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GB201705401D0 - Apparatus for treating gases and a method or reducing deposition on a surface in such apparatus - Google Patents

Apparatus for treating gases and a method or reducing deposition on a surface in such apparatus

Info

Publication number
GB201705401D0
GB201705401D0 GBGB1705401.6A GB201705401A GB201705401D0 GB 201705401 D0 GB201705401 D0 GB 201705401D0 GB 201705401 A GB201705401 A GB 201705401A GB 201705401 D0 GB201705401 D0 GB 201705401D0
Authority
GB
United Kingdom
Prior art keywords
treating gases
reducing deposition
deposition
reducing
gases
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GBGB1705401.6A
Other versions
GB2561191B (en
GB2561191A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB1705401.6A priority Critical patent/GB2561191B/en
Publication of GB201705401D0 publication Critical patent/GB201705401D0/en
Publication of GB2561191A publication Critical patent/GB2561191A/en
Application granted granted Critical
Publication of GB2561191B publication Critical patent/GB2561191B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/02—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath
    • B01D47/027—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath by directing the gas to be cleaned essentially tangential to the liquid surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/06—Spray cleaning

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treating Waste Gases (AREA)
GB1705401.6A 2017-04-04 2017-04-04 Apparatus for treating gases and a method of reducing deposition on a surface in such apparatus Active GB2561191B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1705401.6A GB2561191B (en) 2017-04-04 2017-04-04 Apparatus for treating gases and a method of reducing deposition on a surface in such apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1705401.6A GB2561191B (en) 2017-04-04 2017-04-04 Apparatus for treating gases and a method of reducing deposition on a surface in such apparatus

Publications (3)

Publication Number Publication Date
GB201705401D0 true GB201705401D0 (en) 2017-05-17
GB2561191A GB2561191A (en) 2018-10-10
GB2561191B GB2561191B (en) 2020-08-26

Family

ID=58682681

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1705401.6A Active GB2561191B (en) 2017-04-04 2017-04-04 Apparatus for treating gases and a method of reducing deposition on a surface in such apparatus

Country Status (1)

Country Link
GB (1) GB2561191B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113737195A (en) * 2021-08-26 2021-12-03 河南恒星科技股份有限公司 A pickling and purging device for steel wire pretreatment

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2025092973A (en) * 2023-12-11 2025-06-23 株式会社荏原製作所 Exhaust gas treatment equipment

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3648539B2 (en) * 1996-12-31 2005-05-18 アドバンスド．テクノロジー．マテリアルス．インコーポレイテッド Exhaust flow treatment system for oxidation treatment of semiconductor manufacturing exhaust
US6423284B1 (en) * 1999-10-18 2002-07-23 Advanced Technology Materials, Inc. Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113737195A (en) * 2021-08-26 2021-12-03 河南恒星科技股份有限公司 A pickling and purging device for steel wire pretreatment

Also Published As

Publication number Publication date
GB2561191B (en) 2020-08-26
GB2561191A (en) 2018-10-10

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