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HK1218675B - 曝光装置、曝光方法以及元件制造方法 - Google Patents

曝光装置、曝光方法以及元件制造方法 Download PDF

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Publication number
HK1218675B
HK1218675B HK16106084.6A HK16106084A HK1218675B HK 1218675 B HK1218675 B HK 1218675B HK 16106084 A HK16106084 A HK 16106084A HK 1218675 B HK1218675 B HK 1218675B
Authority
HK
Hong Kong
Prior art keywords
movable body
heads
exposure
measurement
encoder
Prior art date
Application number
HK16106084.6A
Other languages
German (de)
English (en)
French (fr)
Other versions
HK1218675A1 (zh
Inventor
Yuichi Shibazaki
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation filed Critical Nikon Corporation
Publication of HK1218675A1 publication Critical patent/HK1218675A1/zh
Publication of HK1218675B publication Critical patent/HK1218675B/zh

Links

HK16106084.6A 2006-01-19 2016-05-30 曝光装置、曝光方法以及元件制造方法 HK1218675B (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2006011506 2006-01-19
JP2006011506 2006-01-19
JP2006044599 2006-02-21
JP2006044599 2006-02-21
JP2006236878 2006-08-31
JP2006236878 2006-08-31

Publications (2)

Publication Number Publication Date
HK1218675A1 HK1218675A1 (zh) 2017-03-03
HK1218675B true HK1218675B (zh) 2018-04-13

Family

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