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HK1199309B - 曝光装置、曝光方法和设备制造方法 - Google Patents

曝光装置、曝光方法和设备制造方法 Download PDF

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Publication number
HK1199309B
HK1199309B HK14112702.8A HK14112702A HK1199309B HK 1199309 B HK1199309 B HK 1199309B HK 14112702 A HK14112702 A HK 14112702A HK 1199309 B HK1199309 B HK 1199309B
Authority
HK
Hong Kong
Prior art keywords
movable body
heads
measurement
encoder
grating
Prior art date
Application number
HK14112702.8A
Other languages
German (de)
English (en)
French (fr)
Other versions
HK1199309A1 (zh
Inventor
Yuichi Shibazaki
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation filed Critical Nikon Corporation
Publication of HK1199309A1 publication Critical patent/HK1199309A1/zh
Publication of HK1199309B publication Critical patent/HK1199309B/zh

Links

HK14112702.8A 2006-01-19 2014-12-18 曝光装置、曝光方法和设备制造方法 HK1199309B (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2006011506 2006-01-19
JP2006011506 2006-01-19
JP2006044599 2006-02-21
JP2006044599 2006-02-21
JP2006236878 2006-08-31
JP2006236878 2006-08-31

Publications (2)

Publication Number Publication Date
HK1199309A1 HK1199309A1 (zh) 2015-06-26
HK1199309B true HK1199309B (zh) 2016-05-20

Family

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