where the display electrodes are formed. Is shown. The substrate 20 as the first substrate has connection terminals 24 formed along one side.
The display electrode 22 is provided extending substantially in the same direction as the length direction of the display. The substrate 30 as the second substrate is the substrate 20
Terminal 26 for the conductive material continuous from a part of the connection terminal 24
And a display electrode 32 extending in a direction substantially perpendicular to the length direction of the connection terminal 24 is provided continuously with the conductive material terminal 34. ing.

Also in this embodiment, the multi-piece substrate is
The above-described configuration includes a plurality of regions of the substrate 20 and a plurality of regions of the substrate 30 that are bonded to face the region of the substrate 20. The multi-piece substrate is configured such that two identically formed substrates are bonded together and then cut out to form a plurality of passive matrix liquid crystal panels.

FIG. 6 is a diagram corresponding to FIG. 4 in the first embodiment, and is a schematic partial plan view showing, in an enlarged manner, the inspection of the multi-piece substrate in this embodiment. In this inspection, first, a pair of probes 72 are brought into contact with the region of the display electrode 22 in each region to be the substrate 20, and a pair of probes 72 are placed in the region of the conductive material terminal 34 in each region of the substrate 30. Make contact state. In the region of the substrate 20, each pair of the probes 72 has an arrangement pitch of the display electrodes 22 in a direction substantially orthogonal to the connection terminals 24 (an arrangement direction of the connection terminals 24, that is, a direction in which the holding member moves). It is held by the holding member 74 while maintaining a substantially equal distance (D3 shown in FIG. 6, that is, the first predetermined interval). In the region of the substrate 30, the arrangement of the display electrodes 32 is substantially perpendicular to the conductive material terminals 24. It is held by the holding member 74 at a distance substantially equal to the pitch (D4 shown in FIG. 6, that is, a second predetermined interval). Strictly, these distances are set in the range described by showing the inequality as the probe interval D in the first embodiment.

Then, similarly to the first embodiment, a holding member 74 holding each pair of probes 72 in such a state.
Are moved relative to the multi-piece substrate 10 so that the plurality of pairs of probes 72 are moved relative to the multi-piece board 10 in a direction substantially orthogonal to the length direction of the connection terminals 24 (arrows shown in FIG. 6). While relatively moving in the direction (A), the conduction state between each pair of probes 72 is measured by a conduction state measuring device, for example, a resistance meter (not shown). By performing such a measurement while relatively moving the holding member 74 from one end to the other end of the multi-piece substrate 10, a defect such as a short circuit between adjacent electrodes is found, and the inspection of the multi-piece substrate 10 is performed. It can be carried out.

In this inspection method, the connection terminals 24
In a region having the display electrode 22 in a direction substantially the same as that of the substrate 20, that is, a region serving as the substrate 20, the pair of probes 72 is brought into contact with the display electrode 22 or the connection terminal 24, and the display electrode 32 substantially orthogonal to the connection terminal 24. In the region having the substrate 30, i.e., the region serving as the substrate 30, the pair of probes 72 are brought into contact with the conductive material terminals 34, and a plurality of holding members 74 to which the probes 72 are attached are taken in one direction from one end to the other end of the substrate 10. By moving the board only once, the inspection of the entire area of the multi-chip substrate 10 can be performed. Therefore, it is possible to reduce the number of inspection steps for such a multi-piece substrate 10.

3. <Other Modifications> 3.1 In each of the embodiments described above, the connection terminal 2
In the region of the substrate 20 or 30 where the display electrode 22 extending substantially in parallel with the terminal 4, the probe 72 is connected to the display electrode 24 instead of the connection terminal 24 or the conductive material terminal 34.
An example in which an electrode pattern is inspected by contacting the electrodes is shown. However, even in the region of the substrate 20 or 30 where the display electrode 22 extending substantially parallel to the connection terminal 24 is provided, even if the probe 72 is brought into contact with the connection terminal 24 or the conductive material terminal 34 to inspect the electrode pattern. Good. In this case, the interval between the pair of probes needs to correspond to the width, the electrode gap, and the arrangement pitch of the connection terminals 24 or the conductive material terminals 34.

3.2 Further, the present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the present invention or within the equivalent scope of the claims. It is.

[Brief description of the drawings]

FIG. 1 is a schematic plan view of a pair of substrates formed from a multi-chip substrate according to a first embodiment.

FIG. 2 is a schematic plan view of a multi-chip substrate according to the first embodiment.

FIG. 3 is a schematic plan view showing a state of inspection on the multi-chip substrate shown in FIG. 2;

FIG. 4 is a schematic plan view showing a part of FIG. 3 in an enlarged manner.

FIG. 5 is a schematic plan view of a pair of substrates formed from a multi-substrate according to a second embodiment.

FIG. 6 is a schematic enlarged plan view showing a state of inspection in a second embodiment.

FIG. 7 is a diagram showing a state of a conventional board inspection, and FIG.
Is a plan view, and (B) is a side view.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Multiple board | substrate 20 Substrate (1st board | substrate) 22, 32 Display electrode 24 Connection terminal 34 Terminal for conductive material 72 Probe 74 Holding member

Claims (10)

[Claims] 1. A method for inspecting an electrode pattern formed on a substrate and having a connection terminal and a display electrode extending from the connection terminal, wherein the electrode pattern includes the connection terminal and the display electrode. A first electrode pattern in which the length directions of the display electrodes are substantially the same, and a second electrode pattern in which the length directions of the connection terminals and the display electrodes are substantially orthogonal to each other; A first region in which the first electrode patterns are arranged so as to be adjacent to each other; and a second region in which the second electrode patterns are arranged so as to be adjacent to each other. An electrode pattern inspection method, wherein a relative movement is performed only once in one direction while being in contact with a second electrode pattern, and all the conduction states of the electrode patterns in the first area and the second area are measured. . 2. The method for inspecting an electrode pattern according to claim 1, wherein said substrate has a plurality of said first regions and a plurality of said second regions. 3. The method for inspecting an electrode pattern according to claim 1, wherein the probe is brought into contact with a display electrode in the first region and with a connection terminal in the second region. Inspection method of the electrode pattern. 4. The electrode pattern inspection method according to claim 1, wherein the probe is brought into contact with a connection terminal of each of the first region and the second region. Inspection method. 5. The electrode pattern inspection method according to claim 3, wherein the display electrodes of the plurality of electrode patterns in the first region and the connection terminals of the plurality of electrode patterns in the second region are equally spaced, respectively. A method for inspecting an electrode pattern, comprising: 6. The electrode pattern inspection method according to claim 4, wherein the connection terminals of each of the first region and the second region are arranged at equal intervals. Inspection method. 7. The electrode pattern inspection method according to claim 1, wherein the probe relatively moves in a direction orthogonal to a length direction of the connection terminal. Pattern inspection method. 8. The method for inspecting an electrode pattern according to claim 1, wherein a conduction state of an adjacent electrode pattern is measured in each of the first region and the second region. Inspection method of the electrode pattern. 9. A method of inspecting an electrode pattern on a multi-substrate for forming a plurality of passive matrix liquid crystal panels, wherein the multi-substrate includes a region of a first substrate provided with connection terminals on one side, A connection material terminal connected to the connection terminal via a conductive material is provided. The connection terminal has a second substrate region bonded to the first substrate region, and two identically formed substrates are bonded to each other. A plurality of passive matrix liquid crystal panels can be formed by cutting out the substrate, and a region of the first substrate includes a display electrode extending in a direction substantially perpendicular to a length direction of the connection terminal. The region of the second substrate includes a display electrode extending substantially in the same direction as the length direction of the connection terminal, and the region of the first substrate corresponds to the arrangement pitch of the connection terminal. A pair of probes separated by first predetermined distance in the arrangement direction thereof is brought into contact with the region of the connecting terminal,
In the region of the second substrate, a pair of probes separated in the arrangement direction by a second predetermined interval corresponding to the arrangement pitch of the display electrodes or the conductive material terminals is used for the display electrodes or the conductive material terminals. Contacting the terminal area with the plurality of pairs of probes while maintaining the plurality of pairs of probes in contact with the multi-layer board, and making the plurality of pairs of probes substantially perpendicular to the length direction of the connection terminals with respect to the multi-layer board. Measuring a conduction state between the pair of probes while relatively moving in a direction in which the electrodes move. 10. A method for inspecting an electrode pattern on a multi-layer substrate for forming a plurality of passive matrix liquid crystal panels, wherein the multi-layer substrate has a region of a first substrate provided with connection terminals on one side, A connection material terminal connected to the connection terminal via a conductive material is provided. The connection terminal has a second substrate region bonded to the first substrate region, and two identically formed substrates are bonded to each other. A plurality of passive matrix liquid crystal panels can be formed by cutting out the substrate, and the region of the first substrate includes a display electrode extending in a direction substantially the same as a length direction of the connection terminal. The area of the two substrates includes display electrodes extending in a direction substantially perpendicular to the length direction of the connection terminals, and the arrangement pitch of the display electrodes or the front of the display electrodes in the area of the first substrate. The corresponding to the arrangement pitch of the connection terminals 1
A pair of probes separated by a predetermined distance in the arrangement direction are brought into contact with the display electrode or the connection terminal area, and a second electrode corresponding to the arrangement pitch of the conductive material terminals is arranged in the second substrate area. Contacting a pair of probes separated by a predetermined distance in the arrangement direction with the conductive material terminal area; maintaining the plurality of pairs of probes in contact with the multi-piece substrate; Measuring the conduction state between the pair of probes while relatively moving the plurality of pairs of probes in a direction substantially perpendicular to the length direction of the connection terminal.