AU6893600A - Inverted pressure vessel with horizontal through loading - Google Patents

Inverted pressure vessel with horizontal through loading

Info

Publication number: AU6893600A
Authority: AU; Australia
Prior art keywords: loading; horizontal; pressure vessel; inverted pressure; inverted
Prior art date: 1999-08-05
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU68936/00A

Inventor

Mohan Chandra

Robert Farmer

Ijaz Jafri

Heiko Moritz

Jonathan Talbot

James Tseronis

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

SC Fluids Inc

Original Assignee

SC Fluids Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1999-08-05

Filing date

2000-08-04

Publication date

2001-03-05

2000-08-04 Application filed by SC Fluids Inc filed Critical SC Fluids Inc

2001-03-05 Publication of AU6893600A publication Critical patent/AU6893600A/en

Status Abandoned legal-status Critical Current

Classifications

- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
- H10P72/0441—
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/008—Processes carried out under supercritical conditions
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/06—Processes using ultra-high pressure, e.g. for the formation of diamonds; Apparatus therefor, e.g. moulds or dies
- H10P72/3308—

Landscapes

Chemical & Material Sciences (AREA)
Organic Chemistry (AREA)
Chemical Kinetics & Catalysis (AREA)
Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
General Engineering & Computer Science (AREA)
Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Filling Or Discharging Of Gas Storage Vessels (AREA)
Pressure Vessels And Lids Thereof (AREA)
Closures For Containers (AREA)

AU68936/00A 1999-08-05 2000-08-04 Inverted pressure vessel with horizontal through loading Abandoned AU6893600A (en)

Applications Claiming Priority (5)

Application Number	Priority Date	Filing Date	Title
US14725199P	1999-08-05	1999-08-05
US60147251		1999-08-05
US15545499P	1999-09-20	1999-09-20
US60155454		1999-09-20
PCT/US2000/021338 WO2001010733A1 (en)	1999-08-05	2000-08-04	Inverted pressure vessel with horizontal through loading

Publications (1)

Publication Number	Publication Date
AU6893600A true AU6893600A (en)	2001-03-05

Family

ID=26844748

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU68936/00A Abandoned AU6893600A (en)	1999-08-05	2000-08-04	Inverted pressure vessel with horizontal through loading

Country Status (7)

Country	Link
EP (1)	EP1208047A4 (en)
JP (1)	JP2003506646A (en)
KR (1)	KR20020061589A (en)
CN (1)	CN1204024C (en)
AU (1)	AU6893600A (en)
IL (1)	IL147986A0 (en)
WO (1)	WO2001010733A1 (en)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
TW539918B (en)	1997-05-27	2003-07-01	Tokyo Electron Ltd	Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process
US6748960B1 (en)	1999-11-02	2004-06-15	Tokyo Electron Limited	Apparatus for supercritical processing of multiple workpieces
WO2001046999A2 (en)	1999-11-02	2001-06-28	Tokyo Electron Limited	Method and apparatus for supercritical processing of a workpiece
KR100693691B1 (en)	2000-04-25	2007-03-09	동경 엘렉트론 주식회사	Metal deposition complex processing apparatus including metal film deposition method and supercritical drying / cleaning module
WO2002009147A2 (en) *	2000-07-26	2002-01-31	Tokyo Electron Limited	High pressure processing chamber for semiconductor substrate
IL154095A0 (en) *	2000-08-04	2003-07-31	S C Fluids Inc	Inverted pressure vessel with shielded closure mechanism
US7001468B1 (en)	2002-02-15	2006-02-21	Tokyo Electron Limited	Pressure energized pressure vessel opening and closing device and method of providing therefor
US7387868B2 (en)	2002-03-04	2008-06-17	Tokyo Electron Limited	Treatment of a dielectric layer using supercritical CO2
US6722642B1 (en) *	2002-11-06	2004-04-20	Tokyo Electron Limited	High pressure compatible vacuum chuck for semiconductor wafer including lift mechanism
US7021635B2 (en)	2003-02-06	2006-04-04	Tokyo Electron Limited	Vacuum chuck utilizing sintered material and method of providing thereof
US7077917B2 (en)	2003-02-10	2006-07-18	Tokyo Electric Limited	High-pressure processing chamber for a semiconductor wafer
US7225820B2 (en)	2003-02-10	2007-06-05	Tokyo Electron Limited	High-pressure processing chamber for a semiconductor wafer
US7270137B2 (en)	2003-04-28	2007-09-18	Tokyo Electron Limited	Apparatus and method of securing a workpiece during high-pressure processing
US7163380B2 (en)	2003-07-29	2007-01-16	Tokyo Electron Limited	Control of fluid flow in the processing of an object with a fluid
US7186093B2 (en)	2004-10-05	2007-03-06	Tokyo Electron Limited	Method and apparatus for cooling motor bearings of a high pressure pump
US7250374B2 (en)	2004-06-30	2007-07-31	Tokyo Electron Limited	System and method for processing a substrate using supercritical carbon dioxide processing
US7307019B2 (en)	2004-09-29	2007-12-11	Tokyo Electron Limited	Method for supercritical carbon dioxide processing of fluoro-carbon films
US7491036B2 (en)	2004-11-12	2009-02-17	Tokyo Electron Limited	Method and system for cooling a pump
US7140393B2 (en)	2004-12-22	2006-11-28	Tokyo Electron Limited	Non-contact shuttle valve for flow diversion in high pressure systems
US7434590B2 (en)	2004-12-22	2008-10-14	Tokyo Electron Limited	Method and apparatus for clamping a substrate in a high pressure processing system
US7435447B2 (en)	2005-02-15	2008-10-14	Tokyo Electron Limited	Method and system for determining flow conditions in a high pressure processing system
US7291565B2 (en)	2005-02-15	2007-11-06	Tokyo Electron Limited	Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid
US7380984B2 (en)	2005-03-28	2008-06-03	Tokyo Electron Limited	Process flow thermocouple
US7767145B2 (en)	2005-03-28	2010-08-03	Toyko Electron Limited	High pressure fourier transform infrared cell
US7494107B2 (en)	2005-03-30	2009-02-24	Supercritical Systems, Inc.	Gate valve for plus-atmospheric pressure semiconductor process vessels
US7789971B2 (en)	2005-05-13	2010-09-07	Tokyo Electron Limited	Treatment of substrate using functionalizing agent in supercritical carbon dioxide
US7524383B2 (en)	2005-05-25	2009-04-28	Tokyo Electron Limited	Method and system for passivating a processing chamber
CN110410498B (en) *	2018-04-28	2025-03-25	重庆海扶医疗科技股份有限公司	Clamp assemblies and pressure vessels
CN112601620B (en) *	2018-07-25	2024-11-08	格拉弗技术国际控股有限公司	Extrusion press and method of use

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3744660A (en) *	1970-12-30	1973-07-10	Combustion Eng	Shield for nuclear reactor vessel
US4789077A (en) *	1988-02-24	1988-12-06	Public Service Electric & Gas Company	Closure apparatus for a high pressure vessel
US4823976A (en) *	1988-05-04	1989-04-25	The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration	Quick actuating closure
US5236669A (en) *	1990-09-12	1993-08-17	E. I. Du Pont De Nemours And Company	Pressure vessel
US5221019A (en) *	1991-11-07	1993-06-22	Hahn & Clay	Remotely operable vessel cover positioner
JP2548062B2 (en) *	1992-11-13	1996-10-30	日本エー・エス・エム株式会社	Load lock chamber for vertical heat treatment equipment
US5556497A (en) *	1995-01-09	1996-09-17	Essef Corporation	Fitting installation process
JP2969087B2 (en) *	1996-11-06	1999-11-02	日本エー・エス・エム株式会社	Semiconductor substrate processing method

2000
- 2000-08-04 EP EP00957297A patent/EP1208047A4/en not_active Withdrawn
- 2000-08-04 KR KR1020027001586A patent/KR20020061589A/en not_active Ceased
- 2000-08-04 JP JP2001515214A patent/JP2003506646A/en active Pending
- 2000-08-04 AU AU68936/00A patent/AU6893600A/en not_active Abandoned
- 2000-08-04 CN CNB008113327A patent/CN1204024C/en not_active Expired - Fee Related
- 2000-08-04 IL IL14798600A patent/IL147986A0/en unknown
- 2000-08-04 WO PCT/US2000/021338 patent/WO2001010733A1/en not_active Ceased

Also Published As

Publication number	Publication date
EP1208047A4 (en)	2004-03-31
WO2001010733A1 (en)	2001-02-15
KR20020061589A (en)	2002-07-24
EP1208047A1 (en)	2002-05-29
IL147986A0 (en)	2002-09-12
CN1368928A (en)	2002-09-11
JP2003506646A (en)	2003-02-18
CN1204024C (en)	2005-06-01

Publication	Publication Date	Title
AU6893600A (en)	2001-03-05	Inverted pressure vessel with horizontal through loading
GB2349349B (en)	2002-07-31	Adjustable-volume vessel
AU6268200A (en)	2001-01-30	Container
AU2057901A (en)	2001-06-18	Storage container
AU7368600A (en)	2001-04-23	Self-sealing accessible container
AUPQ105099A0 (en)	1999-07-08	Beer container
AU2001255228A1 (en)	2001-10-15	Pressure vessel
AU7994000A (en)	2001-04-30	Flexible container with supporting side beams
AU7539200A (en)	2001-05-10	Container
AU5999799A (en)	2001-04-30	Drop-bottom container
AU1391701A (en)	2001-05-30	Container top
AU3839000A (en)	2000-11-10	Flexible container
AU2753900A (en)	2001-02-19	Graphics container
AU4584600A (en)	2000-11-17	Liquid container
AUPQ451499A0 (en)	2000-01-06	Container
AU6026700A (en)	2001-01-22	Liquid vessel
AU5222300A (en)	2001-01-09	Vessel comprising a semi-weathervaning mooring arrangement
AU3367301A (en)	2001-07-16	Domed container
AUPP802199A0 (en)	1999-01-28	Improved container
AUPO862897A0 (en)	1997-09-11	Pressure vessel
GB2346669B (en)	2002-12-18	Pressure cell
AU2774799A (en)	2000-09-04	Container sealing structure
AU2818400A (en)	2000-09-21	Plastics-walled container
GB9907974D0 (en)	1999-06-02	Mobile pressure vessel
AU6186000A (en)	2001-04-30	Liquid container

Legal Events

Date	Code	Title	Description
2002-05-02	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase