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HK1138108B - 金属膜抛光垫和使用该金属膜抛光垫的金属膜抛光方法 - Google Patents

金属膜抛光垫和使用该金属膜抛光垫的金属膜抛光方法 Download PDF

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Publication number
HK1138108B
HK1138108B HK10105030.9A HK10105030A HK1138108B HK 1138108 B HK1138108 B HK 1138108B HK 10105030 A HK10105030 A HK 10105030A HK 1138108 B HK1138108 B HK 1138108B
Authority
HK
Hong Kong
Prior art keywords
polishing
metal layer
pad
polishing pad
thermoplastic polyurethane
Prior art date
Application number
HK10105030.9A
Other languages
German (de)
English (en)
French (fr)
Other versions
HK1138108A (zh
Inventor
Mitsuru Kato
Hirofumi Kikuchi
Chihiro Okamoto
Shinya Kato
Original Assignee
Kuraray Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kuraray Co., Ltd. filed Critical Kuraray Co., Ltd.
Publication of HK1138108A publication Critical patent/HK1138108A/zh
Publication of HK1138108B publication Critical patent/HK1138108B/zh

Links

HK10105030.9A 2007-03-20 2008-03-19 金属膜抛光垫和使用该金属膜抛光垫的金属膜抛光方法 HK1138108B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007071976 2007-03-20

Publications (2)

Publication Number Publication Date
HK1138108A HK1138108A (zh) 2010-08-13
HK1138108B true HK1138108B (zh) 2019-04-04

Family

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