201100238 六、發明說明： 【發明所屬之技術領域】 本發明涉及一種用於平板顯示元件用基板的麼印 (imprint)工藝，特別可以簡單地從基板分離與基板枯合著的 壓印用壓印模具的壓印模具分離裝置。 【先前技術】 在平板顯示元件用基板上形成各種功能性圖案的方法 Ο 中’ 一般採用壓印（imprint)的作業方式，並且主要使用具有 平面狀的壓印模具（stamp)的壓印裝置。 在此簡單地說明一下所述壓印裝置的結構，所述裝置 包括腔室單元；支撐台’其設置於所述腔室單元的内側， 用於放置塗敷有藥液（例如，蝕刻阻劑（etching resist)) 的基板；壓印模具，其設置於所述支撐台上側；以及固定 件（holder) ’其用於固定所述壓印模具，使之能夠與放置在 所述支撐台上的基板祐合或者分離。 〇 即，上述壓印裝置在利用固定件固定壓印模具的上表 面的狀態下，通過常規方法（例如：降落）使壓印模具與基板 粘合，然後再利用所述固定件向上拉起與基板粘合的壓印 模具，並使該模具從基板脫離。上述壓印裝置通過這種方 式進行壓印工藝。 而且，從基板分離壓印模具之前，通過常規的方法對 粘合面之間的藥液進行硬化。 因此，依序進行如上所述的粘合、硬化及分離工序時， 3 201100238 單地形成各種功能 可以在基板的藥液層上通過壓印方式簡 性圖案（pattern)。 就這種廢印作業方式而言，在將基板和慶印模具枯入 並硬化的狀態T，從基板穩定地分離壓印模具的作業非; 重要。即’在基板和壓印模具的粘合面之間，由於存在： 液的粘接力’因此分離壓印模具時，會產生非常大的阻力二 最近’爲了改善上述問題’提出了將壓印模具的整個 表面分成兩部分之|，首先分離邊緣料（第一次 ， 然後再分離中間部分（第二次分離）的方法等。 ， 但疋，就這種分離方式 7㈣叫疋1干耰起壓 的邊緣時’由於所述壓印模具的整個面積中用多個 固定件以的部分（壓印模具的邊緣部分）和非固定的部八 (象壓印模具的中間部分）的邊界處容易發生階梯狀的折彎現 進行壓印模具的分離H壓印模具的开 降低，ΐ形且容易損壞’從而壓印模具的耐久性报快就, ' 並引發縮短壽命的問題。 面之=由於壓印模具和基板的尺寸越大，作用於心 :、粘接力就越大’因此在進行大面積 業時很難適當地處理上述問題。 合及分離的方式而 ，因此很難提高壓 二而且，就在壓印裝置内同時進行粘 °由於分離工作需要消耗過多的時間 印工藝的工作效率。 201100238 【發明内容】 本發明蓉於習知技術中存在的上述問題而作。 本發明的目的在於提供一種尤其能夠在分離基板和遷 =的枯合剩，減少壓印模具的損壞程度，並可以 簡早地進行分離的壓印模具分離裝置。 爲了實現上述目的’本發明的壓印模具分離裝置包括: 支撐台’其用於放置與壓印模具粘合的基板；BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an imprint process for a substrate for a flat panel display element, and in particular, it is possible to easily separate an imprint for imprint from a substrate and a substrate. Imprinting mold separation device for the mold. [Prior Art] A method of forming various functional patterns on a substrate for a flat panel display element ’ ' generally employs an imprint operation method, and mainly employs an imprint apparatus having a planar imprint stamp. The structure of the imprint apparatus will be briefly described herein. The apparatus includes a chamber unit; the support table is disposed on the inner side of the chamber unit for placing a coating liquid (for example, an etching resist). a substrate (etching resist); an imprinting mold disposed on an upper side of the support table; and a holder for fixing the imprinting mold to be placed on the support table The substrate is bonded or separated. That is, the above-mentioned imprint apparatus binds the imprint mold to the substrate by a conventional method (for example, landing) in a state where the upper surface of the imprint mold is fixed by the fixing member, and then the up mold is pulled up by the fixing member. The substrate is bonded to the imprint mold and the mold is detached from the substrate. The above imprinting apparatus performs the imprint process in this manner. Further, the chemical solution between the bonding faces is hardened by a conventional method before separating the imprinting mold from the substrate. Therefore, when the bonding, hardening, and separating processes as described above are sequentially performed, 3 201100238 can form various functions in a single manner. A pattern can be simply formed by imprinting on the chemical layer of the substrate. In the state of the waste printing operation, in the state T in which the substrate and the printing mold are dried and hardened, the operation of stably separating the imprinting mold from the substrate is not important; That is, 'between the bonding surface of the substrate and the imprinting mold, there is: the adhesion of the liquid', so when the imprinting mold is separated, a very large resistance is generated. 2. Recently, in order to improve the above problem, it is proposed to imprint The entire surface of the mold is divided into two parts|, first, the edge material is separated (the first time, and then the middle part (second separation) is removed, etc.), but 疋, this separation method 7 (four) is called 疋1 dry up When pressing the edge, it is easy to use the portion of the entire area of the imprint mold with a plurality of fixing members (the edge portion of the imprint mold) and the boundary of the non-fixed portion 8 (such as the intermediate portion of the imprint mold) The stepped bend is now carried out. The separation of the imprinting mold is reduced, the crucible is easy to damage, and the durability of the imprinting mold is reported quickly, and the problem of shortening the life is caused. The larger the size of the imprinting mold and the substrate, the greater the adhesion to the core: the greater the adhesion. Therefore, it is difficult to properly handle the above problems when performing large-area operations. and At the same time, the adhesion is performed in the imprint apparatus. The work efficiency of the time-consuming printing process is required due to the separation work. 201100238 [Invention] The present invention is made in the above-mentioned problems in the prior art. The object of the present invention is Providing an imprinting mold separating device capable of, in particular, separating the substrate and removing the residual, reducing the degree of damage of the imprinting mold, and performing the separation early. In order to achieve the above object, the imprinting mold separating device of the present invention The method includes: a support table for placing a substrate bonded to the imprinting mold;
多個第分離用固定件（holder)，其設置於所述支撐 台的上側’將所述壓印模具整個表面的邊緣部分擡起，從 而可以將其從基板分離開； 多個第二分離用固定件，其用於擡起所述壓印模具整 個表面的令間部分，從而可以將其從基板分離開； 貝斜裝置其用於傾斜所述多個第一分離用固定件， 從而可通過所述多自第—A離賴定件的傾斜動作來擡起 所述壓印模具的邊緣部分。 如上所述的本發明由於具有能夠分開分離壓印模具的 整個表面的多個第一分離用固定件和多個第二分離用固定 件，可以簡單地進行壓印模具的分離工作。例如，本發明 可在壓印模具的整個表面中，首先擡起邊緣部分並將其分 離（第一次分離）後，再檯起壓印模具的中間部分並將其分離 開（第二次分離）。 特別是，本發明具有與多個第一分離用固定件對應的 傾斜裝置’因此例如在分離壓印模具的邊緣時，爲了使作 用於基板和壓印模具之間粘合面的粘接力所致的分離阻力 5 201100238 達到最小化，適當地傾斜所述多個第—分離用固定件，並 向側面拉所述壓印模具的邊緣部分，從 ^ ^ 叫便其從基板剝 離。本發明就是通過該方式進行分離工作。 而且’將壓印模具的整個表面分成兩部分 .^ 1刀來進行分離 時，可以適當地傾斜多個第一分離用固定 卞 從而不會使 邊界處以階梯狀折彎，因而可以防止在 叮刀離工作時壓 印模具扭曲變形或者損壞引起的壽命縮短。 【實施方式】 下面，參照附圖對本發明的優選實施例進行詳細說 明’以使所屬領域的技術人員能夠實施。 本發明的實施例可以具有各種不同的實施方式，而本 發明的保護範圍並不局限於下面描述的實施例。 圖1是本發明一實施例涉及的壓印模具分離裝置的整 體結構示意圖，其中附圖標記2表示支撐台。 所述支撐台2具有可裝載與常規的壓印用壓印模具s 粘合的基板G之結構。 即，所述支撐台2的上側具有裝載面L，如圖丨所示， 所述支撐台可以在支架F的上側水平設置，以使所述裝载 面L朝上。 而且，雖然未圖示，所述支架F上最好以圍繞所述支 撐台2的狀態設置殻體（或者蓋體）。這樣一來，可以防止基 板G或壓印模具S被外部異物汙染。 爲了把基板G以裝載的狀態固定或者解除其固定狀 201100238 態，所述支撐台s例如可以使用板狀的真空吸盤（vacuum chuck或靜電吸盤）。 因此，在所述基板G上進行壓印模具8的分離工作時， 可利用所述支樓台2簡早地固定基板（}，從而使其不動。 本發明的上述實施例所涉及的壓印模具分離裝置包括 多個第一分離用固定件4和多個第二分離用固定件6。 所述多個第一分離用固定件4和多個第二分離用固定 件6從放置在所述支撐台2上的基板〇搂起壓印模具s，從 而使之從與所述基板G粘合的狀態分離。 再次參照圖1，所述多個第一分離用固定件4和多個第 二分離用固定件6可使用吸附器’例如，下部具備真空吸 附單元Η的銷（pin)型吸附器。 雖然未圖示，所述吸附單元Η通過常規的方法產生真 空吸附力，並通過該真空吸附力來固定所述壓印模具s。 上述多個第一分離用固定件4和多個第二分離用固定 件6設置於所述支架F上，從而將所述壓印模具s的整個 表面分成多個部分後進行分離工作。 圖2和圖3是用於說明上述多個第一分離用固定件4 和多個第二分離用固定件6的較佳排列方式的附圖。 即，參照圖2,所述多個第一分離用固定件4可與所述 壓印模具S的整個表面中的左、右側邊緣部分對應設置， 所述多個第二分離用固定件6可與壓印模具s的中間部分 對應設置。 ° 另外，參照圖3,所述多個第一分離用固定件4可以與 7 201100238 所述壓印模具s邊緣的四個位置相對應設置。 具有如上配置結構的多個第一分離用固定件4和多個 第-刀離用固定件6被設置成其吸附單元Η朝下，以此來 固定所述壓印模具S的上表面。 而且’上述多個第一分離用固定件4和多個第二分離 用口疋件6從固疋件驅動單元μ接收動力，從而可以上下 方向移動。 再次參照圖1，所述固定件驅動單元Μ例如可以把常 規的夕個螺旋千斤頂j ( jaek)作爲動力源使用所述 螺旋千斤頂具有升降用螺杆Jl( screw )。 即’所述多個螺旋千斤頂J設置於所述支架F的上部， 並將所述多個升降用螺杆η和多個第-分離龍定件4和 第一刀離用件6連接而使所述多個升降用螺杆J1 此夠上下方向移動所述第—分離用固定件4和第二分離用 固定件6。 例如’所述多徊常 . 夕個弟—分離用固定件4分別與所述多個 升降用螺杆J1的娩卹、击& 耵％。卩連接，從而可以獨立地驅動。 而且’所述多伽贫 夕個第一分離用固定件6的上部分別固定 於額外的固定板J2卜，# 上並通過所述升降用螺杆_^移動固定 板J2,從而以上下方向同時驅動多個固定件。 雖然未圖示，所述螺旋千斤頂J通過常規方法（蜗輪 (wo"'’0、錐齒輪）接收齒輪電機（geared motor)的 動力，並使所述升降用螺杆^進行線形（I·:)運動，這種 、’。構不僅適用於大型重量物體的輸送，而且還具有自鎖（8也 201100238 locking)功能，因此可以保障進一步提高的操作安全性。 並且，雖然未圖示，本發明除了所述螺旋千斤頂；以 外，還可以利用氣缸並通過常規方法來推拉所述多個第一 分離用固定件4或多個第二分離用固定件6,從而使其上下 方向移動。 上述多個第一分離用固定件4和多個第二分離用固定 件6在進行從所述基板G分離粘合在基板G上的壓印模具 S的作業時，可以將所述壓印模具s的整個表面劃分並通 過兩次分離動作（第一次分離、第二次分離）來分離壓印模具 S ° ”、 本發明的上述實施例所涉及的壓印模具分離裝置還可 以包括流體喷射單元8。 所述流體喷射單元8可以向所述基板〇和壓印模具s 的粘合面之間喷射分離用流體W。 再次參照圖1’所述流體噴射單元8可以由噴射分離用 流體W的多個分離用喷嘴N構成。 並且，所述多個分離用喷嘴N可以安裝於所述支架f 上，並與所述支撐台2相隔一定距離’從而可以向所述基 板G和壓印模具s的粘合面之間噴射流體。 所述分離用流體W可以使用氮氣或者潔淨乾燥空氣 (CDA : Clean Dried Air)。 如此用多個分離用噴嘴N向基板G和壓印模具s的粘 合面之間噴射分離用流體W的結構爲所屬技術領域的技術 人員容易實施的，因此在此不再詳細說明。 9 201100238 就上述流體噴射單元8的結構而言，通過所述多個第 -分離用固定件4和多個第二分離用固定“來進行壓印 核具S的分離工作時，可通過分離用流體％的喷射壓力有 效地消除作用於基板G和壓印模具s的粘合面之間的藥液 G1 (例如，蝕刻阻劑）的粘接力。 圖4是用於說明所述流體嘴射單元㈣作用的附圖。 參照圖4’本發明可以在通過所述多個第一分離用固定 件4從基板^離或者已經分離壓印模具s的邊緣部分的 狀態下向基板G和壓印模具s㈣合面之时射分離用流 體W，從而消除藥液的粘接力。 因此，只要具備如上所述的流體喷射單元8,在從基板 G分離壓印模具S時’就能夠減少因作用於粘合面之間的藥 液的枯接力而產生的分離阻力’從而可以更加簡單地進行 所述壓印模具S的分離工作。 並且，雖然未圖示，本發明還可以通過以下方式進行 分離工作，例如，在利用所述多個第一分離用固定件4擡 起所述壓印模具S的邊緣部分的狀態下，若向已分離的縫 隙喷射分離用流體W，則會通過流體壓力來推動壓印模具s 的中間部分，從而在壓印模具s的中間部分更加穩定地吸 附於所述第二分離用固定件6的狀態下進行分離（第二次分 離）工作。 另外’本發明一實施例涉及的壓印模具分離裝置包括 傾斜裝置10。 所述傾斜裝置10可以使所述多個第一分離用固定件4 10 201100238 傾斜。 圖5是用於說明所述傾斜裝置1〇的詳細結構的附圖。 即’所述傾斜裝置10例如可以由輪送單元U1構成’a plurality of first separating holders disposed on an upper side of the support table to lift an edge portion of the entire surface of the imprinting mold so as to be separated from the substrate; and a plurality of second separations a fixing member for lifting the inter-portion portion of the entire surface of the imprinting mold so as to be separated from the substrate; the beveling device for tilting the plurality of first separating fixing members to pass The tilting action of the plurality of self-aligning members lifts the edge portion of the imprinting mold. The present invention as described above can easily perform the separation work of the imprinting mold by having a plurality of first separating fixing members and a plurality of second separating fixing members capable of separating the entire surface of the imprinting mold separately. For example, the present invention can be used in the entire surface of the imprint mold, first lifting the edge portion and separating it (first separation), then erecting the intermediate portion of the imprint mold and separating it (second separation) ). In particular, the present invention has a tilting device corresponding to a plurality of first separating fixtures. Therefore, for example, when separating the edges of the stamping die, in order to exert an adhesive force acting on the bonding face between the substrate and the stamping die The resulting separation resistance 5 201100238 is minimized, the plurality of first-separating fixing members are appropriately inclined, and the edge portion of the imprinting mold is pulled sideways, and is peeled off from the substrate. The present invention performs the separation work in this manner. Moreover, 'When the entire surface of the imprinting mold is divided into two parts. ^ 1 knife for separation, a plurality of first separating fixing yokes can be appropriately inclined so as not to bend the boundary stepwise, thereby preventing the boring in the boring tool The life shortened by the distortion or damage of the imprinting mold at work. BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings in order to enable those skilled in the art. The embodiments of the present invention can have various embodiments, and the scope of the present invention is not limited to the embodiments described below. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the entire structure of an imprinting mold separating apparatus according to an embodiment of the present invention, wherein reference numeral 2 denotes a supporting table. The support table 2 has a structure that can be loaded with a substrate G bonded to a conventional imprint stencil s. That is, the upper side of the support table 2 has a loading surface L which, as shown in Fig. ,, can be horizontally disposed on the upper side of the bracket F such that the loading surface L faces upward. Further, although not shown, it is preferable that the bracket F is provided with a casing (or a cover) in a state surrounding the support base 2. In this way, it is possible to prevent the substrate G or the imprinting mold S from being contaminated by external foreign matter. In order to fix or release the substrate G in a loaded state in the loaded state, the support table s may use, for example, a vacuum chuck (vacuum chuck or electrostatic chuck). Therefore, when the separation operation of the imprint mold 8 is performed on the substrate G, the substrate (2) can be fixed by the support stand 2 so as not to move. The imprint mold according to the above embodiment of the present invention The separating device includes a plurality of first separating fixing members 4 and a plurality of second separating fixing members 6. The plurality of first separating fixing members 4 and the plurality of second separating fixing members 6 are placed from the support The substrate on the stage 2 picks up the imprinting mold s so as to be separated from the state of being bonded to the substrate G. Referring again to Fig. 1, the plurality of first separating fixing members 4 and the plurality of second separating portions The adsorber 6 can be used, for example, a pin type adsorber having a vacuum adsorption unit 下部 at the lower portion. Although not shown, the adsorption unit 产生 generates a vacuum adsorption force by a conventional method, and passes the vacuum adsorption. a force to fix the imprinting mold s. The plurality of first separating fixing members 4 and the plurality of second separating fixing members 6 are disposed on the bracket F, thereby dividing the entire surface of the imprinting mold s into Separation work after multiple parts. Figure 2 and Figure 3 is a view for explaining a preferred arrangement of the plurality of first separating fixtures 4 and the plurality of second separating fixtures 6. That is, referring to FIG. 2, the plurality of first separating fixtures 4 may be disposed corresponding to the left and right edge portions of the entire surface of the imprinting mold S, and the plurality of second separating fixing members 6 may be disposed corresponding to the intermediate portion of the imprinting mold s. 3, the plurality of first separating fixtures 4 may be disposed corresponding to the four positions of the edge of the imprinting mold s of 201100238. The plurality of first separating fixtures 4 and the plurality of - the knife release fixing member 6 is disposed such that its adsorption unit is facing downward, thereby fixing the upper surface of the imprint mold S. Moreover, the plurality of first separation fixing members 4 and the plurality of second separations are used The mouthpiece 6 receives power from the fixing member driving unit μ so as to be movable in the up and down direction. Referring again to Fig. 1, the fixing member driving unit Μ can use, for example, a conventional gyro screw jack j (jaek) as a power source. The screw jack has a lifting screw J1 ( That is, the plurality of screw jacks J are disposed on the upper portion of the bracket F, and connect the plurality of lifting screws η and the plurality of first-separating dragon pieces 4 and the first knife separating member 6 The plurality of lifting screws J1 are moved in the vertical direction to move the first-separating fixing member 4 and the second separating fixing member 6. For example, the above-mentioned multi-function is often used. The plurality of lifting screws J1 are connected to the plurality of lifting screws J1, respectively, so as to be independently driven. Further, the upper portions of the first detaching fixing members 6 are fixed. The plurality of fixing members are simultaneously driven in the upper and lower directions by the movable fixing plate J2 on the additional fixing plate J2, #, and the screw jack J is driven by the conventional method (worm wheel). (wo"''0, bevel gear) receives the power of the geared motor and causes the lifting screw to perform a linear (I·:) movement, such as '. The structure is not only suitable for the transport of large weight objects, but also has a self-locking function (8 also 201100238 locking), thus ensuring further improved operational safety. Moreover, although not shown, in addition to the screw jack, the present invention can also push and pull the plurality of first separating fixtures 4 or the plurality of second separating fixtures 6 by a conventional method using a cylinder, thereby Move it up and down. The plurality of first separation fixing members 4 and the plurality of second separation fixing members 6 may perform the operation of separating the imprinting mold S adhered to the substrate G from the substrate G, and the imprinting mold may be used. The entire surface of s is divided and the imprinting mold S° is separated by two separation operations (first separation, second separation), and the imprinting mold separation device according to the above embodiment of the present invention may further include fluid ejection Unit 8. The fluid ejecting unit 8 may eject a separating fluid W between the substrate 〇 and the bonding surface of the imprinting mold s. Referring again to Fig. 1 ', the fluid ejecting unit 8 may be separated by the jetting fluid W. The plurality of separation nozzles N are formed. The plurality of separation nozzles N may be mounted on the bracket f and spaced apart from the support table 2 by a distance 'to the substrate G and the imprint mold The fluid is sprayed between the bonding faces of s. The separating fluid W may use nitrogen or clean dry air (CDA: Clean Dried Air). Thus, bonding of the plurality of separating nozzles N to the substrate G and the imprinting mold s is performed. Injection between faces The structure of the fluid W is easily implemented by those skilled in the art, and therefore will not be described in detail herein. 9 201100238 With regard to the structure of the fluid ejecting unit 8 described above, the plurality of first-separating fixing members 4 and When a plurality of second separation fixings are used to perform the separation operation of the imprinting fixture S, the liquid chemical acting between the bonding surface of the substrate G and the imprinting mold s can be effectively eliminated by the ejection pressure of the separation fluid %. The adhesion of G1 (for example, an etch resist). Fig. 4 is a view for explaining the action of the fluid nozzle unit (4). Referring to Fig. 4', the present invention can be applied to the surface of the substrate G and the imprinting mold s (4) in a state where the edge portions of the imprinting mold s are separated from the substrate by the plurality of first separating fixing members 4 or have been separated. The fluid W is separated to eliminate the adhesive force of the chemical solution. Therefore, as long as the fluid ejecting unit 8 as described above is provided, when the imprinting mold S is separated from the substrate G, it is possible to reduce the separation resistance caused by the dry force of the chemical solution acting between the bonding faces. The separation work of the imprinting mold S is simply performed. Further, although not shown, the present invention can perform the separating operation in the following manner, for example, in a state where the edge portion of the imprinting mold S is lifted by the plurality of first separating fixing members 4, The separated slit jet separation fluid W pushes the intermediate portion of the imprint mold s by the fluid pressure, so that the intermediate portion of the imprint mold s is more stably adsorbed to the second separation fixture 6 Separation (second separation) work is performed. Further, an imprinting mold separating apparatus according to an embodiment of the present invention includes a tilting device 10. The tilting device 10 can tilt the plurality of first separating fixtures 4 10 201100238. Fig. 5 is a view for explaining a detailed structure of the tilting device 1A. That is, the tilting device 10 can be constituted, for example, by the turning unit U1.
而所述輸送單元m具有可依據空氣壓力進行線形運動. 送單元塊Bl。 J 所述輸送單元U1可以設置於所述第一分離用固定件4 和所述螺旋千斤頂J之間，其令主體固定於所述螺旋千斤頂 J的升降用螺杆η的端部，輸送單元塊B1可連接固定於 述多個第一分離用固定件4的上部。 、 而且’以圖5爲基准時，所述輸送單元⑴通過所述輸 二早兀塊m可以左右方向移動第一分離用固定件4的上端 风樘結構 ^ ^ 刀雕用固定件 4 過，述壓，模# s的整個表面中的邊緣部分分離時，可通 ❹ 二所述第-分離用固定件4傾斜’就可以更 該邊緣部分。 匆刀離 圖6是用於說明所述傾斜裝置10的作用的附圖。 定壓=照圖6,在利用所述多個第-分離用固定件4固 Μ美"s的整個表面 移動料輪送單元⑴的輸送單元塊向左侧 輪送單元塊^ :广第—分離用固定件4的上部隨著所述 H的傾斜。因此了移動的同時’可以實現所述吸附單元 表面中的邊向側面㈣所述㈣模具S的整個 邊緣部分的同時，將其剥開的方式來進行分離（第 201100238 一次分離）工作。 如此’與簡單地向上擡起壓印模具s後將其從基板q 刀的習知分離方式相比較，ϋ過傾_進行分離的方式可 以使因作用於點合面㈣接力所産生的分離阻力達到 化。 、/尤其是，若在多個第一分離用固定件4傾斜的狀態下 進行分離工作，則在把所述壓印模具s的整個表面分成邊 緣和中間兩部分之後，經兩次分離動作進行分離時可以 防止其邊界處以階梯狀折彎而導致壓印模具s扭曲變形或 者損壞的現象。 因此’本發明的上述實施例涉及的壓印模具分離聲 置’在與壓印模具S粘合的基板G放置於所述支樓台2上 的狀態下，可利用所述多個第一分離用固定件4及多個第 二分離用固定件6將所述壓印模具S的整個表面分成兩部 分之後’將其從基板G簡單地分離開。 圖7和圖8是用於說明利用本發明的上述實施例的壓 印模具分離裝置分離壓印模具的附圖。 即，如圖7所示，在利用所述多個第一分離用固定件4 固定所述壓印模具S的整個表面中的邊緣部分的狀態下， 傾斜所述多個第一分離用固定件4。 這樣一來’通過所述多個第一分離用固定件4的傾斜 動作從基板G擡起所述壓印模具S的整個表面中的邊緣部 分，從而分離該邊緣部分（第一次分離）。 然後，如圖8所示，在利用所述多個第二分離用固定 12 201100238 件6固疋所述壓印模& s的整個表面的中間部分的狀態 下，向上移動所述多個第二分離用固定件6。 麼所述壓印模| s的整個表面的中間部分就會隨 著所述"多個第二分離用固定件6移動的同時從基板g分離 (第一-人刀離）。經過如上所述的兩次分離動作，可以將壓印 模具S的整個表面分成兩個部分後，再從基板G分離。 如此，首先分離所述壓印模具s的整個表面的邊緣部 分的方$，例如與將壓印模纟§ @整個表面—次性擡起後 刀離的方式相比較時，即使基板G和壓印模具s的粘合面 之間存在藥液G1的粘接力，也可較容易地分離壓印模具s。 而且，通過所述多個第一分離用固定件4的傾斜動作 向側面拉動壓印模具S的邊緣部分的同時將其分離的方 式，不僅可以使壓印模具s的分離阻力達到最小化，而且 §將壓印模具s的中間部分和邊緣部分分開來進行分離 時，可以防止由於它們的邊界處以階梯狀折彎，從而使所 ❹ 述壓印模具s扭曲變形或者損壞的現象。 圖9用於說明傾斜裝置1〇的其它結構。本實施例與上 述a施例相比較，其區別在於，所述多個第一分離用固定 件4通過旋轉單元u 2的驅動進行旋轉運動的同時，形成傾 斜狀態。 即’參照圖9 ’所述旋轉單元U2可以使用具有旋轉轴 B2的旋轉式氣缸（或者步進電機（stepping motor))，其主體 固定於所述升降用螺杆J1的端部，而旋轉軸B2可連接固 疋於所述第一分離用固定件4的上部。 13 201100238 而且，在所述第一分離用固定件4中吸附單元H的上 側用常規的方法（例如，鉸鏈銷結合）設置有鉸接單元H i。 就這種結構而§，可以通過所述旋轉單元U2產生及傳 遞旋轉力的同時’傾斜所述多個第一分離用固定件4。 圖10是用於說明所述傾斜裝置10的其他結構的作用 的附圖。 即，如圖10所示，在利用所述第一分離用固定件4支 撐所述壓印模具S的邊緣部分的狀態下，通過所述旋轉單 元U2朝附圖所示的方向旋轉所述第一分離用固定件4。 這樣一來’所述第一分離用固定件4旋轉時，所述吸 附單元Η可以通過鉸接單元m，並以從基板〇向側面拉動 及剝開所述壓印模具S的邊緣部分的狀態傾斜。 因此，以上述旋轉方式傾斜多個第一分離用固定件4 會使所述壓印模具S的邊緣部分簡單地分離開。 並且’所述傾斜裝置10除了上述結構以外，還可以通 過各種動力傳遞的方式傾斜所述多個第一分離用固定件 4。理所當然，這些結構也屬於本發明的保護範圍。 【圖式簡單說明】 圖1是本發明一實施例涉及的壓印模具分離裳置的整 體結構示意圖。 圖2和圖3是用於說明本發明一實施例涉及的壓印模 具分離裝置的多個第一分離用固定件和多個第二分離用固 定件的較佳排列方式的附圖。 14 201100238 圖4是用於說明本發明—實施例涉及的㈣模具分離 裝置的流时射單元的詳細結構及仙的附圖。 圖# ffi 6 π用於§兒明本發明一實施{列涉及的廢印模 具分離裝置中傾斜裝置的作用的附圖。 、 圖7和圖8是用於說明由本發明一實施例涉及的壓印 模具分離裝置進行壓印模具分離作業的附圖。 圖9和ϋ 1〇疋用於說明本發明的一實施例涉及的壓印 模具分離裝置中傾斜裝置的其他結構及仙的附圖。 【主要元件符號說明】 2 支撐台 J1 升降用螺杆 4 第一分離用支架 J2 固定板 6 第二分離用支架 Η 吸附單元 8 流體喷射單元 HI 鉸接單元 10 傾斜裝置 N 分離用噴嘴 B1 輸送單元塊 Μ 固定件驅動單元 G ' G1 基板 U1 輸送單元 15 201100238The conveying unit m has a linear movement according to the air pressure. The unit block B1 is sent. The conveying unit U1 may be disposed between the first separating fixture 4 and the screw jack J, and the main body is fixed to the end of the lifting screw η of the screw jack J, and the conveying unit block B1 The upper portion of the plurality of first separating fixtures 4 can be connected and fixed. Further, when the transfer unit (1) is used as the reference, the transport unit (1) can move the upper end wind tunnel structure of the first separating fixture 4 in the left-right direction by the second feeding block m. When the edge portion of the entire surface of the mold #s is separated, the edge portion can be further changed by tilting the first-separating fixing member 4. Fig. 6 is a view for explaining the action of the tilting device 10. Constant pressure = according to Fig. 6, in the transport unit block of the entire surface moving material transfer unit (1) using the plurality of first-separating fixing members 4 to the left side, the unit is transferred to the left side of the unit block: - The upper portion of the fixing fixture 4 is inclined with respect to the H. Therefore, it is possible to perform the separation (the first separation of 201100238) while moving the same side of the surface of the adsorption unit (4) while the entire edge portion of the mold (S) is peeled off. Thus, in comparison with the conventional separation method of simply lifting the imprinting mold s from the substrate q-knife, the separation and the separation can be performed to cause the separation resistance due to the joint force acting on the joint surface (4). Reach. In particular, if the separation operation is performed in a state in which the plurality of first separation fixing members 4 are inclined, after the entire surface of the imprinting mold s is divided into the edge and the middle portion, the separation operation is performed twice. When the separation is performed, the phenomenon that the imprinting mold s is distorted or damaged due to the stepwise bending at the boundary thereof can be prevented. Therefore, the imprinting mold separation acoustics according to the above-described embodiment of the present invention can be utilized in the state in which the substrate G bonded to the imprinting mold S is placed on the branch tower 2, and the plurality of first separations can be utilized. The fixing member 4 and the plurality of second separating fixing members 6 separate the entire surface of the imprinting mold S into two portions and then simply separate them from the substrate G. Fig. 7 and Fig. 8 are views for explaining the separation of the imprinting mold by the imprinting mold separating apparatus of the above embodiment of the invention. That is, as shown in FIG. 7, in a state in which the edge portions in the entire surface of the imprinting mold S are fixed by the plurality of first separating fixing members 4, the plurality of first separating fixing members are inclined 4. Thus, the edge portion in the entire surface of the imprinting mold S is lifted from the substrate G by the tilting action of the plurality of first separating fixing members 4, thereby separating the edge portion (first separation). Then, as shown in FIG. 8, in the state in which the intermediate portion of the entire surface of the stamping die & s is fixed by the plurality of second separating fixings 12 201100238 6 Two separate fixing members 6. The intermediate portion of the entire surface of the stamping die s is separated from the substrate g while the plurality of second separating fixtures 6 are moved (first-person knife-off). Through the two separation operations as described above, the entire surface of the imprint mold S can be divided into two portions and then separated from the substrate G. Thus, the side of the edge portion of the entire surface of the imprinting mold s is first separated, for example, when the embossing mold is compared with the manner in which the entire surface is lifted and the knife is separated, even if the substrate G and the pressure are pressed. The adhesive force of the chemical solution G1 exists between the bonding faces of the printing mold s, and the imprinting mold s can be separated relatively easily. Moreover, the manner of separating the edge portions of the imprinting mold S while pulling the edge portions of the imprinting mold S sideways by the tilting motion of the plurality of first separating fixing members 4 can not only minimize the separation resistance of the imprinting molds s, but also When the intermediate portion and the edge portion of the imprinting mold s are separated for separation, it is possible to prevent the deformation of the imprinting mold s from being deformed or damaged due to the stepwise bending at the boundary thereof. Fig. 9 is a view for explaining another structure of the tilting device 1A. This embodiment is different from the above-described embodiment in that the plurality of first separating fixtures 4 are rotationally moved by the driving of the rotating unit u 2 to form a tilting state. That is, the rotary unit U2 of 'refer to FIG. 9' can use a rotary cylinder (or stepping motor) having a rotation axis B2, the main body of which is fixed to the end of the elevation screw J1, and the rotation axis B2 The upper portion of the first separating fixture 4 can be attached and fixed. Further, the upper side of the adsorption unit H in the first separating fixture 4 is provided with the hinge unit H i by a conventional method (for example, hinge pin coupling). With this configuration, the plurality of first separating fixtures 4 can be tilted while the rotating force is generated and transmitted by the rotating unit U2. Fig. 10 is a view for explaining the action of other structures of the tilting device 10. That is, as shown in FIG. 10, in a state where the edge portion of the imprinting mold S is supported by the first separating fixture 4, the rotating unit U2 is rotated in the direction shown in the drawing. A fixing fixture 4 is used. Thus, when the first separation fixing member 4 is rotated, the adsorption unit Η can be tilted by the hinge unit m and pulled in a state of pulling and peeling off the edge portion of the imprinting mold S from the substrate side. . Therefore, tilting the plurality of first separating fixing members 4 in the above-described rotation manner causes the edge portions of the imprinting mold S to be easily separated. Further, the tilting device 10 can tilt the plurality of first separating fixtures 4 by various power transmissions in addition to the above configuration. Of course, these structures are also within the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the overall structure of an imprinting mold separated and disposed according to an embodiment of the present invention. Fig. 2 and Fig. 3 are views for explaining a preferred arrangement of a plurality of first separating fixing members and a plurality of second separating fixing members of the imprinting mold separating device according to the embodiment of the present invention. 14 201100238 Fig. 4 is a view for explaining the detailed structure of the flow timing unit of the (4) mold separating apparatus according to the present invention. Figure #ffi 6 π is used to illustrate the effect of the tilting device in the waste stamping apparatus of the present invention. Fig. 7 and Fig. 8 are views for explaining the operation of separating the imprinting mold by the imprinting mold separating apparatus according to the embodiment of the present invention. Fig. 9 and Fig. 1 are views for explaining other structures of the tilting device and the drawings of the tilting device in the imprinting mold separating device according to an embodiment of the present invention. [Main component symbol description] 2 Support table J1 Lifting screw 4 First separating bracket J2 Fixing plate 6 Second separating bracket 吸附 Adsorption unit 8 Fluid ejecting unit HI Hinging unit 10 Tilting device N Separation nozzle B1 Conveying unit block Μ Fixture drive unit G ' G1 base plate U1 transport unit 15 201100238
F 支架 S 壓印模具 J 螺旋千斤頂 w 分離用流體 16F bracket S stamping die J screw jack w separation fluid 16