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IT1239459B - METHOD TO REDUCE DEGRADATION DUE TO HOT ELECTRONS IN SEMICONDUCTOR DEVICES - Google Patents

METHOD TO REDUCE DEGRADATION DUE TO HOT ELECTRONS IN SEMICONDUCTOR DEVICES

Info

Publication number
IT1239459B
IT1239459B IT19716A IT1971690A IT1239459B IT 1239459 B IT1239459 B IT 1239459B IT 19716 A IT19716 A IT 19716A IT 1971690 A IT1971690 A IT 1971690A IT 1239459 B IT1239459 B IT 1239459B
Authority
IT
Italy
Prior art keywords
semiconductor devices
degradation due
hot electrons
reduce degradation
reduce
Prior art date
Application number
IT19716A
Other languages
Italian (it)
Other versions
IT9019716A1 (en
IT9019716A0 (en
Inventor
Stefan K Lai
Daniel N Tang
Simon Y Wang
Susan L Kao
Baylor B Triplett
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Publication of IT9019716A0 publication Critical patent/IT9019716A0/en
Publication of IT9019716A1 publication Critical patent/IT9019716A1/en
Application granted granted Critical
Publication of IT1239459B publication Critical patent/IT1239459B/en

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/68Floating-gate IGFETs
    • H10D30/681Floating-gate IGFETs having only two programming levels
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/60Electrodes characterised by their materials
    • H10D64/62Electrodes ohmically coupled to a semiconductor
    • H10W20/425
IT19716A 1989-03-22 1990-03-19 METHOD TO REDUCE DEGRADATION DUE TO HOT ELECTRONS IN SEMICONDUCTOR DEVICES IT1239459B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US32730289A 1989-03-22 1989-03-22

Publications (3)

Publication Number Publication Date
IT9019716A0 IT9019716A0 (en) 1990-03-19
IT9019716A1 IT9019716A1 (en) 1991-09-19
IT1239459B true IT1239459B (en) 1993-11-02

Family

ID=23276001

Family Applications (1)

Application Number Title Priority Date Filing Date
IT19716A IT1239459B (en) 1989-03-22 1990-03-19 METHOD TO REDUCE DEGRADATION DUE TO HOT ELECTRONS IN SEMICONDUCTOR DEVICES

Country Status (6)

Country Link
JP (1) JPH02281663A (en)
DE (1) DE4007895C2 (en)
FR (1) FR2644934A1 (en)
GB (1) GB2229575B (en)
HK (1) HK1000976A1 (en)
IT (1) IT1239459B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR960015322B1 (en) * 1993-07-23 1996-11-07 현대전자산업 주식회사 Method for manufacturing semiconductor elements
JP2003297956A (en) 2002-04-04 2003-10-17 Toshiba Corp Semiconductor storage device and method of manufacturing the same
JP4212299B2 (en) 2002-05-09 2009-01-21 株式会社東芝 Nonvolatile semiconductor memory device

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3879746A (en) * 1972-05-30 1975-04-22 Bell Telephone Labor Inc Gate metallization structure
US4288256A (en) * 1977-12-23 1981-09-08 International Business Machines Corporation Method of making FET containing stacked gates
WO1981000487A1 (en) * 1979-08-13 1981-02-19 Ncr Co Hydrogen annealing process for silicon gate memory device
JP2515715B2 (en) * 1984-02-24 1996-07-10 株式会社日立製作所 Method for manufacturing semiconductor integrated circuit device
US4566026A (en) * 1984-04-25 1986-01-21 Honeywell Inc. Integrated circuit bimetal layer
US4743564A (en) * 1984-12-28 1988-05-10 Kabushiki Kaisha Toshiba Method for manufacturing a complementary MOS type semiconductor device
JPS62143476A (en) * 1985-12-18 1987-06-26 Fujitsu Ltd semiconductor storage device
US4707721A (en) * 1986-02-20 1987-11-17 Texas Instruments Incorporated Passivated dual dielectric gate system and method for fabricating same
IT1201840B (en) * 1986-08-28 1989-02-02 Sgs Microelettronica Spa METHOD-SEMICONDUCTOR OHMIC CONTACTS PROCEDURE
CA1306072C (en) * 1987-03-30 1992-08-04 John E. Cronin Refractory metal - titanium nitride conductive structures and processes for forming the same
US4824803A (en) * 1987-06-22 1989-04-25 Standard Microsystems Corporation Multilayer metallization method for integrated circuits

Also Published As

Publication number Publication date
HK1000976A1 (en) 1998-05-15
GB9000360D0 (en) 1990-03-07
FR2644934A1 (en) 1990-09-28
IT9019716A1 (en) 1991-09-19
JPH02281663A (en) 1990-11-19
IT9019716A0 (en) 1990-03-19
DE4007895C2 (en) 2000-03-30
DE4007895A1 (en) 1990-09-27
GB2229575A (en) 1990-09-26
GB2229575B (en) 1993-05-12

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Legal Events

Date Code Title Description
0001 Granted
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19980327