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GB2561191B - Apparatus for treating gases and a method of reducing deposition on a surface in such apparatus - Google Patents

Apparatus for treating gases and a method of reducing deposition on a surface in such apparatus Download PDF

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Publication number
GB2561191B
GB2561191B GB1705401.6A GB201705401A GB2561191B GB 2561191 B GB2561191 B GB 2561191B GB 201705401 A GB201705401 A GB 201705401A GB 2561191 B GB2561191 B GB 2561191B
Authority
GB
United Kingdom
Prior art keywords
treating gases
reducing deposition
deposition
reducing
gases
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB1705401.6A
Other versions
GB201705401D0 (en
GB2561191A (en
Inventor
Michael Price Duncan
Peter Knight Gary
James Seeley Andrew
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB1705401.6A priority Critical patent/GB2561191B/en
Publication of GB201705401D0 publication Critical patent/GB201705401D0/en
Publication of GB2561191A publication Critical patent/GB2561191A/en
Application granted granted Critical
Publication of GB2561191B publication Critical patent/GB2561191B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/06—Spray cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/02—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath
    • B01D47/027—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath by directing the gas to be cleaned essentially tangential to the liquid surface

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treating Waste Gases (AREA)
GB1705401.6A 2017-04-04 2017-04-04 Apparatus for treating gases and a method of reducing deposition on a surface in such apparatus Active GB2561191B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1705401.6A GB2561191B (en) 2017-04-04 2017-04-04 Apparatus for treating gases and a method of reducing deposition on a surface in such apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1705401.6A GB2561191B (en) 2017-04-04 2017-04-04 Apparatus for treating gases and a method of reducing deposition on a surface in such apparatus

Publications (3)

Publication Number Publication Date
GB201705401D0 GB201705401D0 (en) 2017-05-17
GB2561191A GB2561191A (en) 2018-10-10
GB2561191B true GB2561191B (en) 2020-08-26

Family

ID=58682681

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1705401.6A Active GB2561191B (en) 2017-04-04 2017-04-04 Apparatus for treating gases and a method of reducing deposition on a surface in such apparatus

Country Status (1)

Country Link
GB (1) GB2561191B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113737195B (en) * 2021-08-26 2025-07-25 河南恒星科技股份有限公司 Pickling and sweeping device for steel wire pretreatment
JP2025092973A (en) * 2023-12-11 2025-06-23 株式会社荏原製作所 Exhaust gas treatment equipment

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998029181A1 (en) * 1996-12-31 1998-07-09 Atmi Ecosys Corporation Effluent gas stream treatment system for oxidation treatment of semiconductor manufacturing effluent gases
US6423284B1 (en) * 1999-10-18 2002-07-23 Advanced Technology Materials, Inc. Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998029181A1 (en) * 1996-12-31 1998-07-09 Atmi Ecosys Corporation Effluent gas stream treatment system for oxidation treatment of semiconductor manufacturing effluent gases
US6423284B1 (en) * 1999-10-18 2002-07-23 Advanced Technology Materials, Inc. Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases

Also Published As

Publication number Publication date
GB201705401D0 (en) 2017-05-17
GB2561191A (en) 2018-10-10

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