JP2001005165A - Reticle identification device and reticle used for the same - Google Patents

Abstract

(57) [Problem] To provide a reticle identification device capable of accurately identifying a reticle regardless of the material of the reticle, and a reticle used therefor. SOLUTION: A reticle 102 conveyed to a reticle table is suction-held by a plurality of suction units 110 provided on the reticle table. Also, a pair of reticle alignment optical systems 111 are provided on the side of the reticle table.
Are provided facing each other. Further, a lens 112 of a stepper is disposed above the reticle table. A barcode reader 109 is installed near the reticle table so that the detection unit faces the end surface of the reticle 102 placed on the reticle table.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to an apparatus for identifying a reticle used in a photolithography step of a semiconductor device manufacturing process and a reticle used therefor.

[0002]

2. Description of the Related Art Conventionally, in a semiconductor device manufacturing process, a photolithography step using a reticle or a photomask is performed, and patterning is performed on an object to be processed such as a semiconductor wafer. In this photolithography process, in order to identify a reticle to be used, for example, a bar code is provided on the reticle surface, and the bar code is read by a bar code reader.

An apparatus capable of identifying a reticle will be described with reference to FIG. FIG. 3 is a plan view showing a schematic configuration of a conventional reticle identification device. In the drawing, reference numeral 1 denotes a reticle case that houses at least one reticle. This reticle case 1 is formed larger than a substantially flat rectangular reticle. Note that this reticle 2
A bar code 7 containing reticle identification information
Is provided. 2a is a reticle case 1.
2b shows a reticle after positioning, and 2c shows a reticle after being placed on a reticle table.

In the apparatus, the reticle 2 accommodated in the reticle case 1 is moved to a reticle table where the reticle table is used, or from the reticle table to the reticle case 1.
A reticle transport arm 6 that can hold the reticle is provided in the transport system for transporting the reticle to the reticle.

The reticle transport arm 6 transports the reticle 2 from the reticle case 1 via the transport path 3 to the reticle positioning section 4, and the reticle 2 positioned on the reticle table via the reticle positioning section 4 via the transport path 8.
Is transported. In the reticle positioning section 4,
A drive path 5 substantially perpendicular to the transport path 3 from the reticle case 1 to the reticle positioning section 4 is provided, and the reticle 2 can be moved along the drive path 5.

[0006] A bar code reader 9 is provided between the reticle positioning section 4 and the reticle table.
The bar code reader 9 is configured to be movable by the bar code reader drive system 10 substantially perpendicularly to the reticle transport direction (arrow direction).

In the reticle discriminating apparatus having the above configuration, first, the reticle transfer arm 6 moves to the reticle case 1 through the transfer path 3, and grasps and takes out the reticle 2 housed in the reticle case 1. The reticle transport arm 6 moves to the reticle positioning section 4 through the transport path 3 while holding the reticle 2, and releases the reticle 2.

After the reticle 2 is moved and positioned along the drive path 5 by the reticle positioning section 4, the reticle 2 is again gripped by the reticle transport arm 6. Next, the reticle transport arm 6 transports the reticle 2 to the reticle table, which is the reticle use position, through the transport path 8 while holding the positioned reticle 2, and places the reticle 2 on the reticle table.

During the transfer from the reticle positioning section 4 to the reticle table, the bar code 7 formed on the reticle surface is read. Specifically, the reticle 2 gripped by the reticle transport arm 6 is
When the bar code reader 9 reaches a position intersecting the driving direction of the bar code 7, the bar code reader 9 is moved above the reticle 2 by driving of the bar code reader driving system 10 and further lowered to a position where the bar code 7 can be read. Read. Then, after reading the barcode 7 with the barcode reader 9, the barcode reader 9 returns to the original position by driving the barcode reader drive system 10.

In this manner, the reticle used in the photolithography process is identified.

[0011]

However, in the apparatus having the above structure, a bar code is provided on the surface of the reticle 2 and the bar code reader 9 is moved by the bar code reader 9 while the reticle 2 is being conveyed along the conveyance path 8. Transport route 8
, The bar code 7 is read from above the reticle 2.

In the method in which the barcode reader 9 moves and reads the barcode 7 in this manner, if the positioning accuracy of the barcode reader 9 is poor, the barcode 7 cannot be read accurately, and the reticle is identified. You will not be able to do it.

In a conventional reticle, a bar code is provided on the reticle surface. As a material of the reticle,
Various materials are used, and the reflectance differs for each material. Therefore, if the same barcode is provided on a reticle made of a different material, the barcode reader may read the barcode differently. As a result, the barcode cannot be read accurately and the reticle cannot be identified.

SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a reticle identification device capable of accurately identifying a reticle regardless of the material of the reticle, and a reticle used therefor.

[0015]

Means for Solving the Problems In order to solve the above problems, the present invention has taken the following means.

The present invention is an apparatus for identifying a reticle used in a photolithography process, wherein the reticle has at least one reticle having a main surface and an end surface and a display portion including identification information on the end surface. Accommodation means, a reticle transport means for taking out the reticle from the reticle accommodation means and transporting the reticle to a reticle use position, and identification information acquisition means for acquiring the identification information from the display unit on the end face of the reticle, A reticle identification device is provided.

According to this configuration, the reticle is identified using the display unit provided on the reticle end face. When the display unit is provided on the reticle end face, the influence of the characteristics (reflectance, etc.) of the material constituting the reticle is smaller than when the display unit is provided on the reticle surface. Therefore, the reticle can be accurately identified regardless of the material constituting the reticle.

In the reticle identification apparatus according to the present invention, it is preferable that the display section is constituted by a bar code, and the identification information acquiring means is a bar code reader.

In the reticle identification device of the present invention, it is preferable that the position of the barcode reader is fixed. According to this configuration, the barcode can be read accurately without a problem such as a displacement due to the movement of the barcode reader. As a result, the reticle can be accurately identified.

The present invention also relates to a method for identifying a reticle used in a photolithography process, wherein a reticle having a main surface and an end surface and having a display portion including identification information on the end surface is moved to a reticle use position. A reticle identification method, comprising: transporting the reticle; and acquiring the identification information from the display unit on an end surface of the reticle during transportation of the reticle.

According to this method, the reticle is identified by using the display provided on the reticle end face. When the display unit is provided on the reticle end face, the influence of the characteristics (reflectance, etc.) of the material constituting the reticle is smaller than when the display unit is provided on the reticle surface. Therefore, the reticle can be accurately identified regardless of the material constituting the reticle.

Further, the present invention relates to a reticle used in a photolithography step, wherein the reticle has a main surface and an end surface, and has a substantially flat shape, and a reticle formed on the end surface of the reticle body. And a display unit including the identification information of (1).

According to this configuration, the display section is provided on the end face of the reticle main body. When the display unit is provided on the reticle end face, the influence of the characteristics (reflectance, etc.) of the material constituting the reticle is smaller than when the display unit is provided on the reticle surface. Therefore, regardless of the material that makes up the reticle,
Reticles can be accurately identified.

In the reticle according to the present invention, it is preferable that the display section is constituted by a bar code.

[0025]

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings.

FIG. 1 is a plan view showing a schematic configuration of a reticle identification device according to one embodiment of the present invention. FIG. 2 is an enlarged view showing a configuration of a reticle identification unit of the reticle identification device shown in FIG.

In the drawing, reference numeral 101 denotes a reticle case for housing at least one reticle 102. The reticle 102 has a main surface and an end surface, and has a substantially flat rectangular shape. The reticle case 101 is formed larger than the reticle.

Note that on the end face of the reticle 102,
Bar code 10 which is a display unit including reticle identification information
7 are provided. In the figure, reference numeral 102a denotes a reticle in the reticle case 101, 102b denotes a reticle after positioning, and 102c denotes a reticle after being placed on a reticle table.

Further, a reticle case 101 is provided in the apparatus.
Is provided with a transport system for transporting the reticle 102 accommodated in the reticle from the reticle table to the reticle table where the reticle table is used, or from the reticle table to the reticle case 101. An arm 106 is provided.

The reticle transport arm 106 transports the reticle 102 from the reticle case 101 via the transport path 103 to the reticle positioning section 104, and transports the reticle 102 positioned on the reticle table from the reticle positioning section 104 via the transport path 108. I do. In addition,
In the reticle positioning unit 104, the transport path 1 from the reticle case 101 to the reticle positioning unit 104
A drive path 105 substantially perpendicular to the drive path 03 is provided, and the reticle 102 can be moved along the drive path 105.

A bar code reader 109 is provided near the reticle table. The position of the barcode reader 109 is fixed such that the detection unit faces the end surface of the reticle placed on the reticle table.

That is, the reticle table has a configuration as shown in FIG. The reticle 102 transported to the reticle table is suction-held by a plurality of suction units 110 provided on the reticle table. Further, a pair of reticle alignment optical systems 111 are provided on the side of the reticle table so as to face each other. Further, a lens 112 of a stepper is disposed above the reticle table.

A bar code reader 109 is provided near the reticle table so that the detection unit is directed to the end face of the reticle 102 placed on the reticle table.

In the reticle identification device having the above configuration, first, the reticle transport arm 106 is
The reticle 102 is moved to the reticle case 101 through 3 and the reticle 102 accommodated in the reticle case 101 is grasped and taken out. The reticle transport arm 106 moves to the reticle positioning unit 104 through the transport path 103 while holding the reticle 102, and releases the reticle 102.

After the reticle 102 is moved along the drive path 105 and positioned by the reticle positioning unit 104, the reticle is again gripped by the reticle transport arm 106. Next, the reticle transport arm 106 transports the reticle 102 to the reticle table, which is the reticle use position, through the transport path 108 while holding the reticle 102 positioned, and places the reticle 102 on the reticle table.
Is placed.

At this time, the reticle 102 is suction-held by the suction section 110 on the reticle table. When the reticle 102 is placed on the reticle table, the detection unit of the barcode reader 109 is inevitably directed to the barcode 107 provided on the end surface of the reticle 102. And the barcode reader 10
9 reads the barcode 107 provided on the reticle end face.

Thus, the reticle used in the photolithography process is identified.

According to the above apparatus, the reticle is identified using the bar code provided on the reticle end face. When a barcode is provided on the reticle end surface, the influence of the characteristics (reflectance, etc.) of the material constituting the reticle is smaller than when a barcode is provided on the reticle surface. Therefore, the reticle can be accurately identified regardless of the material constituting the reticle.

Further, in the above apparatus, since the position of the bar code reader is fixed, no reading error occurs due to the displacement of the bar code reader. Therefore, the reticle can be accurately identified.

Further, since the barcode reader 109 is located on the side of the reticle table, the reticle 102
And the stepper lens 112 is not blocked.
Therefore, after the reticle 102 is conveyed to the reticle table, the post-processing can be started smoothly.

Further, in the apparatus of the above embodiment, unlike the conventional apparatus, it is not necessary to stop the conveyance and read the barcode during the conveyance from the reticle positioning unit to the reticle table. Therefore, the reticle can be transported without stopping from the reticle positioning section 4 to the reticle table. As a result, the photolithography process can be performed efficiently.

The present invention is not limited to the above embodiment, but can be implemented with various modifications. For example, the technical idea of the present invention can be applied to all devices used in a process of reading a display unit including identification information.

[0043]

As described above, in the present invention,
The reticle is identified using the display unit provided on the reticle end face. When the display unit is provided on the reticle end face, the influence of the characteristics (reflectance, etc.) of the material constituting the reticle is smaller than when the display unit is provided on the reticle surface. Therefore, the reticle can be accurately identified regardless of the material constituting the reticle.

[Brief description of the drawings]

FIG. 1 is a plan view showing a schematic configuration of a reticle identification device according to an embodiment of the present invention.

FIG. 2 is an enlarged view showing a configuration of a reticle identification unit of the reticle identification device shown in FIG.

FIG. 3 is a plan view showing a schematic configuration of a conventional reticle identification device.

[Description of Signs] 101: reticle case, 102a to 102c: reticle, 103, 105, 108: transport path, 104: reticle positioning unit, 106: reticle transport arm, 107
Reticle barcode, 109 reticle barcode reader, 110 suction unit, 111 reticle alignment optical system, 112 lens.

Claims (6)

[Claims] 1. An apparatus for identifying a reticle used in a photolithography process, comprising: a reticle accommodating means for accommodating at least one reticle having a main surface and an end surface, and having a display portion including identification information on the end surface. A reticle transport unit that takes out the reticle from the reticle storage unit and transports the reticle to a reticle use position; and an identification information acquisition unit that acquires the identification information from the display unit on an end surface of the reticle. A reticle identification device, comprising: 2. The reticle identification device according to claim 1, wherein the display unit is constituted by a barcode, and the identification information acquisition unit is a barcode reader. 3. The reticle identification device according to claim 1, wherein the position of the barcode reader is fixed. 4. A method for identifying a reticle used in a photolithography step, comprising: transporting a reticle having a main surface and an end surface and a display portion including identification information on the end surface to a reticle use position. Acquiring the identification information from the display unit on the end face of the reticle while the reticle is being transported. 5. A reticle used in a photolithography process, comprising: a reticle main body having a main surface and an end surface, and having a substantially flat shape; and a reticle formed on the end surface of the reticle main body, wherein identification information of the reticle is provided. A reticle comprising: a reticle; 6. The reticle according to claim 5, wherein the display section is constituted by a bar code.