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HK1261541B - Anisotropic electroconductive film - Google Patents

Anisotropic electroconductive film

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Publication number
HK1261541B
HK1261541B HK19121383.4A HK19121383A HK1261541B HK 1261541 B HK1261541 B HK 1261541B HK 19121383 A HK19121383 A HK 19121383A HK 1261541 B HK1261541 B HK 1261541B
Authority
HK
Hong Kong
Prior art keywords
conductive particles
anisotropic conductive
conductive film
insulating resin
insulating
Prior art date
Application number
HK19121383.4A
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Chinese (zh)
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HK1261541A1 (en
Inventor
Reiji Tsukao
Yasushi Akutsu
Original Assignee
Dexerials Corporation
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Publication date
Application filed by Dexerials Corporation filed Critical Dexerials Corporation
Publication of HK1261541A1 publication Critical patent/HK1261541A1/en
Publication of HK1261541B publication Critical patent/HK1261541B/en

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Description

各向异性导电膜Anisotropic conductive film

技术领域Technical Field

本发明涉及各向异性导电膜。The present invention relates to an anisotropic conductive film.

背景技术Background Art

向绝缘性树脂粘合剂分散导电粒子的各向异性导电膜,在将IC芯片等的电子部件安装到布线基板等时被广泛使用。在各向异性导电膜中,随着电子部件的高密度安装所伴随的凸点的窄间距化,强烈要求提高凸点上的导电粒子的捕获性,且避免相邻的凸点间的短路。Anisotropic conductive films, which consist of conductive particles dispersed in an insulating resin binder, are widely used when mounting electronic components such as IC chips on wiring boards. With the narrowing of bump pitches associated with high-density mounting of electronic components, there is a strong demand for anisotropic conductive films to improve the ability to capture conductive particles on the bumps and prevent short circuits between adjacent bumps.

针对这样的要求,提出了使各向异性导电膜中的导电粒子的配置为格子状的排列,且使其排列轴相对于各向异性导电膜的长边方向倾斜,且在该情况下使导电粒子间的距离按既定比例分离(专利文献1、专利文献2)。另外,还提出了通过连结导电粒子,形成导电粒子局部密的区域,以对应窄间距化(专利文献3)。To meet these requirements, proposals have been made to arrange the conductive particles in an anisotropic conductive film in a grid-like pattern, with the arrangement axis tilted relative to the longitudinal direction of the anisotropic conductive film. In this case, the conductive particles are spaced at a predetermined ratio (Patent Documents 1 and 2). Furthermore, proposals have been made to link the conductive particles to form a locally dense region to accommodate narrower pitches (Patent Document 3).

现有技术文献Prior art literature

专利文献Patent Literature

专利文献1:日本特许4887700号公报;Patent Document 1: Japanese Patent No. 4887700;

专利文献2:日本特开平9-320345号公报;Patent Document 2: Japanese Patent Application Laid-Open No. 9-320345;

专利文献3:日本特表2002-519473号公报。Patent Document 3: Japanese Patent Application Publication No. 2002-519473.

发明内容Summary of the Invention

发明要解决的课题Problems to be solved by the invention

如在专利文献1、2记载的那样,在使导电粒子以单纯的格子状配置的情况下,会根据排列轴的倾斜角或导电粒子间的距离来对应凸点的布局。因此,当凸点为窄间距时不得不缩小导电粒子间的距离,难以避免短路。另外,导电粒子的个数密度增加,使各向异性导电膜的制造成本也增加。When conductive particles are arranged in a simple grid pattern, as described in Patent Documents 1 and 2, the bump layout is determined by the inclination angle of the arrangement axis or the distance between the conductive particles. Therefore, when the bumps are arranged at narrow pitches, the distance between the conductive particles must be reduced, making short circuits difficult to avoid. Furthermore, increasing the number density of conductive particles increases the manufacturing cost of the anisotropic conductive film.

另一方面在没有缩小导电粒子间的距离的情况下,担心导电粒子由端子不能捕获充分的数量。On the other hand, if the distance between the conductive particles is not reduced, there is a concern that a sufficient number of conductive particles may not be captured by the terminals.

另外,在通过使导电粒子连结而形成导电粒子局部密的区域的方法中,由于在连结的多个导电粒子同时进入凸点间空隙时短路的风险变高,所以并不理想。Furthermore, the method of forming a locally dense region of conductive particles by linking conductive particles is not preferred because the risk of short circuit increases when a plurality of linked conductive particles simultaneously enter the gaps between bumps.

因此本发明课题是提供能够对应窄间距的凸点,且能够比现有的各向异性导电膜减少导电粒子的个数密度的各向异性导电膜。Therefore, an object of the present invention is to provide an anisotropic conductive film that can accommodate bumps with narrow pitches and that can reduce the number density of conductive particles compared to conventional anisotropic conductive films.

用于解决课题的方案Solutions to Problems

本发明人发现当在各向异性导电膜的整个面重复配置导电粒子互相隔着间隔并且呈特定排列的导电粒子的单元时,能够在膜整个面形成导电粒子的疎密区域,因此能够在疎密区域的密区域中连接窄间距的凸点,且在该密区域中导电粒子也互相分离,因此降低短路的风险,进而因疎区域的存在而能够减少膜整体的导电粒子的个数密度,从而想到了本发明。The inventors discovered that when units of conductive particles spaced apart from each other and arranged in a specific manner are repeatedly arranged on the entire surface of an anisotropic conductive film, sparse and dense regions of conductive particles can be formed on the entire surface of the film. Therefore, narrow-pitch bumps can be connected in dense regions of the sparse regions, and the conductive particles are also separated from each other in the dense regions, thereby reducing the risk of short circuits. Furthermore, the presence of the sparse regions can reduce the number density of conductive particles in the entire film, which led to the present invention.

即,本发明提供在绝缘性树脂粘合剂中配置有导电粒子的各向异性导电膜,其中,That is, the present invention provides an anisotropic conductive film in which conductive particles are arranged in an insulating resin binder, wherein:

重复配置了并列不同导电粒子数的、导电粒子隔开间隔而排成一列的导电粒子列而成的导电粒子的重复单元。A repeating unit of conductive particles is formed by repeatedly arranging conductive particle rows in which conductive particles having different numbers of conductive particles are arranged in parallel and spaced apart from each other.

发明效果Effects of the Invention

依据本发明的各向异性导电膜,不使各个的导电粒子为单纯的格子状排列,而重复配置特定的粒子配置的导电粒子的重复单元,因此能够在膜形成导电粒子的疎密区域,所以各向异性导电膜整体上能够抑制导电粒子的个数密度的增加。因而,能够抑制制造成本伴随导电粒子的个数密度的增加而增加。另外,一般,如果导电粒子的个数密度增加,则在各向异性导电连接时按压夹具所需要的推力也增加,但是依据本发明的各向异性导电膜,通过抑制导电粒子的个数密度的增加,还抑制在各向异性导电连接时按压夹具所需要的推力的增加,因此能够防止电子部件因各向异性导电连接而变形。另外,按压夹具不需要过大的推力,从而稳定按压夹具的推力,因此各向异性导电连接的电子部件的导通特性等的质量稳定。According to the anisotropic conductive film of the present invention, the individual conductive particles are not arranged in a simple lattice shape, but the repeating units of the conductive particles with a specific particle configuration are repeatedly arranged, so that a sparse area of conductive particles can be formed in the film, so the anisotropic conductive film as a whole can suppress the increase in the number density of the conductive particles. Therefore, it is possible to suppress the increase in manufacturing costs accompanying the increase in the number density of the conductive particles. In addition, generally, if the number density of the conductive particles increases, the thrust required to press the clamp during anisotropic conductive connection also increases. However, according to the anisotropic conductive film of the present invention, by suppressing the increase in the number density of the conductive particles, the increase in the thrust required to press the clamp during anisotropic conductive connection is also suppressed, thereby preventing electronic components from being deformed due to anisotropic conductive connection. In addition, the pressing clamp does not require excessive thrust, thereby stabilizing the thrust of the pressing clamp, and thus the quality of the conductive characteristics of the electronic components of the anisotropic conductive connection is stable.

另一方面,依据本发明的各向异性导电膜,由于纵横重复形成成为导电粒子密的区域的重复单元,因此能够连接窄间距的凸点。进而,在重复单元内,导电粒子互相分离,因此,即便重复单元横跨在端子间空隙的情况下,也能避免短路的发生。On the other hand, the anisotropic conductive film of the present invention forms repeating units that form densely packed conductive particles, allowing for connection of narrowly pitched bumps. Furthermore, the conductive particles are separated from each other within the repeating units, preventing short circuits even when the repeating units span gaps between terminals.

附图说明BRIEF DESCRIPTION OF THE DRAWINGS

[图1A]图1A是示出实施例的各向异性导电膜1A的导电粒子的配置的平面图。[ FIG. 1A] FIG. 1A is a plan view showing the arrangement of conductive particles in an anisotropic conductive film 1A of the embodiment.

[图1B]图1B是实施例的各向异性导电膜1A的截面图。[ FIG. 1B] FIG. 1B is a cross-sectional view of an anisotropic conductive film 1A of the embodiment. [ FIG.

[图2]图2是实施例的各向异性导电膜1B的平面图。[ Fig. 2] Fig. 2 is a plan view of an anisotropic conductive film 1B of the embodiment.

[图3]图3是实施例的各向异性导电膜1C的平面图。[ Fig. 3] Fig. 3 is a plan view of an anisotropic conductive film 1C according to the embodiment.

[图4]图4是实施例的各向异性导电膜1D的平面图。[ Fig. 4] Fig. 4 is a plan view of an anisotropic conductive film 1D according to an embodiment.

[图5]图5是实施例的各向异性导电膜1E的平面图。[ Fig. 5] Fig. 5 is a plan view of an anisotropic conductive film 1E according to the embodiment.

[图6]图6是实施例的各向异性导电膜1F的平面图。[ Fig. 6] Fig. 6 is a plan view of an anisotropic conductive film 1F according to the embodiment.

[图7]图7是实施例的各向异性导电膜1G的平面图。[ Fig. 7] Fig. 7 is a plan view of an anisotropic conductive film 1G according to an embodiment.

[图8]图8是实施例的各向异性导电膜1H的平面图。[ Fig. 8] Fig. 8 is a plan view of an anisotropic conductive film 1H according to the embodiment.

[图9]图9是实施例的各向异性导电膜1I的平面图。[ Fig. 9] Fig. 9 is a plan view of an anisotropic conductive film 1I according to an embodiment.

[图10]图10是实施例的各向异性导电膜1J的平面图。[ Fig. 10] Fig. 10 is a plan view of an anisotropic conductive film 1J of the embodiment.

[图11]图11是实施例的各向异性导电膜1K的平面图。[ Fig. 11] Fig. 11 is a plan view of an anisotropic conductive film 1K according to an embodiment.

[图12]图12是实施例的各向异性导电膜1a的截面图。[ Fig. 12] Fig. 12 is a cross-sectional view of an anisotropic conductive film 1a according to an embodiment.

[图13]图13是实施例的各向异性导电膜1b的截面图。[ Fig. 13] Fig. 13 is a cross-sectional view of an anisotropic conductive film 1b of an embodiment.

[图14]图14是实施例的各向异性导电膜1c的截面图。[ Fig. 14] Fig. 14 is a cross-sectional view of an anisotropic conductive film 1c according to an embodiment.

[图15]图15是实施例的各向异性导电膜1d的截面图。[ Fig. 15] Fig. 15 is a cross-sectional view of an anisotropic conductive film 1d according to an embodiment.

[图16]图16是实施例的各向异性导电膜1e的截面图。[ Fig. 16] Fig. 16 is a cross-sectional view of an anisotropic conductive film 1e according to an embodiment.

具体实施方式DETAILED DESCRIPTION

以下,一边参照附图,一边对本发明的各向异性导电膜详细地进行说明。此外,各图中,相同标号表示相同或同等的结构要素。Hereinafter, the anisotropic conductive film of the present invention will be described in detail with reference to the accompanying drawings. In the drawings, the same reference numerals represent the same or equivalent components.

<各向异性导电膜的整体构成><Overall Structure of Anisotropic Conductive Film>

图1A是示出本发明的一实施例的各向异性导电膜1A的导电粒子的配置的平面图,图1B是其截面图。FIG1A is a plan view showing the arrangement of conductive particles in an anisotropic conductive film 1A according to an embodiment of the present invention, and FIG1B is a cross-sectional view thereof.

该各向异性导电膜1A具有这样的构造:导电粒子2以单层配置在绝缘性树脂粘合剂3的表面或其附近,其上层叠绝缘性粘接层4。This anisotropic conductive film 1A has a structure in which conductive particles 2 are arranged in a single layer on the surface of an insulating resin binder 3 or in the vicinity thereof, and an insulating adhesive layer 4 is laminated thereon.

此外,作为本发明的各向异性导电膜,也可为省略绝缘性粘接层4,并向绝缘性树脂粘合剂3埋入导电粒子2的结构。Furthermore, the anisotropic conductive film of the present invention may have a structure in which the insulating adhesive layer 4 is omitted and the conductive particles 2 are embedded in the insulating resin binder 3 .

<导电粒子>Conductive particles

作为导电粒子2,能够适当选择公知的各向异性导电膜中使用的导电粒子而使用。能够举出例如镍、铜、银、金、钯等的金属粒子;以镍等的金属包覆聚酰胺、聚苯并胍胺等的树脂粒子的表面的金属包覆树脂粒子等。所配置的导电粒子的大小,优选为1~30μm,更优选为1μm以上10μm以下,进一步优选为2μm以上6μm以下。Conductive particles 2 can be appropriately selected from known conductive particles used in anisotropic conductive films. Examples include metal particles of nickel, copper, silver, gold, palladium, and the like; and metal-coated resin particles obtained by coating the surface of resin particles such as polyamide and polybenzoguanamine with a metal such as nickel. The size of the conductive particles is preferably 1 to 30 μm, more preferably 1 μm to 10 μm, and even more preferably 2 μm to 6 μm.

导电粒子2的平均粒径,能够利用图像式或者激光式的粒度分布计进行测定。也可以俯视观察下观察各向异性导电膜,并计测粒径而求出。在此情况下,优选计测200个以上,更优选计测500个以上,进一步更优选计测1000个以上。The average particle size of the conductive particles 2 can be measured using an imaging or laser particle size distribution analyzer. Alternatively, the average particle size can be determined by observing the anisotropic conductive film from above and measuring the particle size. In this case, preferably 200 or more particles are measured, more preferably 500 or more particles are measured, and even more preferably 1000 or more particles are measured.

导电粒子2的表面优选通过绝缘涂层或绝缘粒子处理等来包覆。这样的包覆容易从导电粒子2的表面剥离且不会阻碍各向异性导电连接。另外,也可以在导电粒子2的表面的整个面或一部分设置突起。突起的高度优选为导电粒径的20%以内,更优选为10%以内。The surfaces of the conductive particles 2 are preferably coated with an insulating coating or insulating particle treatment. This coating is easily removed from the surface of the conductive particles 2 and does not hinder anisotropic conductive connection. Alternatively, protrusions may be provided on the entire or a portion of the surface of the conductive particles 2. The height of the protrusions is preferably within 20% of the conductive particle diameter, and more preferably within 10%.

<导电粒子的配置><Arrangement of Conductive Particles>

(重复单元)(Repeating unit)

各向异性导电膜1A的俯视观察下的导电粒子2的配置,成为在各向异性导电膜1A的整个面纵横(X方向、Y方向)重复导电粒子列2p、2q、2r和并列单独的导电粒子2s的重复单元5,依次连结构成重复单元5的外形的导电粒子的中心而形成的多边形成为三角形。此外,本发明的各向异性导电膜能够根据需要而具有未配置导电粒子的区域。The arrangement of the conductive particles 2 in the anisotropic conductive film 1A, when viewed from above, forms a repeating unit 5 consisting of rows of conductive particles 2p, 2q, and 2r and individual conductive particles 2s arranged side by side, repeated vertically and horizontally (in the X and Y directions) across the entire surface of the anisotropic conductive film 1A. The polygon formed by sequentially connecting the centers of the conductive particles forming the outer shape of the repeating unit 5 forms a triangle. Furthermore, the anisotropic conductive film of the present invention may, as desired, include regions where no conductive particles are arranged.

各导电粒子列2p、2q、2r分别在俯视观察下导电粒子2隔开间隔以直线状排成一列。另外,构成导电粒子列2p、2q、2r的导电粒子数逐渐不同,且导电粒子列2p、2q、2r平行地并排。通过重复使这样粒子数逐渐不同的导电粒子列2p、2q、2r并排的粒子配置,导电粒子的个数密度局部地形成疎密,因此,即便在将各向异性导电膜粘贴在电子部件的情况下出现微小的错位,在构成凸点列的任何凸点中也都会容易捕获稳定数的导电粒子。这根据连续进行各向异性导电连接的情况而变得有效。即,因单纯的格子排列而各向异性导电膜对电子部件的粘贴有微小偏移的情况下,特别是凸点端部中因错位的有无或程度而捕获粒子数容易零散。为了抑制该零散而将格子排列的角度设计成为相对于膜的长边方向倾斜(专利文献1等)。然而,若凸点宽度或凸点间距离进一步变窄,则使格子排列倾斜的效果有极限。相对于此,在本发明中,在凸点长的范围产生导电粒子的个数密度的疎密,从而使得在凸点长的范围的任一个部位都能捕获导电粒子。换言之,使得在一个凸点同时产生导电粒子被捕获的位置和不被捕获的位置。由此,如果在凸点排列的任一个中凸点的形状(面积)都同样,则通过适当设定重复单元的重复间隔,使凸点捕获的导电粒子的个数稳定。因而,即便在各向异性导电膜的粘贴上出现微小的错位,另外,在生产线上连续制造连接体时的每个连接体的凸点排列中导电粒子的捕获状态也会变得容易稳定。另外,通过在一个凸点同时产生导电粒子被捕获的位置和不被捕获的位置,能够期待减少各向异性导电连接后的检查劳动或提高质量管理。例如,通过在一个凸点同时产生导电粒子被捕获的位置和不被捕获的位置,在各向异性导电连接后进行压痕检查时,会容易进行连续得到的连接体的对比。另外,在连续制造的连接体彼此能够比较各向异性导电连接工序中向电子部件临时粘贴各向异性导电膜时的错位的有无,因此能够期待容易判定连接装置的改善事项。Each conductive particle array 2p, 2q, and 2r has conductive particles 2 arranged in a straight line with intervals when viewed from above. Furthermore, the number of conductive particles constituting each of the conductive particle arrays 2p, 2q, and 2r gradually varies, and the conductive particle arrays 2p, 2q, and 2r are arranged in parallel. By repeatedly arranging the particles in such a manner that the conductive particle arrays 2p, 2q, and 2r each have gradually varying numbers of particles, the number density of the conductive particles is locally sparse. Therefore, even if slight misalignment occurs when the anisotropic conductive film is attached to an electronic component, a stable number of conductive particles can be easily captured in any bump constituting the bump array. This is effective when continuous anisotropic conductive connections are made. Specifically, if a simple lattice arrangement results in slight misalignment when the anisotropic conductive film is attached to an electronic component, the number of captured particles can easily become scattered, particularly at the bump ends, depending on the presence or extent of misalignment. To prevent this scattering, the lattice arrangement is designed to be angled relative to the long side of the film (Patent Document 1, etc.). However, if the bump width or the distance between bumps is further narrowed, the effect of tilting the grid arrangement will be limited. In contrast, in the present invention, the number density of conductive particles is sparse within the range of the bump length, so that conductive particles can be captured at any position within the range of the bump length. In other words, a bump is simultaneously generated with positions where conductive particles are captured and positions where they are not captured. Therefore, if the shape (area) of the bumps in any bump arrangement is the same, the number of conductive particles captured by the bumps can be stabilized by appropriately setting the repetition interval of the repeating unit. Therefore, even if there is a slight misalignment in the attachment of the anisotropic conductive film, the capture state of the conductive particles in the bump arrangement of each connector when the connectors are continuously manufactured on the production line will be easily stabilized. In addition, by simultaneously generating positions where conductive particles are captured and positions where they are not captured on a bump, it is expected that the inspection labor after the anisotropic conductive connection will be reduced or quality management will be improved. For example, by simultaneously generating locations where conductive particles are trapped and locations where they are not trapped within a single bump, it is easier to compare consecutively produced connections during indentation inspection after anisotropic conductive connection. Furthermore, the presence or absence of misalignment when the anisotropic conductive film is temporarily attached to the electronic component during the anisotropic conductive connection process can be compared between consecutively produced connections, making it easier to identify improvements to the connection system.

重复单元5中的导电粒子2的配置,成为使构成该重复单元5的导电粒子2的一部分,占据无间隙地并排正六边形的情况下的各正六边形的顶点的一部分的配置。或者,成为无间隙地并排正三角形的情况下的正三角形的顶点和构成重复单元5的导电粒子重叠的配置。进而换言之,从导电粒子存在于6方格子排列的各格子点的配置有规则地遗漏既定格子点的导电粒子的剩下的配置成为重复单元5。如果这样在6方格子排列的格子点配置导电粒子2就会容易识别重复单元5的粒子配置,且容易进行设计。此外,如后述那样,重复单元中的导电粒子的配置,并不限于以6方格子为基础的配置,既可以以正方格子为基础,也可以以这样的配置为基础,即纵横并排八边形以上的正多边形,并使邻接的正多边形的边彼此重合。The configuration of the conductive particles 2 in the repeating unit 5 is such that a part of the conductive particles 2 constituting the repeating unit 5 occupies a part of the vertices of each regular hexagon when regular hexagons are arranged side by side without gaps. Alternatively, the configuration is such that the vertices of the regular triangle when regular triangles are arranged side by side without gaps overlap with the conductive particles constituting the repeating unit 5. In other words, the remaining configuration of the conductive particles that regularly omit the predetermined lattice points from the configuration of the conductive particles present at each lattice point of the hexagonal lattice arrangement becomes the repeating unit 5. If the conductive particles 2 are configured at the lattice points of the hexagonal lattice arrangement in this way, the particle configuration of the repeating unit 5 can be easily identified and easily designed. In addition, as described later, the configuration of the conductive particles in the repeating unit is not limited to the configuration based on the hexagonal lattice, and can be based on the regular lattice, or on a configuration in which regular polygons of more than octagon are arranged side by side vertically and horizontally, and the sides of adjacent regular polygons overlap each other.

(重复单元的重复方式)(How the repeating unit is repeated)

图1A所示的各向异性导电膜1A中的重复单元5的重复,更详细而言,在X方向上,重复单元5隔着重复单元5内的粒子间隔而重复。另外,在Y方向上,隔开间隔交替地重复以Y方向的对称轴反转重复单元5的重复单元5B和重复单元5。在该情况下,优选在向各向异性导电膜的短边方向投影依次连结构成重复单元的外形的导电粒子的中心而形成的多边形时的各向异性导电膜的长边方向的边的位置,局部地与跟该重复单元邻接的重复单元的同样的位置重叠。这是因为通常电子部件的端子的宽度方向成为各向异性导电膜的长边方向,所以当如上述那样重叠构成重复单元的外形的多边形时,会提高电子部件的端子捕获导电粒子的概率。另外,也可以更换各向异性导电膜的长边方向和短边方向。这是因为根据端子布局,也会发生最好更换的情况。More specifically, the repetition of repeating unit 5 in the anisotropic conductive film 1A shown in Figure 1A involves repeating in the X direction, with the repeating unit 5 spaced apart from the particles within the repeating unit 5. Furthermore, in the Y direction, repeating unit 5B and repeating unit 5, which are inverted about the Y-axis of symmetry, are repeated alternately at intervals. In this case, it is preferable that the position of the long-side edge of the anisotropic conductive film, when projecting the polygon formed by sequentially connecting the centers of the conductive particles forming the repeating unit's outer shape, onto the short side of the anisotropic conductive film, partially overlap with the same position of the repeating unit adjacent to the repeating unit. This is because the width direction of the terminals of electronic components typically corresponds to the long side direction of the anisotropic conductive film. Therefore, overlapping the polygons forming the repeating unit's outer shape as described above increases the probability that the terminals of the electronic component will capture the conductive particles. Alternatively, the long and short side directions of the anisotropic conductive film can be reversed. This is because the terminal layout may require some switching.

此外,在考虑导电粒子2的重复单元的情况下,也可以将合并重复单元5和反转它的重复单元5B的单元视为导电粒子的重复单位,但是在本发明中重复单元为多个导电粒子列并列而成的单元,优选为纵横重复的最小的单位。In addition, when considering the repeating unit of the conductive particle 2, the unit of the combined repeating unit 5 and the reversed repeating unit 5B can also be regarded as the repeating unit of the conductive particle, but in the present invention, the repeating unit is a unit formed by multiple conductive particle columns arranged in parallel, preferably the smallest unit repeated vertically and horizontally.

(重复单元的大小)(Size of repeating unit)

重复单元5的各向异性导电膜的大小或重复单元间的距离,优选根据由该各向异性导电膜1A连接的电子部件的凸点宽度或凸点间空隙的大小而确定。The size of the anisotropic conductive film of the repeating unit 5 or the distance between the repeating units is preferably determined based on the width of the bumps of the electronic component connected by the anisotropic conductive film 1A or the size of the gap between the bumps.

例如,在连接对象为非微小间距的情况下,重复单元5的各向异性导电膜长边方向的大小,优选比凸点宽度或凸点间空隙的任意较窄一方的长度小。即便为这样的大小,也能通过重复配置重复单元5,使凸点捕获到连接上所需最低限度的导电粒子数,另外,能够减少不参与连接的导电粒子数,因此能够谋求削减各向异性导电膜的成本。另外,通过使构成重复单元5的外形的多边形的边向各向异性导电膜1A的短边方向斜行,能够与长尺的各向异性导电膜的切出位置无关系地得到稳定的连接性能。For example, when the connection target has a non-micro-pitch, the size of the anisotropic conductive film in the long-side direction of the repeating unit 5 is preferably smaller than the width of the bump or the length of the narrower of the gaps between the bumps. Even with this size, the repeated arrangement of the repeating unit 5 allows the bumps to capture the minimum number of conductive particles required for connection. Furthermore, the number of conductive particles not involved in the connection can be reduced, thereby reducing the cost of the anisotropic conductive film. Furthermore, by slanting the sides of the polygons that form the outer shape of the repeating unit 5 toward the short sides of the anisotropic conductive film 1A, stable connection performance can be achieved regardless of the location of the cutout of the long anisotropic conductive film.

连接对象为非微小间距的情况下的各向异性导电膜长边方向上的、邻接的重复单元5、5B的距离,优选比由该各向异性导电膜连接的电子部件的凸点间空隙短。When the connection target is not a fine pitch, the distance between adjacent repeating units 5 and 5B in the longitudinal direction of the anisotropic conductive film is preferably shorter than the gap between bumps of the electronic component connected by the anisotropic conductive film.

另一方面,在连接对象为微小间距的情况下,优选使各向异性导电膜长边方向的重复单元5、5B的大小为横跨凸点间空隙的大小。On the other hand, when the connection target has a fine pitch, it is preferable that the size of the repeating units 5 and 5B in the longitudinal direction of the anisotropic conductive film be set to a size that spans the gap between the bumps.

此外,关于微小间距和非微小间距的临界,作为一个例子,能够使凸点宽度小于30μm为微小间距,而30μm以上为非微小间距。Regarding the boundary between micro pitch and non-micro pitch, as an example, a bump width of less than 30 μm can be considered micro pitch, while a bump width of 30 μm or greater can be considered non-micro pitch.

如上述在根据连接对象确定重复单元5的大小时,优选使构成重复单元5的导电粒子数为5个以上,更优选为10个以上,进一步优选为20个以上。一般,在通过各向异性导电连接来连接的对置的端子间,最好捕获3个以上、特别是10个以上的导电粒子,为此在重复单元被夹持在对置的端子间时,使得由一个重复单元的压痕能够确认捕获了那样数的导电粒子。As described above, when the size of the repeating unit 5 is determined based on the connection target, the number of conductive particles constituting the repeating unit 5 is preferably 5 or more, more preferably 10 or more, and even more preferably 20 or more. Generally, it is desirable to capture 3 or more, and particularly 10 or more, conductive particles between opposing terminals connected by anisotropic conductive connection. To this end, when the repeating unit is sandwiched between the opposing terminals, the indentation of one repeating unit can confirm that the required number of conductive particles has been captured.

(重复单元的具体变形方式)(Specific deformation mode of repeating unit)

本发明中,重复单元5中的导电粒子2的配置、或重复单元5的纵横的重复间距,能够根据作为各向异性导电连接的连接对象的端子的形状或端子的间距而适当变更。因而,与使导电粒子2为单纯的格子状排列的情况相比,各向异性导电膜整体上能够以较少的导电粒子数达到较高的捕获性。In the present invention, the arrangement of the conductive particles 2 in the repeating unit 5, or the vertical and horizontal repetition pitch of the repeating unit 5, can be appropriately modified according to the shape or spacing of the terminals to be connected by the anisotropic conductive connection. Therefore, compared to a case where the conductive particles 2 are arranged in a simple lattice pattern, the anisotropic conductive film as a whole can achieve higher capture efficiency with a smaller number of conductive particles.

例如,除了图1A所示的重复方式以外,也可以如图2所示的各向异性导电膜1B那样,以交错排列状重复重复单元5。在交错排列中,电子部件各向异性导电连接时的树脂流动对导电粒子产生的影响,在位于交错排列的中央部的凸点和位于外侧的凸点上有所不同,且在位于交错排列的中央部的凸点的凸点和位于外侧的凸点上短路风险也有所不同,因此能够适当变更重复单元5的形状而调整树脂流动的流动。For example, in addition to the repetitive pattern shown in FIG1A , the repeating unit 5 may be repeated in a staggered arrangement, as in the anisotropic conductive film 1B shown in FIG2 . In a staggered arrangement, the effect of resin flow on the conductive particles during anisotropic conductive connection of electronic components differs between the bumps located in the center of the staggered arrangement and those located on the outer sides. Furthermore, the risk of short circuits also differs between the bumps located in the center of the staggered arrangement and those located on the outer sides. Therefore, the shape of the repeating unit 5 can be appropriately changed to adjust the flow of resin.

重复单元5中的导电粒子2的配置也能够根据作为各向异性导电连接的连接对象的端子的形状或端子的间距而适当变更。例如,如图3所示的各向异性导电膜1C那样,既可以逐渐增加及减少一个重复单元5内构成导电粒子列2p的导电粒子数,也可以与重复单元5的重复一起重复配置单独的导电粒子2s。进而,也可以在一个重复单元内并列的3列导电粒子列中,使构成中央的导电粒子列的导电粒子数比构成两侧的导电粒子列的导电粒子数多或少。例如,如图4所示的各向异性导电膜1D那样,在各重复单元5中,并列了沿各向异性导电膜的长边方向排列4个导电粒子2的导电粒子列2p、排列2个的导电粒子列2q、排列3个的导电粒子列2r和1个导电粒子2s。若使一个重复单元内并列的导电粒子列中的导电粒子的个数增减,则该重复单元的外形成为复杂的多边形状,容易对应辐射状的凸点排列(所谓,扇出凸点)的连接。将一个重复单元中的导电粒子的配置,以构成该重复单元的导电粒子列的导电粒子数表示,例如,将图4所示的重复单元表示为[4-2-3-1]时,作为该重复单元的变形例,能够举出[4-1-4-1]、[4-3-1-2]、[3-2-2-1]、[4-1-2-3]、[4-2-1-3]等。也可以组合这些而重复配置。可举出例如[4-2-3-1-2-1-4-3]。The arrangement of the conductive particles 2 in the repeating unit 5 can also be appropriately changed according to the shape of the terminal to be connected to the anisotropic conductive connection or the spacing between the terminals. For example, as in the anisotropic conductive film 1C shown in FIG3 , the number of conductive particles constituting the conductive particle column 2p in a repeating unit 5 can be gradually increased or decreased, or individual conductive particles 2s can be repeatedly arranged along with the repetition of the repeating unit 5. Furthermore, in the three parallel rows of conductive particle columns in a repeating unit, the number of conductive particles constituting the central column can be greater or less than the number of conductive particles constituting the two side columns. For example, as in the anisotropic conductive film 1D shown in FIG4 , in each repeating unit 5, a conductive particle column 2p with four conductive particles 2 arranged along the long side of the anisotropic conductive film, a conductive particle column 2q with two conductive particles arranged, a conductive particle column 2r with three conductive particles arranged, and one conductive particle 2s are arranged side by side. By increasing or decreasing the number of conductive particles in the rows of conductive particles arranged side by side within a repeating unit, the repeating unit's outer shape becomes a complex polygonal shape, making it easier to connect to radial bump arrays (so-called fan-out bumps). The arrangement of conductive particles within a repeating unit is represented by the number of conductive particles in the rows that make up the repeating unit. For example, if the repeating unit shown in Figure 4 is represented as [4-2-3-1], variations of this repeating unit include [4-1-4-1], [4-3-1-2], [3-2-2-1], [4-1-2-3], and [4-2-1-3]. Combinations of these arrangements are also possible. For example, [4-2-3-1-2-1-4-3] is an example.

另外,一个导电粒子列内的导电粒子间距离,即可以在一个重复单元内并列的导电粒子列彼此相同,也可以不同。例如,如图5所示的各向异性导电膜1E那样,也可以使重复单元5的外形为菱形,并在其中央部配置导电粒子2。该重复单元中,并列了由5个导电粒子构成的导电粒子列2m、由2个导电粒子构成的导电粒子列2n、由3个导电粒子构成的导电粒子列2o、由2个导电粒子构成的导电粒子列2p、以及由5个导电粒子构成的导电粒子列2q,且导电粒子列2m、2q中的导电粒子间距离、导电粒子列2n、2p中的导电粒子间距离、和导电粒子列2o中的导电粒子间距离互相不同。将此设为前述表记的[4-3-2-1]的情况下,也可为遗漏3的中心的导电粒子的排列。这是因为能够进一步降低短路发生风险。Furthermore, the distances between conductive particles within a conductive particle column, that is, the distances between conductive particle columns arranged side by side within a repeating unit, can be the same or different. For example, as in the anisotropic conductive film 1E shown in FIG5 , the repeating unit 5 can be formed into a rhombus shape, with conductive particles 2 arranged in the center. In this repeating unit, a conductive particle column 2m consisting of five conductive particles, a conductive particle column 2n consisting of two conductive particles, a conductive particle column 2o consisting of three conductive particles, a conductive particle column 2p consisting of two conductive particles, and a conductive particle column 2q consisting of five conductive particles are arranged side by side, and the distances between conductive particles in conductive particle columns 2m and 2q, the distances between conductive particles in conductive particle columns 2n and 2p, and the distances between conductive particles in conductive particle column 2o are different. In the case of [4-3-2-1] as previously described, the arrangement of the conductive particles in the center of column 3 can also be omitted. This is because the risk of short circuits can be further reduced.

在上述的各向异性导电膜1A、1B、1C、1D、1E中,重复单元5、5B内的导电粒子2的配置存在于6方格子的格子点,但是,只要并列导电粒子列2p,也可以如图6所示的各向异性导电膜1F那样作成以正方格子为基础的排列。In the above-mentioned anisotropic conductive films 1A, 1B, 1C, 1D, and 1E, the arrangement of the conductive particles 2 within the repeating units 5 and 5B exists at the lattice points of the hexagonal lattice. However, as long as the conductive particle columns 2p are arranged in parallel, an arrangement based on a square lattice can also be made as shown in the anisotropic conductive film 1F in Figure 6.

图7所示的各向异性导电膜1G,在膜整个面分别重复配置了由2列的导电粒子列2p、2q构成的重复单元5、和60°旋转该重复单元5的导电粒子的排列轴的重复单元5B。这样,也可以并用某一个重复单元和将其以既定角度旋转的重复单元。The anisotropic conductive film 1G shown in FIG7 has a repeating unit 5 consisting of two rows of conductive particles 2p and 2q, and a repeating unit 5B in which the arrangement axis of the conductive particles in the repeating unit 5 is rotated by 60°, which are repeatedly arranged over the entire film surface. In this manner, a single repeating unit and a repeating unit in which the repeating unit is rotated by a predetermined angle may be used in combination.

作为重复单元的形状,也可以使依次连结构成其外形的导电粒子而形成的多边形为正多边形。由此变得容易识别导电粒子的配置,因此是优选的。在该情况下,形成重复单元的各导电粒子,也可以不存在于6方格子或正方格子的格子点。例如,如图8所示的各向异性导电膜1H那样能够将重复单元5的外形形成为正八边形。在该情况下,构成重复单元的外形的导电粒子,如同图虚线所示,配置在使纵横并排正八边形而邻接的正八边形彼此的边重合的格子的该正八边形的顶点。也可以同样在正十二边形、或正十二边形以上的正多边形体的顶点配置导电粒子。此外,也可以通过在6方格子或正方格子的格子点配置导电粒子,形成外形成为八边形以上的大致正多边形的重复单元。例如,图9所示的各向异性导电膜1I的重复单元5由配置在正方格子的格子点上的导电粒子2形成,成为无论是在各向异性导电膜的长边方向还是短边方向都对称的八边形。由此能够容易识别导电粒子的配置。As the shape of the repeating unit, the polygon formed by the conductive particles that are sequentially connected to form its outer shape can also be a regular polygon. It is thus easy to identify the configuration of the conductive particles, so it is preferred. In this case, each conductive particle that forms the repeating unit may not exist at the lattice points of the 6-square lattice or the square lattice. For example, the outer shape of the repeating unit 5 can be formed into a regular octagon as in the anisotropic conductive film 1H shown in Figure 8. In this case, the conductive particles that constitute the outer shape of the repeating unit are arranged at the vertices of the regular octagon of the lattice in which the sides of the adjacent regular octagons overlap as shown in the dotted lines. Conductive particles can also be arranged at the vertices of a regular dodecagon or a regular polygon above a regular dodecagon. In addition, a repeating unit whose outer shape becomes a roughly regular polygon above an octagon can also be formed by arranging conductive particles at the lattice points of the 6-square lattice or the square lattice. For example, the repeating unit 5 of the anisotropic conductive film 1I shown in FIG9 is formed by conductive particles 2 arranged at the lattice points of a square lattice, forming an octagon that is symmetrical in both the longitudinal and transverse directions of the anisotropic conductive film.

另外,重复单元中并列的导电粒子列彼此可以不必平行,也可以辐射状并排。例如,如图10所示的各向异性导电膜1J那样,能够纵横重复配置具有以辐射状排列的导电粒子列2m、2n、2o、2p、2q的重复单元5。在该情况下,导电粒子2也可以不用存在于6方格子或正方格子的格子点。Furthermore, the rows of conductive particles arranged side by side in a repeating unit do not necessarily need to be parallel to each other and can also be arranged radially. For example, as in the anisotropic conductive film 1J shown in FIG10 , a repeating unit 5 having rows of conductive particles 2m, 2n, 2o, 2p, and 2q arranged radially can be repeatedly arranged vertically and horizontally. In this case, the conductive particles 2 do not need to be located at the lattice points of a hexagonal lattice or a square lattice.

(重复单元的边的朝向)(Orientation of the edges of the repeating unit)

在上述的各向异性导电膜之中的、例如在图1A所示的各向异性导电膜1A中,依次连结构成重复单元5的外形的导电粒子的中心而形成的三角形5x的各边与各向异性导电膜1A的长边方向或短边方向斜交。由此,导电粒子2a的、各向异性导电膜的长边方向的外切线L1贯穿与该导电粒子2a在各向异性导电膜的长边方向邻接的导电粒子2b。另外,导电粒子2a的、各向异性导电膜的短边方向的外切线L2贯穿与该导电粒子2a在各向异性导电膜的短边方向邻接的导电粒子2c。一般,在各向异性导电连接时,各向异性导电膜的长边方向成为凸点的短边方向,因此在重复单元5的多边形5x的边与各向异性导电膜1A的长边方向或短边方向斜交时,能够防止多个导电粒子沿着凸点的边缘以直线状并排,由此能够避免以直线状并排的多个导电粒子聚集而从端子脱离,从而对导通没有贡献的现象,因此能够提高导电粒子2的捕获性。In the aforementioned anisotropic conductive film, for example, in the anisotropic conductive film 1A shown in FIG1A , the sides of the triangle 5x formed by sequentially connecting the centers of the conductive particles that form the outer shape of the repeating unit 5 are obliquely intersecting the longitudinal or transverse direction of the anisotropic conductive film 1A. Consequently, a tangent line L1 circumferentially tangent to a conductive particle 2a in the longitudinal direction of the anisotropic conductive film passes through a conductive particle 2b adjacent to the conductive particle 2a in the longitudinal direction of the anisotropic conductive film. Furthermore, a tangent line L2 circumferentially tangent to a conductive particle 2a in the transverse direction of the anisotropic conductive film passes through a conductive particle 2c adjacent to the conductive particle 2a in the transverse direction of the anisotropic conductive film. Generally, in anisotropic conductive connection, the long side direction of the anisotropic conductive film becomes the short side direction of the bump. Therefore, when the side of the polygon 5x of the repeating unit 5 is obliquely intersected with the long side direction or short side direction of the anisotropic conductive film 1A, it is possible to prevent multiple conductive particles from being arranged side by side in a straight line along the edge of the bump. This can avoid the phenomenon that multiple conductive particles arranged side by side in a straight line aggregate and detach from the terminal, thereby not contributing to conduction, thereby improving the capture property of the conductive particles 2.

此外,在各向异性导电连接时各向异性导电膜的长边方向成为凸点的短边方向的情况下,由构成重复单元5的外形的导电粒子形成的多边形5x,也可以不必一定使其全部的边与各向异性导电膜的长边方向或短边方向斜交,但是从导电粒子的捕获性的方面来看,优选使2边以上、更优选使3边以上与各向异性导电膜的长边方向或短边方向斜交。In addition, when the long side direction of the anisotropic conductive film becomes the short side direction of the bump during anisotropic conductive connection, the polygon 5x formed by the conductive particles constituting the outer shape of the repeating unit 5 does not necessarily have to have all its sides oblique to the long side direction or short side direction of the anisotropic conductive film. However, from the perspective of the capture ability of the conductive particles, it is preferred that more than two sides, and more preferably more than three sides, be oblique to the long side direction or short side direction of the anisotropic conductive film.

另一方面,在凸点的排列图案为辐射状的情况下(所谓,扇出凸点(fanoutbump)),优选构成重复单元的多边形具有各向异性导电膜的长边方向或短边方向的边。即,为了使应该连接的凸点彼此也不会因设置凸点的基体材料的热膨胀而错位,有时使凸点的排列图案为辐射状(例如,日本特开2007-19550号公报、2015-232660号公报等),在此情况下各个凸点的长边方向和各向异性导电膜的长边方向所形成的角度逐渐变化。因此,即便不使重复单元5的多边形的边与各向异性导电膜的长边方向或短边方向斜行,重复单元5、5B的多边形的边也对以辐射状排列的各个凸点的长边方向的缘边斜交。因而,能够避免在各向异性导电连接时凸点的边缘相关的大部分导电粒子不会被该凸点捕获,使导电粒子的捕获性下降这一现象。另一方面,凸点的辐射状的排列图案,通常左右对称地形成。因而,从根据各向异性导电连接后的压痕容易确认连接状态的良否的方面来看,优选使构成重复单元5的外形的多边形具有各向异性导电膜的长边方向或短边方向的边。因此,例如,在使重复单元为与图1A所示的各向异性导电膜1A同样的三角形的情况下,优选配置成如图11所示的各向异性导电膜1K那样使构成重复单元5的外形的三角形的1边5a与各向异性导电膜的长边方向或短边方向平行。另外,也可以如图8所示的各向异性导电膜1H的重复单元5那样,具有与各向异性导电膜的长边方向平行的边5a和与短边方向平行的边5b。On the other hand, when the bumps are arranged in a radial pattern (so-called fanout bumps), the polygons forming the repeating units preferably have sides in the long or short direction of the anisotropic conductive film. Specifically, to prevent the bumps to be connected from being misaligned due to thermal expansion of the base material on which the bumps are provided, the bumps are sometimes arranged in a radial pattern (e.g., Japanese Patent Application Publication Nos. 2007-19550 and 2015-232660). In these cases, the angle formed between the long side of each bump and the long side of the anisotropic conductive film gradually changes. Therefore, even if the sides of the polygons of the repeating unit 5 are not arranged obliquely with respect to the long or short side of the anisotropic conductive film, the sides of the polygons of the repeating units 5 and 5B intersect obliquely with the long side edges of the radially arranged bumps. This prevents the phenomenon in which most of the conductive particles at the edges of the bumps are not captured by the bumps during anisotropic conductive connection, thus reducing the capture efficiency of the conductive particles. On the other hand, the radial arrangement pattern of the bumps is usually formed bilaterally symmetrically. Therefore, from the perspective of easily confirming the quality of the connection state based on the indentation after the anisotropic conductive connection, it is preferred that the polygon constituting the outer shape of the repeating unit 5 has a side in the long side direction or the short side direction of the anisotropic conductive film. Therefore, for example, when the repeating unit is a triangle like the anisotropic conductive film 1A shown in Figure 1A, it is preferred to configure it so that one side 5a of the triangle constituting the outer shape of the repeating unit 5 is parallel to the long side direction or the short side direction of the anisotropic conductive film, as in the anisotropic conductive film 1K shown in Figure 11. In addition, it is also possible to have a side 5a parallel to the long side direction of the anisotropic conductive film and a side 5b parallel to the short side direction, as in the repeating unit 5 of the anisotropic conductive film 1H shown in Figure 8.

此外,作为本发明中的导电粒子的配置,并不局限于图示的重复单元的排列。例如,也可以使图示的排列倾斜。在该情况下,还包括90°倾斜、即更换膜的长边方向和短边方向的方式。另外,也可以变更重复单元5的间隔或重复单元内的导电粒子的间隔。Furthermore, the arrangement of the conductive particles in the present invention is not limited to the illustrated arrangement of repeating units. For example, the illustrated arrangement can be tilted. This also includes a 90° tilt, i.e., a method in which the long and short sides of the film are reversed. Furthermore, the spacing between the repeating units 5 or the spacing between the conductive particles within a repeating unit can be varied.

<导电粒子的最接近粒子间距离><Closest distance between conductive particles>

导电粒子的最接近粒子间距离,无论是在重复单元5内邻接的导电粒子间,还是在重复单元5间邻接的导电粒子间,都优选为平均导电粒径的0.5倍以上。重复单元5间的距离优选长于重复单元5内邻接的导电粒子间距离。若该距离过短则因为导电粒子相互的接触而容易引起短路。邻接的导电粒子的距离的上限,根据凸点形状或凸点间距而确定。例如,在凸点宽度200μm、凸点间空隙200μm的情况下,使凸点宽度或凸点间空隙的任一个上最低存在1个导电粒子时,使导电粒子间距离小于400μm。从使导电粒子的捕获性可靠的方面来看,优选小于200μm。The closest inter-particle distance of the conductive particles, whether between adjacent conductive particles within the repeating unit 5 or between adjacent conductive particles between repeating units 5, is preferably more than 0.5 times the average conductive particle size. The distance between repeating units 5 is preferably longer than the distance between adjacent conductive particles within the repeating unit 5. If the distance is too short, short circuits are likely to occur due to contact between the conductive particles. The upper limit of the distance between adjacent conductive particles is determined according to the bump shape or the bump spacing. For example, when the bump width is 200μm and the gap between the bumps is 200μm, when there is at least one conductive particle on either the bump width or the gap between the bumps, the distance between the conductive particles is made less than 400μm. From the perspective of making the capture of conductive particles reliable, it is preferably less than 200μm.

<导电粒子的个数密度><Number density of conductive particles>

从抑制各向异性导电膜的制造成本的方面,以及不使在各向异性导电连接时所使用的按压夹具所需要的推力过度大的方面来看,在导电粒子的平均粒径小于10μm的情况下,导电粒子的个数密度优选为50000个/mm 2以下,更优选为35000个/mm2以下,进一步优选为30000个/mm 2以下。另一方面,担心在导电粒子的个数密度过少时端子上不能充分捕获导电粒子而产生导通不良,因此优选为300个/mm 2以上,更优选为500个/mm 2以上,进一步优选为800个/mm 2以上。From the perspective of reducing the manufacturing cost of the anisotropic conductive film and preventing excessive thrust from being required by the pressing jig used for anisotropic conductive connection, when the average particle size of the conductive particles is less than 10 μm, the number density of the conductive particles is preferably 50,000 particles/ mm² or less, more preferably 35,000 particles/ mm² or less, and even more preferably 30,000 particles/ mm² or less. On the other hand, if the number density of the conductive particles is too low, there is a concern that the terminals may not be sufficiently captured by the conductive particles, resulting in poor conduction. Therefore, the number density is preferably 300 particles/ mm² or more, more preferably 500 particles/ mm² or more, and even more preferably 800 particles/ mm² or more.

另外,在导电粒子的平均粒径为10μm以上的情况下,优选为15个/mm 2以上,更优选为50个/mm 2以上,进一步优选为160个/mm2以上。这是因为如果导电粒径变大,则导电粒子的占用面积率也变高。基于同样的理由,优选为1800个/mm 2以下,更优选为1100个/mm 2以下,进一步优选为800个/mm 2以下。When the average particle size of the conductive particles is 10 μm or greater, the number of particles is preferably 15 or greater , more preferably 50 or greater , and even more preferably 160 or greater . This is because as the conductive particle size increases, the area occupied by the conductive particles also increases. For the same reason, the number of particles is preferably 1800 or less , more preferably 1100 or less , and even more preferably 800 or less .

此外,导电粒子的个数密度在局部上(作为一个例子,200μm×200μm),也可以不在上述个数密度范围。Furthermore, the number density of the conductive particles may not be within the above-mentioned number density range in a local area (for example, 200 μm×200 μm).

<绝缘性树脂粘合剂><Insulating resin adhesive>

作为绝缘性树脂粘合剂3,能够适当选择公知的各向异性导电膜中用作为绝缘性树脂粘合剂的热聚合性组合物、光聚合性组合物、光热并用聚合性组合物等而使用。其中作为热聚合性组合物,能够举出包含丙烯酸酯化合物和热自由基聚合引发剂的热自由基聚合性树脂组合物;包含环氧化合物和热阳离子聚合引发剂的热阳离子聚合性树脂组合物;包含环氧化合物和热阴离子聚合引发剂的热阴离子聚合性树脂组合物等,而作为光聚合性组合物,能够举出包含丙烯酸酯化合物和光自由基聚合引发剂的光自由基聚合性树脂组合物等。特别是,如果不产生问题,则也可以并用多种聚合性组合物。作为并用例,能举出热阳离子聚合性组合物和热自由基聚合性组合物的并用等。As the insulating resin binder 3, a suitable selection of known thermopolymerizable compositions, photopolymerizable compositions, and photothermal polymerizable compositions used as insulating resin binders in anisotropic conductive films can be used. Examples of thermopolymerizable compositions include thermoradical polymerizable resin compositions containing an acrylate compound and a thermal radical polymerization initiator; thermocationic polymerizable resin compositions containing an epoxy compound and a thermal cationic polymerization initiator; and thermoanionic polymerizable resin compositions containing an epoxy compound and a thermal anionic polymerization initiator. Examples of photopolymerizable compositions include photoradical polymerizable resin compositions containing an acrylate compound and a photoradical polymerization initiator. In particular, multiple polymerizable compositions may be used in combination if no problems arise. Examples of combined use include the combination of a thermocationic polymerizable composition and a thermoradical polymerizable composition.

在此,作为光聚合引发剂,也可以含有对不同波长的光产生反应的多种光聚合引发剂。由此,能够在制造各向异性导电膜时的、构成绝缘性树脂层的树脂的光固化、和各向异性连接时用于粘接电子部件彼此的树脂的光固化上分开使用所使用的波长。Here, the photopolymerization initiator may contain multiple photopolymerization initiators that react to light of different wavelengths. This allows different wavelengths to be used for photocuring the resin constituting the insulating resin layer during the manufacture of the anisotropic conductive film and for photocuring the resin used to bond electronic components during anisotropic connection.

在使用光聚合性组合物形成绝缘性树脂粘合剂3的情况下,通过在制造各向异性导电膜时的光固化,能够使绝缘性树脂粘合剂3所包含的光聚合性化合物的全部或一部分光固化。通过该光固化,保持或固定绝缘性树脂粘合剂3中的导电粒子2的配置,有抑制短路和提高捕获的前景。另外,通过调整该光固化的条件,能够调整各向异性导电膜的制造工序中的绝缘性树脂层的粘度。When insulating resin binder 3 is formed using a photopolymerizable composition, all or part of the photopolymerizable compound contained in insulating resin binder 3 can be photocured by photocuring during the manufacture of the anisotropic conductive film. This photocuring maintains or fixes the arrangement of conductive particles 2 in insulating resin binder 3, offering the potential for suppressing short circuits and improving capture. Furthermore, by adjusting the photocuring conditions, the viscosity of the insulating resin layer during the anisotropic conductive film manufacturing process can be adjusted.

绝缘性树脂粘合剂3中的光聚合性化合物的配合量优选为30质量%以下,更优选为10质量%以下,进一步优选为小于2质量%。这是因为如果光聚合性化合物过多,会增加各向异性导电连接时的压入所需的推力。The amount of the photopolymerizable compound in the insulating resin adhesive 3 is preferably 30% by mass or less, more preferably 10% by mass or less, and even more preferably less than 2% by mass. This is because too much photopolymerizable compound increases the thrust required for press-fitting during anisotropic conductive connection.

另一方面,热聚合性组合物含有热聚合性化合物和热聚合引发剂,但是作为该热聚合性化合物,也可以使用还作为光聚合性化合物发挥功能的化合物。另外,也可以使热聚合性组合物与热聚合性化合物不同地含有光聚合性化合物并且含有光聚合性引发剂。优选的是,与热聚合性化合物不同地含有光聚合性化合物和光聚合引发剂。例如,作为热聚合引发剂使用热阳离子类聚合引发剂,作为热聚合性化合物使用环氧树脂,作为光聚合引发剂使用光自由基引发剂,作为光聚合性化合物使用丙烯酸酯化合物。也可以使绝缘性粘合剂3包含这些聚合性组合物的固化物。On the other hand, the thermopolymerizable composition contains a thermopolymerizable compound and a thermopolymerizable initiator. However, the thermopolymerizable compound may also function as a photopolymerizable compound. Furthermore, the thermopolymerizable composition may contain a photopolymerizable compound separately from the thermopolymerizable compound and a photopolymerizable initiator. Preferably, the thermopolymerizable compound and the photopolymerizable initiator are separately from the thermopolymerizable compound. For example, a thermal cationic polymerization initiator may be used as the thermopolymerizable initiator, an epoxy resin may be used as the thermopolymerizable compound, a photoradical initiator may be used as the photopolymerizable initiator, and an acrylate compound may be used as the photopolymerizable compound. The insulating adhesive 3 may also comprise a cured product of any of these polymerizable compositions.

作为用作为热或光聚合性化合物的丙烯酸酯化合物,能够使用现有公知的热聚合型(甲基)丙烯酸酯单体。例如,能够使用单官能(甲基)丙烯酸酯类单体、二官能以上的多官能(甲基)丙烯酸酯类单体。As the acrylate compound used as the thermally or photopolymerizable compound, conventionally known thermally polymerizable (meth)acrylate monomers can be used, for example, monofunctional (meth)acrylate monomers and difunctional or higher-functional (meth)acrylate monomers.

另外,作为聚合性化合物使用的环氧化合物,优选形成三维网状构造,并赋予良好的耐热性、粘接性,且并用固体环氧树脂和液状环氧树脂。在此,固体环氧树脂是指在常温下为固体的环氧树脂。另外,液状环氧树脂是指在常温下为液状的环氧树脂。另外,常温是指以JISZ8703规定的5~35℃的温度范围。在本发明中能够并用两种以上的环氧化合物。另外,除了环氧化合物之外也可以并用氧杂环丁烷化合物。In addition, the epoxy compound used as the polymerizable compound preferably forms a three-dimensional network structure and imparts good heat resistance and adhesion, and is used in combination with a solid epoxy resin and a liquid epoxy resin. Here, a solid epoxy resin refers to an epoxy resin that is solid at room temperature. In addition, a liquid epoxy resin refers to an epoxy resin that is liquid at room temperature. In addition, room temperature refers to the temperature range of 5 to 35°C as specified in JIS Z8703. In the present invention, two or more epoxy compounds can be used in combination. In addition, an oxetane compound can also be used in combination in addition to the epoxy compound.

作为固体环氧树脂,只要与液状环氧树脂相溶且在常温下为固体,就无特别限定,可举出双酚A型环氧树脂、双酚F型环氧树脂、多官能型环氧树脂、二聚环戊二烯型环氧树脂、酚醛苯醛型环氧树脂、联苯型环氧树脂、萘型环氧树脂等,能够从这些之中单独使用一种,或者组合使用两种以上。在这些之中,优选使用双酚A型环氧树脂。The solid epoxy resin is not particularly limited as long as it is compatible with the liquid epoxy resin and is solid at room temperature. Examples thereof include bisphenol A epoxy resin, bisphenol F epoxy resin, multifunctional epoxy resin, dicyclopentadiene epoxy resin, novolac-benzaldehyde epoxy resin, biphenyl epoxy resin, and naphthalene epoxy resin. These can be used alone or in combination of two or more. Among these, bisphenol A epoxy resin is preferably used.

作为液状环氧树脂,只要在常温下为液状就无特别限定,可举出双酚A型环氧树脂、双酚F型环氧树脂、酚醛苯醛型环氧树脂、萘型环氧树脂等,能够从这些之中单独使用一种,或者组合使用两种以上。特别是,从膜的胶粘性、柔软性等的观点来看,优选使用双酚A型环氧树脂。The liquid epoxy resin is not particularly limited as long as it is liquid at room temperature. Examples thereof include bisphenol A epoxy resin, bisphenol F epoxy resin, novolac-benzaldehyde epoxy resin, and naphthalene epoxy resin. These can be used alone or in combination of two or more. In particular, bisphenol A epoxy resin is preferably used from the viewpoints of film adhesion and flexibility.

在热聚合引发剂之中作为热自由基聚合引发剂,能够举出例如有机过氧化物、偶氮类化合物等。特别是,能够优选使用不产生成为气泡原因的氮的有机过氧化物。Examples of thermal radical polymerization initiators include organic peroxides and azo compounds. In particular, organic peroxides that do not generate nitrogen that causes bubbles can be preferably used.

热自由基聚合引发剂的使用量,若过少则会成为固化不良,若过多则会降低制品寿命,因此相对于(甲基)丙烯酸酯化合物100质量份,优选为2~60质量份、更优选为5~40质量份。The amount of the thermal radical polymerization initiator used is preferably 2 to 60 parts by mass, more preferably 5 to 40 parts by mass, based on 100 parts by mass of the (meth)acrylate compound, because curing may be poor if too little, and product life may be shortened if too much.

作为热阳离子聚合引发剂,能够采用作为环氧化合物的热阳离子聚合引发剂公知的引发剂,能够采用例如因热而产生氧的碘鎓盐、硫鎓盐、季鏻盐、二茂铁类等,特别是,能够优选使用对于温度显示良好的潜伏性的芳香族硫鎓盐。As the thermal cationic polymerization initiator, a known initiator for thermal cationic polymerization of epoxy compounds can be used. For example, iodonium salts, sulfonium salts, quaternary phosphonium salts, ferrocenes, etc. that generate oxygen by heat can be used. In particular, aromatic sulfonium salts that show good latency with respect to temperature can be preferably used.

热阳离子聚合引发剂的使用量,过少也有固化不良的倾向,过多也有降低制品寿命的倾向,因此相对于环氧化合物100质量份,优选为2~60质量份,更优选为5~40质量份。The amount of the thermal cationic polymerization initiator used tends to be insufficient in curing if too little, and tends to be shortened in product life if too much. Therefore, the amount is preferably 2 to 60 parts by mass, more preferably 5 to 40 parts by mass, based on 100 parts by mass of the epoxy compound.

作为热阴离子聚合引发剂,能够使用通常采用的公知的引发剂。可举出例如有机酸二酰肼、双氰胺、胺基化合物、聚酰胺胺基(polyamideamine)化合物、氰酸酯化合物、酚醛树脂、酸酐、羧酸、三级胺基化合物、咪唑、路易斯酸、Brφnsted 酸盐、聚硫醇类固化剂、尿素树脂、三聚氰胺树脂、异氰酸酯化合物、封端异氰酸酯化合物等,能够从这些之中单独使用一种或者组合两种以上使用。这些之中,优选使用以咪唑改性体为核再以聚氨酯包覆其表面而成的微胶囊型潜伏性固化剂。As thermal anionic polymerization initiators, commonly used known initiators can be used. Examples include organic acid dihydrazides, dicyandiamide, amino compounds, polyamideamine compounds, cyanate compounds, phenolic resins, acid anhydrides, carboxylic acids, tertiary amino compounds, imidazoles, Lewis acids, Brønsted acid salts, polythiol curing agents, urea resins, melamine resins, isocyanate compounds, and blocked isocyanate compounds. These can be used alone or in combination of two or more. Among these, microcapsule-type latent curing agents comprising a modified imidazole core coated with polyurethane are preferred.

优选使热聚合性组合物含有膜形成树脂。膜形成树脂,例如相当于平均分子量为10000以上的高分子量树脂,从膜形成性的观点来看,优选为10000~80000左右的平均分子量。作为膜形成树脂,可举出苯氧基树脂、聚酯树脂、聚氨酯树脂、聚酯聚氨酯树脂、丙烯树脂、聚酰亚胺树脂、丁缩醛树脂等的各种树脂,这些既可以单独使用,也可以组合两种以上来使用。这些之中,从膜形成状态、连接可靠性等的观点来看优选适当地使用苯氧基树脂。The thermopolymerizable composition preferably contains a film-forming resin. The film-forming resin is, for example, a high molecular weight resin having an average molecular weight of 10,000 or more. From the perspective of film formation, the average molecular weight is preferably about 10,000 to 80,000. Examples of the film-forming resin include phenoxy resins, polyester resins, polyurethane resins, polyester polyurethane resins, acrylic resins, polyimide resins, butyral resins, and the like. These resins may be used alone or in combination of two or more. Among these, phenoxy resins are preferably used appropriately from the perspectives of film formation and connection reliability.

为了调整熔化粘度,也可以使热聚合性组合物含有绝缘性填充剂。对此可举出硅石粉、氧化铝粉等。绝缘性填充剂的大小优选粒径20~1000nm,另外,配合量优选相对于环氧化合物等的热聚合性化合物(光聚合性化合物)100质量份为5~50质量份。To adjust the melt viscosity, the thermopolymerizable composition may contain an insulating filler. Examples include silica powder and alumina powder. The insulating filler preferably has a particle size of 20 to 1000 nm, and the amount incorporated is preferably 5 to 50 parts by mass per 100 parts by mass of the thermopolymerizable compound (photopolymerizable compound) such as the epoxy compound.

进而,也可以含有与上述绝缘性填充剂不同的填充剂、软化剂、促进剂、防老化剂、着色剂(颜料、染料)、有机溶剂、离子捕获剂等。Furthermore, fillers other than the above-mentioned insulating fillers, softeners, accelerators, antioxidants, colorants (pigments, dyes), organic solvents, ion trapping agents, and the like may be contained.

另外,根据需要,也可以配合应力缓冲剂、硅烷偶联剂、无机填充剂等。作为应力缓冲剂,能够举出氢化苯乙烯丁二烯嵌段共聚物、氢化苯乙烯异戊二烯嵌段共聚物等。另外,作为硅烷偶联剂,能够举出环氧类、甲基丙烯酰氧基类、氨类、乙烯类、巯基/硫化物类、脲化物类等。另外,作为无机填充剂,能够举出硅石、滑石、氧化钛、碳酸钙、氧化镁等。In addition, as needed, stress buffers, silane coupling agents, inorganic fillers, etc. can also be mixed. Examples of stress buffers include hydrogenated styrene butadiene block copolymers and hydrogenated styrene isoprene block copolymers. In addition, examples of silane coupling agents include epoxy, methacryloyloxy, amino, vinyl, mercapto/sulfide, and urea compounds. In addition, examples of inorganic fillers include silica, talc, titanium oxide, calcium carbonate, and magnesium oxide.

绝缘性树脂粘合剂3能够通过利用涂敷法来使包含上述的树脂的涂层组合物成膜并干燥、或进一步固化,或者通过预先利用公知的方法来膜化而形成。绝缘性树脂粘合剂3也可以根据需要层叠树脂层而获得。另外,绝缘性树脂粘合剂3优选形成在经剥离处理的聚对苯二甲酸乙二醇酯膜等的剥离膜上。The insulating resin adhesive 3 can be formed by forming a coating composition containing the above-mentioned resin into a film by coating and drying or further curing it, or by pre-forming it into a film by a known method. The insulating resin adhesive 3 can also be obtained by laminating resin layers as needed. In addition, the insulating resin adhesive 3 is preferably formed on a release film such as a polyethylene terephthalate film that has been subjected to a release treatment.

(绝缘性树脂粘合剂的粘度)(Viscosity of insulating resin adhesive)

绝缘性树脂粘合剂3的最低熔化粘度,能够根据各向异性导电膜的制造方法等而适当决定。例如,作为各向异性导电膜的制造方法,在进行使导电粒子以既定配置保持在绝缘性树脂粘合剂的表面,并向绝缘性树脂粘合剂压入该导电粒子的方法时,从能够膜成形的方面来看,绝缘性树脂粘合剂的树脂的最低熔化粘度优选为1100Pa・s以上。另外,如后述那样,如图12或图13所示在向绝缘性树脂粘合剂3压入的导电粒子2的露出部分周围形成凹部3b,或者如图14所示在向绝缘性树脂粘合剂3压入的导电粒子2的正上方形成凹部3c,从这一点来看,最低熔化粘度优选为1500Pa・s以上,更优选为2000Pa・s以上、进一步优选为3000~15000Pa・s、特别为3000~10000Pa・s。作为一个例子,该最低熔化粘度能够利用旋转式流变仪(TA instruments公司制),在升温速度为10℃/分钟、测定压力为5g保持恒定,使用直径8mm的测定板而求出。另外,优选在40~80℃、更优选在50~60℃下进行对绝缘性树脂粘合剂3压入导电粒子2的工序的情况下,与上述同样,从形成凹部3b或3c的方面来看,60℃下的粘度的下限优选为3000Pa・s以上,更优选为4000Pa・s以上,进一步优选为4500Pa・s以上,上限优选为20000Pa・s以下,更优选为15000Pa・s以下,进一步优选为10000Pa・s以下。The minimum melt viscosity of the insulating resin binder 3 can be appropriately determined based on factors such as the anisotropic conductive film manufacturing method. For example, in a method for manufacturing an anisotropic conductive film in which conductive particles are retained in a predetermined arrangement on the surface of an insulating resin binder and then press-fitted into the insulating resin binder, the minimum melt viscosity of the resin of the insulating resin binder is preferably 1100 Pa·s or higher to facilitate film formation. Furthermore, as described later, when recesses 3b are formed around the exposed portions of the conductive particles 2 pressed into the insulating resin binder 3 as shown in FIG12 or FIG13 , or recesses 3c are formed directly above the conductive particles 2 pressed into the insulating resin binder 3 as shown in FIG14 , the minimum melt viscosity is preferably 1500 Pa·s or higher, more preferably 2000 Pa·s or higher, even more preferably 3000 to 15000 Pa·s, and particularly preferably 3000 to 10000 Pa·s. As an example, the minimum melt viscosity can be determined using a rotational rheometer (manufactured by TA Instruments) at a temperature increase rate of 10°C/minute, a constant measuring pressure of 5g, and a measuring plate with a diameter of 8mm. Furthermore, when the step of press-fitting the conductive particles 2 into the insulating resin binder 3 is preferably performed at 40-80°C, more preferably 50-60°C, then, similarly to the above description, from the perspective of forming the recesses 3b or 3c, the lower limit of the viscosity at 60°C is preferably 3000 Pa·s or higher, more preferably 4000 Pa·s or higher, and even more preferably 4500 Pa·s or higher. The upper limit is preferably 20000 Pa·s or lower, more preferably 15000 Pa·s or lower, and even more preferably 10000 Pa·s or lower.

通过使构成绝缘性树脂粘合剂3的树脂的粘度如上述为高粘度,能够在使用各向异性导电膜时,将导电粒子2夹持在对置的电子部件等的连接对象物之间而进行加热加压的情况下,防止各向异性导电膜内的导电粒子2会因熔化的绝缘性树脂粘合剂3的流动而流动。By making the viscosity of the resin constituting the insulating resin adhesive 3 high as described above, it is possible to prevent the conductive particles 2 in the anisotropic conductive film from flowing due to the flow of the molten insulating resin adhesive 3 when the conductive particles 2 are clamped between opposing connection objects such as electronic components and heated and pressurized when the anisotropic conductive film is used.

(绝缘性树脂粘合剂的厚度)(Thickness of insulating resin adhesive)

绝缘性树脂粘合剂3的厚度La优选为1μm以上60μm以下、更优选为1μm以上30μm以下、进一步优选为2μm以上15μm以下。另外,绝缘性树脂粘合剂3的厚度La在与导电粒子2的平均粒径D的关系上,优选使它们之比(La/D)为0.6~10。若绝缘性树脂粘合剂3的厚度La过大,则各向异性导电连接时导电粒子会容易错位,端子上的导电粒子的捕获性下降。该倾向在La/D超过10时显著。因此La/D优选为8以下,进一步更优选为6以下。相反地若绝缘性树脂粘合剂3的厚度La过小而La/D小于0.6,则难以通过绝缘性树脂粘合剂3将导电粒子维持在既定粒子分散状态或者既定排列。特别是,在连接的端子为高密度COG的情况下,绝缘性树脂粘合剂3的层厚La与导电粒子2的粒径D之比(La/D),优选为0.8~2。The thickness La of the insulating resin adhesive 3 is preferably between 1 μm and 60 μm, more preferably between 1 μm and 30 μm, and even more preferably between 2 μm and 15 μm. Furthermore, the ratio (La/D) of the thickness La of the insulating resin adhesive 3 to the average particle size D of the conductive particles 2 is preferably between 0.6 and 10. If the thickness La of the insulating resin adhesive 3 is too large, the conductive particles may become easily misaligned during anisotropic conductive connection, reducing the ability of the terminals to capture the conductive particles. This tendency is pronounced when La/D exceeds 10. Therefore, La/D is preferably 8 or less, and more preferably 6 or less. Conversely, if the thickness La of the insulating resin adhesive 3 is too small, such that La/D is less than 0.6, it becomes difficult for the insulating resin adhesive 3 to maintain the conductive particles in a predetermined dispersion or arrangement. In particular, when the terminals are connected using high-density COG, the ratio (La/D) of the thickness La of the insulating resin adhesive 3 to the particle size D of the conductive particles 2 is preferably between 0.8 and 2.

(绝缘性树脂粘合剂中的导电粒子的埋入方式)(Method of embedding conductive particles in insulating resin adhesive)

对于绝缘性树脂粘合剂3中的导电粒子2的埋入状态没有特别限制,但是在对置的部件之间夹持各向异性导电膜,并加热加压而进行各向异性导电连接的情况下,如图12、图13所示,优选使导电粒子2从绝缘性树脂粘合剂3局部地露出,相对于邻接的导电粒子2间的中央部的绝缘性树脂粘合剂的表面3a的切平面3p,在导电粒子2的露出部分的周围形成凹部3b,或者,如图14所示,在向绝缘性树脂粘合剂3内压入的导电粒子2的正上方的绝缘性树脂粘合剂部分,相对于与上述同样的切平面3p形成凹部3c,以在导电粒子2的正上方的绝缘性树脂粘合剂3的表面存在起伏。针对导电粒子2被夹持在对置的电子部件的电极间而加热加压时产生的导电粒子2的扁平化,因为有图12、图13所示的凹部3b,导电粒子2从绝缘性树脂粘合剂3受到的阻力会比没有凹部3b的情况减少。因此,导电粒子2会容易被夹持在对置的电极间,从而还提高导通性能。另外,通过在构成绝缘性树脂粘合剂3的树脂之中的、导电粒子2的正上方的树脂的表面形成凹部3c(图14),与没有凹部3c的情况相比,加热加压时的压力会容易集中到导电粒子2,且电极中会容易夹持导电粒子2,从而提高导通性能。The embedding state of the conductive particles 2 in the insulating resin adhesive 3 is not particularly limited. However, when an anisotropic conductive connection is made by sandwiching an anisotropic conductive film between opposing components and applying heat and pressure, it is preferable to partially expose the conductive particles 2 from the insulating resin adhesive 3, as shown in Figures 12 and 13 , and to form recesses 3b around the exposed portions of the conductive particles 2 relative to a tangent plane 3p taken along the insulating resin adhesive surface 3a at the center between adjacent conductive particles 2. Alternatively, as shown in Figure 14 , recesses 3c are formed relative to the same tangent plane 3p in the portion of the insulating resin adhesive directly above the conductive particles 2 pressed into the insulating resin adhesive 3, thereby creating undulations on the surface of the insulating resin adhesive 3 directly above the conductive particles 2. The presence of recesses 3b as shown in Figures 12 and 13 reduces the resistance experienced by the conductive particles 2 from the insulating resin adhesive 3 compared to a case without recesses 3b, as opposed to flattening of the conductive particles 2 that occurs when the conductive particles 2 are sandwiched between opposing electrodes of electronic components and subjected to heat and pressure. This facilitates the holding of the conductive particles 2 between the opposing electrodes, further improving conductivity. Furthermore, by forming recesses 3c (Figure 14) on the surface of the resin immediately above the conductive particles 2 within the resin constituting the insulating resin binder 3, the pressure during heating and pressing is more easily concentrated on the conductive particles 2, compared to a case without recesses 3c. This allows the conductive particles 2 to be more easily held between the electrodes, thereby improving conductivity.

从容易得到上述凹部3b、3c的效果的方面来看,导电粒子2的露出部分的周围的凹部3b(图12、图13)的最大深度Le与导电粒子2的平均粒径D之比(Le/D),优选为小于50%,更优选为小于30%,进一步优选为20~25%,而导电粒子2的露出部分的周围的凹部3b(图12、图13)的最大直径Ld与导电粒子2的平均粒径D之比(Ld/D),优选为100%以上,更优选为100~150%,且导电粒子2的正上方的树脂中的凹部3c(图14)的最大深度Lf与导电粒子2的平均粒径D之比(Lf/D),优选为大于0,且优选为小于10%,更优选为小于5%。In order to facilitate the effects of the recesses 3 b and 3 c described above, the ratio (Le/D) of the maximum depth Le of the recesses 3 b ( FIG. 12 and FIG. 13 ) around the exposed portion of the conductive particles 2 to the average particle diameter D of the conductive particles 2 is preferably less than 50%, more preferably less than 30%, and even more preferably 20 to 25%. The ratio (Ld/D) of the maximum diameter Ld of the recesses 3 b ( FIG. 12 and FIG. 13 ) around the exposed portion of the conductive particles 2 to the average particle diameter D of the conductive particles 2 is preferably 100% or more, more preferably 100 to 150%. The ratio (Lf/D) of the maximum depth Lf of the recesses 3 c ( FIG. 14 ) in the resin directly above the conductive particles 2 to the average particle diameter D of the conductive particles 2 is preferably greater than 0, and preferably less than 10%, and more preferably less than 5%.

此外,能够使导电粒子2的露出部分的直径Lc为导电粒子2的平均粒径D以下,优选为平均粒径D的10~90%。既可以使导电粒子2的顶部2t的1个点露出,也可以使导电粒子2完全埋入绝缘性树脂粘合剂3内,使得直径Lc成为零。Furthermore, the diameter Lc of the exposed portion of the conductive particles 2 can be set to be less than or equal to the average particle diameter D of the conductive particles 2, preferably 10 to 90% of the average particle diameter D. A single point of the top 2t of the conductive particle 2 may be exposed, or the conductive particle 2 may be completely buried in the insulating resin binder 3 so that the diameter Lc is zero.

(导电粒子在绝缘性树脂粘合剂的厚度方向上的位置)(Position of Conductive Particles in the Thickness Direction of the Insulating Resin Adhesive)

从容易得到上述凹部3b的效果的方面来看,从邻接的导电粒子2间的中央部中绝缘性树脂粘合剂的表面3a的切平面3p起的导电粒子2的最深部的距离(以下,称为埋入量)Lb与导电粒子2的平均粒径D之比(Lb/D)(以下,称为埋入率)优选为60%以上105%以下。In order to facilitate the effect of the above-mentioned recess 3b, the ratio (Lb/D) of the distance Lb to the deepest part of the conductive particle 2 from the tangent plane 3p of the surface 3a of the insulating resin adhesive in the center portion between adjacent conductive particles 2 (hereinafter referred to as the embedding amount) to the average particle diameter D of the conductive particles 2 (hereinafter referred to as the embedding rate) is preferably 60% or more and 105% or less.

<绝缘性粘接层><Insulating adhesive layer>

在本发明的各向异性导电膜中,也可以在配置有导电粒子2的绝缘性树脂粘合剂3上层叠粘度或粘着性与构成绝缘性树脂粘合剂3的树脂不同的绝缘性粘接层4。In the anisotropic conductive film of the present invention, an insulating adhesive layer 4 having a viscosity or tackiness different from that of the resin constituting the insulating resin adhesive 3 may be laminated on the insulating resin adhesive 3 having the conductive particles 2 arranged thereon.

在绝缘性树脂粘合剂3形成有上述凹部3b的情况下,如图15所示的各向异性导电膜1d那样,绝缘性粘接层4既可以层叠在绝缘性树脂粘合剂3形成有凹部3b的面,也可以如图16所示的各向异性导电膜1e那样,层叠在与形成有凹部3b的面相反侧的面。在绝缘性树脂粘合剂3形成有凹部3c的情况下也同样。在通过绝缘性粘接层4的层叠,利用各向异性导电膜来各向异性导电连接电子部件时,填充因电子部件的电极或凸点而形成的空隙,从而能够提高粘接性。When the insulating resin adhesive 3 is formed with the aforementioned recessed portion 3b, the insulating adhesive layer 4 can be laminated on either the surface of the insulating resin adhesive 3 having the recessed portion 3b, as in the anisotropic conductive film 1d shown in FIG15 , or on the surface opposite the surface having the recessed portion 3b, as in the anisotropic conductive film 1e shown in FIG16 . The same applies when the insulating resin adhesive 3 is formed with the recessed portion 3c. By laminating the insulating adhesive layer 4, when anisotropic conductive film is used to connect electronic components anisotropically, gaps formed by the electrodes or bumps of the electronic components can be filled, thereby improving adhesion.

另外,在将绝缘性粘接层4层叠在绝缘性树脂粘合剂3的情况下,不管绝缘性粘接层4是否在凹部3b、3c的形成面上,都优选绝缘性粘接层4处于IC芯片等的第1电子部件侧(换言之,绝缘性树脂粘合剂3处于基板等的第2电子部件侧)。通过这样,能够避免导电粒子的不得已的移动,从而能够提高捕获性。此外,通常使IC芯片等的第1电子部件为按压夹具侧,并使基板等的第2电子部件为载物台侧,在将各向异性导电膜与第2电子部件临时压接后,正式压接第1电子部件和第2电子部件,但是因为第2电子部件的热压接区域的尺寸等,在将各向异性导电膜与第1电子部件临时粘贴后,正式压接第1电子部件和第2电子部件。Furthermore, when insulating adhesive layer 4 is laminated on insulating resin adhesive 3, regardless of whether insulating adhesive layer 4 is on the surface where recesses 3b and 3c are formed, it is preferred that insulating adhesive layer 4 be located on the side of the first electronic component, such as the IC chip (in other words, insulating resin adhesive 3 be located on the side of the second electronic component, such as the substrate). This prevents unintended movement of conductive particles, thereby improving capture. Furthermore, typically, the first electronic component, such as the IC chip, is positioned on the pressing jig side, and the second electronic component, such as the substrate, is positioned on the stage side. After the anisotropic conductive film and the second electronic component are temporarily pressed together, the first and second electronic components are officially pressed together. However, due to the size of the thermal compression bonding area of the second electronic component, the first and second electronic components may be officially pressed together after the anisotropic conductive film and the first electronic component are temporarily bonded together.

作为绝缘性粘接层4,能够适当选择在公知的各向异性导电膜中用作为绝缘性粘接层的粘接层而使用。绝缘性粘接层4也可以使用与上述的绝缘性树脂粘合剂3同样的树脂来将粘度调整为更低。绝缘性粘接层4与绝缘性树脂粘合剂3的最低熔化粘度,越有差异就越容易用绝缘性粘接层4填充因电子部件的电极或凸点而形成的空隙,从而能够期待提高电子部件彼此的粘接性的效果。另外,越有该差异,在各向异性导电连接时构成绝缘性树脂粘合剂3的树脂的移动量就越是相对变小,因此端子上的导电粒子的捕获性变得容易提高。在实际使用上,绝缘性粘接层4和绝缘性树脂粘合剂3的最低熔化粘度比,优选为2以上、更优选为5以上、进一步优选为8以上。另一方面,若该比值过大则在将长尺的各向异性导电膜作成卷装体的情况下,担心会出现树脂的挤出或阻塞,因此在实际使用上优选为15以下。绝缘性粘接层4的优选最低熔化粘度,更具体而言,满足上述比值,且为3000Pa・s以下,更优选为2000Pa・s以下,特别为100~2000Pa・s。As the insulating adhesive layer 4, an adhesive layer used as an insulating adhesive layer in a known anisotropic conductive film can be appropriately selected and used. The insulating adhesive layer 4 can also use the same resin as the insulating resin adhesive 3 mentioned above to adjust the viscosity to a lower level. The greater the difference in the minimum melt viscosity between the insulating adhesive layer 4 and the insulating resin adhesive 3, the easier it is to use the insulating adhesive layer 4 to fill the gaps formed by the electrodes or bumps of the electronic components, thereby expecting the effect of improving the adhesion between the electronic components. In addition, the greater the difference, the smaller the amount of movement of the resin constituting the insulating resin adhesive 3 during the anisotropic conductive connection, so the capture of the conductive particles on the terminal becomes easier to improve. In actual use, the minimum melt viscosity ratio of the insulating adhesive layer 4 to the insulating resin adhesive 3 is preferably greater than 2, more preferably greater than 5, and even more preferably greater than 8. On the other hand, if this ratio is too large, there is a concern that the resin will be squeezed out or blocked when the long anisotropic conductive film is made into a roll, so in actual use, it is preferably less than 15. More specifically, the preferred minimum melt viscosity of the insulating adhesive layer 4 satisfies the above ratio and is 3000 Pa·s or less, more preferably 2000 Pa·s or less, and particularly 100 to 2000 Pa·s.

作为绝缘性粘接层4的形成方法,能够通过利用涂敷法来使包含与形成绝缘性树脂粘合剂3的树脂同样的树脂的涂层组合物成膜并干燥、或进一步固化,或者通过预先利用公知的方法来膜化而形成。The insulating adhesive layer 4 can be formed by coating a coating composition containing the same resin as that forming the insulating resin binder 3 and then drying or curing it, or by forming it into a film in advance using a known method.

绝缘性粘接层4的厚度优选为1μm以上30μm以下,更优选为2μm以上15μm以下。The thickness of the insulating adhesive layer 4 is preferably from 1 μm to 30 μm, and more preferably from 2 μm to 15 μm.

另外,将绝缘性树脂粘合剂3和绝缘性粘接层4合在一起的各向异性导电膜整体的最低熔化粘度,还取决于绝缘性树脂粘合剂3和绝缘性粘接层4的厚度的比例,但是在实际使用上可为8000Pa・s以下,为了方便进行对凸点间的填充也可为200~7000Pa・s,且优选为200~4000Pa・s。In addition, the minimum melt viscosity of the entire anisotropic conductive film that combines the insulating resin adhesive 3 and the insulating adhesive layer 4 also depends on the ratio of the thickness of the insulating resin adhesive 3 and the insulating adhesive layer 4, but in actual use it can be less than 8000 Pa·s. In order to facilitate the filling between the bumps, it can also be 200 to 7000 Pa·s, and preferably 200 to 4000 Pa·s.

根据需要也可以向绝缘性树脂粘合剂3或绝缘性粘接层4加入硅石微粒子、氧化铝、氢氧化铝等的绝缘性填充剂。绝缘性填充剂的配合量优选相对于构成这些层的树脂100质量份为3质量份以上且40质量份以下。由此,在各向异性导电连接时各向异性导电膜熔化也能抑制导电粒子因熔化的树脂而无用地移动。If necessary, an insulating filler such as silica particles, alumina, or aluminum hydroxide may be added to the insulating resin binder 3 or the insulating adhesive layer 4. The amount of the insulating filler is preferably 3 parts by mass or more and 40 parts by mass or less per 100 parts by mass of the resin constituting these layers. This prevents the conductive particles from being wasted due to the melting of the anisotropic conductive film during anisotropic conductive connection.

<各向异性导电膜的制造方法><Method for Manufacturing Anisotropic Conductive Film>

作为各向异性导电膜的制造方法,例如,制造用于按既定排列配置导电粒子的转印模,向转印模的凹部填充导电粒子,其上,覆盖形成在剥离膜上的绝缘性树脂粘合剂3并施加压力,向绝缘性树脂粘合剂3压入导电粒子2,从而使导电粒子2转贴到绝缘性树脂粘合剂3。或者进一步在该导电粒子2上层叠绝缘性粘接层4。这样,能够得到各向异性导电膜1A。A method for producing an anisotropic conductive film includes, for example, preparing a transfer mold for arranging conductive particles in a predetermined arrangement, filling the concave portion of the transfer mold with conductive particles, and then covering the concave portion with an insulating resin adhesive 3 formed on a release film. Pressure is applied to press the conductive particles 2 into the insulating resin adhesive 3, thereby transferring the conductive particles 2 to the insulating resin adhesive 3. Alternatively, an insulating adhesive layer 4 is further laminated on the conductive particles 2. In this manner, an anisotropic conductive film 1A can be obtained.

另外,也可以在向转印模的凹部填充导电粒子后,其上覆盖绝缘性树脂粘合剂,从转印模向绝缘性树脂粘合剂的表面转印导电粒子,向绝缘性树脂粘合剂内压入绝缘性树脂粘合剂上的导电粒子,从而制造各向异性导电膜。能够通过该压入时的按压力、温度等来调整导电粒子的埋入量(Lb)。另外,能够通过压入时的绝缘性树脂粘合剂的粘度、压入速度、温度等来调整凹部3b、3c的形状及深度。例如,关于压入导电粒子时的绝缘性树脂粘合剂的粘度,使下限优选为3000Pa・s以上,更优选为4000Pa・s以上,进一步优选为4500Pa・s以上,并使上限优选为20000Pa・s以下,更优选为15000Pa・s以下,进一步优选为10000Pa・s以下。另外,优选在40~80℃、更优选为50~60℃下得到这样的粘度。更具体而言,在制造绝缘性树脂粘合剂的表面具有图12所示的凹部3b的各向异性导电膜1a的情况下,优选使压入导电粒子时的绝缘性树脂粘合剂的粘度为8000Pa・s(50~60℃),而在制造具有图14所示的凹部3c的各向异性导电膜1c的情况下,能够使压入导电粒子时的绝缘性树脂粘合剂的粘度为4500Pa・s(50~60℃)。Alternatively, an anisotropic conductive film can be produced by filling the recesses of a transfer mold with conductive particles, then covering them with an insulating resin binder. The conductive particles are then transferred from the transfer mold to the surface of the insulating resin binder, and the conductive particles on the insulating resin binder are then pressed into the insulating resin binder. The amount of conductive particles embedded (Lb) can be adjusted by adjusting the pressure and temperature during this press-in process. Furthermore, the shape and depth of the recesses 3b and 3c can be adjusted by adjusting the viscosity, speed, and temperature of the insulating resin binder during press-in. For example, the viscosity of the insulating resin binder during press-in is preferably at least 3000 Pa·s, more preferably at least 4000 Pa·s, and even more preferably at least 4500 Pa·s, and the upper limit is preferably at most 20000 Pa·s, more preferably at most 15000 Pa·s, and even more preferably at most 10000 Pa·s. This viscosity is preferably achieved at 40-80°C, more preferably 50-60°C. More specifically, when manufacturing an anisotropic conductive film 1a having a recessed portion 3b as shown in FIG12 on the surface of the insulating resin adhesive, it is preferred that the viscosity of the insulating resin adhesive when the conductive particles are pressed in is 8000 Pa·s (50 to 60°C), while when manufacturing an anisotropic conductive film 1c having a recessed portion 3c as shown in FIG14, the viscosity of the insulating resin adhesive when the conductive particles are pressed in can be 4500 Pa·s (50 to 60°C).

此外,作为转印模,除了向凹部填充导电粒子之外,也可以向凸部的顶面赋予微粘着剂而使导电粒子附着于该顶面。Furthermore, in addition to filling the concave portions with the conductive particles, a transfer mold may also be formed by applying a slight adhesive to the top surfaces of the convex portions to allow the conductive particles to adhere to the top surfaces.

这些转印模能够利用或应用机械加工、光刻、印刷法等的公知技术来制造。These transfer molds can be produced by utilizing or applying known techniques such as machining, photolithography, and printing.

另外,作为按既定排列配置导电粒子的方法,也可以取代利用转印模的方法而使用利用二轴延伸膜的方法等。Furthermore, as a method for arranging the conductive particles in a predetermined arrangement, a method using a biaxially stretched film may be used instead of the method using a transfer mold.

<卷装体><Rolled body>

为了连续供于电子部件的连接,各向异性导电膜优选作成卷绕在卷轴的膜卷装体。膜卷装体的长度为5m以上即可,且优选为10m以上。虽然没有特别的上限,但从出货物的处理性的方面来看,优选为5000m以下,更优选为1000m以下,进一步优选为500m以下。For continuous connection of electronic components, the anisotropic conductive film is preferably provided as a film roll wound on a reel. The length of the film roll may be at least 5 m, and preferably at least 10 m. While there is no particular upper limit, from the perspective of shipping handling, the length is preferably 5000 m or less, more preferably 1000 m or less, and even more preferably 500 m or less.

膜卷装体也可以用连结带连结比全长短的各向异性导电膜。连结部位既可以存在多处,也可以规则地存在,也可以随机存在。连结带的厚度只要对性能不带来阻碍就无特别限制,但是过厚会影响树脂的挤出、阻塞,因此优选为10~40μm。另外,膜的宽度没有特别限制,但是作为一个例子为0.5~5mm。A film roll can also be connected with a connecting tape to anisotropic conductive films shorter than the full length. The connecting points can be multiple, regularly spaced, or randomly arranged. The thickness of the connecting tape is not particularly limited as long as it does not impair performance. However, excessive thickness can affect resin extrusion and cause clogging, so it is preferably 10 to 40 μm. The film width is not particularly limited, but is, for example, 0.5 to 5 mm.

依据膜卷装体,能够进行连续的各向异性导电连接,且能够有助于连接体的成本削减。The film package enables continuous anisotropic conductive connection and can contribute to cost reduction of the connection body.

<连接构造体><Connection structure>

本发明的各向异性导电膜能够优选适用在通过热或光来各向异性导电连接FPC、IC芯片、IC模块等的第1电子部件、和FPC、硬性基板、陶瓷基板、玻璃基板、塑料基板等的第2电子部件时。另外,也能够堆积IC芯片或IC模块而各向异性导电连接第1电子部件彼此。这样得到的连接构造体及其制造方法也是本发明的一部分。The anisotropic conductive film of the present invention is preferably used for anisotropically conductively connecting a first electronic component such as an FPC, IC chip, or IC module to a second electronic component such as an FPC, rigid substrate, ceramic substrate, glass substrate, or plastic substrate using heat or light. Furthermore, IC chips or IC modules can be stacked to anisotropically conductively connect the first electronic components. The resulting connection structure and its manufacturing method also form part of the present invention.

作为使用各向异性导电膜的电子部件的连接方法,例如,从提高连接可靠性的方面来看优选将各向异性导电膜的膜厚方向上导电粒子存在附近的一侧的界面临时粘贴在承载于载物台的布线基板等的第2电子部件,对于临时粘贴的各向异性导电膜,搭载IC芯片等的第1电子部件,从第1电子部件侧利用按压夹具进行热压接。也能够利用光固化来进行同样的电子部件的连接。As a method for connecting electronic components using anisotropic conductive film, for example, from the perspective of improving connection reliability, it is preferable to temporarily adhere the interface of the anisotropic conductive film on the side near the conductive particles in the thickness direction to a second electronic component such as a wiring substrate placed on a stage. The temporarily adhered anisotropic conductive film is then thermally compressed from the first electronic component side using a pressing jig to the first electronic component, which carries an IC chip. Similar electronic component connection can also be achieved using light curing.

此外,在因为布线基板等的第2电子部件的连接区域的尺寸等而难以向布线基板等的第2电子部件临时粘贴各向异性导电膜的情况下,对承载于载物台的IC芯片的第1电子部件进行各向异性导电膜的临时粘贴,然后将第1电子部件和第2电子部件热压接。In addition, when it is difficult to temporarily adhere an anisotropic conductive film to a second electronic component such as a wiring substrate due to the size of the connection area of the second electronic component such as a wiring substrate, the anisotropic conductive film is temporarily adhered to the first electronic component of the IC chip carried on the stage, and then the first electronic component and the second electronic component are thermally pressed together.

实施例Example

实验例1~实验例8Experimental Examples 1 to 8

(各向异性导电膜的制作)(Fabrication of anisotropic conductive film)

对于在COG连接中所使用的各向异性导电膜,如下调查了绝缘性树脂粘合剂的树脂组成和导电粒子的配置对膜形成能力和导通特性的影响。Regarding anisotropic conductive films used for COG connection, the effects of the resin composition of the insulating resin binder and the arrangement of the conductive particles on film forming ability and conduction characteristics were investigated as follows.

首先,分别调制了按照表1所示的配合形成绝缘性树脂粘合剂及绝缘性粘接层的树脂组合物。在该情况下,根据绝缘性树脂组合物的调制条件调整了树脂组合物的最低熔化粘度。用棒涂机向膜厚50μm的PET膜上涂敷形成绝缘性树脂粘合剂的树脂组合物,在80℃的烤箱中干燥5分钟,从而在PET膜上形成了表2所示的厚度La的绝缘性树脂粘合剂层。同样地,以表2所示的厚度在PET膜上形成了绝缘性粘接层。First, resin compositions for forming an insulating resin adhesive and an insulating adhesive layer were prepared according to the formulations shown in Table 1. In this case, the minimum melt viscosity of the resin composition was adjusted according to the preparation conditions of the insulating resin composition. The insulating resin adhesive resin composition was applied to a 50 μm thick PET film using a bar coater and dried in an 80°C oven for 5 minutes, thereby forming an insulating resin adhesive layer having a thickness of La shown in Table 2 on the PET film. Similarly, an insulating adhesive layer was formed on the PET film with the thickness shown in Table 2.

[表1][Table 1]

接着,以使导电粒子俯视观察下的配置成为表2所示的配置,且其重复单元中的最接近导电粒子的中心间距离成为6μm的方式制作模具。通过使公知的透明性树脂的颗粒(pellet)以熔化的状态流入该模具,并冷却而凝固,从而形成了凹部为表2所示的配置的树脂模。在此,在实验例8中使导电粒子的配置为6方格子排列(个数密度32000个/mm 2),并使其格子轴之一相对于各向异性导电膜的长边方向倾斜15°。Next, a mold was prepared so that the conductive particles were arranged as shown in Table 2 when viewed from above, with the center-to-center distance between the closest conductive particles in the repeating unit being 6 μm. Molten pellets of a known transparent resin were poured into the mold, cooled, and solidified, forming a resin mold with recesses arranged as shown in Table 2. In Experiment 8, the conductive particles were arranged in a hexagonal lattice (32,000 particles/ mm² ), with one of the lattice axes tilted 15° relative to the longitudinal direction of the anisotropic conductive film.

作为导电粒子,准备金属包覆树脂粒子(积水化学工业(株),AUL703,平均粒径3μm),将该导电粒子填充到树脂模的凹部,其上覆盖上述绝缘性树脂粘合剂,在60℃、0.5MPa下进行按压而粘贴。然后,从模剥离绝缘性树脂粘合剂,对绝缘性树脂粘合剂上的导电粒子进行加压(按压条件:60~70℃、0.5Mpa),从而压入绝缘性树脂粘合剂,制作了绝缘性树脂粘合剂中导电粒子以表2所示的状态埋入的膜。在该情况下,导电粒子的埋入状态由压入条件控制。其结果,在实验例4中,在压入导电粒子后未能维持膜形状,但是除此以外的实验例中,能够制作埋入了导电粒子的膜。通过金属显微镜的观察,如表2所示,在埋入的导电粒子的露出部分的周围或埋入的导电粒子的正上方能发现凹部。此外,除了实验例4的各实验例中能观察到导电粒子的露出部分周围的凹部、和导电粒子正上方的凹部两者,但是在表4中示出了各实验例的每一个最能明确观察到的凹部的计测值。Metal-coated resin particles (Sekisui Chemical Co., Ltd., AUL703, average particle size 3μm) were prepared as conductive particles. These particles were then filled into the recesses of a resin mold, covered with the insulating resin adhesive described above, and bonded by pressing at 60°C and 0.5 MPa. The insulating resin adhesive was then peeled from the mold, and the conductive particles on the insulating resin adhesive were pressed (pressing conditions: 60-70°C, 0.5 MPa) to press the insulating resin adhesive into the film. Films were produced in which the conductive particles were embedded in the insulating resin adhesive in the manner shown in Table 2. In this case, the embedding state of the conductive particles was controlled by the pressing conditions. As a result, in Experiment 4, the film shape failed to be maintained after the conductive particles were pressed into the film. However, in the other Experiments, films with embedded conductive particles were successfully produced. Observation under a metallurgical microscope revealed recesses around the exposed portions of the embedded conductive particles or directly above them, as shown in Table 2. In addition, in each of Experimental Example 4, both the concave portions around the exposed portions of the conductive particles and the concave portions directly above the conductive particles were observed. However, Table 4 shows the measured values of the most clearly observed concave portions for each Experimental Example.

在埋入导电粒子的膜的压入导电粒子的一侧层叠绝缘性粘接层,从而制作了树脂层为2层型的各向异性导电膜。但是,在实验例4中,压入导电粒子后未能维持膜形状,因此没有进行之后的评价。An anisotropic conductive film with two resin layers was produced by laminating an insulating adhesive layer on the side of the conductive particle-embedded film where the conductive particles were to be pressed. However, in Experiment 4, the film shape was not maintained after the conductive particles were pressed in, so subsequent evaluation was not performed.

(评价)(evaluate)

对于各实验例的各向异性导电膜,如下测定了(a)初始导通电阻和(b)导通可靠性。将结果示于表2。The anisotropic conductive film of each experimental example was measured for (a) initial on-resistance and (b) conduction reliability as follows. The results are shown in Table 2.

(a)初始导通电阻(a) Initial on-resistance

将各实验例的各向异性导电膜夹持在载物台上的玻璃基板与按压工具侧的导通特性评价用IC之间,用按压工具加热加压(180℃、5秒)而得到了各评价用连接物。在该情况下,将按压工具的推力以低(40MPa)、中(60MPa)、高(80MPa)的3阶段变动而得到了3种评价用连接物。The anisotropic conductive film of each experimental example was sandwiched between a glass substrate on a stage and an IC for conducting characteristics evaluation on the side of a pressing tool. The pressing tool then applied heat and pressure (180°C, 5 seconds) to produce the various connected products for evaluation. The pressing tool's thrust was varied in three stages: low (40 MPa), medium (60 MPa), and high (80 MPa), resulting in three types of connected products for evaluation.

在此,导通特性评价用IC和玻璃基板,它们的端子图案对应,而尺寸如下。另外,在连接评价用IC和玻璃基板时,对齐各向异性导电膜的长边方向和凸点的短边方向。Here, the IC for conducting characteristic evaluation and the glass substrate have corresponding terminal patterns and dimensions as follows: When connecting the IC for evaluation and the glass substrate, the long side direction of the anisotropic conductive film and the short side direction of the bumps are aligned.

导通特性评价用ICIC for conducting characteristics evaluation

外形 1.8×20.0mmDimensions: 1.8 x 20.0 mm

厚度 0.5mmThickness 0.5mm

凸点规格 尺寸30×85μm、凸点间距离50μm、凸点高度15μm。Bump specifications: size 30×85μm, distance between bumps 50μm, bump height 15μm.

玻璃基板(ITO布线)Glass substrate (ITO wiring)

玻璃材质 CORNING公司制1737FGlass material: 1737F manufactured by CORNING

外形 30×50mmDimensions: 30×50mm

厚度 0.5mmThickness 0.5mm

电极 ITO布线。Electrode ITO wiring.

测定所得到的评价用连接物的初始导通电阻,按以下3阶段的评价基准进行了评价。The initial on-resistance of the obtained connection product for evaluation was measured and evaluated based on the following three-stage evaluation criteria.

初始导通电阻的评价基准(实际使用上,如果小于2Ω则没有问题)Evaluation criteria for initial on-resistance (In actual use, if it is less than 2Ω, there is no problem)

A:小于0.4ΩA: less than 0.4Ω

B:0.4Ω以上且小于0.8ΩB: 0.4Ω or more and less than 0.8Ω

C:0.8Ω以上。C: 0.8Ω or more.

(b)导通可靠性(b) Conductivity reliability

将按照(a)制作的评价用连接物,置于温度85℃、湿度85%RH的恒温槽中500小时,并进行可靠性实验,与初始导通电阻同样地测定其后的导通电阻,并按以下3阶段评价基准进行了评价。The connection for evaluation prepared in (a) was placed in a thermostat at 85°C and 85% RH for 500 hours for reliability testing. Subsequent on-resistance was measured in the same manner as the initial on-resistance and evaluated according to the following three-stage evaluation criteria.

导通可靠性的评价基准(实际使用上,如果小于5Ω则没有问题)Evaluation criteria for conduction reliability (in actual use, if it is less than 5Ω, there is no problem)

A:小于1.2ΩA: less than 1.2Ω

B:1.2Ω以上且小于2ΩB: 1.2Ω or more and less than 2Ω

C:2Ω以上。C: 2Ω or more.

[表2][Table 2]

由表2可知在绝缘性树脂粘合剂的最低熔化粘度为800Pa・s的实验例4中难以形成在导电粒子附近的绝缘性树脂粘合剂具有凹部的膜。另一方面,可知在绝缘性树脂粘合剂的最低熔化粘度为1500Pa・s以上的实验例中,通过调整导电粒子埋入时的条件能够在绝缘性树脂粘合剂的导电粒子附近形成凸部,且这样得到的各向异性导电膜在COG用途中导通特性良好。另外,可知与6方格子排列的实验例8相比,在导电粒子的个数密度低的实验例1~7中,能以更低的压力进行各向异性导电连接。Table 2 shows that in Experiment 4, where the minimum melt viscosity of the insulating resin adhesive was 800 Pa·s, it was difficult to form a film with recessed portions of the insulating resin adhesive near the conductive particles. On the other hand, in Experiments 1 through 7, where the minimum melt viscosity of the insulating resin adhesive was 1500 Pa·s or higher, it was possible to form protrusions near the conductive particles in the insulating resin adhesive by adjusting the conditions for embedding the conductive particles. The resulting anisotropic conductive films exhibited excellent conductive properties for COG applications. Furthermore, compared to Experiment 8, which employed a hexagonal lattice arrangement, Experiments 1 through 7, where the conductive particle density was low, demonstrated that anisotropic conductive connections could be made with lower pressure.

(c)短路率(c) Short circuit rate

使用实验例1~3和5~8的各向异性导电膜,并使用以下的短路率的评价用IC,在180℃、60MPa、5秒的连接条件下得到评价用连接物,计测所得到的评价用连接物的短路数,求出计测的短路数相对于评价用IC的端子数的比例作为短路率。Using the anisotropic conductive films of Experimental Examples 1 to 3 and 5 to 8 and the following evaluation IC for short-circuit rate, evaluation connections were obtained under connection conditions of 180°C, 60 MPa, and 5 seconds. The number of short circuits in the obtained evaluation connections was measured, and the ratio of the measured number of short circuits to the number of terminals of the evaluation IC was calculated as the short-circuit rate.

短路率的评价用IC(7.5μm空隙的梳齿TEG(test element group):IC for evaluating short-circuit rate (7.5μm gap comb-tooth TEG (test element group)):

外形 15×13mmDimensions: 15×13mm

厚度 0.5mmThickness 0.5mm

凸点规格 尺寸25×140μm、凸点间距离7.5μm、凸点高度15μm。Bump specifications: size 25×140μm, bump distance 7.5μm, bump height 15μm.

如果短路小于50ppm则在实际使用上理想,且实验例1~3和5~8的各向异性导电膜全部小于50ppm。A short circuit of less than 50 ppm is ideal for practical use, and all of the anisotropic conductive films of Experimental Examples 1 to 3 and 5 to 8 had a short circuit of less than 50 ppm.

此外,对于除了实验例4之外的各实验例,计测每一个凸点捕获的导电粒子,均捕获了10个以上的导电粒子。In addition, in each of the experimental examples except for experimental example 4, the number of conductive particles captured per bump was measured, and in each of the experimental examples, 10 or more conductive particles were captured.

实验例9~16Experimental Examples 9-16

(各向异性导电膜的制作)(Fabrication of anisotropic conductive film)

对于在FOG连接中所使用的各向异性导电膜,如下调查了绝缘性树脂粘合剂的树脂组成和导电粒子的配置对膜形成能力和导通特性的影响。Regarding anisotropic conductive films used in FOG connections, the effects of the resin composition of the insulating resin binder and the arrangement of the conductive particles on film forming ability and conduction characteristics were investigated as follows.

即,调制按照表3所示的配合形成绝缘性树脂粘合剂和绝缘性粘接层的树脂组合物,利用这些与实验例1同样地制作了各向异性导电膜。在表4中示出该情况下的导电粒子的配置和最接近导电粒子的中心间距离。在实验例16中使导电粒子的配置为6方格子排列(个数密度15000个/mm 2),并使其格子轴之一相对于各向异性导电膜的长边方向倾斜15°。Specifically, resin compositions for forming an insulating resin binder and an insulating adhesive layer were prepared according to the formulations shown in Table 3, and an anisotropic conductive film was produced using these compositions in the same manner as in Experimental Example 1. The arrangement of the conductive particles and the center-to-center distances of the closest conductive particles in this case are shown in Table 4. In Experimental Example 16, the conductive particles were arranged in a hexagonal lattice (number density of 15,000 particles/ mm² ), with one of the lattice axes tilted 15° relative to the longitudinal direction of the anisotropic conductive film.

在该各向异性导电膜的制作工序中,向绝缘性树脂粘合剂压入导电粒子后,实验例12中未能维持膜形状,但是除此以外的实验例中维持了膜形状。因此,对于除了实验例12以外的实验例的各向异性导电膜,以金属显微镜观察并计测导电粒子的埋入状态,进而进行之后的评价。在表4中示出各实验例中的导电粒子的埋入状态。表4所示的埋入状态,是与表2同样按各实验例的每一个最能明确观察到绝缘性树脂粘合剂的凹部的计测值。During the anisotropic conductive film production process, after the conductive particles were pressed into the insulating resin binder, the film shape was not maintained in Experimental Example 12, but it was maintained in the other Experimental Examples. Therefore, the embedded state of the conductive particles in the anisotropic conductive films of Experimental Examples other than Experimental Example 12 was observed and measured using a metallographic microscope for subsequent evaluation. Table 4 shows the embedded state of the conductive particles in each Experimental Example. Similar to Table 2, the embedded state shown in Table 4 represents the measurement values obtained for each Experimental Example, where the recessed portion of the insulating resin binder was most clearly observed.

(评价)(evaluate)

对于各实验例的各向异性导电膜,如下测定了(a)初始导通电阻和(b)导通可靠性。将结果示于表4。The anisotropic conductive film of each experimental example was measured for (a) initial on-resistance and (b) conduction reliability as follows. The results are shown in Table 4.

(a)初始导通电阻(a) Initial on-resistance

以2mm×40mm裁断按照各实验例得到的各向异性导电膜,并夹持在导通特性的评价用FPC和玻璃基板之间,以工具宽度2mm进行加热加压(180℃、5秒)而得到了各评价用连接物。在该情况下,将按压工具的推力以低(3MPa)、中(4.5MPa)、高(6MPa)的3阶段变动而得到了3种评价用连接物。与实验例1同样测定所得到的评价用连接物的导通电阻,并按以下基准分3阶段评价其测定值。The anisotropic conductive films obtained in each experimental example were cut into 2mm x 40mm pieces and sandwiched between an FPC for conducting performance evaluation and a glass substrate. Heat and pressure were applied (180°C, 5 seconds) using a 2mm tool width to produce each evaluation connection. The pressing force of the tool was varied in three stages: low (3MPa), medium (4.5MPa), and high (6MPa), resulting in three types of evaluation connections. The on-resistance of the resulting evaluation connections was measured in the same manner as in Experimental Example 1, and the measured values were evaluated in three stages according to the following criteria.

评价用FPC:Evaluation FPC:

端子间距 20μmTerminal pitch 20μm

端子宽度/端子间空隙 8.5μm/11.5μmTerminal width/inter-terminal gap 8.5μm/11.5μm

聚酰亚胺膜厚(PI)/铜箔厚(Cu)=38/8、Sn plating。Polyimide film thickness (PI) / copper foil thickness (Cu) = 38/8, Sn plating.

无碱玻璃基板:Alkali-free glass substrate:

电极 ITO布线Electrode ITO wiring

厚度 0.7mm。Thickness 0.7mm.

初始导通电阻的评价基准Evaluation criteria for initial on-resistance

A:小于1.6ΩA: less than 1.6Ω

B:1.6Ω以上且小于2.0ΩB: 1.6Ω or more and less than 2.0Ω

C:2.0Ω以上。C: 2.0Ω or more.

(b)导通可靠性(b) Conductivity reliability

将按照(a)制作的评价用连接物,置于温度85℃、湿度85%RH的恒温槽中500小时,与初始导通电阻同样地测定其后的导通电阻,并按以下基准分3阶段评价了该测定值。The connected product for evaluation prepared in (a) was placed in a thermostat at 85°C and 85% RH for 500 hours. The subsequent on-resistance was measured in the same manner as the initial on-resistance, and the measured values were evaluated in three stages according to the following criteria.

导通可靠性的评价基准Evaluation criteria for conduction reliability

A:小于3.0ΩA: less than 3.0Ω

B:3.0Ω以上且小于4ΩB: 3.0Ω or more and less than 4Ω

C:4.0Ω以上。C: 4.0Ω or more.

由表4可知在绝缘性树脂粘合剂的最低熔化粘度为800Pa・s的实验例12中,难以形成具有凹部的膜。另一方面,可知在绝缘性树脂层的最低熔化粘度为1500Pa・s以上的实验例中,通过调整导电粒子埋入时的条件,能够在绝缘性树脂粘合剂的导电粒子附近形成凹部,且这样得到的各向异性导电膜在FOG用途中导通特性良好。Table 4 shows that in Experiment 12, where the minimum melt viscosity of the insulating resin binder was 800 Pa·s, it was difficult to form a film having recessed portions. On the other hand, in Experiment 12, where the minimum melt viscosity of the insulating resin layer was 1500 Pa·s or higher, it was found that by adjusting the conditions for embedding the conductive particles, recessed portions could be formed near the conductive particles in the insulating resin binder. The resulting anisotropic conductive film exhibited excellent conduction characteristics for FOG applications.

(c)短路率(c) Short circuit rate

对测定了初始导通电阻的评价用连接物的短路数进行计测,由所计测的短路数和评价用连接物的间隙数求出短路发生率。如果短路发生率小于100ppm则在实际使用上没有问题。The number of short circuits in the evaluation connection object after the initial on-resistance measurement is counted, and the short circuit incidence rate is calculated from the measured short circuit number and the number of gaps in the evaluation connection object. If the short circuit incidence rate is less than 100 ppm, there is no problem in practical use.

实验例9~11和13~16任一个的短路发生率均小于100ppm。The short circuit occurrence rate of any of Experimental Examples 9 to 11 and 13 to 16 was less than 100 ppm.

此外,对于除了实验例12之外的各实验例,计测每一个凸点捕获的导电粒子,均捕获了10个以上的导电粒子。In addition, in each of the experimental examples except for experimental example 12, the number of conductive particles captured per bump was measured, and in each case, 10 or more conductive particles were captured.

[表3][Table 3]

[表4][Table 4]

标号说明Label Description

1A、1B、1C、1D、1E、1F、1G、1H、1I、1a、1b、1c、1d、1e各向异性导电膜 ;2、2a、2b、2c、2s 导电粒子 ;2m、2n、2o、2p、2q、2r 导电粒子列 ;2t 导电粒子的顶部 ;3 绝缘性树脂粘合剂 ;3a绝缘性树脂粘合剂的表面 ;3b、3c 凹部;3P 切平面 ;4 绝缘性粘接层 ;5、5B 重复单元 ;5a 与各向异性导电膜的长边方向平行的边;5b 与各向异性导电膜的短边方向平行的边;5x 依次连结构成重复单元的外形的导电粒子的中心而形成的多边形;D 平均粒径;L1、L2外切线 ;La 绝缘性树脂粘合剂的厚度 ;Lb 导电粒子的埋入量 ;Lc导电粒子的露出部分的直径 ;Ld 凹部的最大直径 ;Le、Lf 最大深度。1A, 1B, 1C, 1D, 1E, 1F, 1G, 1H, 1I, 1a, 1b, 1c, 1d, 1e anisotropic conductive film; 2, 2a, 2b, 2c, 2s conductive particles; 2m, 2n, 2o, 2p, 2q, 2r conductive particle array; 2t top of conductive particle; 3 insulating resin binder; 3a surface of insulating resin binder; 3b, 3c recessed portion; 3P tangent plane; 4 insulating adhesive layer; 5, 5B repeating unit; 5a side parallel to the long side of the anisotropic conductive film; 5b side parallel to the short side of the anisotropic conductive film; 5x polygon formed by sequentially connecting the centers of the conductive particles constituting the outer shape of the repeating unit; D average particle size; L1, L2 external tangent line; La thickness of insulating resin binder; Lb embedding amount of conductive particles ; Lc is the diameter of the exposed part of the conductive particle; Ld is the maximum diameter of the recess; Le, Lf are the maximum depths.

Claims (21)

1.一种各向异性导电膜,在绝缘性树脂粘合剂配置有导电粒子,其中,1. An anisotropic conductive film, wherein conductive particles are disposed in an insulating resin adhesive, wherein, 导电粒子的重复单元彼此隔着重复间距而重复配置,该导电粒子的重复单元由并列不同导电粒子数的、导电粒子隔开间隔而排成一列的导电粒子列组合而成,The repeating units of conductive particles are arranged repeatedly with a repeating interval between them. Each repeating unit is composed of a column of conductive particles with different numbers of conductive particles arranged side by side and spaced apart. 一个导电粒子列内的导电粒子间距离,在一个重复单元内以不同导电粒子数并列的导电粒子列之间彼此不同。The distance between conductive particles within a single conductive particle column differs from that between conductive particle columns arranged side-by-side with different numbers of conductive particles within a repeating unit. 2.如权利要求1所述的各向异性导电膜,其中,重复单元遍及各向异性导电膜的整个面而配置。2. The anisotropic conductive film as claimed in claim 1, wherein the repeating units are arranged across the entire surface of the anisotropic conductive film. 3.如权利要求1或2所述的各向异性导电膜,其中,在重复单元中构成并列的导电粒子列的导电粒子数逐渐不同。3. The anisotropic conductive film as described in claim 1 or 2, wherein the number of conductive particles forming parallel conductive particle columns in the repeating unit gradually differs. 4.如权利要求1或2所述的各向异性导电膜,其中,在重复单元中并列的3列的导电粒子列中,构成中央的导电粒子列的导电粒子数比构成两侧的导电粒子列的导电粒子数多或少。4. The anisotropic conductive film as claimed in claim 1 or 2, wherein, in the three columns of conductive particles arranged side by side in the repeating unit, the number of conductive particles constituting the central conductive particle column is more or less than the number of conductive particles constituting the two side conductive particle columns. 5.如权利要求1或2所述的各向异性导电膜,其中,依次连结构成重复单元的外形的导电粒子的中心而形成的多边形的各边与各向异性导电膜的长边方向或短边方向斜交。5. The anisotropic conductive film as claimed in claim 1 or 2, wherein each side of the polygon formed by the centers of the conductive particles that are sequentially connected to form the shape of repeating units is obliquely intersecting the long side direction or the short side direction of the anisotropic conductive film. 6.如权利要求1或2所述的各向异性导电膜,其中,依次连结构成重复单元的外形的导电粒子的中心而形成的多边形具有与各向异性导电膜的长边方向或短边方向平行的边。6. The anisotropic conductive film as claimed in claim 1 or 2, wherein the polygon formed by the centers of the conductive particles that are sequentially connected to form the shape of repeating units has a side parallel to the long side direction or the short side direction of the anisotropic conductive film. 7.如权利要求1或2所述的各向异性导电膜,其中,重复单元中,导电粒子列彼此平行。7. The anisotropic conductive film as claimed in claim 1 or 2, wherein, in the repeating unit, the columns of conductive particles are parallel to each other. 8.如权利要求1或2所述的各向异性导电膜,其中,与重复单元一起重复配置了单独的导电粒子。8. The anisotropic conductive film as claimed in claim 1 or 2, wherein individual conductive particles are repeatedly configured together with the repeating unit. 9.如权利要求1或2所述的各向异性导电膜,其中,重复单元内,邻接的导电粒子彼此的最接近距离为导电粒子的平均粒径的0.5倍以上。9. The anisotropic conductive film as claimed in claim 1 or 2, wherein, within the repeating unit, the closest distance between adjacent conductive particles is more than 0.5 times the average particle size of the conductive particles. 10.如权利要求1或2所述的各向异性导电膜,其中,构成重复单元的导电粒子为从导电粒子存在于6方格子或正方格子的各格子点的配置有规则地遗漏既定格子点的导电粒子的配置。10. The anisotropic conductive film as claimed in claim 1 or 2, wherein the conductive particles constituting the repeating unit are arranged from the conductive particles present in each grid point of the hexagonal or square grid, with predetermined grid points omitted in a regular manner. 11.如权利要求1或2所述的各向异性导电膜,其中,在配置有所述导电粒子的所述绝缘性树脂粘合剂上层叠粘度或粘着性与构成该绝缘性树脂粘合剂的树脂不同的绝缘性粘接层。11. The anisotropic conductive film as claimed in claim 1 or 2, wherein an insulating adhesive layer with a viscosity or tackiness different from that of the resin constituting the insulating resin adhesive is laminated on the insulating resin adhesive on which the conductive particles are disposed. 12.如权利要求3所述的各向异性导电膜,其中,在配置有所述导电粒子的所述绝缘性树脂粘合剂上层叠粘度或粘着性与构成该绝缘性树脂粘合剂的树脂不同的绝缘性粘接层。12. The anisotropic conductive film of claim 3, wherein an insulating adhesive layer with a viscosity or tackiness different from that of the resin constituting the insulating resin adhesive is laminated on the insulating resin adhesive on which the conductive particles are disposed. 13.如权利要求4所述的各向异性导电膜,其中,在配置有所述导电粒子的所述绝缘性树脂粘合剂上层叠粘度或粘着性与构成该绝缘性树脂粘合剂的树脂不同的绝缘性粘接层。13. The anisotropic conductive film of claim 4, wherein an insulating adhesive layer with a viscosity or tackiness different from that of the resin constituting the insulating resin adhesive is laminated on the insulating resin adhesive on which the conductive particles are disposed. 14.如权利要求5所述的各向异性导电膜,其中,在配置有所述导电粒子的所述绝缘性树脂粘合剂上层叠粘度或粘着性与构成该绝缘性树脂粘合剂的树脂不同的绝缘性粘接层。14. The anisotropic conductive film of claim 5, wherein an insulating adhesive layer with a viscosity or tackiness different from that of the resin constituting the insulating resin adhesive is laminated on the insulating resin adhesive on which the conductive particles are disposed. 15.如权利要求6所述的各向异性导电膜,其中,在配置有所述导电粒子的所述绝缘性树脂粘合剂上层叠粘度或粘着性与构成该绝缘性树脂粘合剂的树脂不同的绝缘性粘接层。15. The anisotropic conductive film of claim 6, wherein an insulating adhesive layer with a viscosity or tackiness different from that of the resin constituting the insulating resin adhesive is laminated on the insulating resin adhesive on which the conductive particles are disposed. 16.如权利要求7所述的各向异性导电膜,其中,在配置有所述导电粒子的所述绝缘性树脂粘合剂上层叠粘度或粘着性与构成该绝缘性树脂粘合剂的树脂不同的绝缘性粘接层。16. The anisotropic conductive film of claim 7, wherein an insulating adhesive layer with a viscosity or tackiness different from that of the resin constituting the insulating resin adhesive is laminated on the insulating resin adhesive on which the conductive particles are disposed. 17.如权利要求8所述的各向异性导电膜,其中,在配置有所述导电粒子的所述绝缘性树脂粘合剂上层叠粘度或粘着性与构成该绝缘性树脂粘合剂的树脂不同的绝缘性粘接层。17. The anisotropic conductive film of claim 8, wherein an insulating adhesive layer with a viscosity or tackiness different from that of the resin constituting the insulating resin adhesive is laminated on the insulating resin adhesive on which the conductive particles are disposed. 18.如权利要求9所述的各向异性导电膜,其中,在配置有所述导电粒子的所述绝缘性树脂粘合剂上层叠粘度或粘着性与构成该绝缘性树脂粘合剂的树脂不同的绝缘性粘接层。18. The anisotropic conductive film of claim 9, wherein an insulating adhesive layer with a viscosity or tackiness different from that of the resin constituting the insulating resin adhesive is laminated on the insulating resin adhesive on which the conductive particles are disposed. 19.如权利要求10所述的各向异性导电膜,其中,在配置有所述导电粒子的所述绝缘性树脂粘合剂上层叠粘度或粘着性与构成该绝缘性树脂粘合剂的树脂不同的绝缘性粘接层。19. The anisotropic conductive film of claim 10, wherein an insulating adhesive layer with a viscosity or tackiness different from that of the resin constituting the insulating resin adhesive is laminated on the insulating resin adhesive on which the conductive particles are disposed. 20.一种连接构造体,通过权利要求1~19的任一项所述的各向异性导电膜来各向异性导电连接第1电子部件和第2电子部件。20. A connection structure for anisotropically conductively connecting a first electronic component and a second electronic component via an anisotropic conductive film as described in any one of claims 1 to 19. 21.一种连接构造体的制造方法,隔着各向异性导电膜热压接第1电子部件和第2电子部件而制造第1电子部件和第2电子部件的连接构造体,其中,作为各向异性导电膜,使用权利要求1~19的任一项所述的各向异性导电膜。21. A method for manufacturing a connection structure, wherein a connection structure for a first electronic component and a second electronic component is manufactured by hot-pressing an anisotropic conductive film between them, wherein the anisotropic conductive film is the anisotropic conductive film according to any one of claims 1 to 19.
HK19121383.4A 2016-05-05 2017-04-25 Anisotropic electroconductive film HK1261541B (en)

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