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GB2376938B - A transfer system and apparatus for workpiece containers and method of transfe rring the workpiece containers using the same - Google Patents

A transfer system and apparatus for workpiece containers and method of transfe rring the workpiece containers using the same

Info

Publication number
GB2376938B
GB2376938B GB0220466A GB0220466A GB2376938B GB 2376938 B GB2376938 B GB 2376938B GB 0220466 A GB0220466 A GB 0220466A GB 0220466 A GB0220466 A GB 0220466A GB 2376938 B GB2376938 B GB 2376938B
Authority
GB
United Kingdom
Prior art keywords
workpiece containers
transfe
rring
same
transfer system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0220466A
Other versions
GB0220466D0 (en
GB2376938A (en
Inventor
Ki-Sang Kim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020010004086A external-priority patent/KR100364316B1/en
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Priority claimed from GB0108760A external-priority patent/GB2362373B/en
Publication of GB0220466D0 publication Critical patent/GB0220466D0/en
Publication of GB2376938A publication Critical patent/GB2376938A/en
Application granted granted Critical
Publication of GB2376938B publication Critical patent/GB2376938B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H10P72/3408—
GB0220466A 2000-04-12 2001-04-06 A transfer system and apparatus for workpiece containers and method of transfe rring the workpiece containers using the same Expired - Fee Related GB2376938B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR20000019374 2000-04-12
KR1020010004086A KR100364316B1 (en) 2000-04-12 2001-01-29 unmanned transferring apparatus for workpiece container and method of transferring it with the same
GB0108760A GB2362373B (en) 2000-04-12 2001-04-06 A transfer system and apparatus for workpiece containers and method of transferring the workpiece containers using the same

Publications (3)

Publication Number Publication Date
GB0220466D0 GB0220466D0 (en) 2002-10-09
GB2376938A GB2376938A (en) 2002-12-31
GB2376938B true GB2376938B (en) 2003-07-09

Family

ID=27256142

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0220466A Expired - Fee Related GB2376938B (en) 2000-04-12 2001-04-06 A transfer system and apparatus for workpiece containers and method of transfe rring the workpiece containers using the same

Country Status (1)

Country Link
GB (1) GB2376938B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6443686B1 (en) * 1999-03-05 2002-09-03 Pri Automation, Inc. Material handling and transport system and process
US6748282B2 (en) * 2002-08-22 2004-06-08 Taiwan Semiconductor Manufacturing Co., Ltd Flexible dispatching system and method for coordinating between a manual automated dispatching mode

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5772386A (en) * 1995-03-28 1998-06-30 Jenoptik Ag Loading and unloading station for semiconductor processing installations
US5931631A (en) * 1995-07-10 1999-08-03 Asyst Technologies, Inc. Method and apparatus for vertical transfer of a semiconductor wafer cassette

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5772386A (en) * 1995-03-28 1998-06-30 Jenoptik Ag Loading and unloading station for semiconductor processing installations
US5931631A (en) * 1995-07-10 1999-08-03 Asyst Technologies, Inc. Method and apparatus for vertical transfer of a semiconductor wafer cassette

Also Published As

Publication number Publication date
GB0220466D0 (en) 2002-10-09
GB2376938A (en) 2002-12-31

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20100406