JP2001101613A - Magnetic head, method of manufacturing magnetic head, video using magnetic head, and movie using magnetic head - Google Patents

Abstract

(57) [Summary] (with correction) [PROBLEMS] To provide a magnetic head and a method of manufacturing a magnetic head which are excellent in corrosion resistance and input / output characteristics and can reduce substrate cracking. A magnetic head includes a pair of magnetic core halves MC.
1 and MC2, and a non-magnetic material N3 formed between the pair of magnetic core halves and joining the pair of magnetic core halves. Each of the pair of magnetic core halves includes an oxide magnetic material, an oxide At least one underlayer formed on each of the magnetic materials, and a metal magnetic thin film formed between each of the underlayers and the nonmagnetic material (the average volume Va and the average surface area Sa are Sa> 4. including a magnetic film with magnetic crystal grains satisfying 84Va ^2/3 to matrix.) and a EM3, is formed winding window 21A in at least one of the magnetic core halves, the metal magnetic thin film, the magnetic metal in the thin film The oxide magnetic material is formed so as not to be broken due to undesired internal stress generated during the heating.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic head having a structure which is excellent in corrosion resistance and input / output characteristics and can reduce substrate cracking, a method of manufacturing the magnetic head, and a video and magnetic head using the magnetic head. About the movie that was.

[0002]

2. Description of the Related Art Conventionally, as a magnetic head for a VTR or the like, a ferrite head having a magnetic core formed by joining a pair of ferrites has been used. With the recent increase in density of magnetic recording, a metal-in-gap head (MIG head) in which a metal magnetic material having a higher saturation magnetic flux density than ferrite is formed around a recording / reproducing gap.

FIGS. 8 and 9A to 9D are schematic views showing examples of conventional ferrite heads and MIG heads, respectively.

Referring to FIG. 8, a ferrite head 300
Is formed between a pair of ferrites F1A, F1B and a pair of ferrites F1A, F1B.
Non-magnetic material N1 for bonding 1A and F1B and bonding glass G
1 is provided.

Referring to FIGS. 9A to 9D, a MIG head 400 includes a pair of magnetic core halves MCA and MCB, and a pair of magnetic core halves MCA and MCB formed between the pair of magnetic core halves MCA and MCB. , And a nonmagnetic material N2 for joining the MCB and a joining glass G2. A pair of magnetic core halves MC
A and MCB are ferrites F2A, F2B
And at least one base film (not shown) formed on each of the ferrites F2A and F2B, and a metal magnetic thin film FM2 formed between each of the base films and the nonmagnetic material N2. Prepare.

As a metal magnetic thin film, an amorphous material (for example, JP-A-63-120563) or a heat treatment is performed on an amorphous film mainly composed of Fe to precipitate microcrystals of about 5 to 20 nm. , Fe-N-based, Fe-C-based materials (for example, Hasegawa: Journal of the Japan Society of Applied Magnetics, 14, 319-32)
2 (1990), Nago IEEE, Trans. ,
magn. , Vol. 28, No. 5 (1992)).

[0007] Among these metal magnetic thin films, in particular, a material having a high saturation magnetic flux density of 1.2 T or more and a soft magnetic property by precipitating or growing microcrystalline particles of a magnetic metal composition has a high corrosion resistance. Need improvement.

For this purpose, attempts have been made to add a passivation-forming light element to these materials. However, such a light element is liable to react with oxygen, nitrogen and the like.
It reacts with oxygen or the like used for amorphization or microcrystallization, and hardly remains in magnetic metal microcrystal grains.

In view of this, a light element which forms a passivation is added, and the structure of the magnetic crystal grains is controlled to have a relatively large size and a large surface area. For example, JP-A-10-
223435) has been developed.

[0010]

SUMMARY OF THE INVENTION However, MIG
Since the head is a composite device of ferrite, which is an oxide, and a metal magnetic thin film, the substrate (ferrite) due to internal stress generated in the metal magnetic thin film due to the structure of the head and the material properties of the metal magnetic thin film There is a problem that the magnetic properties are deteriorated due to cracks and reactions at the interface.

Further, according to the material characteristics of the metal magnetic thin film,
The optimal head structure varies. In order to improve the characteristics of the magnetic head, it is necessary to solve not only the material design but also the problems of cracking of the base material (ferrite) due to the internal stress and deterioration of the magnetic characteristics due to reaction at the interface.

An object of the present invention is to provide a magnetic head which is excellent in corrosion resistance and input / output characteristics and can reduce substrate cracking.
An object of the present invention is to provide a method for manufacturing a magnetic head, a video using the magnetic head, and a movie using the magnetic head.

It is another object of the present invention to optimize the material characteristics of the metal magnetic thin film and the structure of the MIG head.

[0014]

A magnetic head according to the present invention comprises a pair of magnetic core halves and a non-magnetic material formed between the pair of magnetic core halves to join the pair of magnetic core halves. Wherein each of the pair of magnetic core halves is
An oxide magnetic body, at least one underlayer formed on each of the oxide magnetic bodies, and a metal magnetic thin film formed between each of the underlayers and the nonmagnetic material The metal magnetic thin film is a magnetic thin film including a magnetic film having a magnetic crystal grain having an average volume Va and an average surface area Sa satisfying Sa> 4.84 Va ^2/3 as a mother phase. At least one has a winding window,
The metal magnetic thin film is formed so that the oxide magnetic material is not cracked by an undesired internal stress generated in the metal magnetic thin film, thereby achieving the above object.

The metal magnetic thin film includes magnetic crystal grains,
The magnetic grains may have an average maximum length greater than 50 nm.

The magnetic crystal grains include a substantially needle-like body, a substantially columnar body, or a multi-branched body made of a combination thereof. The average crystal size of the substantially needle-like body or the substantially columnar body in the lateral direction is as follows: It may be larger than 5 nm and smaller than 60 nm.

The average dS of the crystal size in the short direction and the average dL of the crystal size in the long direction of the magnetic crystal grains are 5n.
m <dS <60 nm and 60 nm <dL <5000 nm may be satisfied.

The metal magnetic thin film is (M _a X _b Z _c ) _100-d
Has a composition represented by A _d, M includes at least one magnetic metal element selected Fe, Co, from Ni, X is S
i contains at least one element selected from Al, Ga and Ge, and Z is a group IVa, a group Va, Al, Ga and C
r contains at least one element selected from r, A contains at least one element of O and N, and a, b, c and d are 0.1 ≦ b ≦ 26, 0.1 ≦ c ≦ 5 , A + b +
It may be a numerical value satisfying the relational expression of c = 100 and 1 ≦ d ≦ 10.

Each of the pair of magnetic core halves has a bonding surface for bonding with the other magnetic core half via the non-magnetic material, a sliding surface for sliding on a recording medium, and a bonding surface. A side surface continuous with the sliding surface may be provided, and the metal magnetic thin film may be formed on the side surface.

The metal magnetic thin film is made of (Fe _a Si _b Al _c
T _d ) having a composition represented by _{100-e Ne} , wherein T contains at least one element selected from Ti and Ta;
b, c, d and e are 10 ≦ b ≦ 23, 0.1 ≦ d ≦
5, a numerical value satisfying the relational expressions of 0.1 ≦ c + d ≦ 8, a + b + c + d = 100, and 1 ≦ e ≦ 10 may be used.

Z may include at least one element selected from the group IVa, group Va, and Cr.

X contains at least one element selected from Si and Ge, and a, b, c and d are 0.1 ≦ b
≦ 23, 0.1 ≦ c ≦ 8, a + b + c = 100 and 1
It may be a numerical value satisfying the relational expression of ≦ d ≦ 10.

The metal magnetic thin film is formed of (Fe _a Si _b Al _c
Ti _d) has a composition represented by _{100-ef N e O f,} a, b,
c, d, e and f are: 10 ≦ b ≦ 23, 0.1 ≦ d ≦ 5, 0.1 ≦ c + d ≦
8, a + b + c + d = 100, 1 ≦ e + f ≦ 10, and 0.1 ≦ f ≦ 5.

The base film may contain any of oxides and nitrides of Al and Si and a mixture thereof.

The underlayer includes an underlayer A in contact with the magnetic core half, and an underlayer B in contact with the metal magnetic thin film. The underlayer A is composed of oxides and nitrides of Al and Si and the same. The underlayer B contains a main constituent element of the metal magnetic thin film and more oxygen or nitrogen than the metal magnetic thin film, the underlayer B contains crystal grains, May be 5 nm or less at least near the interface where the underlayer B contacts the underlayer A.

The underlayer A contains an Al oxide, and the thickness of the underlayer A is 0.5 nm or more and 4 nm or less,
The thickness of the underlayer B may be 0.5 nm or more and 200 nm or less.

The oxide magnetic material includes a single crystal ferrite, and the single crystal ferrite includes a bonding surface corresponding to a surface where the pair of magnetic core halves are bonded via the nonmagnetic material, and the pair of magnetic cores. The core half may have a sliding surface corresponding to the surface on which the recording medium slides.

The single crystal ferrite has an Amol% of F
e ₂ O ₃ , B mol% of MnO, and C mol% of ZnO
MnZn single crystal ferrite composed of
A, B and C may be numerical values satisfying the relational expressions of 52 ≦ A ≦ 57, 5 ≦ B ≦ 29, and 16 ≦ C ≦ 21.

The magnetic core halves include a bonding surface corresponding to a surface where the pair of magnetic core halves are bonded via the nonmagnetic material, and a surface on which the pair of magnetic core halves slide with a recording medium. The at least one magnetic core half has a bottom surface forming the winding window and a first side surface forming the winding window, and the first side surface has , The first side surface is formed on the sliding surface side with respect to the bottom surface, and an angle formed by the first side surface and the bonding surface is 22.5. It may be not less than {not less than 70}.

[0030] The winding window may be formed on only one of the magnetic core halves, and an angle between the first side surface and the joining surface may be not less than 45 ° and not more than 70 °.

[0031] The winding window may be formed on both of the magnetic core halves, and an angle between the first side surface and the joining surface may be not less than 22.5 ° and not more than 50 °.

The first side surface has a second side surface formed adjacent to the joining surface and a third side surface formed adjacent to the bottom surface.
An angle between the second side surface and the joint surface is 22.5 ° or more and 70 ° or less, and an angle between the third side surface and the bottom surface is substantially 90 °. There may be.

[0033] The winding window may be formed on only one of the magnetic core halves, and an angle between the second side surface and the joining surface may be not less than 45 ° and not more than 70 °.

[0034] The winding window may be formed on both of the magnetic core halves, and an angle between the second side surface and the joining surface may be not less than 22.5 ° and not more than 50 °.

The metal magnetic thin film is formed of (Fe _a Si _b Al _c
Ti _d) has a composition represented by _{100-ef N e O f,} a, b,
c, d, e and f are as follows: 10 ≦ b ≦ 13, 1 ≦ c ≦ 3, 1 ≦ d ≦ 3, a + b + c
+ D = 100, 4 ≦ e + f ≦ 10, and 0.1 ≦ f ≦ 2.

The oxide magnetic body has a joining surface corresponding to a surface where the pair of magnetic core halves are joined via the non-magnetic material, and a side surface continuous with the joining surface. The angle between the side surface and the side surface may be 70 ° or more and 90 ° or less, and the metal magnetic thin film may be formed only on the joint surface between the joint surface and the side surface.

A method of manufacturing a magnetic head according to the present invention includes a pair of magnetic core halves and a non-magnetic material formed between the pair of magnetic core halves and joining the pair of magnetic core halves. Each of the pair of magnetic core halves includes an oxide magnetic body, at least one underlayer formed on each of the oxide magnetic bodies, and each of the underlayer and the nonmagnetic material. And a metal magnetic thin film formed therebetween, wherein the metal magnetic thin film has an average volume Va and an average surface area S
a is a magnetic thin film including a magnetic film having magnetic crystal grains satisfying Sa> 4.84 Va ^2/3 as a mother phase, wherein a winding window is formed in at least one of the magnetic core halves, The magnetic thin film is formed so that the oxide magnetic body is not cracked by an undesirable internal stress generated in the metal magnetic thin film, and the metal magnetic thin film is formed of (M _a X1 _b Z1 _c ).
Has a composition represented by _100-d A _d, wherein the metal magnetic thin film,
A magnetic crystal grain, wherein the magnetic crystal grain includes a substantially needle-like body, a substantially columnar body, or a multi-branched body made of a combination thereof;
And the average dL of the crystal size in the longitudinal direction is 5 nm <dS
<60 nm, 60 nm <dL <5000 nm,
M includes at least one magnetic metal element selected from Fe, Co, and Ni; X1 includes at least one element selected from Si, Al, Ga, and Ge; and Z1 includes IVa
Group, Va group, at least one element selected from Al, Ga and Cr, A includes at least one element of O and N, and a, b, c and d are 0.1 ≦ b ≦ 2
6, 0.1 ≦ c ≦ 5, a + b + c = 100 and 1 ≦ d
A method for manufacturing a magnetic head that satisfies a relational expression of ≦ 10, wherein a winding window forming step of forming a winding window on at least one of a pair of substantially flat oxide magnetic bodies; A base film forming step of forming at least one base film on a magnetic material, and forming a base material on the base film using a solid raw material comprising a main constituent element of the metal magnetic thin film;
A metal magnetic thin film forming step of forming the metal magnetic thin film by a gas phase method under an atmosphere containing at least one of nitrogen,
As the width of the metal magnetic thin film corresponds to the track width,
A track processing step of forming a groove in the oxide magnetic body on which the metal magnetic thin film is formed, and a joining step of abutting and joining the pair of oxide magnetic bodies via the non-magnetic material, Thereby, the above object is achieved.

Each of the steps may be executed in the order of the winding window forming step, the base film forming step, the metal magnetic thin film forming step, the track processing step, and the joining step.

Each of the above steps may be performed in the order of the base film forming step, the metal magnetic thin film forming step, the winding window forming step, the track processing step, and the joining step.

A video according to the present invention comprises a cylinder on which a magnetic head according to the present invention is mounted, a head tape interface mechanism for winding a magnetic tape around the cylinder,
A cylinder drive unit for driving the cylinder and a magnetic tape drive unit for driving the magnetic tape wound on the cylinder are provided, thereby achieving the above object.

A movie according to the present invention includes a cylinder on which the magnetic head according to the present invention is mounted, a head tape interface mechanism for winding a magnetic tape around the cylinder, a cylinder driving unit for driving the cylinder, and a cylinder wound around the cylinder. A magnetic tape driving unit that drives the magnetic tape, an optical system that converts a video signal into an electric signal, and a signal processing circuit that outputs the electric signal converted by the optical system to the magnetic head, Thereby, the above object is achieved.

By adopting such a configuration of the magnetic head, the ratio of the surface area to the volume of one magnetic crystal grain is increased, so that the influence of exchange coupling exerted between the grains is increased, and the conventional microcrystals are used. Even with a grain size larger than the system material, the soft magnetic properties are improved. In addition, since the crystal grains are large, grain growth due to heat treatment is suppressed, and the ratio of corrosion-resistant elements in the composition remaining as a solid solution in the metallic magnetic crystal is increased, making it possible to achieve both high saturation magnetic flux density and corrosion resistance. Become. In addition, since the metal magnetic thin film is not formed on the surface that slides on the recording medium and is continuous with the joining surface of the magnetic core half, destruction due to stress concentration on the end of the joining surface, the so-called track edge, is prevented. Thus, deterioration of the magnetic head characteristics can be prevented.

Thus, according to the present invention, (M _a X
_b Z _c) has a composition represented by _100-d A _d, and makes the magnetic crystal grains constituting the matrix phase substantially needles, a substantially columnar body or multivessel shaped body comprising a combination thereof, crystalline The average dS of the crystal size in the transverse direction of the grains and the average dL of the crystal size in the longitudinal direction are 5 nm <dS <60 nm, 60 nm <d.
A metal magnetic thin film satisfying L <5000 nm, where M is at least one magnetic metal element selected from Fe, Co, and Ni, and X includes at least one element selected from Si, Al, Ga, and Ge , Z is group IVa, Va
A includes at least one element selected from the group consisting of Al, Ga, and Cr, A is at least one element of O and N, and a, b, c, and d are 0.1 ≦ b ≦ 260. 1 ≦ c ≦ 5 a + b + c = 10
In a metal-in-gap (Metal In Gap) type magnetic head using a metal magnetic thin film having a numerical value satisfying the relational expression of 0 1 ≦ d ≦ 10, the head structure is slid with a recording medium of the magnetic head. The head characteristics and corrosion resistance can be improved and the defect rate of the head due to ferrite cracking can be reduced by forming a shape in which the metal magnetic thin film is not formed on the surface that is continuous with the joining surface of the magnetic core on the surface to be bonded. .

[0044]

(Embodiment 1) FIGS. 1A to 1E
FIG. 1 shows a schematic diagram of the magnetic head 100 according to the first embodiment. FIG. 1A shows the magnetic head 100 at the head end,
It is the figure seen from the tape sliding surface side. FIG. 1B is a cross-sectional view as viewed from the direction indicated by arrow A1 in FIG. 1A. FIGS. 2A to 2D show, among the processing steps of the magnetic head 100 according to the first embodiment, the steps of the portion related to the first embodiment.

Referring to FIGS. 1A and 1B, magnetic head 1
The reference numeral 00 denotes a pair of magnetic core halves MC1 and MC2, a nonmagnetic material N3 formed between the pair of magnetic core halves MC1 and MC2, and joining the pair of magnetic core halves MC1 and MC2 and a bonding glass G3. Prepare. A pair of magnetic core halves MC1,
Each of the MC2 has a ferrite F3A, F3B, a base film (not shown) formed on each of the ferrites F3A, F3B, and a gap between each of the base films (not shown) and the nonmagnetic material N3. Metal magnetic thin film FM3 to be formed
And A winding window 21A is formed in the magnetic core half MC1.

Referring to FIG. 1A, ferrites F3A and F3A
3B has a bonding surface S corresponding to the nonmagnetic material N3.
1 and side surfaces S2 and S3 continuous with the joining surface S1.
The metal magnetic thin film FM3 is formed only on the bonding surface S1, and is not formed on the side surfaces S2 and S3. Joint surface S1 and side surface S2
And the angle between the joining surface S1 and the side surface S3 are 70 ° or more and 90 ° or less.

When the metal magnetic thin film FM3 is formed on the side surfaces S2 and S3, an undesirable internal stress is generated in the metal magnetic thin film FM3 formed on the side surfaces S2 and S3. When an internal stress occurs in the metal magnetic thin film FM3, the ferrite F3
A and F3B may be cracked. As described above, the metal magnetic thin film FM3 is formed so that the ferrites F3A and F3B are not cracked by an undesirable internal stress generated in the metal magnetic thin film FM3. Each of the ferrites F3A and F3B includes single crystal ferrite. The single crystal ferrite is composed of Amol% Fe ₂ O ₃ , Bmol% MnO,
MnZn single crystal ferrite composed of Cmol% ZnO and A, B and C are numerical values satisfying the relational expressions of 52 ≦ A ≦ 57, 5 ≦ B ≦ 29, and 16 ≦ C ≦ 21. Single crystal ferrite is
It may further include a Ca oxide, a Ni oxide or a Cu oxide.

FIGS. 1C and 1D are cross-sectional views of a modification of the magnetic head according to the first embodiment. In the magnetic head 100A shown in FIG. 1C, winding windows are formed on both of the pair of magnetic core halves MC1. Magnetic head 1 shown in FIG. 1D
In 00B, winding windows are formed on both of the pair of magnetic core halves MC3.

Referring to FIGS. 2A to 2D and 3C,
Magnetic head 100, 100A, 100B of the first embodiment
Will be described. The method of manufacturing the magnetic head 100B will be described as an example. Magnetic head 100, 100A
Can be obtained by making appropriate changes to the same manufacturing method.

Each surface S21, S22 and S shown in FIG. 2A
23 is a rectangular parallelepiped MnZ having a substantially (100) crystal orientation.
A single crystal of n ferrite is processed into a shape shown in FIG. 2B.
After polishing the surface S21, the affected layer is removed to form the winding window 21 (S101). When manufacturing the magnetic core half MC2 shown in FIG. 1B, the winding window 21 is not formed.

Due to the head characteristics, the surface S21 is a (100) surface,
The plane S22 and the plane S23 are (100) planes or (11)
When it is the 0) plane, favorable results are obtained. The surface S23 is (100) in terms of abrasion characteristics with the magnetic tape during use.
More favorable results are obtained when the surface is used. If the plane S21 and the plane S23 are (100) planes, the plane S22 is necessarily (10
0) plane.

From a practical viewpoint, it is difficult to strictly set each of the planes S21, S22 and S23 to the (100) plane and the (110) plane. The same effect can be obtained.

FIG. 3A is an enlarged sectional view of the shape of the winding window 21 shown in FIG. 2B. The shape of the general winding window 21A is shown in FIG. 3B. The characteristics of the magnetic head are improved by inclining the magnetic flux by providing an inclination near the joining surface.

In the shape shown in FIG. 3B, the angle θ1 formed between the joint surface S1 and the first side surface S1A, the bottom surface S1B and the first side surface S1
An angle θ2 with A is equal, and θ1 = θ2. FIG.
In the case of the single window shape shown in B, when θ1 is 45 ° to 70 °, a favorable effect of narrowing down is obtained. In the case of a double window shape as shown in FIG. 1C, θ1 is 22.5 ° to 5 °.
At 0 °, a favorable effect of narrowing down is obtained.

The size of the winding window 21A is determined so that the required number of windings can be wound. When compared with a size that allows the same number of windings, the shorter the magnetic path length as viewed from the head sliding surface, the higher the reproduction sensitivity of the magnetic head.

As shown in FIG. 3A, in order to shorten the magnetic path length while giving the effect of narrowing down, as shown in FIG. 3A, the angle θ11 formed between the joint surface S1 and the second side surface S1C, the third side surface S1D and the bottom surface S1B, A preferable effect can be obtained by making the shape different from the angle θ12 formed.

Since the range of the angle θ11 is for narrowing down the magnetic flux, a preferable result is obtained when the range is the same as the example of FIG. 3B. That is, in the case of the single window shape shown in FIG. 1B, when θ11 is 45 ° to 70 °, a favorable effect of narrowing down is obtained. In the case of the double window shape as shown in FIG. 1C, when θ11 is 22.5 ° to 50 °, a favorable effect of narrowing down is obtained. As shown in FIG. 3A, when the angle θ12 is substantially 90 °, the magnetic path length can be shortened while securing a size for the winding, so that a more preferable effect can be obtained.

When the metal magnetic film FM3 is formed directly on the ferrites F3A and F3B, which are oxides, diffusion of oxygen occurs during the heat treatment. Therefore, the underlayer UL1 is placed on the surface S1.
As FIG. 1A, an alumina film is formed (S102). Preferred results are obtained when silicon oxide, aluminum nitride, silicon nitride, or a mixture thereof is used as the underlayer UL1 for preventing oxygen diffusion. When the thickness of the underlayer UL1 is 0.5 nm or more, an oxygen diffusion preventing effect can be obtained. The thicker the material, the more the effect of preventing oxygen diffusion can be obtained. However, the above-mentioned substances are non-magnetic, and if the thickness is too large, the effect of leaking magnetic flux deteriorates the characteristics of the magnetic head.

The metal magnetic film FM3 is formed on the underlayer UL1 (S103). In the initial stage of film formation, the amount of nitrogen and oxygen is increased, and the second underlayer UL2 (FIG. 1E) having an average particle size near the interface with the underlayer UL1 of 5 nm or less is set to 0.5 nm to 2 nm.
If the metal magnetic film FM3 is formed after the formation of 00 nm (preferably 0.5 nm to 20 nm), more preferable effects can be obtained. FIG. 2 shows a state after the metal magnetic film FM3 is formed using a solid material composed of the main constituent elements of the metal magnetic thin film.
C.

After a non-magnetic gap material (not shown) is formed on the metal magnetic film FM3, a groove 22 for controlling a track width is processed (S104). FIG. 2D shows a state after processing the groove 22. The non-magnetic material N3 is formed, butted against the other magnetic core half, and the bonding glass G3 is poured by heat treatment in an inert gas to join the pair of magnetic core halves (S105). The outer shape is processed by cutting and grinding into a desired shape (S106), and the manufacture of the magnetic head 100, 100A or 100B having the shape shown in FIGS. 1A to 1E is completed.

For forming the magnetic head of the present invention, ordinary processing means can be used. For example, as cutting and cutting means, a resin bond (registered trademark) diamond blade, a dicing saw using a metal resin bond diamond blade, a slicing saw, etc., and as a polishing means, green carbon (SiC) abrasive grains, diamond abrasive grains, Rotation lapping using a cast iron or tin platen, or polishing using a lapping tape in which alumina or diamond abrasive grains are dispersed on an organic resin tape can be used.

If necessary, a means for removing the affected layer of ferrite can be used. For example, surface etching with an acid using phosphoric acid or the like, mechanochemical lapping using a low-weighted tin platen and colloidal silica abrasive grains whose pH has been adjusted to slightly acidic, or the like can be used.

The non-magnetic material for bonding the underlayer and the magnetic core half of the present invention can be formed by a usual vapor phase film forming method. For example, high-frequency magnetron sputtering,
The film can be formed by a sputtering method typified by facing target sputtering, ion beam sputtering, ECR sputtering, or the like, or by CVD or the like.

The metal magnetic thin film having the structural composition of the present invention can be formed in a low gas pressure atmosphere. For example, high frequency magnetron sputtering, DC sputtering,
The film can be formed by a sputtering method typified by facing target sputtering, ion beam sputtering, ECR sputtering and the like.

Specifically, an alloy target having a composition determined in consideration of a composition deviation from the composition of the metal magnetic thin film of the present invention is formed on a substrate by sputtering using an inert gas such as argon. Alternatively, part of the additive is pelletized, placed on the alloy target and sputtered at the same time,
Alternatively, a part of the additive may be introduced into the apparatus in a gas state, and the film may be formed by reactive sputtering.

Means for joining and joining a pair of magnetic core halves of the present invention include a normal ferrite head and M
Glass bonding using a bonding glass used in an IG head can be used. For example, if the softening point is 4
Bonding glass selected from the range of 60 ° C to 560 ° C,
In an inert gas atmosphere, heat treatment is performed at a temperature selected from the range of softening point to softening point + 40 ° C., and melting is performed in at least two places around a magnetic core to be bonded, and the magnetic core is joined by solidification.

As described above, according to the first embodiment, the metal magnetic thin film FM3 is formed only on the bonding surface S1, and the side surfaces S2,
Since it is not formed in S3, the ferrite F3A,
F3B can be prevented from cracking.

Therefore, it is possible to provide a magnetic head and a method of manufacturing the magnetic head which are excellent in corrosion resistance and input / output characteristics and can reduce the crack of the base material.

(Second Embodiment) A magnetic head 200 according to a second embodiment will be described.

FIGS. 4A and 4B are schematic diagrams of a magnetic head 200 according to the second embodiment. FIG. 4A is a view of the magnetic head 200 according to the second embodiment as viewed from the head end and the side that slides on the tape. FIG. 4B is a cross-sectional view of the magnetic head 200 as seen from the direction of arrow A2 shown in FIG. 4A. 4C and 4D are cross-sectional views of a modification of the magnetic head according to the second embodiment. In the magnetic head 200A shown in FIG. 4C, the winding windows 21 are formed on both of the pair of magnetic core halves MC4. Magnetic head 200 shown in FIG. 4D
In B, the winding window 21 is formed in the magnetic core half MC6 of the pair of magnetic core halves MC5 and MC6.

FIGS. 5A to 5D show, among the processing steps of the magnetic head 200 according to the second embodiment, those steps particularly relating to the second embodiment. FIG. 5E is a flowchart illustrating a method for manufacturing the magnetic head 200 according to the second embodiment.

A single crystal of MnZn ferrite similar to that of the first embodiment is processed into the shape shown in FIG. 5B, and after polishing the surface S21, the affected layer is removed. Alumina is formed as an underlayer UL1 for preventing oxygen diffusion (S201). Silicon oxide, aluminum nitride, silicon nitride, or a mixture thereof can be used as underlayer UL1 in the same manner as described in the first embodiment.

As shown in FIG. 5C, the underlayer UL1 (FIG.
A) A metal magnetic thin film FM3 is formed on (A) (S202).
The amount of nitrogen and oxygen is increased in the initial stage of film formation, and the average particle size near the interface with the underlayer UL1 is set to 5 nm or less.
After forming L2 (FIG. 4E) from 0.5 nm to 20 nm (preferably from 0.5 nm to 200 nm), the metal magnetic film F
When M3 is formed, more preferable effects can be obtained.

After forming a non-magnetic gap material (not shown) on the metal magnetic thin film FM3, as shown in FIG. 5D, the winding window 21 and the groove 22 for regulating the track width are processed (S203). , S204). As shown in FIGS. 4B and 4D, when manufacturing the magnetic core half MC5, the winding window 21 is not formed.

The winding window 21 can have the same shape as in the first embodiment. The non-magnetic material N3 is formed, butted against the other half of the magnetic core, and the bonding glass G3 is poured by heat treatment in an inert gas and bonded (S20).
5). Cutting and grinding into a desired shape (S206), FIG. 4A
To the magnetic heads 200 and 200 having the shapes shown in FIG.
The manufacture of A or 200B is completed.

As described above, according to the second embodiment, the metal magnetic thin film FM3 is formed only on the bonding surface S1, and the side surface S2,
Since it is not formed in S3, the ferrite F3A,
F3B can be prevented from cracking. For this reason,
It is possible to provide a magnetic head which is excellent in corrosion resistance and input / output characteristics and can reduce substrate cracking, and a method of manufacturing the magnetic head.

(Embodiment 3) FIG. 6 is a block diagram of a video 800 using the magnetic head 100 according to the present invention. The magnetic head 100 according to the present invention includes a cylinder 801.
Fixed to When recording and reproducing the video and audio signals, the cylinder driving unit 802 rotates the cylinder 801 at a constant speed. The magnetic tape drive 803 sends out and winds the magnetic tape 804 from one reel to the other at a constant speed. Head tape interface mechanism 80
5 winds the magnetic tape 804 obliquely around the cylinder 801.

When the cylinder 801 rotates, the magnetic head 100 scans the magnetic tape 804 at a constant period. At the time of recording, the magnetic head 100 converts the input electric signal into magnetic flux, and changes the magnetization state of the magnetic material on the magnetic tape 804 for recording. At the time of reproduction, the magnetic head 100 converts a magnetic flux leaking from the magnetic tape 804 into an electric signal.

(Embodiment 4) FIG. 7 is a block diagram of a movie 900 using the magnetic head 100 according to the present invention. The mechanism for recording and reproducing video and audio signals on the magnetic tape 804 by the magnetic head 100 is the same as that of the third embodiment. The movie 900 according to the fourth embodiment includes an optical system 901 that converts an image into an electric signal, a microphone 902 that converts audio into an electric signal, and a liquid crystal monitor 9 that displays an image.
03.

At the time of recording, the video and audio signals are transmitted to the magnetic head 1
00, the video signal is displayed on the liquid crystal monitor 903 at the same time. Magnetic head 1
00 is reproduced by the signal processing circuit 904.
Is displayed on the liquid crystal monitor 903 via the interface unit 905, and output to an external device (not shown) via the interface unit 905.

As described above, according to the fourth embodiment, it is possible to provide a movie using a magnetic head that is excellent in corrosion resistance and input / output characteristics and that can reduce base material cracking.

(Examples) The present invention will be described below in detail with reference to examples.

Example 1 FIGS. 9A to 9D for comparison
The magnetic head having the conventional head shape (with side film FM2B) shown in FIG. 1 and the magnetic head shown in Embodiment 1 (without side film) were prototyped under the common specifications described later and the conditions shown in Table 1, and recorded. The re-output, corrosion resistance, and ferrite cracking rate were evaluated.

In Table 1, the metallic magnetic thin films are denoted by symbols aa to ag,
Indicated by ba to bg. Table 2 summarizes the details of the composition of the metal magnetic thin film indicated by each symbol. The corrosion resistance was evaluated based on the degree of deterioration by comparing the recording / reproducing output before and after subjecting the prepared magnetic head to the salt spray test. The ferrite cracking rate was evaluated based on the rate of failure due to ferrite cracking in the prepared magnetic head.

[0085]

[Table 1]

[0086]

[Table 2] The evaluation is No. When it is inferior to the conventional magnetic head shown by No. 1, it is shown by x, and No. When the magnetic head is equivalent to the conventional magnetic head indicated by No. 1, When the magnetic head is improved over the conventional magnetic head shown by No. 1,
When the magnetic head is significantly improved over the conventional magnetic head indicated by 1, it is indicated by a double circle. The evaluation of the crack rate is shown by numerical values. Regarding the recording / reproducing output and the corrosion resistance, “improved” means an improvement of 0 to +2 dB, and “notably improved” means an improvement of +2 dB or more.

The metal magnetic thin film includes magnetic crystal grains, and the magnetic crystal grains include a substantially needle-like body, a substantially columnar body, or a multi-branched body composed of a combination thereof. DS and dL in Table 2 are the average dS of the crystal size in the lateral direction of the magnetic crystal grains.
And the average dL of the crystal size in the longitudinal direction.

As shown in Table 2, the average dL of the crystal size in the longitudinal direction exceeds 50 nm. Preferably, the average dL of the longitudinal crystal size is greater than 60 nm and 5 d.
Less than 000 nm. The average dS of the crystal size in the lateral direction of the magnetic crystal grains is larger than 5 nm and smaller than 60 nm.

The metal magnetic thin films aa to ag are (M _a X
_b Z _c ) has a composition represented by _{100-d Ad} . M is Fe, C
o, at least one type of magnetic metal element selected from Ni, X includes at least one type of element selected from Si, Al, Ga, and Ge; Z: group IVa, group Va, A
A includes at least one element selected from l, Ga and Cr, and A includes at least one element of O and N.

A, b, c and d are as follows: 0.1 ≦ b ≦ 26, 0.1 ≦ c ≦ 5, a + b + c = 10
It is a numerical value satisfying the relational expression of 0 and 1 ≦ d ≦ 10.

The metal magnetic films ac to ag are made of (Fe _a Si _b A
has a composition represented by _{l c T d) 100-e} N e, T contains at least one element selected from Ti and Ta.

A, b, c, d and e are as follows: 10 ≦ b ≦ 23, 0.1 ≦ d ≦ 5, 0.1 ≦ c + d ≦
8, a + b + c + d = 100 and a numerical value satisfying the relational expression of 1 ≦ e ≦ 10.

The contents of the above-mentioned common specifications are shown below. Head specifications Track width: 17 μm Gap depth: 12.5 μm Gap length: 0.2 μm Number of windings: 16 Magnetic film thickness: 4.5 μm Underlayer: alumina 2 nm C / N characteristics: Tape relative speed = 10.2 m / s Recording / reproducing frequency = 20.9 MHz Tape: MP tape Head shape of Embodiment 1 shown in Table 1 (no side film shape)
Is changed to the head shape of the second embodiment, the same tendency as in Table 1 can be obtained.

Also, when Si in Table 2 was changed to Ge,
The same tendency is obtained. Even when Al is changed to Ga, the same tendency as in Table 1 can be obtained. The same tendency as in Table 1 can be obtained even when Si of the metal magnetic thin films aa and ab shown in Examples in Table 2 is changed to Al.

In Table 2, Ta is represented by Ti, Zr, Hf,
The same tendency as in Table 1 can be obtained by changing to V, Nb, and Cr.

The tendency similar to that shown in Table 1 means that, for example, the numerical values of the improved recording / reproduction are not completely the same,
The evaluation of the degree of improvement x to ◎ means that the same result is obtained.

From the above results, No. 11-No. 21
The recording / reproducing output, the corrosion resistance, and the ferrite cracking rate were improved with the magnetic head indicated by. Also, in particular, No. 14-N
o. When the magnetic head indicated by No. 21 was used, more favorable results were obtained in terms of corrosion resistance. In addition, No. 1 having a winding window having a shape of θ = 90 °. 20 and no. In the case of the magnetic head indicated by 21, a more preferable result was obtained in recording / reproducing output.

When observing the structure of the metal magnetic thin film, any of the magnetic heads of the above embodiments has a substantially needle-like body, a substantially columnar body, or a multi-branched body composed of a combination thereof.
The average volume Va and the average surface area Sa of the magnetic crystal grains are Sa
> 4.84Va ^2/3 was confirmed.

(Example 2) The same evaluation as in Example 1 was carried out on a magnetic head experimentally manufactured under the following common specifications and the conditions shown in Table 3. In Table 3, the metal magnetic thin films are denoted by symbols ca to
Indicated by cg and da to dg. Table 4 shows details of the metal magnetic thin films in Table 3.

[0100]

[Table 3]

[0101]

[Table 4] As in Table 1, the evaluation was No. When it is inferior to the conventional magnetic head shown by No. 1, it is shown by x, and No. When the magnetic head is equivalent to the conventional magnetic head indicated by No. 1, When it is better than the conventional magnetic head indicated by 1,
And No. When the magnetic head is markedly improved over the conventional magnetic head indicated by 51, it is indicated by a double circle. The evaluation of the crack rate is shown by numerical values. Regarding the recording / reproducing output and the corrosion resistance, “improved” means an improvement of 0 to +2 dB, and “notably improved” means an improvement of +2 dB or more.

The metal magnetic thin films ca to cg are (M _a X 1 _b Z
_1c ) It has a composition represented by _{100-d Ad} . M is Fe, C
o includes at least one magnetic metal element selected from Ni, X includes at least one element selected from Si and Ge, and Z1 includes at least one element selected from IVa group, Va group and Cr. A includes at least one element of O and N.

A, b, c and d are: 0.1 ≦ b ≦ 23, 0.1 ≦ c ≦ 8, a + b + c = 10
The metallic magnetic thin films cc and ce satisfying the relational expression of 0 and 1 ≦ d ≦ 10 are represented by (Fe _a Si _b Al _c T _id )
Has a composition represented by _{100-ef N e O f,} a, b, c,
d, e and f are 10 ≦ b ≦ 23, 0.1 ≦ d ≦ 5, 0.1 ≦ c + d ≦
8, a + b + c + d = 100, a numerical value satisfying the relational expressions of 1 ≦ e + f ≦ 10 and 0.1 ≦ f ≦ 5.

The contents of the above-mentioned common specifications are shown below. Head specifications Track width: 17 μm Gap depth: 12.5 μm Gap length: 0.2 μm Number of windings: 16 Magnetic film thickness: 4.5 μm Underlayer: alumina 2 nm C / N characteristics: Tape relative speed = 10.2 m / s Recording / reproducing frequency = 20.9 MHz Tape: MP tape Head shape of Embodiment 1 shown in Table 3 (no side film shape)
Is changed to the head shape of the second embodiment, the same tendency as in Table 3 can be obtained.

Further, when Si in Table 4 is changed to Ge,
The same tendency is obtained. Ga, Zr, H for Al and Ti
The same tendency as in Table 3 can be obtained by changing the element selected from f, V, Ta, Nb, and Cr.

As described above in the first embodiment, the similar tendency means, for example, that the improved numerical value of the recording / reproducing output is not completely the same, but the evaluation of the degree of improvement x to ◎ has the same result. It means that it can be obtained. From the above results, the effect of the present invention was confirmed.

When observing the structure of the metal magnetic thin film, any of the magnetic heads of the above embodiments has a substantially needle-like body, a substantially columnar body, or a multi-branched body composed of a combination thereof.
The average volume Va and the average surface area Sa of the magnetic crystal grains are Sa
> 4.84Va ^2/3 was confirmed.

(Embodiment 3) Embodiment 3 of the present invention will be described below.

The magnetic head of the first embodiment was prototyped under the common specifications described below and under the conditions shown in Table 5, and the recording / reproducing output and the ripple were evaluated. In Table 5, the metal magnetic thin films are indicated by symbols. Each code corresponds to the code given to the metal magnetic thin film shown in Tables 2 and 4.

[Table 5]

[Table 6]

In Table 5, the underlayer 1 means the underlayer on the side in contact with the ferrite, and the underlayer 2 means the underlayer on the side in contact with the metal magnetic film. N
o. 73, no. 75, no. 77, No. 79, N
o. 81, no. 83, no. 85 and No. Regarding the evaluation of the magnetic head having the metal magnetic thin film ac indicated by reference numeral 87, N
o. Compared with the magnetic head indicated by No. 71, the equivalent time is indicated by Δ, and When the magnetic head is improved over the magnetic head indicated by No. 71, it is indicated by ○, and When the magnetic head is markedly improved over the magnetic head indicated by 71, it is indicated by a double circle. The evaluation of the ripple is indicated by numerical values. Regarding recording / playback and corrosion resistance, it is 0 to + 3d
B means an improvement, and significant improvement means an improvement of +3 dB or more.

Table 6 summarizes the film forming conditions for the underlayer 2 in Table 5. The target was formed using an alloy target for a metal magnetic thin film.

Common specifications are as follows: Head specifications Track width: 17 μm Gap depth: 12.5 μm Gap length: 0.2 μm Number of windings: 16 Magnetic film thickness: 4.5 μm C / N characteristics: Tape relative speed = 10 .2 m / s recording / reproducing frequency = 20.9 MHz Tape: MP tape The same tendency was obtained when Al in Table 5 was changed to Si.
Even when nitrogen in Table 6 was changed to oxygen, the same tendency as in Table 5 was obtained. The metal magnetic thin films ac and cc in Table 5 are shown as metal magnetic thin films aa-ab, ad-ag,
The same tendency was obtained even when the metal magnetic thin films ca to cb and cd to cg were changed.

As described above in the first embodiment, the similar tendency means, for example, that the numerical value of the recording / reproducing output is not completely the same, but the evaluation of the degree of improvement x to ◎ has the same result. It means that it can be obtained. From the above, the effect of the present invention was confirmed.

When observing the structure of the metal magnetic thin film, any of the magnetic heads of the above embodiments has a substantially needle-like body, a substantially columnar body, or a multi-branched body composed of a combination thereof.
The average volume Va and the average surface area Sa of the magnetic crystal grains are Sa
> 4.84Va ^2/3 was confirmed.

[0115]

As described above, according to the present invention, there are provided a magnetic head, a method of manufacturing a magnetic head, a video and a magnetic head using the magnetic head, which are excellent in corrosion resistance and input / output characteristics and can reduce substrate cracking. The used movie can be provided.

According to the present invention, the material characteristics of the metal magnetic thin film and the structure of the MIG head can be mutually optimized.

[Brief description of the drawings]

FIG. 1A is a schematic view of a magnetic head according to a first embodiment of the present invention as viewed from a sliding surface.

FIG. 1B is a schematic sectional view of the magnetic head according to the first embodiment of the present invention.

FIG. 1C is a schematic sectional view of a modification of the magnetic head according to the first embodiment of the present invention.

FIG. 1D is a schematic sectional view of another modification of the magnetic head according to the first embodiment of the present invention.

FIG. 1E is a schematic view of a magnetic head including a second underlayer according to the first embodiment of the present invention, as viewed from a sliding surface.

FIG. 2A is a schematic diagram of a magnetic head manufacturing process according to the first embodiment of the present invention.

FIG. 2B is a schematic view of the magnetic head manufacturing process according to the first embodiment of the present invention.

FIG. 2C is a schematic view of the magnetic head manufacturing process according to the first embodiment of the present invention.

FIG. 2D is a schematic view of the magnetic head manufacturing process according to the first embodiment of the present invention;

FIG. 3A is an enlarged view of a winding groove shape of the magnetic head according to the first embodiment of the present invention.

FIG. 3B is an enlarged view of a modification of the winding groove shape of the magnetic head according to the first embodiment of the present invention.

FIG. 3C is a flowchart showing a method of manufacturing the magnetic head according to the first embodiment of the present invention.

FIG. 4A is a schematic view of a magnetic head according to a second embodiment of the present invention as viewed from a sliding surface.

FIG. 4B is a schematic sectional view of the magnetic head according to the second embodiment of the present invention.

FIG. 4C is a schematic sectional view of a modification of the magnetic head according to the second embodiment of the present invention.

FIG. 4D is a schematic sectional view of another modification of the magnetic head according to the second embodiment of the present invention.

FIG. 4E is a schematic view of a magnetic head including a second underlayer according to the second embodiment of the present invention, as viewed from a sliding surface.

FIG. 5A is a schematic view of a magnetic head manufacturing process according to the second embodiment of the present invention.

FIG. 5B is a schematic view of the magnetic head manufacturing process according to the second embodiment of the present invention.

FIG. 5C is a schematic view of the magnetic head manufacturing process according to the second embodiment of the present invention.

FIG. 5D is a schematic view of the magnetic head manufacturing process according to the second embodiment of the present invention.

FIG. 5E is a flowchart showing a method for manufacturing a magnetic head according to the second embodiment of the present invention.

FIG. 6 is a block diagram of a video using the magnetic head according to the present invention.

FIG. 7 is a block diagram of a movie using the magnetic head according to the present invention.

FIG. 8 is a schematic view of a conventional ferrite head.

FIG. 9A is a schematic view of a conventional MIG head.

FIG. 9B is a plan view of a magnetic core half in a conventional MIG head.

FIG. 9C is a perspective view of a magnetic core half in a conventional MIG head.

FIG. 9D is a sectional view of a magnetic core half in a conventional MIG head.

[Explanation of symbols]

 G1, G2, G3 Bonded glass N1, N2, N3 Non-magnetic gap F3A, F3B, F3C Ferrite FM2, FM3 Magnetic metal thin film S1 Bonded surface S1A First side surface S1B Bottom surface S1C Second side surface S1D Third side surface

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Hiroshi Sakama 1006 Kazuma Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. 72) Inventor Eisai Sawai 1006 Kadoma Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd.

Claims (28)

[Claims] 1. A pair of magnetic core halves, comprising: a pair of magnetic core halves; and a non-magnetic material formed between the pair of magnetic core halves and joining the pair of magnetic core halves. A magnetic thin film formed between each of the base film and the non-magnetic material, an oxide magnetic body, at least one underlayer formed on each of the oxide magnetic bodies, Wherein the metal magnetic thin film is a magnetic thin film including a magnetic film having a magnetic crystal grain as a mother phase having an average volume Va and an average surface area Sa satisfying Sa> 4.84 Va ^2/3. A magnetic head in which a winding window is formed in at least one of the halves, and the metal magnetic thin film is formed so that the oxide magnetic material is not broken by undesired internal stress generated in the metal magnetic thin film. 2. The magnetic head according to claim 1, wherein the metal magnetic thin film includes magnetic crystal grains, and the magnetic crystal grains have an average maximum length exceeding 50 nm. 3. The magnetic crystal grain includes a substantially needle-like body, a substantially columnar body, or a multi-branched body made of a combination thereof, and an average crystal size of the substantially needle-like body or the substantially columnar body in a lateral direction. 3. The magnetic head according to claim 2, wherein is larger than 5 nm and smaller than 60 nm. 4. An average dS of the crystal size in the lateral direction and an average dL of the crystal size in the longitudinal direction of the magnetic crystal grains are 5 or more.
nm <dS <60 nm, 60 nm <dL <5000 nm
The magnetic head according to claim 2, which satisfies the following. 5. The metal magnetic thin film according to claim 1, wherein (M _a X _b Z _c )
Has a composition represented by _100-d A d, M is Fe, Co, comprising at least one magnetic metal element selected from Ni, at least one element X is Si, Al, selected from Ga and Ge Z contains at least one element selected from the group IVa, Va, Al, Ga and Cr; A contains at least one element of O and N; and a, b, c and d are 0.1 ≦ b ≦ 26, 0.1 ≦ c ≦ 5, a + b + c = 10
A numerical value satisfying the relational expression of 0 and 1 ≦ d ≦ 10,
The magnetic head according to claim 1. 6. Each of the pair of magnetic core halves includes:
A joining surface joined to the other magnetic core half via the nonmagnetic material, a sliding surface sliding on the recording medium, and a side surface continuous with the joining surface and the sliding surface, The magnetic head according to claim 1, wherein the metal magnetic thin film is not formed on the side surface. 7. The method according to claim 7, wherein the metal magnetic thin film comprises (Fe _a Si _b Al
_c T _d) has a composition represented by _100-e N _e, T contains at least one element selected from Ti and Ta, a, b, c, d and e, 10 ≦ b ≦ 23, 0.1 ≦ d ≦ 5, 0.1 ≦ c + d ≦
8. The magnetic head according to claim 6, wherein the numerical values satisfy the relational expressions of a + b + c + d = 100 and 1 ≦ e ≦ 10. 8. The magnetic head according to claim 5, wherein Z contains at least one element selected from the group consisting of IVa group, Va group and Cr. 9. X contains at least one element selected from Si and Ge, and a, b, c and d are: 0.1 ≦ b ≦ 23, 0.1 ≦ c ≦ 8, a + b + c = 10
A numerical value satisfying the relational expression of 0 and 1 ≦ d ≦ 10,
The magnetic head according to claim 5. 10. The method according to claim 10, wherein the metal magnetic thin film comprises (Fe _a Si _b A
_{l c Ti d) 100-ef} N e O has a composition represented by _{f, a, b, c,} d, e and f, 10 ≦ b ≦ 23,0.1 ≦ d ≦ 5,0.1 ≤c + d≤
8, a + b + c + d = 100, 1 ≦ e + f ≦ 10 and 0.
The magnetic head according to claim 9, wherein the numerical value satisfies a relational expression of 1 ≦ f ≦ 5. 11. The method according to claim 11, wherein the base film is made of an oxide of Al or Si;
The magnetic head according to claim 1, wherein the magnetic head comprises any of a nitride and a mixture thereof. 12. The underlayer includes an underlayer A in contact with the magnetic core half, and an underlayer B in contact with the metal magnetic thin film, wherein the underlayer A is an oxide or nitride of Al or Si. Wherein the underlayer B contains a main constituent element of the metal magnetic thin film and more oxygen or nitrogen than the metal magnetic thin film, the underlayer B contains crystal grains, The magnetic head according to claim 11, wherein the average grain size of the crystal grains is 5 nm or less at least near an interface where the underlayer B contacts the underlayer A. 13. 13. The underlayer A contains an Al oxide, the thickness of the underlayer A is 0.5 nm or more and 4 nm or less, and the thickness of the underlayer B is 0.5 nm or more and 200 nm or less. The magnetic head according to claim 12. 14. The oxide magnetic material includes a single crystal ferrite, and the single crystal ferrite includes a bonding surface corresponding to a surface where the pair of magnetic core halves are bonded via the nonmagnetic material and the pair of magnetic cores. The magnetic head according to claim 1, wherein the magnetic core half has a sliding surface corresponding to a surface that slides on the recording medium. 15. The single crystal ferrite contains Amol%.
Fe ₂ O ₃ , B mol% of MnO, and C mol% of Z
The MnZn single crystal ferrite composed of nO and A, B and C, wherein A, B and C are numerical values satisfying a relational expression of 52 ≦ A ≦ 57, 5 ≦ B ≦ 29, and 16 ≦ C ≦ 21. The magnetic head as described. 16. The magnetic core half includes a joining surface corresponding to a surface where the pair of magnetic core halves are joined via the non-magnetic material, and the pair of magnetic core halves sliding with a recording medium. The at least one magnetic core half has a bottom surface forming the winding window and a first side surface forming the winding window. A side surface is formed from the bottom surface toward the joining surface, the first side surface is formed on the sliding surface side with respect to the bottom surface, and an angle formed by the first side surface and the joining surface is 22 2. The magnetic head according to claim 1, wherein the angle is not less than 0.5 ° and not more than 70 °. 17. The method according to claim 16, wherein the winding window is formed only on one of the magnetic core halves, and an angle formed between the first side surface and the joining surface is 45 ° or more and 70 ° or less. The magnetic head as described. 18. The winding window is formed on both of the magnetic core halves, and an angle between the first side surface and the joining surface is 22.5 ° or more and 50 ° or less. 3. The magnetic head according to claim 1. 19. The first side surface has a second side surface formed adjacent to the bonding surface and a third side surface formed adjacent to the bottom surface, wherein the second side surface and the bonding surface Is not less than 22.5 ° and not more than 70 °, and the angle formed by the third side surface and the bottom surface is substantially 90 °.
The magnetic head according to claim 16, wherein the angle is °. 20. The magnetic recording medium according to claim 19, wherein the winding window is formed only on one of the magnetic core halves, and an angle between the second side surface and the joining surface is not less than 45 ° and not more than 70 °. The magnetic head as described. 21. The winding window is formed on both of the magnetic core halves, and an angle formed by the second side surface and the joining surface is 22.5 ° or more and 50 ° or less. 3. The magnetic head according to claim 1. 22. The metal magnetic thin film according to claim 19, wherein (Fe _a Si _b A
l _c Ti _d) has a composition represented by _{100-ef N e O f,} a, b, c, d, e and f, 10 ≦ b ≦ 13,1 ≦ c ≦ 3,1 ≦ d ≦ 3 , A + b + c
2. The magnetic head according to claim 1, wherein the numerical value satisfies the following relational expression: + d = 100, 4 ≦ e + f ≦ 10, 0.1 ≦ f ≦ 2. 23. The oxide magnetic body has a bonding surface corresponding to a surface where the pair of magnetic core halves are bonded via the non-magnetic material, and a side surface continuous with the bonding surface. 2. The magnetic head according to claim 1, wherein an angle between a surface and the side surface is 70 ° or more and 90 ° or less, and wherein the metal magnetic thin film is formed only on the joint surface of the joint surface and the side surface. . 24. A semiconductor device comprising: a pair of magnetic core halves; and a non-magnetic material formed between the pair of magnetic core halves and joining the pair of magnetic core halves. Each of them includes an oxide magnetic body, at least one underlayer formed on each of the oxide magnetic bodies, and a metal magnetic thin film formed between each of the underlayers and the nonmagnetic material. Wherein the metal magnetic thin film is a magnetic thin film including a magnetic film having a magnetic crystal grain as a mother phase having an average volume Va and an average surface area Sa satisfying Sa> 4.84 Va ^2/3. A winding window is formed in at least one of the halves, and the metal magnetic thin film is formed so that the oxide magnetic body is not broken by undesired internal stress generated in the metal magnetic thin film. Is
(M _a X1 _b Z1 _c) has a composition represented by _100-d A _d, wherein the metal magnetic thin film includes a magnetic crystal grains, the magnetic crystal grains substantially needles, substantially columnar body or these The magnetic crystal grains have an average dS of crystal size in the short direction and an average dL of crystal size in the long direction of 5 nm <dS <60 nm and 60 nm <dL <50.
M includes at least one magnetic metal element selected from Fe, Co, and Ni, and X1 denotes Si, A
l, at least one element selected from Ga and Ge, Z1 includes at least one element selected from the group IVa, Va, Al, Ga and Cr, and A is at least one element of O and N A, b, c and d
Are 0.1 ≦ b ≦ 26, 0.1 ≦ c ≦ 5, a + b + c =
A method of manufacturing a magnetic head, wherein the value satisfies a relational expression of 100 and 1 ≦ d ≦ 10, wherein a winding window is formed on at least one of the pair of substantially flat oxide magnetic bodies. An underlayer forming step of forming at least one underlayer on the oxide magnetic body; and using a solid material comprising a main constituent element of the metal magnetic thin film on the underlayer, using oxygen and nitrogen. A metal magnetic thin film forming step of forming the metal magnetic thin film by a gas phase method in an atmosphere including at least one of the metal magnetic thin films so that a width of the metal magnetic thin film corresponds to a track width;
A magnetic field comprising: a track processing step of forming a groove in the oxide magnetic body on which the metal magnetic thin film is formed; and a joining step of joining the pair of oxide magnetic bodies by abutting via the nonmagnetic material. Head manufacturing method. 25. The method according to claim 24, wherein each of the steps is performed in the order of the winding window forming step, the base film forming step, the metal magnetic thin film forming step, the track processing step, and the joining step. Of manufacturing a magnetic head. 26. The method according to claim 24, wherein each of the steps is performed in the order of the base film forming step, the metal magnetic thin film forming step, the winding window forming step, the track processing step, and the joining step. Of manufacturing a magnetic head. 27. A cylinder on which the magnetic head according to claim 1 is mounted; a head tape interface mechanism for winding a magnetic tape around the cylinder; a cylinder driving unit for driving the cylinder; and the magnetic coil wound around the cylinder. Video with a magnetic tape drive for driving the tape. 28. A cylinder on which the magnetic head according to claim 1 is mounted; a head tape interface mechanism for winding a magnetic tape around the cylinder; a cylinder drive unit for driving the cylinder; and the magnet wound around the cylinder. A movie comprising: a magnetic tape driving unit that drives a tape; an optical system that converts a video signal into an electric signal; and a signal processing circuit that outputs the electric signal converted by the optical system to the magnetic head.