JP2000081369A - Array element inspection method and device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To inspect the relative positions of array elements with high resolution widely and relatively inexpensively. SOLUTION: Light from each fiber 1b of a fiber array 1 is applied to a pin hole array 2 where light axes corresponding to each fiber 1b are arranged nearly in parallel and hence is taken out as nearly parallel light. The image of parallel light from each of the pin hole array 2 is formed nearly at the same point by an imaging lens 3 so that the limitation of a shooting range does not matter. The image of the fiber 1b whose image has been picked is picked up by a CCD camera 4, and the relative positions of elements are obtained according to a shooting signal by a computer 5. The quality of the fiber array 1 is judged by the amount of deviation from the same point.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for inspecting an array element in which a plurality of elements are arranged in a predetermined arrangement and an apparatus for inspecting an array element, and is particularly suitable for inspecting the position of a fiber in a fiber array block. About things.

[0002]

2. Description of the Related Art Conventional array element inspection methods include:
For example, photograph the entire array element with a CCD camera, etc.
The position of each element has been determined by performing image processing on this photographing signal. Alternatively, each element is detected by a moving stage, and the relative position of the element is obtained from the moving amount of the stage.

[0003]

The conventional inspection method has been configured as described above, but in recent years, the miniaturization of elements has progressed and the positional accuracy of elements has been required to be 1 μm or less.

[0004] In this regard, in image processing using a CCD camera,
In order to obtain a high resolution, the imaging range is limited in order to directly image the plurality of elements as they are.
In order to obtain a resolution of μm, the range is limited to several tens μm.

On the other hand, when a moving stage is used, it is possible to expand the measurement range, but the stage must be moved with high accuracy, so that the inspection apparatus becomes very expensive.

SUMMARY OF THE INVENTION An object of the present invention is to provide an array element inspection method and an array element inspection apparatus capable of solving the problems of the prior art and inspecting the position of the array element with high resolution over a wide range and relatively inexpensively. Is to do.

[0007]

To achieve the above object, a first array element inspection method of the present invention detects the positions of a plurality of elements arranged in an array using optical detection means. Method, wherein the light from the plurality of elements,
An optical axis corresponding to each element is taken out by a pinhole array having a plurality of pinholes arranged substantially in parallel with each other, and light from each pinhole of the pinhole array is received by an imaging lens in a light receiving area of the detection means. Then, an image of the formed element is detected, and the position of each element is obtained from a detection signal.

Since the light of a plurality of elements is formed into an image in the light receiving area of the detecting means, the inspection can be performed over a wide area at a high resolution and the measurement can be performed at a relatively low cost, as compared with a method in which the whole of the plurality of elements is directly photographed. it can. If there is no error in the measurement system, such as a case where there is no pitch error in the plurality of elements, the images of the plurality of elements are formed at predetermined positions (the same point, etc.) in the light receiving area of the detecting means. In the case where an image is formed, an image is formed shifted from the predetermined position, and the quality of the array element can be easily determined from the shift amount.

In a second array element inspection method according to the present invention, the plurality of elements have optical axes substantially parallel to each other, and the i-th element (i = 1 to N, i) in a plane perpendicular to the optical axis. N is the above first array element inspecting method for detecting the position of the array elements arranged in an array as the coordinates of the elements of the element number of) is expressed as (Xo _i, Yo _i), said plurality corresponding to each of the elements, a plurality of pinholes having a focal length f ₁ equal to optical axis substantially parallel to each other, the optical axis of the i-th pinhole in a plane perpendicular to the optical axis of each pin hole Are arranged as (Xl _i , Yl _i ), and an imaging lens with a focal length f ₂ for imaging light from each pinhole of the pinhole array.

An image of each element is formed by a pinhole array and an imaging lens on a detection surface in a light receiving area of the detection means perpendicular to an optical axis of the pinhole constituting the pinhole array. In this case, the arrangement of the pinhole array and the imaging lens for a plurality of elements is determined by the following equation (1).
The light from the i-th element among the plurality of elements is extracted by the i-th pinhole in the pinhole array so as to satisfy the relationship of (3), and the extracted light is extracted by the imaging lens. A desired position (Xs _i ,
Ys _i ), the image of each formed element is detected, and the position of each element is obtained from the detection signal.

[0011] _{Xo i - (k × Xl i} ) = Xs i / M (1) Yo i - (k × Yl i) = Ys i / M (2) η = {(k-1) × (β + ξ) - 1} × β / {ξ × (k-1) -1} (3) However, k: each element, the value of the distance between the pinholes in the pinhole array corresponding to each element divided by f ₁ β: value obtained by dividing the focal length f ₂ of the imaging lens by f ₁ ξ: distance obtained by subtracting the focal lengths f ₁ and f ₂ from the distance between each pinhole of the pinhole array and the first principal point of the imaging lens. Divided by f ₁ η: Value obtained by dividing the distance between the second principal point of the imaging lens and the detection surface by f ₁ M: Magnification of the optical system including the pinhole array and the imaging lens, and M = X, Y axes: directions perpendicular to the direction of the optical axis (Z-axis direction) of the pinholes constituting the pinhole array, and are expressed as -β / {1+ (1-k) ×}. Are coordinate axes orthogonal to (Xo _i , Yo _i ), (X
l _i, Yl _i), noted that the (Xs _i, common X also each coordinate of Ys _i), based on the Y axis, in the present specification, the focal length f ₁ of the pinhole, the same as the pinhole Think of a lens with functions,
And f ₁ with a focal length of the lens.

As described above, since the image of each element can be formed at an arbitrary position on the inspection surface, it is possible to observe a plurality of elements at once. Further, by determining the parameters in the above equation (3), the magnification of the optical system can be changed even if a pinhole or a lens having the same focal length is used, and the sign of the magnification can be changed to erect and invert. Can be freely selected.

In the second array element inspection method,
If the light from each element is focused on substantially the same point on the detection surface, the measurement system can be configured without any moving parts, and highly accurate position detection can be performed. When the optical system including the pinhole array and the imaging lens is arranged to be an afocal system, ξ = 0, and the magnification M does not depend on k and is not affected by the error of k. And it is possible to perform accurate measurement. Further, in the first and second array element inspection methods, when light from the array element is taken out as substantially parallel light by a pinhole array (that is, when k = 1 tandem arrangement), the pinhole array Since it becomes parallel light between the imaging lens,
Irrespective of the size of the measurement, an accurate measurement system free from the influence of errors can be constructed. Furthermore, setting ξ = 0 and k = 1 enables more accurate measurement.

A first array element inspection apparatus according to the present invention is an apparatus for carrying out the first array element inspection method, wherein an array element inspection for detecting the positions of a plurality of elements arranged in an array is provided. In the apparatus, a pinhole array having a plurality of pinholes each having an optical axis corresponding to each of the plurality of elements arranged substantially parallel to each other, and a light receiving area of a detecting means for detecting light from each pinhole of the pinhole array At least one imaging lens for forming an image inside, a detecting means for detecting an image of the formed element, and an arithmetic circuit for obtaining the position of each element from a detection signal of the detecting means, The pinhole array, the imaging lens,
The detecting means is arranged so that light from each pinhole of the pinhole array forms an image in a light receiving area of the detecting means.

It is preferable that the image of the element is photographed by, for example, a CCD camera or detected by a split type photodiode. Since the light of multiple elements is focused on the light receiving area of the detecting means, it is possible to have a measuring system without a movable part consisting of a pinhole array, an imaging lens, a detecting means, and an arithmetic circuit. Therefore, the position can be detected with high accuracy.

A second array element inspection apparatus according to the present invention is an apparatus for carrying out the second array element inspection method, wherein a plurality of elements have optical axes substantially parallel to each other. The ith (i = 1) in a plane perpendicular to the optical axis
ＮN, where N is the number of elements, the coordinates of the elements are (Xo _i , Yo)
_i ) In the first array element inspection apparatus for detecting the positions of array elements arranged in an array as represented by _i ), a focal length equal to an optical axis substantially parallel to each other and corresponding to each of the plurality of elements. a plurality of pinholes having f ₁ is the coordinates (Xl _i, Yl _i) of the optical axis of the i-th pinhole in a plane perpendicular to the optical axis of each pin hole is arranged to be represented as And a focal length f for imaging light from the pinhole array on a detection surface in a light receiving area of the detection means perpendicular to an optical axis of the pinholes constituting the pinhole array. ₂ imaging lenses.

Further, by setting the arrangement of the pinhole array and the imaging lens with respect to the plurality of elements so as to satisfy the following equations (1) to (3), the i-th element among the plurality of elements is obtained. Is formed at a desired position (Xs _i , Ys _i ) on the detection surface by the i-th pinhole in the pinhole array and the imaging lens, and the formed image of each element is formed. It comprises a detecting means for detecting, and an arithmetic circuit for obtaining the position of each element from the detection signal of the detecting means.

[0018] _{Xo i - (k × Xl i} ) = Xs i / M (1) Yo i - (k × Yl i) = Ys i / M (2) η = {(k-1) × (β + ξ) - 1} × β / {ξ × (k-1) -1} (3) However, k: each element, the value of the distance between the pinholes in the pinhole array corresponding to each element divided by f ₁ β: value obtained by dividing the focal length f ₂ of the imaging lens by f ₁ ξ: distance obtained by subtracting the focal lengths f ₁ and f ₂ from the distance between each pinhole of the pinhole array and the first principal point of the imaging lens. Divided by f ₁ η: Value obtained by dividing the distance between the second principal point of the imaging lens and the detection surface by f ₁ M: Magnification of the optical system including the pinhole array and the imaging lens, and M = X, Y axes: directions perpendicular to the direction of the optical axis (Z-axis direction) of the pinholes constituting the pinhole array, and are expressed as -β / {1+ (1-k) ×}. Are coordinate axes orthogonal to (Xo _i , Yo _i ), (X
l _i , Yl _i ) and (Xs _i , Ys _i ) are also based on the common X and Y coordinate axes.

[0019]

Embodiments of the present invention will be described below.

FIG. 1 is a schematic view of the configuration of an array element inspection apparatus according to the present invention, which includes a pinhole array 2, an imaging lens 3, and a CC.
It comprises a D camera 4 and a computer 5 as an arithmetic circuit having a display device.

The array element to be inspected is a fiber array 1 having a diameter of 125 μm arranged in a line at a pitch of 250 μm. FIG. 7 shows the appearance of a fiber array block 15 constituting the fiber array 1.

An integrated pinhole array 2 was used as an optical element for converting light from the fiber array 1 into parallel light. This is to ensure that the pinhole 2b constituting the pinhole array 2 has the same pitch accuracy level as the fiber 1b of the fiber array 1. The pinhole array 2 has a pitch of 250 μm and a focal length of 2 mm. Fiber end face 1
a was set on the focal plane of the pinhole array 2.

The imaging lens 3 has a focal length of 40 mm and a diameter of 30
A CCD camera 4 as an image detecting means was installed at an image-side focal position using an achromatic lens of mm. The fiber end face image is formed by the corresponding pinhole array 2 and imaging lens 3 in the light receiving area of the CCD camera 4, more specifically, at substantially the same point on the photographing surface. The magnification is determined by the ratio of the focal length between the pinhole array 2 and the imaging lens 3, and is 20 times in the present embodiment. The pixel size of the CCD camera 4 is 11 × 13 μm, the resolution per pixel is 0.55 and
0.65 μm. Further, the image processing is performed by the computer 5 to perform the interpolation processing, and the resolution is 1/10 of the above value. The image formation position is determined in pixel units by image processing,
The pixel unit is converted into a length unit based on the pixel size, and a relative position of the imaging position obtained in the length unit is obtained. If the fiber array 1 is accurately arranged at a pitch of 250 μm, the images of the fiber end faces are all formed at the same point, but if the fiber array 1 has a pitch error, the deviation amount
The image is magnified 20 times. This is processed by the computer 5 to determine the quality of the fiber array 1. The calculation results and the image of the fiber 1b are displayed on the display device of the computer 5.

In the above embodiment, the image formed by the imaging lens 3 is captured directly by the CCD camera 4. However, an enlargement optical system, for example, a lens may be interposed therebetween, so that the resolution can be further improved.

Alternatively, as shown in FIG.
A configuration in which the screen 16 is arranged on the image plane to photograph the image may be used. By capturing the image projected on the screen, a clearer image can be detected.

In the above embodiment, the case where images of all the fibers 1b are formed simultaneously has been described. However, as shown in FIG. 3, for example, the light-shielding plate 6 provided with one pinhole 7 is connected to the fiber array 1. The optical fiber 1b may be formed one by one using the pinholes 7 of the light shielding plate 6 so as to be movable between the pinhole array 2 and the direction orthogonal to the optical axis. This makes it possible to measure the position of each fiber 1b. Note that a plurality of pinholes can be provided to perform position measurement in units of a plurality of fibers. The pinhole may be provided between the pinhole array 2 and the imaging lens 3.

Alternatively, as shown in FIG. 4, a wavelength filter 8 having a different wavelength for each fiber 1b is arranged in front of the pinhole array 2, and by using this wavelength filter 8, each fiber 1b can be distinguished by color. Becomes (Note that
The wavelength filter 8 may be arranged behind the pinhole array 2. 5) If a tunable filter 9 is used between the pinhole array 2 and the imaging lens 3 as shown in FIG.
The fiber 1b can be identified even by a monochrome CCD camera by controlling the transmission wavelength. The tunable filter 9 can be constituted by a liquid crystal filter. Instead of arranging the tunable filter 9 between the pinhole array 2 and the imaging lens 3 as described above, a tunable light source (not shown) is used for illuminating the element as an illuminating means for transmitting or reflecting the element. May be used.

Although the object to be inspected can be applied to an opaque one, when the object to be inspected is an optical fiber that transmits light, light (monochromatic or white light) is incident from the opposite side of the inspection surface and the emitted light is coupled. By imaging, the position of the core can be detected more accurately. In particular, the structure can be simplified by using a beam position detecting means such as a split photodiode as a detecting means in this combination. For example, FIG.
As shown in FIG. 5, each optical fiber is formed into an image at the middle point (corresponding to the same point) of the four-division type photodiode 12, and the difference in the amount of light received from each optical fiber detected by each photodiode 12a. Is obtained by the comparator 13, and the result of the comparison is input to the arithmetic circuit 14, and the deviation of each optical fiber from the same point is inspected from the difference in the amount of received light. Thereby, the structure can be simplified as compared with the image processing, and the position can be detected at high speed and at low cost.

Next, another embodiment of the present invention will be described.
FIG. 8 is a diagram showing parameters in the optical system of the array element inspection device. Also in this embodiment, the image of each fiber 21 of the fiber array to be inspected is formed by the corresponding pinhole 22 and the imaging lens 23 of the pinhole array, and the position of the formed image of the fiber 21 is determined. , CCD
The configuration is obtained using a camera and a computer. FIG. 8 shows only one fiber 21 of the fiber array and one pinhole 22 of the pinhole array opposed thereto.

The number of the fibers 21 in the fiber array arranged in a line is eight, and the coordinates of the _i- th fiber (i = 1 to 8, the fiber 21 at one end is the first) are represented by (Xo _i , Yo _i ). Further, the i-th coordinate of the pin hole 22 of the pinhole array provided opposite to the i th fiber 21 and (Xl _i, Yl _i).

Further, the arrangement of each pinhole 22 of the pinhole array and the imaging lens 23 with respect to each fiber 21 of the fiber array is set so as to substantially satisfy the following equations (1) to (3). The light from the th fiber 21
The light is extracted by the i-th pinhole 22, and the extracted light is extracted by the imaging lens 23 at a desired position (X
s _i , Ys _i ). (Where the XY axes are
The coordinate axes have a direction perpendicular to the direction of the optical axis (Z-axis direction) of the imaging lens 23 and are orthogonal to each other, and (Xo _i ,
_{Yo i), (Xl i,} Yl i) and (Xs _i, Ys _i)
Are based on a common XY coordinate axis. _{) Xo i - (k × Xl} i) = Xs i / M (1) Yo i - (k × Yl i) = Ys i / M (2) η = {(k-1) × (β + ξ) -1} × β / ｛ξ × (k-1) -1｝ (3) where k is a value obtained by dividing a distance between each element and a pinhole in a pinhole array corresponding to each element by f _1. The value obtained by dividing the focal length f ₂ of the imaging lens by f ₁ ξ: The distance obtained by subtracting the focal lengths f ₁ and f ₂ from the distance between each pinhole of the pinhole array and the first principal point of the imaging lens is f. value divided by ₁ eta: value the distance between the second principal point and the detection surface of the imaging lens divided by f ₁ M: the magnification of the optical system composed of the pinhole array and the imaging lens, the magnification M = - β / {1+ (1-k) ×}. The distances in the Z-axis direction are all pinholes 22 as described above.
It is normalized by the focal length f ₁ of the. Equation (3) is
This satisfies the condition that the imaging point is constant even if the light from the element is not parallel to the Z axis but inclined.

In FIG. 8, the light ray indicated by the solid line is the ideal light ray trajectory when the light ray is arranged as designed, and the light ray indicated by the broken line is the light ray when the fiber 21 is displaced (at this time, The coordinates of the i-th fiber 21 are (X ′
o _i , Y ′ o _i )).

The fiber array of this embodiment is also the same as that shown in FIG.
As in the embodiment of FIG.
They are arranged at m pitches. In addition, the pinhole array having a focal length of 3 mm has a pitch of 250 μm.
m. Further, in this embodiment,
The end face of the fiber 21 was set to the focal plane of the pinhole 22 (hence, k = 1). Further, a lens having a focal length of 300 mm is used as the imaging lens 23, and the image side focal position is C
A CD camera was installed. Further, ξ was set to about −130 (note that ξ can be determined irrespective of the expressions (1) to (3), and the optical system can be downsized by making ξ negative). CC
The pixel size of D is 11 × 13 μ, as in the above embodiment.
m, the resolution per pixel is 0.11 and 0.13 μm,
Further, a resolution of 1/10 of the above value is obtained by performing an interpolation process by a computer.

The end face image of each fiber 21 is formed at a substantially central position on the image pickup surface of the CCD camera by the corresponding pinhole 22 and imaging lens 23. Since k = a 1 tandem arrangement, the magnification M is determined by the ratio f ₂ / f ₁ of the focal length of the pinhole 22 and the imaging lens 23, in this embodiment, the magnification is 100 times.

The fiber 21 of the fiber array has exactly 25
If the fibers 21 are arranged at a pitch of 0 μm, the images of the end faces of the fibers 21 are all formed at almost the same point, but if there is a pitch error in the fiber 21, the images are shifted by a distance 100 times the error amount. An image is formed (see equations (1) and (2)). (By setting k = 1, the error due to the optical system is 0.02
μm or less. In order to separate the image of each fiber 21, a slit is provided on the incident side of the fiber 21 so that light is incident on only one fiber 21 at a time,
By scanning this slit, the position of each fiber is sequentially detected, and image processing is performed by a computer to determine the quality of each fiber in the fiber array.

FIG. 9 shows each pinhole 2 in the pinhole array.
2 shows an embodiment in which the arrangement of 2 is adjusted so that end images of the respective fibers 21 are formed at different positions on the detection surface.
In this embodiment, as shown in FIG. 9 (a), each pinhole 22 of the pinhole array is arranged at a constant pitch of approximately 250 μm corresponding to each fiber 21 in the same manner as in the above embodiment.
Although arranged in the axial direction, the positions of the pinholes 22 are not exactly at a fixed pitch, and eight pinholes 22 are arranged at the fixed pitch positions ((0 μm, 0 μm), (250 μm, 0 μm).
m), (500 μm, 0 μm),... slightly offset in the X and Y directions. That is, the position coordinates of the first pinhole 22 are (0-15 μm, 10 μm), and
The position coordinates of the pinholes 22 from the eighth to the eighth are (250-15 μm, -10 μm), (500-7.5 μm, 0 μm, respectively).
m), (750 μm, 10 μm), (1000 μm, -10 μm
m), (1250 + 7.5 μm, 0 μm), (1500 + 15 μm, 10
μm) and (1750 + 15 μm, -10 μm). Other conditions are the same as in the embodiment of FIG.

If each pinhole 22 is accurately arranged at a fixed pitch position and each fiber 21 is not displaced, the image of each fiber 21 is located at the center position (see FIG. 3) of the imaging surface (detection surface) 30 of the CCD camera. 9 (b) point C). However, in this embodiment, since the positions of the pinholes 22 are shifted from the fixed pitch position as described above, the image 31 (32 is an image of the core) of the end face of each fiber 21 is shown in FIG. As shown in b), the image is dispersed and formed. For example, considering the image forming position of the first fiber 21, the position of the first pinhole 22 facing the fiber 21 (assuming that there is no displacement) is -15 from the fixed pitch position in the X direction. μs and +10 μm in the Y direction, Xs ₁ = −1 from the above equations (1) and (2).
00 × (Xo ₁ −Xl ₁ ), Ys ₁ = −100 × (Yo ₁ −Y
l ₁ ), and an image is formed at a position shifted by −1.5 mm in the X direction and +1.0 mm in the Y direction from point C at the center position of the imaging surface 30. In this way, since the images 31 of the respective fibers are dispersed and formed on the imaging surface 30, eight images can be observed simultaneously, and there is no need to move the slit as in the above embodiment. .

In the above embodiment, the imaging lens is 1
Although the number of lenses is one, a plurality of lenses may be combined to form an imaging lens. In this case, the present invention can be applied to a single imaging lens composed of a plurality of lenses.

In the above embodiment, the fiber arrays arranged at equal intervals have been described. However, the arrangement may be unequal, and the object to be inspected may be a semiconductor laser, a light emitting diode or the like other than the fiber. May be arranged.

[0040]

As described above in detail, according to the array element inspection method of the present invention, each array element is imaged at a predetermined position (substantially the same point or the like) or a desired arrangement in the light receiving region of the detecting means. Because of this, inspection can be performed over a wide range with high resolution, and the quality of the array element can be inspected relatively inexpensively from the amount of displacement of the formed element image. In particular, when the light of a plurality of elements is focused on substantially the same point, it can be easily determined whether or not there is a pitch error or the like in the plurality of elements based on the displacement of the images. Further, when an image of each element is formed in a desired arrangement on the inspection surface, a plurality of elements can be observed at one time.

According to the array element inspection apparatus of the present invention, the light of a plurality of elements is imaged at a predetermined position (substantially the same point or the like) or a desired arrangement in the light receiving region of the detecting means. It is possible to provide a measurement system without a movable part composed of a hole array, an imaging lens, detection means, and an arithmetic circuit, and high-accuracy position detection can be realized with a simple structure.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram showing an embodiment of an array element inspection device of the present invention.

FIG. 2 is a schematic sectional view showing an embodiment in which a screen is arranged after an imaging lens.

FIG. 3 is a schematic configuration diagram showing an embodiment in which a light shielding plate provided with a pinhole is movably disposed in front of a pinhole array.

FIG. 4 is a schematic configuration diagram showing an embodiment of an array element inspection device in which a wavelength filter is arranged before a pinhole array.

FIG. 5 is a schematic configuration diagram showing an embodiment of an array element inspection device in which a wavelength filter is arranged before a pinhole array and a wavelength variable filter is arranged after the pinhole array.

FIG. 6 is a schematic configuration diagram showing an embodiment in which a division type photodiode is used as a detection unit.

FIG. 7 is a perspective view of a main part of an embodiment of a fiber array block to be inspected.

FIG. 8 is a diagram showing parameters of an optical system in an embodiment of an array element inspection apparatus according to the present invention.

FIG. 9 shows an embodiment in which the arrangement of each pinhole in a pinhole array is adjusted so that end-face images of each fiber are formed at different positions on the detection surface. The figure which shows arrangement | positioning of each pinhole of an array, (b)
FIG. 3 is a diagram showing an end face image of each fiber dispersedly formed on an imaging surface.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Fiber array 1b Fiber 2 Pinhole array 2b Pinhole 3 Imaging lens 4 CCD camera 5 Computer 21 Fiber 22 Pinhole 23 Imaging lens

Claims (7)

[Claims] 1. A method for detecting the position of a plurality of elements arranged in an array using an optical detection means, wherein light from the plurality of elements is mutually aligned with an optical axis corresponding to each element. The light was taken out by a pinhole array having a plurality of pinholes arranged substantially in parallel, and the light from each pinhole of the pinhole array was formed into an image in the light receiving area of the detection means by an imaging lens. An array element inspection method, wherein an image of an element is detected and a position of each element is obtained from a detection signal. 2. A device according to claim 1, wherein the plurality of elements have optical axes substantially parallel to each other, and an i-th element (i = 1)
ＮN, where N is the number of elements, the coordinates of the elements are (Xo _i , Yo)
_2. The method according to claim 1, wherein the position of the array elements arranged in an array is detected as represented by _i ), wherein the focal point corresponds to each of the plurality of elements and is equal to an optical axis substantially parallel to each other. a plurality of pinholes having a distance f ₁ is arranged the like coordinates of the optical axis of the i-th pinhole in a plane perpendicular to the optical axis of each pin hole is represented as (Xl _i, Yl _i) Pinhole array and a focal length f ₂ for imaging light from each pinhole of the pinhole array
An imaging lens is provided, and each of the elements is arranged on a detection surface in a light receiving area of the detection unit, which is perpendicular to an optical axis of a pinhole constituting the pinhole array, by the pinhole array and the imaging lens. When forming an image, the arrangement of the pinhole array and the imaging lens with respect to the plurality of elements is set so as to satisfy the following expressions (1) to (3), and the i-th element among the plurality of elements is formed. Is extracted by the i-th pinhole in the pinhole array, and the extracted light is extracted by the imaging lens at a desired position (X
s _i , Ys _i ), an image of each formed element is detected, and a position of each element is obtained from a detection signal. _{Xo i - (k × Xl i} ) = Xs i / M (1) Yo i - (k × Yl i) = Ys i / M (2) η = {(k-1) × (β + ξ) -1} × β / ｛ξ × (k-1) -1｝ (3) where k is a value obtained by dividing a distance between each element and a pinhole in a pinhole array corresponding to each element by f _1. values the focal length f ₂ of the image lens divided by f ₁ xi]: distance distance minus the focal length f ₁ and f ₂ from the first principal point of each pinhole and the imaging lens of the pinhole array f ₁ Η: value obtained by dividing the distance between the second principal point of the imaging lens and the detection surface by f ₁ M: magnification of the optical system including the pinhole array and the imaging lens, and M = −β / X, Y axes represented by {1+ (1-k) ×}: seats having a direction perpendicular to the optical axis direction (Z-axis direction) of the pinholes constituting the pinhole array and orthogonal to each other It is an _{axis, (Xo i, Yo i)} , (X
l _i , Yl _i ) and (Xs _i , Ys _i ) are also based on the common X and Y coordinate axes. 3. The array element inspection method according to claim 1, wherein light from each of the elements is imaged at substantially the same point on a detection surface in a light receiving area of the detection means. . 4. The array inspection method according to claim 1, wherein the optical system including the pinhole array and the imaging lens is arranged to be an afocal system. 5. The array element inspection method according to claim 1, wherein light from said array element is extracted as substantially parallel light by said pinhole array. 6. An array element inspection apparatus for detecting the positions of a plurality of elements arranged in an array, comprising a plurality of pinholes whose optical axes respectively corresponding to the plurality of elements are arranged substantially parallel to each other. A pinhole array; at least one imaging lens for imaging light from each pinhole of the pinhole array in a light receiving region of the detection means; and detection means for detecting an image of the formed element. An arithmetic circuit for determining the position of each element from the detection signal of the detection means, wherein the pinhole array, the imaging lens, and the detection means emit light from each pinhole of the pinhole array. An array element inspection apparatus, which is arranged so as to form an image in a light receiving area of a detection unit. 7. A plurality of elements have optical axes substantially parallel to each other, and an ith (i = 1) plane in a plane perpendicular to said optical axis.
ＮN, where N is the number of elements, the coordinates of the elements are (Xo _i , Yo)
7. The array element inspection apparatus according to claim 6, wherein the positions of the array elements arranged in an array are detected as represented by _i ), and the optical axes correspond to each of the plurality of elements and are substantially parallel to each other. as a plurality of pinholes having a focal length f ₁ is the coordinate of the optical axis of the i-th pinhole in a plane perpendicular to the optical axis of each pin hole is represented as (Xl _i, Yl _i) An array of pinhole arrays, and a focus for imaging light from the pinhole array on a detection surface in a light receiving area of the detection means perpendicular to an optical axis of the pinholes constituting the pinhole array. an imaging lens of the distance f _2, the pinhole array for the plurality of elements, by setting the arrangement of the image forming lens so as to satisfy the relation of the following equation (1) to (3), the plurality of elements From the i-th element Desired position of the detection surface by the light i-th pinhole and the imaging lens in the pinhole array (X
s _i , Ys _i ), and detecting means for detecting the formed image of each element, and an arithmetic circuit for determining the position of each element from the detection signal of the detecting means. An array element inspection apparatus, characterized in that: _{Xo i - (k × Xl i} ) = Xs i / M (1) Yo i - (k × Yl i) = Ys i / M (2) η = {(k-1) × (β + ξ) -1} × β / ｛ξ × (k-1) -1｝ (3) where k is a value obtained by dividing a distance between each element and a pinhole in a pinhole array corresponding to each element by f _1. values the focal length f ₂ of the image lens divided by f ₁ xi]: distance distance minus the focal length f ₁ and f ₂ from the first principal point of each pinhole and the imaging lens of the pinhole array f ₁ Η: value obtained by dividing the distance between the second principal point of the imaging lens and the detection surface by f ₁ M: magnification of the optical system including the pinhole array and the imaging lens, and M = −β / X, Y axes represented by {1+ (1-k) ×}: seats having a direction perpendicular to the optical axis direction (Z-axis direction) of the pinholes constituting the pinhole array and orthogonal to each other It is an _{axis, (Xo i, Yo i)} , (X
l _i , Yl _i ) and (Xs _i , Ys _i ) are also based on the common X and Y coordinate axes.