[go: up one dir, main page]

GB851335A - Improvements in or relating to barium getter ion pumps - Google Patents

Improvements in or relating to barium getter ion pumps

Info

Publication number
GB851335A
GB851335A GB6964/59A GB696459A GB851335A GB 851335 A GB851335 A GB 851335A GB 6964/59 A GB6964/59 A GB 6964/59A GB 696459 A GB696459 A GB 696459A GB 851335 A GB851335 A GB 851335A
Authority
GB
United Kingdom
Prior art keywords
barium
chamber
shield
coil
furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB6964/59A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Shinku Gijutsu KK filed Critical Nihon Shinku Gijutsu KK
Publication of GB851335A publication Critical patent/GB851335A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Manufacture And Refinement Of Metals (AREA)
GB6964/59A 1958-03-07 1959-02-27 Improvements in or relating to barium getter ion pumps Expired GB851335A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP851335X 1958-03-07

Publications (1)

Publication Number Publication Date
GB851335A true GB851335A (en) 1960-10-12

Family

ID=13850136

Family Applications (1)

Application Number Title Priority Date Filing Date
GB6964/59A Expired GB851335A (en) 1958-03-07 1959-02-27 Improvements in or relating to barium getter ion pumps

Country Status (3)

Country Link
US (1) US3071310A (de)
DE (1) DE1090815B (de)
GB (1) GB851335A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023135312A1 (en) * 2022-01-14 2023-07-20 Tokamak Energy Ltd Evaporation pump

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3256676A (en) * 1960-11-08 1966-06-21 Max Planck Gesellschaft Pumping process employing a liquid sorbent
US3977813A (en) * 1971-10-18 1976-08-31 Nuclear Battery Corporation Novel getter and process
CN101550494B (zh) * 2008-03-31 2011-06-08 北京有色金属研究总院 一种制备稀土金属的方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE706191C (de) * 1937-01-10 1941-05-20 I G Farbenindustrie Akt Ges Verfahren zur Gewinnen von metallischem Barium
GB729871A (en) * 1952-07-18 1955-05-11 Leitz Ernst Gmbh Improved method of evacuating vessels
US2755014A (en) * 1953-04-24 1956-07-17 Gen Electric Ionic vacuum pump device
US2850225A (en) * 1955-11-10 1958-09-02 Wisconsin Alumni Res Found Pump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023135312A1 (en) * 2022-01-14 2023-07-20 Tokamak Energy Ltd Evaporation pump

Also Published As

Publication number Publication date
DE1090815B (de) 1960-10-13
US3071310A (en) 1963-01-01

Similar Documents

Publication Publication Date Title
GB1170824A (en) Rapid pump-down vacuum chambers incorporating cryopumps
Wagener A method for measuring the efficiency of getters at low pressures
GB851335A (en) Improvements in or relating to barium getter ion pumps
GB902161A (en) Improvements in ultra high vacuum chambers
GB1257015A (de)
GB1077214A (en) Cathodic sputtering apparatus
US2841726A (en) Apparatus for producing thermallycool charged particles
US2885997A (en) Vacuum coating
US2967012A (en) Getter-ion pump
US3168418A (en) Device for monitoring and controlling evaporation rate in vacuum deposition
US2246327A (en) Vapor electric device
US3009629A (en) High vacuum pumps
US3198422A (en) Vacuum sputtering pump
Roth Vacuum technology.
US3446422A (en) Ultra-high vacuum device
US2980317A (en) Vacuum device
US3310226A (en) Vacuum device
US4810878A (en) Ion source for mass spectrometer
US2954156A (en) Apparatus for the production of high vacuum, especially in metal evaporation vacuum pmps
US3629095A (en) In or relating to vacuum apparatus
US3037685A (en) Method for pumping gases at low vacuum pressures
Dolizy et al. A new technology for transferring photocathodes
Batho Neutralization and Ionization of High-Velocity Ions of Neon, Argon and Krypton by Collison with Similar Atoms
US3376414A (en) Calutron with means to direct calcium gettering vapor into the ion beam to reduce tank pressure
Robinson et al. Initial pumping and recovery of ionization gauges