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GB8515025D0 - Calibration apparatus - Google Patents

Calibration apparatus

Info

Publication number
GB8515025D0
GB8515025D0 GB858515025A GB8515025A GB8515025D0 GB 8515025 D0 GB8515025 D0 GB 8515025D0 GB 858515025 A GB858515025 A GB 858515025A GB 8515025 A GB8515025 A GB 8515025A GB 8515025 D0 GB8515025 D0 GB 8515025D0
Authority
GB
United Kingdom
Prior art keywords
calibration apparatus
calibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB858515025A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GE Healthcare UK Ltd
Original Assignee
GE Healthcare UK Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GE Healthcare UK Ltd filed Critical GE Healthcare UK Ltd
Priority to GB858515025A priority Critical patent/GB8515025D0/en
Publication of GB8515025D0 publication Critical patent/GB8515025D0/en
Priority to JP61503551A priority patent/JPS63500907A/en
Priority to PCT/GB1986/000346 priority patent/WO1986007493A1/en
Priority to GB08614398A priority patent/GB2184849A/en
Priority to EP86904232A priority patent/EP0224582A1/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • H10P74/203—

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
GB858515025A 1985-06-13 1985-06-13 Calibration apparatus Pending GB8515025D0 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB858515025A GB8515025D0 (en) 1985-06-13 1985-06-13 Calibration apparatus
JP61503551A JPS63500907A (en) 1985-06-13 1986-06-13 Integrated circuit calibration equipment
PCT/GB1986/000346 WO1986007493A1 (en) 1985-06-13 1986-06-13 Calibration apparatus for integrated circuits
GB08614398A GB2184849A (en) 1985-06-13 1986-06-13 Calibrating microwave integrated circuit test systems
EP86904232A EP0224582A1 (en) 1985-06-13 1986-06-13 Calibration apparatus for integrated circuits

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB858515025A GB8515025D0 (en) 1985-06-13 1985-06-13 Calibration apparatus

Publications (1)

Publication Number Publication Date
GB8515025D0 true GB8515025D0 (en) 1985-07-17

Family

ID=10580709

Family Applications (2)

Application Number Title Priority Date Filing Date
GB858515025A Pending GB8515025D0 (en) 1985-06-13 1985-06-13 Calibration apparatus
GB08614398A Withdrawn GB2184849A (en) 1985-06-13 1986-06-13 Calibrating microwave integrated circuit test systems

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB08614398A Withdrawn GB2184849A (en) 1985-06-13 1986-06-13 Calibrating microwave integrated circuit test systems

Country Status (4)

Country Link
EP (1) EP0224582A1 (en)
JP (1) JPS63500907A (en)
GB (2) GB8515025D0 (en)
WO (1) WO1986007493A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118707424A (en) * 2024-08-30 2024-09-27 四川映塞科技有限责任公司 Automatic calibration system and method for square resistance tester

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6380751B2 (en) 1992-06-11 2002-04-30 Cascade Microtech, Inc. Wafer probe station having environment control enclosure
US5345170A (en) 1992-06-11 1994-09-06 Cascade Microtech, Inc. Wafer probe station having integrated guarding, Kelvin connection and shielding systems
US5561377A (en) 1995-04-14 1996-10-01 Cascade Microtech, Inc. System for evaluating probing networks
US6002263A (en) 1997-06-06 1999-12-14 Cascade Microtech, Inc. Probe station having inner and outer shielding
US6445202B1 (en) 1999-06-30 2002-09-03 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
JP4183859B2 (en) * 1999-09-02 2008-11-19 株式会社アドバンテスト Semiconductor substrate testing equipment
US6914423B2 (en) 2000-09-05 2005-07-05 Cascade Microtech, Inc. Probe station
US6965226B2 (en) 2000-09-05 2005-11-15 Cascade Microtech, Inc. Chuck for holding a device under test
DE10056882C2 (en) * 2000-11-16 2003-06-05 Infineon Technologies Ag Method for calibrating a test system for semiconductor components and test substrate
WO2003020467A1 (en) 2001-08-31 2003-03-13 Cascade Microtech, Inc. Optical testing device
US6777964B2 (en) 2002-01-25 2004-08-17 Cascade Microtech, Inc. Probe station
US6847219B1 (en) 2002-11-08 2005-01-25 Cascade Microtech, Inc. Probe station with low noise characteristics
US7250779B2 (en) 2002-11-25 2007-07-31 Cascade Microtech, Inc. Probe station with low inductance path
US6861856B2 (en) 2002-12-13 2005-03-01 Cascade Microtech, Inc. Guarded tub enclosure
US7221172B2 (en) 2003-05-06 2007-05-22 Cascade Microtech, Inc. Switched suspended conductor and connection
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US7250626B2 (en) * 2003-10-22 2007-07-31 Cascade Microtech, Inc. Probe testing structure
US7187188B2 (en) 2003-12-24 2007-03-06 Cascade Microtech, Inc. Chuck with integrated wafer support
DE202005021434U1 (en) 2004-06-07 2008-03-20 Cascade Microtech, Inc., Beaverton Thermo-optical clamping device
US7330041B2 (en) 2004-06-14 2008-02-12 Cascade Microtech, Inc. Localizing a temperature of a device for testing
US7535247B2 (en) 2005-01-31 2009-05-19 Cascade Microtech, Inc. Interface for testing semiconductors
CN103954927B (en) * 2014-05-21 2016-03-23 常州天合光能有限公司 Volume resistance and sheet resistance conversion calibration device and calibration method thereof

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4349792A (en) * 1978-07-14 1982-09-14 Kings Electronics Co., Inc. Pi pad attenuator
US4272739A (en) * 1979-10-18 1981-06-09 Morton Nesses High-precision electrical signal attenuator structures
EP0128986B1 (en) * 1982-12-23 1991-02-27 Sumitomo Electric Industries Limited Monolithic microwave integrated circuit and method for selecting it

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118707424A (en) * 2024-08-30 2024-09-27 四川映塞科技有限责任公司 Automatic calibration system and method for square resistance tester

Also Published As

Publication number Publication date
EP0224582A1 (en) 1987-06-10
GB2184849A (en) 1987-07-01
GB8614398D0 (en) 1986-07-16
WO1986007493A1 (en) 1986-12-18
JPS63500907A (en) 1988-03-31

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