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HK1021401B - 真空泵 - Google Patents

真空泵 Download PDF

Info

Publication number
HK1021401B
HK1021401B HK00100211.3A HK00100211A HK1021401B HK 1021401 B HK1021401 B HK 1021401B HK 00100211 A HK00100211 A HK 00100211A HK 1021401 B HK1021401 B HK 1021401B
Authority
HK
Hong Kong
Prior art keywords
vacuum pump
diaphragm
stages
pump
pumping
Prior art date
Application number
HK00100211.3A
Other languages
German (de)
English (en)
French (fr)
Other versions
HK1021401A1 (zh
Inventor
De Simon Mauro
Spaziani Vincenzo
Original Assignee
Varian S.P.A.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from IT97TO001139A external-priority patent/IT1297347B1/it
Application filed by Varian S.P.A. filed Critical Varian S.P.A.
Publication of HK1021401A1 publication Critical patent/HK1021401A1/zh
Publication of HK1021401B publication Critical patent/HK1021401B/zh

Links

HK00100211.3A 1997-12-24 2000-01-13 真空泵 HK1021401B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT97TO001139A IT1297347B1 (it) 1997-12-24 1997-12-24 Pompa da vuoto.
ITTO971139 1997-12-24

Publications (2)

Publication Number Publication Date
HK1021401A1 HK1021401A1 (zh) 2000-06-09
HK1021401B true HK1021401B (zh) 2003-10-10

Family

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