JP2000346898A - Inspection apparatus and inspection method for wiring board - Google Patents

Abstract

The present invention relates to an inspection apparatus for a conductor pattern of a wiring board having an external connection terminal on a peripheral portion and an integrated circuit element mounted on a center portion, and relates to a presence / absence of disconnection of the conductor pattern and a short circuit of the conductor pattern. It is an object of the present invention to provide an inspection apparatus and an inspection method that can simultaneously inspect the presence or absence. A switching unit (4) for selecting an arbitrary first electrode (23), an antenna member (5) in which a conductor layer (52) faces a second electrode (24) via an insulating layer (51), and a selected first electrode (23). A voltage application unit 71 for applying a test voltage to the electrodes 23, a current detection unit 72 for detecting a short circuit between the conductor patterns from the current flowing through the remaining first electrodes 23, and an insulation determination unit 73.
And a signal receiving unit 74 for receiving an input signal from the antenna member 5 and detecting disconnection of the conductor pattern, and a conduction determining unit.
75 is achieved by the wiring board inspection apparatus of the present invention.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for inspecting a conductor pattern of a wiring board having an external connection terminal at a peripheral portion and an integrated circuit element mounted at a center portion, and particularly to the presence or absence of disconnection of each conductor pattern. The present invention relates to an inspection apparatus capable of simultaneously inspecting for the presence or absence of a short circuit between a conductor pattern and a conductor pattern.

With the recent increase in the density and integration of integrated circuit elements, both the wiring board and the conductor pattern on which they are mounted are integrated and formed at a high density. When inspecting the conductor pattern, inspection probes are provided at both ends of the conductor pattern. Methods such as contacting are becoming impractical.

[0003] Instead of this, by detecting an electromagnetic wave emitted from the conductor pattern when a test voltage is applied from one end of the conductor pattern, an apparatus capable of detecting the presence or absence of a disconnection without contacting the probes with both electrodes of the conductor pattern. Recruitment is being considered by each company.

However, if a conventional inspection apparatus is used, it is not possible to simultaneously inspect a conductor pattern for disconnection and a short circuit between the conductor patterns. Therefore, there is a demand for the development of an inspection apparatus that can simultaneously inspect the presence / absence of disconnection of a conductor pattern and the presence / absence of a short circuit between conductor patterns.

[0005] In addition, when it is sufficient to simply inspect the presence / absence of disconnection of the conductor pattern, a long time is required for the inspection using a conventional inspection apparatus. Therefore, there is a demand for the development of an inspection apparatus that can inspect in a relatively short time when inspecting only the presence / absence of disconnection of a conductor pattern.

[0006]

2. Description of the Related Art FIG. 4 is a perspective view showing an example of a wiring board to be inspected, FIG. 5 is a view showing the principle of a conventional wiring inspection machine, FIG. 6 is a block diagram showing a conventional wiring board inspection apparatus, and FIG. FIG. 8 shows an example of a switching unit, and FIG. 8 is a flowchart showing a conventional wiring board inspection method.

In FIG. 4, a wiring board 2 on which an integrated circuit element 1 is mounted has a plurality of conductor patterns 22 radially arranged in, for example, an insulator 21, and each conductor pattern 22 is provided at both ends on the surface of the insulator 21. A first electrode 23 and a second electrode 24 are formed so as to be exposed.

A first electrode 23 arranged along the periphery of the wiring board 2 is used as a test electrode or a connection terminal for connection to an external circuit, and a second electrode 24 arranged at the center of the wiring board 2 is used. Are connected to the integrated circuit element 1 via bumps and the like, which are not shown.

As a conductor pattern inspection apparatus for a printed wiring board, for example, there is a wiring inspection apparatus shown in FIG.
626626), the wiring tester has an antenna 32 connected to the oscillator 31 and a receiver 35 connected to the conductor pattern 34 of the wiring board 33 to be tested.

When a signal having a sine waveform shown in FIG. 5B is applied from the oscillator 31 to the antenna 32 close to the conductor pattern 34 at the time of inspection, the signal shown in FIG.
The data is input to the receiver 35 from 34 and compared with reference data stored in the memory 36 in advance.

In the comparator 37, the level of the signal input to the receiver 35 and the level of the reference data stored in the memory 36 are compared. If both levels substantially match, the conductor pattern is determined to be good. Are different, the conductor pattern is determined to be defective.

However, the above-described wiring inspection machine has a function of detecting disconnection of a conductor pattern, but has no function of detecting a short circuit between conductor patterns. In order to inspect the wiring board, as shown in FIG. 6, an inspection apparatus having a function of detecting a short circuit added to the function of the wiring inspection machine is used.

That is, the conventional wiring board inspection apparatus includes a switching unit 4 that can be connected to all of the first electrodes 23 and an insulating layer
An antenna member 5 having a conductor layer 52 that can face all of the second electrodes 24 via 51 and a measuring circuit 6 for inspecting the wiring board 2 to be inspected.

The measuring circuit 6 includes an oscillator 61 for applying a sine wave signal to the conductor pattern to be inspected, a DC power supply 62 for applying a DC voltage, and a signal receiving unit 65 for detecting a disconnection.
And a continuity determination unit 66, a current detection unit 63 for detecting a short circuit, and an insulation determination unit 64.

The switching unit 4 comprises a plurality of switch elements 41, each of which can be connected to a first electrode 23, for example, as shown in FIG.
42 is connected to the oscillator 61 or the DC power supply 62, and the second contact 43 is connected to the current detection unit 63.

The common terminals 44 of the switch elements 41 are connected to the corresponding first electrodes 23, respectively. When one switch element 41 is actuated, any one of the first electrodes 23 (in the figure, two electrodes from the top) Is selected, and the remaining first electrodes 23 are connected to the current detection unit 63.

In the inspection of the conductor pattern, detection of disconnection and detection of a short circuit are performed in series on the selected conductor pattern as shown in FIG.
, And the switching unit 4 is connected to the first electrode 23 to start the inspection.

When a sine wave signal is applied from the oscillator 61 to the conductor pattern via the first electrode 23 selected by the switching unit 4, the signal induced in the antenna member 5 is input to the signal receiving unit 65 and preset. The presence / absence of disconnection is determined by comparing with a reference.

Next, a DC voltage is applied to the conductor pattern from a DC power supply 62, and the current flowing through the remaining first electrodes 23, which are short-circuited to each other, is measured. The insulation between the pattern and the presence or absence of a short circuit is determined.

[0020]

However, in the conventional inspection of a wiring board, as shown in FIG. 8, disconnection detection and short-circuit detection are performed in series with respect to a selected conductor pattern, and the inspection target is inspected. There is a problem that the time required for inspection increases as the number of conductor patterns to be formed increases.

Depending on the purpose of the inspection, there may be a case where it is only necessary to inspect the presence / absence of a disconnection even if a short circuit of the conductor pattern cannot be detected, but a conventional inspection apparatus for inspecting the conductor pattern for disconnection or short circuit for each conductor pattern. Has the problem that it takes a long time for inspection.

An object of the present invention is to provide an inspection apparatus and an inspection method capable of simultaneously inspecting the presence / absence of a disconnection of a conductor pattern and the presence / absence of a short circuit between conductor patterns, or an inspection in a relatively short time when inspecting only a disconnection of a conductor pattern. It is an object of the present invention to provide an inspection apparatus and an inspection method that can be used.

[0023]

FIG. 1 is a block diagram showing a wiring board inspection apparatus according to the present invention. The same object is denoted by the same symbol throughout the drawings.

The above problem is solved by the first electrode 23 and the second electrode
An apparatus for inspecting a wiring board 2 on which a plurality of conductor patterns 22 having a plurality of conductor patterns 22 are formed for disconnection of the conductor patterns and short-circuits between the conductor patterns, wherein an arbitrary first electrode 23 is selected, and the remaining first electrodes 23 are selected. A switching unit 4 for short-circuiting the electrodes 23 to each other, and an antenna member 5 having a conductor layer 52 dielectrically coupled to all of the second electrodes 24 via an insulating layer 51.
And a measurement circuit 7. The measurement circuit 7 includes a voltage application unit 71 that applies a pulse waveform or a test voltage whose potential changes rapidly to the first electrode 23 selected by the switching unit 4. , A current detection unit 72 and an insulation determination unit 73,
A signal receiving section 74 and a conduction determining section 75;
When a test voltage is applied to the selected first electrode 23, the short-circuited first electrode
The signal receiving unit 74 and the continuity determining unit 75 apply a test voltage to the selected first electrode 23 by detecting a current flowing through the 23 and determining whether there is a short circuit between the conductor patterns. This is achieved by a wiring board inspection apparatus having a function of receiving a signal input from the antenna member 5 and determining whether or not the conductor pattern is disconnected.

The wiring board inspection apparatus for applying, for example, a pulse-wave test voltage to the first electrode selected in this manner, synchronizes with the rise or fall of the test voltage and generates a signal corresponding to the resistance value of the conductor pattern. The presence or absence of a break in the conductor pattern is determined from the voltage level of the signal input from the conductor pattern corresponding to the selected first electrode and the second electrode to the signal receiving unit via the antenna member via the antenna member, and input to the signal receiving unit. can do.

In addition, when the test voltage rises, a current corresponding to the insulation resistance between the conductor pattern corresponding to the selected first electrode and the other conductor patterns passes through the short-circuited first electrode. The current flows to the current detection unit, and the presence or absence of a short circuit between the conductor patterns can be determined from the current value.
The test voltages applied to the selected first electrodes are all the same, and by changing the voltage at least once discontinuously, the presence / absence of disconnection of the conductor pattern and the presence / absence of a short circuit between the conductor patterns are simultaneously determined. Can be determined.

An apparatus for inspecting the wiring board 2 on which a plurality of conductor patterns 22 each having a first electrode 23 and a second electrode 24 are formed for disconnection of the conductor pattern 22 comprises an oscillator 61 An antenna member 5 having a conductor layer 52 dielectrically coupled to all of the second electrodes 24 via a layer 51;
The oscillator 61 includes a signal receiving unit 65 and a conduction determining unit 66.
Has a function of simultaneously applying a test signal of a sine wave or a pulse wave to all the conductor patterns 22 via the first electrode 23. The signal receiving unit 65 and the continuity determining unit 66 This is achieved by a wiring board inspection apparatus having a function of receiving a signal input from the PC and comparing it with a reference voltage to determine whether or not the conductor pattern 22 is disconnected.

As described above, the wiring board inspection apparatus for simultaneously applying a sine wave or pulse wave test signal to all the conductor patterns via the first electrode is input to the signal receiving unit via the antenna member. The voltage level of the signal is proportional to the number of second electrodes. Therefore, if there is a disconnection in the conductor pattern, the voltage level of the signal decreases in proportion to the number of disconnected conductor patterns, and the presence / absence of the disconnection can be determined by comparing with the voltage level of the signal when there is no disconnection. In addition, since all the conductor patterns can be inspected simultaneously, the inspection time can be greatly reduced.

That is, an inspection apparatus and an inspection method capable of simultaneously inspecting the presence / absence of disconnection of a conductor pattern and the presence / absence of a short circuit between conductor patterns, or an inspection apparatus capable of inspecting in a relatively short time when inspecting only a disconnection of a conductor pattern. An inspection method can be realized.

[0030]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the accompanying drawings. FIG. 2 is a diagram showing an input waveform and a detected waveform, FIG. 3 is a flowchart showing a wiring board inspection method according to the present invention, FIG. 9 is a block diagram showing another inspection device according to the present invention, and FIG. Diagrams and diagrams explaining the operation principle of
11 is a diagram showing a first modification of another inspection device, FIG. 12 is a diagram showing a second modification of another inspection device, and FIG. 13 is a block diagram showing still another inspection device according to the present invention. is there.

The wiring board inspection apparatus according to the present invention comprises a switching unit 4, an antenna member 5 and a measuring circuit 7 as shown in FIG. 1, and the antenna member 5 is mounted on the wiring board 2 to be inspected. It has a conductor layer 52 that can face all of the second electrodes 24 via the insulating layer 51.

The switching unit 4 includes a first electrode 23
Can be connected to any of them, and an arbitrary first electrode 23 can be connected to one of them.
It has a function of selecting an individual first electrode 23 and a function of short-circuiting the remaining first electrodes 23 except for the selected one when an arbitrary first electrode 23 is selected.

Unlike the conventional inspection apparatus, the measurement circuit 7 applies a test voltage having a pulse waveform to the selected first electrode 23, a current detection section 72 for detecting a short circuit, and an insulation determination section 73. And a signal receiving section 74 for detecting disconnection and a conduction determining section 75.

When a test voltage is applied to the selected first electrode 23, the current detecting section 72 detects a current flowing through the other first electrodes 23, and the insulation judging section 73 is selected from the current level. The presence or absence of a short circuit between the conductor pattern corresponding to the electrode 23 and another conductor pattern is determined.

When a test voltage is applied to the selected first electrode 23, the signal receiving section 74 receives a signal input from the antenna member 5, and the continuity determining section 75 is selected from the level of the input signal. By detecting the resistance of the conductor pattern corresponding to the electrode 23, the presence or absence of disconnection is determined.

That is, when a test voltage having a pulse waveform is applied to the first electrode 23 selected from the voltage applying section 71 as shown in FIG. 2A, the pulse waveform as shown in FIG. A signal is input from the antenna member 5 to the signal receiving unit 74 in synchronization with the rise and fall.

The level of the signal input from the antenna member 5 to the signal receiving section 74 is proportional to the conductor resistance of the conductor pattern to which the test voltage is applied. For example, the continuity determining section 75 compares the level of the input signal with a reference value. By doing so, the presence / absence of disconnection can be determined.

When a test voltage having a pulse waveform is applied to the first electrode 23 selected from the voltage applying section 71 as shown in FIG. 2A, the selection is made as shown in FIG. 2C. First
The current flows to the current detection unit via the electrodes, the conductor pattern, and the remaining first electrodes.

When the test voltage is applied, the level of the current flowing in the current detecting section is inversely proportional to the insulation resistance value interposed between the conductor patterns. For example, the magnitude of the current value is compared with the reference value in the insulation determination section 73. By doing so, it is possible to determine the presence or absence of a short circuit.

The wiring board inspection apparatus according to the present invention can determine the presence / absence of disconnection by applying a test voltage having a pulse waveform to the first electrode 23 selected from the voltage application unit 71. In parallel with the determination, the presence or absence of a short circuit between the conductor patterns can be determined.

That is, unlike the conventional method for inspecting a wiring board in which detection of disconnection and detection of a short circuit are performed in series on a selected conductor pattern, the method for inspecting a wiring board according to the present invention is shown in FIG. As described above, the disconnection detection and the short-circuit detection are performed in parallel, and the test time is reduced.

In the above embodiment, the test voltage applied to the first electrode selected from the voltage applying unit 71 is a voltage having a pulse waveform. However, the test voltage is not necessarily limited to the pulse waveform voltage. The same effect can be obtained even if the voltage is turned on and off.

According to experiments by the present inventors, when a DC voltage of 100 V is applied as a test voltage to a selected conductor pattern and turned on / off, a signal voltage of about 1 V is input to the signal receiving unit and a current of about 10 μA is supplied. Has been confirmed to flow to the current detection unit.

The wiring board inspection apparatus that applies, for example, a test voltage in the form of a pulse wave to the first electrode selected as described above, synchronizes with the rise or fall of the test voltage and generates a signal corresponding to the resistance value of the conductor pattern. The presence or absence of a break in the conductor pattern is determined from the voltage level of the signal input from the conductor pattern corresponding to the selected first electrode and the second electrode to the signal receiving unit via the antenna member via the antenna member, and input to the signal receiving unit. can do.

When the test voltage rises, a current corresponding to the insulation resistance between the conductor pattern corresponding to the selected first electrode and the other conductor pattern flows through the short-circuited first electrode. The current flows to the current detection unit, and the presence or absence of a short circuit between the conductor patterns can be determined from the current value. The test voltages applied to the selected first electrodes are all the same, and by changing the voltage at least once discontinuously, the presence / absence of disconnection of the conductor pattern and the presence / absence of a short circuit between the conductor patterns are simultaneously determined. Can be determined.

In the inspection of the wiring board, it is desirable to be able to detect the presence / absence of disconnection and the presence / absence of a short circuit in all the conductor patterns on the wiring board to be inspected. In some cases, it is only necessary to be able to inspect in a short time.

Another inspection apparatus of the wiring board inspection apparatus according to the present invention is an inspection apparatus configured to cope with such a demand. As shown in FIG. 9, all the wiring boards to be inspected have through a first electrode. And an oscillator capable of simultaneously applying a sine wave signal to the conductor pattern.

That is, another inspection apparatus according to the present invention includes an oscillator 61 which can be connected to all of the first electrodes 23 via a plurality of test probes or the like, an antenna member 5, and a disconnection connected to the antenna member 5, for example. And a continuity determination unit 66 for detecting the presence / absence of the signal.

The oscillator 61 has a function of simultaneously applying a sine wave signal to all the conductor patterns 22 of the wiring board 2 to be inspected via the first electrode 23.
Has a conductor layer 52 that can face all of the second electrodes 24 via the insulating layer 51 when placed on the substrate.

As shown in FIG. 10A, two conductor patterns 22
When a sine wave signal is individually applied from the oscillator 61 through the first electrode 23 to the second electrode 24 and the antenna member 5 of each conductor pattern, FIGS. Is output.

As described above, when the sine wave signals are simultaneously applied from the oscillator 61 to the two conductor patterns 22 differently from the case where the sine wave signals are individually applied, the voltage level of the received signal becomes the second electrode.
When the voltage level of each received signal is different in proportion to the number of 24, the sum is the total value.

As a result, for example, when the sine wave signal is individually applied, the voltage level of the received signal changes as shown in FIG.
Assuming 120mV and 100mV respectively as shown in 10 (c), 2
When applied simultaneously to the conductor pattern 22 of FIG.
It becomes 220mV as shown in (d).

Therefore, when a sine wave signal is applied to the two conductor patterns 22 at the same time, the voltage level of the reception signal output via the antenna member 5 is 120 mV or 1 mV.
If it is 00 mV, it is determined that one of the two conductor patterns 22 is disconnected.

The inspection apparatus shown in FIG. 9 is based on such a principle. In the inspection, a sine wave signal is applied to all the conductor patterns 22 and an electromagnetic wave radiated from all the second electrodes 24 is transmitted to the antenna member 5. And are input to the signal receiving unit 65 as a received signal.

When a received signal is input to the signal receiving section 65, its voltage level is compared with a reference value stored in advance in a conduction determining section 66. When the voltage level of the received signal is lower than the reference value, the wiring board to be inspected is checked. 2 is determined to include the disconnected conductor pattern 22.

As described above, in the wiring board inspection apparatus for simultaneously applying a sine wave signal to all the conductor patterns via the first electrode, the voltage level of the signal input to the signal receiving unit via the antenna member is changed to the second level. It is proportional to the number of electrodes. Therefore, if there is a disconnection in the conductor pattern, the voltage level of the signal decreases in proportion to the number of disconnected conductor patterns, and the presence / absence of the disconnection can be determined by comparing with the voltage level of the signal when there is no disconnection. In addition, since all the conductor patterns can be inspected at the same time, the inspection time is greatly reduced.

However, the inspection apparatus of FIG. 9 can detect the presence / absence of disconnection of the conductor pattern in a short time, but cannot specify the disconnected conductor pattern. The following modified example is an apparatus capable of detecting the presence / absence of disconnection of a conductor pattern in a short time and specifying the disconnected conductor pattern.

In the first modification of the inspection apparatus, the voltage or frequency of the sine wave signal applied differs for each conductor pattern as shown in FIG. 11, and the modification shown in FIG. Are applied from the oscillator 61 for each conductor pattern.

When a received signal is input to the signal receiving unit 65, its voltage level is compared with a reference value stored in advance in a conduction determination unit 66, and when the voltage level of the received signal is lower than the reference value, the wiring board to be inspected. 2 is determined to include the disconnected conductor pattern 22.

The voltage level of the received signal obtained from each conductor pattern substantially corresponds to the voltage of the sine wave signal applied from the oscillator 61, and the disconnection was performed by performing an inverse calculation from the difference between the reference value and the voltage level of the received signal. It is possible to specify the conductor pattern.

In the modification shown in FIG. 11 (b), a sine wave signal having the same voltage but different frequency is applied from an oscillator 61 for each conductor pattern, and although not shown, a signal receiving signal to which a received signal is input is applied. The unit 65 has a frequency discrimination circuit that detects a voltage level for each frequency.

Therefore, the continuity determining unit 66 compares the voltage level of the received signal with a reference value stored in advance for each frequency to detect the presence / absence of disconnection of the conductor pattern and to determine whether the conductor pattern is disconnected from the missing frequency. Can be specified.

In the inspection apparatus shown in FIG. 9, the distance between the second electrode and the conductor layer and the facing area between each of the second electrodes and the conductor layer are constant, but in the second modification, it is shown in FIG. As described above, the distance between the second electrode and the conductor layer is different for each conductor pattern.

That is, the antenna member 5 has a step formed in the conductor layer 52 so that the distance g from the second electrode 24 changes for each conductor pattern, and the insulating layer 51 is formed on the conductor layer 52 having the step.
Is formed, the surface of the antenna member 5 in contact with the second electrode 24 is flattened.

As described above, by changing the distance g from the second electrode 24 for each conductor pattern, each second
Even if the level of the electromagnetic wave radiated from the second electrode 24 is the same, a difference occurs in the voltage level of the received signal transmitted from the second electrode 24 to the antenna member 5.

When a received signal is input to the signal receiving section 65, its voltage level is compared with the reference value stored in the conduction determining section 66, but the back calculation is performed from the difference between the reference value and the voltage level of the received signal. This makes it possible to specify the disconnected conductor pattern.

Further, each of the second electrodes 24 and the conductor layer 52
The conductor layer 52 is formed such that the area opposed to the conductor pattern differs for each conductor pattern.
Even if the distance g between the electrode 24 and the conductor layer 52 is constant, a difference occurs in the voltage level of the received signal.

When a received signal is input to the signal receiving section 65, its voltage level is compared with the reference value stored in the conduction determining section 66, but the back calculation is performed from the difference between the reference value and the voltage level of the received signal. This makes it possible to specify the disconnected conductor pattern.

However, in the case of a wiring board having a small area of the second electrode, it is difficult to change the facing area for each conductor pattern. Since the voltage level difference is small, it is difficult to specify a disconnected conductor pattern.

Therefore, for example, as shown in FIG.
Is applied to a part of a wiring board arranged in a plurality of rows, and a conductor layer facing a row of the second electrodes 24 is applied.
By providing a difference between the widths w ₁ and w ₂ of 52, a difference occurs in the voltage level of the received signal.

When the number of conductor patterns increases, the second electrode
Although it is difficult to realize a method of changing the distance g between the conductor layer 52 and the conductor layer 52 for each conductor pattern, it is possible to identify a conductor pattern that has been disconnected by combining the method with a method of changing the facing area between the second electrode 24 and the conductor layer 52. It will be easier.

In FIG. 9, the oscillator 61 is connected to the first electrode 23 and the received signal is input from the antenna member 5 to the signal receiving section 65. It is also possible to obtain the same effect by connecting the electrode 23 to the signal receiving unit 65.

A further inspection apparatus of the wiring board inspection apparatus according to the present invention comprises a switching unit 4 and a measuring circuit 8 as shown in FIG. A plurality of switch elements 41 connectable to the electrodes 23 are provided.

The common terminals 44 of the switch elements 41 are connected to the corresponding first electrodes 23, respectively. When one switch element 41 is operated, an arbitrary first electrode 23 (second from the top in the figure) Is selected, and the remaining first electrode 23 is configured to be short-circuited.

All the switching elements 41 are connected to the first contact
42 is collectively connected to an oscillator 61 capable of outputting a sine wave signal, and the sine wave signal output from the oscillator 61 is applied to the conductor pattern 22 via the switch element 41 and the selected first electrode 23. Is done.

The measuring circuit 8 includes a signal receiving section 65 for detecting disconnection and a conduction determining section 66 in addition to the oscillator 61 capable of outputting a sine wave signal. Electromagnetic waves radiated from all the second electrodes 24 are Each is input from the antenna member 5 to the signal receiving section 65 as a received signal.

When a received signal is input to signal receiving section 65, its voltage level is compared with a reference value stored in advance in conduction determining section 66. When the voltage level of the received signal is lower than the reference value, the sine wave signal It is determined that the applied conductor pattern 22 is disconnected.

When the selected conductor pattern 22 is short-circuited with the adjacent conductor pattern 22, a sine wave signal is applied to all the conductor patterns 22 via the switching unit 4, and the voltage level of the received signal is reduced. Since it is higher than the reference value, it can be easily detected.

Although not shown, the switching unit 4 selects an arbitrary first electrode 23, applies a sine wave signal, and short-circuits the remaining first electrode 23 to form an associated conductor pattern. It is also possible to configure so that everything is connected to the ground circuit.

In this case, when the voltage level of the received signal is lower than the reference value, the conductor pattern 22 to which the sine wave signal is applied
Is determined to be disconnected, and when the adjacent conductor pattern 22 is short-circuited, the voltage level of the received signal becomes the ground level, which can be easily detected.

As described above, still another inspection apparatus of the present invention for applying a sine wave signal to each conductor pattern via the switching unit is the other inspection apparatus of the invention for applying a sine wave signal to all conductor patterns simultaneously. Although the inspection time is longer than that of the apparatus, the inspection time can be greatly reduced as compared with the conventional inspection apparatus that sequentially applies a sine wave signal or a DC voltage to each conductor pattern and detects a short circuit of the conductor pattern. Moreover, it is difficult to specify the broken conductor pattern in the another inspection apparatus of the present invention, but the other inspection apparatus of the present invention is characterized in that the broken conductor pattern can be easily specified.

A further inspection apparatus of the wiring board inspection apparatus of the present invention shown in FIG. 13 has a switching unit as means for selecting a conductor pattern. For example, one test probe connected to an oscillator 61 instead of the switching unit The first electrode
23 may be sequentially contacted.

In this case, however, a sine wave signal is applied to the first electrode 23 in contact with the test probe, and the disconnection of the conductor pattern is detected. However, the first electrode 23 related to the adjacent conductor pattern is free. Therefore, a short circuit of the conductor pattern cannot be detected.

[0084]

As described above, according to the present invention, the presence / absence of disconnection of the conductor pattern and the presence / absence of a short circuit between the conductor patterns can be inspected simultaneously, or when inspecting only the disconnection of the conductor pattern, the inspection can be performed in a relatively short time. An inspection device and an inspection method can be provided.

[Brief description of the drawings]

FIG. 1 is a block diagram showing a wiring board inspection apparatus according to the present invention.

FIG. 2 is a diagram showing an input waveform and a detection waveform.

FIG. 3 is a flowchart showing a wiring board inspection method according to the present invention.

FIG. 4 is a perspective view showing an example of a wiring board to be inspected.

FIG. 5 is a diagram showing the principle of a conventional wiring inspection machine.

FIG. 6 is a block diagram showing a conventional wiring board inspection apparatus.

FIG. 7 is a diagram illustrating an example of a switching unit.

FIG. 8 is a flowchart showing a conventional wiring board inspection method.

FIG. 9 is a block diagram showing another inspection apparatus according to the present invention.

FIG. 10 is a diagram illustrating the operation principle of another inspection apparatus.

FIG. 11 is a view showing a first modification of another inspection apparatus.

FIG. 12 is a view showing a second modified example of another inspection apparatus.

FIG. 13 is a block diagram showing still another inspection apparatus according to the present invention.

[Explanation of symbols]

 2 Wiring board to be inspected 4 Switching unit 5 Antenna member 7 Measurement circuit 8 Measurement circuit 22 Conductor pattern 23 First electrode 24 Second electrode 41 Switch element 44 Common terminal 51 Insulating layer 52 Conductive layer 61 Oscillator 65 Signal receiver 66 Conduction Judgment unit 71 Voltage application unit 72 Current detection unit 73 Insulation judgment unit 74 Signal reception unit 75 Continuity judgment unit

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Toshinori Murata 4-1-1, Kamiodanaka, Nakahara-ku, Kawasaki-shi, Kanagawa F-term in Fujitsu Limited (reference) 2G014 AA02 AA03 AA13 AB59 AC09

Claims (8)

[Claims] 1. An apparatus for inspecting a wiring board on which a plurality of conductor patterns having a first electrode and a second electrode are formed for disconnection of the conductor patterns and short-circuit between the conductor patterns, Having a switching unit for selecting said first electrode and short-circuiting the remaining first electrodes to each other, and a conductor layer dielectrically coupled to all of said second electrodes via an insulating layer A voltage application unit comprising: a member; and a measurement circuit, wherein the measurement circuit applies a test voltage whose potential changes instantaneously or a test voltage having a pulse waveform to the first electrode selected by the switching unit. , A current detecting unit and an insulation determining unit, and a signal receiving unit and a conduction determining unit, wherein the current detecting unit and the insulation determining unit
When the test voltage is applied to the electrodes of the first electrode, a current flowing through the remaining first electrode that has been short-circuited is detected to determine whether there is a short circuit between the conductor patterns. The receiving unit and the continuity determining unit are connected to the selected first terminal.
A wiring board inspection apparatus having a function of receiving a signal input from the antenna member when the test voltage is applied to the electrode and determining whether or not the conductor pattern is disconnected. 2. A method for inspecting a wiring board on which a plurality of conductor patterns having a first electrode and a second electrode are formed for disconnection of the conductor pattern and short-circuit between the conductor patterns, Having a switching unit for selecting said first electrode and short-circuiting the remaining first electrodes to each other, and a conductor layer dielectrically coupled to all of said second electrodes via an insulating layer A voltage application unit comprising: a member; and a measurement circuit, wherein the measurement circuit applies a test voltage whose potential changes instantaneously or a test voltage having a pulse waveform to the first electrode selected by the switching unit. , A current detecting unit and an insulation determining unit, and a signal receiving unit and a conduction determining unit, wherein the current detecting unit and the insulation determining unit
When the test voltage is applied to the electrodes of the first electrode, a current flowing through the remaining first electrode that has been short-circuited is detected to determine whether there is a short circuit between the conductor patterns. The receiving unit and the continuity determining unit are connected to the selected first terminal.
When the test voltage is applied to the electrodes, a signal input from the antenna member is received, and the test voltage is reduced by using a wiring board inspection apparatus having a function of determining whether or not the conductor pattern is disconnected. When the voltage is applied, if the level of the signal input from the antenna member to the signal receiving portion exceeds the reference value, there is no disconnection in the conductor pattern corresponding to the selected first electrode, and is equal to or less than the reference value. If so, it is determined that there is a break in the conductor pattern, and the value of the current flowing through the short-circuited first electrode is
The conductor pattern corresponding to the selected first electrode is short-circuited with another conductor pattern if the reference value is exceeded, and it is determined that there is no short-circuit if the conductor pattern is less than the reference value. Inspection methods. 3. An apparatus for inspecting a wiring board on which a plurality of conductor patterns each having a first electrode and a second electrode are formed for disconnection of the conductor pattern, comprising: an oscillator; An antenna member having a conductor layer inductively coupled to all of the second electrodes; a signal receiving unit and a continuity determining unit; and the oscillator includes all of the conductor patterns via the first electrodes. A function of simultaneously applying a test signal of a sine waveform or a pulse waveform, wherein the signal receiving unit and the continuity determining unit receive a signal input from the antenna member, compare the signal with a reference voltage, An inspection apparatus for a wiring board, having a function of determining the presence / absence of disconnection of the conductor pattern. 4. The wiring board according to claim 3, wherein the test signal applied to all the conductor patterns at the same time is a signal having the same frequency and signal level or a signal having a different frequency or signal level for each conductor pattern. Inspection equipment. 5. The antenna member is formed such that an interval between a second electrode and a conductor layer is different for each conductor pattern, or an area of opposition between the second electrode and the conductor layer is different for each conductor pattern. The inspection apparatus for a wiring board according to claim 3. 6. A method of inspecting a wiring board on which a plurality of conductor patterns having a first electrode and a second electrode are formed for disconnection of the conductor pattern, comprising: an oscillator and an insulating layer interposed therebetween. An antenna member having a conductor layer inductively coupled to all of the second electrodes; a signal receiving unit and a continuity determining unit; and the oscillator includes all of the conductor patterns via the first electrodes. A function of simultaneously applying a test signal of a sine waveform or a pulse waveform, wherein the signal receiving unit and the continuity determining unit receive a signal input from the antenna member, compare the signal with a reference voltage, The antenna member is placed on the wiring board to be inspected so as to face all of the second electrodes by using a wiring board inspection apparatus having a function of determining whether or not the conductor pattern is disconnected. Or through the antenna member A test signal of a sine waveform or a pulse waveform was simultaneously applied to all the conductor patterns, and a signal input from the antenna member or all of the first electrodes was received. The output voltage of the signal was disconnected. Wiring characterized by comparing the output voltage of the signal with a reference output voltage when there is no disconnection and detecting the presence or absence of a disconnection of the conductor pattern by utilizing the fact that the conductor pattern decreases in proportion to the number of the conductor patterns. Board inspection method. 7. An apparatus for inspecting a wiring board on which a plurality of conductor patterns each having a first electrode and a second electrode are formed for disconnection of the conductor patterns and short-circuit between the conductor patterns, A switching unit connected to the first electrode for selecting any of the first electrodes and short-circuiting the remaining first electrodes; and a dielectric unit for all of the second electrodes via an insulating layer. An antenna member having a conductor layer coupled thereto, and a measurement circuit, wherein the measurement circuit applies a test wave signal having a sine waveform or a pulse waveform to the first electrode selected by the switching unit. An oscillator, a signal receiving unit and a conduction determining unit, wherein the signal receiving unit and the conduction determining unit receive a signal input from the antenna member when a test signal is applied to the first electrode. And the conductor A wiring board inspection device having a function of detecting the presence or absence of disconnection or short circuit of a pattern. 8. A method for inspecting a wiring board on which a plurality of conductor patterns having a first electrode and a second electrode are formed for disconnection of the conductor pattern and short-circuit between the conductor patterns, A switching unit connected to the first electrode for selecting any of the first electrodes and short-circuiting the remaining first electrodes; and a dielectric unit for all of the second electrodes via an insulating layer. An antenna member having a conductor layer coupled thereto, and a measurement circuit, wherein the measurement circuit applies a test wave signal having a sine waveform or a pulse waveform to the first electrode selected by the switching unit. An oscillator, a signal receiving unit and a conduction determining unit, wherein the signal receiving unit and the conduction determining unit receive a signal input from the antenna member when a test signal is applied to the first electrode. And the conductor The antenna member is placed on the wiring board to be inspected so as to face all of the second electrodes by using a wiring board inspection apparatus having a function of detecting the presence or absence of disconnection or short circuit of the pattern. A sine waveform or a pulse waveform test signal is simultaneously applied to all conductor patterns via the unit or the antenna member, and a signal input via the antenna member or the switching unit is received. If the wire is broken, the output voltage of the signal decreases, and if the wire is short-circuited with an adjacent conductor pattern, the output voltage of the signal increases. A method for inspecting a wiring board, comprising: