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GB1284008A - Improvements in or relating to the non-crucible zone melting of a crystalline rod - Google Patents

Improvements in or relating to the non-crucible zone melting of a crystalline rod

Info

Publication number
GB1284008A
GB1284008A GB56827/70A GB5682770A GB1284008A GB 1284008 A GB1284008 A GB 1284008A GB 56827/70 A GB56827/70 A GB 56827/70A GB 5682770 A GB5682770 A GB 5682770A GB 1284008 A GB1284008 A GB 1284008A
Authority
GB
United Kingdom
Prior art keywords
rod
plane
coil
holders
windings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB56827/70A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of GB1284008A publication Critical patent/GB1284008A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/911—Seed or rod holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1068—Seed pulling including heating or cooling details [e.g., shield configuration]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/1088—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone including heating or cooling details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)
  • General Induction Heating (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

1284008 Zone melting SIEMENS AG 30 Nov 1970 [29 Nov 1969] 56827/70 Heading B1S In crucible-fibre zone-melting apparatus comprising a crystalline rod, and two rod holders, of which at least one is rotatable about its longitudinal axis and the longitudinal axis of the other is surrounded by a flat inductionheating coil, the normal to the plane of the windings of the coil makes an acute angle with the longitudinal axes of the rod holders. In the figure, normal 10a to the plane of coil 10 makes an acute angle α with longitudinal axes 5a, 6a of holders 5, 6, supporting silicon rod 2 to be melted. The preferred range for α is 0.5‹ to 3‹. In a preferred embodiment, one rod holder is moved laterally after the initial production of a molten zone to a position in which line of intersection of the plane including the longitudinal axes of the rod holders with the plane of the windings of the coil makes an acute angle /3 with the longitudinal axis of the stationary rod holder on the side of the windings nearest the laterally moved rod holder.
GB56827/70A 1969-11-29 1970-11-30 Improvements in or relating to the non-crucible zone melting of a crystalline rod Expired GB1284008A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1960088A DE1960088C3 (en) 1969-11-29 1969-11-29 Device for crucible-free zone melting of a crystalline rod

Publications (1)

Publication Number Publication Date
GB1284008A true GB1284008A (en) 1972-08-02

Family

ID=5752523

Family Applications (1)

Application Number Title Priority Date Filing Date
GB56827/70A Expired GB1284008A (en) 1969-11-29 1970-11-30 Improvements in or relating to the non-crucible zone melting of a crystalline rod

Country Status (6)

Country Link
US (1) US3716341A (en)
JP (1) JPS4824601B1 (en)
DE (1) DE1960088C3 (en)
DK (1) DK123280B (en)
FR (1) FR2072242A5 (en)
GB (1) GB1284008A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3520067A1 (en) * 1985-06-04 1986-12-04 Siemens AG, 1000 Berlin und 8000 München Method for producing strip-shaped silicon crystals employing a horizontal pulling direction
KR20040044146A (en) * 2002-11-19 2004-05-27 가부시끼가이샤 도꾸야마 Single crystal pulling apparatus for metal fluoride

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1092576B (en) * 1957-11-15 1960-11-10 Siemens Ag Power supply for the movable heating coil of a crucible-free zone pulling device inside a vessel
US3117859A (en) * 1957-12-30 1964-01-14 Westinghouse Electric Corp Zone refining process
NL126240C (en) * 1958-02-19
DE1208292B (en) * 1963-03-29 1966-01-05 Siemens Ag Device for crucible-free zone melting of semiconductor material
US3260573A (en) * 1963-06-26 1966-07-12 Siemens Ag Zone melting gallium in a recycling arsenic atmosphere
DE1218404B (en) * 1964-02-01 1966-06-08 Siemens Ag Method for crucible-free zone melting of a crystalline rod, in particular a semiconductor rod
FR1482659A (en) * 1965-06-10 1967-05-26 Siemens Ag Device for melting zone without crucible
DE1544301A1 (en) * 1966-09-28 1970-05-27 Siemens Ag Method for crucible-free zone melting of a crystalline rod, in particular a semiconductor rod
US3607109A (en) * 1968-01-09 1971-09-21 Emil R Capita Method and means of producing a large diameter single-crystal rod from a polycrystal bar

Also Published As

Publication number Publication date
US3716341A (en) 1973-02-13
DE1960088A1 (en) 1971-06-03
FR2072242A5 (en) 1971-09-24
DE1960088C3 (en) 1974-07-25
DK123280B (en) 1972-06-05
DE1960088B2 (en) 1973-12-20
JPS4824601B1 (en) 1973-07-23

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee