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GB1143277A - Cryosorption vacuum pumping system - Google Patents

Cryosorption vacuum pumping system

Info

Publication number
GB1143277A
GB1143277A GB49539/67A GB4953967A GB1143277A GB 1143277 A GB1143277 A GB 1143277A GB 49539/67 A GB49539/67 A GB 49539/67A GB 4953967 A GB4953967 A GB 4953967A GB 1143277 A GB1143277 A GB 1143277A
Authority
GB
United Kingdom
Prior art keywords
adsorbent
gas
reservoir
conduit
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB49539/67A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Union Carbide Corp
Original Assignee
Union Carbide Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Union Carbide Corp filed Critical Union Carbide Corp
Publication of GB1143277A publication Critical patent/GB1143277A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D31/00—Other cooling or freezing apparatus

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

1,143,277. Vacuum pumps. UNION CARBIDE CORP. Nov.1, 1967 [Nov. 2, 1966], No.49539/67. Heading F1N. A vacuum pump comprises a gas-tight casing 14 having an inlet port 30 for gas to be pumped by adsorbent material 15 therein, the adsorbent being cooled by evaporating liquid refrigerant passed from a reservoir 17 through finned heat exchange tubes 16 disposed in the adsorbent and venting to the reservoir above the level of liquid therein. The reservoir is filled with liquid through a conduit 18, and a porous packing 28 therein separates particles of liquid entrained in the gas passing out from the reservoir through conduits 22. The adsorbent is preferably pellets of zeolite confined by screen material 23 to provide a vacuum space 24 in communication with a vacuum jacket between the casing 14 and a shield 25. The adsorbent is reactivated by supplying heated gas to a conduit 40 in communication with the tubes 16 while supplying dry purge gas through a conduit 42 having discharge openings within the adsorbent.
GB49539/67A 1966-11-02 1967-11-01 Cryosorption vacuum pumping system Expired GB1143277A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US591552A US3371499A (en) 1966-11-02 1966-11-02 Cryosorption vacuum pumping system

Publications (1)

Publication Number Publication Date
GB1143277A true GB1143277A (en) 1969-02-19

Family

ID=24366927

Family Applications (1)

Application Number Title Priority Date Filing Date
GB49539/67A Expired GB1143277A (en) 1966-11-02 1967-11-01 Cryosorption vacuum pumping system

Country Status (3)

Country Link
US (1) US3371499A (en)
DE (1) DE1539159B2 (en)
GB (1) GB1143277A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5014517A (en) * 1988-03-10 1991-05-14 Larin Marxen P Cryogenic sorption pump

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3435624A (en) * 1967-10-31 1969-04-01 United Aircraft Corp Dual temperature cold trap
US3464223A (en) * 1967-12-28 1969-09-02 Us Army Trap pump for vacuum system
US3490247A (en) * 1968-01-24 1970-01-20 Perkin Elmer Corp Sorption pump roughing system
FR2048253A5 (en) * 1969-12-01 1971-03-19 Air Liquide
FR2146100B2 (en) * 1971-07-16 1974-03-29 Air Liquide
BE791888A (en) * 1971-11-26 1973-05-24 Air Liquide CRYOPUMPING DEVICE
NL7601906A (en) * 1976-02-25 1977-08-29 Philips Nv CYCLIC DESORPTION COOLING MACHINE RESP. - HEAT PUMP.
FR2489101B1 (en) * 1980-08-29 1986-04-11 Blaizat Claude METHOD AND DEVICE FOR REFRIGERATION OF A PARTICULARLY AGRICULTURAL PRODUCT
US4718240A (en) * 1985-03-01 1988-01-12 Helix Technology Corporation Cryopump regeneration method and apparatus
SU1698481A1 (en) * 1987-12-17 1991-12-15 Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср Cryogenic adsorption pump
DE4017213C1 (en) * 1990-05-29 1991-05-23 Bruker Analytische Messtechnik Gmbh, 7512 Rheinstetten, De
US5806319A (en) * 1997-03-13 1998-09-15 Wary; John Method and apparatus for cryogenically cooling a deposition chamber
US6367267B1 (en) * 2000-09-22 2002-04-09 Applied Epi, Inc. Integrated phase separator for ultra high vacuum system
US6718775B2 (en) 2002-07-30 2004-04-13 Applied Epi, Inc. Dual chamber cooling system with cryogenic and non-cryogenic chambers for ultra high vacuum system

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1285415A (en) * 1918-03-16 1918-11-19 Paul Schou Vacuum-cooler with interior absorption.
GB1008740A (en) * 1959-02-20 1965-11-03 Secr Aviation Refrigeration unit
US3199343A (en) * 1961-10-12 1965-08-10 Childs James Howard Electric propulsion engine test chamber
FR1387162A (en) * 1963-12-12 1965-01-29 Comp Generale Electricite Liquefied gas storage device
US3197973A (en) * 1964-10-14 1965-08-03 United Aircraft Corp Refrigeration system with sublimator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5014517A (en) * 1988-03-10 1991-05-14 Larin Marxen P Cryogenic sorption pump

Also Published As

Publication number Publication date
US3371499A (en) 1968-03-05
DE1539159A1 (en) 1970-09-10
DE1539159B2 (en) 1971-01-14

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