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GB1292489A - Improvements in or relating to vacuum pumps - Google Patents

Improvements in or relating to vacuum pumps

Info

Publication number
GB1292489A
GB1292489A GB26657/70A GB2665770A GB1292489A GB 1292489 A GB1292489 A GB 1292489A GB 26657/70 A GB26657/70 A GB 26657/70A GB 2665770 A GB2665770 A GB 2665770A GB 1292489 A GB1292489 A GB 1292489A
Authority
GB
United Kingdom
Prior art keywords
adsorbent
valve
chamber
reservoir
liquid nitrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB26657/70A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Publication of GB1292489A publication Critical patent/GB1292489A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Sorption Type Refrigeration Machines (AREA)

Abstract

1292489 Vacuum pumps L'AIR LIQUIDE SOC ANON POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE 2 June 1970 [1 Dec 1969] 26657/70 Heading F1N A cryosorption pump comprises annular adsorbent filled pumping chambers 50, 63 connected by ducts 57, 59, 65 to a chamber to be evacuated and cooled by liquid nitrogen supplied to an outer reservoir 40 connected by a passage 39 to an inner reservoir 46. At the commencement of pumping the liquid nitrogen is prevented from entering the reservoir 46 by air trapped therein. Thus with valves 58, 66 open, the ducts 57, 59, 65 and the chamber 63 are partially evacuated by the cooled adsorbent 61 in the chamber 50. Thence the liquid nitrogen is allowed to enter the reservoir 46 by opening a vent valve 73 to release the trapped air. Simultaneously the valve 66 is closed and the valve 60 opened, whereby evacuation of the connected chamber is effected by the adsorbent 61. A higher vacuum is obtained by closing the valve 58 and opening the valve 66 whereby the adsorbent 67 takes over the evacuation. To improve heat transfer between the nitrogen and the adsorbent, radial fins (80) extend into the adsorbent 67 and a plurality of externally finned tubes 56 pass through the adsorbent 61. Further adsorbent filled chambers may be provided and allowed to pump simultaneously with, or after, pumping by the adsorbent 67.
GB26657/70A 1969-12-01 1970-06-02 Improvements in or relating to vacuum pumps Expired GB1292489A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR6941309A FR2048253A5 (en) 1969-12-01 1969-12-01

Publications (1)

Publication Number Publication Date
GB1292489A true GB1292489A (en) 1972-10-11

Family

ID=9043866

Family Applications (1)

Application Number Title Priority Date Filing Date
GB26657/70A Expired GB1292489A (en) 1969-12-01 1970-06-02 Improvements in or relating to vacuum pumps

Country Status (6)

Country Link
US (1) US3668881A (en)
JP (1) JPS5027205B1 (en)
CA (1) CA926639A (en)
DE (1) DE2024991A1 (en)
FR (1) FR2048253A5 (en)
GB (1) GB1292489A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4979369A (en) * 1988-03-10 1990-12-25 Larin Marxen P Cryogenic sorption pump

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2114039A5 (en) * 1970-11-13 1972-06-30 Air Liquide
BE791888A (en) * 1971-11-26 1973-05-24 Air Liquide CRYOPUMPING DEVICE
FR2321609A1 (en) * 1975-08-22 1977-03-18 Air Liquide REGENERATION CRYOPUMP
USRE31665E (en) * 1980-04-01 1984-09-11 Cvi Incorporated Cryopump apparatus
US4275566A (en) * 1980-04-01 1981-06-30 Pennwalt Corporation Cryopump apparatus
US4580404A (en) * 1984-02-03 1986-04-08 Air Products And Chemicals, Inc. Method for adsorbing and storing hydrogen at cryogenic temperatures
DE3729517A1 (en) * 1987-09-03 1989-03-16 Siemens Ag ADSORPTION DEVICE FOR GAS SEPARATION
SU1698481A1 (en) * 1987-12-17 1991-12-15 Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср Cryogenic adsorption pump
US5041147A (en) * 1989-07-14 1991-08-20 The United States Of America As Represented By The United States Department Of Energy Hydrogen isotope separation utilizing bulk getters
AT398849B (en) * 1992-09-08 1995-02-27 Sitte Hellmuth CHAMBER FOR FREEZING DRYING BY CRYOSORPTION
AU2591297A (en) * 1996-03-26 1997-10-17 Saes Pure Gas, Inc. Combination cryopump/getter pump and method for regenerating same
US6010762A (en) * 1998-01-15 2000-01-04 Cabot Corporation Self-evacuating vacuum insulation panels
US6154478A (en) * 1998-06-30 2000-11-28 The Boeing Company Chemical oxygen-iodine laser (coil)/cryosorption vacuum pump system
FR2807505B1 (en) * 2000-04-07 2002-06-14 Air Liquide LIQUID-GAS DISPENSER FOR MATERIAL AND / OR HEAT EXCHANGE COLUMN, AND COLUMN USING SUCH A DISPENSER
US6650681B1 (en) 2000-04-25 2003-11-18 The Boeing Company Sealed exhaust chemical oxygen-iodine laser system
US6621848B1 (en) 2000-04-25 2003-09-16 The Boeing Company SECOIL reprocessing system
WO2006025910A1 (en) * 2004-06-12 2006-03-09 Auburn University Cryogenic adsorption pump for the collection of airborne gases, particles, organic molecules and micro-organisms
DE102005039795B4 (en) * 2005-08-22 2007-07-26 Bruker Biospin Ag Cooling device for generating a cold gas stream
US7841259B2 (en) * 2006-12-27 2010-11-30 Baker Hughes Incorporated Methods of forming bit bodies
US20080229928A1 (en) * 2007-03-20 2008-09-25 Urbahn John A Sorption pump with integrated thermal switch
CN101688705B (en) * 2007-06-22 2012-09-05 高级技术材料公司 Component for solar adsorption refrigeration system and method of making such component
JP6418957B2 (en) * 2015-01-15 2018-11-07 株式会社神戸製鋼所 Permanent current switch and superconducting device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3335550A (en) * 1964-04-24 1967-08-15 Union Carbide Corp Cryosorption apparatus
US3371499A (en) * 1966-11-02 1968-03-05 Union Carbide Corp Cryosorption vacuum pumping system
US3387767A (en) * 1966-12-07 1968-06-11 Nat Res Corp High vacuum pump with cryosorption pumping element
US3490247A (en) * 1968-01-24 1970-01-20 Perkin Elmer Corp Sorption pump roughing system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4979369A (en) * 1988-03-10 1990-12-25 Larin Marxen P Cryogenic sorption pump

Also Published As

Publication number Publication date
CA926639A (en) 1973-05-22
DE2024991A1 (en) 1971-06-24
FR2048253A5 (en) 1971-03-19
JPS5027205B1 (en) 1975-09-05
US3668881A (en) 1972-06-13

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees