JP2000248178A - Polyimide precursor solution, its preparation, coating obtained from it and preparation of its coating - Google Patents
Polyimide precursor solution, its preparation, coating obtained from it and preparation of its coatingInfo
- Publication number
- JP2000248178A JP2000248178A JP11056365A JP5636599A JP2000248178A JP 2000248178 A JP2000248178 A JP 2000248178A JP 11056365 A JP11056365 A JP 11056365A JP 5636599 A JP5636599 A JP 5636599A JP 2000248178 A JP2000248178 A JP 2000248178A
- Authority
- JP
- Japan
- Prior art keywords
- general formula
- polyimide precursor
- precursor solution
- carbon
- diamine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920001721 polyimide Polymers 0.000 title claims description 75
- 239000004642 Polyimide Substances 0.000 title claims description 63
- 239000002243 precursor Substances 0.000 title claims description 43
- 238000000576 coating method Methods 0.000 title claims description 31
- 239000011248 coating agent Substances 0.000 title claims description 27
- 238000002360 preparation method Methods 0.000 title 2
- 150000004985 diamines Chemical class 0.000 claims abstract description 34
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 20
- 239000002904 solvent Substances 0.000 claims abstract description 20
- 125000004432 carbon atom Chemical group C* 0.000 claims abstract description 17
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 16
- 125000003118 aryl group Chemical group 0.000 claims abstract description 14
- 150000000000 tetracarboxylic acids Chemical class 0.000 claims abstract description 14
- 125000001931 aliphatic group Chemical group 0.000 claims abstract description 6
- 150000001721 carbon Chemical group 0.000 claims abstract description 5
- 238000004519 manufacturing process Methods 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 11
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 claims description 10
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 claims description 8
- 125000006158 tetracarboxylic acid group Chemical group 0.000 claims description 8
- 150000001875 compounds Chemical class 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 4
- 125000004429 atom Chemical group 0.000 claims description 2
- -1 tetracarboxylic acid dianhydride Chemical class 0.000 abstract description 12
- 150000003839 salts Chemical class 0.000 abstract description 9
- 238000002156 mixing Methods 0.000 abstract description 2
- 229920000642 polymer Polymers 0.000 description 12
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 9
- 238000003756 stirring Methods 0.000 description 8
- 239000000178 monomer Substances 0.000 description 7
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 5
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000006116 polymerization reaction Methods 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- NAQMVNRVTILPCV-UHFFFAOYSA-N hexane-1,6-diamine Chemical compound NCCCCCCN NAQMVNRVTILPCV-UHFFFAOYSA-N 0.000 description 4
- 239000012299 nitrogen atmosphere Substances 0.000 description 4
- 229920005575 poly(amic acid) Polymers 0.000 description 4
- 125000006850 spacer group Chemical group 0.000 description 4
- UITKHKNFVCYWNG-UHFFFAOYSA-N 4-(3,4-dicarboxybenzoyl)phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1C(=O)C1=CC=C(C(O)=O)C(C(O)=O)=C1 UITKHKNFVCYWNG-UHFFFAOYSA-N 0.000 description 3
- VQVIHDPBMFABCQ-UHFFFAOYSA-N 5-(1,3-dioxo-2-benzofuran-5-carbonyl)-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(C(C=2C=C3C(=O)OC(=O)C3=CC=2)=O)=C1 VQVIHDPBMFABCQ-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- DKGAVHZHDRPRBM-UHFFFAOYSA-N Tert-Butanol Chemical compound CC(C)(C)O DKGAVHZHDRPRBM-UHFFFAOYSA-N 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 239000012046 mixed solvent Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000000704 physical effect Effects 0.000 description 3
- 239000002798 polar solvent Substances 0.000 description 3
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 3
- PUPZLCDOIYMWBV-UHFFFAOYSA-N (+/-)-1,3-Butanediol Chemical compound CC(O)CCO PUPZLCDOIYMWBV-UHFFFAOYSA-N 0.000 description 2
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 2
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 2
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 2
- SVTBMSDMJJWYQN-UHFFFAOYSA-N 2-methylpentane-2,4-diol Chemical compound CC(O)CC(C)(C)O SVTBMSDMJJWYQN-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- IAQRGUVFOMOMEM-UHFFFAOYSA-N but-2-ene Chemical compound CC=CC IAQRGUVFOMOMEM-UHFFFAOYSA-N 0.000 description 2
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Chemical compound CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- 150000002170 ethers Chemical class 0.000 description 2
- 150000003949 imides Chemical group 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229920000620 organic polymer Polymers 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000006798 ring closing metathesis reaction Methods 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- DNIAPMSPPWPWGF-VKHMYHEASA-N (+)-propylene glycol Chemical compound C[C@H](O)CO DNIAPMSPPWPWGF-VKHMYHEASA-N 0.000 description 1
- DNIAPMSPPWPWGF-GSVOUGTGSA-N (R)-(-)-Propylene glycol Chemical compound C[C@@H](O)CO DNIAPMSPPWPWGF-GSVOUGTGSA-N 0.000 description 1
- ZWVMLYRJXORSEP-UHFFFAOYSA-N 1,2,6-Hexanetriol Chemical compound OCCCCC(O)CO ZWVMLYRJXORSEP-UHFFFAOYSA-N 0.000 description 1
- CYSGHNMQYZDMIA-UHFFFAOYSA-N 1,3-Dimethyl-2-imidazolidinon Chemical compound CN1CCN(C)C1=O CYSGHNMQYZDMIA-UHFFFAOYSA-N 0.000 description 1
- YPFDHNVEDLHUCE-UHFFFAOYSA-N 1,3-propanediol Substances OCCCO YPFDHNVEDLHUCE-UHFFFAOYSA-N 0.000 description 1
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- 150000000190 1,4-diols Chemical class 0.000 description 1
- QWOZZTWBWQMEPD-UHFFFAOYSA-N 1-(2-ethoxypropoxy)propan-2-ol Chemical compound CCOC(C)COCC(C)O QWOZZTWBWQMEPD-UHFFFAOYSA-N 0.000 description 1
- WOOLAEUATDXVIQ-UHFFFAOYSA-N 1-[2-(methoxymethoxy)ethoxy]ethanol Chemical compound COCOCCOC(C)O WOOLAEUATDXVIQ-UHFFFAOYSA-N 0.000 description 1
- RRQYJINTUHWNHW-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxyethoxy)ethane Chemical compound CCOCCOCCOCC RRQYJINTUHWNHW-UHFFFAOYSA-N 0.000 description 1
- JOLQKTGDSGKSKJ-UHFFFAOYSA-N 1-ethoxypropan-2-ol Chemical compound CCOCC(C)O JOLQKTGDSGKSKJ-UHFFFAOYSA-N 0.000 description 1
- WFSMVVDJSNMRAR-UHFFFAOYSA-N 2-[2-(2-ethoxyethoxy)ethoxy]ethanol Chemical compound CCOCCOCCOCCO WFSMVVDJSNMRAR-UHFFFAOYSA-N 0.000 description 1
- LCZVSXRMYJUNFX-UHFFFAOYSA-N 2-[2-(2-hydroxypropoxy)propoxy]propan-1-ol Chemical compound CC(O)COC(C)COC(C)CO LCZVSXRMYJUNFX-UHFFFAOYSA-N 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- 229940093475 2-ethoxyethanol Drugs 0.000 description 1
- HCGFUIQPSOCUHI-UHFFFAOYSA-N 2-propan-2-yloxyethanol Chemical compound CC(C)OCCO HCGFUIQPSOCUHI-UHFFFAOYSA-N 0.000 description 1
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- LCGLNKUTAGEVQW-UHFFFAOYSA-N Dimethyl ether Chemical compound COC LCGLNKUTAGEVQW-UHFFFAOYSA-N 0.000 description 1
- 102100036738 Guanine nucleotide-binding protein subunit alpha-11 Human genes 0.000 description 1
- 101100283445 Homo sapiens GNA11 gene Proteins 0.000 description 1
- ALQSHHUCVQOPAS-UHFFFAOYSA-N Pentane-1,5-diol Chemical compound OCCCCCO ALQSHHUCVQOPAS-UHFFFAOYSA-N 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 101000983338 Solanum commersonii Osmotin-like protein OSML15 Proteins 0.000 description 1
- UWHCKJMYHZGTIT-UHFFFAOYSA-N Tetraethylene glycol, Natural products OCCOCCOCCOCCO UWHCKJMYHZGTIT-UHFFFAOYSA-N 0.000 description 1
- 239000001089 [(2R)-oxolan-2-yl]methanol Substances 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 150000007824 aliphatic compounds Chemical class 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 150000004984 aromatic diamines Chemical class 0.000 description 1
- OWBTYPJTUOEWEK-UHFFFAOYSA-N butane-2,3-diol Chemical compound CC(O)C(C)O OWBTYPJTUOEWEK-UHFFFAOYSA-N 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 229940019778 diethylene glycol diethyl ether Drugs 0.000 description 1
- 229940028356 diethylene glycol monobutyl ether Drugs 0.000 description 1
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 1
- 229940075557 diethylene glycol monoethyl ether Drugs 0.000 description 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 1
- XNMQEEKYCVKGBD-UHFFFAOYSA-N dimethylacetylene Natural products CC#CC XNMQEEKYCVKGBD-UHFFFAOYSA-N 0.000 description 1
- SZXQTJUDPRGNJN-UHFFFAOYSA-N dipropylene glycol Chemical compound OCCCOCCCO SZXQTJUDPRGNJN-UHFFFAOYSA-N 0.000 description 1
- QFTYSVGGYOXFRQ-UHFFFAOYSA-N dodecane-1,12-diamine Chemical compound NCCCCCCCCCCCCN QFTYSVGGYOXFRQ-UHFFFAOYSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000002320 enamel (paints) Substances 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 150000008282 halocarbons Chemical class 0.000 description 1
- GNOIPBMMFNIUFM-UHFFFAOYSA-N hexamethylphosphoric triamide Chemical compound CN(C)P(=O)(N(C)C)N(C)C GNOIPBMMFNIUFM-UHFFFAOYSA-N 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229960004592 isopropanol Drugs 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 239000002648 laminated material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 239000012778 molding material Substances 0.000 description 1
- DNIAPMSPPWPWGF-UHFFFAOYSA-N monopropylene glycol Natural products CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 150000001282 organosilanes Chemical class 0.000 description 1
- JCGNDDUYTRNOFT-UHFFFAOYSA-N oxolane-2,4-dione Chemical compound O=C1COC(=O)C1 JCGNDDUYTRNOFT-UHFFFAOYSA-N 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- 229920000166 polytrimethylene carbonate Polymers 0.000 description 1
- 235000013772 propylene glycol Nutrition 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 238000001223 reverse osmosis Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- BSYVTEYKTMYBMK-UHFFFAOYSA-N tetrahydrofurfuryl alcohol Chemical compound OCC1CCCO1 BSYVTEYKTMYBMK-UHFFFAOYSA-N 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- 238000000108 ultra-filtration Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000002759 woven fabric Substances 0.000 description 1
Landscapes
- Compositions Of Macromolecular Compounds (AREA)
- Paints Or Removers (AREA)
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、ポリイミド前駆体
溶液及びその製造方法、さらにはポリイミド前駆体溶液
から得られるポリイミド塗膜及びその製造方法に関する
ものである。The present invention relates to a polyimide precursor solution and a method for producing the same, and more particularly, to a polyimide coating film obtained from the polyimide precursor solution and a method for producing the same.
【0002】[0002]
【従来の技術】ポリイミドは、エレクトロニクス分野へ
の応用に有用なものであり、半導体デバイス上への絶縁
フィルムや保護コーティングとして用いられている。特
に全芳香族ポリイミドは、その優れた耐熱性、機械的特
性、電気的特性から、フレキシブル回路基板や集積回路
等において高密度化、多機能化等に大きく貢献してい
る。このように、微細な回路の層間絶縁膜や保護膜を形
成させる場合、ポリイミド前駆体溶液が用いられてき
た。このポリイミド前駆体溶液として、下記一般式に示
すポリアミド酸を溶質として含有するポリイミド前駆体
溶液が知られている。2. Description of the Related Art Polyimides are useful for applications in the electronics field and are used as insulating films and protective coatings on semiconductor devices. In particular, wholly aromatic polyimides have greatly contributed to higher densities, multifunctionality, and the like in flexible circuit boards and integrated circuits because of their excellent heat resistance, mechanical properties, and electrical properties. As described above, a polyimide precursor solution has been used when forming an interlayer insulating film or a protective film of a fine circuit. As this polyimide precursor solution, a polyimide precursor solution containing a polyamic acid represented by the following general formula as a solute is known.
【0003】[0003]
【化5】 Embedded image
【0004】これらポリアミド酸溶液は、溶媒中で芳香
族ジアミンと芳香族テトラカルボン酸二無水物を反応さ
せることにより製造されるもので、例えば特公昭36−
10999号公報、特開昭62−275165号公報、
特開昭64−5057号公報、特公平2−38149号
公報、特公平2−38150号公報、特開平1−299
871号公報、特開昭58−122920号公報、特公
平1−34454号公報、特開昭58−185624号
公報、Journal of Polymer Science,Macromolecular Re
views Vol.11 P.199 (1976) 、米国特許第423852
8号明細書、特公平3−4588号公報、特公平7−3
0247号公報、特開平7−41556号公報、特開平
7−62095号公報、特開平7−133349号公
報、特開平7−149896号公報、特開平6−207
014号公報、特公平7−17870号公報、特公平7
−17871号公報、IBM Technical Disclosure Bulle
tinVol.20 No.6 P.2041 (1977)等に開示されているよ
うに、溶媒として非プロトン性極性溶媒を用いたもの
や、特開平6−1915号公報に開示されているよう
に、溶媒として水溶性エーテル系化合物、水溶性アルコ
ール系化合物、水溶性ケトン系化合物及び水から選ばれ
る混合溶媒を用いるものなど、種々のポリイミド前駆体
溶液が開示されている。[0004] These polyamic acid solutions are produced by reacting an aromatic diamine and an aromatic tetracarboxylic dianhydride in a solvent.
No. 10999, JP-A-62-275165,
JP-A-64-5057, JP-B-2-38149, JP-B-2-38150, JP-A-1-299
871, JP-A-58-122920, JP-B1-34454, JP-A-58-185624, Journal of Polymer Science, Macromolecular Re.
views Vol.11 P.199 (1976), U.S. Pat.
No. 8, JP-B-3-4588, JP-B7-3
0247, JP-A-7-41556, JP-A-7-62095, JP-A-7-133349, JP-A-7-149896, JP-A-6-207
No. 014, JP-B-7-17870, JP-B-7
-17871, IBM Technical Disclosure Bulle
As disclosed in tinVol.20 No.6 P.2041 (1977) and the like, a solvent using an aprotic polar solvent as a solvent or a solvent as disclosed in JP-A-6-1915. Various polyimide precursor solutions such as those using a mixed solvent selected from a water-soluble ether compound, a water-soluble alcohol compound, a water-soluble ketone compound and water are disclosed.
【0005】また、溶質として脂肪族化合物を構成成分
として含むポリイミド前駆体を溶解しているポリイミド
前駆体溶液としては、polymer Vol.35,p4889(1994)に、
脂肪族ジアミンと芳香族テトラカルボン酸無水物を反応
させて得られる次式に示すポリアミック酸(ポリアミド
酸)を溶解しているポリイミド前駆体溶液が開示されて
いる。A polyimide precursor solution in which a polyimide precursor containing an aliphatic compound as a solute as a constituent is dissolved is described in Polymer Vol. 35, p. 4889 (1994).
A polyimide precursor solution in which a polyamic acid (polyamic acid) represented by the following formula and obtained by reacting an aliphatic diamine and an aromatic tetracarboxylic anhydride is disclosed.
【0006】[0006]
【化6】 Embedded image
【0007】上述したこれらポリイミド前駆体はいずれ
も高重合度のポリマーの溶液であり、これらポリマー溶
液からポリイミド塗膜を得る際は、一般的にはこのポリ
マー溶液を銅、ガラス等の基材上にコーティングし、加
熱することにより溶媒を除去し、イミド化を行いポリイ
ミド塗膜を得ている。[0007] All of these polyimide precursors are solutions of a polymer having a high degree of polymerization. When a polyimide coating is obtained from these polymer solutions, the polymer solution is generally coated on a substrate such as copper or glass. And heated to remove the solvent and imidize to obtain a polyimide coating film.
【0008】しかしながら、これらの高重合度のポリマ
ー溶液をコーティングする場合には、その重合度故に塗
工可能な溶液の粘度とするためには、溶質濃度を低くし
なければならないという問題があった。また、生産性を
高めるために、溶質濃度を高めると溶液の粘度が高くな
り、塗工できなくなってしまうという問題もあり、また
たとえ塗工できたとしても、機械的、熱的特性に優れた
塗膜やフィルムが得られないという問題があった。さら
に、ポリマー溶液は長期の保存に耐え難く、その重合度
を維持しつつ長期間保存することは極めて困難であっ
た。However, when coating a polymer solution having such a high degree of polymerization, there is a problem that the concentration of the solute must be reduced in order to obtain a viscosity of a coatable solution because of the degree of polymerization. . Also, in order to increase the productivity, increasing the solute concentration increases the viscosity of the solution, which causes a problem that coating cannot be performed, and even if the coating can be performed, it has excellent mechanical and thermal properties. There was a problem that a coating film or a film could not be obtained. Further, the polymer solution is hard to withstand long-term storage, and it has been extremely difficult to store the polymer solution for a long time while maintaining its degree of polymerization.
【0009】[0009]
【本発明が解決しようとする課題】上記状況に鑑み、本
発明の課題は、高濃度にもかかわらず、低粘度であるポ
リイミド前駆体溶液及びその製造方法、それから得られ
る良好な物性を有するポリイミド塗膜及びその製造方法
を提供することにある。SUMMARY OF THE INVENTION In view of the above situation, an object of the present invention is to provide a polyimide precursor solution having a low viscosity despite its high concentration, a method for producing the same, and a polyimide having good physical properties obtained therefrom. An object of the present invention is to provide a coating film and a method for producing the same.
【0010】[0010]
【課題を解決するための手段】本発明者らは上記課題を
解決すべく鋭意研究した結果、特定のモノマーを組み合
わせれば、重合体でなくともそれらモノマーを含む溶液
から、良好な物性を有するポリイミド塗膜が得られるこ
とを見い出した。すなわち、後述する一般式(1)に示
すジアミンと一般式(2)に示すテトラカルボン酸とか
らなるモノマーの塩を含有するポリイミド前駆体溶液
は、モノマーの塩を高濃度で溶解しているいるにもかか
わらず、低粘度を示し、しかも、この溶液からは高強度
のポリイミド塗膜が得られるとの知見を得、これらの知
見に基づいて、本発明に到達したものである。かかる知
見は、従来、ポリイミド前駆体溶液を構成するポリイミ
ド前駆体が高重合度のものしか知られていなかったこと
に鑑みれば全く驚くべき知見である。Means for Solving the Problems The present inventors have conducted intensive studies to solve the above-mentioned problems, and as a result, when a specific monomer is combined, even if it is not a polymer, a solution containing such a monomer has good physical properties. It has been found that a polyimide coating can be obtained. That is, the polyimide precursor solution containing the salt of the monomer composed of the diamine represented by the general formula (1) and the tetracarboxylic acid represented by the general formula (2) has a high concentration of the monomer salt dissolved therein. Nevertheless, it was found that a polyimide film having a low viscosity and a high strength was obtained from this solution, and based on these findings, the present invention has been achieved. Such a finding is a completely surprising finding in view of the fact that only a polyimide precursor having a high degree of polymerization has been known for constituting a polyimide precursor solution.
【0011】すなわち、本発明の要旨は、第1に、下記
一般式(1)に示すジアミン〔式中、Rは少なくとも1
つの炭素6員環を含む4価の芳香族残基を示し、4つの
カルボニル基はこの残基中異なった炭素原子に直接連結
しており、4つのうちの2つずつは対をなし、炭素6員
環内の隣接する炭素原子に結合しており、R’は2価の
脂肪族残基を、nは1以上の整数を示す。〕と下記一般
式(2)に示すテトラカルボン酸〔式中、R''は少なく
とも1つの炭素6員環を含む4価の芳香族残基を示し、
4つのカルボニル基はこの残基中異なった炭素原子に直
接連結しており、4つのうちの2つずつは対をなし、炭
素6員環内の隣接する炭素原子に結合している。〕とか
らなる塩を溶質として含有することを特徴とするポリイ
ミド前駆体溶液である。That is, the gist of the present invention is to provide a diamine represented by the following general formula (1) wherein R is at least 1
Shows a tetravalent aromatic residue containing six carbon six-membered rings, four carbonyl groups being directly linked to different carbon atoms in the residue, two of four being paired, R ′ is a divalent aliphatic residue, and n is an integer of 1 or more, bonded to an adjacent carbon atom in the 6-membered ring. And a tetracarboxylic acid represented by the following general formula (2), wherein R ″ represents a tetravalent aromatic residue containing at least one carbon 6-membered ring,
The four carbonyl groups are directly linked to different carbon atoms in this residue, with two of the four pairs forming a pair and being bonded to adjacent carbon atoms in the six-membered carbon ring. ] As a solute.
【0012】[0012]
【化7】 Embedded image
【0013】第2に、溶媒中で、下記一般式(3)に示
すジアミン〔式中、R’は2価の脂肪族残基を示す。〕
1モルに対して0.4〜0.8モルの下記一般式(4)
に示すテトラカルボン酸二無水物〔式中、Rは少なくと
も1つの炭素6員環を含む4価の芳香族残基を示し、4
つのカルボニル基はこの残基中異なった炭素原子に直接
連結しており、4つのうちの2つずつは対をなし、炭素
6員環内の隣接する炭素原子に結合している。〕を反応
させて、一般式(1)に示すジアミンを得た後、このジ
アミン1モルに対し一般式(2)〔式中、R''は少なく
とも1つの炭素6員環を含む4価の芳香族残基を示し、
4つのカルボニル基はこの残基中異なった炭素原子に直
接連結しており、4つのうちの2つずつは対をなし、炭
素6員環内の隣接する炭素原子に結合している。〕に示
すテトラカルボン酸を0.95〜1.05モル加えるこ
とを特徴とするポリイミド前駆体溶液の製造方法であ
る。Second, in a solvent, a diamine represented by the following general formula (3) [wherein R 'represents a divalent aliphatic residue. ]
0.4 to 0.8 mol of the following general formula (4) per 1 mol
Wherein R is a tetravalent aromatic residue containing at least one carbon 6-membered ring,
The two carbonyl groups are directly linked to different carbon atoms in this residue, with two of the four pairs being linked to adjacent carbon atoms in the six-membered carbon ring. To obtain a diamine represented by the general formula (1), and 1 mol of the diamine represents a compound represented by the general formula (2) wherein R ″ is a tetravalent group containing at least one carbon 6-membered ring. Indicates an aromatic residue,
The four carbonyl groups are directly linked to different carbon atoms in this residue, with two of the four pairs forming a pair and being bonded to adjacent carbon atoms in the six-membered carbon ring. ] In an amount of from 0.95 to 1.05 mol.
【0014】[0014]
【化8】 Embedded image
【0015】第3に、前記ポリイミド前駆体溶液から得
られるポリイミド塗膜である。第4に、前記ポリイミド
前駆体溶液を基材上に塗工し、加熱してイミド化するこ
とを特徴とするポリイミド塗膜の製造方法である。Third, there is a polyimide coating film obtained from the polyimide precursor solution. Fourthly, there is provided a method for producing a polyimide coating film, which comprises applying the polyimide precursor solution onto a substrate and heating the solution to imidize the substrate.
【0016】[0016]
【発明の実施の形態】以下本発明について詳細に説明す
る。まず、本発明で用いる用語について説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail. First, terms used in the present invention will be described.
【0017】(1)ポリイミド ポリマー鎖の繰り返し単位の80モル%以上がイミド構
造を有する有機ポリマーをいう。そして、この有機ポリ
マーは耐熱性を示す。(1) Polyimide An organic polymer in which 80% by mole or more of the repeating unit of the polymer chain has an imide structure. And this organic polymer shows heat resistance.
【0018】(2)ポリイミド前駆体 加熱又は化学的作用により閉環してポリイミドとなる有
機化合物をいう。ここで、閉環とはイミド環構造が形成
されることをいう。(2) Polyimide precursor An organic compound which becomes a polyimide by ring closure by heating or chemical action. Here, ring closure means that an imide ring structure is formed.
【0019】(3)ポリイミド前駆体溶液 ポリイミド前駆体が溶媒に溶解しているものである。こ
こで溶媒とは、25℃で液状の化合物をいう。(3) Polyimide precursor solution The polyimide precursor is dissolved in a solvent. Here, the solvent refers to a compound which is liquid at 25 ° C.
【0020】(4)粘度 (株)トキメック社製、DVL−BII型デジタル粘度計
(B型粘度計)を用い、20℃における回転粘度を測定
したものである。(4) Viscosity The rotational viscosity at 20 ° C. was measured using a DVL-BII digital viscometer (B-type viscometer) manufactured by Tokimec Co., Ltd.
【0021】(5)溶質濃度 溶液中に占めるポリイミド前駆体の重量割合を百分率で
表した数値である。(5) Solute Concentration This is a numerical value in which the weight ratio of the polyimide precursor in the solution is expressed in percentage.
【0022】(6)ポリイミド塗膜 例えば銅、アルミニウム、ガラス等の基材上に形成され
たポリイミドの膜をいう。これらポリイミド塗膜のなか
で基材と密着したまま使用されるものをポリイミド被覆
物といい、基材から剥離して使用されるものをポリイミ
ドフィルムという。(6) Polyimide coating film A polyimide film formed on a substrate such as copper, aluminum and glass. Among these polyimide coatings, those used in close contact with the substrate are called polyimide coatings, and those used after being peeled off from the substrate are called polyimide films.
【0023】さらに本発明について説明する。本発明の
ポリイミド前駆体溶液は、一般式(1)に示すジアミン
と一般式(2)に示すテトラカルボン酸からなる塩が溶
質として溶媒中に溶解している。一般式(1)に示すジ
アミンにおいて、Rは少なくとも1つの炭素6員環を含
む4価の芳香族残基を示し、4つのカルボニル基はこの
残基中異なった炭素原子に直接連結しており、4つのう
ちの2つずつは対をなし、炭素6員環内の隣接する炭素
原子に結合している。Rの具体例としては次のようなも
のが挙げられる。Next, the present invention will be described. In the polyimide precursor solution of the present invention, a salt composed of a diamine represented by the general formula (1) and a tetracarboxylic acid represented by the general formula (2) is dissolved in a solvent as a solute. In the diamine represented by the general formula (1), R represents a tetravalent aromatic residue containing at least one carbon 6-membered ring, and four carbonyl groups are directly linked to different carbon atoms in the residue. , Two of the four are paired and are attached to adjacent carbon atoms in the six-membered carbon ring. Specific examples of R include the following.
【0024】[0024]
【化9】 Embedded image
【0025】特にRとしては、次のものが好ましい。Particularly, R is preferably the following.
【0026】[0026]
【化10】 Embedded image
【0027】R’は2価の脂肪族残基を示し、R’の具
体例としては次のようなものが挙げられる。R 'represents a divalent aliphatic residue, and specific examples of R' include the following.
【0028】[0028]
【化11】 Embedded image
【0029】特に、R’としては次のものが好ましい。Particularly, R 'is preferably as follows.
【0030】[0030]
【化12】 Embedded image
【0031】また、一般式(1)に示すジアミンにおい
て、nは1〜20の整数を示し、ポリイミド前駆体溶液
の粘度を勘案すれば、nは1〜10の範囲にあることが
好ましい。In the diamine represented by the general formula (1), n represents an integer of 1 to 20, and n is preferably in the range of 1 to 10 in consideration of the viscosity of the polyimide precursor solution.
【0032】一般式(2)に示すテトラカルボン酸にお
いて、R''は少なくとも1つの炭素6員環を含む4価の
芳香族残基を示し、4つのカルボニル基はこの残基中異
なった炭素原子に直接連結しており、4つのうちの2つ
ずつは対をなし、炭素6員環内の隣接する炭素原子に結
合している。R''の具体例としては前記Rとして示した
ものが挙げられ、好ましいものとしても同様のものが挙
げられ、一般式(1)に示すジアミンと一般式(2)に
示すテトラカルボン酸とからなる塩において、R及び
R''として同一のものが用いられていても異なって用い
られてもよい。In the tetracarboxylic acid represented by the general formula (2), R ″ represents a tetravalent aromatic residue containing at least one carbon 6-membered ring, and four carbonyl groups are different carbon atoms in this residue. It is directly connected to an atom, and two of the four are paired and are attached to adjacent carbon atoms in a six-membered carbon ring. Specific examples of R ″ include those described above as R, and preferred examples thereof include the same. The diamine represented by the general formula (1) and the tetracarboxylic acid represented by the general formula (2) In the salt, the same R and R ″ may be used or different.
【0033】本発明の溶液において、溶媒としては一般
式(1)に示すジアミンと一般式(2)に示すテトラカ
ルボン酸とからなる塩を溶かす溶媒であればいかなる溶
媒も用いることができ、例えば、非プロトン性極性溶
媒、エーテル系化合物、水溶性アルコール系化合物等を
挙げることができる。In the solution of the present invention, any solvent can be used as a solvent, as long as it can dissolve a salt composed of a diamine represented by the general formula (1) and a tetracarboxylic acid represented by the general formula (2). And aprotic polar solvents, ether compounds and water-soluble alcohol compounds.
【0034】具体的には、非プロトン性極性溶媒として
は、N−メチルピロリドン、N,N−ジメチルホルムア
ミド、N,N−ジメチルアセトアミド、ジメチルスルホ
キシド、ヘキサメチルフォスフォラアミド、N,N’−
ジメチルイミダゾリジノン等が挙げられ、エーテル系化
合物としては、2−メトキシエタノール、2−エトキシ
エタノール、2−(メトキシメトキシ)エトキシエタノ
ール、2−イソプロポキシエタノール、2−ブトキシエ
タノール、テトラヒドロフルフリルアルコール、ジエチ
レングリコール、ジエチレングリコールモノメチルエー
テル、ジエチレングリコールモノエチルエーテル、ジエ
チレングリコールモノブチルエーテル、トリエチレング
リコール、トリエチレングリコールモノエチルエーテ
ル、テトラエチレングリコール、1−メトキシ−2−プ
ロパノール、1−エトキシ−2−プロパノール、ジプロ
ピレングリコール、ジプロピレングリコールモノメチル
エーテル、ジプロピレングリコールモノエチルエーテ
ル、トリプロピレングリコールモノメチルエーテル、ポ
リエチレングリコール、ポリプロピレングリコール、テ
トラヒドロフラン、ジオキサン、1,2−ジメトキシエ
タン、ジエチレングリコールジメチルエーテル、ジエチ
レングリコールジエチルエーテル等が挙げられ、水溶性
アルコール系化合物としては、メタノール、エタノー
ル、1−プロパノール、2−プロパノール、tert−
ブチルアルコール、エチレングリコール、1,2−プロ
パンジオール、1,3−プロパンジオール、1,3−ブ
タンジオール、1,4−ブタンジオール、2,3−ブタ
ンジオール、1,5−ペンタンジオール、2−ブテン−
1,4−ジオール、2−メチル−2,4−ペンタンジオ
ール、1,2,6−ヘキサントリオール、ジアセトンア
ルコール等が挙げられ、上記各化合物を単独、もしくは
二種以上を混合して用いることができる。Specifically, examples of the aprotic polar solvent include N-methylpyrrolidone, N, N-dimethylformamide, N, N-dimethylacetamide, dimethyl sulfoxide, hexamethylphosphoramide, N, N'-
Dimethylimidazolidinone and the like, and examples of the ether compound include 2-methoxyethanol, 2-ethoxyethanol, 2- (methoxymethoxy) ethoxyethanol, 2-isopropoxyethanol, 2-butoxyethanol, tetrahydrofurfuryl alcohol, Diethylene glycol, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol monobutyl ether, triethylene glycol, triethylene glycol monoethyl ether, tetraethylene glycol, 1-methoxy-2-propanol, 1-ethoxy-2-propanol, dipropylene glycol, Dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, tripropylene glycol Chole monomethyl ether, polyethylene glycol, polypropylene glycol, tetrahydrofuran, dioxane, 1,2-dimethoxyethane, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, and the like. Examples of the water-soluble alcohol compound include methanol, ethanol, 1-propanol, and 2- Propanol, tert-
Butyl alcohol, ethylene glycol, 1,2-propanediol, 1,3-propanediol, 1,3-butanediol, 1,4-butanediol, 2,3-butanediol, 1,5-pentanediol, 2- Butene
Examples include 1,4-diol, 2-methyl-2,4-pentanediol, 1,2,6-hexanetriol, diacetone alcohol, and the like, and the above compounds may be used alone or as a mixture of two or more. Can be.
【0035】このうち特に好ましい例としては、単独溶
媒としては、N,N−ジメチルホルムアミド、N,N−
ジメチルアセトアミド、N−メチルピロリドンが挙げら
れ、混合溶媒としては、N−メチルピロリドンとジエチ
レングリコールモノメチルエーテル、N−メチルピロリ
ドンとメタノール、N−メチルピロリドンと2―メトキ
シエタノール等の組み合わせが挙げられる。Of these, particularly preferred examples include N, N-dimethylformamide and N, N-
Examples include dimethylacetamide and N-methylpyrrolidone, and examples of the mixed solvent include combinations of N-methylpyrrolidone and diethylene glycol monomethyl ether, N-methylpyrrolidone and methanol, N-methylpyrrolidone and 2-methoxyethanol, and the like.
【0036】本発明におけるポリイミド前駆体溶液のポ
リイミド前駆体の濃度は、20重量%以上が好ましく、
より好ましくは20〜85重量%である。20重量%未
満では所定の膜厚を得るために、繰り返し塗工する必要
が生じる場合があり、一方濃度が85重量%を超えると
粘度が上昇し、塗工が困難になることがある。また、ポ
リイミド前駆体溶液の粘度は、後述する塗工方法にもよ
るが、通常0.1〜100ポイズが好ましく、0.2〜
85ポイズがより好ましい。粘度が100ポイズを超え
ると塗工が困難になる場合があり、一方0.1ポイズ未
満であると、塗工後に膜厚が不均一になる場合がある。
本発明におけるポリイミド前駆体溶液は、一般式(1)
に示すジアミン溶液に、一般式(2)に示すテトラカル
ボン酸を添加することにより製造することができる。In the present invention, the concentration of the polyimide precursor in the polyimide precursor solution is preferably 20% by weight or more.
More preferably, it is 20 to 85% by weight. When the concentration is less than 20% by weight, it may be necessary to repeatedly apply the coating to obtain a predetermined film thickness. On the other hand, when the concentration exceeds 85% by weight, the viscosity may increase, and the coating may be difficult. The viscosity of the polyimide precursor solution depends on the coating method described below, but is preferably 0.1 to 100 poise, and is preferably 0.2 to 100 poise.
85 poise is more preferred. If the viscosity exceeds 100 poise, coating may be difficult, while if it is less than 0.1 poise, the film thickness may be uneven after coating.
The polyimide precursor solution in the present invention has the general formula (1)
Can be produced by adding a tetracarboxylic acid represented by the general formula (2) to a diamine solution represented by the following formula:
【0037】ここでは、好ましい例として、非プロトン
性極性化合物の溶媒中で、一般式(4)に示すテトラカ
ルボン酸二無水物と一般式(3)に示すジアミンとを反
応させることにより、一般式(1)に示すジアミンの溶
液を製造した後、一般式(2)に示すテトラカルボン酸
を添加してポリイミド前駆体溶液を製造する方法につい
て述べる。Here, as a preferred example, a tetracarboxylic dianhydride represented by the general formula (4) is reacted with a diamine represented by the general formula (3) in a solvent of an aprotic polar compound, whereby A method for producing a polyimide precursor solution by adding a diamine solution represented by the formula (1) and then adding a tetracarboxylic acid represented by the general formula (2) will be described.
【0038】まず、一般式(4)に示す芳香族テトラカ
ルボン酸二無水物及び一般式(3)に示す脂肪族ジアミ
ンとを、非プロトン性極性化合物中で反応させ、一般式
(1)に示すジアミンの溶液を得る。ついで、この反応
溶液に一般式(2)に示す芳香族テトラカルボン酸を添
加する。一般式(1)に示すジアミンを得るための一般
式(4)に示すテトラカルボン酸二無水物と一般式
(3)に示すジアンとの反応は、ジアミン1モルに対し
テトラカルボン酸二無水物0.4〜0.8モルが好まし
く、より好ましくはジアミン1モルに対しテトラカルボ
ン酸二無水物が0.45〜0.55モルである。ジアミ
ン1モルに対しテトラカルボン酸二無水物が0.4〜
0.6モルの範囲外では一般式(1)に示すジアミンが
得にくくなる。さらに一般式(2)に示す芳香族テトラ
カルボン酸の添加割合は、一般式(1)に示すジアミン
1モルに対し0.95〜1.05モル、好ましくは0.
97〜1.03モルである。一般式(2)に示す芳香族
テトラカルボン酸の添加割合が、0.95〜1.05モ
ルの範囲外では目的とする塩が得られにくくなる。反応
温度は、前記反応全般を通じて−30〜80℃が好まし
く、−20〜60℃がより好ましい。First, an aromatic tetracarboxylic dianhydride represented by the general formula (4) and an aliphatic diamine represented by the general formula (3) are reacted in an aprotic polar compound. A solution of the indicated diamine is obtained. Next, an aromatic tetracarboxylic acid represented by the general formula (2) is added to the reaction solution. The reaction of the tetracarboxylic dianhydride represented by the general formula (4) with the dian represented by the general formula (3) to obtain the diamine represented by the general formula (1) is performed by reacting 1 mol of the diamine with the tetracarboxylic dianhydride. It is preferably 0.4 to 0.8 mol, more preferably 0.45 to 0.55 mol of tetracarboxylic dianhydride per 1 mol of diamine. 0.4 to 4 moles of tetracarboxylic dianhydride per mole of diamine
Outside the range of 0.6 mol, it is difficult to obtain the diamine represented by the general formula (1). Furthermore, the addition ratio of the aromatic tetracarboxylic acid represented by the general formula (2) is 0.95 to 1.05 mol, preferably 0.1 to 1 mol of the diamine represented by the general formula (1).
97 to 1.03 mol. If the addition ratio of the aromatic tetracarboxylic acid represented by the general formula (2) is out of the range of 0.95 to 1.05 mol, it becomes difficult to obtain a target salt. The reaction temperature is preferably −30 to 80 ° C., more preferably −20 to 60 ° C., throughout the reaction.
【0039】一般式(1)に示すジアミン溶液を合成す
る際には、モノマー及び溶媒の混合順序はどんな順序に
してもよい。溶媒として、混合溶媒を用いる場合は、個
々の溶媒に別々のモノマーを溶解又は懸濁させておき、
それらを混合し、撹拌下、所定の温度と時間で反応させ
ることにより、一般式(1)に示すジアミン溶液を得
る。また、一般式(2)に示すテトラカルボン酸を添加
する方法は、前記ジアミン溶液に撹拌下、固体のまま、
もしくは溶液にして添加する。In synthesizing the diamine solution represented by the general formula (1), the order of mixing the monomer and the solvent may be any order. When using a mixed solvent as a solvent, separate monomers are dissolved or suspended in each solvent,
They are mixed and reacted at a predetermined temperature and time under stirring to obtain a diamine solution represented by the general formula (1). In addition, the method of adding the tetracarboxylic acid represented by the general formula (2) is as follows:
Alternatively, it is added as a solution.
【0040】さらに、本発明のポリイミド前駆体溶液に
は、必要に応じて例えば、有機シラン、顔料、導電性の
カーボンブラック及び金属粒子のような充填剤、摩滅
剤、誘電体、潤滑剤等の他公知の添加物を本発明の効果
を損なわない範囲で添加することができる。また、他の
重合体や、水不溶性のエーテル類、アルコール類、ケト
ン類、エステル、ハロゲン化炭化水素類、炭化水素類等
の溶媒を本発明の効果を損なわない範囲で添加すること
ができる。Further, the polyimide precursor solution of the present invention may contain, if necessary, fillers such as organosilane, pigment, conductive carbon black and metal particles, abrasives, dielectrics, lubricants and the like. Other known additives can be added as long as the effects of the present invention are not impaired. In addition, other polymers and solvents such as water-insoluble ethers, alcohols, ketones, esters, halogenated hydrocarbons, and hydrocarbons can be added as long as the effects of the present invention are not impaired.
【0041】また、ポリイミド前駆体溶液からポリイミ
ドフィルムを成形するには、スリット状ノズルから押し
出したり、バーコーター等により基材上に塗工し、乾燥
して溶媒を除去した後、これをイミド化した後、基材上
から剥離することにより製造することができる。ポリイ
ミド被覆物を得るには、ポリイミド前駆体溶液を従来公
知のスピンコート法、スプレイコート法、浸漬法等の方
法により基材上に塗工し、乾燥して溶媒を除去した後、
イミド化して得られる。In order to form a polyimide film from the polyimide precursor solution, the polyimide film is extruded from a slit-shaped nozzle or coated on a substrate using a bar coater or the like, dried to remove the solvent, and then imidized. Then, it can be manufactured by peeling off from the substrate. In order to obtain a polyimide coating, a polyimide precursor solution is applied onto a substrate by a conventionally known spin coating method, spray coating method, immersion method, etc., and after drying and removing the solvent,
It is obtained by imidization.
【0042】このように、本発明のポリイミド前駆体溶
液、それから得られるフィルム及び被覆物は、例えば、
耐熱絶縁テープ、耐熱粘着テープ、高密度磁気記録ベー
ス、コンデンサー、FPC用のフィルム等の製造に用い
られる。また、例えば、フッ素樹脂やグラファイト等を
充填した摺動部材、ガラス繊維や炭素繊維で強化した構
造部材、小型コイルのボビン、スリーブ、端末絶縁用チ
ューブ等の成形材や成形品の製造に用いられる。また、
パワートランジスターの絶縁スペーサ、磁気ヘッドスペ
ーサ、パワーリレーのスペーサ、トランスのスペーサ等
積層材の製造に用いられる。また、電線・ケーブル絶縁
被膜用、太陽電池、低温貯蔵タンク、宇宙断熱材、集積
回路、スロットライナー等のエナメルコーティング材の
製造に用いられる。また、限外ろ過膜、逆浸透膜、ガス
分離膜の製造に用いられる。また、耐熱性を有する糸、
織物、不織布等の製造にも用いられる。As described above, the polyimide precursor solution of the present invention, the film and the coating obtained therefrom are, for example,
It is used in the production of heat-resistant insulating tapes, heat-resistant adhesive tapes, high-density magnetic recording bases, capacitors, films for FPC, and the like. Further, for example, it is used for manufacturing molding materials and molded products such as sliding members filled with fluororesin or graphite, structural members reinforced with glass fiber or carbon fiber, bobbins of small coils, sleeves, and tubes for terminal insulation. . Also,
It is used for manufacturing laminated materials such as insulating spacers for power transistors, magnetic head spacers, spacers for power relays, and spacers for transformers. It is also used for the production of enamel coating materials such as wire and cable insulation coatings, solar cells, low temperature storage tanks, space insulation, integrated circuits, slot liners, and the like. Further, it is used for the production of ultrafiltration membranes, reverse osmosis membranes, and gas separation membranes. Also, a yarn having heat resistance,
It is also used in the production of woven and non-woven fabrics.
【0043】[0043]
【実施例】以下本発明を実施例により具体的に説明する
が本発明はこれらの実施例により限定されるものではな
い。The present invention will be described below in more detail with reference to examples, but the present invention is not limited to these examples.
【0044】実施例1 ヘキサメチレンジアミン2.73g(23.5mmo
l)をジメチルアセトアミド24.0gに溶解し、8℃
に保った。これに3,3’,4,4’−ベンゾフェノン
テトラカルボン酸二無水物3.78g(11.75mm
ol)を30分間にわたり徐々に加え、下記式に示すジ
アミンを得た。Example 1 2.73 g (23.5 mmol) of hexamethylenediamine
1) was dissolved in 24.0 g of dimethylacetamide,
Kept. To this, 3.78 g of 3,3 ′, 4,4′-benzophenonetetracarboxylic dianhydride (11.75 mm
ol) was gradually added over 30 minutes to obtain a diamine represented by the following formula.
【0045】[0045]
【化13】 Embedded image
【0046】1時間撹拌した後、3,3’,4,4’−
ベンゾフェノンテトラカルボン酸4.20g(11.7
5mmol)を加え、60℃に加熱してさらに1時間撹
拌を続けたところ、均一な褐色透明な溶液が得られた
(溶質濃度30重量%)。この溶液の粘度を測定したと
ころ、0.44ポイズであった。この溶液は、室温下1
2時間攪拌した後も粘度に変化はなかった。さらにこの
溶液を用いて、フィルムアプリケーターで、ガラス板上
に50μmの厚みで流延し、窒素雰囲気下80℃で1時
間乾燥した後、窒素雰囲気下250℃で3時間加熱イミ
ド化を行った後、塗膜をガラス板上から剥離したとこ
ろ、ポリイミドフィルムが得られた。このポリイミドフ
ィルムの厚みは、12.0μmであり、JIS K−7
127に準拠して測定した引っ張り強度は12.3kg
/mm2 であった。After stirring for 1 hour, 3,3 ', 4,4'-
4.20 g of benzophenonetetracarboxylic acid (11.7
5 mmol), and the mixture was heated to 60 ° C. and further stirred for 1 hour. As a result, a uniform brown transparent solution was obtained (solute concentration: 30% by weight). When the viscosity of this solution was measured, it was 0.44 poise. This solution is added at room temperature
There was no change in viscosity after stirring for 2 hours. Further, using this solution, a film applicator was used to cast a film having a thickness of 50 μm on a glass plate, dried at 80 ° C. for 1 hour in a nitrogen atmosphere, and then imidized by heating at 250 ° C. for 3 hours in a nitrogen atmosphere. When the coating film was peeled off from the glass plate, a polyimide film was obtained. The thickness of this polyimide film was 12.0 μm, and was measured according to JIS K-7.
The tensile strength measured according to 127 is 12.3 kg
/ Mm 2 .
【0047】実施例2 実施例1と同様にヘキサメチレンジアミン2.78g
(24.0mmol)をジメチルアセトアミド23.4
gに溶解し、3,3’,4,4’−ベンゾフェノンテト
ラカルボン酸二無水物5.79g(18.0mmol)
を加え、下記式に示すジアミンを得た。Example 2 As in Example 1, 2.78 g of hexamethylenediamine
(24.0 mmol) in dimethylacetamide 23.4
g, and 3.79 g (18.0 mmol) of 3,3 ′, 4,4′-benzophenonetetracarboxylic dianhydride.
Was added to obtain a diamine represented by the following formula.
【0048】[0048]
【化14】 Embedded image
【0049】1時間撹拌した後、3,3’,4,4’−
ベンゾフェノンテトラカルボン酸2.11g(6.0m
mol)8.9g(35.0mmol)を加え、さらに
1時間撹拌を続けたところ、均一な褐色透明な溶液が得
られた(溶質濃度30重量%)。この溶液の粘度を測定
したところ、2.0ポイズであった。この溶液は室温下
12時間攪拌した後も粘度に変化はなかった。さらに実
施例1と同様にして、ポリイミドフィルムを作成した。
このポリイミドフィルムの厚みは、12.2μmであ
り、引っ張り強度は11.9kg/mm 2 であった。After stirring for 1 hour, 3,3 ', 4,4'-
2.11 g of benzophenonetetracarboxylic acid (6.0 m
mol) of 8.9 g (35.0 mmol).
After stirring for 1 hour, a homogeneous brown transparent solution was obtained.
(Solute concentration 30% by weight). Measure the viscosity of this solution
As a result, it was 2.0 poise. This solution is at room temperature
There was no change in viscosity after stirring for 12 hours. More real
A polyimide film was prepared in the same manner as in Example 1.
The thickness of this polyimide film is 12.2 μm.
And the tensile strength is 11.9 kg / mm TwoMet.
【0050】実施例3 実施例2において、ジメチルアセトアミドの代わりにN
−メチル−2−ピロリドンを用いた以外はすべて実施例
2と同様に行い、茶褐色透明な溶液を得た。(溶質濃度
30重量%) さらに、実施例1と同様にして、ポリイミドフィルムを
作成した。このポリイミドフィルムの厚みは、11.8
μmであり、引っ張り強度は13.1kg/mm2 であ
った。Example 3 In Example 2, N was used instead of dimethylacetamide.
Except that -methyl-2-pyrrolidone was used, the procedure was the same as in Example 2, to obtain a brown-brown transparent solution. (Solute concentration: 30% by weight) Further, a polyimide film was prepared in the same manner as in Example 1. The thickness of this polyimide film is 11.8
μm, and the tensile strength was 13.1 kg / mm 2 .
【0051】実施例4 ドデカメチレンジアミン1.40g(7.0mmol)
をジメチルホルムアミド17.7gに溶解し、8℃に保
った。これに3,3’,4,4’−ベンゾフェノンテト
ラカルボン酸二無水物1.72g(5.3mmol)を
30分間にわたり徐々に加え、下記式に示すジアミンを
得た。Example 4 1.40 g (7.0 mmol) of dodecamethylenediamine
Was dissolved in 17.7 g of dimethylformamide and kept at 8 ° C. To this, 1.72 g (5.3 mmol) of 3,3 ′, 4,4′-benzophenonetetracarboxylic dianhydride was gradually added over 30 minutes to obtain a diamine represented by the following formula.
【0052】[0052]
【化15】 Embedded image
【0053】1時間撹拌した後、3,3’,4,4’−
ベンゾフェノンテトラカルボン酸0.61g(1.7m
mol)を加え、60℃に加熱してさらに1時間撹拌を
続けたところ、均一な黄色透明な溶液が得られた(溶質
濃度20重量%)。この溶液の粘度を測定したところ、
0.21ポイズであった。この溶液は、室温下12時間
攪拌した後も粘度に変化はなかった。さらにこの溶液を
用いて、フィルムアプリケーターでガラス板上に50μ
mの厚みで流延し、窒素雰囲気下80℃で1時間乾燥し
た後、窒素雰囲気下250℃で3時間加熱イミド化を行
った後、塗膜をガラス板上から剥離したところ、ポリイ
ミドフィルムが得られた。このポリイミドフィルムの厚
みは、8.1μmであり、引っ張り強度は9.3kg/
mm2 であった。After stirring for 1 hour, 3,3 ', 4,4'-
0.61 g of benzophenonetetracarboxylic acid (1.7 m
mol), and the mixture was heated to 60 ° C. and further stirred for 1 hour to obtain a uniform yellow transparent solution (solute concentration: 20% by weight). When the viscosity of this solution was measured,
It was 0.21 poise. The viscosity of this solution did not change even after stirring at room temperature for 12 hours. Further, using this solution, a film applicator was used to apply 50 μm on a glass plate.
m, and then dried at 80 ° C. for 1 hour under a nitrogen atmosphere, and then heated and imidized at 250 ° C. for 3 hours under a nitrogen atmosphere, and then the coating film was peeled off from the glass plate. Obtained. The thickness of this polyimide film is 8.1 μm and the tensile strength is 9.3 kg /
mm 2 .
【0054】[0054]
【発明の効果】以上のように、本発明のポリイミド前駆
体溶液は、溶質が重合体ではなくモノマーの塩であり、
高濃度で溶解しているにもかかわらず、その溶液は低粘
度である。そして、本発明のポリイミド前駆体溶液から
得られるポリイミド塗膜は良好な物性を有する。したが
って、本発明のポリイミド前駆体溶液は、大規模集積回
路等の層間絶縁膜や、保護膜の形成に用いられるスピン
コート法等において、優れた効果を奏するものである。
また、本発明のポリイミド前駆体溶液の製造方法によれ
ば、前記のポリイミド前駆体溶液を容易に製造すること
ができ、ポリイミド塗膜の製造方法によればポリイミド
塗膜を容易に製造することができる。As described above, in the polyimide precursor solution of the present invention, the solute is not a polymer but a salt of a monomer,
Despite being dissolved at a high concentration, the solution has a low viscosity. And the polyimide coating film obtained from the polyimide precursor solution of the present invention has good physical properties. Therefore, the polyimide precursor solution of the present invention has an excellent effect in a spin coating method used for forming an interlayer insulating film of a large-scale integrated circuit or a protective film.
Further, according to the method for producing a polyimide precursor solution of the present invention, the polyimide precursor solution can be easily produced, and according to the method for producing a polyimide coating film, a polyimide coating film can be easily produced. it can.
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Claims (7)
中、Rは少なくとも1つの炭素6員環を含む4価の芳香
族残基を示し、4つのカルボニル基はこの残基中異なっ
た炭素原子に直接連結しており、4つのうちの2つずつ
は対をなし、炭素6員環内の隣接する炭素原子に結合し
ており、R’は2価の脂肪族残基を、nは1〜20の整
数を示す。〕と下記一般式(2)に示すテトラカルボン
酸〔式中、R''は少なくとも1つの炭素6員環を含む4
価の芳香族残基を示し、4つのカルボニル基はこの残基
中異なった炭素原子に直接連結しており、4つのうちの
2つずつは対をなし、炭素6員環内の隣接する炭素原子
に結合している。〕とからなる塩を溶質として含有する
ことを特徴とするポリイミド前駆体溶液。 【化1】 1. A diamine represented by the following general formula (1): wherein R is a tetravalent aromatic residue containing at least one carbon 6-membered ring, and four carbonyl groups are different R 'is a divalent aliphatic residue, n' is directly linked to a carbon atom, two of four are paired, and are bonded to adjacent carbon atoms in a six-membered carbon ring. Represents an integer of 1 to 20. And a tetracarboxylic acid represented by the following general formula (2) wherein R ″ is at least one carbon atom containing at least one carbon 6-membered ring.
A four-valent aromatic residue, wherein four carbonyl groups are directly linked to different carbon atoms in the residue, and two of the four are paired with adjacent carbons in the six-membered carbon ring. Attached to an atom. ], As a solute. Embedded image
あることを特徴とする請求項1記載のポリイミド前駆体
溶液。 【化2】 2. The polyimide precursor solution according to claim 1, wherein R ″ in the general formula (2) is as follows. Embedded image
あることを特徴とする請求項1記載のポリイミド前駆体
溶液。 【化3】 3. The polyimide precursor solution according to claim 1, wherein R ′ in the general formula (1) is as follows. Embedded image
粘度が100ポイズ以下であることを特徴とする請求項
1記載のポリイミド前駆体溶液。4. The polyimide precursor solution according to claim 1, wherein the solute concentration is 20% by weight or more and the viscosity is 100 poises or less.
ミン〔式中、R’は2価の脂肪族残基を示す。〕1モル
に対して0.4〜0.8モルの下記一般式(4)に示す
テトラカルボン酸二無水物〔式中、Rは少なくとも1つ
の炭素6員環を含む4価の芳香族残基を示し、4つのカ
ルボニル基はこの残基中異なった炭素原子に直接連結し
ており、4つのうちの2つずつは対をなし、炭素6員環
内の隣接する炭素原子に結合している。〕を反応させ
て、一般式(1)に示すジアミンを得た後、このジアミ
ン1モルに対し一般式(2)〔式中、R''は少なくとも
1つの炭素6員環を含む4価の芳香族残基を示し、4つ
のカルボニル基はこの残基中異なった炭素原子に直接連
結しており、4つのうちの2つずつは対をなし、炭素6
員環内の隣接する炭素原子に結合している。〕に示すテ
トラカルボン酸を0.95〜1.05モル加えることを
特徴とする請求項1記載のポリイミド前駆体溶液の製造
方法。 【化4】 5. In a solvent, a diamine represented by the following general formula (3) wherein R ′ represents a divalent aliphatic residue. ] 0.4 to 0.8 mol per mol of tetracarboxylic dianhydride represented by the following general formula (4) wherein R is a tetravalent aromatic residue containing at least one carbon 6-membered ring. And the four carbonyl groups are directly linked to different carbon atoms in the residue, two of the four are paired, and are bonded to adjacent carbon atoms in a six-membered carbon ring. I have. To obtain a diamine represented by the general formula (1), and 1 mol of the diamine represents a compound represented by the general formula (2) wherein R ″ is a tetravalent group containing at least one carbon 6-membered ring. Denotes an aromatic residue, wherein the four carbonyl groups are directly linked to different carbon atoms in the residue, two of the four being paired,
It is attached to an adjacent carbon atom in the member ring. 2. The method for producing a polyimide precursor solution according to claim 1, wherein 0.95 to 1.05 mol of the tetracarboxylic acid is added. Embedded image
ら得られるポリイミド塗膜。6. A polyimide coating film obtained from the polyimide precursor solution according to claim 1.
基材上に塗工し、加熱してイミド化することを特徴とす
るポリイミド塗膜の製造方法。7. A method for producing a polyimide coating film, comprising applying the polyimide precursor solution according to claim 1 onto a substrate, and heating and imidizing the substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11056365A JP2000248178A (en) | 1999-03-04 | 1999-03-04 | Polyimide precursor solution, its preparation, coating obtained from it and preparation of its coating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11056365A JP2000248178A (en) | 1999-03-04 | 1999-03-04 | Polyimide precursor solution, its preparation, coating obtained from it and preparation of its coating |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000248178A true JP2000248178A (en) | 2000-09-12 |
Family
ID=13025236
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11056365A Pending JP2000248178A (en) | 1999-03-04 | 1999-03-04 | Polyimide precursor solution, its preparation, coating obtained from it and preparation of its coating |
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| Country | Link |
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| JP (1) | JP2000248178A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009016083A1 (en) * | 2007-08-02 | 2009-02-05 | Basf Se | Degradation accelerator for polymers and polymer article comprising it |
| JP2020070412A (en) * | 2018-11-02 | 2020-05-07 | 谷川油化興業株式会社 | Heat exchange medium |
-
1999
- 1999-03-04 JP JP11056365A patent/JP2000248178A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009016083A1 (en) * | 2007-08-02 | 2009-02-05 | Basf Se | Degradation accelerator for polymers and polymer article comprising it |
| JP2020070412A (en) * | 2018-11-02 | 2020-05-07 | 谷川油化興業株式会社 | Heat exchange medium |
| JP7261563B2 (en) | 2018-11-02 | 2023-04-20 | 谷川油化興業株式会社 | heat exchange medium |
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