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HK1026766B - Electromagnetic alignment and scanning apparatus - Google Patents

Electromagnetic alignment and scanning apparatus Download PDF

Info

Publication number
HK1026766B
HK1026766B HK00103150.0A HK00103150A HK1026766B HK 1026766 B HK1026766 B HK 1026766B HK 00103150 A HK00103150 A HK 00103150A HK 1026766 B HK1026766 B HK 1026766B
Authority
HK
Hong Kong
Prior art keywords
scanning apparatus
electromagnetic alignment
alignment
electromagnetic
scanning
Prior art date
Application number
HK00103150.0A
Other languages
Chinese (zh)
Other versions
HK1026766A1 (en
Inventor
Ebihara Akimitsu
Novak Thomas
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation filed Critical Nikon Corporation
Publication of HK1026766A1 publication Critical patent/HK1026766A1/en
Publication of HK1026766B publication Critical patent/HK1026766B/en

Links

HK00103150.0A 1994-06-27 1998-12-24 Electromagnetic alignment and scanning apparatus HK1026766B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US26699994A 1994-06-27 1994-06-27
US08266999 1994-06-27

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
HK98115706.6A Addition HK1017824B (en) 1994-06-27 1998-12-24 Electromagnetic alignment and scanning apparatus

Related Child Applications (1)

Application Number Title Priority Date Filing Date
HK98115706.6A Division HK1017824B (en) 1994-06-27 1998-12-24 Electromagnetic alignment and scanning apparatus

Publications (2)

Publication Number Publication Date
HK1026766A1 HK1026766A1 (en) 2000-12-22
HK1026766B true HK1026766B (en) 2001-08-31

Family

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