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HK1232683B - Network with integrated passive device and conductive trace in packaging substrate and related modules and devices - Google Patents

Network with integrated passive device and conductive trace in packaging substrate and related modules and devices Download PDF

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Publication number
HK1232683B
HK1232683B HK17106061.2A HK17106061A HK1232683B HK 1232683 B HK1232683 B HK 1232683B HK 17106061 A HK17106061 A HK 17106061A HK 1232683 B HK1232683 B HK 1232683B
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conductive trace
power amplifier
module
integrated capacitor
radio frequency
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HK17106061.2A
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Chinese (zh)
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HK1232683A1 (en
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D‧帕努纳里
W‧孙
R‧A‧赖斯纳
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天工方案公司
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Publication of HK1232683B publication Critical patent/HK1232683B/en

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Description

具有集成无源器件和导电迹线的网络、有关模块和装置Networks, related modules and devices having integrated passive components and conductive traces

技术领域Technical Field

本公开涉及电子系统,且具体来说,涉及包括无源阻抗元件的电子系统。The present disclosure relates to electronic systems, and in particular, to electronic systems including passive impedance elements.

背景技术Background Art

移动电话及其他移动装置的部件的物理尺寸正在减小。物理实现的电路设计和方法可以促进这种部件的尺寸的减小。The physical size of components in mobile phones and other mobile devices is decreasing. Physical implementation of circuit designs and methods can facilitate the reduction in size of such components.

在许多移动装置中包括功率放大器模块作为部件。功率放大器模块典型地包括一个或多个功率放大器和一个或多个关联的匹配网络。匹配网络可以提供阻抗匹配和一个或多个其他功能,比如谐频抑制、滤波、阻抗旋转等。匹配网络可以包括在功率放大器晶元(die)上、作为在封装基底上的一个或多个表面安装部件、在包括集成无源器件的晶元上实现的无源阻抗元件,或者其任何组合。无源阻抗元件可以包括一个或多个变压器、一个或多个线圈、一个或多个电容器、一个或多个电感器,等等,或者其任何组合。Many mobile devices include a power amplifier module as a component. The power amplifier module typically includes one or more power amplifiers and one or more associated matching networks. The matching network can provide impedance matching and one or more other functions, such as harmonic frequency suppression, filtering, impedance rotation, etc. The matching network can include passive impedance elements implemented on the power amplifier die, as one or more surface mount components on a packaging substrate, on a die including integrated passive devices, or any combination thereof. The passive impedance elements can include one or more transformers, one or more coils, one or more capacitors, one or more inductors, etc., or any combination thereof.

发明内容Summary of the Invention

权利要求中描述的创新每个都具有几个方面,它们中单一的一个都不单独负责其期望属性。在不限制权利要求的范围的情况下,现在将简要地描述本公开的一些显著特征。The innovations described in the claims each have several aspects, no single one of which is solely responsible for its desirable attributes. Without limiting the scope of the claims, some of the notable features of the disclosure will now be described briefly.

本公开的一个方面是包括封装基底、在封装基底上的晶元和封装基底的导电迹线的设备。晶元包括集成无源器件和提供到集成无源器件的电连接的触点。导电迹线在晶元的触点和地电位之间的电路径中。One aspect of the present disclosure is a device comprising a package substrate, a die on the package substrate, and conductive traces of the package substrate. The die includes integrated passive devices and contacts that provide electrical connections to the integrated passive devices. The conductive traces are in an electrical path between the contacts of the die and a ground potential.

导电迹线可以包括在匹配网络中,匹配网络配置为提供阻抗匹配和抑制由匹配网络接收的射频信号的谐频。导电迹线的长度与集成无源器件的电容一起可以抑制射频信号的谐频。The conductive trace may be included in a matching network configured to provide impedance matching and suppress harmonics of a radio frequency signal received by the matching network. The length of the conductive trace, together with the capacitance of the integrated passive device, may suppress the harmonics of the radio frequency signal.

导电迹线可以具有大于晶元的最大尺寸的长度。导电迹线可以具有至少50微米的长度。导电迹线可以具有至少100微米的长度。导电迹线可以在平面图中实质上是螺旋形状。导电迹线可以包括铜。The conductive trace may have a length greater than the maximum dimension of the wafer. The conductive trace may have a length of at least 50 micrometers. The conductive trace may have a length of at least 100 micrometers. The conductive trace may be substantially spiral in plan view. The conductive trace may comprise copper.

该设备也可以包括封装基底上的功率放大器晶元。功率放大器晶元可以包括功率放大器,功率放大器配置为将射频信号提供到包括集成无源器件和导电迹线的匹配网络。The device may also include a power amplifier die on the package substrate. The power amplifier die may include a power amplifier configured to provide a radio frequency signal to a matching network including integrated passive components and conductive traces.

封装基底可以是层压基底。晶元可以是硅晶元。例如,晶元可以是硅晶元且可以以薄膜工艺形成集成无源器件。晶元的触点可以是凸点垫,且晶元可以是安装在封装基底上的倒装晶片。导电迹线的至少一部分可以配置在晶元的覆盖区(footprint)以下。The package substrate may be a laminate substrate. The wafer may be a silicon wafer. For example, the wafer may be a silicon wafer and integrated passive devices may be formed using a thin film process. The contacts of the wafer may be bump pads, and the wafer may be a flip-chip mounted on the package substrate. At least a portion of the conductive trace may be disposed below the wafer's footprint.

集成无源器件可以是电容器。该设备可以进一步包括封装基底的第二导电迹线,集成无源器件可以包括第一集成电容器,且晶元可以进一步包括与第二导电迹线串联布置的第二集成电容器。The integrated passive device may be a capacitor.The apparatus may further include a second conductive trace of the package substrate, the integrated passive device may include a first integrated capacitor, and the die may further include a second integrated capacitor arranged in series with the second conductive trace.

本公开的另一方面是包括层压基底上的第一晶元、层压基底上的第二晶元和层压基底的导电迹线的设备。第一晶元包括配置为接收射频(RF)输入信号和提供放大的RF信号的功率放大器。第二晶元配置为接收放大的RF信号。第二晶元包括集成无源器件。导电迹线是集成无源器件和地电位之间的电路径。Another aspect of the present disclosure is a device comprising a first die on a laminate substrate, a second die on the laminate substrate, and a conductive trace on the laminate substrate. The first die includes a power amplifier configured to receive a radio frequency (RF) input signal and provide an amplified RF signal. The second die is configured to receive the amplified RF signal. The second die includes an integrated passive device. The conductive trace is an electrical path between the integrated passive device and a ground potential.

导电迹线可以在平面图中实质上是螺旋形状。导电迹线的长度与集成无源器件的电容一起可以抑制放大的RF信号的谐频。集成无源器件和导电迹线可以包括在匹配网络中,匹配网络配置为提供阻抗变换和L-C滤波器,比如椭圆滤波器,其中匹配网络配置为接收放大的RF信号。集成无源器件和导电迹线可以包括在匹配网络中,匹配网络配置为提供阻抗匹配和相位旋转,其中匹配网络配置为接收放大的RF信号。The conductive trace may be substantially spiral-shaped in plan view. The length of the conductive trace, together with the capacitance of the integrated passive component, may suppress harmonics of the amplified RF signal. The integrated passive component and the conductive trace may be included in a matching network configured to provide impedance transformation and an L-C filter, such as an elliptical filter, wherein the matching network is configured to receive the amplified RF signal. The integrated passive component and the conductive trace may be included in a matching network configured to provide impedance matching and phase rotation, wherein the matching network is configured to receive the amplified RF signal.

本公开的另一方面是包括多芯片模块、天线和电池的移动装置。多芯片模块包括层压基底上的功率放大器晶元、层压基底上的集成无源器件(IPD)晶元和层压基底的导电迹线。功率放大器晶元包括配置为接收射频(RF)输入信号和提供放大的RF信号的功率放大器。IPD晶元包括集成电容器且配置为接收放大的RF信号。导电迹线在集成电容器和地电位之间串联。天线配置为从IPD晶元接收放大的RF信号的已处理版本。电池配置为向多芯片模块提供电源电压。Another aspect of the present disclosure is a mobile device comprising a multi-chip module, an antenna, and a battery. The multi-chip module comprises a power amplifier die on a laminate substrate, an integrated passive device (IPD) die on the laminate substrate, and conductive traces of the laminate substrate. The power amplifier die includes a power amplifier configured to receive a radio frequency (RF) input signal and provide an amplified RF signal. The IPD die includes an integrated capacitor and is configured to receive the amplified RF signal. The conductive trace is connected in series between the integrated capacitor and a ground potential. The antenna is configured to receive a processed version of the amplified RF signal from the IPD die. The battery is configured to provide a supply voltage to the multi-chip module.

移动装置可以是其中多芯片模块是多频带模块的蜂窝电话。The mobile device may be a cellular phone in which the multi-chip module is a multi-band module.

为了概括本公开的目的,在这里已经描述了本发明的某些方面、优点和新颖特征。将要理解根据本发明的任何特定的实施例可以不必实现所有这些优点。由此,本发明可以以实现或者优化如在这里教导的一个优点或者一组优点而不必须实现如在这里可能教导或提出的其他优点的方式来表现或者进行。For the purposes of summarizing the present disclosure, certain aspects, advantages, and novel features of the present invention have been described herein. It will be understood that it is not necessary to realize all of these advantages according to any particular embodiment of the present invention. Thus, the present invention can be performed or performed in a manner that realizes or optimizes an advantage or a group of advantages as taught herein without necessarily realizing other advantages that may be taught or proposed herein.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

现在将参考附图通过非限制示例的方式描述本公开的实施例。Embodiments of the present disclosure will now be described, by way of non-limiting examples, with reference to the accompanying drawings.

图1是包括功率放大器和匹配网络的功率放大器系统的示意图。FIG1 is a schematic diagram of a power amplifier system including a power amplifier and a matching network.

图2A是根据实施例的包括图1的功率放大器和匹配网络的多芯片模块的示意图。2A is a schematic diagram of a multi-chip module including the power amplifier and matching network of FIG. 1 , according to an embodiment.

图2B是根据实施例的图2A的多芯片模块的封装基底中的导电迹线的平面图。2B is a plan view of conductive traces in the package substrate of the multi-chip module of FIG. 2A according to an embodiment.

图2C是根据实施例的用于制造多芯片模块的方法的流程图。FIG. 2C is a flowchart of a method for manufacturing a multi-chip module according to an embodiment.

图2D是根据实施例的包括图1的匹配网络的模块的示意图。2D is a schematic diagram of a module including the matching network of FIG. 1 , according to an embodiment.

图3是根据实施例的配置为提供阻抗匹配和谐波拒绝(rejection)的封装基底中的集成无源器件(IPD)晶元和迹线的示意图。3 is a schematic diagram of an integrated passive device (IPD) die and traces in a package substrate configured to provide impedance matching and harmonic rejection according to an embodiment.

图4是包括IPD晶元的匹配网络的频率响应的图,其具有直接连接到提供到射频(RF)地的路径的通路的凸点(bump)。4 is a graph of the frequency response of a matching network including an IPD die with a bump directly connected to a via that provides a path to radio frequency (RF) ground.

图5是包括根据图3布置的IPD晶元的匹配网络的频率响应的图。FIG. 5 is a graph of the frequency response of a matching network including an IPD die arranged according to FIG. 3 .

图6A是根据实施例的包括匹配网络的功率放大器系统的示意图,所述匹配网络包括封装基底中的集成无源器件和导电迹线。6A is a schematic diagram of a power amplifier system including a matching network comprising integrated passive devices and conductive traces in a package substrate, according to an embodiment.

图6B是图示图6A的椭圆滤波器的频率响应的绘图。6B is a plot illustrating the frequency response of the elliptical filter of FIG. 6A .

图7是根据实施例的配置为提供阻抗匹配和相位旋转的封装基底中的IPD晶元和迹线的示意图。7 is a schematic diagram of an IPD die and traces in a package substrate configured to provide impedance matching and phase rotation according to an embodiment.

图8是图示由图7的匹配网络实现的阻抗旋转的史密斯图。FIG. 8 is a Smith chart illustrating impedance rotation achieved by the matching network of FIG. 7 .

图9是包括根据图1、图2A-图2B、图2D、图3、图6A和/或图7的任何实施例的一个或多个匹配网络的示例移动装置的示意性框图。9 is a schematic block diagram of an example mobile device including one or more matching networks according to any of the embodiments of FIG. 1 , 2A-2B, 2D, 3 , 6A and/or 7 .

具体实施方式DETAILED DESCRIPTION

以下具体实施方式呈现特定实施例的各种描述。但是,在这里描述的创新可以以例如如权利要求限定和覆盖的大量不同的方式体现。在该描述中,参考附图,其中相同的附图标记可以指示相同或者功能上类似的元件。将理解在图中图示的元件不必按比例绘制。此外,将理解某些实施例可以包括比图中图示的更多的元件和/或图中图示的元件的子集。另外,某些实施例可以合并来自两个或更多图的特征的任何适当的组合。The following detailed description presents various descriptions of specific embodiments. However, the innovations described herein may be embodied in a wide variety of ways, such as those defined and covered by the claims. In this description, reference is made to the accompanying drawings, in which like reference numerals may indicate identical or functionally similar elements. It will be understood that the elements illustrated in the drawings are not necessarily drawn to scale. Furthermore, it will be understood that certain embodiments may include more elements than illustrated in the drawings and/or a subset of the elements illustrated in the drawings. In addition, certain embodiments may incorporate any suitable combination of features from two or more of the drawings.

用于移动电话应用的多频带前端模块正变得越来越小型化。因此,以单个电路执行多个电功能可能是有益的。例如,阻抗匹配电路或者滤波器可以包括一个或多个变压器、一个或多个电容器、一个或多个电感器,等等,或者其任何组合。这些电路元件通常使用多层结构实现。在具有电解沉积的铜通路和迹线的有机分层中或者其上制造这种电路元件的示例。这些电路元件的另外的示例包括集成无源器件(IPD),其可以使用薄膜工艺在硅晶元上制造。Multi-band front-end modules for mobile phone applications are becoming increasingly miniaturized. Therefore, it may be beneficial to perform multiple electrical functions with a single circuit. For example, an impedance matching circuit or filter may include one or more transformers, one or more capacitors, one or more inductors, etc., or any combination thereof. These circuit elements are typically implemented using a multilayer structure. Examples of such circuit elements are manufactured in or on organic layers with electrolytically deposited copper paths and traces. Other examples of these circuit elements include integrated passive devices (IPDs), which can be manufactured on silicon wafers using thin film processes.

可以由匹配网络实现组合的电功能,比如阻抗匹配和谐频抑制。例如,在功率放大器模块中,可能期望在工作频段内功率放大器晶元的相对低阻抗与标准阻抗(比如50欧姆)匹配,和同时抑制可能伴随功率放大器的输出的一个或多个谐波。这种阻抗匹配电路可以包括以分流方式连接到射频(RF)地的电容器。可以在电容器的一个端子和RF地之间包括适当的值的电感器。该串联连接的电路可以配置为在由电感器的电感值和电容器的电容值确定的频率谐振和创建短路,由此抑制在该频率的信号的传输。这种频率可以被称为陷波频率,且典型地是基本频率响应的谐波之一。Combined electrical functions, such as impedance matching and harmonic suppression, can be achieved by a matching network. For example, in a power amplifier module, it may be desirable to match the relatively low impedance of the power amplifier die to a standard impedance (such as 50 ohms) within the operating frequency band, and at the same time suppress one or more harmonics that may accompany the output of the power amplifier. Such an impedance matching circuit may include a capacitor connected to a radio frequency (RF) ground in a shunt manner. An inductor of appropriate value may be included between one terminal of the capacitor and the RF ground. The series-connected circuit may be configured to resonate and create a short circuit at a frequency determined by the inductance value of the inductor and the capacitance value of the capacitor, thereby suppressing the transmission of signals at that frequency. Such a frequency may be referred to as a notch frequency and is typically one of the harmonics of the fundamental frequency response.

匹配网络中的一个或多个电容值可以由匹配电路的特性(典型地阻抗变换比率)设置。因此,可以典型地通过选择电感值代替调整LC分流电路中的电容来调整陷波频率。在相对低的频段(比如中心在关于700MHz的频段,中心在大约800MHz的频段、中心在大约900MHz的频段、长期演进频段13、长期演进频段5等),该电感值可能变得充分地大,使得变得难以使用传统的集成方法有效地实现电感器。该问题可能使得难以实现小型化的前端模块,特别是当支持多频段内的通信时。The value of one or more capacitors in the matching network can be set by the characteristics of the matching circuit (typically the impedance transformation ratio). Therefore, the notch frequency can typically be adjusted by selecting the inductor value instead of adjusting the capacitance in the LC shunt circuit. In relatively low frequency bands (such as the band centered around 700 MHz, the band centered around 800 MHz, the band centered around 900 MHz, the Long Term Evolution Band 13, the Long Term Evolution Band 5, etc.), the inductor value may become sufficiently large that it becomes difficult to effectively implement the inductor using traditional integration methods. This problem may make it difficult to implement a miniaturized front-end module, especially when supporting communications in multiple frequency bands.

涉及全有机分层中的LC电路的某些先前的集成方法遇到了由分层制造工艺施加的几何形状限制,其可能限制最大阻抗比。表面安装技术部件可以消耗相对大的表面面积,其可能使得小型化是困难的。此外,在功率放大器晶元上实现谐频陷波可能导致具有相对低的Q的电感器,以使得可能出现频带内损耗惩罚(例如,特别是对于第二谐波陷波)和/或最大谐波抑制可能是不充分的。先前的集成无源器件(IPD)方法几乎不提供或者不提供谐频抑制。Certain previous integration approaches involving LC circuits in all-organic layered circuits have encountered geometric limitations imposed by the layered manufacturing process, which may limit the maximum impedance ratio. Surface mount technology components can consume a relatively large surface area, which may make miniaturization difficult. In addition, implementing harmonic notching on the power amplifier die may result in inductors with relatively low Q, such that in-band loss penalties may occur (e.g., particularly for second harmonic notching) and/or maximum harmonic suppression may be insufficient. Previous integrated passive device (IPD) approaches have provided little or no harmonic suppression.

在IPD晶元上制造的阻抗匹配变压器可以布置为将对于最佳性能可以具有相对低阻抗(例如,大约2欧姆到5欧姆)的功率放大器(PA)晶元的RF输出连接到相对高阻抗(例如,50欧姆)。在某些情况下,IPD晶元是接合到下面的分层的倒装晶片。虽然这种电路可以实现要求的频带内性能,但频带外拒绝通常可能是不良的,其几乎不或者不具有在第二和第三谐波指示的陷波拒绝。An impedance matching transformer fabricated on an IPD die can be arranged to connect the RF output of a power amplifier (PA) die, which can have a relatively low impedance (e.g., approximately 2 ohms to 5 ohms) for optimal performance, to a relatively high impedance (e.g., 50 ohms). In some cases, the IPD die is a flip-chip bonded to an underlying layer. While such a circuit can achieve the required in-band performance, out-of-band rejection can often be poor, with little or no notch rejection indicated at the second and third harmonics.

通常来说,本公开的各方面涉及电连接到在其上放置IPD晶元的封装基底的导电迹线的IPD晶元上的集成无源器件。例如,IPD晶元可以是在分层封装基底上安装的倒装晶片。导电迹线可以包括在集成无源器件的比如凸点垫之类的触点和比如地平面之类的地电位之间的电路径中。电路径也可以包括在导电迹线和地电位之间设置的一个或多个通路。集成无源器件可以是电连接到导电迹线的IPD电容器。导电迹线的长度可以实现电感阻抗。IPD电容器的阻抗与导电迹线的阻抗一起可以实现匹配网络中的各种功能,比如谐频拒绝、滤波、阻抗旋转,等等,或者其任何组合。匹配网络可以电连接到功率放大器的输出。Generally speaking, aspects of the present disclosure relate to integrated passive devices on an IPD die electrically connected to conductive traces of a packaging substrate on which the IPD die is placed. For example, the IPD die can be a flip-chip mounted on a layered packaging substrate. The conductive traces can be included in an electrical path between contacts of the integrated passive device, such as bump pads, and a ground potential, such as a ground plane. The electrical path can also include one or more paths provided between the conductive traces and the ground potential. The integrated passive device can be an IPD capacitor electrically connected to the conductive traces. The length of the conductive traces can achieve an inductive impedance. The impedance of the IPD capacitor, together with the impedance of the conductive traces, can achieve various functions in a matching network, such as harmonic rejection, filtering, impedance rotation, etc., or any combination thereof. The matching network can be electrically connected to the output of a power amplifier.

在实施例中,一个或多个IPD电容器通过具有在分层中实现的非零长度的传输线迹线的方式连接到地。可以选择每个迹线的阻抗和长度从而在所需的谐频谐振各个IPD电容器。产生的谐振可以提供陷波谐波响应和将其分流到地的传输零点。可以在同一IPD晶元上制造两个或更多分流IPD电容器,且这些IPD电容器中的每一个可以在分开的频率谐振。作为一个示例,IPD晶元上的一个IPD电容器可以在第二谐频谐振,且同一IPD晶元上的另一IPD电容器可以在第三谐频谐振。作为另一示例,IPD晶元上的一个IPD电容器可以在第三谐频谐振,且同一IPD晶元上的另一IPD电容器可以在第四谐频谐振。更一般地说,IPD晶元上的不同IPD电容器可以通过在在其上设置IPD晶元的分层中包括适当地配置的迹线而在不同的所需频率谐振。In an embodiment, one or more IPD capacitors are connected to ground by means of transmission line traces having non-zero lengths implemented in a layered structure. The impedance and length of each trace can be selected so that each IPD capacitor resonates at a desired harmonic frequency. The resulting resonance can provide a notched harmonic response and a transmission zero that shunts it to ground. Two or more shunt IPD capacitors can be fabricated on the same IPD die, and each of these IPD capacitors can resonate at a separate frequency. As an example, one IPD capacitor on an IPD die can resonate at a second harmonic frequency, and another IPD capacitor on the same IPD die can resonate at a third harmonic frequency. As another example, one IPD capacitor on an IPD die can resonate at a third harmonic frequency, and another IPD capacitor on the same IPD die can resonate at a fourth harmonic frequency. More generally, different IPD capacitors on an IPD die can resonate at different desired frequencies by including appropriately configured traces in the layered structure on which the IPD die is disposed.

在另一实施例中,几个IPD电容器可以在拒绝频带中的频率(例如,正常通带以上的频率)与分层迹线类似地谐振。可以使用IPD变压器次级线圈的残留电感和在某些情况下的线圈匝间杂散电容适当地耦合这些IPD电容器,以例如创建椭圆滤波器。因为椭圆滤波器在通带和阻带两者中都展现均衡的波纹(等波纹)响应,所以该类型的滤波器可以提供相对接近和大约谐振频率的拒绝以创建可能抑制可能出现的不期望信号的阻带。因此椭圆是用于提供谐频陷波同时在通带中也提供相对低的插入损耗的好的选项。In another embodiment, several IPD capacitors can resonate similarly to the layered traces at frequencies in the rejection band (e.g., frequencies above the normal passband). These IPD capacitors can be appropriately coupled using the residual inductance of the IPD transformer secondary winding and, in some cases, the stray capacitance between the turns of the winding, to create, for example, an elliptical filter. Because elliptical filters exhibit a balanced ripple (equiripple) response in both the passband and the stopband, this type of filter can provide rejection relatively close to and around the resonant frequency to create a stopband that can suppress any unwanted signals that may be present. Ellipticals are therefore a good option for providing harmonic frequency notching while also providing relatively low insertion loss in the passband.

在另一实施例中,分层中的IPD和迹线可以一起提供阻抗旋转。表面声波(SAW)双工器或者体声波(BAW)双工器的发射端口阻抗可以使得在频段边缘的电阻部分的幅值最大。当该阻抗匹配到电气地耦合到包括IPD的匹配网络的功率放大器集电极时,因此相对于频带中心在频带边缘减小效率。通过在支持分层包括相对长的迹线的设计,可以在史密斯图中旋转SAW双工器阻抗和/或BAW双工器阻抗。因此,可以旋转呈现给功率放大器集电极的匹配阻抗,以使得在频带边缘的电阻部分的幅值最小或者接近最小。因此可以通过这种阻抗旋转相对于频带中心在频带边缘改进功率效率。In another embodiment, the IPD and traces in the layer can together provide impedance rotation. The transmit port impedance of a surface acoustic wave (SAW) duplexer or a bulk acoustic wave (BAW) duplexer can be such that the magnitude of the resistive portion at the edge of the band is maximized. When this impedance is matched to a power amplifier collector electrically coupled to a matching network including an IPD, efficiency is reduced at the band edge relative to the band center. By including a design with relatively long traces in the supporting layer, the SAW duplexer impedance and/or the BAW duplexer impedance can be rotated in the Smith chart. Thus, the matching impedance presented to the power amplifier collector can be rotated so that the magnitude of the resistive portion at the band edge is minimized or close to minimized. Power efficiency can therefore be improved at the band edge relative to the band center by this impedance rotation.

本公开中描述的主题的特定的实现可以实现为获得其中的一个或多个以下潜在优点。在其上设置包括IPD的晶元的封装基底(例如,层压基底)的IPD和迹线可以拒绝在功率放大器RF输出出现一个或多个谐波和/或其他寄生信号。一个或多个选择性功能可以通过在倒装晶片安装的IPD晶元下的分层中通常可用但是典型地未使用的物理区域中实现一个或多个导电迹线,来与同一IPD晶元中的阻抗匹配功能组合。这可以提供更紧凑的部件。例如,通过相位旋转的方式,可以在应用于功率放大器集电极之前调节外部部件的阻抗。Particular implementations of the subject matter described in this disclosure can be implemented to obtain one or more of the following potential advantages. The IPD and traces of the packaging substrate (e.g., a laminate substrate) on which the die including the IPD is disposed can reject one or more harmonics and/or other spurious signals from appearing at the power amplifier RF output. One or more selective functions can be combined with impedance matching functions in the same IPD die by implementing one or more conductive traces in physical areas that are normally available but typically unused in the layering under the flip-chip mounted IPD die. This can provide a more compact component. For example, by means of phase rotation, the impedance of the external component can be adjusted before being applied to the power amplifier collector.

参考图1,将描述包括功率放大器和匹配网络的功率放大器系统的示意图。如图所示,功率放大器系统10包括功率放大器12和匹配网络14。功率放大器12配置为放大RF信号RF_IN和提供放大的RF信号PA_OUT。RF信号可以具有在从大约30kHz到300GHz的范围的频率,比如对于长期演进系统中的射频信号在从大约450MHz到大约4GHz的范围内。功率放大器12可以是任何适当的RF功率放大器。例如,功率放大器12可以是一个或多个单级功率放大器、多级功率放大器、由一个或多个双极性晶体管实现的功率放大器,或者由一个或多个场效应晶体管实现的功率放大器。Referring to FIG1 , a schematic diagram of a power amplifier system including a power amplifier and a matching network will be described. As shown, power amplifier system 10 includes a power amplifier 12 and a matching network 14. Power amplifier 12 is configured to amplify an RF signal RF_IN and provide an amplified RF signal PA_OUT. The RF signal may have a frequency in the range of approximately 30 kHz to 300 GHz, such as in the range of approximately 450 MHz to approximately 4 GHz for radio frequency signals in long-term evolution systems. Power amplifier 12 may be any suitable RF power amplifier. For example, power amplifier 12 may be one or more single-stage power amplifiers, a multi-stage power amplifier, a power amplifier implemented by one or more bipolar transistors, or a power amplifier implemented by one or more field-effect transistors.

匹配网络14可以帮助减少信号反射和/或其他信号失真。匹配网络14可以包括一个或多个电容器和一个或多个电感器。匹配网络14可以在功率放大器12和匹配网络14的输出RF_OUT之间的信号路径中包括分流电容器、分流电感器、分流串联LC电路或者并联LC电路的一个或多个。匹配网络14可以包括IPD晶元上的IPD电容器和在其上放置IPD晶元的分层中的导电迹线。在某些实现中,可以在包括功率放大器10的功率放大器晶元上实现匹配网络14的一部分。可以将匹配网络14的输出RF_OUT通过例如开关模块的方式提供给天线。例如,输出RF_OUT可以提供给开关模块中的双工器,比如SAW双工器或者BAW双工器,且输出RF_OUT的已处理版本可以提供给天线。The matching network 14 can help reduce signal reflections and/or other signal distortions. The matching network 14 can include one or more capacitors and one or more inductors. The matching network 14 can include one or more shunt capacitors, shunt inductors, shunt series LC circuits, or parallel LC circuits in the signal path between the power amplifier 12 and the output RF_OUT of the matching network 14. The matching network 14 can include an IPD capacitor on an IPD die and conductive traces in a layer on which the IPD die is placed. In some implementations, a portion of the matching network 14 can be implemented on the power amplifier die that includes the power amplifier 10. The output RF_OUT of the matching network 14 can be provided to an antenna via, for example, a switch module. For example, the output RF_OUT can be provided to a duplexer in the switch module, such as a SAW duplexer or a BAW duplexer, and a processed version of the output RF_OUT can be provided to the antenna.

图2A是根据实施例的多芯片模块20的示意图。多芯片模块20可以包括在封装内封装在一起的功率放大器晶元和IPD晶元。当多芯片模块包括功率放大器晶元时多芯片模块可以被称为功率放大器模块。图示的多芯片模块20包括功率放大器晶元22和IPD晶元24、线接合25、层压基底26、导电迹线27、通路28和地平面29。虽然为了说明性目的可以关于层压基底讨论图2A及其他实施例,但是根据在这里讨论的原理和优点可以在其他适当的封装基底中实现导电迹线。作为一个示例,在某些实现中可以在陶瓷封装基底中实现导电迹线。FIG2A is a schematic diagram of a multi-chip module 20 according to an embodiment. The multi-chip module 20 may include a power amplifier die and an IPD die packaged together within a package. When the multi-chip module includes a power amplifier die, the multi-chip module may be referred to as a power amplifier module. The illustrated multi-chip module 20 includes a power amplifier die 22 and an IPD die 24, wire bonds 25, a laminate substrate 26, conductive traces 27, vias 28, and a ground plane 29. Although FIG2A and other embodiments may be discussed with respect to a laminate substrate for illustrative purposes, the conductive traces may be implemented in other suitable packaging substrates according to the principles and advantages discussed herein. As an example, in some implementations, the conductive traces may be implemented in a ceramic packaging substrate.

如图所示,功率放大器晶元22通过线接合25的方式与IPD晶元24电通信。线接合25可以提供功率放大器晶元22和IPD晶元24之间的电感。多于一个线接合25可以电连接功率放大器晶元22和IPD晶元24。这种线接合可以彼此并行地布置。其他适当的电连接可以将功率放大器晶元22的功率放大器的输出电连接到IPD晶元24。功率放大器晶元22可以包括在这里讨论的任何功率放大器。在某些实现中,对于谐频,比如第二谐频和/或第四谐频,功率放大器晶元22可以包括一个或多个端电路(比如LC分流电路)的至少一部分。在某些实现中,功率放大器晶元22可以是GaAs晶元、CMOS晶元或者SiGe晶元。As shown, the power amplifier die 22 is in electrical communication with the IPD die 24 by means of wire bonds 25. The wire bonds 25 can provide inductance between the power amplifier die 22 and the IPD die 24. More than one wire bond 25 can electrically connect the power amplifier die 22 and the IPD die 24. Such wire bonds can be arranged in parallel with each other. Other appropriate electrical connections can electrically connect the output of the power amplifier of the power amplifier die 22 to the IPD die 24. The power amplifier die 22 can include any power amplifier discussed herein. In some implementations, for harmonics, such as the second harmonic and/or the fourth harmonic, the power amplifier die 22 can include at least a portion of one or more end circuits (such as an LC shunt circuit). In some implementations, the power amplifier die 22 can be a GaAs die, a CMOS die, or a SiGe die.

IPD晶元24可以包括在这里讨论的任何IPD。如在此使用的,“IPD晶元”可以指包括一个或多个IPD的任何适当的晶元。IPD晶元24可以是硅晶元或者任何其他适当的绝缘材料的晶元。在某些这种实现中,可以使用薄膜工艺形成一个或多个IPD。IPD晶元24可以是在如图2A所示的分层基底26上安装的倒装晶片。在其他实施例中,IPD晶元24可以以别的方式耦合到层压基底26。层压基底26中的导电迹线27可以提供电感阻抗。当IPD晶元24是层压基底26上安装的倒装晶片时,凸点(例如,焊接凸点或者铜柱)可以将IPD晶元24电连接到导电迹线27。IPD晶元24可以包括凸点垫以提供用于IPD的电连接,且凸点垫可以与凸点物理和电接触。The IPD wafer 24 may include any IPD discussed herein. As used herein, an "IPD wafer" may refer to any suitable wafer including one or more IPDs. The IPD wafer 24 may be a silicon wafer or a wafer of any other suitable insulating material. In some such implementations, one or more IPDs may be formed using a thin film process. The IPD wafer 24 may be a flip chip mounted on a layered substrate 26 as shown in FIG2A . In other embodiments, the IPD wafer 24 may be coupled to a laminate substrate 26 in other ways. Conductive traces 27 in the laminate substrate 26 may provide inductive impedance. When the IPD wafer 24 is a flip chip mounted on a laminate substrate 26, bumps (e.g., solder bumps or copper pillars) may electrically connect the IPD wafer 24 to the conductive traces 27. The IPD wafer 24 may include bump pads to provide electrical connections for the IPD, and the bump pads may be in physical and electrical contact with the bumps.

在某些实现中,功率放大器晶元22的功率放大器可以产生具有从大约500MHz到大约1GHz的范围(比如从大约700MHz到大约900MHz的范围)的频率的射频信号。在这种实现中,匹配网络中LC分流电路的电感可以充分地大,使得变得难以有效地实现LC分流电路的电感器。因此,实现电感分量是使得层压基底26中的导电迹线27是有益的实现。In some implementations, the power amplifier of power amplifier die 22 may generate a radio frequency signal having a frequency ranging from approximately 500 MHz to approximately 1 GHz (e.g., from approximately 700 MHz to approximately 900 MHz). In such implementations, the inductance of the LC shunt circuit in the matching network may be sufficiently large that it becomes difficult to effectively implement the inductor of the LC shunt circuit. Therefore, implementing an inductive component is beneficial for implementing conductive traces 27 in laminate substrate 26.

导电迹线27例如可以由铜实现。导电迹线27可以在实质上平行于IPD晶元24的方向上延伸。导电迹线27可以具有大于IPD晶元24的最长尺寸的长度。在某些应用中,导电迹线27可以具有至少50微米的长度。根据这些应用中的一些应用,导电迹线27可以具有至少100微米的长度。导电迹线27的长度不必是直的,且可以考虑导电迹线27中的匝和/或弯曲。导电迹线27在某些应用中在平面图中可以是螺旋形状。导电迹线27可以在层压基底26中通过通路28的方式电连接到RF地29。因此,导电迹线27可以被称为地迹线。Conductive trace 27 can be implemented, for example, from copper. Conductive trace 27 can extend in a direction substantially parallel to IPD die 24. Conductive trace 27 can have a length greater than the longest dimension of IPD die 24. In certain applications, conductive trace 27 can have a length of at least 50 microns. Depending on some of these applications, conductive trace 27 can have a length of at least 100 microns. The length of conductive trace 27 need not be straight, and turns and/or bends in conductive trace 27 can be considered. In certain applications, conductive trace 27 can have a spiral shape in plan view. Conductive trace 27 can be electrically connected to RF ground 29 in laminate substrate 26 by way of via 28. Therefore, conductive trace 27 can be referred to as a ground trace.

图2B是图2A的多芯片模块20的层压基底26中的示例导电迹线27的平面图。如图2B所示,导电迹线27从平面图中实质上是螺旋形状。导电迹线27的至少一部分可以设置在IPD晶元24的覆盖区(footprint)以下。例如,大多数的导电迹线27可以设置在IPD晶元24的覆盖区以下。虽然为了说明性目的示出了一个导电迹线27,但是将理解在某些其它实施例中可以包括两个或更多这种导电迹线。作为一个示例,图3中示出的实施例在层压基底26中包括4个导电迹线27a到27d。作为另一示例,层压基底26的不同层中的导电迹线可以至少部分地彼此堆叠。此外,为了提供到IPD晶元24上的IPD的地连接之外的目的,其他导电迹线(未示出)可以包括在层压基底26中。FIG2B is a plan view of an example conductive trace 27 in the laminate substrate 26 of the multi-chip module 20 of FIG2A . As shown in FIG2B , the conductive trace 27 is substantially spiral-shaped when viewed in plan. At least a portion of the conductive trace 27 may be disposed below the footprint of the IPD die 24 . For example, a majority of the conductive trace 27 may be disposed below the footprint of the IPD die 24 . While one conductive trace 27 is shown for illustrative purposes, it will be understood that two or more such conductive traces may be included in certain other embodiments. As an example, the embodiment shown in FIG3 includes four conductive traces 27 a through 27 d in the laminate substrate 26 . As another example, conductive traces in different layers of the laminate substrate 26 may be at least partially stacked on top of one another. Furthermore, other conductive traces (not shown) may be included in the laminate substrate 26 for purposes other than providing a ground connection to the IPD on the IPD die 24 .

图2C是根据实施例的制造多芯片模块的方法30的流程图。可以根据方法30制造多芯片模块20。在块32,可以提供具有在分层中的导电迹线的层压基底。在有些情况下,方法30可以包括形成这种层压基底。在块34,包括一个或多个集成无源器件的晶元可以是在层压基底上安装的倒装晶片。因此,晶元的器件可以在面对层压基底的一侧上。一个或多个凸点可以将晶元的集成无源器件电连接到分层中的导电迹线。在块36,层压基底上功率放大器晶元的输出可以线接合到包括集成无源器件的晶元的输入。这可以提供在功率放大器和匹配网络之间提供RF信号的电路径。可以在某些实施例中执行参考图2C讨论的某些或者所有操作。在这里讨论的任何方法的动作可以按照需要以任何次序执行。此外,在这里讨论的任何方法的动作可以按照需要串行或者并行地执行。此外,可以关于制造在这里讨论的任何装置执行在这里讨论的任何方法。FIG2C is a flow chart of a method 30 for manufacturing a multi-chip module according to an embodiment. Multi-chip module 20 can be manufactured according to method 30. At block 32, a laminate substrate having conductive traces in a layered structure can be provided. In some cases, method 30 can include forming such a laminate substrate. At block 34, a die including one or more integrated passive devices can be flip-chip mounted on the laminate substrate. Thus, the devices of the die can be on a side facing the laminate substrate. One or more bumps can electrically connect the integrated passive devices of the die to the conductive traces in the layered structure. At block 36, the output of the power amplifier die on the laminate substrate can be wire-bonded to the input of the die including the integrated passive devices. This can provide an electrical path for the RF signal between the power amplifier and the matching network. In certain embodiments, some or all of the operations discussed with reference to FIG2C can be performed. The actions of any method discussed herein can be performed in any order as desired. Furthermore, the actions of any method discussed herein can be performed serially or in parallel as desired. Furthermore, any method discussed herein can be performed in connection with the manufacture of any device discussed herein.

图2D是根据实施例的模块20’的示意图。模块20’类似于图2A的多芯片模块20。可以关于图2A的实施例或者在这里讨论的任何其他实施例实现图2D的实施例的特征的任何组合。虽然图2D聚焦于图示IPD晶元24和到RF地的关联的电连接,但是模块20’也可以包括功率放大器晶元和/或一个或多个其他晶元。图2D示出了导电迹线27可以通过嵌入在层压基底26中的第一通路28-1的方式电连接到IPD晶元24。在图2D中,IPD晶元24上的分流电容器可以通过嵌入在基底26中的迹线27、凸点、第一通路28-1、和第二通路28-2的方式电连接到RF地。在某些其它实施例中,基底的同一层中的两个或更多通路和/或基底的不同层中的两个或更多通路可以包括在迹线27和RF地之间的电路径中。替代地或者另外地,基底的同一层中的两个或更多通路和/或基底的不同层中的两个或更多通路可以包括在迹线27和IPD晶元24之间的电路径中。FIG2D is a schematic diagram of a module 20′ according to an embodiment. Module 20′ is similar to the multi-chip module 20 of FIG2A . Any combination of features of the embodiment of FIG2D may be implemented with respect to the embodiment of FIG2A or any other embodiment discussed herein. While FIG2D focuses on illustrating an IPD die 24 and the associated electrical connection to RF ground, module 20′ may also include a power amplifier die and/or one or more other dies. FIG2D illustrates that conductive trace 27 may be electrically connected to IPD die 24 via a first via 28-1 embedded in laminate substrate 26. In FIG2D , a shunt capacitor on IPD die 24 may be electrically connected to RF ground via trace 27 embedded in substrate 26, a bump, a first via 28-1, and a second via 28-2. In certain other embodiments, two or more vias in the same layer of the substrate and/or two or more vias in different layers of the substrate may be included in the electrical path between trace 27 and RF ground. Alternatively or additionally, two or more vias in the same layer of the substrate and/or two or more vias in different layers of the substrate may be included in the electrical path between trace 27 and IPD die 24 .

图3是根据实施例的配置为提供阻抗匹配和谐波拒绝的分层中的IPD晶元和迹线的示意图。图3的IPD晶元24’是图2A的IPD晶元24的一个示例。在图3中,IPD晶元24’包括IPD电容器CVCC、Cmatch、C2foB、Cfilt1、Cfilt2和Cblock以及IPD电感器Pri和Sec。IPD电容器和/或IPD电感器例如可以使用薄膜工艺在硅晶元或者任何其他适当的绝缘材料的晶元上形成。IPD晶元24’的IPD电容器和IPD电感器可以包括在图1的匹配网络14中。如图所示,IPD晶元24’可以接收功率放大器输出信号PA_OUT和提供RF输出RF_OUT。FIG3 is a schematic diagram of an IPD die and traces in a layered configuration for providing impedance matching and harmonic rejection, according to an embodiment. The IPD die 24′ of FIG3 is an example of the IPD die 24 of FIG2A . In FIG3 , the IPD die 24′ includes IPD capacitors C VCC , Cmatch, C2foB, Cfilt1, Cfilt2, and Cblock, and IPD inductors Pri and Sec. The IPD capacitors and/or IPD inductors can be formed, for example, using a thin film process on a silicon die or a die of any other suitable insulating material. The IPD capacitors and IPD inductors of the IPD die 24′ can be included in the matching network 14 of FIG1 . As shown, the IPD die 24′ can receive the power amplifier output signal PA_OUT and provide an RF output RF_OUT.

代替直接将IPD电容器连接到层压基底中的通路的凸点,IPD晶元24’的IPD分流电容器C2foB、Cfilt1、Cfilt2和CVCC分别通过层压基底中的导电迹线27a到27d的方式连接到地。在图3的实施例中,导电迹线27a到27d依次连接到层压基底中的通路。在图3中,IPD分流电容器通过各个凸点的方式连接到层压基底中的导电迹线,比如铜迹线。因此,每一个IPD分流电容器通过凸点、导电迹线和通路的方式电连接到RF地。在某些实现中,一个或多个IPD分流电容器可以例如通过凸点、通路、嵌入的迹线和另一通路的方式电连接到RF地,如图2D所示。对于包括功率放大器晶元和IPD晶元的模块,RF地可以由地平面实现。在图3的实施例中,可以由凸点实现分流电容器和导电迹线之间的电连接,且晶元到Gnd1、Gnd2、Gnd3和Gnd4的接触可以由凸点垫实现。Instead of directly connecting the IPD capacitors to the bumps of the vias in the laminate substrate, the IPD shunt capacitors C2foB, Cfilt1, Cfilt2, and C VCC of IPD die 24' are each connected to ground via conductive traces 27a through 27d in the laminate substrate. In the embodiment of FIG3 , conductive traces 27a through 27d are sequentially connected to the vias in the laminate substrate. In FIG3 , the IPD shunt capacitors are connected to conductive traces, such as copper traces, in the laminate substrate via individual bumps. Thus, each IPD shunt capacitor is electrically connected to the RF ground via the bumps, the conductive traces, and the vias. In certain implementations, one or more IPD shunt capacitors can be electrically connected to the RF ground, for example, via the bumps, the vias, the embedded traces, and another via, as shown in FIG2D . For a module including a power amplifier die and an IPD die, the RF ground can be implemented by a ground plane. In the embodiment of FIG. 3 , the electrical connections between the shunt capacitors and the conductive traces may be made by bumps, and the contacts of the die to Gnd1 , Gnd2 , Gnd3 , and Gnd4 may be made by bump pads.

导电迹线27a到27d用作各个IPD电容器和RF地之间的电感。导电迹线27a到27d每个可以具有选择为谐振电连接到其的各个IPD分流电容器的长度。可以选择导电迹线27a到27e的长度以使得导电迹线的阻抗与电连接到其的IPD分流电容器的阻抗一起提供在特定的频率(比如谐频)的频率陷波。因此,可以选择导电迹线的长度以提供在特定的谐频的拒绝。作为一个示例,可以选择电容器C2foB的电容和导电迹线27a的阻抗从而在功率放大器的输出的第二谐频一起提供谐波拒绝。可以基于匹配电路的特性(比如阻抗变换比率)选择电容器C2foB的电容,且可以基于电容器C2foB的电容选择导电迹线27a的长度以提供在第二谐波的谐波拒绝。Conductive traces 27a through 27d act as inductors between the respective IPD capacitors and the RF ground. Conductive traces 27a through 27d can each have a length selected to resonate with the respective IPD shunt capacitor electrically connected thereto. The lengths of conductive traces 27a through 27e can be selected so that the impedance of the conductive traces, together with the impedance of the IPD shunt capacitors electrically connected thereto, provides a frequency notch at a specific frequency (e.g., a harmonic frequency). Thus, the lengths of the conductive traces can be selected to provide rejection at a specific harmonic frequency. As an example, the capacitance of capacitor C2foB and the impedance of conductive trace 27a can be selected to provide harmonic rejection at the second harmonic frequency of the power amplifier's output. The capacitance of capacitor C2foB can be selected based on characteristics of the matching circuit (e.g., an impedance transformation ratio), and the length of conductive trace 27a can be selected based on the capacitance of capacitor C2foB to provide harmonic rejection at the second harmonic.

图4是包括具有直接连接到提供到RF地的电路径的通路的凸点的IPD晶元的匹配网络的频率响应的图。如图4的频率响应所示,在分层中没有导电地迹线以谐振IPD晶元上的分流电容器的情况下,不展现谐波拒绝且频带外抑制相对不良。Figure 4 is a graph of the frequency response of a matching network including an IPD die having bumps directly connected to vias providing an electrical path to RF ground. As shown in the frequency response of Figure 4, without a conductive ground trace in the layer to resonate the shunt capacitor on the IPD die, no harmonic rejection is exhibited and out-of-band suppression is relatively poor.

通过添加适当长度的分层中的地迹线以谐振IPD晶元上的分流电容器(例如,如图3所示),可以实现期望的谐波拒绝。图5是包括根据图3布置的IPD晶元的匹配网络的频率响应的图。如图5所示,已经示例大于35dB的第三谐波拒绝。By adding ground traces in layers of appropriate length to resonate the shunt capacitors on the IPD die (e.g., as shown in FIG3 ), desired harmonic rejection can be achieved. FIG5 is a graph of the frequency response of a matching network including an IPD die arranged according to FIG3 . As shown in FIG5 , third harmonic rejection of greater than 35 dB has been demonstrated.

再次参考图3,层压基底中的IPD晶元24’和导电迹线可以实现具有椭圆低通滤波器响应的阻抗变压器(transformer)。如图所示,电容器Cfilt1和Cfilt2、电感器Pri和Sec以及导电迹线27b和27c可以一起实现这种椭圆低通滤波器频率响应。以大约31/2匝实现的变压器的第二电感器Sec可以具有大约7nH的残留电感。该电感可以应用为3段椭圆滤波器中的串联元件。这种变压器中的串联电感可以改进频带外抑制和提供在第三谐波的频率陷波(例如,在某些实现中在大约2.7GHz)。可以由调谐网络的LC槽路(tank)的槽路电容设置陷波频率。在某些频率,比如第三谐波周围,匝间电容可能是足够的。Referring again to FIG3 , the IPD die 24 ′ and conductive traces in the laminate substrate can implement an impedance transformer with an elliptical low-pass filter response. As shown, capacitors Cfilt1 and Cfilt2, inductors Pri and Sec, and conductive traces 27 b and 27 c can together implement this elliptical low-pass filter frequency response. The second inductor Sec of the transformer, implemented with approximately 3 1/2 turns, can have a residual inductance of approximately 7 nH. This inductor can be applied as a series element in a three-stage elliptical filter. The series inductance in this transformer can improve out-of-band suppression and provide a frequency notch at the third harmonic (for example, at approximately 2.7 GHz in some implementations). The notch frequency can be set by the tank capacitance of the LC tank of the tuning network. At certain frequencies, such as around the third harmonic, the inter-turn capacitance may be sufficient.

图6A是根据实施例的包括匹配网络的功率放大器系统的示意图,所述匹配网络在封装基底中包括集成无源器件和导电迹线。图示的功率放大器系统包括功率放大器晶元22’和IPD晶元24”、线接合25a到25n和导电迹线27b、27c和27d。图6A的功率放大器晶元22’是图2A的功率放大器晶元22的示例。图6A的IPD晶元24”是图2A的IPD晶元24的另一示例。FIG6A is a schematic diagram of a power amplifier system including a matching network comprising integrated passives and conductive traces in a package substrate according to an embodiment. The illustrated power amplifier system includes power amplifier die 22′ and IPD die 24″, wire bonds 25a to 25n, and conductive traces 27b, 27c, and 27d. Power amplifier die 22′ of FIG6A is an example of power amplifier die 22 of FIG2A . IPD die 24″ of FIG6A is another example of IPD die 24 of FIG2A .

图6A图示的匹配网络可以实现比如低通椭圆滤波器之类的L-C滤波器。可以使用IPD晶元24”上的分流IPD电容器以及层压基底中的导电迹线27b和27c实现椭圆滤波器响应。分别以充分长的导电迹线27b和27c谐振IPD分流电容器Cfilt1和Cfilt2可以提供椭圆滤波器响应的期望性能。为谐振IPD分流电容器,导电迹线可能过长而不能包括在IPD晶元24”上。因此,在在其上设置IPD晶元24”的层压基底26中实现导电迹线27b和27c。导电迹线27b和27c每个可以具有大于100微米的长度。例如,在某些应用中,导电迹线27b和27c每个可以具有大约300微米的长度。在某些应用中,导电迹线的宽度可以是大约60微米。The matching network illustrated in FIG6A can implement an L-C filter such as a low-pass elliptical filter. The elliptical filter response can be implemented using shunt IPD capacitors on the IPD die 24″ and conductive traces 27b and 27c in the laminate substrate. Resonating the IPD shunt capacitors Cfilt1 and Cfilt2 with sufficiently long conductive traces 27b and 27c, respectively, can provide the desired performance of the elliptical filter response. To resonate the IPD shunt capacitors, the conductive traces may be too long to be included on the IPD die 24″. Therefore, conductive traces 27b and 27c are implemented in the laminate substrate 26 on which the IPD die 24″ is disposed. Conductive traces 27b and 27c can each have a length greater than 100 microns. For example, in some applications, conductive traces 27b and 27c can each have a length of approximately 300 microns. In some applications, the width of the conductive traces can be approximately 60 microns.

如图所示,功率放大器晶元22’包括输入电容器Cin、双极功率放大器晶体管60、第一频率陷波62和第二频率陷波64。图6A图示功率放大器晶元可以包括一个或多个谐频陷波。例如,第一频率陷波62可以是第二谐频陷波,且第二频率陷波64可以是第四谐频陷波。图6A还图示功率放大器可以包括双极功率放大器晶体管60。双极功率放大器晶体管60可以是GaAs异质结双极晶体管。双极功率放大器晶体管60的基极可以通过输入电容器Cin的方式接收RF输入信号RF_IN。该基极也可以接收偏置信号(未示出),比如偏压。双极功率放大器晶体管60的集电极可以提供功率放大器输出信号PA_OUT。如图所示,线接合25a到25n从功率放大器晶元22’提供功率放大器输出信号PA_OUT到IPD晶元24”。任何适当数目的线接合25a到25n可以彼此并行地实现。这些线接合可以提供双极功率放大器60的集电极和IPD晶元24”之间的信号路径中的电感。As shown, the power amplifier die 22' includes an input capacitor Cin, a bipolar power amplifier transistor 60, a first frequency notch 62, and a second frequency notch 64. FIG6A illustrates that the power amplifier die may include one or more harmonic notches. For example, the first frequency notch 62 may be a second harmonic notch, and the second frequency notch 64 may be a fourth harmonic notch. FIG6A also illustrates that the power amplifier may include a bipolar power amplifier transistor 60. The bipolar power amplifier transistor 60 may be a GaAs heterojunction bipolar transistor. The base of the bipolar power amplifier transistor 60 may receive an RF input signal RF_IN via the input capacitor Cin. The base may also receive a bias signal (not shown), such as a bias voltage. The collector of the bipolar power amplifier transistor 60 may provide a power amplifier output signal PA_OUT. As shown, wire bonds 25a to 25n provide the power amplifier output signal PA_OUT from the power amplifier die 22' to the IPD die 24". Any suitable number of wire bonds 25a to 25n may be implemented in parallel with one another. These wire bonds may provide inductance in the signal path between the collector of the bipolar power amplifier 60 and the IPD die 24".

图6B是图示图6A的椭圆滤波器的频率响应的绘图。如图6B中图示的,模拟数据指示由图6A的匹配网络实现的椭圆滤波器可以提供在第三谐波(在该绘图中大约2.7GHz)的频率抑制,且可以是使得在第三谐波存在小于大约-70dB的功率,比如在第三谐波不大于大约-74dB的功率。图示的频率响应可以提供期望的频带外抑制。FIG6B is a plot illustrating the frequency response of the elliptical filter of FIG6A . As illustrated in FIG6B , simulation data indicates that the elliptical filter implemented by the matching network of FIG6A can provide frequency suppression at the third harmonic (approximately 2.7 GHz in the plot) and can be such that there is less than approximately −70 dB of power at the third harmonic, such as no more than approximately −74 dB of power at the third harmonic. The illustrated frequency response can provide the desired out-of-band suppression.

图7是根据实施例的配置为提供阻抗匹配和相位旋转的层压基底中的IPD晶元和迹线的示意图。图7的IPD晶元24”’是图2A的IPD晶元24的另一示例。在图7中,IPD晶元24”’包括IPD电容器CVCC、Cfilt1、Cfilt2和Cblock以及IPD电感器Pri和Sec。IPD电容器和/或IPD电感器例如可以使用薄膜工艺在硅晶元或者任何其他适当的绝缘材料的晶元上形成。IPD晶元24”’的IPD电容器和IPD电感器可以包括在图1的匹配网络14中。如图所示,IPD晶元24”’可以接收功率放大器输出信号PA_OUT和提供RF输出RF_OUT。可以关于图7的实施例在功率放大器晶元上实现谐波终止。Figure 7 is a schematic diagram of an IPD die and traces in a laminate substrate configured to provide impedance matching and phase rotation according to an embodiment. The IPD die 24'" of Figure 7 is another example of the IPD die 24 of Figure 2A. In Figure 7, the IPD die 24'" includes IPD capacitors CVCC , Cfilt1, Cfilt2, and Cblock and IPD inductors Pri and Sec. The IPD capacitors and/or IPD inductors can be formed, for example, on a silicon wafer or a wafer of any other suitable insulating material using a thin film process. The IPD capacitors and IPD inductors of the IPD die 24'" can be included in the matching network 14 of Figure 1. As shown, the IPD die 24'" can receive a power amplifier output signal PA_OUT and provide an RF output RF_OUT. Harmonic termination can be implemented on the power amplifier die with respect to the embodiment of Figure 7.

比如SAW双工器或者BAW双工器之类的双工器可以包括在匹配网络和天线之间的电路径中。双工器可以接收包括在IPD晶元24”’上的IPD的匹配网络的输出RF_OUT。双工器的发射端口阻抗可以配置为使得在频带边缘的电阻部分的幅值接近最大。当该阻抗与电连接到匹配网络的功率放大器输出(例如,功率放大器集电极)匹配时,因此可能在频带边缘降低效率。A duplexer, such as a SAW duplexer or a BAW duplexer, may be included in the electrical path between the matching network and the antenna. The duplexer may receive the output RF_OUT of the matching network of the IPD included on the IPD die 24″′. The transmit port impedance of the duplexer may be configured such that the magnitude of the resistive portion at the band edge is close to maximum. When this impedance matches the output of a power amplifier (e.g., the collector of the power amplifier) electrically connected to the matching network, efficiency may be reduced at the band edge.

阻抗变换器IPD晶元(比如图7的IPD晶元24”’)和在其上放置IPD晶元的分层中的导电迹线可用于在具有双极功率放大器晶体管的电子系统中提供双工器到集电极匹配。图7的导电迹线27b和27c可以提供分别IPD晶元24”’的IPD分流电容器Cfilt1和Cfilt2与RF地之间的电路径中的电感。在支撑层压基底中使用相对长的导电迹线,可以在史密斯图中旋转双工器的发射端口的阻抗。导电迹线的长度可能影响导电迹线的电感。因此,可以选择图7示出的导电迹线的长度从而实现所需的阻抗旋转。An impedance converter IPD die, such as IPD die 24'" of FIG. 7 , and conductive traces in a layer on which the IPD die is placed can be used to provide duplexer-to-collector matching in an electronic system having bipolar power amplifier transistors. Conductive traces 27b and 27c of FIG. 7 can provide inductance in an electrical path between the IPD shunt capacitors Cfilt1 and Cfilt2, respectively, of IPD die 24'" and RF ground. Using relatively long conductive traces in the supporting laminate substrate can rotate the impedance of the transmit port of the duplexer in the Smith chart. The length of the conductive trace can affect the inductance of the conductive trace. Therefore, the length of the conductive traces shown in FIG. 7 can be selected to achieve the desired impedance rotation.

导电迹线27b、27c和27d每个可以具有大于100微米的长度。例如,在某些应用中,导电迹线27b可以具有大约275微米的长度,且导电迹线27c每个可以具有大约950微米的长度以实现所需的阻抗旋转。作为一个示例,导电迹线27d可以具有大约2毫米的长度。在某些应用中,导电迹线27b、27c和27d中的每一个的宽度可以是大约60微米。Conductive traces 27b, 27c, and 27d can each have a length greater than 100 microns. For example, in some applications, conductive trace 27b can have a length of approximately 275 microns, and conductive trace 27c can each have a length of approximately 950 microns to achieve the desired impedance rotation. As an example, conductive trace 27d can have a length of approximately 2 millimeters. In some applications, the width of each of conductive traces 27b, 27c, and 27d can be approximately 60 microns.

图8是示出由图7的匹配网络实现的阻抗旋转的史密斯图。可以由匹配网络匹配和旋转双工器阻抗以使得在频带边缘的电阻部分的幅值处于或者接近最小。图8图示这种阻抗旋转。当旋转的阻抗呈现给提供功率放大器输出信号PA_OUT的双极功率放大器晶体管的集电极时,因此可以在频带边缘改进功率放大器系统的效率。FIG8 is a Smith chart illustrating the impedance rotation achieved by the matching network of FIG7 . The duplexer impedance can be matched and rotated by the matching network so that the magnitude of the resistive component at the band edge is at or near a minimum. FIG8 illustrates this impedance rotation. When the rotated impedance is presented to the collector of the bipolar power amplifier transistor providing the power amplifier output signal PA_OUT, the efficiency of the power amplifier system can be improved at the band edge.

图9是可以包括一个或多个功率放大器和一个或多个匹配网络的示例无线或者移动装置90的示意性框图。在一个实施例中,无线装置90可以是移动电话,比如智能电话。无线装置90可以具有一个或多个匹配网络14a、14b。例如,无线装置90的匹配网络可以包括图1、图2A-2B、图2D、图3、图6A或者图7中的任何图中的匹配网络的特征的任何适当的组合。作为另一示例,在这里讨论的任何功率放大器可以包括在图9的无线装置90中。FIG9 is a schematic block diagram of an example wireless or mobile device 90 that may include one or more power amplifiers and one or more matching networks. In one embodiment, the wireless device 90 may be a mobile phone, such as a smartphone. The wireless device 90 may include one or more matching networks 14a, 14b. For example, the matching network of the wireless device 90 may include any suitable combination of features of the matching networks of any of FIG1 , FIG2A-2B , FIG2D , FIG3 , FIG6A , or FIG7 . As another example, any power amplifier discussed herein may be included in the wireless device 90 of FIG9 .

图9中示出的示例无线装置90可以表示比如多频带/多模式移动电话之类的多频带和/或多模式装置。举例来说,无线装置90可以根据长期演进(LTE)通信。在该示例中,无线装置可以配置为在由LTE标准定义的一个或多个频带操作。无线装置90可以替代地或者另外地配置为根据一个或多个其他通信标准通信,包括但不限于Wi-Fi标准、3G标准、4G标准或者先进LTE标准中的一个或多个。本公开的功率放大器系统可以在例如实现前述示例通信标准的任何组合的移动装置内实现。The example wireless device 90 shown in FIG9 can represent a multi-band and/or multi-mode device such as a multi-band/multi-mode mobile phone. For example, the wireless device 90 can communicate according to Long Term Evolution (LTE). In this example, the wireless device can be configured to operate in one or more frequency bands defined by the LTE standard. The wireless device 90 can alternatively or additionally be configured to communicate according to one or more other communication standards, including but not limited to one or more of the Wi-Fi standard, the 3G standard, the 4G standard, or the Advanced LTE standard. The power amplifier system of the present disclosure can be implemented in a mobile device that implements any combination of the aforementioned example communication standards, for example.

如图所示,无线装置90可以包括开关模块91、收发器92、天线93、功率放大器12a和12b、控制部件94、计算机可读存储介质95、处理器96和电池97。As shown, wireless device 90 may include a switch module 91 , a transceiver 92 , an antenna 93 , power amplifiers 12 a and 12 b , a control component 94 , a computer-readable storage medium 95 , a processor 96 , and a battery 97 .

收发器92可以产生用于经由天线93传输的RF信号。此外,收发器92可以从天线93接收引入的RF信号。将理解与RF信号的发射和接收相关联的各种功能可以由在图9中集合地表示为收发器92的一个或多个部件实现。例如,单个部件可以配置为提供发射和接收功能两者。在另一示例中,发射和接收功能可以由分开的部件提供。The transceiver 92 can generate RF signals for transmission via the antenna 93. In addition, the transceiver 92 can receive incoming RF signals from the antenna 93. It will be understood that various functions associated with the transmission and reception of RF signals can be implemented by one or more components collectively represented as the transceiver 92 in FIG. 9 . For example, a single component can be configured to provide both transmit and receive functions. In another example, the transmit and receive functions can be provided by separate components.

在图9中,来自收发器92的一个或多个输出信号被示为经由一个或多个传输路径98提供给天线93。在示出的示例中,不同传输路径98可以表示与不同频带(例如,高频带和低频带)和/或不同功率输出相关联的输出路径。传输路径98可以与不同传输模式相关联。图示的传输路径98之一可以是活动的,同时例如一个或多个其他传输路径98是不活动的。其他传输路径98可以与不同功率模式(例如,高功率模式和低功率模式)和/或与不同发射频带相关联的路径相关联。传输路径98可以包括一个或多个功率放大器12a和12b以帮助将具有相对低功率的RF信号升压到适于传输的较高功率。功率放大器12a和12b可以包括上面讨论的功率放大器12。虽然图9图示使用两个传输路径98的配置,但是无线装置90可以适于包括更多或者更少的传输路径98。In FIG9 , one or more output signals from transceiver 92 are shown as being provided to antenna 93 via one or more transmission paths 98. In the example shown, different transmission paths 98 may represent output paths associated with different frequency bands (e.g., a high frequency band and a low frequency band) and/or different power outputs. Transmission paths 98 may be associated with different transmission modes. One of the illustrated transmission paths 98 may be active while, for example, one or more other transmission paths 98 are inactive. Other transmission paths 98 may be associated with different power modes (e.g., a high power mode and a low power mode) and/or paths associated with different transmission bands. Transmission paths 98 may include one or more power amplifiers 12 a and 12 b to help boost RF signals having relatively low power to higher powers suitable for transmission. Power amplifiers 12 a and 12 b may include the power amplifier 12 discussed above. Although FIG9 illustrates a configuration using two transmission paths 98, wireless device 90 may be adapted to include more or fewer transmission paths 98.

在图9中,来自天线93的一个或多个已检测的信号被描绘为经由一个或多个接收路径99提供给收发器92。在示出的示例中,不同接收路径99可以表示与不同信号模式和/或不同接收频段相关联的路径。虽然图9图示使用四个接收路径99的配置,但是无线装置90可以适于包括更多或者更少的接收路径99。In FIG9 , one or more detected signals from antenna 93 are depicted as being provided to transceiver 92 via one or more receive paths 99. In the example shown, different receive paths 99 may represent paths associated with different signal modes and/or different receive frequency bands. While FIG9 illustrates a configuration using four receive paths 99, wireless device 90 may be adapted to include more or fewer receive paths 99.

为促进接收和/或发射路径之间的切换,可以包括天线开关模块91且天线开关模块91可用于将天线93选择性地电连接到所选的发射或者接收路径。因此,天线开关模块91可以提供与无线装置90的操作相关联的多个切换功能。天线开关模块91可以包括配置为提供与例如不同频带之间的切换、不同模式之间的切换、发射和接收模式之间的切换,或者其任何组合相关联的功能的多掷开关。To facilitate switching between receive and/or transmit paths, an antenna switch module 91 may be included and may be used to selectively electrically connect the antenna 93 to a selected transmit or receive path. Thus, the antenna switch module 91 may provide a number of switching functions associated with the operation of the wireless device 90. The antenna switch module 91 may include a multi-throw switch configured to provide functionality associated with, for example, switching between different frequency bands, switching between different modes, switching between transmit and receive modes, or any combination thereof.

图9图示在某些实施例中,可以提供控制部件94以用于控制与天线开关模块91和/或一个或多个其他操作部件的操作相关联的各种控制功能。例如,控制部件94可以帮助提供控制信号到天线开关模块91从而选择特定的发射或者接收路径。9 illustrates that in certain embodiments, a control component 94 may be provided for controlling various control functions associated with the operation of the antenna switch module 91 and/or one or more other operating components. For example, the control component 94 may help provide control signals to the antenna switch module 91 to select a particular transmit or receive path.

在某些实施例中,处理器95可以配置为促进无线装置90上各种处理的实现。处理器95例如可以是通用处理器或者专用处理器。在某些实现中,无线装置90可以包括可以存储计算机程序指令的非瞬时计算机可读介质96,比如存储器,计算机程序指令可以提供给处理器90和由处理器90执行。In some embodiments, the processor 95 may be configured to facilitate implementation of various processes on the wireless device 90. The processor 95 may be, for example, a general-purpose processor or a special-purpose processor. In some implementations, the wireless device 90 may include a non-transitory computer-readable medium 96, such as a memory, that may store computer program instructions, which may be provided to and executed by the processor 90.

电池97可以是用于在例如包括锂离子电池的无线装置90中使用的任何适当的电池。电池可以将电源电压提供给多芯片模块,比如包括一个或多个功率放大器12a/12b和/或一个或多个匹配网络14a/14b的多芯片模块。The battery 97 may be any suitable battery for use in the wireless device 90 including, for example, a lithium-ion battery. The battery may provide a supply voltage to a multi-chip module, such as a multi-chip module including one or more power amplifiers 12a/12b and/or one or more matching networks 14a/14b.

上面描述的某些实施例提供关于功率放大器和/或移动装置的示例。但是,实施例的原理和优点可以用于可能受益于在这里描述的任何电路的任何其他系统或者设备。在这里的教导可应用于各种功率放大器系统,包括具有多个功率放大器的系统,例如包括多频带和/或多模式功率放大器系统。在这里讨论的功率放大器晶体管例如可以是砷化镓(GaAs)、CMOS、或者硅锗(SiGe)晶体管。在这里讨论的功率放大器可以由场效应晶体管和/或双极性晶体管(比如异质结双极晶体管)实现。Certain embodiments described above provide examples of power amplifiers and/or mobile devices. However, the principles and advantages of the embodiments can be used in any other system or device that may benefit from any circuit described herein. The teachings herein can be applied to various power amplifier systems, including systems with multiple power amplifiers, such as multi-band and/or multi-mode power amplifier systems. The power amplifier transistors discussed herein can be, for example, gallium arsenide (GaAs), CMOS, or silicon germanium (SiGe) transistors. The power amplifiers discussed herein can be implemented by field effect transistors and/or bipolar transistors (such as heterojunction bipolar transistors).

本公开的各方面可以在各种电子装置中实现。电子装置的示例可以包括,但不限于消费电子产品、消费电子产品的部分、电子测试设备、蜂窝通信基础设施,比如基站等。电子装置的示例可以包括但不限于比如智能电话的移动电话、电话机、电视、计算机监视器、计算机、调制解调器、手持计算机、膝上型计算机、平板计算机、个人数字助理(PDA)、微波炉、冰箱、比如汽车电子系统的车辆电子系统、立体声系统、DVD播放器、CD播放器、比如MP3播放器的数字音乐播放器、收音机、摄录一体机、相机、数码相机、便携式存储器芯片、洗衣机、烘干机、洗衣机/烘干机、复印机、传真机、扫描仪、多功能外部装置、腕表、时钟,等等。另外,电子装置可以包括半成品。Aspects of the present disclosure may be implemented in various electronic devices. Examples of electronic devices may include, but are not limited to, consumer electronic products, parts of consumer electronic products, electronic test equipment, cellular communication infrastructure, such as base stations, and the like. Examples of electronic devices may include, but are not limited to, mobile phones, such as smartphones, telephones, televisions, computer monitors, computers, modems, handheld computers, laptop computers, tablet computers, personal digital assistants (PDAs), microwave ovens, refrigerators, vehicle electronic systems, such as automotive electronic systems, stereo systems, DVD players, CD players, digital music players, such as MP3 players, radios, camcorders, cameras, digital cameras, portable memory chips, washing machines, dryers, washer/dryers, copiers, fax machines, scanners, multi-function peripheral devices, watches, clocks, and the like. In addition, electronic devices may include semi-finished products.

除非上下文清楚地以别的方式要求,否则在整个说明书和权利要求书中,术语“包括”、“包含”、“含有”、“具有”等被解释为包括的意义,而不是排它或者穷尽的意义;也就是,以“包括,但不限于”的意义。如在这里通常使用的术语“耦合”指的是两个或更多元件可以直接连接,或者通过一个或多个中间元件的方式连接。同样地,如在这里通常使用的术语"连接"指的是两个或更多元件可以直接连接,或者通过一个或多个中间元件的方式连接。另外,术语“在这里”、“以上”、“以下”和类似的含义的术语当在本申请中使用时应该是指总体上的本申请而并非本申请的任何特定的部分。在上下文允许的情况下,使用单数或者复数的以上具体实施方式中的术语也可以分别包括复数或者单数。在涉及两个或更多项的列表时的术语“或”,该术语覆盖该术语的以下所有解释:列表中的任何项,列表中的所有项,和列表中的项的任何组合。Unless the context clearly requires otherwise, throughout the specification and claims, the terms "comprises," "comprising," "containing," "having," and the like are to be interpreted as inclusive, rather than exclusive or exhaustive; that is, in the sense of "including, but not limited to." The term "coupled," as generally used herein, means that two or more elements can be connected directly, or by way of one or more intermediate elements. Similarly, the term "connected," as generally used herein, means that two or more elements can be connected directly, or by way of one or more intermediate elements. In addition, the terms "herein," "above," "below," and terms of similar meaning, when used in this application, should refer to the application as a whole and not to any particular part of the application. Where the context permits, terms in the above specific embodiments that use the singular or plural may also include the plural or singular, respectively. When referring to a list of two or more items, the term "or" covers all of the following interpretations of the term: any item in the list, all items in the list, and any combination of items in the list.

此外,在这里使用的有条件语言,比如,“可以”、“能够”、“也许”、“或许”、“例如”、“举例来说”、“比如”等,除非以别的方式特别地陈述,或者以其他方式在使用的上下文内理解,通常意在表示某些实施例包括,而同时其他实施例不包括某些特征、元件和/或状态。因此,这种有条件语言通常不意在暗示对于一个或多个实施例以任何方式需要特征、元件和/或状态、或者一个或多个实施例必须包括用于在有或者没有作者输入或者提示的情况下决定是否包括或者要在任何特定的实施例中执行这些特征、元件和/或状态的逻辑。Furthermore, conditional language used herein, such as, for example, "may," "could," "might," "might," "for example," "for instance," "such as," and the like, unless specifically stated otherwise or otherwise understood within the context of use, is generally intended to indicate that some embodiments include, while other embodiments do not include, certain features, elements, and/or states. Thus, such conditional language is generally not intended to imply that features, elements, and/or states are in any way required for one or more embodiments, or that one or more embodiments must include logic for determining, with or without author input or prompting, whether such features, elements, and/or states are included or to be performed in any particular embodiment.

虽然已经描述了某些实施例,但是这些实施例已经仅通过示例的方式呈现,而不意在限制本公开的范围。实际上,在这里描述的新颖的设备、方法和系统可以具体表现为各种其他形式;此外,可以做出以在这里描述的方法和系统的形式的各种省略、替换和改变而不脱离本公开的精神。例如,虽然块以给定布置呈现,但是替代实施例可以以不同部件和/或电路拓扑执行类似的功能,且可以删除、移动、添加、细分、组合和/或修改某些块。这些块中的每一个可以以各种不同的方式实现。上面描述的各种实施例的元件和动作的任何适当的组合可以被组合以提供另外的实施例。附随的权利要求和它们的等效物意在覆盖这种将落入本公开的范围和精神内的形式或者修改。Although certain embodiments have been described, these embodiments have been presented by way of example only and are not intended to limit the scope of the present disclosure. In fact, the novel devices, methods, and systems described herein may be embodied in a variety of other forms; in addition, various omissions, substitutions, and changes in the form of the methods and systems described herein may be made without departing from the spirit of the present disclosure. For example, although the blocks are presented in a given arrangement, alternative embodiments may perform similar functions with different components and/or circuit topologies, and certain blocks may be deleted, moved, added, subdivided, combined, and/or modified. Each of these blocks may be implemented in a variety of different ways. Any appropriate combination of the elements and actions of the various embodiments described above may be combined to provide additional embodiments. The accompanying claims and their equivalents are intended to cover such forms or modifications that would fall within the scope and spirit of the present disclosure.

Claims (21)

1.一种具有集成无源器件的模块,所述模块包括:1. A module with integrated passive components, the module comprising: 封装基底;Packaging substrate; 封装基底上的晶元,所述晶元包含集成电容器、变压器、耦接到所述变压器的配置为接收电源电压的端子的第二集成电容器、以及提供到所述集成电容器的电连接的触点;A wafer on a package substrate, the wafer including an integrated capacitor, a transformer, a second integrated capacitor coupled to a terminal of the transformer configured to receive a power supply voltage, and contacts providing an electrical connection to the integrated capacitor; 封装基底的导电迹线,所述导电迹线在晶元的触点和地电位之间的电路径中,所述导电迹线和所述变压器和所述集成电容器包含在配置为接收射频信号的匹配网络中,并且所述集成电容器的电容和所述导电迹线的电感一起配置为在射频信号的谐频处提供频率陷波;以及A conductive trace on a package substrate, the conductive trace being in an electrical path between a die contact and ground potential, the conductive trace, the transformer, and the integrated capacitor being included in a matching network configured to receive radio frequency signals, and the capacitance of the integrated capacitor and the inductance of the conductive trace being configured together to provide frequency notch filtering at harmonics of the radio frequency signal; and 封装基底的第二导电迹线,所述第二导电迹线与所述第二集成电容器串联地布置。A second conductive trace on the packaging substrate, the second conductive trace being arranged in series with the second integrated capacitor. 2.如权利要求1所述的模块,其中,所述封装基底包含分层且所述导电迹线在所述分层中。2. The module of claim 1, wherein the packaging substrate comprises layers and the conductive traces are in the layers. 3.如权利要求1所述的模块,还包括第三导电迹线和所述晶元的第三集成电容器,所述第三导电迹线和所述晶元的第三集成电容器一起配置为在射频信号的不同谐频处提供另一频率陷波。3. The module of claim 1 further includes a third conductive trace and a third integrated capacitor of the wafer, the third conductive trace and the third integrated capacitor of the wafer being configured together to provide another frequency notch at different harmonics of the radio frequency signal. 4.如权利要求1所述的模块,其中,所述导电迹线的电感对应于所述导电迹线的长度。4. The module of claim 1, wherein the inductance of the conductive trace corresponds to the length of the conductive trace. 5.如权利要求1所述的模块,还包括所述封装基底上的功率放大器晶元,所述功率放大器晶元包含功率放大器,所述功率放大器配置为将射频信号提供到所述匹配网络。5. The module of claim 1, further comprising a power amplifier chip on the package substrate, the power amplifier chip including a power amplifier configured to provide radio frequency signals to the matching network. 6.如权利要求1所述的模块,其中,所述晶元的触点是凸点垫,且所述晶元是安装在封装基底上的倒装晶片。6. The module of claim 1, wherein the contacts of the wafer are bump pads, and the wafer is a flip chip mounted on a package substrate. 7.如权利要求6所述的模块,其中,所述导电迹线的至少一部分设置在所述晶元的覆盖区以下。7. The module of claim 6, wherein at least a portion of the conductive trace is disposed below the coverage area of the wafer. 8.如权利要求1所述的模块,其中,所述导电迹线具有至少100微米的长度。8. The module of claim 1, wherein the conductive trace has a length of at least 100 micrometers. 9.如权利要求1所述的模块,其中,所述导电迹线在平面图上实质上是螺旋形状。9. The module of claim 1, wherein the conductive trace is substantially spiral in plan view. 10.如权利要求1所述的模块,其中,所述晶元是硅晶元。10. The module of claim 1, wherein the wafer is a silicon wafer. 11.如权利要求1所述的模块,其中,所述导电迹线包含铜。11. The module of claim 1, wherein the conductive trace comprises copper. 12.一种具有集成无源器件的模块,所述模块包括:12. A module with integrated passive components, the module comprising: 封装基底;Packaging substrate; 封装基底上的晶元,所述晶元包含变压器、包含集成电容器的电容器、以及提供到所述集成电容器的电连接的触点;A wafer on a package substrate, the wafer including a transformer, a capacitor including an integrated capacitor, and contacts providing electrical connections to the integrated capacitor; 导电迹线,所述导电迹线包含封装基底的导电迹线,所述电容器配置为与所述导电迹线和所述变压器的次级线圈的剩余电感谐振以创建椭圆滤波器,所述导电迹线在晶元的触点和地电位之间的电路径中,所述集成电容器的电容和所述导电迹线的电感一起配置为在射频信号的谐频处提供频率陷波,并且所述导电迹线、所述变压器和所述集成电容器包含在配置为接收射频信号的匹配网络中。A conductive trace comprising a conductive trace of a package substrate, a capacitor configured to resonate with the residual inductance of the conductive trace and the secondary coil of the transformer to create an elliptic filter, the conductive trace being in an electrical path between a die contact and ground potential, the capacitance of the integrated capacitor and the inductance of the conductive trace being configured together to provide frequency notch filtering at harmonics of the radio frequency signal, and the conductive trace, the transformer, and the integrated capacitor being contained in a matching network configured to receive the radio frequency signal. 13.如权利要求12所述的模块,其中,所述导电迹线包含封装基底的第二导电迹线和封装基底的第三导电迹线,并且所述电容器包含与所述第二导电迹线串联的第二集成电容器和与所述第三导电迹线串联的第三集成电容器。13. The module of claim 12, wherein the conductive trace includes a second conductive trace of the package substrate and a third conductive trace of the package substrate, and the capacitor includes a second integrated capacitor connected in series with the second conductive trace and a third integrated capacitor connected in series with the third conductive trace. 14.如权利要求12所述的模块,其中,所述电容器包含第二集成电容器,所述第二集成电容器耦接到所述变压器的配置为接收电源电压的端子。14. The module of claim 12, wherein the capacitor includes a second integrated capacitor coupled to a terminal of the transformer configured to receive a power supply voltage. 15.一种功率放大器系统,包括:15. A power amplifier system, comprising: 层压基底上的第一晶元,所述第一晶元包含配置为接收射频输入信号和提供放大的射频信号的功率放大器;A first wafer on a laminated substrate, the first wafer including a power amplifier configured to receive a radio frequency input signal and provide amplified radio frequency signal; 层压基底上的第二晶元,所述第二晶元配置为接收放大的射频信号,所述第二晶元包含集成电容器、连接到所述功率放大器的输出的变压器、以及耦接到所述变压器的配置为接收所述第二晶元的电源电压的端子的第二集成电容器;A second chip on a laminated substrate, the second chip being configured to receive an amplified radio frequency signal, the second chip including an integrated capacitor, a transformer connected to the output of the power amplifier, and a second integrated capacitor coupled to the transformer and configured to receive a power supply voltage of the second chip; 层压基底的导电迹线,所述导电迹线在所述集成电容器和地电位之间的电路径中,所述导电迹线的阻抗配置为在放大的射频信号的谐频处使所述集成电容器谐振;以及A conductive trace on a laminated substrate, the conductive trace being in an electrical path between the integrated capacitor and ground potential, the impedance of the conductive trace being configured to cause the integrated capacitor to resonate at a harmonic frequency of the amplified radio frequency signal; and 层压基底的第二导电迹线,所述第二导电迹线与所述第二集成电容器串联地布置。A second conductive trace on a laminated substrate, the second conductive trace being arranged in series with the second integrated capacitor. 16.如权利要求15所述的功率放大器系统,其中,所述导电迹线在平面图上实质上是螺旋形状。16. The power amplifier system of claim 15, wherein the conductive trace is substantially spiral in plan view. 17.如权利要求15所述的功率放大器系统,其中,所述导电迹线的长度为至少100微米,并且所述导电迹线的阻抗对应于所述导电迹线的长度。17. The power amplifier system of claim 15, wherein the length of the conductive trace is at least 100 micrometers, and the impedance of the conductive trace corresponds to the length of the conductive trace. 18.如权利要求15所述的功率放大器系统,其中,所述变压器、所述集成电容器、以及所述导电迹线包含在匹配网络中,所述匹配网络配置为提供阻抗变换和椭圆滤波器。18. The power amplifier system of claim 15, wherein the transformer, the integrated capacitor, and the conductive trace are included in a matching network configured to provide impedance transformation and elliptic filtering. 19.如权利要求15所述的功率放大器系统,还包括层压基底的第三导电迹线,所述第二晶元还包含第三集成电容器,所述第三导电迹线的电感配置为相比于射频信号的所述谐频而在射频信号的不同谐频下使所述第三集成电容器谐振。19. The power amplifier system of claim 15, further comprising a third conductive trace on a laminated substrate, the second wafer further comprising a third integrated capacitor, the inductance of the third conductive trace being configured to cause the third integrated capacitor to resonate at a different harmonic frequency of the radio frequency signal relative to the harmonic frequency of the radio frequency signal. 20.一种移动装置,包括:20. A mobile device, comprising: 多芯片模块,包含(i)层压基底上的功率放大器晶元,所述功率放大器晶元包含配置为接收射频输入信号和提供放大的射频信号的功率放大器;(ii)层压基底上的集成无源器件晶元,所述集成无源器件晶元包含集成电容器、配置为接收放大的射频信号的变压器、以及耦接到所述变压器的耦接到所述集成无源器件晶元的电源触点的端子的第二集成电容器;(iii)层压基底的导电迹线,所述导电迹线在所述集成电容器和地电位之间串联,所述导电迹线和所述集成电容器一起配置为在放大的射频信号的谐频处提供频率陷波;以及(iv)层压基底的第二导电迹线,所述第二导电迹线与所述第二集成电容器串联;A multi-chip module comprising (i) a power amplifier chip on a laminated substrate, the power amplifier chip including a power amplifier configured to receive a radio frequency input signal and provide an amplified radio frequency signal; (ii) an integrated passive device chip on a laminated substrate, the integrated passive device chip including an integrated capacitor, a transformer configured to receive the amplified radio frequency signal, and a second integrated capacitor coupled to a power contact of the integrated passive device chip and coupled to the transformer; (iii) a conductive trace on the laminated substrate, the conductive trace being connected in series between the integrated capacitor and ground potential, the conductive trace and the integrated capacitor being configured together to provide a frequency notch at a harmonic of the amplified radio frequency signal; and (iv) a second conductive trace on the laminated substrate, the second conductive trace being connected in series with the second integrated capacitor; 天线,配置为从集成无源器件晶元接收放大的射频信号的已处理版本;和Antenna, configured to receive a processed version of an amplified radio frequency signal from an integrated passive device chip; and 电池,配置为将电源电压提供到多芯片模块。The battery is configured to supply power voltage to the multi-chip module. 21.如权利要求20所述的移动装置,其中,所述移动装置是蜂窝电话且所述多芯片模块是多频带模块。21. The mobile device of claim 20, wherein the mobile device is a cellular phone and the multi-chip module is a multi-band module.
HK17106061.2A 2015-09-24 2017-06-19 Network with integrated passive device and conductive trace in packaging substrate and related modules and devices HK1232683B (en)

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HK1232683B true HK1232683B (en) 2021-01-15

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