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GB2362373B - A transfer system and apparatus for workpiece containers and method of transferring the workpiece containers using the same - Google Patents

A transfer system and apparatus for workpiece containers and method of transferring the workpiece containers using the same

Info

Publication number
GB2362373B
GB2362373B GB0108760A GB0108760A GB2362373B GB 2362373 B GB2362373 B GB 2362373B GB 0108760 A GB0108760 A GB 0108760A GB 0108760 A GB0108760 A GB 0108760A GB 2362373 B GB2362373 B GB 2362373B
Authority
GB
United Kingdom
Prior art keywords
workpiece containers
transferring
same
transfer system
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0108760A
Other versions
GB2362373A (en
GB0108760D0 (en
Inventor
Ki-Sang Kim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020010004086A external-priority patent/KR100364316B1/en
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Priority to GB0220466A priority Critical patent/GB2376938B/en
Publication of GB0108760D0 publication Critical patent/GB0108760D0/en
Publication of GB2362373A publication Critical patent/GB2362373A/en
Application granted granted Critical
Publication of GB2362373B publication Critical patent/GB2362373B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H10P72/3408—
GB0108760A 2000-04-12 2001-04-06 A transfer system and apparatus for workpiece containers and method of transferring the workpiece containers using the same Expired - Fee Related GB2362373B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0220466A GB2376938B (en) 2000-04-12 2001-04-06 A transfer system and apparatus for workpiece containers and method of transfe rring the workpiece containers using the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20000019374 2000-04-12
KR1020010004086A KR100364316B1 (en) 2000-04-12 2001-01-29 unmanned transferring apparatus for workpiece container and method of transferring it with the same

Publications (3)

Publication Number Publication Date
GB0108760D0 GB0108760D0 (en) 2001-05-30
GB2362373A GB2362373A (en) 2001-11-21
GB2362373B true GB2362373B (en) 2003-03-12

Family

ID=26637824

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0108760A Expired - Fee Related GB2362373B (en) 2000-04-12 2001-04-06 A transfer system and apparatus for workpiece containers and method of transferring the workpiece containers using the same

Country Status (3)

Country Link
JP (1) JP2001354302A (en)
GB (1) GB2362373B (en)
TW (1) TW514618B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1806303A4 (en) * 2004-10-25 2009-07-15 Tokyo Electron Ltd TRANSPORT SYSTEM, SUBSTRATE PROCESSING DEVICE, AND TRANSPORT METHOD
US9209056B2 (en) 2012-10-19 2015-12-08 Inotera Memories, Inc. Overhead buffer device and wafer transport system

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1535143A4 (en) 2002-06-19 2010-05-05 Brooks Automation Inc AUTOMATED MATERIAL HANDLING SYSTEM FOR HANDLING SEMICONDUCTORS USING A COMBINATION OF VERTICAL CARROUSELS AND AIRCRAFT HOPPERS
KR101510614B1 (en) * 2002-10-11 2015-04-10 무라다기카이가부시끼가이샤 Overhead hoist transport vehicle with overhead hoist
US7410340B2 (en) 2005-02-24 2008-08-12 Asyst Technologies, Inc. Direct tool loading
JP4632091B2 (en) * 2005-08-30 2011-02-16 株式会社ダイフク Goods transport equipment
WO2007056443A2 (en) * 2005-11-07 2007-05-18 Brooks Automation, Inc. Reduced capacity carrier, transport, load port, buffer system
JP2007250196A (en) * 2006-03-13 2007-09-27 Ricoh Co Ltd Conveying device and vacuum process device
KR101841753B1 (en) 2006-08-18 2018-03-23 브룩스 오토메이션 인코퍼레이티드 Reduced capacity carrier, transport, load port, buffer system
JP5381054B2 (en) * 2008-12-02 2014-01-08 シンフォニアテクノロジー株式会社 Load port
JP5365303B2 (en) * 2009-03-30 2013-12-11 株式会社Ｉｈｉ Traveling vehicle system
JP6047850B2 (en) * 2012-08-10 2016-12-21 村田機械株式会社 Article supply system
JP2016535710A (en) * 2013-10-23 2016-11-17 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Universal part lift device, assembly, and electronic device manufacturing method
JP6556044B2 (en) * 2015-12-14 2019-08-07 鹿島建設株式会社 Mobile production equipment room and production system
DE102016124876B4 (en) 2016-12-19 2025-10-16 Concept Laser Gmbh System for additive manufacturing of three-dimensional objects
TWI631047B (en) * 2017-03-01 2018-08-01 台灣積體電路製造股份有限公司 Automatic bag unpacking system and automatic bag unpacking method
CN107369641B (en) * 2017-08-23 2025-01-17 湖南艾博特机器人技术有限公司 Intelligent conveying system for flower basket carrying of photovoltaic silicon crystal battery piece
TWM564029U (en) * 2018-02-02 2018-07-21 盟立自動化股份有限公司 Automation transport layout system
US11989027B2 (en) * 2018-04-09 2024-05-21 Lam Research Corporation Dual-mode autonomous guided vehicle
CN111760802A (en) * 2020-07-08 2020-10-13 山东睿基微智能科技有限责任公司 Rail guided trolley for logistics sorting and logistics sorting system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2264284A (en) * 1992-02-24 1993-08-25 Gd Spa Robotized unit for transporting items on pallets
JPH11214476A (en) * 1998-01-20 1999-08-06 Ishikawa Seisakusho Ltd Pod supply device in semiconductor manufacturing equipment
WO2000037338A1 (en) * 1998-12-18 2000-06-29 Asyst Technologies, Inc. Integrated intra-bay transfer, storage and delivery system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2264284A (en) * 1992-02-24 1993-08-25 Gd Spa Robotized unit for transporting items on pallets
JPH11214476A (en) * 1998-01-20 1999-08-06 Ishikawa Seisakusho Ltd Pod supply device in semiconductor manufacturing equipment
WO2000037338A1 (en) * 1998-12-18 2000-06-29 Asyst Technologies, Inc. Integrated intra-bay transfer, storage and delivery system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1806303A4 (en) * 2004-10-25 2009-07-15 Tokyo Electron Ltd TRANSPORT SYSTEM, SUBSTRATE PROCESSING DEVICE, AND TRANSPORT METHOD
US8025473B2 (en) 2004-10-25 2011-09-27 Tokyo Electron Limited Carrying system, substrate treating device, and carrying method
US9209056B2 (en) 2012-10-19 2015-12-08 Inotera Memories, Inc. Overhead buffer device and wafer transport system

Also Published As

Publication number Publication date
TW514618B (en) 2002-12-21
JP2001354302A (en) 2001-12-25
GB2362373A (en) 2001-11-21
GB0108760D0 (en) 2001-05-30

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20100406