HK1230541B - Application device and application method - Google Patents
Application device and application methodInfo
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- HK1230541B HK1230541B HK17104156.3A HK17104156A HK1230541B HK 1230541 B HK1230541 B HK 1230541B HK 17104156 A HK17104156 A HK 17104156A HK 1230541 B HK1230541 B HK 1230541B
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Description
技术领域Technical Field
本发明涉及一种具有沿直线排列的多个吐出口的涂布装置及涂布方法。The present invention relates to a coating device and a coating method having a plurality of discharge ports arranged in a straight line.
背景技术Background Art
作为在电子部件等的制造工序中对液体材料进行分配的装置,已知有通过往返移动的柱塞而吐出液体材料的吐出装置(点胶机(dispenser))。该吐出装置例如用于一边在水平方向上与工作台相对移动一边对工件进行所希望的涂布的用途。As a device for dispensing liquid materials in the manufacturing process of electronic components, etc., a dispensing device (dispenser) that discharges liquid materials using a reciprocating plunger is known. For example, this dispensing device is used to apply a desired coating to a workpiece while moving horizontally relative to a worktable.
作为使液体材料自喷嘴分离后着陆于工件的现有的吐出装置,例如具有通过在与喷嘴连接的出口附近具有阀座的流路内非接触地配置柱塞杆的侧面,且柱塞杆的前端朝阀座移动而抵接于阀座,从而使液体材料以液滴的状态自喷嘴吐出的装置(专利文献1)。As an existing discharging device for causing a liquid material to separate from a nozzle and land on a workpiece, for example, there is a device that has a side surface of a plunger rod arranged non-contactly in a flow path having a valve seat near an outlet connected to the nozzle, and the front end of the plunger rod moves toward the valve seat and abuts the valve seat, thereby causing the liquid material to be discharged from the nozzle in the form of droplets (Patent Document 1).
此外,作为使急速前进的柱塞不抵接于阀座而急剧地停止以使液体材料飞射滴落的技术,具有申请人所提出的使前端面紧贴于液体材料的液体材料吐出用柱塞高速前进,然后使柱塞驱动机构急剧停止,对液体材料施加惯性力而使液体材料吐出的液体材料的吐出方法及装置(专利文献2、3)。In addition, as a technology for causing a rapidly advancing plunger to stop suddenly without abutting against a valve seat so that the liquid material flies and drips, there is a method and device for discharging liquid material proposed by the applicant, in which a plunger for discharging liquid material is advanced at high speed, and then the plunger driving mechanism is stopped suddenly, and an inertial force is applied to the liquid material to cause the liquid material to be discharged (patent documents 2 and 3).
此外,提出了具备具有与流体通道出口连通的多个喷嘴出口的喷出喷嘴及可动地设于流体通道内而可选择性地接触于阀座的阀构件,在阀构件与阀座的接触时,将对于使多个液滴自上述多个喷嘴出口同时且迅速地喷出而言充分的运动量赋予上述流体通道出口内的液体材料的喷射式点胶机(专利文献4)。In addition, a jet dispensing machine is proposed that has a spray nozzle having multiple nozzle outlets connected to the fluid channel outlet and a valve member that is movably arranged in the fluid channel and can selectively contact the valve seat. When the valve member contacts the valve seat, a sufficient amount of motion is imparted to the liquid material in the above-mentioned fluid channel outlet for causing multiple droplets to be ejected simultaneously and rapidly from the above-mentioned multiple nozzle outlets (patent document 4).
现有技术文献Prior art literature
专利文献Patent Literature
专利文献1:日本特表2001-500962号公报Patent Document 1: Japanese Patent Application No. 2001-500962
专利文献2:日本特开2003-190871号公报Patent Document 2: Japanese Patent Application Laid-Open No. 2003-190871
专利文献3:日本特开2005-296700号公报Patent Document 3: Japanese Patent Application Laid-Open No. 2005-296700
专利文献4:日本特开2007-167844号公报Patent Document 4: Japanese Patent Application Laid-Open No. 2007-167844
发明内容Summary of the Invention
发明所要解决的问题Problems to be solved by the invention
为了实现电子设备等的制造成本的削减,要求使划线涂布的速度高速化。In order to reduce the manufacturing cost of electronic devices and the like, it is required to increase the speed of scribing coating.
专利文献4所公开的喷射式点胶机公开了具有多个吐出口的喷嘴,但其主要考虑助焊剂层的形成,对进行划线涂布的操作无任何涉及。此外,专利文献4即使在延迟点胶机的动作速度而追求高质量的方面(参照同文献段落[0007]),也可以说不是提供有助于划线涂布的高速化的技术的发明。The jet dispensing machine disclosed in Patent Document 4 features a nozzle with multiple discharge ports, but its primary purpose is to form a flux layer and has no reference to the operation of line coating. Furthermore, even though Patent Document 4 aims to achieve higher quality by slowing down the dispenser's operating speed (see paragraph [0007] of the same document), it cannot be said that the invention provides technology that contributes to faster line coating.
本发明的目的在于,提供一种能够将划线涂布的速度高速化的涂布装置及涂布方法。An object of the present invention is to provide a coating device and a coating method capable of increasing the speed of line coating.
解决问题的技术手段Technical means to solve the problem
涂布方法所涉及的本发明,其特征在于,是使用涂布装置而在涂布对象物上对描绘线进行线状涂布的方法,上述涂布装置具备:吐出装置;工作台,其载置涂布对象物;驱动装置,其使吐出装置与工作台相对移动;及控制部,其控制吐出装置及驱动装置的动作,上述吐出装置具备:喷嘴,其具有吐出液体材料的多个吐出口;液室,其经由多个吐出流路而与上述多个吐出口连通;及吐出构件,其与上述液室内的液体材料接触,通过上述吐出构件对上述液室内的液体材料赋予惯性力而自上述多个吐出口同时地吐出,并在涂布对象物上形成多个液滴,上述多个吐出口沿着直线的喷嘴配置线而配置于上述喷嘴,使上述喷嘴配置线与上述描绘线的描绘方向一致,以被吐出的多个液块在着陆于涂布对象物之前不接触,并且沿着上述喷嘴配置线着陆的液体材料在涂布对象物上结合的方式,自上述多个吐出口吐出液体材料而进行线状涂布。The present invention relates to a coating method, characterized in that it is a method for linearly coating a drawing line on a coating object using a coating device, wherein the coating device comprises: a discharge device; a workbench on which the coating object is placed; a drive device that moves the discharge device and the workbench relative to each other; and a control unit that controls the operation of the discharge device and the drive device, wherein the discharge device comprises: a nozzle having a plurality of discharge ports for discharging a liquid material; a liquid chamber that is connected to the plurality of discharge ports via a plurality of discharge flow paths; and a discharge member that is in contact with the liquid in the liquid chamber. The liquid material in the liquid chamber is brought into contact with the material, and the liquid material is simultaneously discharged from the multiple discharge ports by the discharge member, and multiple droplets are formed on the coating object. The multiple discharge ports are arranged on the nozzle along a straight nozzle configuration line, so that the nozzle configuration line is consistent with the drawing direction of the drawing line. The liquid material is discharged from the multiple discharge ports to perform linear coating in a manner such that the multiple discharged liquid blocks do not contact each other before landing on the coating object, and the liquid materials landed along the nozzle configuration line are combined on the coating object.
上述涂布方法所涉及的本发明中,其特征也可以在于,上述控制部以一边使上述吐出装置与上述工作台保持一定的速度Vc地在与喷嘴配置线相同的方向上相对移动,一边上述被吐出的多个液块的至少一个与之前刚被吐出的涂布对象物上的液体材料结合而形成描绘线的方式,根据上述吐出装置与上述工作台的相对移动速度,将吐出的时机作为一定的间隔Tc而进行线状涂布。In the present invention involving the above-mentioned coating method, it may be characterized in that the control unit controls the timing of discharge to be constant intervals Tc according to the relative movement speed of the discharge device and the worktable, so as to perform linear coating in a manner such that at least one of the plurality of discharged liquid blocks combines with the liquid material on the coating object immediately before discharge to form a drawing line while relatively moving the discharge device and the worktable at a constant speed Vc .
上述涂布方法所涉及的本发明中,其特征也可以在于,通过调节上述吐出构件的推进力,以上述被吐出的多个液块在着陆于涂布对象物之前不接触,并且沿着上述喷嘴配置线着陆的液体材料在涂布对象物上结合的方式吐出液体材料。The present invention involving the above-mentioned coating method may also be characterized in that, by adjusting the propulsion force of the above-mentioned discharging member, the liquid material is discharged in such a manner that the above-mentioned multiple liquid blocks do not contact each other before landing on the coating object, and the liquid materials landing along the above-mentioned nozzle arrangement line are combined on the coating object.
上述涂布方法所涉及的本发明中,其特征也可以在于,上述多个吐出流路以上述多个吐出流路的各中心线与上述喷嘴的中心线相交的方式具有倾斜地被配置,通过调节吐出口与涂布对象的距离h,从而对液滴间的距离进行调节。In the present invention involved in the above-mentioned coating method, its feature may also be that the above-mentioned multiple discharge flow paths are arranged at an inclination in a manner such that the center lines of each of the above-mentioned multiple discharge flow paths intersect with the center line of the above-mentioned nozzle, and the distance between the droplets is adjusted by adjusting the distance h between the discharge port and the coating object.
上述涂布方法所涉及的本发明中,其特征也可以在于,上述多个吐出口的任一个均配置在上述喷嘴配置线上。In the present invention related to the above-mentioned coating method, any one of the plurality of discharge ports may be arranged on the nozzle arrangement line.
上述涂布方法所涉及的本发明中,其特征也可以在于,上述多个吐出口均为相同形状且被配置为等间距。In the present invention related to the above-mentioned coating method, the plurality of discharge ports may be characterized in that they all have the same shape and are arranged at equal intervals.
上述涂布方法所涉及的本发明中,其特征也可以在于,上述多个吐出口由偶数个吐出口构成,包含二个大型吐出口及二个小型吐出口,吐出口的任一个均配置在上述喷嘴配置线上,上述小型吐出口及上述大型吐出口沿着上述喷嘴配置线交替地配置,或者,上述多个吐出口由偶数个吐出口构成,包含二个大型吐出口及二个小型吐出口组,上述大型吐出口的任一个均配置在上述喷嘴配置线上,上述小型吐出口组及上述大型吐出口沿着上述喷嘴配置线交替地配置,上述小型吐出口组由相对于上述喷嘴配置线对称地被配置的多个小型吐出口构成。In the present invention involved in the above-mentioned coating method, its feature may also be that the above-mentioned multiple ejection ports are composed of an even number of ejection ports, including two large ejection ports and two small ejection ports, any one of the ejection ports is arranged on the above-mentioned nozzle configuration line, and the above-mentioned small ejection ports and the above-mentioned large ejection ports are alternately arranged along the above-mentioned nozzle configuration line, or the above-mentioned multiple ejection ports are composed of an even number of ejection ports, including two large ejection ports and two small ejection port groups, any one of the above-mentioned large ejection ports is arranged on the above-mentioned nozzle configuration line, the above-mentioned small ejection port group and the above-mentioned large ejection port are alternately arranged along the above-mentioned nozzle configuration line, and the above-mentioned small ejection port group is composed of a plurality of small ejection ports arranged symmetrically with respect to the above-mentioned nozzle configuration line.
上述涂布方法所涉及的本发明中,其特征也可以在于,上述吐出装置或者上述工作台具备旋转机构,通过上述旋转机构,使上述喷嘴配置线与上述描绘线的描绘方向一致,在此优选,上述线状涂布根据包含在第一方向上延伸的直线状的涂布线、及在与第一方向不同的第二方向上延伸的直线状的涂布线的涂布图案而进行。In the present invention involved in the above-mentioned coating method, it can also be characterized in that the above-mentioned discharging device or the above-mentioned workbench has a rotating mechanism, and the above-mentioned rotating mechanism makes the above-mentioned nozzle configuration line consistent with the drawing direction of the above-mentioned drawing line. Here, preferably, the above-mentioned linear coating is carried out according to a coating pattern including a linear coating line extending in a first direction and a linear coating line extending in a second direction different from the first direction.
上述涂布方法所涉及的本发明中,其特征也可以在于,上述喷嘴相对于上述吐出装置装卸自如地被固定,上述吐出装置具有能够使上述喷嘴以上述喷嘴配置线的方向相对于上述吐出装置成为一定的方式进行安装的定位机构。The present invention involving the above-mentioned coating method may be characterized in that the nozzle is detachably fixed relative to the above-mentioned discharge device, and the above-mentioned discharge device has a positioning mechanism capable of installing the nozzle in a manner such that the direction of the nozzle arrangement line is fixed relative to the above-mentioned discharge device.
涂布装置所涉及的本发明,其特征在于,具备吐出装置、载置涂布对象物的工作台、使吐出装置与工作台相对移动的驱动装置、及控制吐出装置及驱动装置的动作的控制部,上述吐出装置具备:喷嘴,其具有吐出液体材料的多个吐出口;液室,其经由多个吐出流路而与上述多个吐出口连通;及吐出构件,其与上述液室内的液体材料接触,通过上述吐出构件对上述液室内的液体材料赋予惯性力且自上述多个吐出口同时地吐出,并在涂布对象物上形成多个液滴,上述多个吐出口沿着直线的喷嘴配置线而配置于上述喷嘴,上述控制部在使上述喷嘴配置线与描绘线的描绘方向一致的状态下,以被吐出的多个液块在着陆于涂布对象物之前不接触,并且沿着上述喷嘴配置线着陆的液体材料在涂布对象物上结合的方式,自上述多个吐出口吐出液体材料而进行线状涂布。The present invention relates to a coating apparatus, characterized by comprising a discharge device, a worktable on which an object to be coated is placed, a drive device for relatively moving the discharge device and the worktable, and a control unit for controlling the operation of the discharge device and the drive unit. The discharge device comprises: a nozzle having a plurality of discharge ports for discharging a liquid material; a liquid chamber connected to the plurality of discharge ports via a plurality of discharge flow paths; and a discharge member in contact with the liquid material in the liquid chamber, wherein the discharge member imparts an inertial force to the liquid material in the liquid chamber, causing the liquid material to be simultaneously discharged from the plurality of discharge ports to form a plurality of liquid droplets on the object to be coated. The plurality of discharge ports are arranged along a linear nozzle arrangement line relative to the nozzle. The control unit discharges the liquid material from the plurality of discharge ports to perform linear coating, with the nozzle arrangement line aligned with a drawing direction of a drawing line, so that the plurality of discharged liquid clumps do not contact each other before landing on the object to be coated, and the liquid material landing along the nozzle arrangement line is combined on the object to be coated.
上述涂布装置所涉及的本发明中,其特征也可以在于,上述控制部以一边使上述吐出装置与上述工作台保持一定的速度Vc地在与喷嘴配置线相同的方向上相对移动,一边上述被吐出的多个液块的至少一个与之前刚被吐出的涂布对象物上的液体材料结合而形成描绘线的方式,根据上述吐出装置与上述工作台的相对移动速度,将吐出的时机作为一定的间隔Tc而进行线状涂布。In the present invention involving the above-mentioned coating device, it may be characterized in that the above-mentioned control unit is configured to perform linear coating by setting the timing of discharge at a constant interval Tc according to the relative movement speed of the above-mentioned discharge device and the above-mentioned worktable so as to move the above-mentioned discharge device and the above-mentioned worktable relative to each other at a constant speed Vc in the same direction as the nozzle arrangement line, so that at least one of the plurality of discharged liquid blocks combines with the liquid material on the coating object immediately before discharge to form a drawing line.
上述涂布装置所涉及的本发明中,其特征也可以在于,上述控制部通过调节上述吐出构件的推进力,以上述被吐出的多个液块在着陆于涂布对象物之前不接触,并且沿着上述喷嘴配置线着陆的液体材料在涂布对象物上结合的方式吐出液体材料。In the present invention involving the above-mentioned coating device, it can also be characterized in that the above-mentioned control unit adjusts the propulsion force of the above-mentioned discharging member to discharge the liquid material in a manner such that the multiple liquid blocks discharged do not contact each other before landing on the coating object, and the liquid materials landing along the above-mentioned nozzle configuration line are combined on the coating object.
上述涂布装置所涉及的本发明中,其特征也可以在于,上述多个吐出流路以上述多个吐出流路的各中心线与上述喷嘴的中心线相交的方式具有倾斜地被配置。In the present invention related to the coating apparatus described above, the plurality of discharge flow paths may be arranged with an inclination such that each center line of the plurality of discharge flow paths intersects with a center line of the nozzle.
上述涂布装置所涉及的本发明中,其特征也可以在于,上述多个吐出口的任一个均配置在上述喷嘴配置线上。In the present invention related to the coating apparatus described above, any one of the plurality of discharge ports may be arranged on the nozzle arrangement line.
上述涂布装置所涉及的本发明中,其特征也可以在于,上述多个吐出口均为相同形状且被配置为等间距。In the present invention related to the coating device described above, the plurality of discharge ports may have the same shape and be arranged at equal intervals.
上述涂布装置所涉及的本发明中,其特征也可以在于,上述多个吐出口由偶数个吐出口构成,包含二个大型吐出口及二个小型吐出口,吐出口的任一个均配置在上述喷嘴配置线上,上述小型吐出口及上述大型吐出口沿着上述喷嘴配置线交替地配置,或者,上述多个吐出口由偶数个吐出口构成,包含二个大型吐出口及二个小型吐出口组,上述大型吐出口的任一个均配置在上述喷嘴配置线上,上述小型吐出口组及上述大型吐出口沿着上述喷嘴配置线交替地配置,上述小型吐出口组由相对于上述喷嘴配置线对称地被配置的多个小型吐出口构成。In the present invention involved in the above-mentioned coating device, its feature may also be that the above-mentioned multiple outlets are composed of an even number of outlets, including two large outlets and two small outlets, any one of the outlets is arranged on the above-mentioned nozzle configuration line, and the above-mentioned small outlets and the above-mentioned large outlets are alternately arranged along the above-mentioned nozzle configuration line, or the above-mentioned multiple outlets are composed of an even number of outlets, including two large outlets and two small outlet groups, any one of the above-mentioned large outlets is arranged on the above-mentioned nozzle configuration line, the above-mentioned small outlet group and the above-mentioned large outlet are alternately arranged along the above-mentioned nozzle configuration line, and the above-mentioned small outlet group is composed of a plurality of small outlets arranged symmetrically with respect to the above-mentioned nozzle configuration line.
上述涂布装置所涉及的本发明中,其特征也可以在于,上述吐出装置或者上述工作台具备旋转机构,上述控制部通过上述旋转机构使上述喷嘴配置线与上述描绘线的描绘方向一致。In the present invention related to the coating apparatus, the discharge device or the table may include a rotation mechanism, and the control unit may align the drawing direction of the nozzle arrangement line with that of the drawing line by using the rotation mechanism.
上述涂布装置所涉及的本发明中,其特征也可以在于,上述驱动装置包含能够使上述吐出装置及上述工作台相对地进行直线移动的单轴驱动机构,上述喷嘴配置线与上述单轴驱动机构的驱动方向一致而被配置。In the present invention related to the coating device, the driving device may include a uniaxial driving mechanism capable of linearly moving the discharge device and the worktable relative to each other, and the nozzle arrangement line may be arranged to coincide with a driving direction of the uniaxial driving mechanism.
上述涂布装置所涉及的本发明中,其特征也可以在于,上述喷嘴相对于上述吐出装置装卸自如地被固定,上述吐出装置能够使上述喷嘴以上述喷嘴配置线的方向相对于上述吐出装置成为一定的方式进行安装的定位机构。The present invention involving the coating device may be characterized in that the nozzle is detachably fixed to the discharge device, and the discharge device has a positioning mechanism capable of mounting the nozzle in a fixed direction relative to the discharge device along the nozzle arrangement line.
上述涂布装置所涉及的本发明中,其特征也可以在于,上述吐出装置具备:柱塞,其相较于上述液室为小径,前端部在液室内进行进退移动;柱塞往返移动装置,其使上述柱塞进退移动;及送液装置,其将液体材料供给至上述液室;在上述柱塞的前端部的侧面与上述液室的内侧壁非接触的状态下,通过使柱塞进行进入移动及进入停止,从而对液体材料赋予惯性力且自上述多个吐出口同时地吐出。In the present invention involved in the above-mentioned coating device, its feature may also be that the above-mentioned discharging device includes: a plunger having a smaller diameter than the above-mentioned liquid chamber, and a front end portion that moves forward and backward in the liquid chamber; a plunger reciprocating movement device that causes the above-mentioned plunger to move forward and backward; and a liquid feeding device that supplies liquid material to the above-mentioned liquid chamber; in a state where the side surface of the front end portion of the above-mentioned plunger is non-contacting with the inner wall of the above-mentioned liquid chamber, the plunger is moved into and stopped, thereby giving inertial force to the liquid material and discharging it simultaneously from the above-mentioned multiple discharge ports.
发明的效果Effects of the Invention
根据本发明,能够将划线涂布的速度高速化。According to the present invention, the speed of line coating can be increased.
另外,通过将吐出的时机作为一定的间隔Tc而进行线状涂布,可提高吐出量精度及吐出位置精度。Furthermore, by setting the ejection timing to a constant interval Tc and performing linear coating, the ejection amount accuracy and ejection position accuracy can be improved.
再有,根据具备吐出流路具有倾斜的结构的本发明,通过调节吐出口及涂布对象物的距离,可对同时吐出的液滴间的距离进行调节。Furthermore, according to the present invention having a structure in which the discharge flow path has an inclination, the distance between the simultaneously discharged droplets can be adjusted by adjusting the distance between the discharge port and the coating object.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1为显示第一实施方式例的涂布装置的立体图。FIG1 is a perspective view showing a coating apparatus according to a first embodiment.
图2为第一实施方式例的吐出装置的主要部分侧面截面图。FIG2 is a side cross-sectional view of a main part of the discharge device according to the first embodiment.
图3为第一实施方式例的喷嘴构件的(a)底面图、(b)侧面截面图。FIG3 is a bottom view (a) and a side cross-sectional view (b) of the nozzle member according to the first embodiment.
图4为显示第一实施方式例中的一次的吐出工序的图,(a)显示被吐出的液滴着陆于涂布对象物之前的时刻,(b)显示被吐出的液滴着陆于涂布对象物的时刻,(c)显示着陆后经过了短暂时间的时刻,(d)显示自(c)的时刻起经过了短暂时间的时刻,(e)显示自(d)的时刻起经过了短暂时间的时刻。Figure 4 is a diagram showing a single discharging process in the first embodiment, (a) shows the moment before the discharged droplets land on the coating object, (b) shows the moment when the discharged droplets land on the coating object, (c) shows the moment a short time has passed after the landing, (d) shows the moment a short time has passed since the moment of (c), and (e) shows the moment a short time has passed since the moment of (d).
图5为显示第一实施方式例的涂布装置的多次的吐出工序的图,(a)为自侧方观察刚进行第一发射后的时刻的图,(b)为自侧方及上方观察刚进行第二发射后的时刻的图,(c)为自侧方及上方观察刚进行第三发射后的时刻的图,(d)为自侧方及上方观察刚进行第四发射后的时刻的图,(e)为自侧方及上方观察刚进行第五发射后的时刻的图。Figure 5 is a diagram showing multiple discharging processes of the coating device of the first embodiment, (a) is a diagram viewed from the side at the moment just after the first emission, (b) is a diagram viewed from the side and above at the moment just after the second emission, (c) is a diagram viewed from the side and above at the moment just after the third emission, (d) is a diagram viewed from the side and above at the moment just after the fourth emission, and (e) is a diagram viewed from the side and above at the moment just after the fifth emission.
图6为说明二个液滴在飞翔中结合的情况的侧面图,(a)显示液块刚被吐出后的时刻,(b)显示自(a)的时刻起经过了短暂时间的时刻,(c)显示被同时吐出的液块着陆于涂布对象物的时刻。FIG6 is a side view illustrating the merging of two droplets in flight. (a) shows the moment immediately after the liquid block is ejected, (b) shows the moment a short time has passed since (a), and (c) shows the moment when the simultaneously ejected liquid block lands on the coating object.
图7为第二实施方式例的喷嘴构件的(a)底面图、(b)侧面截面图。FIG7 is a (a) bottom view and (b) side cross-sectional view of a nozzle member according to a second embodiment.
图8为第三实施方式例的喷嘴构件的底面图。FIG8 is a bottom view of a nozzle member according to a third embodiment.
图9为自上面观察第三实施方式例中被同时吐出的四个液滴结合的状况的想象图。FIG. 9 is an imaginary view showing a state in which four liquid droplets discharged simultaneously merge in the third embodiment, as viewed from above.
图10为第四实施方式例的喷嘴构件的底面图。FIG10 is a bottom view of a nozzle member according to a fourth embodiment.
图11为自上面观察第四实施方式例中被同时吐出的六个液滴结合的状况的想象图。FIG. 11 is an imaginary view showing the state of six liquid droplets discharged simultaneously coalescing in the fourth embodiment, as viewed from above.
图12为第五实施方式例的喷嘴构件的(a)侧面截面图、及(b)说明吐出口与工件的距离及液滴间的距离的关系的侧面图。12 is (a) a side sectional view of a nozzle member according to a fifth embodiment, and (b) a side view illustrating the relationship between the distance between the discharge port and the workpiece and the distance between liquid droplets.
图13为着陆于涂布对象物的二个液滴在涂布对象物上不结合的情况下的涂布方法的说明图,(a)显示第1次吐出,(b)显示第2次吐出,(c)显示第3次吐出,(d)显示第4次吐出。FIG13 is an explanatory diagram of a coating method in which two liquid droplets land on a coating object and do not combine on the coating object, wherein (a) shows the first discharge, (b) shows the second discharge, (c) shows the third discharge, and (d) shows the fourth discharge.
具体实施方式DETAILED DESCRIPTION
以下,一边参照附图一边对本发明的实施方式例进行说明。Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.
《第一实施方式例》First Implementation Example
<涂布装置><Coating device>
如图1所示,第一实施方式例的涂布装置200具备:吐出装置1;基座201;载置涂布对象物207的工作台202;使吐出装置与工作台沿X方向相对移动的X驱动装置203;使吐出装置与工作台沿Y方向相对移动的Y驱动装置204;使吐出装置与工作台沿Z方向相对移动的Z驱动装置205;及控制吐出装置1及XYZ驱动装置(203、204、205)的动作的控制装置206。As shown in FIG1 , a coating apparatus 200 according to a first embodiment includes: a discharging apparatus 1; a base 201; a worktable 202 on which a coating object 207 is placed; an X-drive device 203 for moving the discharging apparatus and the worktable relative to each other in the X direction; a Y-drive device 204 for moving the discharging apparatus and the worktable relative to each other in the Y direction; a Z-drive device 205 for moving the discharging apparatus and the worktable relative to each other in the Z direction; and a control device 206 for controlling the operation of the discharging apparatus 1 and the XYZ-drive devices (203, 204, 205).
再者,X方向是指平面中的一个方向,Y方向是指平面中的与X方向正交的方向,Z方向是指与平面正交的方向。Furthermore, the X direction refers to one direction in a plane, the Y direction refers to a direction in the plane that is perpendicular to the X direction, and the Z direction refers to a direction perpendicular to the plane.
本实施方式例中,以X驱动装置及Y驱动装置的移动方向为水平方向,Z驱动装置的移动方向为铅垂方向的方式构成,但也可设为其以外的移动方向。此外,X驱动装置、Y驱动装置及Z驱动装置不一定全部需要,例如,涂布图案仅由一方向的直线构成的情况下,通过仅配置朝一方向移动的驱动装置(仅X驱动装置或Y驱动装置),从而可进行本发明的涂布。In this embodiment, the X-drive and Y-drive devices move in the horizontal direction, while the Z-drive device moves in the vertical direction. However, other movement directions are also possible. Furthermore, not all of the X-drive, Y-drive, and Z-drive devices are required. For example, if the coating pattern consists of only straight lines in one direction, coating according to the present invention can be performed by arranging only a drive device that moves in one direction (only the X-drive or the Y-drive).
<吐出装置><Discharge device>
如图2所示,吐出装置1的主体具备主体上部2及主体下部3而被构成。As shown in FIG. 2 , the main body of the discharge device 1 is configured to include a main body upper portion 2 and a main body lower portion 3 .
主体上部2具有贯通中心的贯通孔21及活塞室(22、23),柱塞10插通于贯通孔21及活塞室。柱塞10是细长的圆柱棒,且贯通活塞11。活塞11是在侧周面设置有环状的密封构件12的圆盘状的构件。活塞11将圆柱状的活塞室气密性地分隔为下方室22及上方室23,一边在活塞室内滑动一边上下移动。活塞11与柱塞10连结,随着活塞11上下移动,柱塞10也上下移动。以下,有称柱塞10朝下方的移动的情况为进入移动,称柱塞10朝上方的移动的情况为后退移动的情况。The upper portion 2 of the main body has a through hole 21 extending through the center and a piston chamber (22, 23), and the plunger 10 is inserted into the through hole 21 and the piston chamber. The plunger 10 is a slender cylindrical rod that passes through the piston 11. The piston 11 is a disc-shaped component having an annular sealing component 12 provided on the side circumference. The piston 11 airtightly separates the cylindrical piston chamber into a lower chamber 22 and an upper chamber 23, and moves up and down while sliding in the piston chamber. The piston 11 is connected to the plunger 10, and as the piston 11 moves up and down, the plunger 10 also moves up and down. Hereinafter, the downward movement of the plunger 10 is referred to as an entry movement, and the upward movement of the plunger 10 is referred to as a retreat movement.
活塞11通过配置于上方室23内的弹性构件13而被朝下方施力。在下方室22的侧面设置有与电磁切换阀16连通的下方通气口24,在下方室22的底面设置有柱塞10被插通的环状的密封构件26。电磁切换阀16具有将下方通气口24与气体供给源19连通的第一位置、及将下方通气口24与外部空气连通的第二位置。当电磁切换阀16位于第一位置时,自气体供给源19供给的加压气体经由调节器(regulator)18而供给至下方通气口24,柱塞前端面103自液室的底面412远离。当电磁切换阀16位于第二位置时,活塞11通过弹性构件13的作用力而朝下方移动,与活塞11朝下方移动一起柱塞10进行进入移动。由此,柱塞前端面103落座于液室的底面412,通过柱塞10而被赋予了推进力的液室内的液体材料,自吐出口(51、52)吐出。The piston 11 is urged downward by the elastic member 13 disposed in the upper chamber 23. A lower air vent 24 connected to the electromagnetic switching valve 16 is provided on the side of the lower chamber 22, and an annular sealing member 26 through which the plunger 10 is inserted is provided on the bottom surface of the lower chamber 22. The electromagnetic switching valve 16 has a first position in which the lower air vent 24 is connected to the gas supply source 19, and a second position in which the lower air vent 24 is connected to the outside air. When the electromagnetic switching valve 16 is in the first position, the pressurized gas supplied from the gas supply source 19 is supplied to the lower air vent 24 via the regulator 18, and the front end face 103 of the plunger moves away from the bottom surface 412 of the liquid chamber. When the electromagnetic switching valve 16 is in the second position, the piston 11 moves downward by the force of the elastic member 13, and the plunger 10 moves inward together with the downward movement of the piston 11. As a result, the plunger front end surface 103 is seated on the bottom surface 412 of the liquid chamber, and the liquid material in the liquid chamber, to which the propulsive force is applied by the plunger 10, is discharged from the discharge ports (51, 52).
再者,也可构成为通过使柱塞10的进入移动在柱塞前端面103即将落座于液室的底面412之前停止,对液室内的液体材料赋予推进力而进行吐出。作为使柱塞前端面不落座而吐出液滴的吐出装置,例如,具有申请人在WO2008/108097公报、日本特开2013-081884中公开的装置。Furthermore, a configuration may be employed in which the plunger 10 is stopped immediately before the plunger front end face 103 seats on the bottom surface 412 of the liquid chamber, thereby imparting a propulsive force to the liquid material in the liquid chamber and causing it to be discharged. Examples of a discharge device that discharges liquid droplets without seating the plunger front end face include those disclosed in WO 2008/108097 and Japanese Patent Application Laid-Open No. 2013-081884 by the applicant.
本实施方式例中,例示了使用柱塞10作为对液室内的液体材料赋予惯性力的吐出构件的结构,但吐出构件不限于此。本发明的吐出构件中还包含例如在与吐出口连通的液室内,产生可动阀体、静电式、压电式等的致动器、隔板(diaphragm)及强制变形机构(例如,敲打锤及螺线管(solenoid)等与杆的组合、高压流体)、气泡产生用加热器、等的压力的机构。In this embodiment, the plunger 10 is used as a discharge member for imparting inertial force to the liquid material in the liquid chamber, but the discharge member is not limited thereto. The discharge member of the present invention also includes, for example, a mechanism for generating pressure in the liquid chamber connected to the discharge port, such as a movable valve body, an electrostatic or piezoelectric actuator, a diaphragm, a forced deformation mechanism (e.g., a combination of a hammer or solenoid with a rod, or a high-pressure fluid), a bubble generating heater, and the like.
通过位于柱塞10的下方的前端部101在液室内反复进行进退移动而连续吐出液体材料。在柱塞10进行进退移动的期间,柱塞的前端部的侧面102不会接触于液室的内侧壁411(参照图3(b))。本实施方式例中,将柱塞前端面103构成为半球状,但柱塞前端面103的形状不限于此,例如,也可为平面或与吐出口同心且相同数量的带有突起的平面。Liquid material is continuously discharged by repeatedly moving the front end 101 located below the plunger 10 forward and backward within the liquid chamber. During this movement of the plunger 10, the side surface 102 of the front end of the plunger does not contact the inner wall 411 of the liquid chamber (see FIG3( b )). In this embodiment, the plunger front end surface 103 is hemispherical, but the shape of the plunger front end surface 103 is not limited to this. For example, it may be a flat surface or a flat surface with the same number of protrusions as the discharge port, concentric with the discharge port.
柱塞10的后退位置通过止动器14规定。止动器14的位置可通过旋转测微计15而进行调节。The retracted position of the plunger 10 is defined by a stopper 14. The position of the stopper 14 can be adjusted by rotating a micrometer 15.
在主体上部2的下端接合有主体下部3。主体下部3具有贯通中心的贯通孔31,在贯通孔31插通有柱塞10。贯通孔31与液室41连通,但在贯通孔31的下端设置有环状的密封构件32,因而液室内的液体材料不会朝贯通孔31逆流。液室41是上下延伸的圆柱状的空间,在上方部分与供给液体材料的供给路径33连通。供给路径33经由设于安装构件4的送液路径42而与送液构件6的送液路径61连通。本实施方式例中,将供给路径33、送液路径42及送液路径61水平地构成,但当然也可设置角度而构成。The main body lower portion 3 is joined to the lower end of the main body upper portion 2. The main body lower portion 3 has a through hole 31 extending through the center, and a plunger 10 is inserted into the through hole 31. The through hole 31 is connected to the liquid chamber 41, but an annular sealing member 32 is provided at the lower end of the through hole 31, so that the liquid material in the liquid chamber does not flow back toward the through hole 31. The liquid chamber 41 is a cylindrical space extending up and down, and is connected to a supply path 33 for supplying liquid material at the upper part. The supply path 33 is connected to the liquid supply path 61 of the liquid supply member 6 via the liquid supply path 42 provided on the mounting member 4. In the present embodiment, the supply path 33, the liquid supply path 42 and the liquid supply path 61 are configured horizontally, but they can also be configured at an angle.
如图3(a)所示,喷嘴构件5具有设置于直线的喷嘴配置线20上的同径圆形的第1吐出口51及第2吐出口52。第1吐出口51及第2吐出口52的直径D1,例如为数μm~数mm,优选为数十μm~数百μm。第1吐出口51及第2吐出口52的形状不限于例示的圆形,例如,公开有沿喷嘴配置线20延伸的椭圆形。多个吐出口的形状乃至配置图案,优选构成夹着喷嘴配置线20而对称的形状。这也适用于喷嘴构件5的下端不是平面而具有凹凸的形状的情况。As shown in FIG3(a), the nozzle member 5 includes a first discharge port 51 and a second discharge port 52, each of the same diameter and circular, disposed on a straight nozzle arrangement line 20. The diameter D1 of the first discharge port 51 and the second discharge port 52 is, for example, several μm to several mm, preferably tens to hundreds of μm. The shapes of the first discharge port 51 and the second discharge port 52 are not limited to the circular shapes shown in the example; for example, an elliptical shape extending along the nozzle arrangement line 20 is disclosed. The shapes and even the arrangement pattern of the multiple discharge ports are preferably symmetrical with respect to the nozzle arrangement line 20. This also applies to the case where the lower end of the nozzle member 5 is not flat but has a concave-convex shape.
第1吐出口51及第2吐出口52的最接近距离(第1吐出口51的右端与第2吐出口52的左端的距离)L1,设定为无论在何种情况下皆大于直径D1,例如设定为D1的2~10倍。换言之,是多个吐出口沿直线的喷嘴配置线而配置于喷嘴构件,并且着陆于涂布对象物的液体材料结合而形成涂布线的距离。The closest distance L 1 between the first and second discharge ports 51, 52 (the distance between the right end of the first discharge port 51 and the left end of the second discharge port 52) is set to be larger than the diameter D 1 in all cases, for example, 2 to 10 times D 1. In other words, this is the distance at which the multiple discharge ports are arranged on the nozzle member along a linear nozzle arrangement line and the liquid material that lands on the coating object combines to form a coating line.
当将吐出装置1搭载于涂布装置200时,喷嘴配置线20配置为与描绘线的描绘方向一致。也可在工作台202或吐出装置1设置朝θ方向(以工作台的垂线为中心的旋转方向)旋转的旋转机构,以使喷嘴配置线20与描绘线的描绘方向能够动态地一致。在此,使喷嘴配置线20与描绘线的描绘方向一致的意义,换言之而在于,在将喷嘴配置线投影于描绘线上时,描绘线与喷嘴配置线的方向一致,或者,对相对于液体材料的吐出方向呈直角的平面进行喷嘴配置线20与描绘线的正投影的情况下,喷嘴配置线20与描绘线的方向一致。进一步换言之,在包含自吐出口吐出的液体材料的吐出方向的平面具有描绘线。这也可应用于涂布对象物的表面不是平面的情况或倾斜的情况。When the discharge device 1 is mounted on the coating device 200, the nozzle configuration line 20 is configured to be consistent with the drawing direction of the drawing line. A rotating mechanism that rotates in the θ direction (the rotation direction centered on the vertical line of the workbench) can also be set on the workbench 202 or the discharge device 1 so that the nozzle configuration line 20 and the drawing direction of the drawing line can be dynamically consistent. Here, the meaning of making the nozzle configuration line 20 consistent with the drawing direction of the drawing line is, in other words, when the nozzle configuration line is projected onto the drawing line, the drawing line and the direction of the nozzle configuration line are consistent, or when the nozzle configuration line 20 and the drawing line are projected orthographically onto a plane that is at right angles to the discharge direction of the liquid material, the nozzle configuration line 20 and the direction of the drawing line are consistent. In other words, there is a drawing line on the plane containing the discharge direction of the liquid material discharged from the discharge port. This can also be applied to cases where the surface of the coating object is not flat or tilted.
在此,本实施方式例中的液体材料的吐出方向,更正确而言是指将工作台与吐出装置的相对移动停止而吐出的情况下的液体材料的吐出方向。如本实施方式例那样,在液体材料的吐出方向与铅垂方向相等的情况下,相对于上述的液体材料的吐出方向成为直角的线,成为水平面上的线。Here, the discharge direction of the liquid material in this embodiment more accurately refers to the discharge direction of the liquid material when the relative movement between the worktable and the discharge device is stopped and the liquid material is discharged. As in this embodiment, when the discharge direction of the liquid material is equal to the vertical direction, the line at right angles to the discharge direction of the liquid material is a line on the horizontal plane.
另一方面,在由具有弯曲部位的多个直线构成涂布图案的情况下,必须在工作台202或Z轴驱动装置205设置朝θ方向旋转的旋转机构。例如,在涂布图案为四边形且四边形的一个顶点为涂布开始点及涂布结束点的情况下,弯曲部位为3个。旋转机构例如可使用公知的伺服马达而构成。On the other hand, when the coating pattern is composed of multiple straight lines with curved portions, a rotation mechanism that rotates in the θ direction must be provided on the worktable 202 or the Z-axis drive device 205. For example, when the coating pattern is a quadrilateral with one vertex of the quadrilateral serving as the coating start and end points, there are three curved portions. The rotation mechanism can be constructed using, for example, a known servo motor.
此外,在涂布图案具有直线部的情况下,将涂布对象物配置于工件202上以使直线部的方向与X方向或Y方向一致,并且喷嘴配置线20配置成与直线部为相同方向。由此,在直线部的涂布时,可仅驱动X驱动装置203或Y驱动装置204的任一方来进行涂布,从而可更精度良好地涂布形成涂布线。Furthermore, when the coating pattern has a straight portion, the coating object is placed on the workpiece 202 so that the direction of the straight portion aligns with the X or Y direction, and the nozzle arrangement line 20 is arranged so that it is oriented in the same direction as the straight portion. Thus, when coating the straight portion, only one of the X drive unit 203 or the Y drive unit 204 can be driven to perform coating, thereby achieving more precise coating and formation of the coating line.
即,在XYZ驱动装置(203、204、205)包含可使吐出装置1与工作台202相对地直线移动的单轴驱动装置(X驱动装置或Y驱动装置)的情况下,优选喷嘴配置线20配置为与该单轴驱动装置的驱动方向(X方向或Y方向)一致。这样的配置对不具有上述的旋转机构的情况特别有效。That is, when the XYZ drive device (203, 204, 205) includes a single-axis drive device (X drive device or Y drive device) that can linearly move the discharge device 1 and the worktable 202 relative to each other, it is preferable to arrange the nozzle arrangement line 20 so that the driving direction (X direction or Y direction) of the single-axis drive device is aligned. This arrangement is particularly effective when the above-mentioned rotation mechanism is not provided.
如图3(b)所示,第1吐出口51经由细径的第1吐出流路54及大径吐出流路57而与液室41连通。此外,第2吐出口52经由细径的第2吐出流路55及大径吐出流路57而与液室41连通。第1吐出流路54及第2吐出流路55是相同形状,中心轴皆位于铅垂方向。As shown in FIG3(b), the first discharge port 51 communicates with the liquid chamber 41 via a first discharge flow path 54 having a small diameter and a discharge flow path 57 having a large diameter. Furthermore, the second discharge port 52 communicates with the liquid chamber 41 via a second discharge flow path 55 having a small diameter and a discharge flow path 57 having a large diameter. The first discharge flow path 54 and the second discharge flow path 55 have the same shape, and both have their central axes located in the vertical direction.
第1吐出流路54及第2吐出流路55也可构成为不设置大径吐出流路57而直接与液室41连通。此外,也可通过独立的各2条细径流路及大径流路而构成直接连通于液室41的第1吐出流路54及第2吐出流路55。The first discharge flow path 54 and the second discharge flow path 55 may be configured to communicate directly with the liquid chamber 41 without providing the large-diameter discharge flow path 57. Alternatively, the first discharge flow path 54 and the second discharge flow path 55 may be configured to communicate directly with the liquid chamber 41 by two independent small-diameter flow paths and a large-diameter flow path.
设于平面的喷嘴构件5的下端面的第1吐出口51及第2吐出口52,朝下方开口,在喷嘴构件5的下端面水平(相对于液体材料的吐出方向呈直角的方向)地配置的状态下,液体材料自这些吐出口滴落。The first discharge port 51 and the second discharge port 52 provided on the lower end surface of the planar nozzle member 5 are open downward, and the liquid material drips from these discharge ports when the lower end surface of the nozzle member 5 is arranged horizontally (at right angles to the discharge direction of the liquid material).
喷嘴构件5在上端具有凸缘部58,且由该凸缘部58而被支撑于安装构件4。安装构件4在支撑喷嘴构件5的状态下螺接于主体下部3或通过螺钉等的固定件而装卸自如地被固定。由于喷嘴构件5通过安装构件4而装卸自如地被安装,因而根据用途对吐出口的直径及最接近距离不同的多个喷嘴构件5进行交换也是容易的。用以装卸喷嘴构件5的方式无限制,但优选设置能够以使喷嘴配置线20的方向及位置相对于吐出装置1成为一定的方式进行安装的定位机构。作为定位机构可使用公知的定位机构,例如,可列举喷嘴构件5或主体下部3侧的构件的一部分(例如,销、凸部、缺口)嵌合于另一方的构件而进行定位的结构、或使用另外准备的构件(例如,销或螺钉)进行定位的结构。The nozzle member 5 has a flange portion 58 at the upper end, and is supported on the mounting member 4 by the flange portion 58. The mounting member 4 is screwed to the lower part 3 of the main body or fixed in a detachable manner by a fixing member such as a screw while supporting the nozzle member 5. Since the nozzle member 5 is detachably mounted by the mounting member 4, it is easy to replace multiple nozzle members 5 with different discharge port diameters and closest distances according to the intended use. There is no restriction on the method for mounting and removing the nozzle member 5, but it is preferable to provide a positioning mechanism that can be installed in a manner such that the direction and position of the nozzle configuration line 20 are fixed relative to the discharge device 1. As the positioning mechanism, a well-known positioning mechanism can be used, for example, a structure in which a part of the member on the side of the nozzle member 5 or the lower part 3 of the main body (for example, a pin, a protrusion, a notch) is engaged with the member on the other side for positioning, or a structure in which a separately prepared member (for example, a pin or a screw) is used for positioning.
在安装构件4的侧面固定设置有送液构件6。在送液构件6的上面连结有液体贮存容器7。液体贮存容器7经由气压式点胶机8而自气体供给源9接收加压气体的供给。再者,自气体供给源9供给的加压气体,也有为大气以外的气体(例如,氮气)的情况。A liquid supply member 6 is fixedly mounted on the side of the mounting member 4. A liquid storage container 7 is connected to the upper surface of the liquid supply member 6. The liquid storage container 7 receives a supply of pressurized gas from a gas supply source 9 via a pneumatic dispenser 8. The pressurized gas supplied from the gas supply source 9 may be a gas other than atmospheric air (e.g., nitrogen).
<XYZ驱动装置><XYZ drive unit>
XYZ驱动装置(203、204、205)例如具备公知的XYZ轴伺服马达及滚珠螺杆而被构成,可使吐出装置1的吐出口(51、52)以任意的速度移动至工件的任意的位置。XYZ驱动装置(203、204、205)的动作通过控制装置206控制。The XYZ drive devices (203, 204, 205) are configured, for example, with known XYZ axis servo motors and ball screws, and can move the discharge ports (51, 52) of the discharge device 1 to any position on the workpiece at any speed. The operation of the XYZ drive devices (203, 204, 205) is controlled by a control device 206.
<控制装置><Control device>
控制装置206具备处理装置、储存涂布程序的存储装置及输入装置而被构成,例如,可使用个人计算机或可编程控制器等。控制装置206既可全部内置于基座201,也可一部分设置于基座201的外部,且通过有线或无线连接。控制装置206自输入装置接收包含涂布图案、涂布基准位置、相对移动速度、吐出时机、柱塞进退速度的涂布控制数据,且存储于存储装置。处理装置读出存储于存储装置的涂布控制数据,执行下述的涂布动作。The control device 206 is composed of a processing device, a storage device for storing a coating program, and an input device. For example, a personal computer or a programmable controller can be used. The control device 206 can be completely built into the base 201, or a part of it can be set outside the base 201 and connected by wire or wireless. The control device 206 receives coating control data including a coating pattern, a coating reference position, a relative movement speed, a discharge timing, and a plunger advance and retreat speed from the input device, and stores it in the storage device. The processing device reads the coating control data stored in the storage device and performs the coating action described below.
<涂布动作><Coating action>
涂布装置200的涂布动作是在X方向、Y方向或倾斜方向(与X方向或Y方向构成角度的方向)上进行线状涂布(划线涂布)的动作,如下所述进行。The coating operation of the coating device 200 is linear coating (line coating) in the X direction, the Y direction, or an oblique direction (a direction forming an angle with the X direction or the Y direction), and is performed as follows.
图4(a)显示自喷嘴构件5的吐出口(51、52)吐出液滴(151、152)且着陆于涂布对象物(工件)之前的时刻。如同图所示,本发明中,以被吐出的液体材料在工件上成为液滴的状态为前提。在此,自吐出口(51、52)吐出的液体材料,既可在自吐出口分离之后形成液滴,也可在接触于工件之后与吐出口分离,而在涂布对象物上形成液滴。本说明书中,有时将自吐出口吐出且自吐出口分离之前的液体材料、及自吐出口吐出后被分离且着陆于工件之前的液滴统称为“液块”。FIG4(a) shows the moment when droplets (151, 152) are discharged from the discharge port (51, 52) of the nozzle member 5 and before they land on the coating object (workpiece). As shown in the figure, in the present invention, it is assumed that the discharged liquid material is in the state of droplets on the workpiece. Here, the liquid material discharged from the discharge port (51, 52) may form droplets after separating from the discharge port, or may separate from the discharge port after contacting the workpiece and form droplets on the coating object. In this specification, the liquid material discharged from the discharge port and before it separates from the discharge port, and the droplets discharged from the discharge port and separated before they land on the workpiece are sometimes collectively referred to as "liquid blocks".
关于液体材料接触于工件之后与吐出口分离而在涂布对象物上形成液滴的涂布方法,例如申请人在WO2008/146464中进行公开。为了使液体材料在接触于涂布对象物之后与吐出口分离,优选相比于与工件接触前的吐出口(喷嘴)连接的状态的液体材料的高度h0使吐出口与工件的距离h1小于数倍来进行吐出动作,更优选将吐出口与工件的距离h1设定为小于h0的2倍(h0<h1<h0×2)。A coating method in which a liquid material contacts a workpiece and then separates from a discharge port, thereby forming droplets on the coating object, is disclosed, for example, in WO2008/146464. To separate the liquid material from the discharge port after contacting the coating object, the discharge operation is preferably performed with the distance h1 between the discharge port and the workpiece smaller than several times the height h0 of the liquid material when the discharge port (nozzle) is connected to the workpiece before contact. More preferably, the distance h1 between the discharge port and the workpiece is set to less than twice h0 ( h0 < h1 < h0 × 2).
为了使着陆于涂布对象物上的接近位置的二个液滴迅速扩散而结合,需要对液滴赋予一定以上的推进力。然而,实验的结果,确认到对于现有的喷射式吐出装置中吐出的液滴而言,赋予对于实现着陆后的快速结合而言充分的推进力。In order for two droplets that land in close proximity on an object to spread and coalesce quickly, a certain level of propulsion must be imparted to the droplets. However, experimental results have confirmed that droplets ejected from conventional jet-type dispensing devices do not impart sufficient propulsion to achieve rapid coalescence after landing.
上述以外还重要的是在于,被同时吐出的多个液块在着陆前不接触或不结合。这是因为,若液滴在着陆前接触或结合,则液滴变大,从而无法实现所希望的涂布图案。即,如图6所示,若二个液滴在飞翔中结合,则着陆面变为圆形,因而以一部分与该着陆液重叠的方式使相同大小的液滴不着陆,从而无法进行线状涂布(实质上,与由一个吐出口进行的涂布作业相同)。由于用以以自多个吐出口同时吐出的多个液块在着陆于涂布对象物之前不接触、并且将沿喷嘴配置线20着陆的着陆液在涂布对象物上结合的方式进行吐出的条件,根据液体材料的种类或吐出装置的结构等的作业环境而不同,因而需要自一边按作业环境改变各要素的条件一边反复吐出的作业中寻找。每当进行该作业时,作为应当考虑的主要要素,例示有吐出口间的距离、吐出口的孔的大小、液体材料的粘度、吐出构件的推进力的大小(当然也可对这些以外的要素进行调节)。此外,如在下述的第五实施方式例中说明的那样,通过调节吐出口与涂布对象物的距离而对进行条件设定也是有效的。In addition to the above, it is also important that the multiple liquid masses ejected simultaneously do not touch or combine before landing. This is because if the droplets touch or combine before landing, the droplets will become larger, making it impossible to achieve the desired coating pattern. Specifically, as shown in Figure 6, if two droplets combine in flight, the landing surface becomes circular, and droplets of the same size that partially overlap the landing liquid do not land, thus preventing linear coating (essentially, the same as coating operations performed from a single ejection port). Because the conditions for ejecting multiple liquid masses ejected simultaneously from multiple ejection ports in a manner that prevents them from touching before landing on the coating object and in which the landing liquids that land along the nozzle arrangement line 20 combine on the coating object vary depending on the operating environment, such as the type of liquid material and the structure of the ejection device, it is necessary to find the conditions by repeatedly ejecting while changing the conditions of each factor according to the operating environment. Whenever this operation is performed, the main factors to be considered include the distance between the discharge ports, the size of the discharge port hole, the viscosity of the liquid material, and the magnitude of the propulsion force of the discharge member (of course, other factors can also be adjusted). In addition, as described in the fifth embodiment below, it is also effective to set the conditions by adjusting the distance between the discharge port and the coating object.
图4(b)显示被同时吐出的液块着陆于涂布对象物的时刻。如同图所示,自二个吐出口(51、52)吐出的液体材料,在着陆时处于相互不接触的位置关系。换一种说法,自多个吐出口吐出的液体材料,形成与吐出口相同数量的液滴,且相互非接触地着陆于涂布对象物。Figure 4(b) shows the moment when the simultaneously ejected liquid masses land on the coating object. As shown in the figure, the liquid materials ejected from the two discharge ports (51, 52) are in a non-contacting position when landing. In other words, the liquid materials ejected from the multiple discharge ports form the same number of droplets as the number of discharge ports, and land on the coating object without contacting each other.
图4(c)显示被同时吐出的液块着陆于涂布对象物后经过了短暂时间的时刻。如同图所示,呈圆形着陆的液滴在涂布对象物上扩散,二个圆接触而开始结合。Figure 4(c) shows the moment a short time has passed since the simultaneously ejected liquid droplets landed on the coating object. As shown in the figure, the circular droplets spread on the coating object, and the two circles come into contact and begin to merge.
图4(d)显示自图4(c)的时刻起经过了短暂时间的时刻。如同图所示,接触的二个圆的结合进一步进展,宽度方向(图中上下方向)的凹陷变浅。即,涂布对象物上的二个液滴的结合,与飞翔中的二个液滴的结合不同,以形成向喷嘴配置线20方向延伸的细长形状的方式进行作用(即使二个液滴合体,俯视时也不成为圆形)。Figure 4(d) shows a moment a short time after the moment in Figure 4(c). As shown, the two contacting circles merge further, and the depression in the width direction (vertical direction in the figure) becomes shallower. In other words, the merging of two droplets on the coating object, unlike the merging of two droplets in flight, occurs by forming an elongated shape extending toward the nozzle arrangement line 20 (even after the two droplets merge, they do not form a circle when viewed from above).
图4(e)显示自图4(d)的时刻起经过了短暂时间的时刻。如同图所示,二个圆完全结合而涂布宽度的不均匀消失,形成朝与喷嘴配置线20相同的方向延伸的直线状的细长涂布图案。Fig. 4(e) shows a moment after a short time has passed since the moment in Fig. 4(d). As shown in the figure, the two circles are completely combined and the unevenness in the coating width disappears, forming a linear elongated coating pattern extending in the same direction as the nozzle arrangement line 20.
图4(a)~图4(e)是显示通过一次的吐出而进行规定的长度(最小单位)的线状涂布的工序的图,通过反复进行该工序,可形成所希望的长度的涂布线。4( a ) to 4 ( e ) are diagrams showing a process of applying a line of a predetermined length (minimum unit) by a single discharge. By repeating this process, a coating line of a desired length can be formed.
图5(a)~图5(e)是显示通过多次的吐出而进行线状涂布的工序的图。FIG. 5( a ) to FIG. 5( e ) are diagrams showing the process of linear coating by multiple discharges.
图5(a)为自侧方观察刚进行第一发射后的时刻的图。FIG5(a) is a side view showing the time immediately after the first shot.
图5(b)为自侧方及上方观察刚进行第二发射后的时刻的图。在该时刻,第一发射所涉及的二个液滴在涂布对象物上开始结合。Fig. 5(b) is a side and top view of the moment immediately after the second shot is performed. At this moment, the two droplets involved in the first shot begin to combine on the coating object.
图5(c)为自侧方及上方观察刚进行第三发射后的时刻的图。在该时刻,第一发射所涉及的二个液滴的结合进一步进展,第二发射所涉及的2个液滴在涂布对象物上开始结合。Figure 5(c) shows the moment immediately after the third shot, as viewed from the side and above. At this moment, the two droplets involved in the first shot have further coalesced, and the two droplets involved in the second shot have begun to coalesce on the coating object.
图5(d)为自侧方及上方观察刚进行第四发射后的时刻的图。在该时刻,第一发射所涉及的二个液滴完全结合,第二发射所涉及的二个液滴的结合进一步进展,第三发射所涉及的二个液滴在涂布对象物上开始结合。Figure 5(d) shows the moment immediately after the fourth shot, as viewed from the side and above. At this point, the two droplets involved in the first shot have completely coalesced, the two droplets involved in the second shot have further coalesced, and the two droplets involved in the third shot have begun to coalesce on the coating object.
图5(e)为自侧方及上方观察刚进行第五发射后的时刻的图。在该时刻,第一及第二发射所涉及的二个液滴完全结合,第三发射所涉及的二个液滴的结合进一步进展,第四发射所涉及的二个液滴在涂布对象物上开始结合。Figure 5(e) shows the moment immediately after the fifth shot, as viewed from the side and above. At this point, the two droplets from the first and second shots have completely coalesced, the two droplets from the third shot have further coalesced, and the two droplets from the fourth shot have begun to coalesce on the coating object.
这样,在本实施方式例中,通过反复进行同时吐出二个液块的循环,可形成所希望的涂布线。在此所称的涂布线,不仅包含在被涂布的液体材料的宽度方向(长边方向的侧缘)无凹凸的如图4(e)那样的直线状的涂布线,而且还包含在图4(c)或图4(d)所公开的宽度方向具有凹凸的涂布线。在液体材料的粘度相对较高的情况下,也有在涂布线的宽度方向存在凹凸的情况,例如,如在贴合时被压扁的粘结剂的涂布的情况那样,有时即使是在宽度方向具有凹凸的涂布线也可达成目的。但是,宽度方向的凹凸成为气泡的原因,因此优选将凹陷量控制为扩散后的液滴的半径的1/3以下。Thus, in this embodiment, by repeatedly performing a cycle of simultaneously discharging two liquid blocks, a desired coating line can be formed. The coating line referred to herein includes not only a straight coating line such as FIG4(e) that has no unevenness in the width direction (side edge in the long side direction) of the liquid material being coated, but also a coating line having unevenness in the width direction as disclosed in FIG4(c) or FIG4(d). In the case where the viscosity of the liquid material is relatively high, there are also cases where unevenness exists in the width direction of the coating line. For example, as in the case of coating an adhesive that is flattened during lamination, sometimes even a coating line having unevenness in the width direction can achieve the purpose. However, unevenness in the width direction causes bubbles, so it is preferable to control the amount of depression to be less than 1/3 of the radius of the droplet after diffusion.
再者,涂布线不是均匀地形成于涂布对象物(工件)的表面的膜,而是形成为隆起于表面的线。Furthermore, the coating line is not a film uniformly formed on the surface of the coating object (workpiece), but is formed as a line raised on the surface.
本发明在使用具有多个吐出口的喷嘴,一边使吐出装置与工作台以一定的速度Vc相对移动,一边将吐出的时机作为一定的间隔Tc而可进行线状涂布的方面,可以说具有特别的效果。换一种说法,本发明中,可一边使吐出装置与工作台以一定的速度相对移动,一边使柱塞杆反复进行一定的往返动作而一边进行线状涂布。通过将吐出的时机作为一定的间隔Tc,可使吐出量成为一定,提高吐出量精度及吐出位置精度。此时的间隔Tc,优选为自多个吐出口同时吐出的多个液块的至少一个与之前刚吐出的涂布对象物上的液体材料(着陆液)结合而形成线状的涂布图案的那样的间隔。再者,与之前刚吐出的液体材料的结合,既有与着陆同时进行的情况,也有在着陆后经过了短暂时间而进行的情况。前者多产生于之前刚吐出的液体材料在涂布对象物上已经扩散的情况。The present invention is particularly effective in that it uses a nozzle having multiple discharge ports, moves the discharge device and the worktable relative to each other at a constant speed Vc , and adjusts the discharge timing to a constant interval Tc , thereby enabling linear coating. Stated another way, the present invention allows linear coating to be performed while the discharge device and the worktable are moved relative to each other at a constant speed and the plunger rod repeatedly performs a constant reciprocating motion. By adjusting the discharge timing to a constant interval Tc , the discharge volume can be kept constant, improving the accuracy of the discharge volume and the discharge position. The interval Tc is preferably such that at least one of the multiple liquid blocks discharged simultaneously from the multiple discharge ports combines with the liquid material (landing liquid) on the coating object just discharged, forming a linear coating pattern. Furthermore, this combination with the just discharged liquid material can occur simultaneously with landing or a short time after landing. The former often occurs when the just discharged liquid material has already spread on the coating object.
作为优选的间隔Tc的一例,可列举出设定为Vc×Tc成为相邻的吐出口间的距离那样的间隔。这是因为,在设定为这样的间隔的情况下,可将吐出的多个液块结合而形成的线部B与其之前刚吐出的多个液块结合而形成的线部A的涂布对象物上的结合状态,与构成线部A的多个液块的结合状态及构成线部B的多个液块的结合状态设定为相同,因而可期待形成均匀的直线的效果。An example of a preferred interval Tc is one in which Vc × Tc is the distance between adjacent discharge ports. This is because, when such an interval is set, the bonding state on the coating object of the line portion B formed by the bonding of multiple discharged liquid slugs and the line portion A formed by the bonding of multiple liquid slugs immediately before the discharge can be set to be the same as the bonding state of the multiple liquid slugs constituting the line portion A and the bonding state of the multiple liquid slugs constituting the line portion B, thereby achieving the effect of forming a uniform straight line.
图13为着陆于涂布对象物的二个液滴在涂布对象物上不结合的情况下的涂布方法的说明图。同图中,直线所示的是各次的吐出中的吐出口51的位置。Fig. 13 is an explanatory diagram of a coating method in which two droplets landed on an object to be coated do not combine with each other. In the figure, the straight lines indicate the positions of the discharge port 51 during each discharge.
由于第1次吐出所吐出的二个液滴(以实线及网点图示)不结合,因而在第2次吐出中,需要进行二个液滴(以虚线及网点图示)的吐出以使第1次吐出的二个液滴之间被连接。第3次吐出中,以被吐出的液滴的重叠状况在全部的部位变得相同的方式,需要进行2个液滴(以实线及斜线图示)的吐出以使与第2次吐出的行进方向侧(右侧)的液滴重叠。第4次吐出中,与第2次吐出同样地,需要进行二个液滴(以虚线及斜线图示)的吐出以使与第3次吐出的二个液滴之间被连接。Since the two droplets ejected in the first ejection (shown by a solid line and halftone dots) do not combine, two droplets (shown by a dashed line and halftone dots) must be ejected in the second ejection to connect the two droplets ejected in the first ejection. In the third ejection, two droplets (shown by a solid line and shaded lines) must be ejected to overlap with the droplet ejected in the direction of travel (right side) of the second ejection, so that the overlapping state of the ejected droplets is the same at all locations. In the fourth ejection, similar to the second ejection, two droplets (shown by a dashed line and shaded lines) must be ejected to connect with the two droplets ejected in the third ejection.
这样,图13的涂布方法中,在使吐出装置与工作台以一定的速度相对移动的情况下,产生必须改变吐出的时机的问题。另一方面,若改变吐出装置与工作台的相对移动的速度,则产生液滴的着陆位置的控制变得困难的问题。Thus, in the coating method of Figure 13, when the discharge device and the worktable are moved relative to each other at a constant speed, the problem of changing the timing of discharge occurs. On the other hand, if the relative movement speed of the discharge device and the worktable is changed, the problem of controlling the landing position of the droplets becomes difficult.
根据以上说明的第一实施方式例的涂布装置及涂布方法,可同时吐出二个液块而进行线状涂布,因此与将一个液块重叠而进行线状涂布的情况相比较,可将涂布速度以二倍左右高速化。该线状涂布的高速化在进行直线涂布时特别有效,例如,在涂布图案由一条或者多个直线构成的情况下,可实现显著的高速化效果。According to the coating apparatus and coating method of the first embodiment described above, two liquid slugs can be simultaneously discharged for linear coating. This allows the coating speed to be approximately doubled compared to linear coating performed by overlapping a single liquid slug. This increased speed of linear coating is particularly effective when performing linear coating, and for example, a significant speed-up effect can be achieved when the coating pattern consists of one or more straight lines.
此外,使用具有多个吐出口的喷嘴,一边使吐出装置与工作台以一定的速度相对移动,一边将吐出的时机作为一定的间隔而可进行高精度的线状涂布。Furthermore, by using a nozzle having a plurality of discharge ports and moving the discharge device and the stage relative to each other at a constant speed, high-precision linear coating can be performed while setting the discharge timing at a constant interval.
《第二实施方式例》Second Implementation Example
第二实施方式例在吐出装置1的喷嘴构件5具有以等间距配置的三个吐出口的方面与第一实施方式例不同,其它的结构与第一实施方式例相同。以下,对与第一实施方式例共同的结构,省略说明,对不同的结构进行说明。The second embodiment differs from the first embodiment in that the nozzle member 5 of the discharge device 1 has three discharge ports arranged at equal intervals. The other structures are the same as those of the first embodiment. Hereinafter, description of the structures common to the first embodiment will be omitted, and the different structures will be described.
如图7(a)所示,喷嘴构件5具有设于直线的喷嘴配置线20上的同径圆形的第1吐出口51、第2吐出口52及第3吐出口53。第1~第3吐出口(51~53)的直径D1与第一实施方式相同。第1吐出口51与第2吐出口52的最接近距离(第1吐出口51的右端与第2吐出口52的左端的距离)L1,与第2吐出口52与第3吐出口53的最接近距离(第2吐出口52的右端与第3吐出口53的左端的距离)L2,为相同长度。L1及L2设定为无论在何种情况下皆大于直径D1,例如设定为D1的2~10倍。在将吐出装置1搭载于涂布装置200时,将喷嘴配置线20配置为与所希望的描绘线(直线)的方向一致。与第一实施方式相同,也可在工作台202或吐出装置1设置旋转机构,通过旋转机构来动态地调整吐出口的方向。As shown in FIG7(a), the nozzle member 5 includes a first discharge port 51, a second discharge port 52, and a third discharge port 53, each of the same diameter and circular shape, arranged on a linear nozzle arrangement line 20. The diameter D1 of the first to third discharge ports (51-53) is the same as that of the first embodiment. The closest distance L1 between the first discharge port 51 and the second discharge port 52 (the distance between the right end of the first discharge port 51 and the left end of the second discharge port 52) and the closest distance L2 between the second discharge port 52 and the third discharge port 53 (the distance between the right end of the second discharge port 52 and the left end of the third discharge port 53 ) are the same length. L1 and L2 are set to be larger than the diameter D1 in all cases, for example, 2 to 10 times D1 . When the discharge device 1 is mounted on the coating apparatus 200, the nozzle arrangement line 20 is arranged so that the direction of the desired drawing line (straight line) is aligned. Similar to the first embodiment, a rotation mechanism may be provided on the table 202 or the discharge device 1 to dynamically adjust the direction of the discharge port by the rotation mechanism.
如图7(b)所示,第1~第3吐出口(51~53)经由第1吐出流路54、第2吐出流路55及第3吐出流路56以及大径吐出流路57而与液室41连通。第1~第3吐出流路(54~56)为相同形状,中心轴均位于铅垂方向。即,第1~第3吐出流路(54~56)平行于垂直方向而设置。As shown in FIG7(b), the first to third discharge ports (51-53) communicate with the liquid chamber 41 via the first discharge channel 54, the second discharge channel 55, the third discharge channel 56, and the large-diameter discharge channel 57. The first to third discharge channels (54-56) have the same shape, and their central axes are all located in the vertical direction. In other words, the first to third discharge channels (54-56) are arranged parallel to the vertical direction.
根据第二实施方式例,通过一次的吐出可形成3滴份的长度的涂布线。此外,本实施方式中,公开了具有以等间距配置的三个吐出口的喷嘴构件,但在以等间距配置四个以上的相同形状的吐出口的喷嘴构件中,也可实现同样的效果。According to the second embodiment, a coating line having a length of three drops can be formed by a single discharge. In addition, in this embodiment, a nozzle member having three discharge ports arranged at equal intervals is disclosed, but the same effect can also be achieved in a nozzle member having four or more discharge ports of the same shape arranged at equal intervals.
《第三实施方式例》Third Implementation Example
第三实施方式例在吐出装置1的喷嘴构件5具有以等间距配置的四个吐出口的方面与第一及第二实施方式例不同,其它的结构与第一及第二实施方式例相同。以下,对与第一及第二实施方式例共同的结构,省略说明,对不同的结构进行说明。The third embodiment differs from the first and second embodiments in that the nozzle member 5 of the discharge device 1 has four discharge ports arranged at equal intervals. The remaining configurations are the same as those of the first and second embodiments. Hereinafter, descriptions of the configurations common to the first and second embodiments will be omitted, and the configurations that differ will be described.
如图8所示,喷嘴构件5具有设于直线的喷嘴配置线20上的大圆形的第1吐出口71及第2吐出口72、小圆形的第3吐出口73及第4吐出口74。第1吐出口71及第2吐出口72的直径D1,例如为数十μm~数mm。第3吐出口73及第4吐出口74的直径D2为直径D1的1/2~1/10,例如为数μm~数百μm。大圆形的吐出口与小圆形的吐出口,在喷嘴配置线20上交替地且实质上等间隔地配置。As shown in FIG8 , the nozzle member 5 includes a first large circular outlet 71 and a second large circular outlet 72, and a third small circular outlet 73 and a fourth small circular outlet 74, arranged on a linear nozzle arrangement line 20. The diameter D 1 of the first outlet 71 and the second outlet 72 is, for example, tens of μm to several mm. The diameter D 2 of the third outlet 73 and the fourth outlet 74 is 1/2 to 1/10 of the diameter D 1 , for example, several μm to several hundred μm. The large circular outlets and the small circular outlets are alternately arranged on the nozzle arrangement line 20 at substantially equal intervals.
在第1吐出口71与第2吐出口72的最接近距离(第1吐出口71的右端与第2吐出口72的左端的距离)L1的中间地点配置有第3吐出口73。第1吐出口71与第3吐出口73的最接近距离L2设定为无论在何种情况下皆大于直径D1,例如设定为D1的2~10倍。第4吐出口74相对于第2吐出口72而与第3吐出口73对称地设置。即,第2吐出口72与第4吐出口74的最接近距离L3与L2相同。在将吐出装置1搭载于涂布装置200时,将喷嘴配置线20配置为与所希望的描绘线(直线)的方向一致。与第一实施方式相同,也可在工作台202或吐出装置1设置旋转机构,通过旋转机构来动态地调整吐出口的方向。The third discharge port 73 is arranged at a point midway between the closest distance L1 between the first discharge port 71 and the second discharge port 72 (the distance between the right end of the first discharge port 71 and the left end of the second discharge port 72). The closest distance L2 between the first discharge port 71 and the third discharge port 73 is set to be larger than the diameter D1 in all cases, for example, 2 to 10 times D1 . The fourth discharge port 74 is arranged symmetrically with the third discharge port 73 relative to the second discharge port 72. That is, the closest distance L3 between the second discharge port 72 and the fourth discharge port 74 is the same as L2 . When the discharge device 1 is mounted on the coating device 200, the nozzle configuration line 20 is arranged to be consistent with the direction of the desired drawing line (straight line). As in the first embodiment, a rotation mechanism may be provided on the workbench 202 or the discharge device 1 to dynamically adjust the direction of the discharge port by the rotation mechanism.
图9为自第1~第4吐出口(71~74)同时吐出的四个液块着陆且在涂布对象物上扩散的状况的想象图。自第1~第4吐出口(71~74)同时吐出的四个液滴(171~174),如图9上段所示,着陆时为相互独立的俯视圆形的液滴。如图9中段所示,若着陆后经过了短暂时间,则四个液滴(171~174)分别扩散且开始结合。在此,二个辅助液滴173~174以促进基本液滴171~172的结合的方式进行作用。最终,如图9下段所示,四个圆完全结合而使涂布宽度的不均匀消失,形成朝与喷嘴配置线20相同的方向延伸的直线状的细长涂布图案。FIG9 is an imaginary diagram of the situation in which four liquid blocks ejected simultaneously from the 1st to 4th discharge ports (71 to 74) land and spread on the coating object. As shown in the upper part of FIG9 , the four droplets (171 to 174) ejected simultaneously from the 1st to 4th discharge ports (71 to 74) are independent circular droplets when viewed from above when they land. As shown in the middle part of FIG9 , if a short time has passed after landing, the four droplets (171 to 174) spread separately and begin to combine. Here, the two auxiliary droplets 173 to 174 act in a manner that promotes the combination of the basic droplets 171 to 172. Finally, as shown in the lower part of FIG9 , the four circles are completely combined to eliminate the unevenness of the coating width, forming a straight, elongated coating pattern extending in the same direction as the nozzle configuration line 20.
再者,各吐出口优选为圆形,但在圆形以外的形状中也可实现本发明的效果。此外,在吐出口由多个大小的孔构成的情况下,优选至少最大的吐出口为相同形状且构成为相同大小,更优选通过相同形状且相同大小的吐出口组的组合(参照图8、图10)构成多个大小的孔的吐出口。Furthermore, each discharge port is preferably circular, but the effects of the present invention can also be achieved with shapes other than circular. In addition, when the discharge port is composed of holes of multiple sizes, it is preferred that at least the largest discharge port is of the same shape and size. More preferably, the discharge port is composed of holes of multiple sizes by combining groups of discharge ports of the same shape and size (see Figures 8 and 10).
如以上所述,二个辅助液滴173~174以促进基本液滴171~172的结合的方式进行作用。As described above, the two auxiliary droplets 173 - 174 act to promote the combination of the basic droplets 171 - 172 .
《第四实施方式例》Example of the fourth embodiment
第四实施方式例在吐出装置1的喷嘴构件5具有六个吐出口的方面与第一至第三实施方式例不同,其它的结构与第一至第三实施方式例相同。以下,对与第一至第三实施方式例共同的结构,省略说明,对不同的结构进行说明。The fourth embodiment differs from the first to third embodiments in that the nozzle member 5 of the discharge device 1 has six discharge ports. Other configurations are the same as those of the first to third embodiments. Hereinafter, descriptions of configurations common to the first to third embodiments will be omitted, and only configurations that differ will be described.
如图10所示,喷嘴构件5具有设于直线的喷嘴配置线20上的同径大圆形的第1吐出口81及第2吐出口82、以及沿喷嘴配置线配置的同径小圆形的第3吐出口83、第4吐出口84、第5吐出口85及第6吐出口86。第3吐出口83及第4吐出口84夹着喷嘴配置线20而对称地配置,第5吐出口85及第6吐出口86夹着喷嘴配置线20而对称地配置。换一种说法,第1~第6吐出口(81~86)相对于喷嘴配置线20对称地配置。再换一种说法,多个吐出口包含多个大圆形吐出口及多个小圆形吐出口组,大圆形吐出口全部配置于喷嘴配置线20上,且小圆形吐出口组与大圆形吐出口交替地配置,小圆形吐出口组由夹着喷嘴配置线20而对称地配置的多个小圆形吐出口构成。As shown in FIG10 , the nozzle member 5 includes a first discharge port 81 and a second discharge port 82, both of large circular shapes of the same diameter, arranged on a linear nozzle arrangement line 20, and a third discharge port 83, a fourth discharge port 84, a fifth discharge port 85, and a sixth discharge port 86, all of small circular shapes of the same diameter, arranged along the nozzle arrangement line. The third discharge port 83 and the fourth discharge port 84 are symmetrically arranged with respect to the nozzle arrangement line 20, while the fifth discharge port 85 and the sixth discharge port 86 are symmetrically arranged with respect to the nozzle arrangement line 20. In other words, the first through sixth discharge ports (81 through 86) are symmetrically arranged with respect to the nozzle arrangement line 20. In other words, the plurality of discharge ports include a plurality of large circular discharge ports and a plurality of small circular discharge port groups, all of which are arranged on the nozzle arrangement line 20. The small circular discharge port groups are arranged alternately with the large circular discharge ports, and the small circular discharge port groups are composed of a plurality of small circular discharge ports symmetrically arranged with respect to the nozzle arrangement line 20.
第1吐出口81及第2吐出口82的直径D1,例如为数十μm~数mm。第3吐出口83、第4吐出口84、第5吐出口85及第6吐出口86的直径D2为直径D1的1/2~1/10,例如为数μm~数百μm。The diameter D1 of the first and second discharge ports 81, 82 is, for example, several tens of μm to several mm. The diameter D2 of the third, fourth, fifth, and sixth discharge ports 83, 84, 85, and 86 is 1/2 to 1/10 of the diameter D1 , for example, several μm to several hundred μm.
在第1吐出口81与第2吐出口82的最接近距离(第1吐出口81的右端与第2吐出口82的左端的距离)L1的中间地点在与喷嘴配置线20正交的直线上配置有第3吐出口83及第4吐出口84。在L1的中间地点上与喷嘴配置线20正交的直线与第1吐出口81及第2吐出口82的最接近距离L2(=L1×1/2)设定为无论在何种情况下皆大于直径D1,例如设定为D1的2~10倍。The third and fourth discharge ports 83 and 84 are arranged on a straight line perpendicular to the nozzle arrangement line 20 at a point midway between the closest distance L1 between the first and second discharge ports 81, 82 (the distance between the right end of the first discharge port 81 and the left end of the second discharge port 82). The closest distance L2 (= L1 × 1/2) between the straight line perpendicular to the nozzle arrangement line 20 and the first and second discharge ports 81, 82 at the point midway between L1 is set to be larger than the diameter D1 in all cases, for example, 2 to 10 times D1 .
与配置有第5吐出口85及第6吐出口86的喷嘴配置线20正交的直线与第2吐出口72的最接近距离L3与L2相同。在将吐出装置1搭载于涂布装置200时,将喷嘴配置线20配置为与所希望的描绘线(直线)的方向一致。与第一实施方式相同,也可在工作台202或吐出装置1设置旋转机构,通过旋转机构来动态地调整吐出口的方向。The closest distances L3 and L2 between the second discharge port 72 and a straight line perpendicular to the nozzle arrangement line 20, where the fifth discharge port 85 and the sixth discharge port 86 are arranged, are the same. When the discharge device 1 is mounted on the coating device 200, the nozzle arrangement line 20 is arranged so as to align with the direction of the desired drawing line (straight line). As in the first embodiment, a rotation mechanism may be provided on the worktable 202 or the discharge device 1 to dynamically adjust the direction of the discharge port.
再者,在如本实施方式例那样具有大型吐出口及小型吐出口的情况下,也可通过以在包含自大型吐出口吐出的液体材料的吐出方向的平面上具有描绘线的方式配置各吐出口,从而使喷嘴配置线20与描绘线的描绘方向一致。Furthermore, in the case of having a large ejection port and a small ejection port as in the present embodiment, each ejection port can be arranged in such a manner as to have a drawing line on a plane including the ejection direction of the liquid material ejected from the large ejection port, thereby making the nozzle arrangement line 20 consistent with the drawing direction of the drawing line.
同径小圆形的第3~第6吐出口(83~86)作为辅助吐出口而发挥作用,该辅助吐出口用以供给用以使第1及第2吐出口(81、82)的结合部平滑的辅助的液体材料。The third to sixth discharge ports (83 to 86) of the same diameter and small circular shape function as auxiliary discharge ports for supplying auxiliary liquid material for smoothing the junction of the first and second discharge ports (81, 82).
图11为自第1~第6吐出口(81~86)同时吐出的6个液块着陆且在涂布对象物上扩散的状况的想象图。自第1~第6吐出口(81~86)同时吐出的六个液滴(181~186),如图11上段所示,着陆时为相互独立的俯视圆形的液滴。如图11中段所示,若着陆后经过了短暂时间,六个液滴(181~186)分别扩散且开始结合。最终,如图11下段所示,六个圆完全结合而使涂布宽度的不均匀消失,形成朝与喷嘴配置线20相同的方向延伸的直线状的细长涂布图案。FIG11 is an imaginary diagram of the situation in which six liquid blocks ejected simultaneously from the first to sixth ejection ports (81 to 86) land and spread on the coating object. As shown in the upper part of FIG11 , the six droplets (181 to 186) ejected simultaneously from the first to sixth ejection ports (81 to 86) are independent circular droplets when they land. As shown in the middle part of FIG11 , after a short period of time has passed since landing, the six droplets (181 to 186) spread out and begin to combine. Finally, as shown in the lower part of FIG11 , the six circles are completely combined, eliminating the unevenness of the coating width, and forming a straight, elongated coating pattern extending in the same direction as the nozzle configuration line 20.
如以上所述,四个辅助液滴183~186以迅速消除基本液滴181~182的结合时所产生的宽度方向的凹陷的方式进行作用。再者,本实施方式中,各吐出口优选为圆形,但不限于圆形。As described above, the four auxiliary droplets 183 to 186 act to quickly eliminate the depression in the width direction generated when the basic droplets 181 to 182 are combined. In this embodiment, each discharge port is preferably circular, but is not limited to a circular shape.
《第五实施方式例》Example of the fifth embodiment
第五实施方式例中,吐出装置1的喷嘴构件5的结构与第一至第四实施方式例不同,其它的结构与第一至第四实施方式例相同。以下,对与第一至第四实施方式例共同的结构,省略说明,对不同的结构进行说明。In the fifth embodiment, the nozzle member 5 of the discharge device 1 has a different structure from the first to fourth embodiments, and the other structures are the same as the first to fourth embodiments. Hereinafter, the description of the structures common to the first to fourth embodiments will be omitted, and the different structures will be described.
如图12(a)所示,第五实施方式例的喷嘴构件5由符号5a所示的上侧构件及符号5b所示的下侧构件构成。在上端具有凸缘部58,且由该凸缘部而被支撑于安装构件4。下侧构件5b螺接于上侧构件5a的下端或通过螺钉等的固定件而装卸自如地被固定。下侧构件5b装卸自如地安装于上侧构件5a,因此根据用途对吐出口的直径及距离、或吐出口的喷出角度不同的多个下侧构件5b进行交换也是容易的。优选设置定位机构,该定位机构用以在将下侧构件5b固定于上侧构件5a时使下侧构件5b的朝向相对于上侧构件5a为一定。作为定位机构可使用公知的定位机构,例如,可列举将下侧构件5b或上侧构件5a的一部分(例如,销、凸部、缺口)嵌合于另一方的构件而进行定位的结构、或使用另外准备的构件(例如,销或螺钉)进行定位的结构。As shown in Figure 12 (a), the nozzle member 5 of the fifth embodiment is composed of an upper member shown by symbol 5a and a lower member shown by symbol 5b. It has a flange portion 58 at the upper end and is supported on the mounting member 4 by the flange portion. The lower member 5b is screwed to the lower end of the upper member 5a or is fixed in a detachable manner by a fixing member such as a screw. The lower member 5b is detachably mounted on the upper member 5a, so it is easy to exchange multiple lower members 5b with different diameters and distances of the discharge port or different spray angles of the discharge port according to the purpose. It is preferred to provide a positioning mechanism for making the orientation of the lower member 5b constant relative to the upper member 5a when the lower member 5b is fixed to the upper member 5a. As the positioning mechanism, a well-known positioning mechanism can be used. For example, a structure in which a part of the lower member 5b or the upper member 5a (for example, a pin, a protrusion, a notch) is engaged with a member on the other side for positioning, or a structure in which a separately prepared member (for example, a pin or a screw) is used for positioning.
第1吐出口91经由直线状的第1吐出流路93及大径吐出流路95而与液室41连通。此外,第2吐出口92经由直线状的第2吐出流路94及大径吐出流路95而与液室41连通。第1吐出流路93及第2吐出流路94具有相同形状,皆相对于喷嘴构件的中心轴59以相等的角度倾斜。第1吐出流路93的中心轴与喷嘴构件的中心轴59所构成的角度A1、与第2吐出流路94的中心轴与喷嘴构件的中心轴59所构成的角度A2相等,例如设定为A1=A2<45度。The first discharge port 91 communicates with the liquid chamber 41 via a linear first discharge channel 93 and a large-diameter discharge channel 95. Furthermore, the second discharge port 92 communicates with the liquid chamber 41 via a linear second discharge channel 94 and a large-diameter discharge channel 95. The first discharge channel 93 and the second discharge channel 94 have identical shapes and are inclined at equal angles relative to the central axis 59 of the nozzle member. The angle A1 formed between the central axis of the first discharge channel 93 and the central axis 59 of the nozzle member and the angle A2 formed between the central axis of the second discharge channel 94 and the central axis 59 of the nozzle member are equal, and are set, for example, to A1 = A2 < 45 degrees.
本实施方式例中,主要考虑将液体材料的吐出方向作为中心轴59的方向。In this embodiment, the discharge direction of the liquid material is mainly considered to be the direction of the central axis 59 .
第五实施方式例中,通过由Z驱动装置205调节吐出口与工件的距离h,可调节被同时吐出的二个液块的距离。图12(b)为吐出口与工件的距离为ha的情况及hb的情况的液滴的距离(重叠状况)的想象图。由同图可知,若吐出口与工件的距离h靠近,则液滴间的距离变远,若距离h远离,则液滴间的距离变小。但是,在本实施方式例中,将距离h设定为使被同时吐出的多个液滴在着陆前不接触或不结合。In the fifth embodiment, the distance h between the discharge port and the workpiece is adjusted by the Z drive 205, thereby adjusting the distance between the two simultaneously discharged liquid masses. Figure 12(b) illustrates the distance (overlapping state) between the droplets when the distance h between the discharge port and the workpiece is h a and h b . As can be seen from the figure, as the distance h between the discharge port and the workpiece decreases, the distance between the droplets increases, while as the distance h increases, the distance between the droplets decreases. However, in this embodiment, the distance h is set so that the multiple simultaneously discharged droplets do not touch or merge before landing.
根据以上说明的第五实施方式例的涂布装置及涂布方法,通过调节吐出口与工件的距离h,可调节着陆的二个液滴的距离或重叠状况。由此,可适宜地应对湿度或室温等的气氛环境的差异所引起的液滴的距离或重叠状况的差异。According to the coating apparatus and coating method of the fifth embodiment described above, the distance h between the discharge port and the workpiece can be adjusted to adjust the distance between two landed droplets and the degree of overlap. This allows for appropriate response to differences in the distance between droplets and the degree of overlap caused by differences in the atmospheric environment, such as humidity or room temperature.
吐出口的数量不限于例示的二个,也可为三个以上。在吐出口的数量为奇数个的情况下,不对位于中心的吐出口设置倾斜而使位于距中心相同距离的成对的吐出口相对于喷嘴构件的中心轴以相等的角度倾斜。The number of discharge ports is not limited to the two shown in the example, and may be three or more. When the number of discharge ports is an odd number, the discharge port located at the center is not tilted, and the paired discharge ports located at the same distance from the center are tilted at equal angles relative to the central axis of the nozzle member.
再者,在将吐出口与工件的距离h设定为非常小的距离的情况下,也可将各吐出口的喷出角度设定于自喷嘴构件的中心轴分离的方向(放射状),使液滴在工件上结合。Furthermore, when the distance h between the discharge port and the workpiece is set to be very small, the ejection angle of each discharge port may be set in a direction (radially) away from the central axis of the nozzle member to allow the droplets to coalesce on the workpiece.
产业上的可利用性Industrial applicability
本发明当然可应用于工业用润滑脂、焊料膏体、银膏体、各种粘结剂(UV固化型、环氧系、热熔性系等)、焊剂,也可应用如溶剂(0.8cps左右)的低粘性材料乃至高粘性材料(1,00,000cps左右)的液体材料。The present invention can certainly be applied to industrial grease, solder paste, silver paste, various adhesives (UV curing, epoxy, hot melt, etc.), flux, and can also be applied to liquid materials such as low viscosity materials such as solvents (about 0.8 cps) and high viscosity materials (about 1,00,000 cps).
符号的说明Explanation of symbols
1:吐出装置、2:主体上部、3:主体下部、4:安装构件、5:喷嘴构件、6:送液构件、7:液体贮存容器、8:气压式点胶机、9:气体供给源、10:柱塞、11:活塞、12:密封构件、13:弹性构件、14:止动器、15:测微计、16:电磁切换阀、17:切换阀控制部、18:减压阀(调节器(regulator))、19:气体供给源、20:喷嘴配置线、21:贯通孔、22:下方室、23:上方室、24:下方通气口、25:上方通气口、31:贯通孔、32:密封构件、33:供给路径、41:液室、42:送液路径、51:第1吐出口、52:第2吐出口、53:第3吐出口、61:送液路径、71:第1吐出口、72:第2吐出口、73:第3吐出口、74:第4吐出口、81:第1吐出口、82:第2吐出口、83:第3吐出口、84:第4吐出口、85:第5吐出口、86:第6吐出口、91:第1吐出口、92:第2吐出口、101:柱塞的前端部、102:柱塞的前端部的侧面、103:柱塞前端面、200:涂布装置、201:基座、202:工作台、203:X驱动装置、204:Y驱动装置、205:Z驱动装置、206:控制装置、213:X方向、214:Y方向、215:Z方向、207:涂布对象物(工件)、411:液室的内侧壁、412:液室的底面。1: Discharge device, 2: Upper body, 3: Lower body, 4: Mounting member, 5: Nozzle member, 6: Liquid supply member, 7: Liquid storage container, 8: Pneumatic dispenser, 9: Gas supply source, 10: Plunger, 11: Piston, 12: Sealing member, 13: Elastic member, 14: Stopper, 15: Micrometer, 16: Solenoid switching valve, 17: Switching valve control unit, 18: Pressure reducing valve (regulator), 19: Gas supply source, 20: Nozzle arrangement line, 21: Through hole, 22: Lower chamber, 23: Upper chamber, 24: Lower vent, 25: Upper vent, 31: Through hole, 32: Sealing member, 33: Supply path, 41: Liquid chamber, 42: Liquid supply path, 51: First discharge port, 52: Second discharge port, 53: Third discharge port, 61: Liquid supply path, 71: First discharge port, 72: Second discharge port, 73: Third discharge port, 74: Fourth discharge port, 81: First discharge port, 82: Second discharge port, 83: Third discharge port, 84: Fourth discharge port, 85: Fifth discharge port, 86: Sixth discharge port, 91: First discharge port, 92: Second discharge port, 101: Tip end portion of plunger, 102: Side surface of tip end portion of plunger, 103: Tip end surface of plunger, 200: Coating device, 201: Base, 202: Worktable, 203: X drive device, 204: Y drive device, 205: Z drive device, 206: Control device, 213: X direction, 214: Y direction, 215: Z direction, 207: Coating object (workpiece), 411: Inner wall of liquid chamber, 412: Bottom surface of liquid chamber.
Claims (26)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014/046978 | 2014-03-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| HK1230541A1 HK1230541A1 (en) | 2017-12-08 |
| HK1230541B true HK1230541B (en) | 2021-08-13 |
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