JP2000065685A - Method and apparatus for adjustment of position of light- source array - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a method and an apparatus in which the position of a light-source array can be adjusted at high speed and with high accuracy and whose costs can be reduced by a method wherein the position is adjusted on the basis of quantities of light of light beams which are passed through a plurality of aperture which are formed in corresponding positions on a scanning face and whose aperture area is different. SOLUTION: Quantities of light of four semiconductor lasers near the center of a semiconductor laser array 111 are captured by a photodetector 30 via a square hole 20. Positions in the X-axis direction and the Z-axis direction of the array 111 are adjusted roughly. Then, quantities of light of two laser beams near both ends in the X-axis direction are captured in the center in the Z-axis direction of the array 111 by optical sensors 3A, 3B via slits 2a, 2b, and the array 111 is turned around the Y-axis. In the same manner, quantities of light of two laser beams at both ends in the X-axis (or Z-axis) direction are captured by optical sensors 3C, 3D and 3E, 3F in the center in the Z-axis (or X-axis) direction of the array 111, and the array 111 is turned around the Z-axis and the X-axis). Lastly, a prescribed quantity of light is captured by the optical sensors 3C to 3F via pinholes 2c to 2f, and the array 111 is moved to Y-axis direction.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a light source array position adjusting method and a light source array position adjusting device in an optical scanning device such as a printer or a copier having a light source array in which a plurality of light sources are two-dimensionally arranged. The present invention relates to a light source array position adjusting method and a light source array position adjusting device capable of reducing costs and performing high-speed and high-accuracy position adjustment of a light source array.

[0002]

2. Description of the Related Art In recent years, there has been proposed an optical scanning device which forms an image by scanning a recording medium such as a photosensitive member using a semiconductor laser array having a plurality of light sources arranged two-dimensionally as a light emitting portion.

FIGS. 11A and 11B show an example of an optical scanning device. Note that X indicates the main scanning direction, and Y indicates the sub-scanning direction. The optical scanning device 100 includes a laser array package 111A including a semiconductor laser array 111 that emits a plurality of laser beams, a focusing lens 112 that focuses the plurality of laser beams emitted from the semiconductor laser array 111, and a focusing lens 112. An image forming lens system 113 is provided for forming a plurality of laser beams condensed by the lens 112 and forming an image on a scanning surface 114 a on a peripheral surface of a recording medium 114 rotatably supported.

FIG. 12 shows a laser array package 111.
A is shown. In the semiconductor laser array 111 of the laser array package 111A, the number in the sub-scanning direction Z is n (for example, 12), and the number in the main scanning direction X is m (for example, 1200).
N × m semiconductor lasers 110 are arranged in an array. Since one line of dots are formed on the scanning surface 114a of the recording medium 114 by the nxm semiconductor lasers 110, each laser beam emission point of the semiconductor laser array 111 is projected onto the scanning surface 114a of the recording medium 114. The images are arranged so that they do not overlap.

When the semiconductor laser array 111 is driven in accordance with an image signal in the optical scanning device 100 configured as described above, a laser beam emitted from the semiconductor laser array 111 is condensed by a condensing lens 112,
By being enlarged by the imaging lens system 113 and being imaged on the scanning surface 114a of the rotating recording medium 114,
The image is exposed two-dimensionally.

Incidentally, in order to perform high-quality image exposure, it is necessary to accurately irradiate a predetermined position on the scanning surface 114a of the recording medium 114 with a laser beam having a predetermined diameter.
Variations in the spot diameter of the laser beam and deviations in the spot position cause inconveniences such as image distortion and blurring, so that a high-quality image cannot be obtained. Such variations in spot diameter and spot position of the laser beam include errors in the position of the laser array package 111A, errors in the positions of the lens arrays of the condenser lens 112 and the imaging lens system 113, and rotation of the recording medium 14. Although various causes such as a position error can be considered, especially in an optical scanning device that expands the laser beam from the semiconductor laser array 111, an arrangement position error of the laser array package 111A is a major cause. Therefore, it is important to adjust the arrangement position of the laser array package 111A and assemble it.

FIGS. 13 (a) and 13 (b) show an example of a conventional light source array position adjusting device for adjusting the position of such a laser array package 111A. The light source array position adjusting device 10 scans a scanning surface 1 of a recording medium 114 with a laser beam emitted from a semiconductor laser array 111 via a condenser lens 112 and an imaging lens system 113.
A magnifying optical system 11 for magnifying a plurality of laser beam spot images formed on the spot forming surface 115 having a predetermined height corresponding to 14a and a predetermined horizontal width at a magnification of 10 times; A two-dimensional CCD camera 12 that captures an image of the spot enlarged by the light source as an electric signal corresponding to the amount of light, and an X-axis stage (not shown) that moves the magnifying optical system 11 and the two-dimensional CCD camera 12 in the main scanning direction X. (Shown), the magnifying optical system 11 and the two-dimensional CC
It comprises a Z-axis stage (not shown) for moving the D camera 12 in the sub-scanning direction Z, and an image processing unit 13 for processing a light amount signal captured by the two-dimensional CCD camera 12. In FIG. 13, reference numeral 116 denotes an optical axis connecting the center of the semiconductor laser array 111 and the center of the recording medium 114.

The two-dimensional CCD camera 12 has a pixel pitch of 1
5000 × 5 composed of 500 × 500 pixels of 0 μm
It has a visual field of 000 μm. Since the measurement is performed at a resolution of 1 μm, a magnifying optical system 11 having a magnification of 10 times is used. Images of four spots appear in twelve fields of view.

When the arrangement position of the laser array package 111A is adjusted by the light source array position adjustment device 10 configured as described above, two-dimensionally arranged at both ends in the X-axis direction and both ends in the Z-axis direction on the spot forming surface 115. By moving the CCD camera 12, a predetermined pitch (for example, 200
(μm) The spot diameter is measured four by four while shifting, to obtain the distribution of the spot diameter. Then, the positions of the six-axis direction of the semiconductor laser array 111 in X-axis, Y-stage, and so-called beam waist positions where the spot diameter becomes minimum at both ends in the X-axis direction and both ends in the Z-axis direction,
Adjust by Z stage.

According to the conventional light source array position adjusting device 10, the X-axis direction, Y-axis direction, Z-axis direction, rotation direction around the X-axis, rotation direction around the Y-axis, and rotation around the Z-axis of the semiconductor laser array 111 are provided. It is possible to make adjustments for all six axes in the rotational direction.

[0011]

However, according to the conventional light beam measuring apparatus 10, since the adjustment is performed while repeatedly moving the three-axis stage and measuring the spot diameter, the adjustment is complicated and takes a long time. there were. In addition, there is a problem that it is difficult to secure accuracy because errors due to the movement of the stage are accumulated. In addition, since an error due to the movement of the stage is included, when adjusting a plurality of semiconductor laser arrays, an error between the semiconductor lasers is large, and in an optical scanning device in which the same recording medium is exposed by the plurality of semiconductor laser arrays. However, it has been difficult to reduce exposure position errors caused by a plurality of semiconductor laser arrays. Also, 2
Because a three-dimensional CCD camera and an optical scanning device for measuring the beam diameter are required, and a high-precision stage, particularly a stage in the X-axis direction, requires a high-precision stage having a stroke of 300 mm or more, There was a problem that the cost was increased.

Accordingly, it is an object of the present invention to provide a light source array position adjusting method and a light source array position adjusting device which can reduce the cost and adjust the position of the light source array with high speed and high accuracy.

[0013]

According to the present invention, there is provided a light source array comprising a plurality of light sources for emitting a plurality of light beams arranged two-dimensionally in a main scanning direction and a sub-scanning direction. A scanning surface scanned by the plurality of light beams emitted from the plurality of light sources, wherein a first aperture having a predetermined aperture area is located at a position corresponding to the scanning surface. The light source corresponding to the center of the first aperture is turned on to detect the light amount of the light beam passing through the first aperture, and the first light source array of the light source array is detected based on the detection result. Position adjustment is performed, a second aperture having an aperture area smaller than the predetermined aperture area is provided at a position corresponding to the scanning surface, and the light source corresponding to the center of the second aperture is turned on. The light beam passing through the second aperture Detecting the amount, to provide a light source array position adjusting method and performing a second alignment of the light source arrays on the basis of the detection result. According to the above configuration, after performing the first position adjustment of the light source array based on the amount of light beam passing through the first aperture, the second aperture having an aperture area smaller than the first aperture. By performing the second position adjustment of the light source array based on the amount of light beam passing through the hole, the position adjustment can be performed in a short time with a small error. In addition, since the amount of light can be detected using a fixed optical sensor, a stage for moving the optical sensor is not required.

In order to achieve the above object, the present invention provides a light source array in which a plurality of light sources for emitting a plurality of light beams are two-dimensionally arranged in a main scanning direction and a sub-scanning direction; An optical scanning device having a scanning surface scanned by the plurality of emitted light beams, wherein the light source array is arranged in a direction orthogonal to the main scanning direction, the sub-scanning direction, the main scanning direction, and the sub-scanning direction. Position can be adjusted in a rotation direction around the axis in the main scanning direction, a rotation direction around the axis in the sub-scanning direction, and a rotation direction around an axis orthogonal to the main scanning direction and the sub-scanning direction. A first aperture having a predetermined aperture area, and a first aperture having a predetermined aperture area provided at a position corresponding to the scanning surface, and a first aperture having a smaller aperture area than the predetermined aperture area. Two Light shielding means having a hole, first light detection means for turning on the light source corresponding to the center of the first opening and detecting the amount of light of the light beam passing through the first opening; And a second light detecting means for turning on the light source corresponding to the center of the second opening and detecting the light amount of the light beam passing through the second opening. An array position adjusting device is provided. According to the above configuration, after adjusting the position of the light source array based on the amount of light beam passing through the first aperture, the light of the second aperture having an aperture area smaller than that of the first aperture. By adjusting the position of the light source array based on the amount of light passing through the beam, the position adjustment can be performed in a short time with a small error. Also, since the amount of light can be detected using the fixed first and second light detection means,
A stage for moving the first and second light detecting means is not required.

In order to achieve the above object, the present invention provides a light source array in which a plurality of light sources for emitting a plurality of light beams are two-dimensionally arranged in a main scanning direction and a sub-scanning direction; An optical scanning device having a scanning surface scanned by the plurality of emitted light beams, wherein the light source array is arranged in a direction orthogonal to the main scanning direction, the sub-scanning direction, the main scanning direction, and the sub-scanning direction. Position can be adjusted in a rotation direction around the axis in the main scanning direction, a rotation direction around the axis in the sub-scanning direction, and a rotation direction around an axis orthogonal to the main scanning direction and the sub-scanning direction. A first aperture having a predetermined aperture area, and a first aperture having a predetermined aperture area provided at a position corresponding to the scanning surface, and a first aperture having a smaller aperture area than the predetermined aperture area. Two Light shielding means having a hole, first light detection means for turning on the light source corresponding to the center of the first opening and detecting the amount of light of the light beam passing through the first opening; A second light detection unit that turns on the light source corresponding to the center of the second opening and detects the light amount of the light beam that has passed through the second opening; and the first light detection unit and Control means for controlling the light source array holding means based on the amount of light detected by the second light detection means to adjust the light source array to an optimum position. I will provide a. According to the above configuration, the adjustment operation is automated by adjusting the light source array to an optimal position under the control of the control unit based on the light amounts detected by the first and second light detection units.

[0016]

1 (a), 1 (b) and 1 (c) show a light source array position adjusting apparatus according to an embodiment of the present invention. Note that the same components as those described in the related art are denoted by the same reference numerals, and detailed description thereof is omitted. The light source array position adjusting device 1 is provided at a position corresponding to the scanning surface 114a of the recording medium 114 shown in FIG.
a, a spot forming portion 2 having a predetermined height and a predetermined width corresponding to a square hole 20 and a slit 2 formed at a predetermined position of the spot forming portion 2 as shown in FIG.
a, 2b, detectors 30 respectively arranged on the back of pinholes 2c, 2d, 2e, 2f, and a plurality of optical sensors 3
A, 3B, 3C, 3D, 3E, and 3F.

The photodetector 30 includes the semiconductor laser array 11
It is configured to separately catch spots of four laser beams located at the center of one. The optical sensor 3A is
A laser beam spot from one semiconductor laser 110 located at the center in the Z-axis direction and near one end in the X-axis direction is arranged to catch through the slit 2a. Semiconductor laser 110 located at the center in the X direction and near the other end in the X axis direction
It is arranged so that the spot of the laser beam from the camera is captured through the slit 2b. The optical sensor 3C is arranged so as to catch a spot of a laser beam from one semiconductor laser 110 located at the center in the Z-axis direction and near one end in the X-axis direction via the pinhole 2c. The sensor 3D has one semiconductor laser 110 located at the center in the Z-axis direction and near the other end in the X-axis direction.
It is arranged to catch the spot of the laser beam from the camera via the pinhole 2d. The optical sensor 3E is X
The optical sensor 3F is arranged so as to catch the spot of the laser beam from one semiconductor laser 110 located near the one end in the Z-axis direction at the center in the axial direction via the pinhole 2e. Semiconductor laser 110 located at the center of the direction and near the other end in the Z-axis direction
It is arranged so that the spot of the laser beam from is captured through the pinhole 2f.

FIG. 2 shows the semiconductor laser array 111. As shown in the figure, the semiconductor laser array 111 has, for example, 12 pixels at a pitch P _{X of} 40 μm in the main scanning direction X.
A total of _14,400 semiconductor lasers 110 _{(1,1) to} 110 _(12,1200) are arranged at a pitch P _{Z of} 30 μm in a direction Z ′ forming a predetermined angle θ with respect to the sub-scanning direction Z. ing.

FIG. 3 shows the central photodetector 30. The light detector 30 includes four independent light sensors 30a, 30b,
30c and 30d. The size of each of the optical sensors 30a to 30d is desirably large enough to capture four laser beam spots at a time. For example, when the spot diameter is 35 μm and the interval between adjacent spots is 250 μm, the value is larger than 285 μm × 285 μm. Is desirable.
The distance between the optical sensors 30a to 30d is
A value smaller than the spot diameter on 30d is desirable. For example, when the spot diameter is 35 μm, a value smaller than 35 μm is desirable.

FIGS. 4A and 4B show the positional relationship between the lighting position of the semiconductor laser 110 and the optical sensors 30a to 30d. The positions of the four optical sensors 30a to 30d are such that the four semiconductor lasers 11 near the center of the semiconductor laser array 111 when the semiconductor laser array 111 is at a prescribed position.
0, for example, semiconductor laser 110 _(6,600) , 110
_The position where the laser beams from _{(6,601 )} , 110 _(7,600) , and 110 _(7,601) are evenly irradiated. Note that the central photodetector 30 may be a photodetector in which the detection area is divided into four. When a four-divided photodetector is used, its outer shape is not limited to a rectangle but may be a circle or the like.

FIGS. 5A and 5B show the positional relationship between the lighting position of the semiconductor laser 110 and the slits 2a and 2b. The length of the long side of the slits 2a, 2b is
A value larger than the distance between two adjacent spots 4 in the long side direction is desirable. For example, when the distance between the adjacent spots 4 is 250 μm, the value is preferably 250 μm or more. The length of the short side of the slits 2a, 2b is
A value larger than the spot diameter D above and smaller than the interval between two adjacent spots 4 in the short side direction is desirable.
In the case where the spot diameter D is 30 μm and the interval between adjacent spots 4 is 250 μm, it is preferable that the value be 30 μm or more and 250 μm or less. Then, it is desirable to make the value as small as possible. In the present embodiment, the thickness is set to about 50 μm with emphasis on accuracy. The positions of the slits 2a and 2b are
Is at a prescribed position, the spots of laser beams from two semiconductor lasers 110 near the center in the Z-axis direction and both ends in the X-axis direction, for example, the semiconductor lasers 110 _(6,1) and 110 _(6,1200) 4 is a position passing through the centers of the two slits 2a and 2b.

FIGS. 6A and 6B show the semiconductor laser 110.
The positional relationship between the lighting position and the pinholes 2c to 2f is shown.
The diameter of the pinholes 2c to 2f is above the pinholes 2c to 2f.
And a value slightly larger than the spot diameter D is desirable. For example,
When the spot diameter D is 35 μm, it is slightly larger than 35 μm.
Is desirable. If you consider the ease of adjustment,
It is desirable to consider the adjustment position accuracy
Then, a value close to the spot diameter D is desirable.
In the present embodiment, the emphasis is placed on accuracy and it is about 40 μm.
did. The positions of the pinholes 2c to 2f are
When the ray 111 is at the specified position,
Semiconductor lasers near the center of the
The spot 4 of the laser beam from the
Position passing through the center of the holes 2c and 2d, and the X axis
Semiconductors at the center of the direction and near both ends in the Z-axis direction
The spot 4 of the laser beam from the laser 110 has two spots.
The position passes through the centers of the pinholes 2e and 2f. An example
For example, the semiconductor laser 110 _(6,3), 110_(1,600), 1
10_(12,600), 110_(6,1198)Laser beam from
Pot 4 has four pinholes as shown in FIG.
The positions pass through the centers of 2c to 2f, respectively.

The optical sensors 30a-30d, 3A-3
F and the square hole 20, the two slits 2a and 2b, and the four pinholes 2c to 2f may be formed on the same substrate, or may be formed on a substrate divided into several parts. May be formed on separate substrates.

FIG. 7 shows a control system of the apparatus 1. The device 1 has a control unit 4 for controlling the entire device 1. The control unit 4 causes the X table 5 a to move the semiconductor laser array 111 in the X-axis direction and the semiconductor laser array 111 to move in the Y-axis direction. Y table 5b, Z table 5c for moving semiconductor laser array 111 in the Z-axis direction, θ _X table 5d for rotating semiconductor laser array 111 around the X axis, and θ _Y for rotating semiconductor laser array 111 around the Y axis. Table 5e and semiconductor laser array 11
1 and theta _Z table 5f is rotated about the Z axis, and a laser driving unit 6 for driving the semiconductor laser array 111, the light amount detection unit 7 for detecting the amount based optical sensors 30 a to 30 d, the detection signals of 3A~3F And are connected respectively.

Next, the operation of the light source array position adjusting device 1 will be described.

FIG. 9 and FIG. 10 are flowcharts for explaining the operation of the light source array position adjusting device 1.

The controller 4 controls the laser driver 6 to control the four semiconductor lasers 110 _(6,600) , 110 _(6,601) , 110 located at the center of the semiconductor laser array 111.
_(7,600) and 110 _(7,601) are _caused to emit light with the same light emission amount. The control unit 4 controls the four central optical sensors 30a, 30b, 30c, based on the light amount detection signal from the light amount detection unit 7.
30d includes four semiconductor lasers 110 _(6,600) , 110
_The X table 5a and the Z table 5c roughly position the semiconductor laser array 101 in the X-axis direction and the Z-axis direction so as to capture the spots 4 of the laser beams from _{(6,601 )} , 110 _(7,600) , and 110 _(7,601) , respectively. Adjust (Procedure 1).

FIG. 8 shows a spot 4 of a laser beam incident on the optical sensors 30a to 30d. In the present embodiment, the size of one optical sensor 30a to 30d is set to a size that can capture all the spots 4 of the four laser beams emitted, and the distance between the optical sensors 30a to 30d is set to the optical sensor 30a to 30d. Since the value is smaller than the spot diameter D, if the position of the semiconductor laser array 111 can be adjusted so that any of the four laser beam spots 4 can be captured by any of the four optical sensors 30a to 30d, the semiconductor laser array can be adjusted. The adjustment directions of the X-axis direction and the Z-axis direction of the 111 are uniquely determined. For example, as shown in FIG. 8A, only the light amount of one of the spots 4 of the four laser beams emitted by one of the four optical sensors 30a to 30d is captured, and the other three are detected. When the optical sensors 30b, 30c, and 30d do not capture the light amount, the position of the spot 4 of the four laser beams is as shown in FIG.
There is no position other than the position shown in (a). Four optical sensors 30a-
In the case where only two of the spots 4 of the four laser beams emitted by one of the optical sensors 30a out of 30d are captured, and the other three optical sensors 30b, 30c, and 30d do not capture the amounts of light, the same applies. The two states shown in FIG. 2B and FIG. 2C can be considered. When the semiconductor laser array 111 is moved in the X-axis direction, light is emitted by one optical sensor 30 a as shown in FIG. It is considered that the state shown in FIG. 4B was obtained when the four light beams of the spot 4 of the four laser beams were captured, and when the semiconductor laser array 111 was moved in the Z-axis direction, the state shown in FIG. When one light sensor 30a captures four light quantities as in ()), it is considered that the state shown in FIG. Thus, the optical sensors 30a to
The position adjustment in the X-axis direction and the Y-axis direction can be easily performed based on the light amount detected by 30d, and automation can be easily supported.

While maintaining the adjustment in the procedure 1, the laser driver 6 is further controlled to control the Z of the semiconductor laser array 111.
Two semiconductor lasers 110 _(6,1) and 110 _(6,1200) near the center in the axial direction and both ends in the X-axis direction emit light with the same prescribed light emission amount. First, the optical sensor 3A detects the spot 4 of the laser beam from one of the semiconductor lasers 110 _{(6, 1).}
The semiconductor laser array 111 is moved by the Z table 5c so as to capture a specified amount of light through the slit 2a. Next, with the optical sensor 3A capturing the specified light amount,
The optical sensor 3B moves the semiconductor laser array 111 in the X-axis direction so that the spot 4 of the laser beam from the semiconductor laser 110 _(6,1200) captures a specified amount of light through the slit 2b. If the amount of light captured by the optical sensor 3A becomes less than or equal to a specified value when the semiconductor laser array 101 is moved in the axial direction, the semiconductor laser array 101 is rotated in the rotation direction around the Y axis by the θ _Y table 5e so as to become a predetermined value (procedure). 2). Here, the semiconductor laser array 111 is moved and adjusted in the Z-axis direction, and then moved and adjusted in the X-axis direction. Good.

The laser drive unit 6 is controlled to maintain the semiconductor laser array 11 while maintaining the adjustment in the procedure 1 and capturing the specified amount of light with the optical sensor 3A in the procedure 2.
The two laser semiconductor lasers 110 _(6,3) and 110 _(6,1198) near the both ends in the X-axis direction at the center of the first Z-axis direction emit light with the same prescribed light emission amount. The θ _Z table 5f is used so that the optical sensors 3C and 3D capture the spot 4 of the laser beam from the laser semiconductor lasers 110 _(6,3) and 110 _(6,1198) via the pinholes 2c and 2d at a specified light amount. The semiconductor laser array 111 is rotated in the direction of rotation about the Z axis. When the semiconductor laser array 111 is rotated in the direction of rotation about the Z axis, if the amount of light captured by the optical sensor 3B falls below a specified value, a default value is set. Then, the semiconductor laser array 111 is moved in the X-axis direction by the X table 5a so as to obtain (Step 3).

While maintaining the adjustments in steps 1, 2, and 3, the laser drive section 6 is further controlled to control the semiconductor laser array 1
11 near the center in the X-axis direction and both ends in the Z-axis direction.
The two semiconductor lasers 110 _(1,600) and 110 _(12,600) emit light with the same prescribed light emission amount. The semiconductor laser array 111 is arranged so that the optical sensors 3E and 3F capture the same amount of light from the laser beam spot 4 from the semiconductor lasers 110 _(1,600) and 110 _(12,600) via the pinholes 2e and 2f.
Is rotated in the rotation direction around the X axis by the θ _X table 5d (procedure 4).

While maintaining the adjustments in the steps 1, 2, 3, and 4, the optical sensors 3C to 3F further adjust the Y table 5b so that the laser beam spot 4 captures the specified light amount via the pinholes 2c to 2f. Moves the semiconductor laser array 111 in the Y-axis direction (step 5). When the position of the semiconductor laser array 111 in the Y-axis direction is a predetermined value, the position of the so-called beam waist at which the laser beam diameter becomes minimum is the position of the pinholes 2c to 2f.
The amount of light emitted by c to 2f is minimized, and the amount of light captured by the optical sensors 3C to 3F is the maximum predetermined amount of light.

According to the light source array position adjusting device 1 described above, the following effects can be obtained. (A) X-axis direction and Z-axis direction of the semiconductor laser array 111 (
Procedures 1 and 2), all rotation directions around the Y axis (procedure 2), rotation directions around the Z axis (procedure 3), rotation directions around the X axis (procedure 4), and Y axis directions (procedure 5) Can be easily adjusted. (B) Since adjustment is performed by the fixed photodetector 30, the optical sensors 3A to 3F, and the spot forming unit 2, an error due to movement of the stage or the like can be eliminated, so that the accuracy of the adjustment is improved and the adjustment can be performed at high speed. . (C) The same fixed photodetector 30, photosensors 3A to 3A
Since the plurality of semiconductor laser arrays 111 can be adjusted by F and the spot forming unit 2, the plurality of semiconductor laser arrays 111 can be adjusted to the same position. Therefore, in an optical scanning device that forms the same image by exposing a plurality of recording media with a plurality of semiconductor laser arrays, an exposure position error caused by the plurality of semiconductor laser arrays can be reduced. (D) Costs can be reduced because expensive two-dimensional CCD cameras, image processing devices, and high-precision stages are not used.

Note that the present invention is not limited to the above embodiment, and various embodiments are possible. For example, the optical sensor, the slit, and the pinhole are not limited to the shapes and the numbers described, but can be replaced with those having the same function.

[0035]

As described above, according to the light source array position adjusting method and the light source array position adjusting apparatus of the present invention,
After performing the first position adjustment of the light source array based on the amount of light beam passing through the first aperture, the amount of light beam passing through the second aperture having an aperture area larger than the first aperture. , The second position adjustment of the light source array is performed, so that the position can be adjusted at high speed and with high accuracy. In addition, since the amount of light can be detected using a fixed optical sensor, a stage for moving the optical sensor is not required.
Cost reduction can be achieved.

[Brief description of the drawings]

1 (a) is an XY plane view, FIG. 1 (b) is a YZ plane view, relating to a light source array position adjusting apparatus according to an embodiment of the present invention.
(c) is a front view of the spot forming portion as viewed from the semiconductor laser array side.

FIG. 2 is a diagram showing an arrangement state of the semiconductor laser according to the present embodiment.

FIG. 3 is a diagram showing a photodetector according to the present embodiment.

FIG. 4A shows a lighting position of a semiconductor laser, and FIG.
FIG. 3 is a diagram showing a positional relationship between a spot and an optical sensor.

FIG. 5A shows a lighting position of a semiconductor laser, and FIG.
FIG. 4 is a diagram showing a positional relationship between a spot and a slit.

FIG. 6A shows a lighting position of a semiconductor laser, and FIG.
FIG. 3 is a diagram showing a positional relationship between a spot and a pinhole.

FIG. 7 is a block diagram showing a control system of the light source array position adjusting device according to the present embodiment.

FIGS. 8A to 8D are views showing spots of a laser beam incident on an optical sensor of a photodetector according to the present embodiment.

FIG. 9 is a flowchart for explaining the operation of the light source array position adjusting device according to the present embodiment.

FIG. 10 is a flowchart for explaining the operation of the light source array position adjusting device according to the present embodiment.

FIGS. 11A and 11B show an example of the optical scanning device, wherein FIG. 11A is an XY plane view, and FIG. 11B is a YZ plane view.

FIG. 12 is a diagram showing a laser array package.

13A and 13B show an example of a conventional light source array position adjusting device, wherein FIG. 13A is an XY plane view, and FIG. 13B is a YZ plane view.

[Explanation of symbols]

 Reference Signs List 1 light source array position adjusting device 2 spot forming unit 2a, 2b slit 2c-2f pinhole 3A-3F optical sensor 4 spot 20 square hole 30 photodetector 30a-30d optical sensor 100 image exposure apparatus 101 semiconductor laser array 110 semiconductor laser 111A Laser array package 112 Condensing lens 113 Imaging lens 114 Recording medium 114a Peripheral surface (imaging plane) of recording medium 116 Optical axis D Spot diameter

Claims (18)

[Claims] A light source array in which a plurality of light sources for emitting a plurality of light beams are two-dimensionally arranged in a main scanning direction and a sub-scanning direction; and a plurality of light beams emitted from the plurality of light sources. An optical scanning device having a scanning surface to be scanned, a first aperture having a predetermined aperture area provided at a position corresponding to the scanning surface, and the light source corresponding to a center of the first aperture. Is turned on to detect the light amount of the light beam that has passed through the first opening, and a first position adjustment of the light source array is performed based on the detection result, and an opening smaller than the predetermined opening area is performed. A second aperture having a hole area is provided at a position corresponding to the scanning surface, and the light source corresponding to the center of the second aperture is turned on to light the light beam passing through the second aperture. The light amount is detected, and the light source array is detected based on the detection result. Source array position adjusting method and performing a second alignment of. 2. The light source array position adjusting method according to claim 1, wherein said first position adjustment is performed using a slit as said first opening. 3. The structure according to claim 1, wherein said first position adjustment is performed using a first slit long in said main scanning direction and a second slit long in said sub-scanning direction as said first aperture. 2. The light source array position adjusting method according to 1. 4. The first position adjustment includes turning on the two light sources corresponding to the respective centers of the first slit and the second slit, thereby turning on the first slit and the second slit. The light amounts of the two light beams that have passed are detected, and based on the detection results, the main scanning direction, the sub-scanning direction, and the rotation direction about an axis orthogonal to the main scanning direction and the sub-scanning direction. 4. The light source array position adjusting method according to claim 3, wherein the position of the light source array is adjusted. 5. The light source array position adjusting method according to claim 1, wherein said second position adjustment is performed using a pinhole as said second opening. 6. The second position adjustment includes: a first and a second pinhole arranged as the second opening at a predetermined distance in the main scanning direction; and a predetermined position in the sub-scanning direction. 2. The light source array position adjusting method according to claim 1, wherein the third and fourth pinholes are provided at a distance from each other. 7. The method according to claim 1, wherein the second position adjustment is performed by using the first to fourth positions.
The four light sources corresponding to the pinholes are turned on to detect the light amounts of the four light beams passing through the first to fourth pinholes, and the main scanning direction and the sub-scanning direction are determined based on the detection results. 7. The light source array position according to claim 6, wherein the position of the light source array is adjusted in a direction orthogonal to a scanning direction, a rotation direction around an axis in the main scanning direction, and a rotation direction around an axis in the sub-scanning direction. Adjustment method. 8. The first position adjustment includes turning on the four light sources near the center of the light source array, and controlling the light amounts of the four light beams emitted from the four light sources by four light sensors, respectively. 2. The light source array position adjusting method according to claim 1, wherein the light source array position adjusting method is performed after detecting and performing position adjustment of the light source array in the main scanning direction and the sub-scanning direction based on the detection result. 9. A light source array in which a plurality of light sources for emitting a plurality of light beams are two-dimensionally arranged in a main scanning direction and a sub-scanning direction, and a plurality of light beams emitted from the plurality of light sources are provided. An optical scanning device having a scanning surface to be scanned, wherein the light source array is arranged in the main scanning direction, the sub-scanning direction, a direction orthogonal to the main scanning direction and the sub-scanning direction, and around an axis in the main scanning direction. The light source array holding means for holding the position so as to be adjustable in the rotation direction, the rotation direction about the axis in the sub-scanning direction, and the rotation direction about an axis orthogonal to the main scanning direction and the sub-scanning direction. A light-shielding means provided at a position corresponding to the scanning surface and provided with a first opening having a predetermined opening area and a second opening having an opening area smaller than the predetermined opening area; And the first First light detection means for turning on the light source corresponding to the center of the aperture to detect the amount of the light beam passing through the first aperture, and the light source corresponding to the center of the second aperture; And a second light detecting means for turning on the light source and detecting the light amount of the light beam passing through the second opening. 10. The light source array position adjusting device according to claim 9, wherein said light shielding means has a slit as said first opening. 11. The slit has a longer side longer than a spot interval between two adjacent light beams on the slit, and a shorter side adjacent to the slit larger than the spot diameter of the light beam on the slit. 11. The light beam position adjusting device according to claim 10, wherein the light beam position adjusting device has a length smaller than a distance between two spots. 12. The light-shielding means includes a first slit which is long in the main scanning direction and a second slit which is long in the sub-scanning direction, as the first opening. Illuminating one light source corresponding to the center of the first slit to detect the amount of light of one light beam passing through the first slit;
And a light sensor corresponding to the center of the second slit.
The light source array position adjusting device according to claim 9, further comprising: a second light sensor configured to turn on the light sources and detect a light amount of the one light beam that has passed through the second slit. 13. The light source array position adjusting device according to claim 9, wherein said light shielding means has a pinhole as said second opening. 14. A structure according to claim 1, wherein said pinhole has a diameter on said pinhole larger than a diameter of said light beam.
3. The light source array position adjusting device according to 3. 15. The light-shielding means includes first and second pinholes provided as the second apertures at a predetermined distance in the main scanning direction, and a predetermined distance in the sub-scanning direction. And third and fourth pinholes provided and arranged, wherein the second light detection means turns on the four light sources corresponding to the first to fourth pinholes and turns on the first to fourth pinholes. 10. The light source array position adjusting device according to claim 9, comprising first to fourth optical sensors for respectively detecting the light amounts of the four light beams passing through the four pinholes. 16. A light source array in which a plurality of light sources for emitting a plurality of light beams are two-dimensionally arranged in a main scanning direction and a sub-scanning direction, and a plurality of light beams emitted from the plurality of light sources are provided. An optical scanning device having a scanning surface to be scanned, wherein the light source array is arranged in the main scanning direction, the sub-scanning direction, a direction orthogonal to the main scanning direction and the sub-scanning direction, and around an axis in the main scanning direction. The light source array holding means for holding the position so as to be adjustable in the rotation direction, the rotation direction about the axis in the sub-scanning direction, and the rotation direction about an axis orthogonal to the main scanning direction and the sub-scanning direction. A light-shielding means provided at a position corresponding to the scanning surface and provided with a first opening having a predetermined opening area and a second opening having an opening area smaller than the predetermined opening area; And the light Four light sensors for turning on the four light sources near the center of the array and detecting the light amounts of the four light beams emitted from the four light sources, and the light source corresponding to the center of the first aperture A first light detecting means for turning on a light source to detect a light amount of the light beam passing through the first opening; and turning on the second light source by turning on the light source corresponding to the center of the second opening. A light source array position adjusting device, comprising: a second light detecting means for detecting a light amount of the light beam having passed through the aperture. 17. The light source array position adjusting device according to claim 16, wherein said four light sensors have a light receiving area capable of receiving one of said four light beams. 18. A light source array in which a plurality of light sources for emitting a plurality of light beams are two-dimensionally arranged in a main scanning direction and a sub-scanning direction, and a plurality of light beams emitted from the plurality of light sources are provided. An optical scanning device having a scanning surface to be scanned, wherein the light source array is arranged in the main scanning direction, the sub-scanning direction, a direction orthogonal to the main scanning direction and the sub-scanning direction, and around an axis in the main scanning direction. The light source array holding means for holding the position so as to be adjustable in the rotation direction, the rotation direction about the axis in the sub-scanning direction, and the rotation direction about an axis orthogonal to the main scanning direction and the sub-scanning direction. A light-shielding means provided at a position corresponding to the scanning surface and provided with a first opening having a predetermined opening area and a second opening having an opening area smaller than the predetermined opening area; And the second First light detecting means for turning on the light source corresponding to the center of the aperture and detecting the light amount of the light beam passing through the first aperture; and corresponding to the center of the second aperture A second light detection unit that turns on the light source and detects a light amount of the light beam that has passed through the second opening; and the first light detection unit and the second light detection unit detect the light amount. Control means for controlling the light source array holding means based on the amount of light to adjust the light source array to an optimum position.