GB1320594A - Manufacture of semi-conductor devices - Google Patents
Manufacture of semi-conductor devicesInfo
- Publication number
- GB1320594A GB1320594A GB4567471A GB4567471A GB1320594A GB 1320594 A GB1320594 A GB 1320594A GB 4567471 A GB4567471 A GB 4567471A GB 4567471 A GB4567471 A GB 4567471A GB 1320594 A GB1320594 A GB 1320594A
- Authority
- GB
- United Kingdom
- Prior art keywords
- manufacture
- film
- electrodes
- sept
- semi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H10W20/40—
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D99/00—Subject matter not provided for in other groups of this subclass
-
- H10P95/00—
Landscapes
- Electrodes Of Semiconductors (AREA)
- Formation Of Insulating Films (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
1320594 Electrode deposition for semiconductor devices SIEMENS AG 30 Sept 1971 [30 Sept 1970] 45674/71 Heading H1K An electrode metal (aluminium, magnesium, or titanium) is vapour deposited onto an insulating film (silica or alumina) on a semiconductor body at a uniform rate sufficiently high that the deposit grows at least 100 A/sec. The body and film may be maintained at a temperature in the range 150-300 C. during the process. The process is used in the manufacture of the gate electrodes of IGFETs or of contact electrodes (which extend also over the film) in diodes and bipolar transistors or of electrodes in integrated circuits.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2047951A DE2047951C3 (en) | 1970-09-30 | 1970-09-30 | Method for manufacturing a semiconductor component |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1320594A true GB1320594A (en) | 1973-06-13 |
Family
ID=5783733
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB4567471A Expired GB1320594A (en) | 1970-09-30 | 1971-09-30 | Manufacture of semi-conductor devices |
Country Status (9)
| Country | Link |
|---|---|
| BE (1) | BE773195A (en) |
| CA (1) | CA922819A (en) |
| CH (1) | CH528820A (en) |
| DE (1) | DE2047951C3 (en) |
| FR (1) | FR2108115B1 (en) |
| GB (1) | GB1320594A (en) |
| IT (1) | IT938833B (en) |
| LU (1) | LU63976A1 (en) |
| NL (1) | NL7111383A (en) |
-
1970
- 1970-09-30 DE DE2047951A patent/DE2047951C3/en not_active Expired
-
1971
- 1971-08-06 CH CH1159871A patent/CH528820A/en not_active IP Right Cessation
- 1971-08-18 NL NL7111383A patent/NL7111383A/xx unknown
- 1971-09-27 IT IT29139/71A patent/IT938833B/en active
- 1971-09-28 CA CA123855A patent/CA922819A/en not_active Expired
- 1971-09-28 LU LU63976D patent/LU63976A1/xx unknown
- 1971-09-28 BE BE773195A patent/BE773195A/en unknown
- 1971-09-29 FR FR7135096A patent/FR2108115B1/fr not_active Expired
- 1971-09-30 GB GB4567471A patent/GB1320594A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CA922819A (en) | 1973-03-13 |
| NL7111383A (en) | 1972-04-05 |
| FR2108115B1 (en) | 1977-04-22 |
| IT938833B (en) | 1973-02-10 |
| LU63976A1 (en) | 1972-03-01 |
| CH528820A (en) | 1972-09-30 |
| FR2108115A1 (en) | 1972-05-12 |
| DE2047951B2 (en) | 1979-06-13 |
| DE2047951C3 (en) | 1980-02-14 |
| BE773195A (en) | 1972-01-17 |
| DE2047951A1 (en) | 1972-04-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PLNP | Patent lapsed through nonpayment of renewal fees |