[go: up one dir, main page]

IL143467A - Specimen holding robotic arm and effector - Google Patents

Specimen holding robotic arm and effector

Info

Publication number
IL143467A
IL143467A IL14346799A IL14346799A IL143467A IL 143467 A IL143467 A IL 143467A IL 14346799 A IL14346799 A IL 14346799A IL 14346799 A IL14346799 A IL 14346799A IL 143467 A IL143467 A IL 143467A
Authority
IL
Israel
Prior art keywords
specimen
effector
end effector
robotic arm
supination
Prior art date
Application number
IL14346799A
Other languages
English (en)
Other versions
IL143467A0 (en
Original Assignee
Newport Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/204,747 external-priority patent/US6256555B1/en
Application filed by Newport Corp filed Critical Newport Corp
Publication of IL143467A0 publication Critical patent/IL143467A0/xx
Publication of IL143467A publication Critical patent/IL143467A/xx

Links

Classifications

    • H10P72/7602—
    • H10P72/78—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S700/00—Data processing: generic control systems or specific applications
    • Y10S700/90—Special robot structural element
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20317—Robotic arm including electric motor

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
  • Fishing Rods (AREA)
  • Sampling And Sample Adjustment (AREA)
IL14346799A 1998-12-02 1999-12-02 Specimen holding robotic arm and effector IL143467A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/204,747 US6256555B1 (en) 1998-12-02 1998-12-02 Robot arm with specimen edge gripping end effector
US09/312,343 US6275748B1 (en) 1998-12-02 1999-05-14 Robot arm with specimen sensing and edge gripping end effector
PCT/US1999/028737 WO2000033359A2 (en) 1998-12-02 1999-12-02 Specimen holding robotic arm end effector

Publications (2)

Publication Number Publication Date
IL143467A0 IL143467A0 (en) 2002-04-21
IL143467A true IL143467A (en) 2005-05-17

Family

ID=26899770

Family Applications (3)

Application Number Title Priority Date Filing Date
IL14346799A IL143467A (en) 1998-12-02 1999-12-02 Specimen holding robotic arm and effector
IL166019A IL166019A (en) 1998-12-02 2004-12-21 Method of removing a specimen from a specimen holder
IL166018A IL166018A (en) 1998-12-02 2004-12-28 Specimen peripheral edge-gripping device that is adapted for operative coupling to a mechanism and gripping a specimen

Family Applications After (2)

Application Number Title Priority Date Filing Date
IL166019A IL166019A (en) 1998-12-02 2004-12-21 Method of removing a specimen from a specimen holder
IL166018A IL166018A (en) 1998-12-02 2004-12-28 Specimen peripheral edge-gripping device that is adapted for operative coupling to a mechanism and gripping a specimen

Country Status (9)

Country Link
US (5) US6453214B1 (xx)
EP (1) EP1135795B1 (xx)
JP (1) JP2002531942A (xx)
CN (1) CN1238882C (xx)
AT (1) ATE389237T1 (xx)
AU (1) AU2041000A (xx)
HK (1) HK1041104B (xx)
IL (3) IL143467A (xx)
WO (1) WO2000033359A2 (xx)

Families Citing this family (173)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2778496B1 (fr) * 1998-05-05 2002-04-19 Recif Sa Procede et dispositif de changement de position d'une plaque de semi-conducteur
ATE389237T1 (de) * 1998-12-02 2008-03-15 Newport Corp Armgreiforgan für probehalteroboter
US6454332B1 (en) * 1998-12-04 2002-09-24 Applied Materials, Inc. Apparatus and methods for handling a substrate
SE9900123L (sv) * 1999-01-15 2000-07-16 Abb Ab Metod för robot
US6986636B2 (en) * 2000-06-09 2006-01-17 Brooks Automation, Inc. Device for positioning disk-shaped objects
DE10028569A1 (de) * 2000-06-09 2001-12-13 Brooks Automation Gmbh Vorrichtung zum Positionieren scheibenförmiger Objekte
US6631935B1 (en) * 2000-08-04 2003-10-14 Tru-Si Technologies, Inc. Detection and handling of semiconductor wafer and wafer-like objects
JP4514942B2 (ja) * 2000-12-07 2010-07-28 株式会社アルバック 成膜装置
KR100383260B1 (ko) * 2001-03-08 2003-05-09 삼성전자주식회사 레티클 위치감지장치기능을 갖는 포크 암을 구비한 레이클이송장치
AU2002322504A1 (en) * 2001-07-13 2003-01-29 Broks Automation, Inc. Trajectory planning and motion control strategies for a planar three-degree-of-freedom robotic arm
US7334826B2 (en) * 2001-07-13 2008-02-26 Semitool, Inc. End-effectors for handling microelectronic wafers
US6615113B2 (en) * 2001-07-13 2003-09-02 Tru-Si Technologies, Inc. Articles holders with sensors detecting a type of article held by the holder
US7281741B2 (en) * 2001-07-13 2007-10-16 Semitool, Inc. End-effectors for handling microelectronic workpieces
JP2005518655A (ja) * 2001-07-15 2005-06-23 アプライド　マテリアルズ　インコーポレイテッド 処理システム
IL160164A0 (en) * 2001-08-09 2004-07-25 Integrated Dynamics Engineering Edge gripping pre-aligner
JP2003060004A (ja) * 2001-08-20 2003-02-28 Yaskawa Electric Corp ロボットハンド
US6678581B2 (en) * 2002-01-14 2004-01-13 Taiwan Semiconductor Manufacturing Co. Ltd Method of calibrating a wafer edge gripping end effector
JP3888620B2 (ja) * 2002-01-22 2007-03-07 東京エレクトロン株式会社 基板搬送装置における基板の受け渡し位置検知方法及びその教示装置
FR2835337B1 (fr) * 2002-01-29 2004-08-20 Recif Sa Procede et dispositif d'identification de caracteres inscrits sur une plaque de semi-conducteur comportant au moins une marque d'orientation
WO2003080479A2 (en) 2002-03-20 2003-10-02 Fsi International, Inc. Systems and methods incorporating an end effector with a rotatable and/or pivotable body and/or an optical sensor having a light path that extends along a length of the end effector
JP3795820B2 (ja) * 2002-03-27 2006-07-12 株式会社東芝 基板のアライメント装置
US20060043750A1 (en) * 2004-07-09 2006-03-02 Paul Wirth End-effectors for handling microfeature workpieces
US20070014656A1 (en) * 2002-07-11 2007-01-18 Harris Randy A End-effectors and associated control and guidance systems and methods
TW528709B (en) * 2002-08-01 2003-04-21 Nanya Technology Corp Wafer carrying device with blade position detection
JP2005539385A (ja) * 2002-09-16 2005-12-22 インテグレイテッド ダイナミックス エンジニアリング インコーポレーテッド 基板エンドエフェクタ
US6813543B2 (en) * 2002-10-08 2004-11-02 Brooks-Pri Automation, Inc. Substrate handling system for aligning and orienting substrates during a transfer operation
US7195236B2 (en) * 2003-03-28 2007-03-27 Northrop Grumman Corporation Automated induction systems and methods for mail and/or other objects
US20060000752A1 (en) * 2003-03-28 2006-01-05 Northrop Grumman Corporation Stack correction system and method
US20050077217A1 (en) * 2003-03-28 2005-04-14 Hillerich Thomas A. Carrier for mail and/or the like thin objects
SG139733A1 (en) * 2003-04-11 2008-02-29 Nikon Corp Apparatus having an immersion fluid system configured to maintain immersion fluid in a gap adjacent an optical assembly
CN1822998A (zh) * 2003-05-13 2006-08-23 诺思罗普格拉曼公司 改进的物件供给器预处理系统
KR101148810B1 (ko) 2003-06-19 2012-05-24 가부시키가이샤 니콘 노광 장치 및 디바이스 제조방법
EP1489425B1 (de) * 2003-06-20 2007-02-14 Tecan Trading AG Vorrichtung und Verfahren zum Positionieren von Funktionselementen und/oder Behältern auf dem Arbeitsfeld eines Labormanipulators mittels zweier sich kreuzender Lichtschranken
CN101383318B (zh) * 2003-06-27 2010-09-08 马特森技术公司 用于装卸半导体晶片的末端执行器
US7654596B2 (en) * 2003-06-27 2010-02-02 Mattson Technology, Inc. Endeffectors for handling semiconductor wafers
US7261913B2 (en) * 2003-07-07 2007-08-28 Dreyer's Ice Cream, Inc. Aerated frozen suspension with adjusted creaminess and scoop ability based on stress-controlled generation of superfine microstructures
JP4284611B2 (ja) * 2003-07-11 2009-06-24 株式会社ダイフク 搬送装置
US7039498B2 (en) * 2003-07-23 2006-05-02 Newport Corporation Robot end effector position error correction using auto-teach methodology
US8016541B2 (en) * 2003-09-10 2011-09-13 Brooks Automation, Inc. Substrate handling system for aligning and orienting substrates during a transfer operation
US9691651B2 (en) 2005-01-28 2017-06-27 Brooks Automation, Inc. Substrate handling system for aligning and orienting substrates during a transfer operation
US20050086024A1 (en) * 2003-09-19 2005-04-21 Cyberoptics Semiconductor Inc. Semiconductor wafer location sensing via non contact methods
JP4501102B2 (ja) * 2003-10-14 2010-07-14 株式会社安川電機 教示治具およびそれを使って教示されるロボットおよびそのロボットの教示方法
US20050110287A1 (en) * 2003-10-24 2005-05-26 Ade Corporation 200 MM notched/flatted wafer edge gripping end effector
US7107125B2 (en) * 2003-10-29 2006-09-12 Applied Materials, Inc. Method and apparatus for monitoring the position of a semiconductor processing robot
US7458763B2 (en) 2003-11-10 2008-12-02 Blueshift Technologies, Inc. Mid-entry load lock for semiconductor handling system
EP1684951B1 (en) 2003-11-10 2014-05-07 Brooks Automation, Inc. System for handling workpieces in a vacuum-based semiconductor handling system
US10086511B2 (en) 2003-11-10 2018-10-02 Brooks Automation, Inc. Semiconductor manufacturing systems
US20070269297A1 (en) 2003-11-10 2007-11-22 Meulen Peter V D Semiconductor wafer handling and transport
US7319920B2 (en) * 2003-11-10 2008-01-15 Applied Materials, Inc. Method and apparatus for self-calibration of a substrate handling robot
US7230702B2 (en) * 2003-11-13 2007-06-12 Applied Materials, Inc. Monitoring of smart pin transition timing
US20050107917A1 (en) * 2003-11-14 2005-05-19 Smith Paul E. Robotic system for sequencing multiple specimens between a holding tray and a microscope
US7181314B2 (en) * 2003-11-24 2007-02-20 Abb Research Ltd. Industrial robot with controlled flexibility and simulated force for automated assembly
JP4262064B2 (ja) 2003-11-28 2009-05-13 株式会社ダイヘン 搬送ロボット
US7222006B2 (en) * 2004-01-13 2007-05-22 General Motors Corporation Method for determination of pre-authorization engine operation time for a vehicle theft deterrent system
US7589822B2 (en) 2004-02-02 2009-09-15 Nikon Corporation Stage drive method and stage unit, exposure apparatus, and device manufacturing method
KR100568867B1 (ko) * 2004-03-18 2006-04-10 삼성전자주식회사 웨이퍼 좌표감지장치 및 그 웨이퍼 좌표감지 기능을 갖는반도체 제조설비
US20050229856A1 (en) * 2004-04-20 2005-10-20 Malik Roger J Means and method for a liquid metal evaporation source with integral level sensor and external reservoir
US20070020080A1 (en) * 2004-07-09 2007-01-25 Paul Wirth Transfer devices and methods for handling microfeature workpieces within an environment of a processing machine
US7264177B2 (en) * 2004-08-03 2007-09-04 Intelligent Lawn Systems, L.P. Methods, systems and apparatuses for automated irrigation and chemical treatment
US20060099065A1 (en) * 2004-08-27 2006-05-11 Northrop Grumman Corporation Preparation operator flex-station for carrier preparation
US7720558B2 (en) * 2004-09-04 2010-05-18 Applied Materials, Inc. Methods and apparatus for mapping carrier contents
US7993093B2 (en) * 2004-09-15 2011-08-09 Applied Materials, Inc. Systems and methods for wafer translation
US7467792B2 (en) * 2004-09-24 2008-12-23 Northrop Grumman Corporation Anti-toppling device for mail with retractable protrusion
DE102004053906A1 (de) * 2004-11-05 2006-05-11 Leica Microsystems Semiconductor Gmbh Adaptervorrichtung für eine Substrat-Arbeitsstation
US7396412B2 (en) 2004-12-22 2008-07-08 Sokudo Co., Ltd. Coat/develop module with shared dispense
US7819079B2 (en) 2004-12-22 2010-10-26 Applied Materials, Inc. Cartesian cluster tool configuration for lithography type processes
US7651306B2 (en) 2004-12-22 2010-01-26 Applied Materials, Inc. Cartesian robot cluster tool architecture
US7798764B2 (en) 2005-12-22 2010-09-21 Applied Materials, Inc. Substrate processing sequence in a cartesian robot cluster tool
EP1854293A2 (en) * 2005-02-07 2007-11-14 Thomson Licensing METHOD AND APPARATUS FOR REPLAYING A VIDEO SIGNAL AND ONE OR MORE AUDIO SIGNALS RELATED TO AUDIO/VIDEO DATA THAT ARE BASED ON A 24Hz FRAME FREQUENCY VIDEO SIGNAL
CN1824592B (zh) * 2005-02-25 2012-02-29 细美事有限公司 晶片传送装置
US7611182B2 (en) 2005-02-25 2009-11-03 Semes Co., Ltd. Wafer transfer apparatus
US20060245871A1 (en) * 2005-03-10 2006-11-02 Wen-Ming Lo Wafer transfer system, wafer transfer method, cassette exchange system and cassette exchange method
JP5155517B2 (ja) * 2005-04-21 2013-03-06 株式会社荏原製作所 ウエハ受渡装置及びポリッシング装置
CN102176425B (zh) * 2005-04-22 2013-02-06 应用材料公司 笛卡尔机械臂群集工具架构
US7374391B2 (en) * 2005-12-22 2008-05-20 Applied Materials, Inc. Substrate gripper for a substrate handling robot
US7694583B2 (en) * 2005-05-05 2010-04-13 Control Gaging, Inc. Gripper gage assembly
KR20080009745A (ko) * 2005-07-15 2008-01-29 가부시키가이샤 야스카와덴키 웨이퍼 위치 교시 방법 및 교시 치구 장치
US7387484B2 (en) * 2005-12-21 2008-06-17 Taiwan Semiconductor Manufacturing Co., Ltd. Wafer positioning systems and methods thereof
US20070177963A1 (en) * 2006-02-01 2007-08-02 Tang Chee W End effector for transferring a wafer
CN100546774C (zh) * 2006-03-29 2009-10-07 旺矽科技股份有限公司 多向式抓取装置
US7792602B2 (en) * 2006-08-22 2010-09-07 Precision Automation, Inc. Material processing system and a material processing method including a saw station and an interface with touch screen
CN101154610B (zh) * 2006-09-25 2010-05-12 北京北方微电子基地设备工艺研究中心有限责任公司 搬运校准装置及应用该装置的晶片传输系统
US20100096538A1 (en) * 2006-09-28 2010-04-22 Jin-Sang Hwang Method for measuring angular displacement using optical fiber and method for manufacturing the same
US20080166210A1 (en) * 2007-01-05 2008-07-10 Applied Materials, Inc. Supinating cartesian robot blade
US7694688B2 (en) 2007-01-05 2010-04-13 Applied Materials, Inc. Wet clean system design
US20080213076A1 (en) * 2007-03-02 2008-09-04 Stephen Hanson Edge grip end effector
US9437469B2 (en) * 2007-04-27 2016-09-06 Brooks Automation, Inc. Inertial wafer centering end effector and transport apparatus
US8226142B2 (en) * 2007-08-09 2012-07-24 Axcelis Technologies, Inc. Workpiece gripping integrity sensor
US20090092470A1 (en) * 2007-10-03 2009-04-09 Bonora Anthony C End effector with sensing capabilities
US8099192B2 (en) * 2007-11-06 2012-01-17 Novellus Systems, Inc. Method and apparatus for teaching a workpiece transfer robot
US20090182454A1 (en) * 2008-01-14 2009-07-16 Bernardo Donoso Method and apparatus for self-calibration of a substrate handling robot
DE202009018064U1 (de) 2008-01-24 2010-12-02 Brewer Science, Inc. Gegenstände beim reversiblen Anbringen eines Vorrichtungswafers an einem Trägersubstrat
US7766171B2 (en) * 2008-02-28 2010-08-03 Northrop Grumman Systems Corporation Rigid storage tray for flat and letter mail
CN101959643B (zh) * 2008-03-05 2013-04-17 平田机工株式会社 工件移送装置
US9117870B2 (en) 2008-03-27 2015-08-25 Lam Research Corporation High throughput cleaner chamber
WO2009144787A1 (ja) * 2008-05-28 2009-12-03 平田機工株式会社 生産装置
JP5064566B2 (ja) * 2008-09-10 2012-10-31 株式会社ハーモニック・ドライブ・システムズ ロボットハンドおよび板状物品のハンドリング方法
JP5347466B2 (ja) * 2008-12-09 2013-11-20 株式会社安川電機 教示治具によって教示する基板搬送用マニピュレータ
JP5402284B2 (ja) * 2008-12-18 2014-01-29 株式会社安川電機 基板搬送ロボット、基板搬送装置、半導体製造装置および基板搬送ロボットの干渉物回避方法
US8215890B2 (en) * 2009-03-12 2012-07-10 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor wafer robot alignment system and method
EP2414138B1 (en) * 2009-03-31 2014-06-25 ATS Automation Tooling Systems Inc. Vacuum gripper assembly stabilized by springs
DE102009016811A1 (de) * 2009-04-09 2010-10-14 Aes Motomation Gmbh Verfahren zur automatischen Vermessung und zum Einlernen von Lagepositionen von Objekten innerhalb eines Substratprozessiersystems mittels Sensorträger und zugehöriger Sensorträger
US8285418B2 (en) * 2009-07-23 2012-10-09 Kla-Tencor Corporation Dual scanning stage
CN101728302B (zh) * 2009-12-08 2013-06-12 中国电子科技集团公司第四十五研究所 边缘接触夹持式晶圆末端执行器
CN102092044B (zh) * 2009-12-10 2013-02-06 北京北方微电子基地设备工艺研究中心有限责任公司 一种基片处理系统及其机械手臂装置
US8562272B2 (en) 2010-02-16 2013-10-22 Lam Research Corporation Substrate load and unload mechanisms for high throughput
CN102194727B (zh) * 2010-03-11 2013-09-04 中芯国际集成电路制造(上海)有限公司 一种改进的机器人伸缩臂
US8282698B2 (en) 2010-03-24 2012-10-09 Lam Research Corporation Reduction of particle contamination produced by moving mechanisms in a process tool
US8893642B2 (en) 2010-03-24 2014-11-25 Lam Research Corporation Airflow management for low particulate count in a process tool
CN102023487B (zh) * 2010-05-26 2013-06-19 沈阳芯源微电子设备有限公司 真空边缘夹持机构
US8852391B2 (en) 2010-06-21 2014-10-07 Brewer Science Inc. Method and apparatus for removing a reversibly mounted device wafer from a carrier substrate
US9263314B2 (en) 2010-08-06 2016-02-16 Brewer Science Inc. Multiple bonding layers for thin-wafer handling
US20120063874A1 (en) * 2010-09-15 2012-03-15 Applied Materials, Inc. Low profile dual arm vacuum robot
US8731718B2 (en) * 2010-10-22 2014-05-20 Lam Research Corporation Dual sensing end effector with single sensor
JP5490741B2 (ja) * 2011-03-02 2014-05-14 東京エレクトロン株式会社 基板搬送装置の位置調整方法、及び基板処理装置
US8958907B2 (en) * 2011-03-31 2015-02-17 Sinfonia Technology Co., Ltd. Robot arm apparatus
US8657352B2 (en) 2011-04-11 2014-02-25 International Business Machines Corporation Robotic device for substrate transfer applications
DE102011077546A1 (de) * 2011-06-15 2012-12-20 Technische Universität Berlin Verfahren zum Betreiben eines Roboters, Roboter und Robotersystem
JP2011238962A (ja) * 2011-07-28 2011-11-24 Hitachi Kokusai Electric Inc 載置プレート、基板移載装置および基板処理装置
US9076829B2 (en) * 2011-08-08 2015-07-07 Applied Materials, Inc. Robot systems, apparatus, and methods adapted to transport substrates in electronic device manufacturing
CN103094162B (zh) * 2011-11-07 2016-02-10 北京中科信电子装备有限公司 一种定位机械手上晶片圆心的方法
US20130123966A1 (en) * 2011-11-14 2013-05-16 Shenzhen China Star Optoelectronics Technology Co., Ltd. Spatial three-dimensional inline handling system
WO2013090898A1 (en) * 2011-12-16 2013-06-20 Brooks Automation, Inc. Transport apparatus
US8936293B2 (en) 2011-12-21 2015-01-20 International Business Machines Corporation Robotic device for substrate transfer applications
TWI497637B (zh) * 2012-05-02 2015-08-21 Advanced Wireless Semiconductor Company 應用於聚光型太陽能電池之蝕刻設備之晶圓傳輸手臂
CN103569672B (zh) * 2012-07-20 2016-03-09 上海微电子装备有限公司 一种兼容硅片和玻璃基板的传输装置
JP6126414B2 (ja) * 2013-03-06 2017-05-10 株式会社荏原製作所 基板搬送装置、基板研磨装置
TWI625814B (zh) * 2012-07-27 2018-06-01 荏原製作所股份有限公司 工件搬送裝置
CN102903661A (zh) * 2012-10-25 2013-01-30 上海宏力半导体制造有限公司 晶圆末端执行器
JP6088243B2 (ja) * 2012-12-28 2017-03-01 川崎重工業株式会社 エンドエフェクタ
CN103972135B (zh) * 2013-01-25 2017-02-22 上海微电子装备有限公司 一种硅片精确定位传输装置及定位方法
JP5949741B2 (ja) * 2013-12-19 2016-07-13 株式会社安川電機 ロボットシステム及び検出方法
CN103887222B (zh) * 2014-03-05 2017-04-19 中国电子科技集团公司第四十五研究所 一种利用弹簧张紧和电机驱动的力反馈晶圆夹持装置
JP6360762B2 (ja) * 2014-09-26 2018-07-18 株式会社ディスコ 加工装置
US9786530B2 (en) * 2014-10-20 2017-10-10 Taiwan Semiconductor Manufacturing Co., Ltd. Wafer transfer method and system
TWI710440B (zh) 2014-11-10 2020-11-21 美商布魯克斯自動機械公司 工具自動教導方法及設備
CN104526698B (zh) * 2014-12-04 2016-06-01 北京七星华创电子股份有限公司 一种高强度的机械手臂、控制方法以及机械手装置
CN105097590B (zh) * 2015-06-17 2018-02-27 北京七星华创电子股份有限公司 一种组合式半导体热处理设备的硅片承载区扫描方法及装置
CN105097616B (zh) * 2015-06-17 2018-01-26 北京七星华创电子股份有限公司 基于机械手移动的硅片分布状态组合检测方法及装置
CN106684027B (zh) * 2015-11-11 2020-06-19 北京北方华创微电子装备有限公司 一种微电子加工设备及方法
US10252084B2 (en) * 2015-11-16 2019-04-09 Aktina Corp. Optical water surface detector and method
US9978631B2 (en) * 2015-12-31 2018-05-22 Beijing Naura Microelectronics Equipment Co., Ltd. Wafer pick-and-place method and system
CN106041239A (zh) * 2016-06-24 2016-10-26 宁夏小牛自动化设备有限公司 双手自动取料装置及自动取料方法和串焊机
CN107791240A (zh) * 2016-08-31 2018-03-13 精工爱普生株式会社 电机单元以及机器人
CN108091602B (zh) 2016-11-21 2022-04-22 北京北方华创微电子装备有限公司 一种双腔传片装置和传片方法
US9919430B1 (en) 2016-12-06 2018-03-20 Jabil Inc. Apparatus, system and method for providing an end effector
CN108333298B (zh) * 2017-01-19 2021-03-09 上海新昇半导体科技有限公司 晶片放置装置和晶片定向仪
JP2019010691A (ja) * 2017-06-29 2019-01-24 日本電産サンキョー株式会社 産業用ロボットのハンドおよび産業用ロボット
US10861723B2 (en) * 2017-08-08 2020-12-08 Taiwan Semiconductor Manufacturing Co., Ltd. EFEM robot auto teaching methodology
DE102018100003B4 (de) * 2017-08-08 2020-03-12 Taiwan Semiconductor Manufacturing Co., Ltd. Methodologie zum automatischen Anlernen eines EFEM-Roboters
US11020852B2 (en) 2017-10-05 2021-06-01 Brooks Automation, Inc. Substrate transport apparatus with independent accessory feedthrough
US20190120965A1 (en) * 2017-10-25 2019-04-25 Bae Systems Information And Electronic Systems Integration Inc. Method and system of digital light processing and light detection and ranging for guided autonomous vehicles
US10155309B1 (en) 2017-11-16 2018-12-18 Lam Research Corporation Wafer handling robots with rotational joint encoders
JP7064885B2 (ja) * 2018-01-05 2022-05-11 東京エレクトロン株式会社 基板把持機構、基板搬送装置及び基板処理システム
JP6992515B2 (ja) * 2018-01-05 2022-01-13 コニカミノルタ株式会社 Ｇｐｕ割当プログラム、ｇｐｕ割当方法、コンピュータ読取可能な記録媒体、および、ｇｐｕ割当装置
CN108098794B (zh) * 2018-01-15 2020-09-11 德淮半导体有限公司 机械手臂及其晶圆传送装置与晶圆检测机台
CN108312169A (zh) * 2018-04-17 2018-07-24 丹阳市精通眼镜技术创新服务中心有限公司 一种镜片自动夹持装置和方法
CN109230482B (zh) * 2018-08-20 2020-05-22 合肥国轩高科动力能源有限公司 一种动力电池烘箱托盘或夹具定位方法
US10867821B2 (en) * 2018-09-11 2020-12-15 Kawasaki Jukogyo Kabushiki Kaisha Substrate transfer robot and method of teaching edge position of target body
JP7162521B2 (ja) * 2018-12-21 2022-10-28 株式会社ダイヘン 多段式ハンドおよびこれを備える搬送ロボット
US11673275B2 (en) 2019-02-08 2023-06-13 Yaskawa America, Inc. Through-beam auto teaching
KR102818927B1 (ko) 2020-01-17 2025-06-11 주성엔지니어링(주) 기판 이송 방법 및 기판 이송 장치
EP4100994A4 (en) * 2020-02-17 2023-03-15 Jabil Inc. DEVICE, SYSTEM AND METHOD FOR MANUFACTURING A FIBER OPTIC COUPLER
CN111554595B (zh) * 2020-05-11 2021-03-23 上海果纳半导体技术有限公司 半导体芯片的制备装置
WO2022110000A1 (zh) * 2020-11-27 2022-06-02 苏州康代智能科技股份有限公司 一种电路板多位置取放控制及运送系统、控制及运送方法
US11845179B2 (en) * 2020-12-22 2023-12-19 Kawasaki Jukogyo Kabushiki Kaisha Wafer jig, robot system, communication method, and robot teaching method
KR102528797B1 (ko) * 2021-08-10 2023-05-03 세메스 주식회사 기판 이송 어셈블리 및 방법
JP7709877B2 (ja) * 2021-09-15 2025-07-17 株式会社Ｓｃｒｅｅｎホールディングス 端部状態確認装置
US12447618B2 (en) * 2022-12-21 2025-10-21 Intuitive Surgical Operations, Inc. Techniques for constraining motion of a drivable assembly
CN116344410A (zh) * 2023-04-26 2023-06-27 中芯智达半导体科技(上海)有限公司 一种晶圆搬运中滑片的实时检测方法及装置
CN117497481A (zh) * 2023-12-28 2024-02-02 北京锐洁机器人科技有限公司 一种夹持型末端执行器
CN119567301A (zh) * 2025-01-22 2025-03-07 北京星震同源数字系统股份有限公司 一种自感知机械手及控制方法
CN119833466B (zh) * 2025-03-17 2025-06-03 杭州众硅电子科技有限公司 一种晶圆提拉结构

Family Cites Families (67)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2367991A (en) 1943-12-16 1945-01-23 Carl G Bailey Pie pan lifter
US3439792A (en) * 1967-07-19 1969-04-22 Quaker Oats Co Container orienter
US3930684A (en) * 1971-06-22 1976-01-06 Lasch Jr Cecil A Automatic wafer feeding and pre-alignment apparatus and method
US3865254A (en) * 1973-05-21 1975-02-11 Kasker Instr Inc Prealignment system for an optical alignment and exposure instrument
JPS50122879A (xx) * 1974-03-13 1975-09-26
US4024944A (en) 1975-12-24 1977-05-24 Texas Instruments Incorporated Semiconductor slice prealignment system
US4452480A (en) 1981-12-21 1984-06-05 International Jensen Incorporated Record handling device
US4410209A (en) 1982-03-11 1983-10-18 Trapani Silvio P Wafer-handling tool
US4662811A (en) 1983-07-25 1987-05-05 Hayden Thomas J Method and apparatus for orienting semiconductor wafers
US4693028A (en) 1984-10-26 1987-09-15 Hill Loren G Method and apparatus for selecting fishing lure color
US4639028A (en) 1984-11-13 1987-01-27 Economic Development Corporation High temperature and acid resistant wafer pick up device
US4717190A (en) 1986-10-30 1988-01-05 Witherspoon Linda L Wafer handling and placement tool
US4900214A (en) 1988-05-25 1990-02-13 American Telephone And Telegraph Company Method and apparatus for transporting semiconductor wafers
US4938600A (en) 1989-02-09 1990-07-03 Interactive Video Systems, Inc. Method and apparatus for measuring registration between layers of a semiconductor wafer
US5102280A (en) 1989-03-07 1992-04-07 Ade Corporation Robot prealigner
US5238354A (en) 1989-05-23 1993-08-24 Cybeq Systems, Inc. Semiconductor object pre-aligning apparatus
JPH0828205B2 (ja) 1989-10-27 1996-03-21 株式会社日立製作所 ウエハ搬送装置
CH680275A5 (xx) 1990-03-05 1992-07-31 Tet Techno Investment Trust
JPH04157756A (ja) * 1990-10-22 1992-05-29 Tel Varian Ltd ウエハー枚葉処理装置
JPH04277647A (ja) 1991-03-05 1992-10-02 Mitsubishi Electric Corp 円板状物品の把持装置
US5382806A (en) * 1991-05-07 1995-01-17 Kensington Laboratories, Inc. Specimen carrier platform and scanning assembly
US5513948A (en) * 1991-05-17 1996-05-07 Kensington Laboratories, Inc. Universal specimen prealigner
US5511934A (en) * 1991-05-17 1996-04-30 Kensington Laboratories, Inc. Noncentering specimen prealigner having improved specimen edge detection and tracking
US5308222A (en) * 1991-05-17 1994-05-03 Kensington Laboratories, Inc. Noncentering specimen prealigner
JPH04343448A (ja) 1991-05-21 1992-11-30 Toshiba Corp ウェーハ把持装置
JPH06224281A (ja) 1992-01-14 1994-08-12 Toshiba Ceramics Co Ltd ウエハ移載用治具
JP3290215B2 (ja) 1992-11-13 2002-06-10 東芝機械株式会社 搬送装置
US5387067A (en) 1993-01-14 1995-02-07 Applied Materials, Inc. Direct load/unload semiconductor wafer cassette apparatus and transfer system
EP0686303B1 (de) * 1993-02-26 2000-12-13 MAYER, Herbert E. Vorrichtung und verfahren zum transportieren von flachen gegenständen, insbesondere von substraten
JPH0722502A (ja) 1993-06-30 1995-01-24 Hitachi Ltd 半導体ウエハのハンドリング装置
JPH0737960A (ja) 1993-07-16 1995-02-07 Miyazaki Oki Electric Co Ltd ウエハハンドリングロボット用ハンド
JPH07153818A (ja) 1993-11-30 1995-06-16 Daihen Corp 半導体ウエハ認識装置
JPH07201947A (ja) 1993-12-28 1995-08-04 Mitsubishi Electric Corp ウェハー搬送用のロボットハンドおよびこのロボットハンドによるウェハーの保持方法
US5643366A (en) 1994-01-31 1997-07-01 Applied Materials, Inc. Wafer handling within a vacuum chamber using vacuum
US5538385A (en) * 1994-06-24 1996-07-23 Kensington Laboratories, Inc. Specimen carrier holder and method of operating it
JPH0817895A (ja) 1994-06-30 1996-01-19 Kokusai Electric Co Ltd ウェーハ搬送プレート
KR0152324B1 (ko) * 1994-12-06 1998-12-01 양승택 웨이퍼 측면파지 이송 반도체 제조장치
US6098484A (en) * 1995-07-10 2000-08-08 Kensington Laboratories, Inc. High torque, low hysteresis, multiple link robot arm mechanism
US5741113A (en) * 1995-07-10 1998-04-21 Kensington Laboratories, Inc. Continuously rotatable multiple link robot arm mechanism
US5765444A (en) * 1995-07-10 1998-06-16 Kensington Laboratories, Inc. Dual end effector, multiple link robot arm system with corner reacharound and extended reach capabilities
US6360144B1 (en) * 1995-07-10 2002-03-19 Newport Corporation Self-teaching robot arm position method
US6366830B2 (en) * 1995-07-10 2002-04-02 Newport Corporation Self-teaching robot arm position method to compensate for support structure component alignment offset
KR100264312B1 (ko) * 1995-10-13 2000-08-16 디지래드 개선된 전하 수집능력을 갖는 반도체 방사선 검출기
US5669644A (en) 1995-11-13 1997-09-23 Kokusai Electric Co., Ltd. Wafer transfer plate
US5870488A (en) 1996-05-07 1999-02-09 Fortrend Engineering Corporation Method and apparatus for prealigning wafers in a wafer sorting system
DE19620234A1 (de) 1996-05-20 1997-11-27 Holtronic Technologies Ltd Verfahren und Vorrichtung zum Positionieren eines Substrats
WO1997045861A1 (en) 1996-05-28 1997-12-04 Holtronic Technologies Ltd. Device for gripping and holding a substrate
US5980194A (en) * 1996-07-15 1999-11-09 Applied Materials, Inc. Wafer position error detection and correction system
US5955858A (en) 1997-02-14 1999-09-21 Applied Materials, Inc. Mechanically clamping robot wrist
US5944476A (en) * 1997-03-26 1999-08-31 Kensington Laboratories, Inc. Unitary specimen prealigner and continuously rotatable multiple link robot arm mechanism
US6126381A (en) * 1997-04-01 2000-10-03 Kensington Laboratories, Inc. Unitary specimen prealigner and continuously rotatable four link robot arm mechanism
US5980187A (en) * 1997-04-16 1999-11-09 Kla-Tencor Corporation Mechanism for transporting semiconductor-process masks
KR100265757B1 (ko) 1997-05-09 2000-09-15 윤종용 반도체 제조장비의 웨이퍼 오탑재 방지센서
US5988971A (en) 1997-07-09 1999-11-23 Ade Optical Systems Corporation Wafer transfer robot
US6116848A (en) * 1997-11-26 2000-09-12 Brooks Automation, Inc. Apparatus and method for high-speed transfer and centering of wafer substrates
US6155768A (en) * 1998-01-30 2000-12-05 Kensington Laboratories, Inc. Multiple link robot arm system implemented with offset end effectors to provide extended reach and enhanced throughput
JPH11220003A (ja) * 1998-02-03 1999-08-10 Shin Meiwa Ind Co Ltd ウエハ把持装置
US6109677A (en) * 1998-05-28 2000-08-29 Sez North America, Inc. Apparatus for handling and transporting plate like substrates
US6167322A (en) 1998-07-10 2000-12-26 Holbrooks; Orville Ray Intelligent wafer handling system and method
US6160265A (en) 1998-07-13 2000-12-12 Kensington Laboratories, Inc. SMIF box cover hold down latch and box door latch actuating mechanism
KR100331157B1 (ko) * 1998-07-24 2002-04-03 다니구찌 이찌로오, 기타오카 다카시 웨이퍼 홀딩 핸드
US6298280B1 (en) * 1998-09-28 2001-10-02 Asyst Technologies, Inc. Method for in-cassette wafer center determination
US6113165A (en) 1998-10-02 2000-09-05 Taiwan Semiconductor Manufacturing Co., Ltd. Self-sensing wafer holder and method of using
ATE389237T1 (de) 1998-12-02 2008-03-15 Newport Corp Armgreiforgan für probehalteroboter
US6256555B1 (en) * 1998-12-02 2001-07-03 Newport Corporation Robot arm with specimen edge gripping end effector
US6357996B2 (en) * 1999-05-14 2002-03-19 Newport Corporation Edge gripping specimen prealigner
US6996456B2 (en) * 2002-10-21 2006-02-07 Fsi International, Inc. Robot with tactile sensor device

Also Published As

Publication number Publication date
US6618645B2 (en) 2003-09-09
CN1238882C (zh) 2006-01-25
IL166018A (en) 2012-04-30
IL166019A0 (en) 2006-01-15
US20020042666A1 (en) 2002-04-11
EP1135795A2 (en) 2001-09-26
US6438460B1 (en) 2002-08-20
ATE389237T1 (de) 2008-03-15
US6898487B2 (en) 2005-05-24
US20060045719A1 (en) 2006-03-02
CN1336008A (zh) 2002-02-13
HK1041104A1 (en) 2002-06-28
WO2000033359A2 (en) 2000-06-08
HK1041104B (zh) 2006-07-07
US6453214B1 (en) 2002-09-17
WO2000033359B1 (en) 2001-01-04
IL166019A (en) 2010-04-29
IL166018A0 (en) 2006-01-15
AU2041000A (en) 2000-06-19
US20040039486A1 (en) 2004-02-26
EP1135795B1 (en) 2008-03-12
JP2002531942A (ja) 2002-09-24
WO2000033359A3 (en) 2000-11-16
US7233842B2 (en) 2007-06-19
US20030055533A1 (en) 2003-03-20
IL143467A0 (en) 2002-04-21

Similar Documents

Publication Publication Date Title
IL143467A (en) Specimen holding robotic arm and effector
DE59107487D1 (de) Greifer für einen Manipulator
EP1083030A3 (en) Guide device for wiring member and/or tubing member and robot with guide device
WO2003101673A3 (en) Robot arm coupling apparatus
AU2001270790A1 (en) Gripping devices
AU1911101A (en) Industrial robot
EP1166955A3 (en) System for attaching / detaching a workpiece to be machined on a jig
WO1997040435A3 (en) Base force/torque sensor apparatus for the precise control of manipulators with joint friction and a method of use thereof
CA2197949A1 (en) Optimized gripper block for coiled tubing injectors
AU7758494A (en) Clamp with inclined screw
KR960705660A (ko) 산업용 로봇의 기준위치 결정방법
TW355860B (en) Clamping device
EP0392555A3 (en) Device for retaining wire-like optical wave-guide
WO1997014903A3 (de) Rohrinnenmanipulator zum prüfen oder bearbeiten der innenoberfläche eines rohres
FR2795013B1 (fr) Outil de centrage et de serrage
CA2200676A1 (en) Tongs
US5692790A (en) System for locating an end effector of a robot relative to a part
GB2074080A (en) Tool for handling articles
JPH0262550A (ja) ワークの位置決め支持装置
FR2527131B1 (fr) Dispositif de prehension d'articles pour manipulateur du type robot
DE3876948D1 (de) Sicherheitskupplung fuer die handhabungstechnik.
AU8565498A (en) Collet for a chuck with an axial positioning device
PARMA Gripping device(Patent)
KR900009042Y1 (ko) 펜 홀더형 로보트 손
CA2159743A1 (en) Grapple for use on skidder

Legal Events

Date Code Title Description
FF Patent granted
KB Patent renewed
KB Patent renewed
KB Patent renewed
KB Patent renewed
EXP Patent expired