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HK1032291B - Electromagnetic alignment and scanning apparatus - Google Patents

Electromagnetic alignment and scanning apparatus Download PDF

Info

Publication number
HK1032291B
HK1032291B HK01101430.5A HK01101430A HK1032291B HK 1032291 B HK1032291 B HK 1032291B HK 01101430 A HK01101430 A HK 01101430A HK 1032291 B HK1032291 B HK 1032291B
Authority
HK
Hong Kong
Prior art keywords
scanning apparatus
electromagnetic alignment
alignment
electromagnetic
scanning
Prior art date
Application number
HK01101430.5A
Other languages
Chinese (zh)
Other versions
HK1032291A1 (en
Inventor
Ebihara Akimitsu
Novak Thomas
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation filed Critical Nikon Corporation
Publication of HK1032291A1 publication Critical patent/HK1032291A1/en
Publication of HK1032291B publication Critical patent/HK1032291B/en

Links

HK01101430.5A 1994-06-27 1998-12-24 Electromagnetic alignment and scanning apparatus HK1032291B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US26699994A 1994-06-27 1994-06-27
US08266999 1994-06-27

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
HK00103149.4A Addition HK1025841B (en) 1994-06-27 1998-12-24 Electromagnetic alignment and scanning apparatus

Related Child Applications (1)

Application Number Title Priority Date Filing Date
HK00103149.4A Division HK1025841B (en) 1994-06-27 1998-12-24 Electromagnetic alignment and scanning apparatus

Publications (2)

Publication Number Publication Date
HK1032291A1 HK1032291A1 (en) 2001-07-13
HK1032291B true HK1032291B (en) 2002-03-28

Family

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