HK1261545B - Anisotropic conductive film - Google Patents
Anisotropic conductive filmInfo
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- HK1261545B HK1261545B HK19121387.5A HK19121387A HK1261545B HK 1261545 B HK1261545 B HK 1261545B HK 19121387 A HK19121387 A HK 19121387A HK 1261545 B HK1261545 B HK 1261545B
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Description
技术领域Technical Field
本发明涉及各向异性导电膜。The present invention relates to an anisotropic conductive film.
背景技术Background Art
向绝缘性树脂粘合剂分散了导电粒子的各向异性导电膜,在将IC芯片等的电子部件安装到基板时广泛使用。随着近年来电子部件的高密度安装伴随的凸点的窄间距化,对各向异性导电膜强烈要求提高凸点上的导电粒子的捕获性,且使得能够避免短路。Anisotropic conductive films, which consist of conductive particles dispersed in an insulating resin binder, are widely used when mounting electronic components such as IC chips on substrates. With the recent trend toward narrower bump pitches associated with the high-density mounting of electronic components, there is a strong demand for anisotropic conductive films that can enhance the ability to capture conductive particles on the bumps and prevent short circuits.
为了使各向异性导电膜对应该要求,研究了各种使导电粒子规则地排队配置的方法。已知这样的技术:例如,在延伸膜上铺满导电粒子,使该膜二轴延伸,从而使导电粒子单层排队配置的技术(专利文献1);或利用磁性使导电粒子保持在基体材料,并使该导电粒子转印到粘着性的膜而使导电粒子为既定排列的技术(专利文献2)等。To meet these requirements for anisotropic conductive films, various methods for regularly aligning conductive particles have been investigated. Known techniques include, for example, covering a stretched film with conductive particles and biaxially stretching the film to achieve a single-layer arrangement of the conductive particles (Patent Document 1); or utilizing magnetism to hold conductive particles in a substrate and then transferring them to an adhesive film to achieve a predetermined arrangement (Patent Document 2).
现有技术文献Prior art literature
专利文献Patent Literature
专利文献1:日本特许5147048号公报;Patent Document 1: Japanese Patent No. 5147048;
专利文献2:日本特许4887700号公报。Patent Document 2: Japanese Patent No. 4887700.
发明内容Summary of the Invention
发明要解决的课题Problems to be solved by the invention
然而,二轴延伸法中,难以使导电粒子精密地排队在既定位置,在导电粒子的排列上常常出现遗漏。依据转印法,比二轴延伸法能够精密地配置导电粒子,但是难以在各向异性导电膜的整个一面上完全消除导电粒子的遗漏。However, the biaxial stretching method makes it difficult to precisely arrange the conductive particles in a predetermined position, and omissions often occur in the arrangement of conductive particles. The transfer method can arrange the conductive particles more precisely than the biaxial stretching method, but it is difficult to completely eliminate omissions of conductive particles across the entire surface of the anisotropic conductive film.
另外,各向异性导电膜的制品一般以5m以上的长尺制造,因此在其全长上制造完全没有导电粒子的遗漏的各向异性导电膜是困难的,且是不现实的。例如,若将在一个部位有遗漏也视为规格外的次品则制品的成品率下降,会使制品的制造成本上升。另一方面,若在制品中明显存在导电粒子的遗漏,则在各向异性导电连接的连接稳定性上出现问题。Furthermore, anisotropic conductive film products are typically manufactured in lengths exceeding 5 meters. Therefore, it is difficult and unrealistic to produce an anisotropic conductive film with no missing conductive particles along its entire length. For example, if even a single missing conductive particle is considered an out-of-specification defective product, the product yield rate decreases, increasing manufacturing costs. Furthermore, if missing conductive particles are noticeable in the product, the stability of the anisotropic conductive connection becomes problematic.
因此本发明的课题是即便为对于导电粒子的既定规则性配置存在遗漏的各向异性导电膜,也能够与没有遗漏的各向异性导电膜大致同样地供于各向异性导电连接。Therefore, an object of the present invention is to provide an anisotropic conductive film having omissions in a predetermined regular arrangement of conductive particles for anisotropic conductive connection in substantially the same manner as an anisotropic conductive film having no omissions.
用于解决课题的方案Solutions to Problems
本发明人发现了在对于导电粒子的既定规则性配置存在遗漏的情况下,在以下(A)~(C)的情况中在各向异性导电连接上也不会出现问题。The present inventors have discovered that even when there are omissions in the predetermined regular arrangement of the conductive particles, no problems arise in the anisotropic conductive connection in the following cases (A) to (C).
(A)若对导电粒子的既定规则性配置遗漏连续则容易引起导通不良,特别是在各向异性导电膜的长边方向遗漏连续时该倾向较强,但是,即便为各向异性导电膜的长边方向上连续的遗漏,只要该连续数为与连接对象对应的既定数以下,也就难以引起导通不良。(A) If there are continuous omissions in the predetermined regular arrangement of conductive particles, poor conduction is likely to occur. This tendency is particularly strong when there are continuous omissions in the long side direction of the anisotropic conductive film. However, even if there are continuous omissions in the long side direction of the anisotropic conductive film, as long as the number of consecutive omissions is less than the predetermined number corresponding to the connection object, poor conduction is unlikely to occur.
(B)在将各向异性导电膜使用于各个凸点面积比较大的FOG(film on glass)等的情况下,一般凸点宽度最大为200μm左右,因此,如果在各向异性导电膜的长边方向200μm的范围存在10个以上的导电粒子,即便对导电粒子的规则性配置存在遗漏的情况下实质上也不会发生连接的问题。(B) When anisotropic conductive film is used on FOG (film on glass) or other materials where the bumps are relatively large, the maximum bump width is generally around 200 μm. Therefore, if there are more than 10 conductive particles within a 200 μm range in the long side direction of the anisotropic conductive film, there will be no substantial connection problems even if there are omissions in the regular arrangement of the conductive particles.
(C)在将各向异性导电膜使用于凸点的位置处于特定的部位(例如在短边方向的两端部有凸点列),且各个凸点面积比较小的COG(chip on glass)等的情况下,使各向异性导电膜的短边方向的两端部和芯片的端子列一致时,只要导电粒子以既定数以上连续遗漏的部位(即,以在实际使用上成为问题的水平显著遗漏的部位)不沿着各向异性导电膜的短边方向的两端部存在,在短边方向的中央部即便导电粒子以既定数以上连续遗漏也难以在连接上产生问题。(C) In the case of anisotropic conductive film used for bumps at specific locations (for example, there are bump rows at both ends in the short side direction) and in the case of COG (chip on glass) where the area of each bump is relatively small, when the both ends in the short side direction of the anisotropic conductive film are aligned with the terminal rows of the chip, as long as the locations where conductive particles are continuously omitted by a predetermined number or more (that is, the locations where they are significantly omitted at a level that becomes a problem in actual use) are not present along the both ends in the short side direction of the anisotropic conductive film, even if the conductive particles are continuously omitted by a predetermined number or more in the central portion in the short side direction, it is unlikely that problems will occur in the connection.
本发明基于这些见解而构思,提供各向异性导电膜,其长度为5m以上,具有在绝缘性树脂粘合剂有规则地配置有导电粒子的规则配置区域,在该规则配置区域内,不存在导电粒子连续遗漏既定数以上的部位的规格内区域,以各向异性导电膜的短边方向的既定宽度,在各向异性导电膜的长边方向以既定长度以上存在。The present invention is conceived based on these insights and provides an anisotropic conductive film having a length of more than 5m, having a regularly arranged area in which conductive particles are regularly arranged in an insulating resin adhesive, and within the regularly arranged area, there is no in-specification area where conductive particles are continuously omitted for more than a predetermined number of places, and the anisotropic conductive film exists with a predetermined width in the short side direction and a predetermined length or more in the long side direction of the anisotropic conductive film.
本发明的各向异性导电膜的结构,即便对导电粒子的既定规则性配置存在遗漏,也能够与没有遗漏的各向异性导电膜进行大致同样的各向异性导电连接,换言之,有着在不降低各向异性导电膜的特性的范围内减少导电粒子的存在量的结构的意思。因而,本发明的各向异性导电膜能够削减使用于导电粒子的金属的量,不仅有削减制造成本的效果,而且有降低环境负担的效果或有助于缓冲作为各向异性导电膜制品的规格条件(提高制造成品率)。这样为了以各向异性连接所需要的最小限的导电粒子个数得到稳定的导通特性,优选使规则配置区域和规格内区域一致。此外,只要不明显损害本发明的效果,也可以存在导电粒子连续遗漏既定数以上的部位即规格外的部位。The structure of the anisotropic conductive film of the present invention enables substantially the same anisotropic conductive connection as an anisotropic conductive film without omissions, even if there are omissions in the regular arrangement of conductive particles. In other words, the structure allows the amount of conductive particles to be reduced without degrading the properties of the anisotropic conductive film. Therefore, the anisotropic conductive film of the present invention can reduce the amount of metal used in the conductive particles, not only reducing manufacturing costs but also lowering environmental impact or helping to mitigate the specifications of anisotropic conductive film products (improving manufacturing yield). To achieve stable conductive properties with the minimum number of conductive particles required for anisotropic connection, it is preferable to make the regularly arranged area and the within-specification area consistent. Furthermore, areas where more than a predetermined number of conductive particles are continuously omitted, i.e., areas outside the specification, may exist, as long as this does not significantly impair the effects of the present invention.
特别是,作为各个凸点面积比较小且凸点个数多的、例如COG(chip on glass)用的各向异性导电膜,提供沿着各向异性导电膜的短边方向的至少端部区域具有规格内区域的方式。In particular, an anisotropic conductive film for a large number of bumps, such as COG (chip on glass), where each bump area is relatively small, is provided in which at least the end regions along the short side of the anisotropic conductive film have within-specification regions.
另外,作为各个凸点面积比较大的、例如FOG(film on glass)用的各向异性导电膜,提供在各向异性导电膜的全宽度上任意选择长边方向200μm的区域中,存在10个以上的导电粒子的方式。In addition, as an anisotropic conductive film for FOG (film on glass) with a relatively large bump area, a method is provided in which 10 or more conductive particles are present in a region of 200 μm in the longitudinal direction arbitrarily selected across the entire width of the anisotropic conductive film.
本发明另外提供各向异性导电膜的制造方法,将在绝缘性树脂粘合剂中有规则地配置有导电粒子的各向异性导电膜的宽幅整卷(原反),以不包含导电粒子相对于规则的配置连续遗漏既定数以上的规格外的部位的方式、或者以使规格外的部位成为膜的短边方向的想要的位置的方式,沿长度方向裁断,作成长度5m以上的各向异性导电膜。The present invention also provides a method for producing an anisotropic conductive film, comprising cutting a wide roll (original and reverse) of an anisotropic conductive film in which conductive particles are regularly arranged in an insulating resin adhesive into an anisotropic conductive film having a length of 5 m or more in a longitudinal direction in a manner that does not include any out-of-specification portions where the conductive particles are continuously omitted from the regular arrangement by a predetermined number or in a manner that makes the out-of-specification portions be at desired positions in the short side direction of the film.
本发明进一步提供各向异性导电膜的制造方法,从具有绝缘性树脂粘合剂中有规则地配置有导电粒子的规格配置区域的各向异性导电膜,除去导电粒子连续遗漏既定数以上的规格外的部位,使除去后的各向异性导电膜接合,作成长度5m以上的各向异性导电膜。若为长度5m以上,则变得容易在连续生产用的各向异性连接装置设置并进行验证。即从通用的用于各向异性连接构造体的各向异性导电膜替换的情况下,能够减少验证的负担。The present invention further provides a method for producing an anisotropic conductive film. The method involves removing out-of-specification areas where conductive particles are continuously omitted for a predetermined number or more from an anisotropic conductive film having an insulating resin binder, and then joining the removed anisotropic conductive film to produce an anisotropic conductive film having a length of 5 m or greater. A length of 5 m or greater facilitates installation and verification in anisotropic connection equipment used for continuous production. This reduces the verification burden when replacing anisotropic conductive film used in conventional anisotropic connection structures.
本发明还提供连接构造体的制造方法,该连接构造体隔着各向异性导电膜热压接具有端子列的第1电子部件和具有端子列的第2电子部件,从而各向异性导电连接第1电子部件和第2电子部件的端子列彼此,该各向异性导电膜具有在绝缘性树脂粘合剂中有规则地配置有导电粒子的规格配置区域,The present invention also provides a method for manufacturing a connection structure, wherein a first electronic component having a terminal array and a second electronic component having a terminal array are thermocompressed with an anisotropic conductive film interposed therebetween, thereby anisotropically connecting the terminal arrays of the first and second electronic components to each other, wherein the anisotropic conductive film has a regular arrangement region in which conductive particles are regularly arranged in an insulating resin adhesive.
作为各向异性导电膜,使用在该规格配置区域内不存在导电粒子连续遗漏既定数以上的部位的规格内区域,以各向异性导电膜的短边方向的既定宽度在各向异性导电膜的长边方向以既定长度形成的各向异性导电膜,As the anisotropic conductive film, an anisotropic conductive film is used, wherein there is no area within the specification arrangement area where conductive particles are continuously omitted for a predetermined number or more, and the anisotropic conductive film is formed with a predetermined width in the short side direction and a predetermined length in the long side direction of the anisotropic conductive film.
将该规格内区域对准到电子部件的端子列。Align the area within the specification with the terminal array of the electronic component.
在该制造方法中,在第1电子部件及第2电子部件分别具有多个端子列,并在各向异性导电膜中规格内区域并排形成的情况下,In this manufacturing method, when the first electronic component and the second electronic component each have a plurality of terminal rows, and the within-specification regions are formed in parallel in the anisotropic conductive film,
优选将相邻的规格区域之间的区域,对准到端子列与端子列之间的区域。It is preferred that the area between adjacent specification areas be aligned with the area between terminal rows.
发明效果Effects of the Invention
依据本发明的各向异性导电膜的制造方法,能够从以往因导电粒子的遗漏而被判定为不良的各向异性导电膜,提取实际使用上没有问题的区域而制造各向异性导电膜。另外,依据本发明的连接构造体的制造方法,即便使用于连接构造体的制造的各向异性导电膜,具有因导电粒子的遗漏这一点而被判定为有问题的部位,当不存在导电粒子连续遗漏既定数以上的部位的规格内区域,以各向异性导电膜的短边方向的既定宽度在各向异性导电膜的长边方向以既定长度延伸设置时,将该规格内区域对准到电子部件的端子列。因而,不会损害各向异性导电连接的可靠性,而能够提高各向异性导电膜的制造的成品率。According to the method for manufacturing an anisotropic conductive film of the present invention, it is possible to extract areas that are practically problem-free from anisotropic conductive films that have previously been judged to be defective due to the omission of conductive particles, thereby producing an anisotropic conductive film. Furthermore, according to the method for manufacturing a connection structure of the present invention, even if the anisotropic conductive film used to manufacture the connection structure has areas that have been judged to be problematic due to the omission of conductive particles, if there are no areas within the specification where a predetermined number or more of conductive particles are continuously missing, and the anisotropic conductive film is provided with a predetermined width in the short direction and a predetermined length in the long direction, the within-specification area can be aligned with the terminal array of the electronic component. This improves the yield rate of the anisotropic conductive film manufacturing without compromising the reliability of the anisotropic conductive connection.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
[图1]图1是说明实施例的各向异性导电膜1A的导电粒子的配置的平面图。[ Fig. 1] Fig. 1 is a plan view illustrating the arrangement of conductive particles in an anisotropic conductive film 1A according to an embodiment.
[图2]图2是说明实施例的各向异性导电膜1B的导电粒子的配置的平面图。[ Fig. 2] Fig. 2 is a plan view illustrating the arrangement of conductive particles in an anisotropic conductive film 1B of the embodiment.
[图3]图3是说明实施例的各向异性导电膜1C的导电粒子的配置的平面图。[ Fig. 3] Fig. 3 is a plan view illustrating the arrangement of conductive particles in an anisotropic conductive film 1C according to an embodiment.
[图4]图4是示出COG用的各向异性导电膜中导电粒子的配置为规格外的部位的位置的平面图。[ FIG. 4] FIG. 4 is a plan view showing the positions of portions where the arrangement of conductive particles in the anisotropic conductive film for COG is out of specification.
[图5]图5是实施例的各向异性导电膜1a的截面图。[ Fig. 5] Fig. 5 is a cross-sectional view of an anisotropic conductive film 1a according to an embodiment.
[图6]图6是实施例的各向异性导电膜1b的截面图。[ Fig. 6] Fig. 6 is a cross-sectional view of an anisotropic conductive film 1b of an embodiment.
[图7]图7是实施例的各向异性导电膜1c的截面图。[ Fig. 7] Fig. 7 is a cross-sectional view of an anisotropic conductive film 1c according to an embodiment.
[图8]图8是实施例的各向异性导电膜1d的截面图。[ Fig. 8] Fig. 8 is a cross-sectional view of an anisotropic conductive film 1d according to an embodiment.
[图9]图9是实施例的各向异性导电膜1e的截面图。[ Fig. 9] Fig. 9 is a cross-sectional view of an anisotropic conductive film 1e according to an embodiment.
[图10]图10是示出评价用IC的凸点排列的概略图。[Fig. 10] Fig. 10 is a schematic diagram showing the bump arrangement of an evaluation IC.
具体实施方式DETAILED DESCRIPTION
以下,一边参照附图一边详细地对本发明进行说明。此外,各图中,相同标号表示相同或同等的结构要素。Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. In addition, in each figure, the same reference numerals represent the same or equivalent components.
<各向异性导电膜><Anisotropic Conductive Film>
(各向异性导电膜的整体结构)(Overall structure of anisotropic conductive film)
本发明的各向异性导电膜具有导电粒子有规则地配置在绝缘性树脂粘合剂的区域(规则配置区域),优选的是在俯视观察下导电粒子互相分离且规则(例如格子状)地配置。在此,既可以在各向异性导电膜的整个面扩展一个规则配置区域,也可以在整个面多个导电粒子群分别作为规则配置区域互相隔离地配置。The anisotropic conductive film of the present invention comprises regions in which conductive particles are regularly arranged within an insulating resin binder (regularly arranged regions). Preferably, the conductive particles are separated from one another and arranged in a regular pattern (e.g., a grid pattern) when viewed from above. A single regularly arranged region may extend across the entire surface of the anisotropic conductive film, or multiple groups of conductive particles may be arranged across the entire surface as separate regularly arranged regions.
本发明的各向异性导电膜由于具有规则配置区域,能够正确地检查并掌握针对导电粒子的规则配置的导电粒子的遗漏。关于本发明的各向异性导电膜,在这样的规则配置区域内,不存在导电粒子连续遗漏既定数以上的部位的规格内区域,以各向异性导电膜的短边方向的既定宽度在各向异性导电膜的长边方向以既定长度以上存在。此外,多个导电粒子群在各向异性导电膜的整个面分别作为规则配置区域互相隔离地配置的情况下,在各个规则配置区域,规格内区域以各向异性导电膜的短边方向的既定宽度在各向异性导电膜的长边方向以既定长度以上存在。The anisotropic conductive film of the present invention has a regularly arranged area, which can accurately detect and grasp the omission of conductive particles in the regularly arranged area of the conductive particles. With respect to the anisotropic conductive film of the present invention, within such a regularly arranged area, there is no within-specification area where the conductive particles are continuously omitted for more than a predetermined number of times, and the within-specification area exists with a predetermined width in the short side direction of the anisotropic conductive film and a predetermined length in the long side direction of the anisotropic conductive film. In addition, when a plurality of conductive particle groups are arranged as regularly arranged areas separated from each other on the entire surface of the anisotropic conductive film, in each regularly arranged area, the within-specification area exists with a predetermined width in the short side direction of the anisotropic conductive film and a predetermined length in the long side direction of the anisotropic conductive film.
在此,关于规格内区域,各向异性导电膜的短边方向在一般的各向异性导电连接构造体中成为端子的长边方向,因此在各向异性导电膜的短边方向成排的导电粒子在端子上的捕获性变得良好,且各向异性导电连接条件变得比较容易缓冲。因而,在将各向异性导电膜的短边方向全部按压到连接工具而有助于各向异性导电连接的情况下,也能缓冲各向异性导电膜的短边方向的按压宽度条件。具体而言,各向异性导电膜的短边方向的“既定宽度”的上限,优选为各向异性导电膜的短边方向的95%以下,更优选为90%以下,另一方面,下限优选为10%以上,更优选为20%以上即可。另外,关于各向异性导电膜的短边方向的“既定宽度”的位置,为了容易适用于一般的COG等IC芯片或与其类似的端子布局的各向异性连接,优选处于各向异性导电膜的短边方向的中央部以外、即端部(两端部)。两端部上的各个规格内区域的宽度既可以相同,也可以不同。为了适合于所要求的端子布局。Regarding the within-specification area, the short-side direction of the anisotropic conductive film corresponds to the long-side direction of the terminal in a typical anisotropic conductive connection structure. This improves the ability of the conductive particles aligned along the short-side direction of the anisotropic conductive film to be captured by the terminal, and the anisotropic conductive connection conditions are relatively easily mitigated. Consequently, when the entire short-side direction of the anisotropic conductive film is pressed against the connection tool to facilitate anisotropic conductive connection, the pressing width condition along the short-side direction of the anisotropic conductive film can also be mitigated. Specifically, the upper limit of the "predetermined width" along the short-side direction of the anisotropic conductive film is preferably 95% or less, more preferably 90% or less of the short-side direction of the anisotropic conductive film. Meanwhile, the lower limit is preferably 10% or more, more preferably 20% or more. Furthermore, the "predetermined width" of the anisotropic conductive film in the short-side direction is preferably located outside the center of the short-side direction of the anisotropic conductive film, that is, at the ends (either end portions), to facilitate anisotropic connection with IC chips such as conventional COGs and similar terminal layouts. The widths of the respective within-specification regions at the two end portions can be the same or different to accommodate the desired terminal layout.
另一方面,关于规格内区域,各向异性导电膜的长边方向(即,在一般的各向异性导电连接构造体中端子的短边方向)的“既定长度以上”是指在以各向异性导电连接构造体(例如,照相机模块等的10mm见方左右的小型部位安装体)为基准时,则为5mm以上即可,优选为10mm以上,更优选为20mm(相当于各向异性导电膜长度为5m的情况下的0.4%)以上。另外,如果为大型的各向异性导电连接构造体(例如,80英寸以上的大型显示器等)的情况下,也可以使规则配置区域为2000mm以上。On the other hand, regarding the within-specification area, the term "above a predetermined length" in the long direction of the anisotropic conductive film (i.e., the short direction of the terminals in a typical anisotropic conductive connection structure) means, based on an anisotropic conductive connection structure (e.g., a small, approximately 10 mm square component such as a camera module), that the length should be 5 mm or longer, preferably 10 mm or longer, and more preferably 20 mm or longer (equivalent to 0.4% of the length of an anisotropic conductive film of 5 m). Furthermore, for large anisotropic conductive connection structures (e.g., large displays of 80 inches or more), the regularly arranged area can be 2000 mm or longer.
此外,关于规格内区域,各向异性导电膜的长边方向的“既定长度以上”的上限越长各向异性导电膜本身越为良品,所以是优选的。因而,该“既定长度以上”的上限没有特别限制,但是从对各向异性导电膜进行质量管理时进行图像检查的观点来看,若限制为一定程度的长度,则还有质量上的信息管理变得容易进行的方面。例如,如果以某一长度隔开,则会容易进行每个该长度的数据的比较。另外,还有单纯地图像数据的容量不多也可以的优点。作为“既定长度以上”的上限的一个例子,如果为1000m以下、优选为500m以下、更优选为350m以下、再优选为50m以下,则变得容易进行检查中的图像数据的处理或管理。In addition, regarding the area within the specification, the longer the upper limit of "above a predetermined length" in the long side direction of the anisotropic conductive film, the higher the quality of the anisotropic conductive film itself, so it is preferred. Therefore, there is no special limit on the upper limit of "above a predetermined length", but from the perspective of image inspection when performing quality management of the anisotropic conductive film, if it is limited to a certain length, it will be easier to manage quality information. For example, if it is separated by a certain length, it will be easy to compare the data of each length. In addition, there is also the advantage of simply not having a large amount of image data. As an example of the upper limit of "above a predetermined length", if it is less than 1000m, preferably less than 500m, more preferably less than 350m, and more preferably less than 50m, it will become easier to process or manage the image data during inspection.
此外,从稳定连接的方面来看,优选使规格内区域相对于规则配置区域无限地相等、进而一致。此外,只要不明显损害本发明的效果,也可以在规则配置区域内存在使导电粒子连续遗漏既定数以上的部位(规格外的部位)。此外,在各向异性导电膜的规则配置区域外,也可以存在不存在导电粒子的空白区域、或导电粒子随机配置的随机配置区域。Furthermore, from the perspective of stable connection, it is preferable to make the within-specification region infinitely equal to, and even identical to, the regularly arranged region. Furthermore, as long as this does not significantly impair the effects of the present invention, portions (out-of-specification portions) where a predetermined number or more of the conductive particles are continuously omitted may exist within the regularly arranged region. Furthermore, outside the regularly arranged region of the anisotropic conductive film, blank regions where no conductive particles are present, or random arrangement regions where the conductive particles are randomly arranged, may exist.
另外,本发明的各向异性导电膜的膜长度,为了使各向异性导电连接形成的连接构造体的生产性稳定,优选为5m以上、更优选为10m以上、进一步优选为50m以上。另一方面,若膜长度过长则对装置的设置、输送的工夫等需要劳力或者装置改造的成本变大,因此优选为5000m以下,更优选为1000m以下,进一步优选为500m以下。另外,膜宽度没有特别限制,例如为0.5~5mm。In order to ensure stable productivity of the connected structure formed by the anisotropic conductive connection, the film length of the anisotropic conductive film of the present invention is preferably 5 m or longer, more preferably 10 m or longer, and even more preferably 50 m or longer. On the other hand, if the film length is too long, the labor required for equipment installation and transportation, as well as the cost of equipment modification, will increase. Therefore, it is preferably 5000 m or shorter, more preferably 1000 m or shorter, and even more preferably 500 m or shorter. The film width is not particularly limited, but is, for example, 0.5 to 5 mm.
这样各向异性导电膜长度相对于宽度长,因此优选为卷绕到卷轴(reel)的卷装体。卷装体也可以接合多个各向异性导电膜。各向异性导电膜的连结上能够使用连结带。连结带的厚度没有特别限制,但是过厚则对树脂的挤出或阻塞(blocking)产生不良影响,因此优选为10~40μm。Since the anisotropic conductive film is longer than its width, it is preferably wound onto a reel as a roll. A roll can also be made by joining multiple anisotropic conductive films. A connecting tape can be used to connect the anisotropic conductive films. The thickness of the connecting tape is not particularly limited, but excessive thickness can adversely affect resin extrusion or blocking, so it is preferably 10 to 40 μm.
(导电粒子的配置)(Configuration of conductive particles)
作为导电粒子的规则的配置,例如,如图1所示的各向异性导电膜1A那样,可举出正方格子排列。除此以外,作为导电粒子的规则的配置,能够举出长方格子、斜方格子、六方格子等的格子排列。也可以按既定间隔并排导电粒子以既定间隔直线状排列的粒子列。另外,如图2所示的各向异性导电膜1B那样,也可以导电粒子2占据在将正多边形无间隙地并排的情况下的正多边形(在本实施例中为正六边形)的顶点之中的多个顶点,作为导电粒子2的配置,以能够认定由导电粒子2a、2b、2c、2d组成的梯形的重复单元5。此外,梯形的重复单元为导电粒子的规则的配置的一个例子,既可为隔离的配置,另外也可以是多个重复单元的集合为隔离的导电粒子规则配置区域。在此,重复单元5为依次连结最接近的导电粒子2的中心而形成的导电粒子的配置的重复单位,因既定规则性的重复而重复单元5遍及各向异性导电膜的一面。重复单元5本身中的导电粒子的配置形状没有特别限制,但是,如果在重复单元5中以使导电粒子2占据正多边形的一部分的方式配置,则容易掌握导电粒子的配置,因此能够容易判断对于既定配置有无导电粒子的遗漏。此外,若容易掌握导电粒子的配置,则在制造各向异性导电膜时、或在利用各向异性导电膜连接电子部件后的压痕检查等的制品检查中各个作业变得容易,能够缩短时间,从而能够谋求削减工时数。As a regular arrangement of conductive particles, for example, a square lattice arrangement can be cited, as in the anisotropic conductive film 1A shown in FIG1 . In addition, as a regular arrangement of conductive particles, a lattice arrangement such as a rectangular lattice, a rhombus lattice, or a hexagonal lattice can be cited. A column of particles in which conductive particles are arranged linearly at predetermined intervals and arranged side by side at predetermined intervals can also be cited. Furthermore, as in the anisotropic conductive film 1B shown in FIG2 , the conductive particles 2 can be arranged such that the conductive particles 2 occupy a plurality of vertices among the vertices of a regular polygon (a regular hexagon in this embodiment) in which the regular polygons are arranged side by side without gaps, so that a trapezoidal repeating unit 5 consisting of the conductive particles 2a, 2b, 2c, and 2d can be identified. Furthermore, the trapezoidal repeating unit is an example of a regular arrangement of conductive particles, which can be either an isolated arrangement or a collection of a plurality of repeating units forming an isolated regular arrangement region of conductive particles. Here, the repeating unit 5 is a repeating unit of the configuration of conductive particles formed by sequentially connecting the centers of the closest conductive particles 2. Due to the repetition of a predetermined regularity, the repeating unit 5 extends across one side of the anisotropic conductive film. The configuration shape of the conductive particles in the repeating unit 5 itself is not particularly limited. However, if the repeating unit 5 is configured so that the conductive particles 2 occupy a portion of a regular polygon, it is easy to understand the configuration of the conductive particles, and thus it is easy to determine whether any conductive particles are missing from the predetermined configuration. In addition, if the configuration of the conductive particles is easy to understand, various operations in the manufacture of the anisotropic conductive film or in product inspection such as indentation inspection after connecting electronic components using the anisotropic conductive film become easier, which can shorten the time and thus reduce the number of working hours.
导电粒子2的排列的格子轴或排列轴,既可以对各向异性导电膜的长边方向平行,也可以与各向异性导电膜的长边方向交叉,能够对应所连接的端子宽度、端子间距等而确定。例如,在设为微小(fine)间距用的各向异性导电性膜的情况下,如图1所示使导电粒子2的格子轴L1相对于各向异性导电膜1A的长边方向倾斜,并使以各向异性导电膜1A连接的端子10的长边方向(膜的短边方向)与格子轴L1所成的角度θ优选为6°~84°、更优选为11°~74°。The lattice axis or arrangement axis of the conductive particles 2 can be parallel to or intersecting the longitudinal direction of the anisotropic conductive film and can be determined based on the width of the connected terminals, the terminal pitch, etc. For example, in the case of an anisotropic conductive film for fine pitch, as shown in FIG1 , the lattice axis L1 of the conductive particles 2 is tilted relative to the longitudinal direction of the anisotropic conductive film 1A, and the angle θ formed between the longitudinal direction (the short side of the film) of the terminal 10 connected to the anisotropic conductive film 1A and the lattice axis L1 is preferably 6° to 84°, and more preferably 11° to 74°.
(导电粒子)(Conductive particles)
作为导电粒子2,能够适当选择公知的各向异性导电膜中使用的导电粒子而使用。能够举出例如镍、铜、银、金、钯等的金属粒子;以镍等的金属包覆聚酰胺、聚苯并胍胺等的树脂粒子的表面的金属包覆树脂粒子等。所配置的导电粒子的大小,优选为1μm以上30μm以下,更优选为1μm以上10μm以下,进一步优选为2μm以上6μm以下。Conductive particles 2 can be appropriately selected from known conductive particles used in anisotropic conductive films. Examples include metal particles of nickel, copper, silver, gold, palladium, and the like; and metal-coated resin particles obtained by coating the surface of resin particles such as polyamide and polybenzoguanamine with a metal such as nickel. The size of the conductive particles is preferably 1 μm to 30 μm, more preferably 1 μm to 10 μm, and even more preferably 2 μm to 6 μm.
导电粒子2的平均粒径,能够利用图像式或者激光式的粒度分布计进行测定。也可以俯视观察下观察各向异性导电膜,并计测粒径而求出。在此情况下,优选计测200个以上,更优选计测500个以上,进一步更优选计测1000个以上。The average particle size of the conductive particles 2 can be measured using an imaging or laser particle size distribution analyzer. Alternatively, the average particle size can be determined by observing the anisotropic conductive film from above and measuring the particle size. In this case, preferably 200 or more particles are measured, more preferably 500 or more particles are measured, and even more preferably 1000 or more particles are measured.
导电粒子2的表面优选通过绝缘涂层或绝缘粒子处理等来包覆。作为这样的包覆,选择难以从导电粒子2的表面剥离且对各向异性连接不会产生问题的包覆。另外,也可以在导电粒子2的表面的整个面或一部分设置突起。突起的高度优选为导电粒径的20%以内,更优选为10%以内。The surfaces of the conductive particles 2 are preferably coated with an insulating coating or insulating particle treatment. Such a coating should be selected so as to be difficult to peel from the surface of the conductive particles 2 and not cause problems with anisotropic bonding. Alternatively, protrusions may be provided on the entire or a portion of the surface of the conductive particles 2. The height of the protrusions is preferably within 20% of the conductive particle diameter, and more preferably within 10%.
(导电粒子的最短粒子间距离)(Shortest interparticle distance of conductive particles)
导电粒子的最短粒子间距离优选为导电粒子的平均粒径的0.5倍以上。若该距离过短则容易因导电粒子相互的接触而引起短路。邻接的导电粒子的距离的上限,能够对应凸点形状或凸点间距进行确定。作为一个例子,如果设为捕获10个以上导电粒子,则小于平均粒径的50倍即可,若小于40倍则优选。若小于30倍则更优选。The shortest interparticle distance of the conductive particles is preferably more than 0.5 times the average particle size of the conductive particles. If the distance is too short, it is easy to cause a short circuit due to contact between the conductive particles. The upper limit of the distance between adjacent conductive particles can be determined by corresponding bump shape or bump spacing. As an example, if it is set to capture more than 10 conductive particles, it is less than 50 times the average particle size, and preferably less than 40 times. More preferably less than 30 times.
(导电粒子的个数密度)(Number density of conductive particles)
从抑制各向异性导电膜的制造成本的方面来看,导电粒子的个数密度优选为50000个/mm 2以下,更优选为35000个/mm 2以下,进一步优选为30000个/mm 2以下。另一方面,导电粒子的个数密度若过少,则担心因端子上不能充分捕获导电粒子而产生导通不良,因此30个/mm 2以上即可,优选为300个/mm 2以上,更优选为500个/mm 2以上,进一步优选为800个/mm 2以上。From the perspective of reducing the production cost of the anisotropic conductive film, the number density of the conductive particles is preferably 50,000 particles/ mm² or less, more preferably 35,000 particles/ mm² or less, and even more preferably 30,000 particles/ mm² or less. On the other hand, if the number density of the conductive particles is too low, there is a concern that the conductive particles may not be sufficiently captured by the terminals, resulting in poor conduction. Therefore, a number density of 30 particles/ mm² or more is sufficient, preferably 300 particles/ mm² or more, more preferably 500 particles/ mm² or more, and even more preferably 800 particles/ mm² or more is sufficient.
(绝缘性树脂粘合剂)(Insulating resin adhesive)
作为绝缘性树脂粘合剂3,能够适当选择公知的各向异性导电膜中用作为绝缘性树脂粘合剂的热聚合性组合物、光聚合性组合物、光热并用聚合性组合物等而使用。其中作为热聚合性组合物,能够举出包含丙烯酸酯化合物和热自由基聚合引发剂的热自由基聚合性树脂组合物;包含环氧化合物和热阳离子聚合引发剂的热阳离子聚合性树脂组合物;包含环氧化合物和热阴离子聚合引发剂的热阴离子聚合性树脂组合物等,而作为光聚合性组合物,能够举出包含丙烯酸酯化合物和光自由基聚合引发剂的光自由基聚合性树脂组合物等。特别是,如果不产生问题,则也可以并用多种聚合性组合物。作为并用例,能举出热阳离子聚合性组合物和热自由基聚合性组合物的并用等。As the insulating resin binder 3, a suitable selection of known thermopolymerizable compositions, photopolymerizable compositions, and photothermal polymerizable compositions used as insulating resin binders in anisotropic conductive films can be used. Examples of thermopolymerizable compositions include thermoradical polymerizable resin compositions containing an acrylate compound and a thermal radical polymerization initiator; thermocationic polymerizable resin compositions containing an epoxy compound and a thermal cationic polymerization initiator; and thermoanionic polymerizable resin compositions containing an epoxy compound and a thermal anionic polymerization initiator. Examples of photopolymerizable compositions include photoradical polymerizable resin compositions containing an acrylate compound and a photoradical polymerization initiator. In particular, multiple polymerizable compositions may be used in combination if no problems arise. Examples of combined use include the combination of a thermocationic polymerizable composition and a thermoradical polymerizable composition.
在此,作为光聚合引发剂,也可以含有对不同波长的光产生反应的多种光聚合引发剂。由此,能够在制造各向异性导电膜时的、构成绝缘性树脂层的树脂的光固化、和各向异性连接时用于粘接电子部件彼此的树脂的光固化上分开使用所使用的波长。Here, the photopolymerization initiator may contain multiple photopolymerization initiators that react to light of different wavelengths. This allows different wavelengths to be used for photocuring the resin constituting the insulating resin layer during the manufacture of the anisotropic conductive film and for photocuring the resin used to bond electronic components during anisotropic connection.
在使用光聚合性组合物形成绝缘性树脂粘合剂3的情况下,通过在制造各向异性导电膜时的光固化,能够使绝缘性树脂粘合剂3所包含的光聚合性化合物的全部或一部分光固化。通过该光固化,保持或固定绝缘性树脂粘合剂3中的导电粒子2的配置,有抑制短路和提高捕获的前景。另外,通过调整该光固化的条件,能够调整各向异性导电膜的制造工序中的绝缘性树脂层的粘度。When insulating resin binder 3 is formed using a photopolymerizable composition, all or part of the photopolymerizable compound contained in insulating resin binder 3 can be photocured by photocuring during the manufacture of the anisotropic conductive film. This photocuring maintains or fixes the arrangement of conductive particles 2 in insulating resin binder 3, offering the potential for suppressing short circuits and improving capture. Furthermore, by adjusting the photocuring conditions, the viscosity of the insulating resin layer during the anisotropic conductive film manufacturing process can be adjusted.
绝缘性树脂粘合剂3中的光聚合性化合物的配合量优选为30质量%以下,更优选为10质量%以下,进一步优选为小于2质量%。这是因为如果光聚合性化合物过多,则会增加各向异性导电连接时的压入所需的推力。The amount of the photopolymerizable compound in the insulating resin adhesive 3 is preferably 30% by mass or less, more preferably 10% by mass or less, and even more preferably less than 2% by mass. This is because too much photopolymerizable compound increases the thrust required for press-fitting during anisotropic conductive connection.
另一方面,热聚合性组合物含有热聚合性化合物和热聚合引发剂,但是作为该热聚合性化合物,也可以使用还作为光聚合性化合物发挥功能的物质。另外,也可以使热聚合性组合物与热聚合性化合物不同地含有光聚合性化合物,并且含有光聚合性引发剂。优选的是,与热聚合性化合物不同地含有光聚合性化合物和光聚合引发剂。例如,作为热聚合引发剂使用热阳离子聚合引发剂、作为热聚合性化合物使用环氧树脂、作为光聚合引发剂使用光自由基引发剂、作为光聚合性化合物使用丙烯酸酯化合物。也可以使绝缘性粘合剂3包含这些聚合性组合物的固化物。On the other hand, the thermopolymerizable composition contains a thermopolymerizable compound and a thermopolymerization initiator. However, the thermopolymerizable compound may also function as a photopolymerizable compound. Furthermore, the thermopolymerizable composition may contain a photopolymerizable compound separately from the thermopolymerizable compound and a photopolymerization initiator. Preferably, the thermopolymerizable compound and the photopolymerization initiator are separately from the thermopolymerizable compound. For example, a thermal cationic polymerization initiator may be used as the thermopolymerizable initiator, an epoxy resin may be used as the thermopolymerizable compound, a photoradical initiator may be used as the photopolymerization initiator, or an acrylate compound may be used as the photopolymerizable compound. The insulating adhesive 3 may also comprise a cured product of any of these polymerizable compositions.
作为用作为热或光聚合性化合物的丙烯酸酯化合物,能够使用现有公知的热聚合型(甲基)丙烯酸酯单体。例如,能够使用单官能(甲基)丙烯酸酯类单体、二官能以上的多官能(甲基)丙烯酸酯类单体。As the acrylate compound used as the thermally or photopolymerizable compound, conventionally known thermally polymerizable (meth)acrylate monomers can be used, for example, monofunctional (meth)acrylate monomers and difunctional or higher-functional (meth)acrylate monomers.
另外,作为聚合性化合物使用的环氧化合物,优选形成三维网状构造,并赋予良好的耐热性、粘接性,且并用固体环氧树脂和液状环氧树脂。在此,固体环氧树脂是指在常温下为固体状的环氧树脂。另外,液状环氧树脂是指在常温下为液状的环氧树脂。另外,常温是指以JISZ8703规定的5~35℃的温度范围。在本发明中能够并用两种以上的环氧化合物。另外,除了环氧化合物之外也可以并用氧杂环丁烷化合物。In addition, the epoxy compound used as the polymerizable compound preferably forms a three-dimensional network structure and imparts good heat resistance and adhesion, and is used in combination with a solid epoxy resin and a liquid epoxy resin. Here, a solid epoxy resin refers to an epoxy resin that is solid at room temperature. In addition, a liquid epoxy resin refers to an epoxy resin that is liquid at room temperature. In addition, room temperature refers to the temperature range of 5 to 35°C as specified in JIS Z8703. In the present invention, two or more epoxy compounds can be used in combination. In addition, an oxetane compound can also be used in combination in addition to the epoxy compound.
作为固体环氧树脂,只要与液状环氧树脂相溶且在常温下为固体状,就无特别限定,双酚A型环氧树脂、双酚F型环氧树脂、多官能型环氧树脂、二聚环戊二烯型环氧树脂、酚醛苯酚型环氧树脂、联苯型环氧树脂、萘型环氧树脂等,能够从这些之中单独利用一种,或者组合利用两种以上。在这些之中,优选利用双酚A型环氧树脂。The solid epoxy resin is not particularly limited as long as it is compatible with the liquid epoxy resin and is solid at room temperature. Examples of the solid epoxy resin include bisphenol A epoxy resin, bisphenol F epoxy resin, multifunctional epoxy resin, dicyclopentadiene epoxy resin, novolac phenol epoxy resin, biphenyl epoxy resin, and naphthalene epoxy resin. One of these epoxy resins can be used alone, or two or more can be used in combination. Among these, bisphenol A epoxy resin is preferably used.
作为液状环氧树脂,只要在常温下为液状就无特别限定,可举出双酚A型环氧树脂、双酚F型环氧树脂、酚醛苯酚型环氧树脂、萘型环氧树脂等,能够从这些之中单独利用一种,或者组合利用两种以上。特别是,从膜的胶粘性、柔软性等的观点来看,优选利用双酚A型环氧树脂。The liquid epoxy resin is not particularly limited as long as it is liquid at room temperature. Examples thereof include bisphenol A epoxy resin, bisphenol F epoxy resin, novolac phenol epoxy resin, and naphthalene epoxy resin. These can be used alone or in combination of two or more. In particular, bisphenol A epoxy resin is preferably used from the viewpoints of film adhesiveness and flexibility.
在热聚合引发剂之中作为热自由基聚合引发剂,能够举出例如有机过氧化物、偶氮类化合物等。特别是,能够优选使用不产生成为气泡原因的氮的有机过氧化物。Examples of thermal radical polymerization initiators include organic peroxides and azo compounds. In particular, organic peroxides that do not generate nitrogen that causes bubbles can be preferably used.
热自由基聚合引发剂的使用量,若过少则会成为固化不良,若过多则会降低制品寿命,因此相对于(甲基)丙烯酸酯化合物100质量份,优选为2~60质量份、更优选为5~40质量份。The amount of the thermal radical polymerization initiator used is preferably 2 to 60 parts by mass, more preferably 5 to 40 parts by mass, based on 100 parts by mass of the (meth)acrylate compound, because curing may be poor if too little, and product life may be shortened if too much.
作为热阳离子聚合引发剂,能够采用作为环氧化合物的热阳离子聚合引发剂而公知的引发剂,能够采用例如因热而产生氧的碘鎓盐、硫鎓盐、季鏻盐、二茂铁类等,特别是,能够优选使用对于温度显示良好的潜伏性的芳香族硫鎓盐。As the thermal cationic polymerization initiator, an initiator known as a thermal cationic polymerization initiator for epoxy compounds can be used. For example, iodonium salts, sulfonium salts, quaternary phosphonium salts, ferrocenes, etc. that generate oxygen by heat can be used. In particular, aromatic sulfonium salts that show good latency with respect to temperature can be preferably used.
热阳离子聚合引发剂的使用量,过少也有固化不良的倾向,过多也有降低制品寿命的倾向,因此相对于环氧化合物100质量份,优选为2~60质量份,更优选为5~40质量份。The amount of the thermal cationic polymerization initiator used tends to be insufficient in curing if too little, and tends to be shortened in product life if too much. Therefore, the amount is preferably 2 to 60 parts by mass, more preferably 5 to 40 parts by mass, based on 100 parts by mass of the epoxy compound.
作为阴离子聚合引发剂,能够使用通常采用的公知的固化剂。可举出例如有机酸二酰肼、双氰胺、胺基化合物、聚酰胺胺基(polyamideamine)化合物、氰酸酯化合物、酚醛树脂、酸酐、羧酸、三级胺基化合物、咪唑、路易斯酸、Brφnsted 酸盐、聚硫醇类固化剂、尿素树脂、三聚氰胺树脂、异氰酸酯化合物、封端异氰酸酯化合物等,能够从这些之中单独利用一种或组合两种以上利用。这些之中,优选使用以咪唑改性体为核再以聚氨酯包覆其表面而成的微胶囊型潜伏性固化剂。As anionic polymerization initiators, commonly used known curing agents can be used. Examples include organic acid dihydrazides, dicyandiamide, amino compounds, polyamideamine compounds, cyanate compounds, phenolic resins, acid anhydrides, carboxylic acids, tertiary amino compounds, imidazoles, Lewis acids, Brønsted acid salts, polythiol curing agents, urea resins, melamine resins, isocyanate compounds, and blocked isocyanate compounds. These can be used alone or in combination of two or more. Among these, microcapsule-type latent curing agents comprising a modified imidazole core coated with polyurethane are preferred.
优选使热聚合性组合物含有膜形成树脂。膜形成树脂,例如相当于平均分子量为10000以上的高分子量树脂,从膜形成性的观点来看,优选平均分子量为10000~80000左右。作为膜形成树脂,可举出苯氧基树脂、聚酯树脂、聚氨酯树脂、聚酯聚氨酯树脂、丙烯树脂、聚酰亚胺树脂、丁缩醛树脂等的各种树脂,这些既可以单独利用,也可以组合两种以上来利用。这些之中,从膜形成状态、连接可靠性等的观点来看能够适当地利用苯氧基树脂。The thermopolymerizable composition preferably contains a film-forming resin. The film-forming resin is, for example, a high molecular weight resin having an average molecular weight of 10,000 or more. From the perspective of film formation, the average molecular weight is preferably about 10,000 to 80,000. Examples of the film-forming resin include phenoxy resins, polyester resins, polyurethane resins, polyester polyurethane resins, acrylic resins, polyimide resins, butyral resins, and the like. These resins can be used alone or in combination of two or more. Among these, phenoxy resins can be suitably used from the perspectives of film formation and connection reliability.
为了调整熔化粘度,也可以使热聚合性组合物含有绝缘填充剂。这可以举出硅石粉、氧化铝粉等。绝缘性填充剂的大小优选粒径为20~1000nm,另外,配合量优选相对于环氧化合物等的热聚合性化合物(光聚合性化合物)100质量份为5~50质量份。进而,也可以含有与上述绝缘填充剂不同的填充剂、软化剂、促进剂、防老化剂、着色剂(颜料、染料)、有机溶剂、离子捕获剂等。To adjust the melt viscosity, the thermopolymerizable composition may contain an insulating filler. Examples include silica powder and alumina powder. The insulating filler preferably has a particle size of 20 to 1000 nm, and the amount incorporated is preferably 5 to 50 parts by mass per 100 parts by mass of the thermopolymerizable compound (photopolymerizable compound) such as the epoxy compound. Furthermore, the composition may contain fillers other than the insulating filler, softeners, accelerators, antioxidants, colorants (pigments, dyes), organic solvents, and ion trapping agents.
另外,对应需要,也可以配合应力缓冲剂、硅烷偶联剂、无机填充剂等。作为应力缓冲剂,能够举出氢化苯乙烯丁二烯嵌段共聚物、氢化苯乙烯异戊二烯嵌段共聚物等。另外,作为硅烷偶联剂,能够举出环氧类、甲基丙烯酰氧基类、氨类、乙烯类、巯基/硫化物类、脲化物类等。另外,作为无机填充剂,能够举出硅石、滑石、氧化钛、碳酸钙、氧化镁等。In addition, stress buffers, silane coupling agents, inorganic fillers, etc. may be added as needed. Examples of stress buffers include hydrogenated styrene-butadiene block copolymers and hydrogenated styrene-isoprene block copolymers. Examples of silane coupling agents include epoxies, methacryloyloxys, aminos, vinyls, mercapto/sulfides, and urea compounds. Examples of inorganic fillers include silica, talc, titanium oxide, calcium carbonate, and magnesium oxide.
绝缘性树脂粘合剂3能够通过使包含上述的树脂的涂层组合物利用涂敷法成膜并干燥、或进一步固化,或者通过预先利用公知的方法来膜化而形成。绝缘性树脂粘合剂3也可以对应需要层叠树脂层而获得。另外,绝缘性树脂粘合剂3优选形成在经剥离处理的聚对苯二甲酸乙二醇酯膜等的剥离膜上。The insulating resin adhesive 3 can be formed by coating a coating composition containing the aforementioned resin, drying it, or further curing it, or by pre-forming it into a film using a known method. The insulating resin adhesive 3 can also be obtained by laminating resin layers as needed. Furthermore, the insulating resin adhesive 3 is preferably formed on a release film such as a release-treated polyethylene terephthalate film.
(绝缘性树脂粘合剂的粘度)(Viscosity of insulating resin adhesive)
绝缘性树脂粘合剂3的最低熔化粘度,能够对应各向异性导电膜的制造方法等而适当决定。例如,作为各向异性导电膜的制造方法,采用使导电粒子以既定配置保持在绝缘性树脂粘合剂的表面,并向绝缘性树脂粘合剂压入该导电粒子的方法的情况下,从膜成形性的观点来看,绝缘性树脂粘合剂3的最低熔化粘度优选为1100Pa・s以上。特别是能够在40~80℃进行膜成形,从这一点来看,绝缘性树脂粘合剂3的60℃粘度优选为3000~20000Pa・s。另外,如后述那样,如图5或图6所示在向绝缘性树脂粘合剂3压入的导电粒子2的露出部分周围形成凹部3b,或者如图7所示在向绝缘性树脂粘合剂3压入的导电粒子2的正上方形成凹部3c,从这一点来看,绝缘性树脂粘合剂3的最低熔化粘度为1500Pa・s以上即可,优选为2000Pa・s以上、更优选为3000~15000Pa・s、进一步优选为3000~10000Pa・s。作为一个例子,该最低熔化粘度能够利用旋转式流变仪(TA instruments公司制),并在升温速度为10℃/分钟、测定压力为5g保持恒定,使用直径8mm的测定板而求出。另外,在40~80℃下进行对绝缘性树脂粘合剂3压入导电粒子2的工序的情况下,与上述同样,从形成凹部3b或3c的方面来看,绝缘性树脂粘合剂3的60℃下的粘度优选为3000~20000Pa・s。该测定以与最低熔化粘度同样的测定方法进行,能够提取温度为60℃的值而求出。The minimum melt viscosity of the insulating resin binder 3 can be appropriately determined depending on the anisotropic conductive film production method, etc. For example, when the anisotropic conductive film production method employs a method in which conductive particles are retained in a predetermined arrangement on the surface of the insulating resin binder and then press-fitted into the insulating resin binder, the minimum melt viscosity of the insulating resin binder 3 is preferably 1100 Pa·s or higher from the perspective of film formability. In particular, since film formation can be performed at 40-80°C, the viscosity of the insulating resin binder 3 at 60°C is preferably 3000-20000 Pa·s. Furthermore, as described later, recesses 3b are formed around the exposed portions of the conductive particles 2 pressed into the insulating resin adhesive 3, as shown in FIG5 or FIG6 , or recesses 3c are formed directly above the conductive particles 2 pressed into the insulating resin adhesive 3, as shown in FIG7 . From this perspective, the minimum melt viscosity of the insulating resin adhesive 3 may be 1500 Pa·s or higher, preferably 2000 Pa·s or higher, more preferably 3000 to 15000 Pa·s, and even more preferably 3000 to 10000 Pa·s. For example, this minimum melt viscosity can be determined using a rotational rheometer (manufactured by TA Instruments) at a constant temperature increase rate of 10°C/min and a measurement pressure of 5 g, using a measuring plate with an 8 mm diameter. Furthermore, when the step of press-fitting the conductive particles 2 into the insulating resin adhesive 3 is performed at 40 to 80°C, the viscosity of the insulating resin adhesive 3 at 60°C is preferably 3,000 to 20,000 Pa·s from the perspective of forming the recesses 3b or 3c, as described above. This measurement is performed using the same method as for the minimum melt viscosity, and the value at 60°C can be extracted for determination.
通过使构成绝缘性树脂粘合剂3的树脂的粘度如上述为高粘度,能够在使用各向异性导电膜时,将导电粒子2夹持在对置的电子部件等的连接对象物之间而进行加热加压的情况下,防止各向异性导电膜内的导电粒子2会因熔化的绝缘性树脂粘合剂3的流动而流动。另外,如凹部3b或3c那样在使导电粒子的周边部或正上方的树脂量实质上为零、或比其周围减少的情况下,施加到导电粒子的压入力容易从连接的工具传导,因此能够在端子间良好地夹持导电粒子,并能期待导通特性的提高或导电粒子的捕获性的提高。By ensuring that the viscosity of the resin constituting the insulating resin adhesive 3 is high as described above, when the anisotropic conductive film is used, when the conductive particles 2 are sandwiched between opposing connection objects such as electronic components and heated and pressurized, the conductive particles 2 within the anisotropic conductive film can be prevented from flowing due to the flow of the melted insulating resin adhesive 3. Furthermore, when the amount of resin around or directly above the conductive particles is substantially zero, or reduced relative to the surrounding area, as in recesses 3b and 3c, the pressing force applied to the conductive particles is easily transmitted from the connection tool, thereby effectively holding the conductive particles between the terminals and improving the conductive characteristics and the ability to capture the conductive particles.
(绝缘性树脂粘合剂的厚度)(Thickness of insulating resin adhesive)
绝缘性树脂粘合剂3的厚度La优选为1μm以上60μm以下、更优选为1μm以上30μm以下、进一步优选为2μm以上15μm以下。另外,绝缘性树脂粘合剂3的厚度La在与导电粒子2的平均粒径D的关系中,它们的比(La/D)优选为0.6~10。若绝缘性树脂粘合剂3的厚度La过大,则各向异性导电连接时导电粒子会容易错位,降低端子上的导电粒子的捕获性。该倾向在La/D超过10时显著。因此La/D更优选为8以下,进一步更优选为6以下。相反地若绝缘性树脂粘合剂3的厚度La过小而La/D小于0.6,则难以通过绝缘性树脂粘合剂3将导电粒子维持在既定粒子分散状态或者既定排列。特别是,在连接的端子为高密度COG的情况下,绝缘性粘接层4的层厚La与导电粒子2的粒径D之比(La/D)优选为0.8~2。The thickness La of the insulating resin adhesive 3 is preferably 1 μm to 60 μm, more preferably 1 μm to 30 μm, and even more preferably 2 μm to 15 μm. Furthermore, the ratio (La/D) of the thickness La of the insulating resin adhesive 3 to the average particle size D of the conductive particles 2 is preferably 0.6 to 10. If the thickness La of the insulating resin adhesive 3 is too large, the conductive particles may become dislocated during anisotropic conductive connection, reducing the ability of the terminals to capture the conductive particles. This tendency is significant when La/D exceeds 10. Therefore, La/D is more preferably 8 or less, and even more preferably 6 or less. Conversely, if the thickness La of the insulating resin adhesive 3 is too small, such that La/D is less than 0.6, it becomes difficult for the insulating resin adhesive 3 to maintain the conductive particles in a predetermined dispersion or arrangement. In particular, when the terminals to be connected are high-density COG terminals, the ratio (La/D) of the thickness La of the insulating adhesive layer 4 to the particle size D of the conductive particles 2 is preferably 0.8 to 2.
(绝缘性树脂粘合剂中的导电粒子的埋入方式)(Method of embedding conductive particles in insulating resin adhesive)
对于绝缘性树脂粘合剂3中的导电粒子2的埋入状态没有特别限制,但是在对置的部件之间夹持各向异性导电膜,并加热加压而进行各向异性导电连接的情况下,如图5、图6所示,优选使导电粒子2从绝缘性树脂粘合剂3局部地露出,相对于邻接的导电粒子2间的中央部的绝缘性树脂粘合剂的表面3a的切平面3p在导电粒子2的露出部分的周围形成凹部3b,或者,如图7所示,在向绝缘性树脂粘合剂3内压入的导电粒子2的正上方的绝缘性树脂粘合剂部分,相对于与上述同样的切平面3p形成凹部3c,以在导电粒子2的正上方的绝缘性树脂粘合剂3的表面存在起伏。针对导电粒子2被夹持在对置的电子部件的电极间而加热加压时产生的导电粒子2的扁平化,因为有图5所示的凹部3b,导电粒子2从绝缘性树脂粘合剂3受到的阻力会比没有凹部3b的情况减少。因此,导电粒子2会容易被夹持在对置的电极间,从而还提高导通性能。另外,通过在构成绝缘性树脂粘合剂3的树脂之中的导电粒子2的正上方的树脂的表面形成凹部3c(图7),与没有凹部3c的情况相比,加热加压时的压力会容易集中到导电粒子2,且电极中会容易夹持导电粒子2,从而提高导通性能。The embedding state of the conductive particles 2 in the insulating resin adhesive 3 is not particularly limited. However, when anisotropic conductive connection is made by sandwiching an anisotropic conductive film between opposing components and applying heat and pressure, as shown in Figures 5 and 6 , it is preferable to partially expose the conductive particles 2 from the insulating resin adhesive 3, forming recesses 3b around the exposed portions of the conductive particles 2 relative to a tangent plane 3p taken along the insulating resin adhesive surface 3a at the center between adjacent conductive particles 2. Alternatively, as shown in Figure 7 , recesses 3c are formed relative to the same tangent plane 3p in the portion of the insulating resin adhesive directly above the conductive particles 2 pressed into the insulating resin adhesive 3, thereby creating undulations on the surface of the insulating resin adhesive 3 directly above the conductive particles 2. The presence of recesses 3b as shown in Figure 5 reduces the resistance experienced by the conductive particles 2 from the insulating resin adhesive 3 compared to a case without recesses 3b, as opposed to flattening of the conductive particles 2 that occurs when the conductive particles 2 are sandwiched between opposing electrodes of electronic components and subjected to heat and pressure. This facilitates the holding of the conductive particles 2 between the opposing electrodes, further improving conductivity. Furthermore, by forming recesses 3c (Figure 7) on the surface of the resin immediately above the conductive particles 2 within the resin constituting the insulating resin binder 3, the pressure applied during heating and pressing is more easily concentrated on the conductive particles 2, compared to a case without recesses 3c. This allows the conductive particles 2 to be more easily held between the electrodes, thereby improving conductivity.
从容易得到上述凹部3b、3c的效果的方面来看,导电粒子2的露出部分的周围的凹部3b(图5、图6)的最大深度Le与导电粒子2的平均粒径D之比(Le/D),优选为小于50%,更优选为小于30%,进一步优选为20~25%,而导电粒子2的露出部分的周围的凹部3b(图5、图6)的最大直径Ld与导电粒子2的平均粒径D之比(Ld/D),优选为150%以下,更优选为100~130%,且导电粒子2的正上方的树脂中的凹部3c(图7)的最大深度Lf与导电粒子2的平均粒径D之比(Lf/D)大于0,且优选为小于10%,更优选为5%以下。In order to facilitate the effects of the recesses 3 b and 3 c described above, the ratio (Le/D) of the maximum depth Le of the recesses 3 b ( FIG. 5 and FIG. 6 ) around the exposed portion of the conductive particles 2 to the average particle diameter D of the conductive particles 2 is preferably less than 50%, more preferably less than 30%, and even more preferably 20 to 25%. The ratio (Ld/D) of the maximum diameter Ld of the recesses 3 b ( FIG. 5 and FIG. 6 ) around the exposed portion of the conductive particles 2 to the average particle diameter D of the conductive particles 2 is preferably 150% or less, more preferably 100 to 130%. The ratio (Lf/D) of the maximum depth Lf of the recesses 3 c ( FIG. 7 ) in the resin directly above the conductive particles 2 to the average particle diameter D of the conductive particles 2 is greater than 0, and preferably less than 10%, and more preferably 5% or less.
此外,能够使导电粒子2的露出部分的直径Lc为导电粒子2的平均粒径D以下,既可以使得在导电粒子2的顶部2t的1个点露出,也可以使导电粒子2完全埋入绝缘性树脂粘合剂3内,使得直径Lc成为零。从通过对绝缘性树脂层压入导电粒子来进行导电粒子对绝缘性树脂层的埋入的情况下的导电粒子的位置调整的容易性的方面来看,优选使直径Lc为15%以内。Furthermore, the diameter Lc of the exposed portion of the conductive particle 2 can be made smaller than the average particle diameter D of the conductive particle 2. This allows the conductive particle 2 to be exposed at a single point on the top 2t of the conductive particle 2, or the conductive particle 2 can be completely buried in the insulating resin binder 3, making the diameter Lc zero. From the perspective of ease of positional adjustment of the conductive particles when embedding the conductive particles in the insulating resin layer by press-fitting the conductive particles, it is preferable to keep the diameter Lc within 15%.
(导电粒子在绝缘性树脂粘合剂的厚度方向上的位置)(Position of Conductive Particles in the Thickness Direction of the Insulating Resin Adhesive)
从容易得到上述凹部3b的效果的方面来看,从切平面3p起的导电粒子2的最深部的距离(以下,称为埋入量)Lb与导电粒子2的平均粒径D之比(Lb/D)(以下,称为埋入率)优选为60%以上105%以下。In order to facilitate the effect of the above-mentioned recess 3 b, the ratio (Lb/D) of the distance Lb of the deepest part of the conductive particles 2 from the tangential plane 3 p (hereinafter referred to as the embedding amount) to the average particle diameter D of the conductive particles 2 (hereinafter referred to as the embedding rate) is preferably 60% or more and 105% or less.
(绝缘性粘接层)(Insulating adhesive layer)
在本发明的各向异性导电膜中,也可以在配置有导电粒子2的绝缘性树脂粘合剂3上层叠绝缘性粘接层4。In the anisotropic conductive film of the present invention, the insulating adhesive layer 4 may be laminated on the insulating resin binder 3 in which the conductive particles 2 are arranged.
在绝缘性树脂粘合剂3形成有上述凹部3b的情况下,如图8所示的各向异性导电膜1d那样,绝缘性粘接层4既可以层叠在绝缘性树脂粘合剂3形成有凹部3b的面,也可以如图9所示的各向异性导电膜1e那样,层叠在与形成有凹部3b的面相反侧的面。在绝缘性树脂粘合剂3形成有凹部3c的情况下也同样。在通过绝缘性粘接层4的层叠,利用各向异性导电膜来各向异性导电连接电子部件时,填充由电子部件的电极或凸点形成的空隙,从而能够提高粘接性。When the insulating resin adhesive 3 is formed with the aforementioned recessed portion 3b, the insulating adhesive layer 4 can be laminated on either the surface of the insulating resin adhesive 3 having the recessed portion 3b, as in the anisotropic conductive film 1d shown in FIG8 , or on the surface opposite the surface having the recessed portion 3b, as in the anisotropic conductive film 1e shown in FIG9 . The same applies when the insulating resin adhesive 3 is formed with the recessed portion 3c. When the anisotropic conductive film is used to anisotropically connect electronic components, the insulating adhesive layer 4 can be laminated to fill gaps formed by the electrodes or bumps of the electronic components, thereby improving adhesion.
此外,在将绝缘性粘接层4层叠在绝缘性树脂粘合剂3的情况下,不管绝缘性粘接层4是否处于凹部3b、3c的形成面上,都优选绝缘性粘接层4处于由工具加压的IC芯片等的电子部件侧(换言之,绝缘性树脂粘合剂3处于承载于载物台的基板等的电子部件侧)。通过这样处理,能够避免导电粒子的不得已的移动,能够提高捕获性。Furthermore, when laminating the insulating adhesive layer 4 on the insulating resin adhesive 3, regardless of whether the insulating adhesive layer 4 is located on the surface where the recesses 3b and 3c are formed, it is preferred that the insulating adhesive layer 4 be located on the side of the electronic component, such as the IC chip, that is being pressed by the tool (in other words, the insulating resin adhesive 3 be located on the side of the electronic component, such as the substrate, that is placed on the stage). This prevents the unintended movement of the conductive particles and improves their capture efficiency.
绝缘性粘接层4能够与在公知的各向异性导电膜中用作为绝缘性粘接层的同样,也可以利用与上述的绝缘性树脂粘合剂3同样的树脂来将粘度调整得更低。绝缘性粘接层4和绝缘性树脂粘合剂3的最低熔化粘度,越有差异就越容易用绝缘性粘接层4填充由电子部件的电极或凸点形成的空隙,从而能够期待提高电子部件彼此的粘接性的效果。另外,越有该差异,在各向异性导电连接时构成绝缘性树脂粘合剂3的树脂的移动量越相对变小,因此端子上的导电粒子的捕获性变得容易提高。在实际使用上,绝缘性粘接层4和绝缘性树脂粘合剂3的最低熔化粘度比,优选为2以上、更优选为5以上、进一步优选为8以上。另一方面,若该比过大则在将长尺的各向异性导电膜作成卷装体的情况下,担心会出现树脂的挤出或阻塞,因此在实际使用上优选为15以下。绝缘性粘接层4的优选最低熔化粘度,更具体而言,满足上述比,且为3000Pa・s以下,更优选为2000Pa・s以下,特别是为100~2000Pa・s。The insulating adhesive layer 4 can be used as the insulating adhesive layer in the known anisotropic conductive film, or the viscosity can be adjusted to a lower level using the same resin as the insulating resin adhesive 3 described above. The greater the difference in the minimum melt viscosity between the insulating adhesive layer 4 and the insulating resin adhesive 3, the easier it is to fill the gaps formed by the electrodes or bumps of the electronic components with the insulating adhesive layer 4, thereby improving the adhesion between the electronic components. In addition, the greater the difference, the smaller the amount of resin movement of the insulating resin adhesive 3 during anisotropic conductive connection, so the capture of conductive particles on the terminal becomes easier to improve. In actual use, the minimum melt viscosity ratio of the insulating adhesive layer 4 to the insulating resin adhesive 3 is preferably greater than 2, more preferably greater than 5, and even more preferably greater than 8. On the other hand, if this ratio is too large, there is a concern that the resin will be squeezed out or blocked when the long anisotropic conductive film is made into a roll, so in actual use, it is preferably less than 15. More specifically, the preferred minimum melt viscosity of the insulating adhesive layer 4 satisfies the above ratio and is 3000 Pa·s or less, more preferably 2000 Pa·s or less, and particularly preferably 100 to 2000 Pa·s.
作为绝缘性粘接层4的形成方法,能够通过使包含与形成绝缘性树脂粘合剂3的树脂同样的树脂的涂层组合物利用涂敷法成膜并干燥、或进一步固化,或者通过预先利用公知的方法来膜化而形成。The insulating adhesive layer 4 can be formed by coating a coating composition containing the same resin as that forming the insulating resin binder 3 and then drying or curing it, or by forming it into a film in advance using a known method.
绝缘性粘接层4的厚度没有特别限定,但是优选为4~20μm。或者,相对于导电粒径,优选为1~8倍。The thickness of the insulating adhesive layer 4 is not particularly limited, but is preferably 4 to 20 μm, or preferably 1 to 8 times the diameter of the conductive particles.
另外,将绝缘性树脂粘合剂3和绝缘性粘接层4合在一起的、层叠的各向异性导电膜整体的最低熔化粘度,还取决于绝缘性树脂粘合剂3和绝缘性粘接层4的厚度的比例,但是在实际使用上既可为8000Pa・s以下,为了方便进行对凸点间的填充可为200~7000Pa・s,优选为200~4000Pa・s。In addition, the minimum melt viscosity of the entire laminated anisotropic conductive film, which is a combination of the insulating resin adhesive 3 and the insulating adhesive layer 4, also depends on the ratio of the thickness of the insulating resin adhesive 3 and the insulating adhesive layer 4. However, in actual use, it can be below 8000 Pa·s, and for the convenience of filling between bumps, it can be 200 to 7000 Pa·s, preferably 200 to 4000 Pa·s.
(第3绝缘性树脂层)(Third insulating resin layer)
也可以与绝缘性粘接层4夹着绝缘性树脂粘合剂3而在相反侧设置第3绝缘性树脂层。例如,能够使第3绝缘性树脂层作为胶粘层发挥功能。与绝缘性粘接层4同样,也可以为了填充由电子部件的电极或凸点形成的空隙而设置。A third insulating resin layer may be provided on the opposite side of the insulating adhesive layer 4, sandwiching the insulating resin adhesive 3. For example, the third insulating resin layer can function as an adhesive layer. Similar to the insulating adhesive layer 4, it may be provided to fill gaps formed by electrodes or bumps of electronic components.
第3绝缘性树脂层的树脂组成、粘度及厚度,既可以与绝缘性粘接层4同样,也可以不同。使绝缘性树脂粘合剂3和绝缘性粘接层4和第3绝缘性树脂层合在一起的各向异性导电膜的最低熔化粘度没有特别限制,但是可为8000Pa・s以下,也可为200~7000Pa・s,还能够设为200~4000Pa・s。The resin composition, viscosity, and thickness of the third insulating resin layer may be the same as or different from those of the insulating adhesive layer 4. The minimum melt viscosity of the anisotropic conductive film that bonds the insulating resin adhesive 3, the insulating adhesive layer 4, and the third insulating resin layer is not particularly limited, but may be 8000 Pa·s or less, 200 to 7000 Pa·s, or even 200 to 4000 Pa·s.
进而,对应需要,不仅在绝缘性树脂粘合剂3而且也可以在绝缘性粘接层4加入硅石微粒子、氧化铝、氢氧化铝等的绝缘性填充剂。绝缘性填充剂的配合量优选相对于构成这些层的树脂100质量份为3质量份以上且40质量份以下。由此,在各向异性导电连接时各向异性导电膜熔化,也能抑制导电粒子因熔化的树脂而无用地移动。Furthermore, if necessary, an insulating filler such as silica particles, alumina, or aluminum hydroxide may be added not only to the insulating resin binder 3 but also to the insulating adhesive layer 4. The amount of the insulating filler added is preferably 3 parts by mass or more and 40 parts by mass or less per 100 parts by mass of the resin constituting these layers. This prevents the anisotropic conductive film from melting during anisotropic conductive connection, and prevents the conductive particles from being unnecessarily moved by the molten resin.
<各向异性导电膜的制造方法><Method for Manufacturing Anisotropic Conductive Film>
(制造方法的概要)(Overview of the Manufacturing Method)
在本发明中,首先,得到或制作在绝缘性粘合剂中有规则地配置有导电粒子的各向异性导电膜的宽幅的整卷,接着,调查对于该各向异性导电膜的整卷中的导电粒子的规则性配置的遗漏,使相对于规则性配置导电粒子连续遗漏既定数以上的规格外的部位不会用作为承担连接的区域,所以以使包含规格外的部位的区域除外的方式将宽幅的整卷裁断成既定宽度的各向异性导电膜(第1方式)。或者,以使规格外的部位成为膜的短边方向的想要的位置的方式,将宽幅的整卷按既定宽度沿长度方向裁断(第2方式)。另外,也可以在第1方式中使除去规格外的部位后的各向异性导电膜(即,使剩余的各向异性导电膜彼此、或者除去规格外的部位后的另外的各向异性导电膜彼此)接合,从而制造长度5m以上的各向异性导电膜。In the present invention, a wide roll of anisotropic conductive film is first obtained or produced, in which conductive particles are regularly arranged in an insulating adhesive. Next, the roll of anisotropic conductive film is examined for omissions from the regular arrangement of the conductive particles. The roll is then cut into anisotropic conductive film of a predetermined width, excluding the region containing the out-of-specification portions, to ensure that the regularly arranged conductive particles are not continuously omitted for a predetermined number of times (a first embodiment). Alternatively, the wide roll is cut longitudinally to a predetermined width, such that the out-of-specification portions are located at desired positions along the short side of the film (a second embodiment). Alternatively, in the first embodiment, the anisotropic conductive film after the out-of-specification portions have been removed (i.e., the remaining anisotropic conductive film, or the remaining anisotropic conductive film after the out-of-specification portions have been removed) is joined to produce an anisotropic conductive film having a length of 5 m or greater.
在此,对除去上述区域前的最初的各向异性导电膜的制作方法没有特别限制。例如,制造用于将导电粒子配置成既定排列的转印模,向转印模的凹部填充导电粒子,其上,覆盖形成在剥离膜上的绝缘性树脂粘合剂3并施加压力,向绝缘性树脂粘合剂3压入导电粒子2,从而使导电粒子2转贴到绝缘性树脂粘合剂3。或者进一步在该导电粒子2上层叠绝缘性粘接层4。这样,能够得到各向异性导电膜。The method for producing the initial anisotropic conductive film before removing the aforementioned region is not particularly limited. For example, a transfer mold for arranging the conductive particles in a predetermined arrangement can be prepared. The conductive particles are then filled into the concave portion of the transfer mold. An insulating resin binder 3 formed on a release film is then applied to the mold, and pressure is applied to press the conductive particles 2 into the insulating resin binder 3, thereby transferring the conductive particles 2 to the insulating resin binder 3. Alternatively, an insulating adhesive layer 4 can be further laminated on the conductive particles 2. In this manner, an anisotropic conductive film can be obtained.
另外,也可以在向转印模的凹部填充导电粒子后,其上覆盖绝缘性树脂粘合剂,从转印模向绝缘性树脂粘合剂的表面转印导电粒子,向绝缘性树脂粘合剂内压入绝缘性树脂粘合剂上的导电粒子,从而制造各向异性导电膜。能够通过该压入时的按压力、温度等来调整导电粒子的埋入量(Lb)。另外,能够通过压入时的绝缘性树脂粘合剂的粘度、压入速度、温度等来调整凹部3b、3c的形状及深度。例如,在制造在绝缘性树脂粘合剂的表面具有图5所示的凹部3b的各向异性导电膜1a的情况下或制造具有图7所示的凹部3c的各向异性导电膜1c的情况下,对应凹部的形状或深度等,绝缘性树脂粘合剂的60℃下的粘度的下限优选为3000Pa・s以上、更优选为4000Pa・s以上、进一步优选为4500Pa・s以上,且上限优选为20000Pa・s以下、更优选为15000Pa・s以下、进一步优选为10000Pa・s以下。另外,压入时的温度为40~80℃,更优选的是能在50~60℃获得。Alternatively, an anisotropic conductive film can be produced by filling the recesses of a transfer mold with conductive particles, then covering them with an insulating resin binder. The conductive particles are then transferred from the transfer mold to the surface of the insulating resin binder, and the conductive particles on the insulating resin binder are then pressed into the insulating resin binder. The amount of conductive particles embedded (Lb) can be adjusted by adjusting the pressure and temperature during this press-in process. Furthermore, the shape and depth of the recesses 3b and 3c can be adjusted by adjusting the viscosity of the insulating resin binder during press-in, the speed of press-in, and the temperature. For example, when manufacturing an anisotropic conductive film 1a having recesses 3b as shown in FIG5 , or an anisotropic conductive film 1c having recesses 3c as shown in FIG7 , the viscosity of the insulating resin adhesive at 60°C is preferably 3000 Pa·s or higher, more preferably 4000 Pa·s or higher, and even more preferably 4500 Pa·s or higher, depending on the shape and depth of the recesses. The viscosity is preferably 20000 Pa·s or lower, more preferably 15000 Pa·s or lower, and even more preferably 10000 Pa·s or lower, depending on the shape and depth of the recesses. Furthermore, the temperature during press-in is 40-80°C, and more preferably 50-60°C.
此外,作为转印模,除了向凹部填充导电粒子的之外,也可以利用向凸部的顶面赋予微粘着剂而使导电粒子附着于该顶面。In addition, as a transfer mold, in addition to filling the recessed portions with the conductive particles, a slight adhesive may be applied to the top surface of the convex portion to allow the conductive particles to adhere to the top surface.
这些转印模能够利用机械加工、光刻、印刷法等的公知技术来制造。These transfer molds can be produced using known techniques such as machining, photolithography, and printing.
另外,作为按既定排列配置导电粒子的方法,也可以取代利用转印侧的方法而使用利用二轴延伸膜的方法等。Furthermore, as a method for arranging the conductive particles in a predetermined arrangement, a method using a biaxially stretched film may be used instead of the method using the transfer side.
(针对遗漏区域的对应)(Correspondence to missing areas)
在本发明的各向异性导电膜的制造方法的第1方式中,无论是用在各个凸点面积比较小的连接构造体(也有COG等连接的端子排列隔离地存在的一个例子)的各向异性导电膜还是用在各个凸点面积比较大的连接构造体(FOG等连接的有效面积的长边与膜宽度相同的、端子排列没有隔离地存在的一个例子)的各向异性导电膜,在导电粒子在俯视观察下有规则地配置的、优选俯视观察下导电粒子互相离开且有规则地配置的各向异性导电膜中,也从导电粒子有规则地配置的区域(规则配置区域)除去导电粒子遗漏的部位以既定数连续的规格外的部位。换言之,只不过分散了遗漏的部位不会对连接后的导通稳定性产生问题的范围的区域作为规格内区域,不作为除去的对象。不产生该问题的范围,因连接对象物而不同,但是,作为一个例子将各向异性导电膜使用于FOG的情况下,即便导电粒子连续遗漏1~20个、根据情况遗漏1~209个也难以对导通稳定性产生问题。在此,导电粒子的连续遗漏个数即209个这样的数字,有如下说明的意思。即,是指在各向异性导电膜的宽度为2mm且应该连接的端子宽度为200μm的一般增大连接面积的FOG的各向异性导电连接条件(连接面积0.4μm 2)下,要以15个×15个的四方格子配置导电粒子的情况下,理想的是在连接面积0.4μm 2中要存在225个导电粒子,但是,假设遗漏209个导电粒子也意味着连接面积0.4μm 2中有16个导电粒子作为最低捕获数存在于端子内区域。在此,被捕获的导电粒子数的16,被设定为后述的被捕获的优选数值的下限即11个及20个的中间的值。因此,认为是适合发现容易确保导通的稳定性的条件的数值。这样,被捕获的导电粒子(在该情况下16个)多于格子排列轴上的导电粒子个数(如上述,该情况下的格子排列轴的导电粒子个数为15个),使得一个端子中捕获的导电粒子的个数会多于某一方向的格子轴的全数,因此被捕获的导电粒子会存在于至少两个相同方向的排列轴。这样,配置在至少两个格子轴的导电粒子被捕获,可预计到被端子捕获的导电粒子的位置在一定程度上分离,因此能够比较按压的平衡。即,使判定连接时的导电粒子的压入是否优良的条件完整。此外,在使用于COG的情况下,如果连续遗漏的个数为1~20个则在导通稳定性上难以产生问题,如果为15个以下、特别是10个以下,则更加难以产生问题。In the first embodiment of the anisotropic conductive film manufacturing method of the present invention, whether the anisotropic conductive film is used in a connection structure with relatively small bump areas (an example of this is a COG connection where the terminals are arranged in isolation) or in a connection structure with relatively large bump areas (an example of this is a FOG connection where the long side of the effective area is the same as the film width and the terminals are not arranged in isolation), in an anisotropic conductive film where the conductive particles are regularly arranged in a plan view, preferably where the conductive particles are regularly arranged and spaced apart from each other in a plan view, out-of-specification areas where a predetermined number of consecutive areas of missing conductive particles are removed from the area where the conductive particles are regularly arranged (regular arrangement area). In other words, the area where the missing areas are merely scattered and do not cause problems with the conductive stability after the connection is considered to be within the specification area and is not subject to removal. The range within which this problem does not occur varies depending on the connection object. However, as an example, when using an anisotropic conductive film for FOG, even if 1 to 20 conductive particles are omitted consecutively, or 1 to 209 particles are omitted depending on the situation, there is little chance of problems with conduction stability. The number 209 consecutively omitted conductive particles has the following meaning. Specifically, under the typical anisotropic conductive connection conditions (connection area of 0.4 μm² ) for an increased connection area of FOG, where the anisotropic conductive film is 2 mm wide and the terminal to be connected is 200 μm wide, arranging the conductive particles in a 15×15 square grid would ideally require 225 conductive particles to be present within the 0.4 μm² connection area. However, assuming 209 conductive particles are omitted, this means that 16 conductive particles are present within the terminal area, the minimum number of particles captured within the 0.4 μm² connection area. Here, the number of trapped conductive particles, 16, is set to a value between 11 and 20, the lower limit of the preferred number of trapped particles (described later). Therefore, this value is considered suitable for identifying conditions that easily ensure stable conduction. This means that the number of trapped conductive particles (16 in this case) exceeds the number of conductive particles along the lattice arrangement axis (as mentioned above, the number of conductive particles along the lattice arrangement axis in this case is 15). This means that the number of conductive particles trapped in a terminal exceeds the total number of lattice axes in a particular direction, resulting in trapped conductive particles present in at least two lattice arrangement axes in the same direction. This capture of conductive particles arranged along at least two lattice axes allows for a certain degree of separation between the positions of the conductive particles captured by the terminal, allowing comparison of the pressure balance. This completes the conditions for determining whether the conductive particles are properly pressed into the connection. Furthermore, when used in COG applications, problems with conduction stability are less likely to occur if the number of consecutively missed particles is between 1 and 20. Problems are even less likely to occur if the number is 15 or less, and particularly 10 or less.
此外,关于规格内区域内的遗漏,在规格内区域也可以具有不会对连接带来阻碍的程度的能够允许的遗漏,这样的能够允许的遗漏的大小,能够以端子与端子间空隙为基准进行判别。成为除了上述的以连续遗漏的个数判定以外的方法。例如,膜的长边方向(端子的宽度方向)上的遗漏,优选为端子与端子间空隙的合计以下(即,使得遗漏不会横跨2个端子),另外,优选在膜短边方向(端子的长边方向)上遗漏取大于端子长度的50%的距离而使遗漏分离。这样,在至少小于端子长度的50%的区域存在能够捕获的导电粒子。如果这样遗漏,可以期待导通性能在一般的各向异性连接中能够得到允许。此外,在设想这样的遗漏的情况下,遗漏的大小作为由与膜长边方向及膜短边方向分别平行的方向上的最长的导电粒子间距离形成的矩形进行考虑即可。在这样考虑的情况下,适用于COG等的微小间距端子的情况下的能够允许的遗漏的大小,作为一个例子在膜长边方向(端子的宽度方向)优选为80μm以下、更优选为30μm以下、进一步更优选为10μm以下。另外,在膜短边方向(端子的长边方向)上,希望在端子长度保留有50%以上被捕获的区域,因此,作为一个例子,优选为100μm以下、更优选为50μm以下、进一步更优选为40μm以下。另外,在端子宽度较宽的FOG的情况下,在膜长边方向(端子宽度方向)优选为400μm以下、更优选为200μm以下。膜短边方向成为有效连接面积,因此成为膜短边方向的50%以下、优选为30%以下。根据端子布局,也可以适当组合上述数值。这是因为本发明并不局限于一般的COG或FOG。In addition, regarding omissions within the specification area, there can also be allowable omissions within the specification area that do not hinder the connection. The size of such allowable omissions can be judged based on the gap between the terminals. This is a method other than the above-mentioned judgment based on the number of consecutive omissions. For example, the omissions in the long side direction of the membrane (the width direction of the terminal) are preferably less than the total of the gap between the terminals (that is, so that the omission does not span two terminals). In addition, it is preferred that the omissions in the short side direction of the membrane (the long side direction of the terminal) are separated by a distance greater than 50% of the terminal length. In this way, there are conductive particles that can be captured in an area that is at least less than 50% of the terminal length. If there are omissions like this, it can be expected that the conductive performance can be allowed in general anisotropic connections. In addition, in the case of assuming such omissions, the size of the omission can be considered as a rectangle formed by the longest distance between the conductive particles in the directions parallel to the long side direction and the short side direction of the membrane. Considering this, the permissible size of the gap in the case of fine-pitch terminals such as COG is, as an example, preferably 80 μm or less in the long-side direction (the width of the terminal), more preferably 30 μm or less, and even more preferably 10 μm or less. Furthermore, in the short-side direction (the long side of the terminal), it is desirable to retain at least 50% of the terminal length for the captured area. Therefore, as an example, it is preferably 100 μm or less, more preferably 50 μm or less, and even more preferably 40 μm or less. Furthermore, in the case of FOG (fog) with wider terminals, the gap in the long-side direction (the width of the terminal) is preferably 400 μm or less, and more preferably 200 μm or less. The effective connection area is in the short-side direction, so it should be less than 50%, preferably less than 30%. Depending on the terminal layout, the above values can be appropriately combined. This is because the present invention is not limited to standard COG or FOG.
如图1所示,在遗漏的部位2X不连续而独立存在、或者遗漏的部位2X以小于既定数连结的情况下被分散包含。相对于此,存在遗漏的部位2X以既定数以上连续的部分2Y,将它作为规格外的部位而除去时,将各向异性导电膜沿长边方向截断,除去包含该部分2Y的带状的区域R。此外,在图1中将连续存在3个遗漏的区域作为规格外的部位,但是该个数终归是一个例子。As shown in Figure 1, when the missing portions 2X are discontinuous and independent, or when the missing portions 2X are connected in a number less than a predetermined number, they are dispersed. In contrast, when there is a portion 2Y in which the missing portions 2X are continuous for a predetermined number or more and are removed as an out-of-specification portion, the anisotropic conductive film is cut along its longitudinal direction to remove the strip-shaped region R containing the portion 2Y. While Figure 1 shows three consecutive missing portions as an out-of-specification portion, this number is merely an example.
这样的遗漏的有无,能够利用光学显微镜或金属显微镜、CCD照相机等的摄像装置来观察。另外,通过组合利用摄像装置和图像解析处理系统(例如,WinROOF,三谷商事(株))进行检查,能够发现各向异性导电膜1A中的导电粒子的分散状态,并能确定其位置。此外,作为一个例子,摄像装置能够适用最大输出像素数(H)×(V)为648×494、帧速率为30~60fps的装置。The presence or absence of such omissions can be observed using an imaging device such as an optical microscope, a metallurgical microscope, or a CCD camera. Furthermore, by combining an imaging device with an image analysis and processing system (e.g., WinROOF, Mitani Shoji Co., Ltd.), the dispersion state of the conductive particles in the anisotropic conductive film 1A can be determined and their positions can be pinpointed. As an example, an imaging device with a maximum output pixel count (H) x (V) of 648 x 494 and a frame rate of 30 to 60 fps can be used.
各个凸点面积比较大的连接构造体(FOG等)用的各向异性导电膜中,如图3所示,优选以在各向异性导电膜1C的全宽度W上长度沿各向异性导电膜的长边方向为200μm的任意的区域S中导电粒子存在10个以上的方式,换言之以使各向异性导电膜的全长上的任意位置中成为在长度200μm的范围存在10个以上的导电粒子的全宽度W的方式裁断整卷。这是因为在一般的FOG的连接中,凸点宽度最大为200μm左右的缘故。此外,一般的FOG的连接中的凸点长度(或连接中的工具宽度)为0.3~4mm,因此优选该情况下的各向异性导电膜裁断后的全宽度W为4mm以内。For anisotropic conductive films used in connection structures (such as FOGs) with relatively large individual bump areas, as shown in Figure 3, it is preferable to cut the entire roll so that at least 10 conductive particles are present in any region S, 200 μm long along the longitudinal direction of the anisotropic conductive film, across the full width W of the anisotropic conductive film 1C. In other words, at any location along the full length of the anisotropic conductive film, at least 10 conductive particles are present within a 200 μm length. This is because the maximum bump width in typical FOG connections is approximately 200 μm. Furthermore, the bump length (or tool width) in typical FOG connections is 0.3 to 4 mm, so the full width W of the anisotropic conductive film after cutting is preferably within 4 mm.
从为了提高连接的可靠性而增多被端子捕获的导电粒子的个数的方面来看,在区域S存在的导电粒子的更优选的个数为11个以上、进一步优选为20个以上。上限没有特别限制。但是,如果因为在区域S存在的导电粒子的数过多而各向异性导电连接时端子上的导电粒子的捕获数过多,则在各向异性导电连接上所使用的按压夹具所需要的推力也会过度增加。在此情况下,担心在通过连续各向异性连接而得到的各个各向异性连接构造体彼此压入的程度过度不同。因此,使在区域S存在的导电粒子的个数优选为50个以下,更优选为40个以下,进一步优选为35个以下。From the perspective of increasing the number of conductive particles captured by the terminal in order to improve the reliability of the connection, the more preferred number of conductive particles present in region S is 11 or more, more preferably 20 or more. There is no particular limit to the upper limit. However, if the number of conductive particles present in region S is too large and the number of conductive particles captured on the terminal during anisotropic conductive connection is too large, the thrust required for the pressing fixture used in the anisotropic conductive connection will also increase excessively. In this case, there is a concern that the degree of pressing into each other of the anisotropically connected structures obtained by continuous anisotropic connection is too different. Therefore, the number of conductive particles present in region S is preferably 50 or less, more preferably 40 or less, and more preferably 35 or less.
另一方面,在本发明的各向异性导电膜的制造方法的第2方式中,也可以在各个凸点面积比较小的连接构造体(COG等)用的各向异性导电膜中,以使相对于规则性配置导电粒子遗漏的部位2X以既定数以上连续的规格外的部位不存在于各向异性导电膜1A的短边方向的端部1P的方式裁断整卷,从而确保在裁断后的各向异性导电膜的端部1P即便有导电粒子的遗漏也不存在规格外的部位,优选确保在既定配置存在导电粒子2。On the other hand, in the second embodiment of the method for manufacturing an anisotropic conductive film of the present invention, the entire roll of an anisotropic conductive film for a connection structure (COG, etc.) in which each bump area is relatively small can be cut in such a manner that a predetermined number or more of continuous out-of-specification portions 2X where conductive particles are omitted relative to the regular arrangement do not exist at the end portion 1P in the short side direction of the anisotropic conductive film 1A, thereby ensuring that even if conductive particles are omitted, there are no out-of-specification portions at the end portion 1P of the anisotropic conductive film after cutting, and preferably ensuring that conductive particles 2 are present in the predetermined arrangement.
在此,各向异性导电膜1A的短边方向的宽度的端部1P,优选为各向异性导电膜1A的短边方向的宽度的20%以内,更优选为30%以内。这是因为通常在利用各向异性导电膜的电子部件的连接中,电子部件的端子列存在于从沿各向异性导电膜的长边方向延伸的缘边起的短边方向的宽度的20%以内的带状区域、更可靠地为30%以内的带状区域。此外,该端部1P的大小也可以对应所连接的电子部件的端子的布局而在左右端部有所不同。Here, the width of the end portion 1P of the anisotropic conductive film 1A in the short-side direction is preferably within 20% of the width of the anisotropic conductive film 1A in the short-side direction, and more preferably within 30%. This is because, in the connection of electronic components using anisotropic conductive films, the terminal array of the electronic component is generally located within a strip-shaped area within 20% of the width in the short-side direction, and more preferably within 30% of the width from the edge extending along the long-side direction of the anisotropic conductive film. Furthermore, the size of the end portion 1P may differ between the left and right ends depending on the terminal layout of the connected electronic component.
另外,如图4所示,在COG连接的IC芯片等的电子部件12中凸点(端子)10以2列并排的情况下,在该连接中使用的各向异性导电膜1中,即便在有规则地配置有导电粒子的区域(规则配置区域)内存在导电粒子连续遗漏既定数以上的规格外的部位,在不存在规格外的部位的规格内区域Q以各向异性导电膜1的短边方向的既定宽度且各向异性导电膜1的长边方向的既定长度形成的情况下,也使该规格内区域Q与端子列11对准。换言之,将各向异性导电膜1所包含的、包含规格外的部位的区域R对准2列的端子列11之间的区域(即,不存在应该连接的端子的区域),以各向异性导电膜1各向异性导电连接对置的电子部件12彼此。本发明还包含通过这样的对准来各向异性导电连接的连接构造体。此外,图4中,是从电子部件12的端部到凸点10的内侧端为止的距离。优选该距离与规格内区域Q的宽度重叠。作为对准方法,在COG的情况下使膜粘合到玻璃时,既可以使承载玻璃的载物台移动而进行,也可以使膜侧移动而进行。该对准方法并不限于COG的情况,也能应用到FOG或其他的连接构造体的制造。本发明包含包括这样的工序的连接构造体的制造方法。Furthermore, as shown in Figure 4, in a COG-connected IC chip or other electronic component 12, where bumps (terminals) 10 are arranged in two rows, even if, within the regularly arranged region (regular arrangement region) of the anisotropic conductive film 1 used for this connection, there are out-of-specification locations where the conductive particles are continuously missing a predetermined number or more, if the in-specification region Q, where no out-of-specification locations exist, is formed with a predetermined width in the short-side direction of the anisotropic conductive film 1 and a predetermined length in the long-side direction of the anisotropic conductive film 1, the in-specification region Q is aligned with the terminal rows 11. In other words, the region R of the anisotropic conductive film 1 containing the out-of-specification locations is aligned with the region between the two terminal rows 11 (i.e., the region where no terminals are to be connected), thereby anisotropically conductively connecting the opposing electronic components 12 via the anisotropic conductive film 1. The present invention also includes a connection structure that achieves anisotropic conductive connection through such alignment. Furthermore, Figure 4 shows the distance from the end of the electronic component 12 to the inner end of the bump 10. This distance preferably overlaps with the width of the area Q within the specification. In the case of COG, when bonding the film to the glass, alignment can be performed by moving the stage supporting the glass or by moving the film side. This alignment method is not limited to COG and can also be applied to the manufacture of FOG or other connection structures. The present invention includes a method for manufacturing a connection structure including such steps.
更具体而言,通常,各个端子10的长边方向的长度L10一般为30~300μm,2列的端子列11之间的距离L11的范围在有多个列的凸点(例如,3列的交错排列)的外形的短边比较小的IC芯片等的较小的电子部件中成为100~200μm,而在外形的短边比较长的IC芯片等的较大的电子部件中成为1000~2000μm。因而,在各向异性导电膜1中,包含规格外的部位的区域R的宽度LR,处于相邻的端子列11间的距离L11的宽度以内,如果规格内区域Q的宽度LQ具有端子10的长边方向的长度L10则COG连接上不会产生问题,另外,即便各向异性导电膜的区域R的宽度LR超过端子列间的距离L11,且区域R与端子列11局部重叠,只要通过各向异性导电连接而在各个端子10被捕获的导电粒子优选为10个以上、更优选为13个以上则在实际使用上也没有问题。例如,当端子10的大小为100μ×20μm、端子列11的间隔L11为1000μm,且各向异性导电膜1的规格内区域Q中的导电粒子的个数密度为32000个/mm 2时,即便各向异性导电膜的区域R与端子10重叠,只要该重叠宽度在端子10的长度L10的50%以内则在实际使用上也没有问题而能够进行COG连接。More specifically, usually, the length L10 of each terminal 10 in the long side direction is generally 30 to 300 μm, and the distance L11 between two rows of terminal rows 11 ranges from 100 to 200 μm in smaller electronic components such as IC chips with a relatively small short side of the outer shape having multiple rows of bumps (for example, 3 rows arranged in an alternating manner), and ranges from 1000 to 2000 μm in larger electronic components such as IC chips with a relatively long short side of the outer shape. Therefore, in the anisotropic conductive film 1, the width LR of the region R including the out-of-specification portion is within the width of the distance L11 between adjacent terminal rows 11. If the width LQ of the within-specification region Q has the length L10 in the long side direction of the terminal 10, there will be no problem with the COG connection. In addition, even if the width LR of the region R of the anisotropic conductive film exceeds the distance L11 between the terminal rows, and the region R partially overlaps with the terminal row 11, as long as the number of conductive particles captured at each terminal 10 through the anisotropic conductive connection is preferably more than 10, more preferably more than 13, there will be no problem in actual use. For example, when the size of the terminal 10 is 100μ×20μm, the interval L11 of the terminal column 11 is 1000μm, and the number density of the conductive particles in the area Q within the specification of the anisotropic conductive film 1 is 32,000 pieces/ mm2 , even if the area R of the anisotropic conductive film overlaps with the terminal 10, as long as the overlapping width is within 50% of the length L10 of the terminal 10, there is no problem in actual use and COG connection can be performed.
(各向异性导电膜的裁断)(Cutting of anisotropic conductive film)
在本发明的各向异性导电膜的制造方法中,为了提高各向异性导电膜的生产性,以某个程度宽的宽度制作各向异性导电膜的长尺体,然后以前述的检查方法确认导电粒子的遗漏,优选还确认凝聚等的不良部位,以使这些不会包括在既定宽度的各向异性导电膜内的方式进行裁断,或者,以保持将有遗漏的部位或凝聚等的不良部位包括在各向异性导电膜内的状态且使这些位置成为各向异性导电膜的短边方向的想要的位置的方式裁断成既定宽度的各向异性导电膜,从而制造实质上遗漏不成问题的各向异性导电膜。在该各向异性导电膜的制造工序中,也可以为了记录不良部位而进行标记。In the method for manufacturing an anisotropic conductive film of the present invention, in order to improve the productivity of the anisotropic conductive film, a long piece of the anisotropic conductive film is produced with a certain width. The film is then inspected for missing conductive particles using the aforementioned inspection method, preferably also for defective portions such as aggregates. The film is then cut so that these portions are not included in the anisotropic conductive film of a predetermined width. Alternatively, the film is cut into an anisotropic conductive film of a predetermined width so that the missing portions or defective portions such as aggregates are included in the anisotropic conductive film and are positioned at desired locations along the short side of the anisotropic conductive film. This results in an anisotropic conductive film with substantially no missing portions. During the manufacturing process of the anisotropic conductive film, marking may be performed to record the defective portions.
(各向异性导电膜的接合)(Bonding of anisotropic conductive films)
在本发明的各向异性导电膜的制造方法中,使切除包含既定遗漏部分的区域后的剩余的各向异性导电膜接合,从而还能够作为包含遗漏也在实际使用上遗漏不成问题的各向异性导电膜而提供。In the method for producing an anisotropic conductive film of the present invention, the remaining anisotropic conductive film after cutting out the region including the predetermined missing portion is joined, thereby providing an anisotropic conductive film including the missing portion and not causing any problem in practical use.
依据本发明,能够廉价地得到卷绕到卷轴上的、在长度5m以上5000m以下的长尺的各向异性导电膜的全长上沿长边方向没有既定数以上的连续遗漏的各向异性导电膜,特别是在COG用途上,能够得到在长度5m以上5000m以下的长尺的各向异性导电膜的全长上,在膜的短边方向的宽度的端部1P不存在导电粒子的遗漏的各向异性导电膜。According to the present invention, an anisotropic conductive film can be obtained inexpensively, which is wound on a reel and has no continuous omissions of more than a predetermined number of conductive particles along the long side direction over the entire length of the long anisotropic conductive film with a length of more than 5 m and less than 5000 m. In particular, for COG applications, an anisotropic conductive film can be obtained in which there are no omissions of conductive particles at the end 1P of the width in the short side direction of the film over the entire length of the long anisotropic conductive film with a length of more than 5 m and less than 5000 m.
<连接构造体><Connection structure>
本发明的各向异性导电膜能够优选适用在通过热或光来各向异性导电连接FPC、IC芯片、IC模块等的第1电子部件、和FPC、硬性基板、陶瓷基板、玻璃基板、塑料基板等的第2电子部件时。另外,也能够堆积IC芯片或IC模块而各向异性导电连接第1电子部件彼此。这样得到的连接构造体也是本发明的一部分。The anisotropic conductive film of the present invention is preferably used for anisotropically conductively connecting a first electronic component such as an FPC, IC chip, or IC module to a second electronic component such as an FPC, rigid substrate, ceramic substrate, glass substrate, or plastic substrate using heat or light. Furthermore, IC chips or IC modules can be stacked to anisotropically conductively connect the first electronic components. The resulting connection structure also forms part of the present invention.
作为利用各向异性导电膜的电子部件的连接方法,例如,从提高连接可靠性的方面来看优选将各向异性导电膜的膜厚方向上导电粒子存在于附近的一侧的界面临时粘贴在布线基板等的第2电子部件,对于临时粘贴的各向异性导电膜,搭载IC芯片等的第1电子部件,从第1电子部件侧进行热压接。另外,也能够利用光固化来进行连接。此外,在该连接中从连接作业效率的方面来看,优选使电子部件的端子10的长边方向对齐到各向异性导电膜1A、1B的短边方向。As a method for connecting electronic components using anisotropic conductive film, for example, to improve connection reliability, it is preferable to temporarily adhere the interface of the anisotropic conductive film on the side where the conductive particles are located in the film thickness direction to a second electronic component such as a wiring substrate. The temporarily adhered anisotropic conductive film is then thermocompressed from the first electronic component side, carrying a first electronic component such as an IC chip. Alternatively, light curing can be used for connection. Furthermore, in this connection, it is preferable to align the long sides of the electronic component's terminals 10 with the short sides of the anisotropic conductive films 1A and 1B to improve connection efficiency.
实施例Example
以下,利用实施例来具体说明本发明,但是本发明并不局限于这些实施例。Hereinafter, the present invention will be described in detail using examples, but the present invention is not limited to these examples.
<COG用转印体原盘的制作><Preparation of COG transfer master sheet>
首先,如下制作了实施例中使用的原盘。即,准备厚度2mm的镍板,在其50cm见方的区域,以六方格子图案形成圆柱状的凸部(外径4μm、高度4μm、中心间距离6μm),作为凸部的面密度成为32000个/mm 2的转印体原盘。First, the master disc used in the examples was prepared as follows. Specifically, a 2 mm thick nickel plate was prepared, and cylindrical protrusions (outer diameter 4 μm, height 4 μm, center-to-center distance 6 μm) were formed in a hexagonal lattice pattern on a 50 cm square area of the plate, resulting in a transfer master disc with an area density of 32,000 protrusions/ mm² .
(膜状原盘的制作)(Production of film master)
接着,准备50cm宽度且50μm厚的聚对苯二甲酸乙二醇酯基体材料膜,在该基体材料膜以膜厚成为30μm的方式涂敷含有丙烯酸酯树脂(M208,东亚合成(株))100质量份和光聚合引发剂(IRGACURE184,日本BASF(株))2质量份的光固化性树脂组合物。Next, a polyethylene terephthalate substrate film having a width of 50 cm and a thickness of 50 μm was prepared. A photocurable resin composition containing 100 parts by mass of an acrylate resin (M208, Toagosei Co., Ltd.) and 2 parts by mass of a photopolymerization initiator (IRGACURE 184, BASF Japan Co., Ltd.) was applied to the substrate film to a thickness of 30 μm.
对于所得到的光固化性树脂组合物膜,从其凸面按压镍制的转印体原盘,用高压水银灯(1000mJ)从基体材料膜侧进行光照射,从而形成转印体原盘的凸部被转印为凹部的光固化树脂层。一边对基体材料膜的长边方向进行对位一边连续地重复该操作,从而得到了转印体原盘的凸部被转印为凹部的约10m的膜状原盘。在所得到的膜状原盘中,与转印体原盘的凸部图案对应的凹部以六方格子状排列。The resulting photocurable resin composition film was pressed against a nickel transfer master from its convex surface and irradiated with light from a high-pressure mercury lamp (1000 mJ) from the substrate film side, forming a photocurable resin layer in which the convex portions of the transfer master were transferred as concave portions. This operation was repeated continuously while aligning the substrate film in its longitudinal direction, resulting in a film-like master with a length of approximately 10 m, in which the convex portions of the transfer master were transferred as concave portions. The resulting film-like master had concave portions arranged in a hexagonal lattice pattern corresponding to the convex pattern of the transfer master.
选择1000部位的所得到的膜状原盘的任意1mm 2的区域,并以光学显微镜计测各区域内的凹部数。然后,在各区域中计测的个数的总数除以区域的总面积,算出了凹部的面密度。其结果,凹部的面密度与转印体原盘的凸部图案的面密度相同为32000个/mm 2。We selected 1,000 random 1 mm² areas from the resulting film master and counted the number of concave portions in each area using an optical microscope. We then divided the total number of concave portions in each area by the total area of the area to calculate the surface density of the concave portions. The surface density of the concave portions was 32,000/ mm² , the same as the surface density of the convex pattern on the transfer master.
<COG对应的各向异性导电膜的制作><Fabrication of anisotropic conductive films for COG>
(对膜状原盘的导电粒子的填充)(Filling of film-like master with conductive particles)
作为导电粒子,准备金属包覆树脂粒子(积水化学工业(株),AUL703,平均粒径3μm),多次向膜状原盘的表面散布该导电粒子,接着,用布擦拭导电粒子,从而向沿长度方向以30cm裁断的膜状原盘的凹部填充导电粒子。裁断部位为起点终点及包含起点终点的中间部的3个部位的共5个部位。在此,为了使得存在不会填充到该树脂模的导电粒子,通过调整散布的导电粒子的个数、或散布的次数等,以能够得到如导电粒子成为既定遗漏的状态的区域。Metal-coated resin particles (Sekisui Chemical Co., Ltd., AUL703, average particle size 3μm) were prepared as conductive particles and were repeatedly spread onto the surface of a film master. The particles were then wiped with a cloth to fill the recessed areas of the film master, which had been cut at 30cm intervals along its length. The cuts were made at five locations, including the starting and ending points, and three locations in the middle between them. To prevent any conductive particles from filling the resin mold, the number of particles spread and the number of times the particles were spread were adjusted to create areas where the conductive particles were omitted.
(绝缘性树脂层用膜及第2绝缘性树脂层用膜的制作)(Production of Film for Insulating Resin Layer and Film for Second Insulating Resin Layer)
为了决定适合于COG用的树脂配合,混合表1所示的配合的树脂组合物,并涂敷在剥离处理后的PET膜,经干燥,以20×30cm的尺寸分别由绝缘性粘合剂A1~A4制作绝缘性树脂层用膜(厚度4μm)及由绝缘性粘合剂B制作第2绝缘性树脂层用膜(厚度14μm)。To determine a suitable resin blend for COG, the resin compositions shown in Table 1 were mixed and coated onto a release-treated PET film. After drying, insulating resin layer films (4 μm thick) were prepared using insulating adhesives A1 to A4, and a second insulating resin layer film (14 μm thick) was prepared using insulating adhesive B, each with a size of 20 × 30 cm.
[表1][Table 1]
(导电粒子对绝缘性树脂层的转印)(Transfer of conductive particles to insulating resin layer)
在导电粒子按既定条件填充的裁断的膜状原盘上,以使上述绝缘性树脂层用膜长边方向的长度一致,并使宽度方向包含膜状原盘的中央部附近的方式对位并覆盖,在60℃、0.5MPa下进行按压,从而转印了导电粒子。然后,从膜状原盘剥离绝缘性树脂层用膜,通过加压(按压条件:60~70℃、0.5Mpa)来向绝缘性树脂层用膜压入绝缘性树脂层用膜上的导电粒子,进而,使第2绝缘性树脂层用膜覆盖到导电粒子转印面而层叠,在裁断的膜状原盘5个点上进行此步骤,从而制作了导电粒子以图8所示的状态埋入的各向异性导电膜(ACF1~ACF4)。在该情况下,导电粒子的埋入由压入条件控制。以这样制作的、沿长边方向以30cm裁断的膜状原盘5个点为一组观察导电粒子的埋入状态,在埋入的导电粒子的露出部分的周围或埋入的导电粒子的正上方如表2所示那样在一组上全部观察到凹部。另外,ACF4在进行导电粒子的压入时不能维持膜形状。因而,可知在COG用途上能够适用ACF1~3。此外,在层叠绝缘性粘合剂B之前确认了导电粒子的埋入状态。另外,关于ACF1~3,利用图像解析软件(WinROOF,三谷商事(株))观察由CCD图像传感器取得的图像并确认了导电粒子的遗漏。其结果,存在多个组合了膜的长度方向的遗漏连续的5个以下(粒子间距离的最大长度33μm以内,小于后述的凸点宽度和凸点间间隙的合计38μm)、宽度方向上7个以下(粒子间距离的最大长度45μm以内)的遗漏。能够将该膜长度方向33μm×膜宽度方向38μm的矩形区域视为可允许的遗漏。因而,各尺寸比这小的认为是可允许的遗漏。此外,宽度方向的遗漏以凸点长度50μm以上分离而存在。On a cut film master disc filled with conductive particles according to predetermined conditions, the insulating resin layer film was aligned and placed so that its longitudinal length was uniform and its width direction encompassed the vicinity of the film master disc's center. Pressing was performed at 60°C and 0.5 MPa to transfer the conductive particles. The insulating resin layer film was then peeled from the film master disc, and the conductive particles on the insulating resin layer film were pressed into the insulating resin layer film using pressure (pressing conditions: 60-70°C, 0.5 MPa). Furthermore, a second insulating resin layer film was laminated to cover the conductive particle transfer surface. This process was repeated at five locations on the cut film master disc, producing anisotropic conductive films (ACF1-ACF4) with embedded conductive particles as shown in Figure 8. In this case, the embedding of the conductive particles was controlled by the press-in conditions. The embedded state of the conductive particles was observed at five points in a group on the film master prepared in this manner and cut at 30 cm along its longitudinal direction. Concavities were observed around the exposed portions of the embedded conductive particles or directly above the embedded conductive particles in all groups, as shown in Table 2. Furthermore, ACF4 failed to maintain its film shape during the indentation of the conductive particles. Therefore, ACFs 1-3 are suitable for COG applications. Furthermore, the embedded state of the conductive particles was confirmed before lamination with insulating adhesive B. For ACFs 1-3, images acquired by a CCD image sensor were observed using image analysis software (WinROOF, Mitani Shoji Co., Ltd.) to confirm the presence of conductive particle omissions. The results revealed a combination of five or fewer consecutive omissions in the longitudinal direction of the film (within the maximum interparticle distance of 33 μm, less than the total of 38 μm for the bump width and interbump gap, described later), and seven or fewer omissions in the width direction (within the maximum interparticle distance of 45 μm). The rectangular area of 33 μm in the film length direction and 38 μm in the film width direction can be considered as an allowable omission. Therefore, any size smaller than this is considered an allowable omission. In addition, omissions in the width direction exist when the bump length is 50 μm or more.
[表2][Table 2]
(考虑导电粒子的遗漏的COG用各向异性导电膜的制作)(Fabrication of anisotropic conductive film for COG considering the omission of conductive particles)
接着,以能够反映表3所示的实施例1~4及比较例1的“导电粒子遗漏状态(参照图4、10:LQ[μm]、LR[μm]、LQ/W[%]、LR/W[%])”的方式,以1.8mm宽度进行了分切。此外,在未能得到的情况下,通过调整导电粒子的散布量等,按各实施例及比较例的每一个重复ACF1~ACF3的制作操作,从而分别制作了3种各向异性导电膜。关于各实施例及比较例的各向异性导电膜,以使LR(规格外的部位(不存在导电粒子的区域)的宽度)的位置成为膜的中央的方式,以1.8mm宽度进行分切。在此,规格外的部位包含相对于膜长度方向33μm且膜宽度方向38μm的大小的可允许的遗漏的矩形区域,任意一个边大且不存在导电粒子的矩形区域,或者包含上述可允许的遗漏的矩形区域在宽度方向以小于50μm接近的区域。Next, the films were slit with a width of 1.8 mm to reflect the "conductive particle omission conditions" shown in Table 3 for Examples 1 to 4 and Comparative Example 1 (see Figures 4 and 10: LQ [μm], LR [μm], LQ/W [%], LR/W [%]). If this was not achieved, the fabrication procedures for ACF1 to ACF3 were repeated for each of the Examples and Comparative Examples, adjusting the amount of conductive particles dispersed. Three types of anisotropic conductive films were then produced. The anisotropic conductive films of each Example and Comparative Example were slit with a width of 1.8 mm so that the LR (the width of the out-of-specification region (a region lacking conductive particles)) was located at the center of the film. The out-of-specification region includes a rectangular region with a permissible omission of 33 μm in the film's longitudinal direction and 38 μm in the film's width, a rectangular region with either side larger and lacking conductive particles, or a region containing the permissible omission region with a width less than 50 μm.
[表3][Table 3]
<评价1(COG的情况下)><Evaluation 1 (in the case of COG)>
如下实验/评价利用在实施例1~4及比较例1分别制作的3种各向异性导电膜进行COG连接而得到的连接构造体的导通特性(初始导通性以及导通可靠性)。The following experiments/evaluations were conducted on the conductive properties (initial conductivity and conductive reliability) of connection structures obtained by COG connection using the three types of anisotropic conductive films produced in Examples 1 to 4 and Comparative Example 1, respectively.
(初始导通性)(Initial continuity)
作为COG连接的电子部件,使用以下的评价用IC(参照图10)和玻璃基板,将评价对象的各向异性导电膜夹持在这些评价用IC和玻璃基板之间,经加热加压(180℃、60MPa、5秒)而得到各评价用连接物。在该情况下,使各向异性导电膜的长边方向和凸点的短边方向对齐,并且以使各向异性导电膜的一对规格内区域位于IC芯片的短边方向的两端部的方式进行接合。利用数字万用表(34401A,AGILENT TECHNOLOGIES(株))以4端子法(JIS K7194)测定所得到的连接构造体的导通电阻。实际使用上,最好为2Ω以下。As electronic components for COG connections, the following evaluation ICs (see Figure 10) and glass substrates were used. The anisotropic conductive film to be evaluated was sandwiched between the ICs and the glass substrates, and heat and pressure were applied (180°C, 60 MPa, 5 seconds) to produce each connection. In this case, the long side of the anisotropic conductive film was aligned with the short side of the bumps, and the connection was performed so that a pair of within-specification regions of the anisotropic conductive film were located at either end of the short side of the IC chip. The on-resistance of the resulting connection structure was measured using a digital multimeter (34401A, AGILENT TECHNOLOGIES Co., Ltd.) using the four-terminal method (JIS K7194). For practical use, a value of 2Ω or less is ideal.
(导通可靠性)(Conduction reliability)
将供于初始导通电阻的测定的连接构造体,置于85℃、湿度85%的恒温槽500小时后再次测定了导通电阻。实际使用上,最好为5Ω以下。The connected structure subjected to the initial on-resistance measurement was placed in a thermostatic chamber at 85°C and 85% humidity for 500 hours, and the on-resistance was measured again. For practical use, a resistance of 5Ω or less is preferred.
(评价用IC)(Evaluation IC)
IC外形:1.6mm(宽)×30.0mm(长)×0.2mm(厚)IC size: 1.6mm (width) × 30.0mm (length) × 0.2mm (thickness)
金凸点:15μm(高)×20μm(宽)×100μm(长)Gold bump: 15μm (height) × 20μm (width) × 100μm (length)
(以凸点间间隙18μm,金凸点在IC外形宽度方向的端部分别沿着IC外形长边方向排列1000个。金凸点排列间的距离成为1000μm。)(With an inter-bump gap of 18 μm, 1000 gold bumps are arranged along the longitudinal direction of the IC at each end in the width direction of the IC. The distance between the gold bumps is 1000 μm.)
此外,图10是从凸点形成面侧观看评价用IC100的平面图。101为凸点,G为凸点间间隙。102表示凸点排列间距离。对于以虚线围住的区域A、B对应各向异性导电膜的规格内区域,被它们夹持的区域C与各向异性导电膜的规格外的部位(不存在导电粒子的区域)对应。另外,V表示IC芯片的短边方向的边缘和凸点的端部的距离。FIG10 is a plan view of an evaluation IC 100 viewed from the side with bumps formed. Reference numeral 101 denotes a bump, and G denotes the gap between bumps. Reference numeral 102 denotes the distance between the bumps. Regions A and B enclosed by dashed lines correspond to the within-specification area of the anisotropic conductive film, while region C sandwiched between them corresponds to the non-specification area of the anisotropic conductive film (an area without conductive particles). Reference numeral V denotes the distance between the short-side edge of the IC chip and the end of the bump.
(玻璃基板)(Glass substrate)
玻璃材质CORNING公司制1737FGlass material: CORNING 1737F
外形30mm×50mmAppearance: 30mm×50mm
厚度0.5mmThickness 0.5mm
端子ITO布线Terminal ITO wiring
(评价基准)(Evaluation Criteria)
关于供测定的连接构造体,将全部的端子中初始导通电阻为2Ω以下且导通可靠性实验后的导通电阻为5Ω以下的情况评价为“良好”,除此以外(哪怕存在有一个脱离上述范围的凸点的情况)评价为“不良”。将得到的结果示于表3中。For the tested connection structures, those with an initial on-resistance of 2Ω or less for all terminals and an on-resistance of 5Ω or less after the conduction reliability test were rated "good." Those with other resistances (even if there was a single bump outside these ranges) were rated "poor." The results are shown in Table 3.
如表3所示,利用实施例1~4各自的3种各向异性导电膜制作的连接构造体,导通特性良好,但是在比较例1的情况下,规格内区域过小,所以导通特性评价为不良。As shown in Table 3, the connection structures produced using the three types of anisotropic conductive films in Examples 1 to 4 had good conduction characteristics. However, in Comparative Example 1, the within-specification area was too small, so the conduction characteristics were evaluated as poor.
此外,得知即便端子的一部分上涉及遗漏区域,只要被端子捕获的导电粒子为10个以上、优选为13个以上,则在实际使用上没有问题。遗漏区域涉及端子排列也可,但是还得知这根据端子面积而程度有所变动,因此适当调整即可(实施例4)。鉴于以上的实施例,得知膜宽度的规格内区域的比例为13%以上即可,而20%以上为优选、33%以上则更优选。Furthermore, it was found that even if a portion of the terminal contains an omission region, as long as the number of conductive particles captured by the terminal is at least 10, preferably at least 13, there is no problem in practical use. The omission region can also be located within the terminal arrangement, but it was also found that the degree of this varies depending on the terminal area, so appropriate adjustments can be made (Example 4). Based on the above examples, it was found that the proportion of the in-spec region of the film width should be at least 13%, preferably at least 20%, and even more preferably at least 33%.
<FOG用转印体原盘及FOG用膜状原盘以及FOG对应的各向异性导电膜的制作><Fabrication of FOG Transfer Master, FOG Film Master, and FOG-compatible Anisotropic Conductive Film>
取代表1的绝缘性树脂粘合剂而使用表4的粘合剂,且除了选择使得导电粒子成为既定遗漏的状态的条件以外,重复COG对应的各向异性导电膜的制作操作,从而制作了FOG用转印体原盘、FOG用膜状原盘、进而导电粒子以图8所示的状态埋入的各向异性导电膜(ACF5~ACF8(参照表5))。在该情况下,导电粒子的埋入状态由压入条件控制。其结果,如表5所示,在埋入的导电粒子的露出部分的周围或埋入的导电粒子的正上方观察到凹部。这在层叠绝缘性粘合剂D之前确认。此外,ACF8在进行导电粒子的压入时不能维持膜形状。因而,得知在FOG用途上能够适用ACF5~7。By replacing the insulating resin adhesive in Table 1 with the adhesive in Table 4 and repeating the COG-compatible anisotropic conductive film production process, except for selecting conditions that resulted in the conductive particles being left out, FOG transfer masters, FOG film masters, and finally anisotropic conductive films (ACF5 to ACF8 (see Table 5)) were produced, each with conductive particles embedded in the configuration shown in Figure 8. In this case, the embedding state of the conductive particles was controlled by the press-in conditions. As shown in Table 5, recesses were observed around the exposed portions of the embedded conductive particles or directly above them. This was confirmed before laminating with insulating adhesive D. Furthermore, ACF8 failed to maintain its film shape during press-in of the conductive particles. Therefore, it was determined that ACF5 to ACF7 are suitable for FOG applications.
另外,关于ACF5~7,利用图像解析软件(WinROOF,三谷商事(株))观察以CCD图像传感器取得的图像并确认了导电粒子的遗漏。其结果,得到了在膜长边方向(端子的宽度方向)200μm以内,必定存在10个以上导电粒子的程度的遗漏的状态(实施例5)和只存在1~2个导电粒子的遗漏的状态(比较例2)。Furthermore, for ACFs 5 to 7, images acquired with a CCD image sensor were observed using image analysis software (WinROOF, Mitani Shoji Co., Ltd.) to confirm the absence of conductive particles. The results revealed a state where at least 10 conductive particles were consistently absent within 200 μm in the film's longitudinal direction (the width of the terminal) (Example 5), and a state where only 1 to 2 conductive particles were absent (Comparative Example 2).
[表4][Table 4]
[表5][Table 5]
(考虑导电粒子的遗漏的FOG用各向异性导电膜的制作)(Fabrication of anisotropic conductive film for FOG to prevent the loss of conductive particles)
接着,关于以20×30cm裁断的5块1组的各向异性导电膜(ACF5~7),分别以宽度2mm进行分切。准备从这些之中任意抽出5个部位(5块合计25个部位)的膜20mm的区域中,膜长边方向200μm(端子的宽度方向)上必定存在10个以上导电粒子的膜作为实施例5的各向异性导电膜。另外,除了使得具有导电粒子为1个或2个的区域以外重复进行同样的操作而作为比较例2的各向异性导电膜进行准备。Next, a set of five anisotropic conductive films (ACF5-7) cut into 20 x 30 cm pieces were cut into 2 mm widths. Five randomly selected locations (a total of 25 locations across the five pieces) were used to prepare an anisotropic conductive film for Example 5, in which at least 10 conductive particles were present within a 20 mm region of the film (200 μm in the longitudinal direction of the film (the width of the terminal). The same procedure was repeated, except that only one or two conductive particles were present in each region, to prepare an anisotropic conductive film for Comparative Example 2.
<评价2(FOG的情况下)><Evaluation 2 (in the case of FOG)>
如下实验/评价了利用在实施例5及比较例2分别制作的3种各向异性导电膜进行FOG连接而得到的连接构造体的导通特性(初始导通性以及导通可靠性)。The following experiments/evaluations were conducted on the conductive properties (initial conductivity and conductivity reliability) of connection structures obtained by performing FOG connection using the three types of anisotropic conductive films produced in Example 5 and Comparative Example 2, respectively.
(初始导通性)(Initial continuity)
作为FOG连接的电子部件,使用以下的评价用FPC和玻璃基板,将评价对象的各向异性导电膜以使先前任意抽出的25个部位来到这些评价用FPC与玻璃基板之间的方式分别裁断并夹持,经加热加压(180℃、4.5MPa、5秒)而得到各评价用连接物。在该情况下,以使各向异性导电膜的长边方向和凸点的短边方向对齐的方式接合。利用数字万用表(34401A,AGILENT TECHNOLOGIES(株))以4端子法(JIS K7194)测定所得到的连接构造体的导通电阻。实际使用上,最好为2Ω以下。As electronic components for FOG connections, the following evaluation FPCs and glass substrates were used. The anisotropic conductive film to be evaluated was cut and clamped so that 25 randomly selected locations were positioned between the evaluation FPCs and the glass substrates. Heat and pressure were applied (180°C, 4.5 MPa, 5 seconds) to produce each evaluation connection. In this case, the connection was made so that the long side of the anisotropic conductive film aligned with the short side of the bumps. The resulting connection structure was measured for on-resistance using a digital multimeter (34401A, AGILENT TECHNOLOGIES Co., Ltd.) using the four-terminal method (JIS K7194). For practical use, a value of 2Ω or less is ideal.
(导通可靠性)(Conduction reliability)
将供于初始导通电阻的测定的连接构造体,置于85℃、湿度85%的恒温槽500小时后再次测定了导通电阻。实际使用上,最好为5Ω以下。The connected structure subjected to the initial on-resistance measurement was placed in a thermostatic chamber at 85°C and 85% humidity for 500 hours, and the on-resistance was measured again. For practical use, a resistance of 5Ω or less is preferred.
(评价用FPC)(Evaluation FPC)
向38μm厚的聚酰亚胺基板形成有镀锡的8μm厚的400μm间距的Cu布线(L/S=200/200)8μm thick, 400μm pitch Cu wiring (L/S=200/200) was formed on a 38μm thick polyimide substrate with tin plating.
(玻璃基板)(Glass substrate)
玻璃材质CORNING公司制1737FGlass material: CORNING 1737F
外形30mm×50mmAppearance: 30mm×50mm
厚度0.5mmThickness 0.5mm
端子ITO布线Terminal ITO wiring
(评价结果)(Evaluation results)
关于供测定的连接构造体,将初始导通电阻为2Ω以下且导通可靠性实验后的导通电阻为5Ω以下的情况评价为“良好”,除此以外评价为“不良”。其结果,利用实施例5的3种各向异性导电膜制作的连接构造体的导通特性良好,另一方面,利用比较例2的各向异性导电膜制作的连接构造体,因为相比于实施例5在规则配置区域内存在规格外区域,所以导通特性评价为不良。The connection structures tested were evaluated as "good" if their initial on-resistance was 2Ω or less and their on-resistance after the on-resistance reliability test was 5Ω or less; otherwise, they were evaluated as "poor." The results showed that the connection structures fabricated using the three anisotropic conductive films of Example 5 had good on-resistance. On the other hand, the connection structure fabricated using the anisotropic conductive film of Comparative Example 2 had an out-of-specification region within the regular arrangement region compared to Example 5, resulting in a poor on-resistance evaluation.
产业上的可利用性Industrial applicability
本发明的各向异性导电膜具有导电粒子有规则地配置在绝缘性树脂粘合剂的规则配置区域,长度也有5m以上。而且在规则配置区域内,不存在导电粒子连续遗漏既定数以上的部位的规格内区域,以各向异性导电膜的短边方向的既定宽度,在各向异性导电膜的长边方向以既定长度以上存在。因此,即便对导电粒子的既定规则性配置存在遗漏的情况下,也能与无遗漏的各向异性导电膜大致同样地供于各向异性导电连接。作为低成本的各向异性导电连接用的接合构件是有用的。The anisotropic conductive film of the present invention has conductive particles regularly arranged within a regular arrangement region of an insulating resin adhesive, with a length of at least 5 m. Furthermore, within the regular arrangement region, there are no areas within the specification where more than a predetermined number of conductive particles are continuously omitted. Furthermore, the anisotropic conductive film has a predetermined width in the short direction of the anisotropic conductive film and a predetermined length in the long direction of the anisotropic conductive film. Therefore, even if there are omissions in the regular arrangement of conductive particles, the film can be used for anisotropic conductive connection in much the same way as an anisotropic conductive film without omissions. The film is useful as a low-cost bonding member for anisotropic conductive connections.
标号说明Label Description
1、1A、1B、1C各向异性导电膜 ;1P各向异性导电膜的短边方向的宽度的端部 ;2、2a、2b、2c、2d导电粒子 ;2t导电粒子的顶部 ;2X导电粒子的遗漏 ;2Y遗漏连续的部分 ;3绝缘性树脂粘合剂 ;3a邻接的导电粒子间的中央部的绝缘性树脂粘合剂的表面 ;3b、3c凹部 ;3p切平面 ;4绝缘性粘接层 ;5重复单元 ;10凸点、端子 ;11端子列 ;12电子部件 ;D导电粒子的平均粒径 ;L1格子轴 ;La绝缘性树脂粘合剂的厚度 ;Q规格内区域 ;R包含规格外的部位的区域 ;S任意的区域。1. 1A, 1B, 1C anisotropic conductive film; 1P the end of the width in the short side direction of the anisotropic conductive film; 2. 2a, 2b, 2c, 2d conductive particles; 2t the top of the conductive particles; 2X the omission of conductive particles; 2Y the omission of the continuous portion; 3 insulating resin adhesive; 3a the surface of the insulating resin adhesive in the center between adjacent conductive particles; 3b, 3c recessed portions; 3p the tangent plane; 4 insulating adhesive layer; 5 repeating unit; 10 bumps, terminals; 11 terminal array; 12 electronic components; D the average particle size of the conductive particles; L1 the lattice axis; La the thickness of the insulating resin adhesive; Q the area within the specifications; R the area including the parts outside the specifications; S any area.
Claims (15)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016-092901 | 2016-05-05 | ||
| JP2017-084914 | 2017-04-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| HK1261545A1 HK1261545A1 (en) | 2020-01-03 |
| HK1261545B true HK1261545B (en) | 2021-12-24 |
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