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GB1475671A - Positioning device - Google Patents

Positioning device

Info

Publication number
GB1475671A
GB1475671A GB5211774A GB5211774A GB1475671A GB 1475671 A GB1475671 A GB 1475671A GB 5211774 A GB5211774 A GB 5211774A GB 5211774 A GB5211774 A GB 5211774A GB 1475671 A GB1475671 A GB 1475671A
Authority
GB
United Kingdom
Prior art keywords
base
coupling member
doubling
dec
deflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5211774A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektromat VEB
Original Assignee
Elektromat VEB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektromat VEB filed Critical Elektromat VEB
Publication of GB1475671A publication Critical patent/GB1475671A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B23Q1/36—Springs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2044—Cantilevers, i.e. having one fixed end having multiple segments mechanically connected in series, e.g. zig-zag type
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R17/00—Piezoelectric transducers; Electrostrictive transducers
    • H04R17/04—Gramophone pick-ups using a stylus; Recorders using a stylus
    • H04R17/08—Gramophone pick-ups using a stylus; Recorders using a stylus signals being recorded or played back by vibration of a stylus in two orthogonal directions simultaneously

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

1475671 Piezoelectric positioning systems ELEKTROMAT VEB 2 Dec 1974 [4 Dec 1973] 52117/74 Heading H2A A piezoelectric positioning system comprises a bending element formed by two adhesively bonded piezoceramic plates. In the arrangement shown, a deflection element 2 comprises two adhesively bonded piezoceramic plates 6, a central electrode 9, and two outer electrodes 8, and has its ends supported in two blocks 3 mounted on a rigid base 5 by means of two leaf springs 4, and the electrodes are energized to cause the element to bend, thereby to move a coupling member 7 relative to the base 5. In the system of Fig. 2 (not shown), the deflection element (2) is mounted at one end only and the coupling member (7) is located at the other end. The system of Fig. 1 may be mounted as in Fig. 3A (not shown) with the base (5) fixed to a foundation (12), and with the coupling member (7) joined to a movable locating table (11), or as in Fig. 3B (not shown) wherein the base (5) is connected to a coarse adjusting device (13). The embodiments of Figs. 5A-5D (not shown) each include two deflection elements (2) either for doubling the displacement obtainable with one element (Figs. 5A, 5C), or for doubling the force obtainable with one element (Figs. 5B, 5D).
GB5211774A 1973-12-04 1974-12-02 Positioning device Expired GB1475671A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD175094A DD108172A1 (en) 1973-12-04 1973-12-04

Publications (1)

Publication Number Publication Date
GB1475671A true GB1475671A (en) 1977-06-01

Family

ID=5493722

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5211774A Expired GB1475671A (en) 1973-12-04 1974-12-02 Positioning device

Country Status (6)

Country Link
CS (1) CS175816B1 (en)
DD (1) DD108172A1 (en)
DE (1) DE2452068A1 (en)
FR (1) FR2253281A1 (en)
GB (1) GB1475671A (en)
SU (1) SU646385A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3048631A1 (en) * 1980-12-23 1982-07-22 Siemens AG, 1000 Berlin und 8000 München ACTUATOR WITH PIEZOCERAMIC BODY
US4404502A (en) 1980-12-23 1983-09-13 Siemens Aktiengesellschaft Energy saving circuit arrangement for a piezoelectric positioning element
US4512036A (en) * 1980-02-04 1985-04-16 Herzl Laor Piezoelectric apparatus for positioning optical fibers

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4520570A (en) * 1983-12-30 1985-06-04 International Business Machines Corporation Piezoelectric x-y-positioner
US4607461A (en) * 1984-12-10 1986-08-26 Charles Adams Accurate positioning apparatus
DE3509240A1 (en) * 1985-03-14 1986-09-18 Traub GmbH Maschinenfabrik, 7313 Reichenbach DRIVE DEVICE FOR A TOOL CUTTER
US5170277A (en) * 1988-05-11 1992-12-08 Symbol Technologies, Inc. Piezoelectric beam deflector

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4512036A (en) * 1980-02-04 1985-04-16 Herzl Laor Piezoelectric apparatus for positioning optical fibers
US4543663A (en) * 1980-02-04 1985-09-24 Herzl Laor Piezoelectric apparatus for positioning optical fibers
US4580292A (en) * 1980-02-04 1986-04-01 Herzl Laor Communications exchange
US4651343A (en) * 1980-02-04 1987-03-17 Herzl Laor Piezoelectric apparatus for positioning optical fibers
DE3048631A1 (en) * 1980-12-23 1982-07-22 Siemens AG, 1000 Berlin und 8000 München ACTUATOR WITH PIEZOCERAMIC BODY
US4404502A (en) 1980-12-23 1983-09-13 Siemens Aktiengesellschaft Energy saving circuit arrangement for a piezoelectric positioning element
US4423347A (en) 1980-12-23 1983-12-27 Siemens Aktiengesellschaft Positioning element with a piezo-ceramic body

Also Published As

Publication number Publication date
DE2452068A1 (en) 1975-06-05
SU646385A1 (en) 1979-02-05
DD108172A1 (en) 1974-09-05
CS175816B1 (en) 1977-05-31
FR2253281A1 (en) 1975-06-27

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee