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ITMI930461A1 - Impianto di rivestimento sotto alto vuoto - Google Patents

Impianto di rivestimento sotto alto vuoto

Info

Publication number
ITMI930461A1
ITMI930461A1 IT000461A ITMI930461A ITMI930461A1 IT MI930461 A1 ITMI930461 A1 IT MI930461A1 IT 000461 A IT000461 A IT 000461A IT MI930461 A ITMI930461 A IT MI930461A IT MI930461 A1 ITMI930461 A1 IT MI930461A1
Authority
IT
Italy
Prior art keywords
high vacuum
coating system
vacuum coating
vacuum
coating
Prior art date
Application number
IT000461A
Other languages
English (en)
Inventor
Klaus Contzen
Original Assignee
Leybold Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Ag filed Critical Leybold Ag
Publication of ITMI930461A0 publication Critical patent/ITMI930461A0/it
Publication of ITMI930461A1 publication Critical patent/ITMI930461A1/it
Application granted granted Critical
Publication of IT1272004B publication Critical patent/IT1272004B/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Coating Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
ITMI930461A 1992-03-10 1993-03-10 Impianto di rivestimento sotto alto vuoto IT1272004B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4207527A DE4207527A1 (de) 1992-03-10 1992-03-10 Hochvakuum-beschichtungsanlage

Publications (3)

Publication Number Publication Date
ITMI930461A0 ITMI930461A0 (it) 1993-03-10
ITMI930461A1 true ITMI930461A1 (it) 1994-09-10
IT1272004B IT1272004B (it) 1997-06-10

Family

ID=6453648

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI930461A IT1272004B (it) 1992-03-10 1993-03-10 Impianto di rivestimento sotto alto vuoto

Country Status (3)

Country Link
DE (1) DE4207527A1 (it)
GB (1) GB2264954B (it)
IT (1) IT1272004B (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114673436A (zh) * 2022-05-06 2022-06-28 朱雪峰 一种轨道立式背靠背旋转门及真空光学机

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NO121829B (it) * 1967-02-24 1971-04-13 Sverre Munck As
FR2548589B1 (fr) * 1983-07-07 1987-02-20 Aerospatiale Procede et dispositif d'impregnation metallique d'un substrat se presentant sous la forme d'une nappe de fibres conductrices du courant electrique
JPS6127808A (ja) * 1984-07-16 1986-02-07 Okamura Seisakusho:Kk 回転式収納棚
DE3726113A1 (de) * 1987-08-06 1989-02-16 Leybold Ag Vorrichtung zum beschichten von baendern
DE3738722C2 (de) * 1987-11-14 1995-12-14 Leybold Ag Vorrichtung zum beidseitigen Beschichten von Bändern
JP2525284B2 (ja) * 1990-10-22 1996-08-14 ティーディーケイ株式会社 クリ―ン搬送方法及び装置

Also Published As

Publication number Publication date
GB9224787D0 (en) 1993-01-13
DE4207527A1 (de) 1993-09-16
ITMI930461A0 (it) 1993-03-10
GB2264954B (en) 1995-09-06
IT1272004B (it) 1997-06-10
GB2264954A (en) 1993-09-15

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Legal Events

Date Code Title Description
0001 Granted
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19970228