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IL147986A0 - Inverted pressure vessel with horizontal throug loading - Google Patents

Inverted pressure vessel with horizontal throug loading

Info

Publication number
IL147986A0
IL147986A0 IL14798600A IL14798600A IL147986A0 IL 147986 A0 IL147986 A0 IL 147986A0 IL 14798600 A IL14798600 A IL 14798600A IL 14798600 A IL14798600 A IL 14798600A IL 147986 A0 IL147986 A0 IL 147986A0
Authority
IL
Israel
Prior art keywords
throug
loading
horizontal
pressure vessel
inverted pressure
Prior art date
Application number
IL14798600A
Other languages
English (en)
Original Assignee
S C Fluids Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by S C Fluids Inc filed Critical S C Fluids Inc
Publication of IL147986A0 publication Critical patent/IL147986A0/xx

Links

Classifications

    • H10P72/0441
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00Details of vessels or of the filling or discharging of vessels
    • F17C13/02Special adaptations of indicating, measuring, or monitoring equipment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/008Processes carried out under supercritical conditions
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/06Processes using ultra-high pressure, e.g. for the formation of diamonds; Apparatus therefor, e.g. moulds or dies
    • H10P72/3308

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
  • Closures For Containers (AREA)
IL14798600A 1999-08-05 2000-08-04 Inverted pressure vessel with horizontal throug loading IL147986A0 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14725199P 1999-08-05 1999-08-05
US15545499P 1999-09-20 1999-09-20
PCT/US2000/021338 WO2001010733A1 (en) 1999-08-05 2000-08-04 Inverted pressure vessel with horizontal through loading

Publications (1)

Publication Number Publication Date
IL147986A0 true IL147986A0 (en) 2002-09-12

Family

ID=26844748

Family Applications (1)

Application Number Title Priority Date Filing Date
IL14798600A IL147986A0 (en) 1999-08-05 2000-08-04 Inverted pressure vessel with horizontal throug loading

Country Status (7)

Country Link
EP (1) EP1208047A4 (zh)
JP (1) JP2003506646A (zh)
KR (1) KR20020061589A (zh)
CN (1) CN1204024C (zh)
AU (1) AU6893600A (zh)
IL (1) IL147986A0 (zh)
WO (1) WO2001010733A1 (zh)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW539918B (en) 1997-05-27 2003-07-01 Tokyo Electron Ltd Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process
US6748960B1 (en) 1999-11-02 2004-06-15 Tokyo Electron Limited Apparatus for supercritical processing of multiple workpieces
WO2001046999A2 (en) 1999-11-02 2001-06-28 Tokyo Electron Limited Method and apparatus for supercritical processing of a workpiece
KR100693691B1 (ko) 2000-04-25 2007-03-09 동경 엘렉트론 주식회사 금속 필름의 침착방법 및 초임계 건조/세척 모듈을포함하는 금속침착 복합공정장치
WO2002009147A2 (en) * 2000-07-26 2002-01-31 Tokyo Electron Limited High pressure processing chamber for semiconductor substrate
IL154095A0 (en) * 2000-08-04 2003-07-31 S C Fluids Inc Inverted pressure vessel with shielded closure mechanism
US7001468B1 (en) 2002-02-15 2006-02-21 Tokyo Electron Limited Pressure energized pressure vessel opening and closing device and method of providing therefor
US7387868B2 (en) 2002-03-04 2008-06-17 Tokyo Electron Limited Treatment of a dielectric layer using supercritical CO2
US6722642B1 (en) * 2002-11-06 2004-04-20 Tokyo Electron Limited High pressure compatible vacuum chuck for semiconductor wafer including lift mechanism
US7021635B2 (en) 2003-02-06 2006-04-04 Tokyo Electron Limited Vacuum chuck utilizing sintered material and method of providing thereof
US7077917B2 (en) 2003-02-10 2006-07-18 Tokyo Electric Limited High-pressure processing chamber for a semiconductor wafer
US7225820B2 (en) 2003-02-10 2007-06-05 Tokyo Electron Limited High-pressure processing chamber for a semiconductor wafer
US7270137B2 (en) 2003-04-28 2007-09-18 Tokyo Electron Limited Apparatus and method of securing a workpiece during high-pressure processing
US7163380B2 (en) 2003-07-29 2007-01-16 Tokyo Electron Limited Control of fluid flow in the processing of an object with a fluid
US7186093B2 (en) 2004-10-05 2007-03-06 Tokyo Electron Limited Method and apparatus for cooling motor bearings of a high pressure pump
US7250374B2 (en) 2004-06-30 2007-07-31 Tokyo Electron Limited System and method for processing a substrate using supercritical carbon dioxide processing
US7307019B2 (en) 2004-09-29 2007-12-11 Tokyo Electron Limited Method for supercritical carbon dioxide processing of fluoro-carbon films
US7491036B2 (en) 2004-11-12 2009-02-17 Tokyo Electron Limited Method and system for cooling a pump
US7140393B2 (en) 2004-12-22 2006-11-28 Tokyo Electron Limited Non-contact shuttle valve for flow diversion in high pressure systems
US7434590B2 (en) 2004-12-22 2008-10-14 Tokyo Electron Limited Method and apparatus for clamping a substrate in a high pressure processing system
US7435447B2 (en) 2005-02-15 2008-10-14 Tokyo Electron Limited Method and system for determining flow conditions in a high pressure processing system
US7291565B2 (en) 2005-02-15 2007-11-06 Tokyo Electron Limited Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid
US7380984B2 (en) 2005-03-28 2008-06-03 Tokyo Electron Limited Process flow thermocouple
US7767145B2 (en) 2005-03-28 2010-08-03 Toyko Electron Limited High pressure fourier transform infrared cell
US7494107B2 (en) 2005-03-30 2009-02-24 Supercritical Systems, Inc. Gate valve for plus-atmospheric pressure semiconductor process vessels
US7789971B2 (en) 2005-05-13 2010-09-07 Tokyo Electron Limited Treatment of substrate using functionalizing agent in supercritical carbon dioxide
US7524383B2 (en) 2005-05-25 2009-04-28 Tokyo Electron Limited Method and system for passivating a processing chamber
CN110410498B (zh) * 2018-04-28 2025-03-25 重庆海扶医疗科技股份有限公司 卡箍组件和压力容器
CN112601620B (zh) * 2018-07-25 2024-11-08 格拉弗技术国际控股有限公司 挤压压力机及使用方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3744660A (en) * 1970-12-30 1973-07-10 Combustion Eng Shield for nuclear reactor vessel
US4789077A (en) * 1988-02-24 1988-12-06 Public Service Electric & Gas Company Closure apparatus for a high pressure vessel
US4823976A (en) * 1988-05-04 1989-04-25 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Quick actuating closure
US5236669A (en) * 1990-09-12 1993-08-17 E. I. Du Pont De Nemours And Company Pressure vessel
US5221019A (en) * 1991-11-07 1993-06-22 Hahn & Clay Remotely operable vessel cover positioner
JP2548062B2 (ja) * 1992-11-13 1996-10-30 日本エー・エス・エム株式会社 縦型熱処理装置用ロードロックチャンバー
US5556497A (en) * 1995-01-09 1996-09-17 Essef Corporation Fitting installation process
JP2969087B2 (ja) * 1996-11-06 1999-11-02 日本エー・エス・エム株式会社 半導体基板の処理方法

Also Published As

Publication number Publication date
EP1208047A4 (en) 2004-03-31
WO2001010733A1 (en) 2001-02-15
KR20020061589A (ko) 2002-07-24
AU6893600A (en) 2001-03-05
EP1208047A1 (en) 2002-05-29
CN1368928A (zh) 2002-09-11
JP2003506646A (ja) 2003-02-18
CN1204024C (zh) 2005-06-01

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