JP2001044070A - Method and device for manufacture of laminated electronic component - Google Patents
Method and device for manufacture of laminated electronic componentInfo
- Publication number
- JP2001044070A JP2001044070A JP11210580A JP21058099A JP2001044070A JP 2001044070 A JP2001044070 A JP 2001044070A JP 11210580 A JP11210580 A JP 11210580A JP 21058099 A JP21058099 A JP 21058099A JP 2001044070 A JP2001044070 A JP 2001044070A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- latent image
- electrostatic latent
- photosensitive drum
- metal powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 238000000034 method Methods 0.000 title claims description 21
- 239000000843 powder Substances 0.000 claims abstract description 23
- 239000002184 metal Substances 0.000 claims abstract description 22
- 229910052751 metal Inorganic materials 0.000 claims abstract description 22
- 238000007639 printing Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 5
- 239000012776 electronic material Substances 0.000 claims 1
- 108091008695 photoreceptors Proteins 0.000 abstract 2
- 239000006185 dispersion Substances 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 description 15
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 238000007650 screen-printing Methods 0.000 description 6
- 238000007740 vapor deposition Methods 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 230000004397 blinking Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Landscapes
- Ceramic Capacitors (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、グリーンシート等
の被印刷物を積層して積層電子部品を製造する方法とそ
の装置に係り、特に被印刷物への内部電極の形成方法と
その装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for manufacturing a laminated electronic component by laminating substrates such as green sheets and the like, and more particularly to a method and an apparatus for forming internal electrodes on a substrate.
【０００２】[0002]
【従来の技術】従来、積層チップコンデンサ、積層チッ
プインダクタ、積層複合部品等の内部電極を有するセラ
ミック積層電子部品の製造には、金属−セラミック一体
焼成技術が用いられている。すなわち、図４に示すよう
に、セラミックグリーンシート上３０に印刷スキージユ
ニット３１により、導体ペーストをスクリーンパターン
印刷し、その後、乾燥炉３２により不用な溶剤を乾燥さ
せ、内部電極を形成する。次に、内部電極が形成された
グリーンシートを複数枚積層し、上下に内部電極の印刷
されていないグリーンシートを適宜の枚数積層し、セラ
ミック積層体を得る。グリーンシートを用いる代わり
に、セラミックペーストと導体ペーストとを適宜所定の
形状にスクリーン印刷し、セラミック積層体を得る方法
も採用される。上述のようにして得られたセラミック積
層体を厚み方向に加圧し、セラミック層同士を密着させ
る。その後、セラミック積層体を焼成し、焼結体を得
る。得られた焼結体の外表面に、適宜の外部電極を形成
し、セラミック電子部品を得る。2. Description of the Related Art Conventionally, a metal-ceramic integrated firing technique has been used for manufacturing a ceramic multilayer electronic component having internal electrodes such as a multilayer chip capacitor, a multilayer chip inductor, and a multilayer composite component. That is, as shown in FIG. 4, the conductor paste is screen-printed on the ceramic green sheet 30 by the printing squeegee unit 31, and then the unnecessary solvent is dried by the drying furnace 32 to form the internal electrodes. Next, a plurality of green sheets on which the internal electrodes are formed are laminated, and an appropriate number of green sheets on which the internal electrodes are not printed are laminated on the upper and lower sides to obtain a ceramic laminate. Instead of using a green sheet, a method of screen-printing a ceramic paste and a conductor paste into a predetermined shape as appropriate to obtain a ceramic laminate is also employed. The ceramic laminate obtained as described above is pressed in the thickness direction to make the ceramic layers adhere to each other. Thereafter, the ceramic laminate is fired to obtain a sintered body. Appropriate external electrodes are formed on the outer surface of the obtained sintered body to obtain a ceramic electronic component.
【０００３】また、特公平７−５４７８０号公報や特開
平８−１２４７８７号公報には、内部電極が有する厚み
のために、内部電極が形成されていない領域における層
間剥離が生じることを防止するため、蒸着やスパッタリ
ング等の薄膜形成法により薄い内部電極をセラミックグ
リーンシート上に形成して内部電極を薄膜化する方法が
記載されている。Further, Japanese Patent Publication No. 7-54780 and Japanese Patent Application Laid-Open No. 8-124787 disclose a method for preventing delamination in a region where an internal electrode is not formed due to the thickness of the internal electrode. A method is described in which a thin internal electrode is formed on a ceramic green sheet by a thin film forming method such as vapor deposition or sputtering to make the internal electrode thin.
【０００４】[0004]
【発明が解決しようとする課題】従来のスクリーン印刷
法により内部電極を形成する場合、スクリーン版の伸び
や変形等で印刷寸法精度が大幅に悪化するという問題点
がある。また、電極厚みのばらつきが大きく、誘電体層
間に小さい箇所が部分的にでてくるため、耐電圧特性を
劣化させると共に、等価直列インダクタンス（ＥＳＬ）
や等価直列抵抗（ＥＳＲ）が大きくなるため、高周波に
対する特性が劣化するという問題点がある。When the internal electrodes are formed by the conventional screen printing method, there is a problem that the printing dimensional accuracy is greatly deteriorated due to elongation or deformation of the screen plate. In addition, since the electrode thickness greatly varies and small portions are partially formed between the dielectric layers, the withstand voltage characteristics are deteriorated and the equivalent series inductance (ESL) is reduced.
And the equivalent series resistance (ESR) becomes large, so that there is a problem that the characteristics with respect to high frequencies deteriorate.
【０００５】一方、前記蒸着やスパッタリングによる方
法では、内部電極の寸法精度等は向上し、薄肉化はでき
るものの、蒸着やスパッタリング等に時間がかかり、製
造コストが高価になるという問題点がある。[0005] On the other hand, in the above-mentioned method by vapor deposition or sputtering, although the dimensional accuracy of the internal electrode is improved and the thickness can be reduced, there is a problem that it takes time for vapor deposition and sputtering and the production cost is high.
【０００６】本発明は、上記従来技術の問題点に鑑み、
内部電極形成時間が短時間ですみ、しかも内部電極の寸
法精度を向上させることができ、特性のばらつきの低減
が可能となる積層電子部品の製造方法と製造装置を提供
することを目的とする。The present invention has been made in view of the above-mentioned problems of the prior art,
An object of the present invention is to provide a method and an apparatus for manufacturing a laminated electronic component, in which the internal electrode formation time can be reduced, the dimensional accuracy of the internal electrode can be improved, and variations in characteristics can be reduced.
【０００７】また、本発明は、版等のパターン形成部材
を無くすることができる積層電子部品の製造方法と製造
装置を提供することを目的とする。Another object of the present invention is to provide a method and an apparatus for manufacturing a laminated electronic component which can eliminate a pattern forming member such as a plate.
【０００８】[0008]
【課題を解決するための手段】請求項１の積層電子部品
の製造方法は、帯電感光ドラムの表面に該ドラムの回転
方向と該回転方向に垂直方向に配列されるように、露光
により静電潜像を形成し、前記静電潜像形成部分に電極
用金属粉を付着させ、薄い被印刷物に前記帯電感光ドラ
ムに付着した電極用金属粉を転写し、該電極用金属粉を
付着させた被印刷物を積層、切断、焼成して積層電子部
品を得ることを特徴とする。According to a first aspect of the present invention, there is provided a method for manufacturing a laminated electronic component, comprising: a step of forming an electrostatic charge on a surface of a charged photosensitive drum in a direction perpendicular to the rotation direction of the drum; A latent image was formed, and a metal powder for an electrode was adhered to the portion where the electrostatic latent image was formed. The metal powder for an electrode adhered to the charged photosensitive drum was transferred to a thin printing material, and the metal powder for an electrode was adhered. The printed material is laminated, cut, and fired to obtain a laminated electronic component.
【０００９】このように、帯電感光ドラム上に形成され
る静電潜像は、スクリーン印刷に比較して高い寸法精
度、位置精度に形成することができる。また、静電潜像
上に形成されてグリーンシート等の被印刷物上に転写さ
れる金属粉は、均一な厚みに形成することができる。As described above, the electrostatic latent image formed on the charged photosensitive drum can be formed with higher dimensional accuracy and position accuracy than screen printing. Further, the metal powder formed on the electrostatic latent image and transferred onto a printing material such as a green sheet can be formed to have a uniform thickness.
【００１０】請求項２の積層電子部品の製造方法は、請
求項１において、前記帯電感光ドラムに、コンピュータ
制御で電極パターンを作図し、その作図に基づいて結像
露光して前記静電潜像を形成することを特徴とする。According to a second aspect of the present invention, in the first aspect, the electrostatic latent image is formed by forming an electrode pattern on the charged photosensitive drum under computer control and exposing the image based on the drawing. Is formed.
【００１１】このように、コンピュータ制御により電極
パターンを形成し、結像露光することにより、電極パタ
ーン静電潜像形成のための版が不要となる。As described above, by forming an electrode pattern by computer control and performing image-forming exposure, a plate for forming an electrostatic latent image of the electrode pattern becomes unnecessary.
【００１２】請求項３の積層電子部品の製造装置は、デ
ィスプレーを有する電極パターン作図用コンピュータ
と、静電潜像を形成する帯電感光ドラムと、前記作図さ
れた電極パターンにより前記帯電感光ドラムに結像露光
して静電潜像を形成する露光制御装置と、前記静電潜像
部分に電極用金属粉を付着させる現像器と、前記静電潜
像部分に付着した電極金属粉を被印刷物に転写する転写
器とを備えたことを特徴とする。According to a third aspect of the present invention, there is provided an apparatus for manufacturing an electronic component having a display, a computer for drawing an electrode pattern, a charged photosensitive drum for forming an electrostatic latent image, and a connection to the charged photosensitive drum by the drawn electrode pattern. An exposure control device that forms an electrostatic latent image by image exposure, a developing device that attaches metal powder for an electrode to the electrostatic latent image portion, and an electrode metal powder that is attached to the electrostatic latent image portion on a printing substrate. And a transfer device for transferring.
【００１３】このように、帯電感光ドラム上に形成され
る静電潜像は、スクリーン印刷に比較して高い寸法精
度、位置精度に形成することができる。また、静電潜像
上に形成されてグリーンシート等の被印刷物上に転写さ
れる金属粉は、薄い厚みで均一な厚みに形成することが
できる。また、コンピュータ制御により電極パターンを
形成し、結像露光することにより、電極パターン静電潜
像形成のための版が不要となる。As described above, the electrostatic latent image formed on the charged photosensitive drum can be formed with higher dimensional accuracy and position accuracy than screen printing. Further, the metal powder formed on the electrostatic latent image and transferred onto a printing material such as a green sheet can be formed in a thin and uniform thickness. Further, by forming an electrode pattern by computer control and performing image forming exposure, a plate for forming an electrostatic latent image of the electrode pattern becomes unnecessary.
【００１４】[0014]
【発明の実施の形態】以下本発明による積層電子部品の
製造方法および製造装置を、図１ないし図３に示す一実
施の形態により説明する。図１において、１はセラミッ
クグリーンシート、２は帯電感光ドラムであり、該帯電
感光ドラム２は例えば酸化亜鉛感光層や、有機半導体感
光層等の感光層がドラムの周囲に被覆処理されたもので
ある。３は帯電感光ドラム２への露光制御装置、３ａは
結像露光装置、４は電極パターンの作図データを作製す
るコンピュータであり、作図パターンを表示するディス
プレ−４ａを有する。５は帯電感光ドラム２の表面を負
極性の電位（または正極性の電位）に帯電させる帯電
器、６は電極用金属粉を帯電感光ドラム２の静電潜像に
付着させる現像器、７はグリーンシート１に金属粉を転
写する転写器、８は帯電感光ドラム２上に残留する金属
粉を除去するクリーニング装置、９は帯電感光ドラム２
上の電荷を除去するイレーザである。１０はクリーニン
グ装置８により得られる電極用金属粉（トナー）１３を
戻り管路１１を介して現像器６に戻すトナー回収器であ
る。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A method and an apparatus for manufacturing a laminated electronic component according to the present invention will be described below with reference to an embodiment shown in FIGS. In FIG. 1, reference numeral 1 denotes a ceramic green sheet, and 2 denotes a charged photosensitive drum. The charged photosensitive drum 2 is formed by coating a photosensitive layer such as a zinc oxide photosensitive layer or an organic semiconductor photosensitive layer around the drum. is there. Reference numeral 3 denotes an exposure control device for the charged photosensitive drum 2, reference numeral 3a denotes an image forming exposure device, and reference numeral 4 denotes a computer for producing drawing data of an electrode pattern, and has a display 4a for displaying the drawing pattern. 5 is a charger for charging the surface of the charged photosensitive drum 2 to a negative potential (or a positive potential); 6 is a developing device for attaching metal powder for electrodes to the electrostatic latent image on the charged photosensitive drum 2; A transfer unit for transferring metal powder to the green sheet 1; a cleaning device 8 for removing metal powder remaining on the charged photosensitive drum 2;
It is an eraser that removes the electric charge on it. Reference numeral 10 denotes a toner recovery device that returns the metal powder (toner) 13 for an electrode obtained by the cleaning device 8 to the developing device 6 via the return line 11.
【００１５】グリーンシート１に内部電極用金属粉を付
着させる場合、帯電感光ドラム２は、矢印２０に示す反
時計方向に連続的あるいは間欠的に回転される、そし
て、露光制御装置３の結像露光装置３ａに対向する前
に、帯電感光ドラム２の感光層は帯電器５により負極性
の電位（または正極性の電位）に帯電させておく。そし
て、コンピュータ３で作図した電極パターンを露光制御
装置３に送り、露光制御装置３は、その電極パターンに
従って、結像露光装置３ａを駆動して帯電感光ドラム２
上に光を照射することにより、部分的に帯電を解く。結
像露光装置３ａは、多数の発光素子を帯電感光ドラム２
の幅方向に配列した発光素子群を有して、どの発光素子
を発光させるかを制御しながら、帯電感光ドラム２を回
転させて、図２（Ａ）、（Ｂ）に示すように、帯電を残
留させた静電潜像１２をドラム２の回転方向と該回転方
向に垂直方向に配列されるように形成する。When the metal powder for an internal electrode is adhered to the green sheet 1, the charged photosensitive drum 2 is rotated continuously or intermittently in a counterclockwise direction indicated by an arrow 20. Before facing the exposure device 3a, the photosensitive layer of the charged photosensitive drum 2 is charged to a negative potential (or a positive potential) by the charger 5. Then, the electrode pattern drawn by the computer 3 is sent to the exposure control device 3, and the exposure control device 3 drives the imaging exposure device 3a according to the electrode pattern to drive the charged photosensitive drum 2
By irradiating light on the top, the charge is partially released. The image forming exposure device 3a includes a plurality of light-emitting elements,
The photosensitive drum 2 is rotated while controlling which light-emitting element emits light by arranging the light-emitting element group arranged in the width direction of the light-emitting element, and as shown in FIGS. Are formed such that they are arranged in the direction of rotation of the drum 2 and in the direction perpendicular to the direction of rotation.
【００１６】なお、この代わりに、結像露光装置３ａ
は、帯電感光ドラム２の幅方向に移動させながら、発光
素子を点滅させて静電潜像１２を行うようにすることも
できる。この例の静電潜像１２は、コンデンサの内部電
極を形成する場合の一例を示し、説明上、帯電感光ドラ
ム２に対して、静電潜像１２を相対的に大きく描いてあ
る。Instead of this, the image forming exposure device 3a
Alternatively, the electrostatic latent image 12 may be formed by blinking the light emitting element while moving the photosensitive drum 2 in the width direction. The electrostatic latent image 12 of this example shows an example in which an internal electrode of a capacitor is formed, and the electrostatic latent image 12 is drawn relatively large with respect to the charged photosensitive drum 2 for explanation.
【００１７】図２（Ｂ）に示すように、帯電感光ドラム
２の静電潜像１２が回転ドラムからなる現像器６に対向
する箇所に至ると、正極性（静電潜像１２が正極性の場
合は負極性）に帯電されたトナー１３が静電潜像１２が
形成された帯電感光ドラム２上の面に付着する。なお、
トナーは、Ｎｉ、Ｃｕ、ＡｇあるいはＡｇ合金等の金属
粉と加熱で難化溶融する樹脂等でなり、２μｍ〜１０μ
ｍ程度の粒径とすることが好ましい。As shown in FIG. 2B, when the electrostatic latent image 12 of the charged photosensitive drum 2 reaches a position facing the developing device 6 composed of a rotating drum, the electrostatic latent image 12 has a positive polarity. In this case, the negatively charged toner 13 adheres to the surface of the charged photosensitive drum 2 on which the electrostatic latent image 12 is formed. In addition,
The toner is made of a metal powder such as Ni, Cu, Ag, or an Ag alloy, and a resin or the like that is difficult to melt by heating.
Preferably, the particle size is about m.
【００１８】静電潜像１２の領域において顕像化された
部分が転写器７に至ると、転写器７は、帯電感光ドラム
２の静電潜像１２上に付着されたトナー１３をグリーン
シート１上に転写する。転写されたトナー１３からなる
電極パターンは加熱によりトナー中の樹脂を溶融させて
グリーンシート１に定着させる。図３（Ａ）、（Ｂ）は
グリーンシート１上に定着させたトナーからなる電極パ
ターン１４を形成した状態を示す。なお、この定着方法
は、トナー中の樹脂を溶融させる方法であれば、他の方
法であってもよい。When the visualized portion in the area of the electrostatic latent image 12 reaches the transfer device 7, the transfer device 7 removes the toner 13 adhered on the electrostatic latent image 12 of the charged photosensitive drum 2 to a green sheet. Transfer onto 1 The electrode pattern made of the transferred toner 13 melts the resin in the toner by heating, and is fixed to the green sheet 1. FIGS. 3A and 3B show a state in which an electrode pattern 14 made of toner fixed on the green sheet 1 is formed. This fixing method may be another method as long as the resin in the toner is melted.
【００１９】電極パターン転写後の帯電感光ドラム２の
面は、クリーニング装置８により転写残りのトナー等の
付着汚染物を除去し、さらにイレーザ９により帯電を除
去して、次ぎの静電潜像１２の形成に移る。このよう
に、帯電感光ドラム２は繰り返し使用される。After the transfer of the electrode pattern, the surface of the charged photosensitive drum 2 is cleaned by a cleaning device 8 to remove adhered contaminants such as toner remaining after transfer, and further by an eraser 9 to remove the charge. Move on to the formation of Thus, the charged photosensitive drum 2 is used repeatedly.
【００２０】このようにして電極パターン１４が形成さ
れたグリーンシートを適宜切断し、図３（Ｃ）に示すよ
うに、電極パターン１４が形成されたグリーンシート１
を、上下に隣接する電極パターン１４の中央部が切断線
１５に沿って切断可能となるようにジグザグに配置して
積層し、さらに上下に電極パターン１４の無いグリーン
シート１ａ〜１ｃを適宜枚数積層する。そして、重ねた
グリーンシート１、１ａ〜１ｃを熱圧着した後、単品毎
に切断し、焼成後、図３（Ｄ）に示すように、端子電極
１６を焼き付け等により設けて積層電子部品とする。こ
のような製造方法により、スクリーン印刷に比較し、位
置精度や寸法精度良く、均一な厚みの電極を形成するこ
とが可能となる。このため、等価直列インダクタンスや
等価直列抵抗の増大の問題を解決し、高周波特性の良い
積層電子部品が得られる。また、蒸着等の薄膜形成技術
を用いる場合のように、電極形成に長時間を要すること
がなく、量産が容易となるので、製造コストを低減でき
る。The green sheet on which the electrode pattern 14 is formed in this manner is appropriately cut, and as shown in FIG. 3C, the green sheet 1 on which the electrode pattern 14 is formed
Are arranged in a zigzag manner so that the central part of the vertically adjacent electrode patterns 14 can be cut along the cutting line 15, and the green sheets 1 a to 1 c without the upper and lower electrode patterns 14 are appropriately laminated. I do. Then, after the stacked green sheets 1, 1 a to 1 c are thermocompression-bonded, cut into individual products, and after baking, the terminal electrodes 16 are provided by baking or the like as shown in FIG. . According to such a manufacturing method, it is possible to form an electrode having a uniform thickness with a higher positional accuracy and dimensional accuracy than screen printing. For this reason, the problem of an increase in equivalent series inductance and equivalent series resistance is solved, and a multilayer electronic component having good high-frequency characteristics can be obtained. Further, unlike the case where a thin film forming technique such as vapor deposition is used, the electrode formation does not require a long time, and mass production is facilitated, so that the manufacturing cost can be reduced.
【００２１】上記例ではコンピュータ４により作図デー
タを作製することとしたが、電極パターンに対応した光
透過部を多数配列した版を通して帯電感光ドラム２に露
光することにより、静電潜像１２を作製することも可能
である。ただし、コンピュータ４により作図データを作
製することにより、パターンが変化するごとに版を作る
必要がなくなるという利点がある。また、コンピュータ
４はディスプレー４ａを有するため、作図内容を確認し
ながら電極パターンを容易に作製することができる。本
発明は、コンデンサのみでなく、インダクタやこれらの
複合電子部品にも適用できる。また、被印刷物として
は、セラミックグリーンシートのみならず、樹脂製グリ
ーンシートを用いることができ、また、樹脂製フィルム
あるいは樹脂とセラミックとを混合したフィルム等を用
いることもできる。In the above example, the drawing data is prepared by the computer 4. However, the electrostatic latent image 12 is prepared by exposing the charged photosensitive drum 2 through a plate having a large number of light transmitting portions corresponding to the electrode patterns. It is also possible. However, by creating the drawing data by the computer 4, there is an advantage that it is not necessary to create a plate every time the pattern changes. Further, since the computer 4 has the display 4a, it is possible to easily produce an electrode pattern while checking the drawing contents. The present invention can be applied not only to capacitors but also to inductors and composite electronic components thereof. In addition, not only a ceramic green sheet but also a resin green sheet can be used as a print material, and a resin film or a film in which resin and ceramic are mixed can also be used.
【００２２】[0022]
【発明の効果】本発明によれば、被印刷物上に内部電極
パターンを寸法精度および位置精度良く形成できるの
で、高品質の高周波用積層電子部品が提供可能となる。
また、蒸着等の薄膜形成技術のように、電極形成に長時
間を要しないため、量産に適し、製造コストを低減する
ことができる。According to the present invention, since the internal electrode pattern can be formed on the printing substrate with high dimensional accuracy and positional accuracy, a high-quality laminated electronic component for high frequency can be provided.
In addition, since a long time is not required for forming an electrode as in a thin film forming technique such as vapor deposition, it is suitable for mass production and the manufacturing cost can be reduced.
【００２３】また、帯電感光ドラム上の静電潜像を、コ
ンピュータで作製した電極パターンに基づいて作製する
ことにより、版等を用意することなく、電極パターンを
作製することができ、製造コストの低減にさらに寄与す
ることができる。Further, by forming an electrostatic latent image on the charged photosensitive drum based on an electrode pattern prepared by a computer, an electrode pattern can be prepared without preparing a plate or the like, thereby reducing manufacturing costs. It can further contribute to reduction.
【図１】本発明による積層電子部品の製造方法を実施す
る装置の一実施の形態を示す構成図である。FIG. 1 is a configuration diagram showing an embodiment of an apparatus for implementing a method of manufacturing a laminated electronic component according to the present invention.
【図２】（Ａ）は該実施の形態において帯電感光ドラム
上に形成される静電潜像の一例を示す斜視図、（Ｂ）は
その静電潜像に対する現像器による金属粉の付着を説明
する図ある。FIG. 2A is a perspective view showing an example of an electrostatic latent image formed on a charged photosensitive drum in the embodiment, and FIG. 2B is a view showing adhesion of metal powder to the electrostatic latent image by a developing device. FIG.
【図３】（Ａ）は該実施の形態のグリーンシート上の電
極パターンの一例を示す平面図、（Ｂ）はその側面断面
図、（Ｃ）はグリーンシートの積層状態を示す断面図、
（Ｄ）は製品の一例を示す側面断面図である。3A is a plan view showing an example of an electrode pattern on a green sheet according to the embodiment, FIG. 3B is a side sectional view thereof, FIG. 3C is a sectional view showing a green sheet lamination state,
(D) is a side sectional view showing an example of a product.
【図４】従来のスクリーン印刷法に使用する装置を示す
斜視図である。FIG. 4 is a perspective view showing an apparatus used for a conventional screen printing method.
１：セラミックグリーンシート、２：帯電感光ドラム、
３：露光制御装置、３ａ：結像露光装置、４：コンピュ
ータ、５：帯電器、６：現像器、７：転写器、８：クリ
ーニング装置、９：イレーザ、１０：トナー回収器、１
２：静電潜像、１３：電極用金属粉、１４：電極パター
ン、１５：切断線、１６：端子電極1: ceramic green sheet, 2: charged photosensitive drum,
3: exposure control device, 3a: imaging exposure device, 4: computer, 5: charging device, 6: developing device, 7: transfer device, 8: cleaning device, 9: eraser, 10: toner collecting device, 1
2: electrostatic latent image, 13: metal powder for electrode, 14: electrode pattern, 15: cutting line, 16: terminal electrode
Claims (3)
向と該回転方向に垂直方向に配列されるように、露光に
より静電潜像を形成し、 前記静電潜像形成部分に積層電子部品の電極用金属粉を
付着させ、 薄い被印刷物に前記帯電感光ドラムに付着した電極用金
属粉を転写し、 該電極用金属粉を付着させた被印刷物を積層、切断、焼
成して積層電子部品を得ることを特徴とする積層電子部
品の製造方法。An electrostatic latent image is formed on a surface of a charged photosensitive drum by exposure so as to be arranged in a direction perpendicular to the rotating direction of the drum and a direction perpendicular to the rotating direction. The metal powder for the electrode of the component is adhered, the metal powder for the electrode adhered to the charged photosensitive drum is transferred to a thin printed material, and the printed material to which the metal powder for the electrode is adhered is laminated, cut, and fired to form a laminated electronic material. A method for manufacturing a laminated electronic component, comprising obtaining a component.
ンを作図し、その作図に基づいて前記静電潜像を形成す
ることを特徴とする積層電子部品の製造方法。2. The method according to claim 1, wherein an electrode pattern is formed on the charged photosensitive drum under computer control, and the electrostatic latent image is formed based on the drawn pattern.
コンピュータと、 静電潜像を形成する帯電感光ドラムと、 前記作図された電極パターンにより前記帯電感光ドラム
に結像露光して静電潜像を形成する露光制御装置と、 前記静電潜像部分に電極用金属粉を付着させる現像器
と、 前記静電潜像部分に付着した電極金属粉を被印刷物に転
写する転写器とを備えたことを特徴とする積層電子部品
の製造装置。3. A computer for drawing an electrode pattern having a display, a charged photosensitive drum for forming an electrostatic latent image, and image forming exposure on the charged photosensitive drum by the drawn electrode pattern to form an electrostatic latent image. An exposure control device, a developing device for adhering metal powder for an electrode to the electrostatic latent image portion, and a transfer device for transferring the electrode metal powder adhering to the electrostatic latent image portion to a printing substrate. Characterized equipment for manufacturing laminated electronic components.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11210580A JP2001044070A (en) | 1999-07-26 | 1999-07-26 | Method and device for manufacture of laminated electronic component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11210580A JP2001044070A (en) | 1999-07-26 | 1999-07-26 | Method and device for manufacture of laminated electronic component |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2001044070A true JP2001044070A (en) | 2001-02-16 |
Family
ID=16591677
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11210580A Withdrawn JP2001044070A (en) | 1999-07-26 | 1999-07-26 | Method and device for manufacture of laminated electronic component |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001044070A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004327255A (en) * | 2003-04-24 | 2004-11-18 | Kyocera Corp | Method for manufacturing ceramic heater structure, and ceramic heater structure |
-
1999
- 1999-07-26 JP JP11210580A patent/JP2001044070A/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004327255A (en) * | 2003-04-24 | 2004-11-18 | Kyocera Corp | Method for manufacturing ceramic heater structure, and ceramic heater structure |
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